JP2004128248A - Magnetic blocking member, magnetic shield room, and aligner - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a magnetic blocking member which can easily be installed adaptively to alterations of an opening of a magnetic shield room in such a case as a magnetic blocking member which is installed at the opening to block a disturbing magnetic field. <P>SOLUTION: The magnetic blocking member 1 is formed of a sheet (magnetic shield sheet) with high magnetic permeability and fitted outside or/and inside the opening 5 provided to a wall surface 2 of the magnetic shield room (MSR). This magnetic blocking member 1 has a proper cut in a curtain shape, a reed screen shape, a cloth shape, etc. A cable is drawn in the MSR through the cut. The magnetic blocking member 1 blocks the gap between the cable and the edge of the opening 5 to prevent magnetic field noise from entering through the opening 5. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
Technical field to which the invention pertains and problems to be solved by the invention
The present invention relates to a magnetic shielding member for shielding a disturbance magnetic field and a magnetically shielded room (hereinafter, also referred to simply as MSR). Further, the present invention relates to an exposure apparatus having such an MSR around it and used for lithography of a semiconductor integrated circuit or the like.
[0002]
[Prior art]
In an exposure apparatus using a charged particle beam, an optical column or wafer (sensitive substrate) of the apparatus is used to prevent the charged particle beam from being affected by an electrostatic field or a fluctuating magnetic field generated by geomagnetism, power supply equipment, cables, and the like. A magnetic shield is applied to the chamber and the like. In addition, various measures are taken for a magnetic field generated by components (a wafer loader, a reticle loader, an electromagnetic lens, a vacuum pump, and the like) around the apparatus to control the characteristics of the charged particle beam optical system.
[0003]
As a method of such a magnetic shield, it is common to form a magnetic shield room (MSR) by covering a column of a charged particle beam optical system or a wafer chamber with a single, double or triple magnetic material such as permalloy. It is a target.
[0004]
Generally, an opening is provided on a wall surface of the MSR for passing cables and pipes of equipment installed inside the MSR. When magnetic field noise enters the inside of the MSR through these openings, the magnetic performance inside the MSR deteriorates. For this reason, it is necessary to take measures for preventing intrusion of magnetic field noise from the opening. As such a method, it is common to install a cylinder made of a magnetic material such as permalloy in the opening of the MSR.
[0005]
FIG. 4 is a diagram illustrating an example of a conventional magnetic shielding member (magnetic cylinder) installed in an opening of a magnetic shield room (MSR). FIG. 4A is a plan view of the opening outside the MSR, and FIG. 4B is a cross-sectional view of the opening.
An opening 5 for drawing in the cable 3 is provided in the wall 2 of the MSR shown in FIG. A cylinder 4 made of a magnetic material such as permalloy is installed in the opening 5 so as to penetrate the wall 2, and the length L of the cylinder 4 is, for example, three times or more the opening diameter D. (L ≧ 3D). The magnetic cylinder 4 reduces the incidence of magnetic field noise that enters from the outside and increases the degree of shielding of the MSR from magnetic field noise.
[0006]
By the way, after the MSR is installed, it may be necessary to change cables and pipes due to a change in equipment installed inside the MSR. However, according to the above configuration, it is not easy to change the diameter or the position of the opening. As a result, there is a problem that the usage of the MSR is likely to be limited, for example, the types of equipment installed inside the MSR are limited.
[0007]
[Non-patent document 1]
Kashima, "Shut Out of Magnetic Intrusion that Affects Electronic Devices", [online], January 24, 2001, Kashima, [searched September 30, 2002], Internet <URL: http: // www. kajima. co. jp / news / press / 200101 / 24a1to-j. htm>
[0008]
In view of the above, the present invention relates to a magnetic shielding member to be installed in an opening of a magnetic shield room, the magnetic shielding member having high flexibility in the construction of cables and pipes passing through the opening, and such a magnetic shielding member It is an object of the present invention to provide a magnetically shielded room (MSR) using members.
[0009]
[Means for Solving the Problems]
In order to solve the above problems, a magnetic shielding member according to the present invention is made of a sheet of a high magnetic permeability material, and has a slit or a cut for passing a cable or a pipe.
[0010]
ADVANTAGE OF THE INVENTION According to the magnetic shielding member which concerns on this invention, it becomes possible to respond flexibly to the change of an opening part.
[0011]
The magnetically shielded room (MSR) according to the present invention is a magnetically shielded room having a device installation space in which a disturbance magnetic field is shielded, and an opening for passing cables and pipes is provided in a wall of the magnetically shielded room. A magnetic shielding member made of a sheet of a high magnetic permeability material and having slits or cuts for passing cables and pipes is attached to the opening.
[0012]
ADVANTAGE OF THE INVENTION According to the magnetic shield room (MSR) which concerns on this invention, it can respond flexibly to the change of the diameter or position of an opening accompanying the change of the apparatus installed inside after installing MSR, and it installs inside. The degree of freedom of the device to be used can be improved.
[0013]
An exposure apparatus according to the present invention is an exposure apparatus for selectively irradiating a charged substrate with a charged particle beam to form a device pattern, wherein the magnetic shield room (MSR) is provided around the exposure apparatus body. It is characterized by having been done.
[0014]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Note that the same components are denoted by the same reference numerals, and description thereof will be omitted.
FIG. 1 is a diagram showing a magnetic shield member (magnetic shield sheet) installed in an opening of a magnetic shield room (MSR) according to an embodiment of the present invention. FIG. 1A is a plan view of the opening outside the MSR, and FIG. 1B is a cross-sectional view of the opening.
[0015]
An opening 5 for drawing in the cable 3 is provided in the wall 2 of the MSR shown in FIG. The magnetic shielding member 1 processed into a goodwill shape is attached to the outer wall of the opening 5. The magnetic shielding member 1 is formed of a sheet having a high magnetic permeability (hereinafter, referred to as a magnetic shielding sheet).
The cable 3 is introduced into the MSR through the opening 5. At this time, a gap is generated between the cable 3 and the edge of the opening 5. The magnetic shield sheet 1 is attached so that a portion hanging down in a goodwill shape (details will be described later) closes the gap. As a result, magnetic field noise that enters from outside the MSR can be reduced.
[0016]
According to the present embodiment, the magnetic shield sheet 1 is made of a sheet having a high magnetic permeability, and it is easy to perform processing such as cutting. Therefore, it is possible to flexibly respond to a change in the diameter or the position of the opening.
Further, by using the shield sheet according to the present embodiment, the degree of freedom in designing the MSR can be increased, and furthermore, it is possible to flexibly cope with a change in equipment installed inside the MSR.
[0017]
In FIG. 1, the magnetic shield sheet 1 is attached to the outer wall of the MSR. However, the magnetic shield sheet 1 may be attached to either the outer wall or the inner wall of the MSR, or may be attached to both of them. .
Here, when attaching the magnetic shield sheet to the MSR, the shielding effect against magnetic field noise can be further enhanced by mutually adjusting the cut positions of the magnetic shield sheet.
[0018]
Further, the shape of the magnetic shield sheet 1 is not limited to the goodwill shape shown in FIG. That is, as described below, an appropriate shape can be selected.
FIG. 2 is a plan view showing a specific example of the shape of the magnetic shield sheet 1 according to the present invention.
In the magnetic shield sheet shown in FIG. 2A, an appropriate number of cuts 21a are formed in the longitudinal direction of the sheet in the figure. Only the lower end of the magnetic shield sheet is cut off by the cuts 21a, and the lower part has a strip shape and a hanging goodwill. This is the same shape as the magnetic shield sheet 1 used in the description of FIG.
The magnetic shield sheet shown in FIG. 2B has a suitable number of cuts 21b formed in the longitudinal direction of the sheet in the figure. The magnetic shield sheet has notches 21b formed near the upper and lower ends in the figure, and is shaped like a blind.
The magnetic shield sheet shown in FIG. 2 (C) has cross-shaped (radially) cuts 21c one by one in the vertical and horizontal directions from the center of the sheet in the figure.
[0019]
As the magnetic shield member of the present invention, any of the shapes of the magnetic shield sheet as illustrated in FIG. 2 may be used. In any case, a shape that can reliably shield the magnetic field noise may be selected in consideration of the thickness of the cables and pipes introduced through the opening 5 in FIG.
[0020]
Next, an exposure apparatus using the MSR of the present invention will be described. FIG. 3 is a block diagram showing an exposure apparatus according to one embodiment of the present invention. The exposure apparatus 100 shown in FIG. 3 is an electron beam exposure apparatus that irradiates an electron beam from the electron gun 31 to the reticle 34 and reduces and transfers a device pattern on the reticle 34 to a wafer (sensitive substrate) 40.
[0021]
Hereinafter, the configuration of the exposure apparatus 100 will be described.
An electron gun 31 is arranged at the uppermost stream of the exposure apparatus 100, and the electron gun 31 emits an electron beam downward in FIG. A condenser lens 32 and an illumination lens 33 are provided below the electron gun 31, and the electron beam irradiates the reticle 34 through these lenses 32 and 33.
[0022]
Although not shown, the illumination optical system including the lenses 32 and 33 as main components includes an illumination beam shaping aperture, a blanking deflector, a blanking aperture, an illumination beam deflector, and the like. The illumination beam IB shaped by the illumination optical system is sequentially scanned on the reticle 34 to illuminate each subfield of the reticle 34 within the field of view of the illumination optical system.
[0023]
The reticle 34 has a number of subfields and is mounted on a movable reticle stage 35. By moving the reticle stage 35 on a plane perpendicular to the optical axis, each subfield on the reticle 34 extending over a wider range than the field of view of the illumination optical system is illuminated.
[0024]
Below the reticle 34, a first projection lens 36, a second projection lens 39, and a group of deflectors 37 (37-1 to 37-6) used for aberration correction and image position correction are arranged. The electron beam passing through one subfield of the reticle 34 forms an image at a predetermined position on a wafer (sensitive substrate) 40 by the projection lenses 36 and 39 and the deflector group 37. An appropriate resist is applied on the wafer 40, a dose of an electron beam is given to the resist, and the pattern on the reticle 34 is reduced (for example, １ ／) and transferred onto the wafer 40.
[0025]
The point at which the reticle 34 and the wafer 40 are internally divided at a reduction ratio is a crossover C. O. Are formed, and a contrast opening 38 is provided at the position of the crossover. The opening 38 blocks the electron beam scattered by the non-pattern portion of the reticle 34 from reaching the wafer 40.
[0026]
The wafer 40 is placed on a wafer stage 41 that can move on a plane perpendicular to the optical axis via an electrostatic chuck. By synchronously moving the reticle stage 35 and the wafer stage 41 in directions opposite to each other, each part of the device pattern on the reticle 34 extending outside the field of view of the projection optical system can be sequentially exposed and transferred onto the wafer 40. it can.
[0027]
As shown in FIG. 3, the exposure apparatus 100 is installed inside a rectangular magnetic shield room (MSR) 101. Openings 5a, 5b, 5c are provided in the wall 2 of the MSR 101, and magnetic shield sheets 1a, 1b, 1c are attached to the outside of the openings 5a, 5b, 5c, respectively. The magnetic shield sheets 1a, 1b, and 1c are processed into any appropriate shape illustrated in FIG.
The cables 3a, 3b, and 3c are introduced into the MSR through the openings 5a, 5b, and 5c, respectively, and are connected to required portions of the exposure apparatus 100. The magnetic shield sheets 1a, 1b, and 1c are adjusted so as to close a gap generated between the cables 3a, 3b, and 3c and the peripheral edges of the openings 5a, 5b, and 5c. Is preventing.
[0028]
According to the present embodiment, even when it becomes necessary to change or update various devices constituting the exposure apparatus 100, it is possible to easily change the aperture and the position of the opening.
[0029]
【The invention's effect】
As described above, according to the present invention, magnetic shielding measures are taken using a magnetic shield sheet that is easy to process, so that the aperture and the position of the opening provided in the MSR wall can be flexibly changed. Can respond.
[Brief description of the drawings]
FIG. 1 is a view showing a magnetic shield member (magnetic shield sheet) installed in an opening of a magnetic shield room (MSR) according to an embodiment of the present invention.
(A) It is a top view of the opening outside MSR.
(B) It is sectional drawing of this opening.
FIG. 2 is a plan view showing a specific example of the shape of a magnetic shielding member (magnetic shielding sheet) according to the present invention.
FIG. 3 is a block diagram showing an exposure apparatus according to one embodiment of the present invention.
FIG. 4 is a diagram illustrating an example of a conventional magnetic shielding member (magnetic cylinder) installed in an opening of a magnetic shield room (MSR).
(A) It is a top view of the opening outside MSR.
(B) It is sectional drawing of this opening.
[Explanation of symbols]
1, 1a, 1b, 1c Magnetic shielding member 2 Magnetic shielding room wall 3, 3a, 3b, 3c Cable 5, 5a, 5b, 5c Opening 31 Electron gun 32 Condenser lens 33 Illumination lens 34 Reticle 35 Reticle stage 36 First , 37-6 Deflector 38 Contrast aperture 39 Second projection lens 40 Wafer (sensitive substrate)
41 wafer stage 100 exposure apparatus 101 magnetic shield room

Claims (3)

A magnetic shielding member comprising a sheet of a high magnetic permeability material and having slits or cuts for passing cables and pipes. A magnetically shielded room having a device installation space that shields a disturbance magnetic field inside,
On the wall of the magnetic shield room, an opening for passing cables and piping is provided,
A magnetic shield room, wherein a magnetic shield member made of a sheet of a high magnetic permeability material and having slits or cuts for passing cables and pipes is attached to the opening. An exposure apparatus that selectively irradiates a charged particle beam onto a sensitive substrate to form a device pattern,
An exposure apparatus, wherein the magnetic shield room according to claim 2 is provided around the exposure apparatus body.

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