JP2004123203A - Packaging method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide means enabling a dew formation at a packaged item during its transferring operation to be positively prevented and further enabling to understand whether or not the packaged item is in a stweating state. <P>SOLUTION: A packaging member 6 for use in packaging a packaged item 7 has a dew formation preventing device comprising a body 1 of the dew formation preventing device so as to manage a temperature and a humidity of atmosphere in the packaging member and prevent a dew formation. The dew formation preventing device comprises a surface thermometer 2 electrically connected by a cable to the body 1 of the dew formation preventing device, a first thermometer and humidity meter 3 for use in measuring both a temperature and a humidity of the atmosphere in the packaging member, a second thermometer and humidity meter 4 for use in measuring both a temperature and a humidity of surrounding atmosphere, an alarm unit 5 for informing various kinds of information to an operator and the like, and battery 17. The dew formation preventing device judges whether or not there is a possibility that a dew formation occurs during either a transferring operation or a package opening under the packaged state and improves the atmosphere in the packaging member so as not to cause dew formation. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method for packing (packaging) semiconductor manufacturing / resin sealing devices and electronic components.
[0002]
[Prior art]
2. Description of the Related Art In the field of manufacturing semiconductor devices and electronic components, various devices and components are generally packed in a package and transferred or stored. Conventionally, the method of packing (packaging) semiconductor manufacturing / resin sealing devices, electronic components, and the like (hereinafter, referred to as “packaged body”) has merely been covered with a vinyl sheet or the like (packaged body). For this reason, in winter or the like, an object (hereinafter, referred to as a “package”), which is placed outdoors or in a normal warehouse and in which the packaged object is packed by the package, is cooled by the atmosphere to a low temperature. State.
[0003]
In this state, if the package is transported to a place having a temperature difference from the package (such as a high temperature place) such as a clean room, a sudden change in temperature causes condensation on the surface of the package, As a result, a failure or rust may occur on the substrate, electronic component, or the like, which is the packaged object. For this reason, in such a case, the temperature of the packaged object must be gradually increased by temporarily placing the packaged product in an unpacking room so that dew condensation does not occur. Therefore, there is a problem that it takes time to carry in the packaged object. Therefore, various methods have been proposed for preventing dew condensation on the surface of the package or for dehumidifying the inside of the package (for example, see Patent Documents 1 to 5).
[0004]
[Patent Document 1]
JP 2001-294238 A (Paragraph number [0011], FIG. 2)
[Patent Document 2]
JP-A-2002-122382 (paragraph number [0017], FIG. 1)
[Patent Document 3]
JP-A-6-323603 (paragraph number [0015], FIG. 1)
[Patent Document 4]
JP-A-60-167414 (pages 18 to 19, FIG. 2)
[Patent Document 5]
JP-A-2-139375 (pages 4 and 7)
[0005]
[Problems to be solved by the invention]
However, there is a problem that it is difficult to reliably prevent dew condensation at the time of transfer by the conventional dew condensation prevention method or dehumidification method. Therefore, in order to prevent dew condensation and rust on the surface of the packaged object during transfer, it is conceivable to use a transfer means (for example, a truck) with a temperature controller, but in this case, the transfer cost is extremely high. Is expensive.
[0006]
Further, when packing the packaged object in a package (for example, a vinyl sheet or the like), a countermeasure such as putting a dehumidifier in the package to prevent dew condensation or rust may be considered. However, since the moisture absorbing agent has a low moisture absorbing rate, it takes time to dehumidify the atmosphere in the package. In this case, there is a problem that it is difficult to determine whether or not the packaged body is in a state in which dew condensation does not occur. Until the dehumidification is completed, the package cannot be transported to a place where a rapid change in temperature occurs, so that there is a problem that it takes time to carry in and carry out the packaged object.
[0007]
The present invention has been made in order to solve the above-described conventional problems, and has an object to provide a means capable of reliably preventing dew condensation on a packaged object at the time of transfer or the like, and an object to be solved. I do. It is another object of the present invention to provide a means capable of grasping whether or not a packaged object is in a state in which dew condensation occurs.
[0008]
[Means for Solving the Problems]
The packing method according to the present invention, which has been made to solve the above-mentioned problems, includes: (i) a packing method in which a package is hermetically sealed with a package; A step of packing the prevention device in a package so that a space is formed inside the package; (iii) a step of filling the space with a low-humidity gas; and (iv) measurement by a thermo-hygrometer. When the temperature and humidity values reach a predetermined value, a step of operating the dew condensation device to improve the atmosphere in the package in a direction in which no dew condensation occurs is included. (V) The power supply of the dew condensation prevention device is built in the package. It is characterized by switching between the used battery and an external power supply.
[0009]
Another packing method according to the present invention is: (i) a packing method in which a package is sealed in a package, wherein (ii) the package, a temperature / humidity meter, and a dew-prevention device are provided in a space inside the package. (Iii) filling the space with a low-humidity gas; and (iv) if the value of the temperature and humidity measured by the thermo-hygrometer reaches a predetermined value. Operating the anti-condensation device to improve the atmosphere in the package so that no dew condensation occurs; and (v) measuring the temperature and humidity outside the package and opening the package according to the measured values. Adjusting the temperature and humidity inside the package so that no dew condensation occurs even when the adjustment is completed, and displaying the completion of the adjustment.
[0010]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings.
Embodiment 1 FIG.
FIG. 1 is a perspective view of a package (package) in which a packaged object (for example, a semiconductor manufacturing / resin sealing device, an electronic component, or the like) is packed (packaged) in the package by the packaging method according to the present invention. . FIG. 2 shows the internal configuration of a dew condensation preventing device attached to the package shown in FIG. 1 for preventing dew condensation in the atmosphere inside the package. In this specification, the term “packing method” is a concept that includes a method of packing an object to be packed and a method of unpacking the packed object.
[0011]
As shown in FIG. 1, the dew condensation preventing device is provided with an electrically operated dew condensation preventing device main body 1. Further, the dew-condensing device includes a surface thermometer 2 electrically connected to the dew-condensing device main body 1 by using a cable (conductive wire) for measuring the temperature of the surface of the packaged object, and the temperature of the atmosphere in the package. A first thermo-hygrometer 3 for measuring the temperature and humidity, a second thermo-hygrometer 4 for measuring the temperature and humidity of the outside air (atmosphere outside the package), and predetermined information (for example, a state where the occurrence of leaks and condensation easily occurs). And the like, and an alarm unit 5 (for example, an LED, a buzzer, etc.) for notifying an operator or the like of the occurrence of an alarm, and a battery 17.
[0012]
Here, the dew condensation preventing device main body 1, the surface thermometer 2, the first thermo-hygrometer 3, and the battery 17 are housed in a space in the package 6. The surface thermometer 2 is attached to a plurality of (of course, one) portions on the surface of the package 7. On the other hand, the second thermo-hygrometer 4 and the alarm unit 5 are provided outside the package 6. The power supply of the dew condensation prevention device main body 1 that operates by electricity can be arbitrarily switched between the battery 17 and an external power supply according to the situation in which the package is placed. For example, the external power supply can be used if the connection with the external power supply is easy, and the battery 17 can be used if the connection with the external power supply is difficult or impossible.
[0013]
A gas for introducing a low-humidity gas (for example, low-humidity air or an inert gas) into the inside of the package 6 (space portion) is provided on one side surface (the right side surface in FIG. 1) of the package 6. An inlet 8 is provided, and a gas outlet 9 for discharging the gas in the package 6 to the outside is provided on a side surface (the left side surface in FIG. 1) opposite to the side surface.
[0014]
Hereinafter, the internal configuration of the dew condensation preventing device main body 1 will be described.
As shown in FIG. 2, a first operation circuit 10 and a second operation circuit 11 are provided in the dew condensation preventing device main body 1. The temperature and humidity of the outside air measured by the second thermometer / humidity meter 4 are input to the first calculation circuit 10, and the first calculation circuit 10 calculates the dew point temperature of the outside air from the temperature and the humidity. On the other hand, the temperature and the humidity of the space inside the package measured by the first thermo-hygrometer 3 are input to the second arithmetic circuit 11, and the second arithmetic circuit 11 Calculate the dew point temperature of the space (atmosphere inside the package).
[0015]
The dew point temperatures calculated by the first and second calculation circuits 10 and 11 are sent to the first and second comparison circuits 14 and 15 via the first and second addition and subtraction circuits 12 and 13, respectively. The first and second comparison circuits 14 and 15 also receive the surface temperature of the package 7 measured by the surface thermometer 2. The functions of the first and second addition / subtraction circuits 12 and 13 and the first and second comparison circuits 14 and 15 will be described later. Further, a third arithmetic circuit 16 is provided in the dew condensation preventing device main body 1, and the temperature and humidity of the space inside the package measured by the first thermo-hygrometer 3 are input to the third arithmetic circuit 16. You. As will be described later, the third arithmetic circuit 16 determines whether or not there is a leak in the space of the sealed package 6.
[0016]
Hereinafter, the packing method according to the first embodiment will be specifically described with reference to FIGS. 1 and 2.
In the package 6 (for example, a moisture-resistant sheet or the like), the condensation prevention device main body 1, the surface thermometer 2, the temperature and humidity meters 3, 4, the alarm unit 5, and the battery 17 are set in advance. . When packing the package 7 with the package 6, first, the package 7 is housed in the package 6 (space portion), and a surface thermometer is placed on a predetermined portion of the surface of the package 7. Attach 2. As is clear from FIG. 1, the space in the package 6 is not completely filled with the package 7, and a considerable space (that is, the space between the package 6 and the package 7) The atmosphere in the package remains.
[0017]
Next, a low-humidity gas, for example, low-humidity air or an inert gas is injected into the package 6 from the gas inlet 8, and the air in the package 6 is exhausted from the gas outlet 9 to dehumidify the atmosphere in the package. I do. In the package 6 shown in FIG. 1, one gas inlet 8 and one gas outlet 9 are provided, respectively, but a plurality of these may be provided. The space inside the package may be sucked from the gas outlet 9 to increase the dehumidification rate.
[0018]
Here, the humidity of the atmosphere in the package is measured by the thermo-hygrometer 3, and when the humidity decreases (dehumidifies) to a target humidity value (for example, 0%), the gas inlet 8 and the gas outlet 9 are closed and the package is closed. The atmosphere inside the body is sealed to prevent outside air from entering the atmosphere inside the package. The gas inlet 8 and the gas outlet 9 are closed by heat welding, pressure bonding, or the like of the wall of the package 6. An on-off valve may be provided at each of the gas inlet 8 and the gas outlet 9, and the atmosphere in the package may be sealed by closing the on-off valve.
[0019]
The condensation prevention device main body 1 has a leak check function. That is, the third arithmetic circuit 16 of the dew condensation preventing device main body 1 determines the presence or absence of the leak hole of the package 6 from the amount of change in the humidity of the atmosphere within the package within a set time after the atmosphere in the package is sealed. I do. If it is determined that the package 6 has a leak hole, an alarm is output to the alarm unit 5.
[0020]
After the atmosphere in the package is sealed, the temperature and humidity of the atmosphere in the package are measured (monitored) by the first thermo-hygrometer 3 and the measurement result is output to the second arithmetic circuit 11 of the dew condensation preventing device main body 1. The second arithmetic circuit 11 calculates the dew point temperature of the atmosphere in the package (hereinafter referred to as “dew point temperature in the package”) from the temperature and the humidity by referring to, for example, a table of relative humidity, and the dew point temperature in the package. To the second comparison circuit 15 via the second addition / subtraction circuit 13. The addition / subtraction circuit 13 can arbitrarily correct or change the dew point temperature in the package. For example, when a certain margin is desired, a correction value α (° C.) is added to the dew point temperature in the package.
[0021]
Thus, the second comparison circuit 15 calculates the surface temperature of the package 7 measured by the surface thermometer 2 as the dew point temperature in the package or a value obtained by adding a correction value to the dew point temperature (hereinafter, simply referred to as “dew point temperature in the package”). .). If the surface temperature of the packaged body 7 is equal to or lower than the dew point temperature in the packaged body, there is a possibility that dew condensation may occur on the surface of the packaged body 7. Further, the dew condensation preventing device is operated to improve the atmosphere in the package so that dew condensation does not occur. For example,
[0022]
Hereinafter, the function of determining whether the dew condensation preventing device can be unpacked will be described.
When unpacking the package 7, if the surface temperature of the package 7 is equal to or lower than the dew point temperature of the outside air, dew condensation occurs on the surface of the package 7. Therefore, the dew prevention device determines whether or not dew condensation occurs even when the packaged object 7 is unpacked at the location, and notifies the determination result.
[0023]
When unpacking the package 7, first, the temperature and humidity of the outside air (outside atmosphere of the package 6) are measured (monitored) by the second thermo-hygrometer 4 disposed outside the package 6. Then, the measurement result is output to the first arithmetic circuit 10 of the dew condensation preventing device main body 1. The first arithmetic circuit 10 calculates the dew point temperature of the outside air (hereinafter, referred to as "outside air dew point temperature") from the temperature and the humidity by referring to, for example, a table of relative humidity, and performs a first addition and subtraction of the dew point temperature of the outside air. Output to the first comparison circuit 14 via the circuit 12. The first addition / subtraction circuit 12 can arbitrarily correct or change the outside air dew point temperature. For example, when a certain margin is desired, a correction value α (° C.) is added to the outside air dew point temperature.
[0024]
Thus, the first comparison circuit 14 adds the correction value to the outside air dew point temperature of the surface temperature of the package 7 measured by the surface thermometer 2 (hereinafter, simply referred to as “outside air dew point temperature”). Compare with When the surface temperature of the package 7 is equal to or lower than the outside air dew point temperature, there is a possibility that dew condensation may occur on the surface of the package 7 due to unpacking. Further, the dew condensation preventing device is operated to improve the atmosphere in the package so that dew condensation does not occur. For example, the surface temperature of the packaged body 7 is increased by increasing the temperature of the atmosphere in the package, so that the surface temperature is higher than the outside air dew point temperature.
[0025]
According to the packing method according to the first embodiment, when the package 7 is packed by the package 6, the package 7 is packaged based on the temperature and humidity of the atmosphere in the package and the surface temperature of the package 7. It is determined whether or not dew condensation may occur on the surface of the package 7, and the result of the determination is notified via the alarm unit 5. Therefore, an operator or the like can surely grasp whether or not dew condensation may occur on the surface of the packaged body 7. Further, when there is a possibility that dew condensation may occur on the surface of the package 7, the atmosphere in the package is improved in the direction of preventing the dew. Therefore, it is necessary to surely prevent condensation from forming on the surface of the package 7. Can be.
[0026]
Further, when unpacking the packaged body 7, the dew condensation preventing device applies the surface of the packaged body 7 at the time of unpacking based on the temperature and humidity of the outside air and the surface temperature of the packaged body 7. It is determined whether or not dew condensation may occur, and the result of the determination is notified via the alarm unit 5. Therefore, the operator or the like can reliably grasp whether or not the packaged object can be unpacked. Further, when there is a possibility that dew condensation may occur on the surface of the packaged body 7, the atmosphere inside the package is improved in the direction of preventing condensation, so that the packaged body 7 can be quickly opened.
[0027]
Furthermore, since the power supply of the dew condensation prevention device (condensation prevention device main body 1) can be arbitrarily switched between the battery 17 and an external power source, even when it is difficult or impossible to connect to the external power source, the built-in battery 16 can be used. Thus, the dew condensation preventing device can be operated. For this reason, even when the package is transferred, it is possible to reliably prevent condensation from forming on the surface of the package.
As described above, according to the first embodiment, an inexpensive and highly reliable packing method can be realized. For example, it is effective to prevent dew condensation and rust from occurring on a packaged object such as a semiconductor manufacturing / resin sealing device or an electronic component. Can be prevented.
[0028]
Embodiment 2 FIG.
Hereinafter, the second embodiment of the present invention will be described with reference to FIG. However, the packing method according to the second embodiment has many points in common with the packing method according to the first embodiment. Therefore, in the following, in order to avoid repetition of the description, points different from the first embodiment will be mainly described. In the package or the dew condensation preventing device shown in FIG. 3, the same reference numerals are given to members common to the package or the dew condensation preventing device shown in FIG.
[0029]
As shown in FIG. 3, in the second embodiment, the dew condensation preventing device main body 1 is configured to transmit a signal to the surface thermometer 2, the first thermohygrometer 3, the second thermohygrometer 4, and the alarm unit 5 by cable connection. Instead of exchanging signals, exchange signals using cordless communication. In the second embodiment, each of the surface thermometer 2, the first thermo-hygrometer 3, the second thermo-hygrometer 4, and the alarm unit 5 includes a communication power supply. Other points are the same as those in the first embodiment. According to the packing method according to the second embodiment, since it is not necessary to make a hole for passing a cable in the package 6, low-humidity gas (low-humidity air or inert gas) leaks from the atmosphere in the package. Less likely to do so.
[0030]
In the second embodiment, only one of the plurality of packages (hereinafter, referred to as “main package”) is configured as described above, and the other packages are provided with the dew-prevention device main body 1 without the surface. Only the thermometer 2, the first thermo-hygrometer 3, the second thermo-hygrometer 4, and the alarm unit 5 are provided, and the dew-prevention device main body 1 of the main package manages the temperature and humidity of other packages or the occurrence of dew. You may make it. In this case, since only one dew condensation prevention device main body 1 needs to be provided for a plurality of packages, the cost required for packing can be reduced. Further, it is possible to output a warning signal to a remote place. However, for the main package itself, the same temperature / humidity control or condensation prevention operation as in the first embodiment can be performed, but for other packages, notification or warning of the temperature / humidity or the dew condition must be performed. Can be performed, but the dew condensation preventing operation cannot be performed.
[0031]
Embodiment 3 FIG.
Hereinafter, the third embodiment of the present invention will be described with reference to FIG. However, the packing method according to the third embodiment has many points in common with the packing method according to the first embodiment. Therefore, in the following, in order to avoid repetition of the description, points different from the first embodiment will be mainly described. In the package or the dew prevention device shown in FIG. 4, the same reference numerals are given to members common to the package or the dew prevention device shown in FIG.
[0032]
As shown in FIG. 4, in the third embodiment, a pressure gauge 18 is provided in the dew condensation preventing device, and a leak check is performed based on the pressure fluctuation of the atmosphere in the package detected by the pressure gauge 18. Other points are the same as those in the first embodiment. According to the packing method according to the third embodiment, the same operation and effect as those of the packing method according to the first embodiment can be obtained, and the presence or absence of a leak in the atmosphere in the package can be detected more accurately and quickly. .
[0033]
Embodiment 4 FIG.
Hereinafter, a fourth embodiment of the present invention will be described with reference to FIG. However, the packing method according to the fourth embodiment has many points in common with the packing method according to the first embodiment. Therefore, in the following, in order to avoid repetition of the description, points different from the first embodiment will be mainly described. In the package or the dew condensation preventing device shown in FIG. 5, the same reference numerals are given to the same members as those of the package or the dew condensation preventing device shown in FIG.
[0034]
As shown in FIG. 5, in the fourth embodiment, a dehumidification unit includes a dehumidifying unit 21 (a dehumidifier or a moisture adsorbent), a first heating element 22, and a second heating element 23. Other points are the same as those in the first embodiment. When it is determined by the first and second comparison circuits 14 and 15 (see FIG. 2) that dew condensation may occur on the surface of the packaged body 7, dehumidification is performed in order to prevent dew formation. The unit 21 dehumidifies the atmosphere in the package, and the first and second heating elements 22 and 23 raise the temperature of the atmosphere in the package and the surface of the package.
[0035]
According to the packing method according to the fourth embodiment, the same operation and effect as those of the packing method according to the first embodiment can be obtained. In addition, when the temperature of the package 6 or the packaged body 7 is increased in order to prevent dew condensation. In this case, the time required for the temperature rise (waiting time) is reduced or eliminated as compared with the case of Embodiment 1 or the like, so that the time for loading the packaged object 7 can be reduced.
[0036]
【The invention's effect】
ADVANTAGE OF THE INVENTION According to one packing method concerning this invention, the dew condensation of a to-be-packed body can be prevented reliably, and it can grasp | ascertain correctly whether the to-be-packed object is in the state where dew condensation arises, The dew condensation prevention management in the package can be reliably performed. For this reason, it is possible to reliably prevent deterioration of the packaged object due to condensation in the packaged object. Furthermore, since the power of the anti-condensation device can be arbitrarily switched between a battery and an external power source, even when it is difficult or impossible to connect to the external power source, the anti-condensation device can be operated with the built-in battery. it can. For this reason, even when the package is transferred, it is possible to reliably prevent condensation from forming on the surface of the package.
[0037]
Further, according to another packing method of the present invention, not only the dew condensation prevention management from the packing body to the unpacking can be reliably performed, but also it is displayed that the unpacking can be performed. Unpacking can be done in a timely manner.
[Brief description of the drawings]
FIG. 1 is a perspective view of a package according to a first embodiment of the present invention, in which an object to be packed is packed in a package.
FIG. 2 is a block diagram showing a configuration of a dew condensation preventing device attached to the package shown in FIG.
FIG. 3 is a perspective view of a package according to a second embodiment of the present invention, in which a package is packed in a package;
FIG. 4 is a perspective view of a package according to a third embodiment of the present invention, in which a body to be packed is packed in a package;
FIG. 5 is a perspective view of a packaged product according to a fourth embodiment of the present invention, in which a packaged product is packaged in a package.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Condensation prevention device main body, 2 Surface thermometer, 3 First temperature and humidity meter, 4 Second temperature and humidity meter, 5 Alarm section, 6 Package, 7 Packaged object, 8 Gas inlet, 9 Gas outlet, 10 First operation Circuit, 11 second operation circuit, 12 first addition / subtraction circuit, 13 second addition / subtraction circuit, 14 first comparison circuit, 15 second comparison circuit, 16 third operation circuit, 17 battery, 18 pressure gauge, 21 dehumidification unit, 22 1st heating element, 23 2nd heating element.

Claims (3)

In a packing method for sealingly packing a body to be packed with a packing body,
A step of packing the packaged object, the temperature / humidity meter, and a dew condensation preventing device that operates on electricity with the package so that a space is formed inside the package;
Filling the space with a low-humidity gas;
If the value of the temperature and humidity measured by the thermo-hygrometer reaches a predetermined value, by operating the dew condensation prevention device, to improve the atmosphere in the package in a direction in which no dew condensation occurs,
A packing method characterized by switching a power supply of a dew condensation preventing device between a battery built in a package and an external power supply. The packing method according to claim 1, wherein the dew condensation preventing device is wirelessly controlled from outside the package. In a packing method for sealingly packing a body to be packed with a packing body,
A step of packing the packaged object, the temperature / humidity meter, and the dew condensation preventing device with the package so that a space is formed inside the package;
Filling the space with a low-humidity gas;
When the value of the temperature and humidity measured by the thermo-hygrometer reaches a predetermined value, a step of operating the dew condensation prevention device to improve the atmosphere in the package in a direction in which no dew condensation occurs,
Measuring the temperature and humidity outside the package, adjusting the temperature and humidity within the package so as to prevent condensation even when the package is opened, and displaying the completion of the adjustment according to the measured value. A packing method characterized by the above-mentioned.

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