JP2004114495A - Process for manufacturing ink jet head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a process for manufacturing an ink jet head in which projection of each coupling piece from the side face of the ink jet head is prevented when the ink jet head having a layered structure of a plurality of plates is taken out from each frame. <P>SOLUTION: In a cavity plate 900, each coupling piece 951 is provided with a pair of adjacent notch grooves 953A and 953B on the opposite sides at one end thereof, and an elongated half groove 954 having a longitudinal center line L3 located on one side of the cavity plate 900. A cover plate, a first manifold plate, a second manifold plate, a third manifold plate, a supply plate, an aperture plate, and a base plate constituting a layered structure along with the cavity plate 900 are also arranged similarly. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method for manufacturing an ink jet head for taking out an ink jet head having a laminated structure of plates from a frame.
[0002]
[Prior art]
One method of manufacturing a conventional ink jet head will be described with reference to FIG. FIG. 49 shows a state in which lead frames having respective plates 1011, 1012, 1013, and 1014 are stacked. FIG. 49A shows a top view of a stacked body 1050 a viewed from the base plate 1014 side, and FIG. 49A is a sectional view taken along the line VIIb of FIG. 49A, and FIG. 49C is a sectional view taken along the line VIIc of FIG. By making the positions of the connecting pieces 1052 different for each of the plates 1011, 1012, 1013, and 1014 as described above, when each lead frame is stacked, as shown in FIG. 49, each connecting piece 1052 moves in the stacking direction. Do not overlap.
[0003]
Therefore, when cutting the continuous pieces 1052 from the laminated body 1050a of each lead frame to form the cavity plate 1010, each of the continuous pieces 1052 can be cut with a small shearing force. Further, since the stress applied to the cavity plate 1010 at the time of cutting can be reduced, deformation of each plate and peeling of the adhesive layer can be prevented. Further, by arranging two adjacent connecting pieces 1052 at equal intervals from the center line of the plate, the cutting is performed when the connecting pieces 1052 are cut from the frame 1053 to form the cavity plate 1010. The shearing force can be evenly distributed to the connecting pieces 1052 (for example, see Patent Document 1).
[0004]
[Patent Document 1]
JP 2002-234170 A (Page 5, FIG. 7)
[0005]
[Problems to be solved by the invention]
However, when forming the cavity plate 1010 by cutting the continuous pieces 1052 from the laminated body 1050a of each lead frame, a part of each of the cut continuous pieces 1052 may protrude from the cavity plate 1010 and remain. was there.
[0006]
Therefore, the present invention has been made in view of the above-described points, and when the inkjet head having a laminated structure of a plurality of plates is taken out from each frame, each of the cut connection pieces is used as the inkjet head. An object of the present invention is to provide a method of manufacturing an ink jet head that prevents protrusion from a side surface in a projection shape.
[0007]
[Means for Solving the Problems]
The invention according to claim 1 made to solve this problem has a laminated structure of plates by laminating and bonding a plurality of plates supported by a plurality of connecting pieces to a frame together with each frame. After the inkjet head is formed, by cutting each connecting piece, the inkjet head is removed from each frame. In the method of manufacturing an inkjet head, a pair of cutout grooves adjacent to both sides of one end of each connecting piece are formed by each connecting piece. Each connecting piece is provided with an elongated half groove in which a longitudinal center line is located on one side of the plate or on the side of the plate from one side of the plate. And
[0008]
That is, in the inkjet head manufacturing method of the present invention, first, an inkjet head having a laminated structure of plates is formed by laminating and bonding a plurality of plates supported by a plurality of connecting pieces to a frame together with each frame. However, at this time, a pair of notch grooves adjacent to both sides of one end of each connecting piece are provided in each plate for each connecting piece, and further, on one side of the plate or from one side of the plate. Since an elongated half groove in which the center line in the longitudinal direction is located on the side of the plate is provided in each connecting piece, thereafter, by cutting each connecting piece, the inkjet head is taken out from each frame. However, each connecting piece has a pair of notched grooves adjacent to both sides of one end of the connecting piece as a fulcrum, and the elongated half groove of the connecting piece has Since the center line in the hand direction or the center line is bent on the plate side and cut on one side of the plate or on the side of the plate from one side of the plate, the method of manufacturing an inkjet head according to the present invention includes a plurality of methods. It can be said that when the inkjet head having the laminated structure of the plates is taken out from each frame, each cut connection piece is prevented from protruding from the side surface of the inkjet head in a protruding manner.
[0009]
The invention according to claim 2 is the method for manufacturing an ink jet head according to claim 1, wherein each connecting piece is provided at a different position on each plate, and adjacent connecting pieces are provided on each plate. When being laminated and bonded together with each frame, they are arranged at a distance greater than the width of the cutout groove.
[0010]
Furthermore, in the method for manufacturing an ink jet head of the present invention, each connecting piece is disposed at a different position on each plate, and when adjacent connecting pieces are laminated and bonded to each plate together with each frame. As long as the connecting pieces are arranged at a distance equal to or greater than the width of the notch groove, each connecting piece can be positioned above or below one side of a plate stacked on the plate provided with the connecting piece. Therefore, when taking out the ink jet head from each frame, each connecting piece can be easily bent by pressing it against one side of the plate, and further, each connecting piece can be cut without interfering with each other.
[0011]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings. First, a schematic configuration of the inkjet head of the present embodiment will be described.
As shown in FIG. 1, the ink-jet head 1 has a structure in which a plurality of thin metal plates formed in a substantially rectangular shape are laminated, and further, four plate-shaped piezoelectric sheets 10 each having a substantially trapezoidal shape in a plan view are alternated. Are laminated. An extension 51 of a flexible printed circuit board (hereinafter, referred to as “FPC board”) 50 is placed on the upper side of each piezoelectric sheet 10 and is electrically connected as described later. An ink supply port 901 is provided around each of the stacked piezoelectric sheets 10.
[0012]
Here, the laminated structure of the ink jet head 1 will be specifically described. It has a nine-layer structure in which nine substantially rectangular thin metal plates are laminated, and as shown in FIGS. 100, a cover plate 200, a first manifold plate 300, a second manifold plate 400, a third manifold plate 500, a supply plate 600, an aperture plate 700, a base plate 800, and a cavity plate 900.
[0013]
In this regard, as shown in FIG. 2, the nozzle plate 100 includes four areas 110 each having a substantially trapezoidal shape in a plan view as a group, and as shown in FIG. A large number of holes are provided corresponding to the required printing density.
[0014]
On the upper side of the cover plate 200, as shown in FIG. 2, four substantially trapezoidal regions 210 in a plan view are grouped together, and as shown in FIG. Many are drilled. Each of the through holes 211 of the cover plate 200 is disposed at a position facing each of the nozzles 111 of the nozzle plate 100. When the cover plate 200 and the nozzle plate 100 are stacked, It communicates with the nozzle 111 (see FIG. 27).
[0015]
As shown in FIG. 5, two groove recesses 212 are formed in the longitudinal direction below the cover plate 200. Each through hole 211 is provided on the outer periphery of the groove recessed portion 212 and on the plurality of floating island portions 213 surrounded by the groove recessed portion 212.
[0016]
As shown in FIG. 6, the first manifold plate 300 is provided with a large number of through holes 311 for a small diameter ink passage. Each of the through holes 311 of the first manifold plate 300 is provided at a position facing each of the through holes 211 of the cover plate 200. When the first manifold plate 300 and the cover plate 200 are stacked, It communicates with each through hole 211 of the cover plate 200 (see FIG. 27).
[0017]
Further, in the first manifold plate 300, as shown in FIG. 6, two groove through portions 312 constituting the ink manifold flow path 2 (see FIG. 27) are formed in the longitudinal direction. Each through hole 311 is provided on the outer periphery of the groove penetrating portion 312 and on the plurality of floating islands 313 surrounded by the groove penetrating portion 312. The plurality of floating islands 313 have a structure supported by a plurality of connecting pieces 314 whose lower sides are half-etched. Each connecting piece 314 is formed with a thickness of about half of the first manifold plate 300.
In addition, a plurality of ink supply units 315 extend from the groove penetration unit 312.
[0018]
As shown in FIG. 7, the second manifold plate 400 has a large number of through holes 411 for ink passages having a small diameter. Each through-hole 411 of the second manifold plate 400 is disposed at a position facing each of the through-holes 311 of the first manifold plate 300, and the second manifold plate 400 and the first manifold plate 300 are stacked. Then, it communicates with each through-hole 311 of the first manifold plate 300 (see FIG. 27).
[0019]
Further, in the second manifold plate 400, as shown in FIG. 7, two groove through portions 412 constituting the ink manifold flow path 2 (see FIG. 27) are formed in the longitudinal direction. And each groove penetration part 412 of the second manifold plate 400 is arranged at a position facing each groove penetration part 312 of the first manifold plate 300, and the second manifold plate 400 and the first manifold plate 300 are When they are stacked, they communicate with the groove penetrations 312 of the first manifold plate 300 (see FIG. 27). Each through-hole 411 is provided on the outer periphery of the groove penetrating part 412 and on the plurality of floating island parts 413 surrounded by the groove penetrating part 412. The plurality of floating island portions 413 have a structure supported by a plurality of connecting pieces 414 whose upper sides are half-etched. Each connecting piece 414 is formed with a thickness of about half of the second manifold plate 400.
Further, a plurality of ink supply portions 415 extend from the groove penetration portion 412. Each ink supply unit 415 of the second manifold plate 400 is disposed at a position facing each ink supply unit 315 of the first manifold plate 300, and the second manifold plate 400 and the first manifold plate 300 When they are stacked, they communicate with the respective ink supply units 315 of the first manifold plate 300 (see FIG. 27).
[0020]
As shown in FIG. 8, the third manifold plate 500 is provided with a large number of through holes 511 for a small diameter ink passage. And each through-hole 511 of the third manifold plate 500 is disposed approximately at a position facing each of the through-holes 411 of the second manifold plate 400, and the third manifold plate 500 and the second manifold plate 400 are When they are stacked, they communicate with the through holes 411 of the second manifold plate 400 (see FIG. 27).
[0021]
Further, in the third manifold plate 500, as shown in FIG. 8, two groove through portions 512 forming the ink manifold flow path 2 (see FIG. 27) are formed in the longitudinal direction. And each groove penetration part 512 of the third manifold plate 500 is arranged at a position facing each groove penetration part 412 of the second manifold plate 400, and the third manifold plate 500 and the second manifold plate 400 When they are stacked, they communicate with the respective groove penetration portions 412 of the second manifold plate 400 (see FIG. 27). Each through-hole 511 is provided on the outer periphery of the groove penetrating portion 512 and on the plurality of floating island portions 513 surrounded by the groove penetrating portion 512. The plurality of floating islands 513 have a structure supported by a plurality of connecting pieces 514 whose upper sides are half-etched. Each connecting piece 514 is formed with a thickness of about half of the third manifold plate 500.
Further, a plurality of ink supply units 515 extend from the groove penetrating portion 512. Each ink supply unit 515 of the third manifold plate 500 is disposed at a position facing each ink supply unit 415 of the second manifold plate 400, and the third manifold plate 500 and the second manifold plate 400 When they are stacked, they communicate with the respective ink supply units 415 of the second manifold plate 400 (see FIG. 27).
[0022]
Further, the supply plate 600 has four trapezoidal regions 610 each having a substantially trapezoidal shape in a plan view as shown in FIG. 2, and a large number of through holes 611 for ink passages having a small diameter as shown in FIG. In addition, a large number of through holes 612 for introducing ink having a small diameter are provided. In this regard, the respective through holes 611 of the supply plate 600 are disposed approximately at positions facing the respective through holes 511 of the third manifold plate 500, and the supply plate 600 and the third manifold plate 500 are stacked. At this time, it communicates with each through hole 511 of the third manifold plate 500 (see FIG. 27). On the other hand, each through hole 612 of the supply plate 600 is disposed at a position facing one of the two groove penetration portions 512 of the third manifold plate 500, and the supply plate 600 and the third manifold plate 500 are stacked. Then, it communicates with one of the two groove penetration portions 512 of the third manifold plate 500 (see FIG. 27). As shown in FIGS. 10 and 11, a large number of filter holes 613 are formed in each through hole 612 of the supply plate 600 to prevent dust in the ink from entering.
[0023]
Further, as shown in FIGS. 2 and 9, the supply plate 600 has ten small diameter ink supply ports 601 for supplying ink outside the four trapezoidal regions 610 in plan view. . Each of the ink supply ports 601 of the supply plate 600 is disposed at a position facing each of the ink supply portions 515 of the third manifold plate 500, and when the supply plate 600 and the third manifold plate 500 are stacked. Then, it communicates with each ink supply unit 515 of the third manifold plate 500 (see FIG. 27). As shown in FIG. 16, a large number of filter holes 602 for preventing dust in the ink from entering are provided in each of the ink supply ports 601 of the supply plate 600.
[0024]
As shown in FIG. 2, the aperture plate 700 has a group of four trapezoidal regions 710 each having a substantially trapezoidal shape in plan view, and as shown in FIG. In addition to the perforations, a large number of aperture portions 712 for introducing minute ink are provided. Each of the through holes 711 of the aperture plate 700 is disposed roughly at a position facing each of the through holes 611 of the supply plate 600. When the aperture plate 700 and the supply plate 600 are stacked, the supply plate It communicates with each through-hole 611 of 600 (see FIG. 27).
[0025]
On the other hand, as shown in FIG. 13, each aperture portion 712 of the aperture plate 700 includes an ink inlet 713, an ink outlet 714, and a groove penetrating portion 715 for communicating the ink inlet 713 with the ink outlet 714. They are formed by pressing. Further, the ink inlets 713 of the respective throttle portions 712 of the aperture plate 700 are disposed approximately at positions facing the respective through holes 612 of the supply plate 600, and when the aperture plate 700 and the supply plate 600 are stacked. Then, it communicates with each through hole 612 of the supply plate 600 (see FIG. 27).
[0026]
Further, in the aperture plate 700, as shown in FIGS. 2 and 12, ten small-diameter ink supply ports 701 for supplying ink are formed outside the four trapezoidal regions 710 in plan view. . Each ink supply port 701 of the aperture plate 700 is disposed at a position opposite to each ink supply port 601 of the supply plate 600. When the aperture plate 700 and the supply plate 600 are stacked, the supply plate It communicates with each of the ink supply ports 601 (see FIG. 27).
[0027]
Further, as shown in FIG. 2, the base plate 800 has a group of four substantially trapezoidal regions 810 as viewed in plan, and as shown in FIG. A large number of through holes 812 for introducing ink having a small diameter are provided. Each of the through holes 811 of the base plate 800 is disposed approximately at a position facing each of the through holes 711 of the aperture plate 700. When the base plate 800 and the aperture plate 700 are stacked, the It communicates with each through hole 711 (see FIG. 27). On the other hand, each through-hole 812 of the base plate 800 is disposed roughly at a position facing the ink outlet 714 of each of the aperture portions 712 of the aperture plate 700, and when the base plate 800 and the aperture plate 700 are stacked, It communicates with the ink outlets 714 of each of the aperture portions 712 of the aperture plate 700 (see FIG. 27).
[0028]
Further, as shown in FIGS. 2 and 14, the base plate 800 is provided with ten small-diameter ink supply ports 801 for ink supply outside the four trapezoidal regions 810 in plan view. Each ink supply port 801 of the base plate 800 is disposed at a position facing each ink supply port 701 of the aperture plate 700. When the base plate 800 and the aperture plate 700 are stacked, the It communicates with each ink supply port 701 (see FIG. 27).
[0029]
Further, the cavity plate 900 is required to have a substantially rhombic ink pressure chamber 911 as shown in FIG. 15 by grouping four regions 910 each having a substantially trapezoidal shape in plan view, as shown in FIG. A large number of them are provided in a matrix in accordance with the printing density. In this regard, the ink pressure chambers 911 of the cavity plate 900 are arranged at a high density between the acute angles of the other adjacent ink pressure chambers 911 such that the acute angles of the ink pressure chambers 911 enter. . One acute angle portion of each of the ink pressure chambers 911 of the cavity plate 900 is disposed approximately at a position facing each of the through holes 811 of the base plate 800. When the cavity plate 900 and the base plate 800 are stacked, Then, it communicates with each through hole 811 of the base plate 800 (see FIG. 27). On the other hand, the other acute angle portion of each of the ink pressure chambers 911 of the cavity plate 900 is disposed approximately at a position facing each of the through holes 812 of the base plate 800, and when the cavity plate 900 and the base plate 800 are stacked. Then, it communicates with each through hole 812 of the base plate 800 (see FIG. 27).
[0030]
Further, as shown in FIGS. 2 and 15, the cavity plate 900 is provided with ten small-diameter ink supply ports 901 outside the four trapezoidal regions 910 in plan view. Each ink supply port 901 of the cavity plate 900 is disposed at a position facing each ink supply port 801 of the base plate 800. When the cavity plate 900 and the base plate 800 are stacked, each ink supply port 901 of the base plate 800 It communicates with the ink supply port 801 (see FIG. 27).
[0031]
As shown in FIGS. 2 and 15, the cavity plate 900 is provided with positioning holes 903 used for laminating the piezoelectric sheets 10 on both sides of four regions 910 having a substantially trapezoidal shape in plan view. .
[0032]
Next, a schematic structure of the piezoelectric sheet 10 and the FPC board 50 and an electrical connection structure between the piezoelectric sheet 10 and the FPC board 50 will be described.
First, the schematic structure of the piezoelectric sheet 10 will be described. As shown in FIG. 17, a large number of substantially rhombus-shaped drive electrodes 11 are formed in a matrix on the piezoelectric sheet 10 in accordance with the required printing density. Have been. Each drive electrode 11 of the piezoelectric sheet 10 is disposed roughly at a position facing each ink pressure chamber 911 of the cavity plate 900, and the piezoelectric sheet 10 is laminated on the cavity plate 900 When the upper surface of the ink pressure chamber 911 is closed by the piezoelectric sheet 10, it is located on the upper surface of each ink pressure chamber 911 of the cavity plate 900.
[0033]
Also, as shown in FIGS. 18 and 19, each drive electrode 11 of the piezoelectric sheet 10 has a contact land portion 14 formed on a portion drawn from its acute angle portion. The contact land portion 14 of each drive electrode 11 has a two-stage shape having a first step surface 12 and a second step surface 13.
[0034]
As shown in FIG. 19, the piezoelectric sheet 10 has a structure in which a first piezoelectric layer 21, a second piezoelectric layer 23, a third piezoelectric layer 24, and a fourth piezoelectric layer 26 are laminated. An internal electrode 22 is formed between the layer 21 and the second piezoelectric layer 23, and an internal electrode 25 is formed between the third piezoelectric layer 24 and the fourth piezoelectric layer 26. In this regard, the ends of the internal electrodes 22 and 25 are formed so as to be exposed at the end surfaces of both oblique sides of the piezoelectric sheet 10 (see FIGS. 1 and 17). Note that, when the piezoelectric sheets 10 are stacked on the cavity plate 900, the end faces of both oblique sides of each piezoelectric sheet 10 come into contact with the end faces of both oblique sides of another adjacent piezoelectric sheet 10, so that When the sheet 10 is stacked on the cavity plate 900, the internal electrodes 22, 25 of each piezoelectric sheet 10 are electrically connected.
[0035]
As shown in FIG. 17, two types of common electrodes 31 and 36 are alternately formed on the edges of both oblique sides of the piezoelectric sheet 10. The one common electrode 31 is electrically connected to the internal electrode 25 formed between the third piezoelectric layer 24 and the fourth piezoelectric layer 26 through the through hole 32 as shown in FIG. I have. The other common electrode 36 is electrically connected to the internal electrode 22 formed between the first piezoelectric layer 21 and the second piezoelectric layer 23 via a through hole 37 as shown in FIG. I have. As shown in FIG. 20, a convex contact land 33 is formed on one common electrode 31. Similarly, on the other common electrode 36, as shown in FIG. 21, a convex contact land portion 38 is formed.
[0036]
Further, in the piezoelectric sheet 10, as shown in FIG. 17, a plurality of circular dummy electrodes 41 are formed on the virtual lines L1 and L2 at the edges of the parallel opposing sides (upper side and lower side). In this respect, each dummy electrode 41 is different from the common electrodes 31 and 36 described above, and is not electrically connected to any of the internal electrodes 22 and 25 as shown in FIG.
[0037]
Note that, as shown in FIG. 17, the piezoelectric sheet 10 is provided with positioning marks 46 used when the FPC board 50 is placed on the edges of both oblique sides.
[0038]
Next, the schematic structure of the FPC board 50 will be described. In the FPC board 50, as shown in FIG. Each contact land portion 52 of the FPC board 50 is disposed at a position facing the second step surface 13 of the contact land portion 14 of each drive electrode 11 of the piezoelectric sheet 10. Is placed on the second step surface 13 of the contact land portion 14 of each drive electrode 11 of the piezoelectric sheet 10. Further, on each contact land portion 52 of the FPC board 50, although not shown in FIG. 23, a conductor pattern 53 made of copper foil is wired as shown in FIG.
[0039]
Further, in the FPC board 50, as shown in FIG. 23, a large number of contact lands 54 are also formed on the upper side of the extension part 51 and the edges of both oblique sides. Each of the contact land portions 54 on the upper edge of the extension portion 51 faces the dummy electrode 41 formed on the virtual line L1 (see FIG. 17) on the upper edge of the piezoelectric sheet 10. When the FPC board 50 is placed on the piezoelectric sheet 10, each dummy electrode 41 formed on the virtual line L <b> 1 (see FIG. 17) at the upper edge of the piezoelectric sheet 10. Contact The contact land portions 54 on both oblique sides of the extension portion 51 face the contact land portions 33 and 38 of the two types of common electrodes 31 and 36 formed alternately on the edges of both oblique sides of the piezoelectric sheet 10. When the FPC board 50 is mounted on the piezoelectric sheet 10, the two types of common electrodes 31, 36 alternately formed on both oblique sides of the piezoelectric sheet 10 are disposed. It contacts the contact land portions 33 and 38. Further, although not shown in FIG. 23, a conductor pattern 55 made of copper foil is wired on each contact land portion 54 of the FPC board 50, as shown in FIG. Each contact land 54 is electrically connected.
[0040]
As shown in FIG. 25, the FPC board 50 includes a base film 61 such as a polyimide film, and the above-described conductor pattern 53, cover coat 62, Ni plating 63, solder 64, and the like. In this regard, the Ni plating 63 and the solder 64 constitute each contact land portion 52 of the FPC board 50. The structure shown in FIG. 25 is the same for the contact land portions 54 and the conductor patterns 55 formed and wired on the upper side of the extension portion 51 and the edges of both oblique sides.
[0041]
Further, on the FPC board 50, as shown in FIG. 23, positioning marks 56 used when the FPC board 50 is placed on the piezoelectric sheet 10 are provided on both oblique sides.
[0042]
Therefore, when the positioning mark 56 of the FPC board 50 and the positioning mark 46 of the piezoelectric sheet 10 are overlapped and the FPC board 50 is placed on the piezoelectric sheet 10, each contact land portion 52 of the FPC board 50 is As shown in FIG. 26, if the heat contact bonding is performed by thermocompression bonding or the like, the Ni plating 63 of the FPC board 50 and the contact land portion 14 of the piezoelectric sheet 10 overlap with the second step surface 13 of the contact land portion 14 of the electrode 11. Since the second step surfaces 13 are fixed in contact with each other, the respective conductor patterns 53 of the FPC board 50 and the respective drive electrodes 11 of the piezoelectric sheet 10 are electrically connected.
[0043]
At this time, as shown in FIG. 26, the N.V. applied to the second step surface 13 of the contact land portion 14 of each drive electrode 11 of the piezoelectric sheet 10. C. The P15 covers the Ni plating 63 of the FPC board 50 and the second step surface 13 of the contact land 14 of the piezoelectric sheet 10, but the second step 13 of the contact land 14 of each drive electrode 11 of the piezoelectric sheet 10. It may hang down to the surface 12.
[0044]
When the positioning mark 56 of the FPC board 50 and the positioning mark 46 of the piezoelectric sheet 10 are overlapped and the FPC board 50 is placed on the piezoelectric sheet 10, each contact land 54 of the FPC board 50 further The dummy electrodes 41 formed on the imaginary line L1 (see FIG. 17) at the upper edge of the dummy electrode 41, or the two types of common electrodes 31 and 36 alternately formed at the two oblique edges of the piezoelectric sheet 10. Since they overlap with the contact land portions 33 and 38, they are electrically connected to the respective dummy electrodes 41 or the two types of common electrodes 31 and 36 by heat bonding such as thermocompression bonding.
[0045]
Therefore, if a drive voltage is applied between the drive electrode 11 and the internal electrodes 22 and 25 via the FPC board 50, the first piezoelectric layer 21 of the piezoelectric sheet 10 located immediately below the drive electrode 11 and The second piezoelectric layer 23, the third piezoelectric layer 24, and the fourth piezoelectric layer 26 can be deformed.
[0046]
That is, the portion of the first piezoelectric layer 21 located directly below the drive electrode 11 constitutes an active portion that bends when a voltage is applied. When the first piezoelectric layer 21, the second piezoelectric layer 23, the third piezoelectric layer 24, and the fourth piezoelectric layer 26 are fired, the shrinkage ratio of the piezoelectric ceramic and the metal material constituting the electrodes is reduced when fired. Since they are different, the entire piezoelectric sheet 10 may warp or undulate. Therefore, after firing, the internal electrodes 25 formed on the upper surface of the fourth piezoelectric layer 26 are warped by the first piezoelectric layer 21, the second piezoelectric layer 23, the third piezoelectric layer 24, and the fourth piezoelectric layer 26. Alternatively, it functions as a constraining layer for preventing the planarity from being impaired by waving. Further, the second piezoelectric layer 23, the third piezoelectric layer 24, and the fourth piezoelectric layer 26 are restrained so that the active portion of the first piezoelectric layer 21 is deformed only downward (toward the cavity plate 900). Functions as a layer.
[0047]
Next, the flow of ink in the inkjet head 1 configured as described above will be described. As shown in FIG. 1, from the lower layer, a nozzle plate 100, a cover plate 200, a first manifold plate 300, a second manifold plate 400, a third manifold plate 500, a supply plate 600, an aperture plate 700, a base plate 800, a cavity plate When the piezoelectric sheet 900 and the piezoelectric sheet 10 are stacked, the flow path of the ink ejected from one nozzle 111 of the nozzle plate 100 can be shown in the cross-sectional view of FIG. FIG. 28 is a perspective view showing a part of a flow path of ink ejected from one nozzle 111 of the nozzle plate 100.
[0048]
In this regard, ink ejected from one nozzle 111 of the nozzle plate 100 is first supplied to the ink manifold channel 2 from an ink tank (not shown). In order to supply ink to the ink manifold channel 2 from an ink tank (not shown), although not shown in FIGS. 27 and 28, an ink supply port 901 (see FIG. 1) of the cavity plate 900 and The ink supply port 801 of the base plate 800 (see FIG. 1), the ink supply port 701 of the aperture plate 700 (see FIG. 1), the ink supply port 601 of the supply plate 600 (see FIG. 1), and the groove penetrating portion of the third manifold plate 500. The ink supply unit 515 of the second manifold plate 400 (see FIG. 7), the ink supply unit 415 of the groove through portion 412 of the second manifold plate 400 (see FIG. 7), and the ink supply unit 315 of the groove through portion 312 of the first manifold plate 300 (see FIG. 8). 6) is performed via an ink supply path that communicates with the other. At this time, when ink passes through the ink supply port 601 of the supply plate 600, the filter holes 602 (see FIG. 16) prevent dust from entering the ink.
[0049]
Here, the schematic configuration of the ink manifold flow path 2 will be described. As shown in FIG. 27, the ink manifold flow path 2 includes a groove penetrating portion 512 (see FIG. 8) of the third manifold plate 500 and a second manifold plate. The side wall surface is formed by communication between the groove penetration portion 412 (see FIG. 7) of the first manifold plate 300 and the groove penetration portion 312 (see FIG. 6) of the first manifold plate 300, and the upper wall surface is constituted by the supply plate 600. The lower wall surface is constituted by the cover plate 200.
[0050]
As shown in FIG. 30, two ink manifold channels 2 are formed. That is, as shown in FIG. 31, one ink manifold channel 2 is formed in the upper half of the longitudinal direction, and as shown in FIG. 32, one ink manifold channel 2 is formed in the lower half of the longitudinal direction. Have been. Each ink manifold channel 2 has an ink supply portion 515 (see FIG. 8) of the groove penetration portion 512 of the third manifold plate 500 and an ink supply portion 415 (see FIG. 8) of the groove penetration portion 412 of the second manifold plate 400. 7), and five ink supply paths formed by communicating with the ink supply portions 315 (see FIG. 6) of the groove penetration portions 312 of the first manifold plate 300 are formed.
[0051]
In addition, in each of the ink manifold flow paths 2, as shown in FIG. 33, the floating island portion 513 (see FIG. 8) of the groove penetration portion 512 of the third manifold plate 500 and the floating island portion 513 of the groove penetration portion 412 of the second manifold plate 400. While the portion 413 (see FIG. 7) and the floating island portion 313 (see FIG. 6) of the groove penetration portion 312 of the first manifold plate 300 are arranged so as to overlap each other (see FIGS. 31 and 32), the third manifold plate is provided. A connecting piece 514 (see FIG. 8) supporting the floating island portion 513 of the groove penetration portion 512 of FIG. 500 and a connecting piece 414 (see FIG. 7) supporting the floating island portion 413 of the groove penetration portion 412 of the second manifold plate 400. The connecting pieces 314 (see FIG. 6) that support the floating island portions 313 of the groove penetration portions 312 of one manifold plate 300 do not overlap with each other. It is disposed (see FIG. 31, FIG. 32).
[0052]
Therefore, as shown in FIG. 31 and FIG. 32, each of the ink manifold flow paths 2 has four floating island portions 515, 413, and 313 overlapping each other, so that each of the ink manifold flow paths 2 has a closed loop shape. The ink flows around the floating islands 515, 413, and 313. At this time, the connecting pieces 514, 414, 314 supporting the floating island portions 515, 413, 313 are arranged so as not to overlap with each other as shown in FIG. 33, and are half-etched as described above. Therefore, the ink can flow smoothly around the floating islands 515, 413, and 313.
[0053]
As shown in FIG. 27, the ink flowing through the ink manifold channel 2 is supplied to the through hole 612 of the supply plate 600, the ink inlet 713, the groove through portion 715, the ink outlet 714 of the aperture 712 of the aperture plate 700, and the base plate 800. Is introduced into the ink pressure chamber 911 of the cavity plate 900 through the through hole 812. At this time, when the ink passes through the through hole 612 of the supply plate 600, the filter hole 613 (see FIGS. 10 and 11) prevents dust from entering the ink.
[0054]
On the other hand, as shown in FIGS. 27 and 29, the ink pressure chamber 911 of the cavity plate 900 is closed by the piezoelectric sheet 10 by laminating the piezoelectric sheet 10 on the cavity plate 900, as shown in FIGS. The drive electrode 11 of the piezoelectric sheet 10 is arranged on the upper surface. At this time, as shown in FIG. 29, the projection part of the substantially rhombus-shaped drive electrode 11 is inside the ink pressure chamber 19A also having a substantially rhombus shape. On the other hand, the projected portion of the contact land portion 14 formed on the portion of the piezoelectric sheet 10 drawn from the acute angle portion of the drive electrode 11 is outside the ink pressure chamber 911 of the cavity plate 900.
[0055]
When a drive voltage is applied between the drive electrode 11 of the piezoelectric sheet 10 and the internal electrodes 22 and 25 (see FIG. 19) via the FPC board 50, the piezoelectric sheet 10 is placed on the ink pressure chamber 911 side of the cavity plate 900. Is deformed, the ink in the ink pressure chamber 911 of the cavity plate 900 is pushed out to the through hole 811 of the base plate 800. Thereafter, the ink extruded into the through holes 811 of the base plate 800 receives the through holes 811 of the base plate 800, the through holes 711 of the aperture plate 700, the through holes 611 of the supply plate 600, the through holes 511 of the third manifold plate 500, The liquid is discharged from the nozzle 111 of the nozzle plate 100 through the through hole 411 of the second manifold plate 400, the through hole 311 of the first manifold plate 300, and the through hole 211 of the cover plate 200.
[0056]
In addition, all the through holes 612 provided in the upper half or the lower half of the supply plate 600 in the longitudinal direction communicate with one ink manifold flow path 2, and thus the upper half of the cavity plate 900 in the longitudinal direction. Alternatively, since the ink is communicated with all the ink pressure chambers 911 provided in the lower half, the ink supplied to one ink manifold channel 2 is provided in the upper half or the lower half of the nozzle plate 100 in the longitudinal direction. The ink is discharged from any one of the nozzles 111.
[0057]
Next, a method for manufacturing the ink jet head of the present embodiment will be described. The manufacturing method of the ink jet head according to the present embodiment will be described in brief. The cover plate 200, the first manifold plate 300, the second manifold plate 400, the third manifold plate 500, the supply plate 600, the aperture plate 700 When the base plate 800 and the cavity plate 900 are laminated and bonded, as shown in FIG. 2, they are laminated while being supported by the frame frames 250, 350, 450, 550, 650, 750, 850 and 950, respectively.
[0058]
Then, the laminated structure of the cover plate 200 and the first manifold plate 300, the second manifold plate 400, the third manifold plate 500, the supply plate 600, the aperture plate 700, the base plate 800, and the cavity plate 900 is divided into frame frames 250 and 350. , 450, 550, 650, 750, 850, and 950, the nozzle plate 100 is laminated and bonded to the cover plate 200, and the piezoelectric sheets 10 are laminated and bonded to the cavity plate 900, thereby manufacturing the ink jet head 1. Is done.
[0059]
Therefore, a state in which the cavity plate 900 is supported by the frame 950 will be described as an example. As shown in FIG. 1, the cavity plate 900 is provided with respect to the frame 950 provided with six positioning holes 952. It is supported via ten connecting pieces 951. As shown in FIGS. 46 and 47, each connecting piece 951 is formed with a half-etched elongated half groove 954. In this regard, the half groove 954 of each connecting piece 951 is disposed such that the center line L3 in the longitudinal direction coincides with one side of the cavity plate 900 as shown in FIG. Further, in the cavity plate 900, a pair of cutout grooves 953A and 953B are formed on both sides of the base of each connecting piece 951.
[0060]
Although the above description has been given by taking the cavity plate 900 as an example, these points are the same as those of the cover plate 200, the first manifold plate 300, the second manifold plate 400, the third manifold plate 500, the supply plate 600, and the aperture plate 700. The same applies to the base plate 800.
[0061]
However, as can be understood by comparing FIGS. 37 to 44, the connection piece 951 of the cavity plate 900, the connection piece 851 of the base plate 800, the connection piece 751 of the aperture plate 700, the connection piece 651 of the supply plate 600, and the third manifold The connection piece 551 of the plate 500, the connection piece 451 of the second manifold plate 400, the connection piece 351 of the first manifold plate 300, the connection piece 251 of the cover plate 200, and the notched grooves 953A and 953B of the cavity plate 900, and the base plate 800 Notches 853A, 853B of the aperture plate 700, notches 653A, 653B of the supply plate 600, notches 553A, 553B of the third manifold plate 500, and the second manifold. The notch grooves 453A and 453B of the rate 400, the notch grooves 353A and 353B of the first manifold plate 300, and the notch grooves 253A and 253B of the cover plate 200 are arranged at different positions in the relationship described below. .
[0062]
That is, FIG. 36 shows that the cover plate 200, the first manifold plate 300, the second manifold plate 400, the third manifold plate 500, the supply plate 600, the aperture plate 700, the base plate 800, and the cavity plate 900 are laminated and adhered from the lower layer. As described above, the other notch groove 953B of the cavity plate 900 and the one notch groove 853A of the base plate 800 overlap and coincide with each other, so that the connecting piece 851 of the base plate 800 is different from the connecting piece 951 of the cavity plate 900. 953B and 853A.
[0063]
Further, as shown in FIG. 36, the other notch groove 853B of the base plate 800 and the one notch groove 753A of the aperture plate 700 overlap and coincide with each other, so that the connecting piece 751 of the aperture plate 700 becomes the connecting piece 851 of the base plate 800. Are provided at positions separated by the widths of the notched grooves 853B and 753A.
[0064]
Also, as shown in FIG. 36, the other cutout groove 753B of the aperture plate 700 and the one cutout groove 653A of the supply plate 600 overlap and match, so that the connection piece 651 of the supply plate 600 is connected to the connection of the aperture plate 700. The cutouts 753B and 653A are arranged at positions spaced apart from the piece 751 by the width of the cutout grooves 753B and 653A.
[0065]
Also, as shown in FIG. 36, the other notch groove 653B of the supply plate 600 and the one notch groove 553A of the third manifold plate 500 overlap and coincide with each other, so that the connecting piece 551 of the third manifold plate 500 The notch grooves 653B and 553A are provided at positions separated by the width of the notch grooves 653B and 553A from the connecting piece 651 of the plate 600.
[0066]
Further, as shown in FIG. 36, the other notch groove 553B of the third manifold plate 500 and the one notch groove 453A of the second manifold plate 400 overlap and match, so that the connecting piece 451 of the second manifold plate 400 And the connecting pieces 551 of the third manifold plate 500 are disposed at positions separated by the widths of the notched grooves 553B and 453A.
[0067]
Also, as shown in FIG. 36, the other notch groove 453B of the second manifold plate 400 and the one notch groove 353A of the first manifold plate 300 overlap and coincide with each other, so that the connection piece 351 of the first manifold plate 300 The cutout grooves 453B and 353A are arranged at positions separated from the connecting pieces 451 of the second manifold plate 400 by a width.
[0068]
Further, as shown in FIG. 36, the other notch groove 353B of the first manifold plate 300 and the one notch groove 253A of the cover plate 200 overlap and coincide with each other, so that the connecting piece 251 of the cover plate 200 is The notch grooves 353B and 253A are disposed at positions separated from the connecting pieces 351 of the plate 300 by the widths of the notch grooves 353B and 253A.
[0069]
Therefore, from the lower layer, the cover plate 200, the first manifold plate 300, the second manifold plate 400, the third manifold plate 500, the supply plate 600, the aperture plate 700, the base plate 800, and the cavity plate 900 are respectively connected to the frame frames 250 and 350. , 450, 550, 650, 750, 850, and 950, after being laminated and bonded, the cavity plate 900 is shown in FIG. 45, and the connecting pieces 951, 851, 751, 651, 551, The 451, 351 and 251 are arranged at a predetermined width without overlapping in the laminating direction at all of the formed 10 locations.
[0070]
When the cover plate 200, the first manifold plate 300, the second manifold plate 400, the third manifold plate 500, the supply plate 600, the aperture plate 700, the base plate 800, and the cavity plate 900 are laminated and bonded from the lower layer, Of the base plate 800, the aperture plate 700, the supply plate 600, and the like, while traversing the connection piece 951, just below the half groove 954 formed in the connection piece 951 of the cavity plate 900. One side of each of the third manifold plate 500, the second manifold plate 400, the first manifold plate 300, and the cover plate 200 is positioned so as to coincide (see FIG. 36).
[0071]
In addition, one side of the cavity plate 900 is located right above the half groove 854 formed in the connecting piece 851 of the base plate 800 while crossing the connecting piece 851, and the connecting piece 851 is located immediately below the cavity plate 900. While crossing, each side of the aperture plate 700, the supply plate 600, the third manifold plate 500, the second manifold plate 400, the first manifold plate 300, and the cover plate 200 is positioned so as to coincide with each other.
[0072]
In addition, right above the half groove 754 formed in the connecting piece 751 of the aperture plate 700, while traversing the connecting piece 751, each side of the cavity plate 900 and the base plate 800 is aligned and positioned. Immediately below, while traversing the connecting piece 751, the supply plate 600 and each side of the third manifold plate 500, the second manifold plate 400, the first manifold plate 300, and the cover plate 200 coincide with each other. Become.
[0073]
In addition, right above the half groove 654 formed in the connection piece 651 of the supply plate 600, while traversing the connection piece 651, each side of the cavity plate 900, the base plate 800, and the aperture plate 700 coincide with each other. At the same time, immediately below, while traversing the connecting piece 651, each side of the third manifold plate 500, the second manifold plate 400, the first manifold plate 300, and the cover plate 200 is positioned so as to coincide with each other. Become.
[0074]
In addition, right above the half groove 554 formed in the connecting piece 551 of the third manifold plate 500, while traversing the connecting piece 551, each of the cavity plate 900, the base plate 800, the aperture plate 700, and the supply plate 600. While one side is positioned coincidentally, each side of the second manifold plate 400, the first manifold plate 300, and the cover plate 200 is positioned immediately below the connecting piece 551 while being traversed. Become.
[0075]
In addition, right above the half groove 454 formed in the connecting piece 451 of the second manifold plate 400, while traversing the connecting piece 451, the cavity plate 900, the base plate 800, the aperture plate 700, the supply plate 600, Each side of the three manifold plates 500 is positioned so as to coincide with each other, and immediately below, while traversing the connecting piece 451, each side of the first manifold plate 300 and the cover plate 200 are positioned so as to coincide with each other. Become.
[0076]
In addition, right above the half groove 354 formed in the connecting piece 351 of the first manifold plate 300, while traversing the connecting piece 351, the cavity plate 900, the base plate 800, the aperture plate 700, the supply plate 600, One side of each of the third manifold plate 500 and the second manifold plate 400 is positioned so as to coincide with each other, and each side of the cover plate 200 is located immediately below the connection piece 351 while traversing the connecting piece 351.
[0077]
The cavity plate 900, the base plate 800, the aperture plate 700, the supply plate 600, and the third manifold are located immediately above the half groove 254 formed in the connection piece 251 of the cover plate 200 while traversing the connection piece 251. One side of each of the plate 500, the second manifold plate 400, and the first manifold plate 300 is positioned so as to coincide with each other.
[0078]
Note that these points are the same in all of the ten places where the half grooves 954, 854, 754, 654, 554, 454, 354, and 254 are formed.
[0079]
Therefore, the cover plate 200 and the laminated structure of the first manifold plate 300, the second manifold plate 400, the third manifold plate 500, the supply plate 600, the aperture plate 700, the base plate 800, and the cavity plate 900 are combined with the frame frames 250 and 350. , 450, 550, 650, 750, 850, and 950, the connecting pieces 951 of the cavity plate 900 are attached to one side of the base plate 800 with the notched grooves 953A and 953B on both sides of the connecting piece 951 as fulcrums. The connecting piece 951 is easily bent along the half groove 954 formed in the connecting piece 951. Therefore, each cut connection piece 951 does not protrude from one side of the cavity plate 900. Further, as shown in FIG. 36 and FIG. 45, the connecting pieces 951 and 851 located adjacent to each of the connecting pieces 951 of the cavity plate 900 are separated from each other with a predetermined width. I will not.
[0080]
Each connecting piece 851 of the base plate 800 is easily bent along one side of the cavity plate 900 and the aperture plate 700 with the cutout grooves 853A and 853B on both sides of the connecting piece 851 as fulcrums, and formed on the connecting piece 851. It will be cut along the half groove 854. Therefore, each cut connection piece 851 does not protrude from one side of the base plate 800. Further, as shown in FIGS. 36 and 45, the connecting pieces 851, 951, 751 of the base plate 800 are separated from each other by a predetermined width as shown in FIGS. They do not interfere with each other.
[0081]
Further, each connecting piece 751 of the aperture plate 700 is easily bent along one side of the base plate 800 and the supply plate 600 with the cutout grooves 753A, 753B on both sides of the connecting piece 751 as fulcrums, and formed on the connecting piece 751. It will be cut along the half groove 754. Therefore, each cut connection piece 751 does not protrude from one side of the aperture plate 700. Further, as shown in FIGS. 36 and 45, the connection pieces 751, 851, 651 are separated from the connection pieces 851, 651 located on both sides of each connection piece 751 of the aperture plate 700 with a predetermined width. Do not interfere with each other.
[0082]
Each connecting piece 651 of the supply plate 600 bends easily along one side of the aperture plate 700 and the third manifold plate 500 with the notch grooves 653A and 653B on both sides of the connecting piece 651 as fulcrums. The cutting is performed along the formed half groove 654. Therefore, each cut connection piece 651 does not protrude from one side of the supply plate 600. Further, as shown in FIGS. 36 and 45, the connecting pieces 651, 551 located on both sides of each connecting piece 651 of the supply plate 600 are separated by a predetermined width. Do not interfere with each other.
[0083]
Further, each connecting piece 551 of the third manifold plate 500 is easily bent along one side of the supply plate 600 and the second manifold plate 400 with the notch grooves 553A and 553B on both sides of the connecting piece 551 as fulcrums. 551 are cut along the half groove 554 formed. Accordingly, the cut connection pieces 551 do not protrude from one side of the third manifold plate 500. Further, as shown in FIGS. 36 and 45, the connecting pieces 551 and 651 are separated from the connecting pieces 651 and 451 located on both sides of each connecting piece 551 of the third manifold plate 500 with a predetermined width. , 451 do not interfere with each other.
[0084]
Each connecting piece 451 of the second manifold plate 400 is easily bent along one side of the third manifold plate 500 and the first manifold plate 300 with the notch grooves 453A and 453B on both sides of the connecting piece 451 as fulcrums. The cutting is performed along the half groove 454 formed in the connecting piece 451. Therefore, each cut connection piece 451 does not protrude from one side of the second manifold plate 400. Further, as shown in FIGS. 36 and 45, the connection pieces 451 and 551 of the second manifold plate 400 are separated from the connection pieces 551 and 351 located on both sides of the connection pieces 451 with a predetermined width. , 351 do not interfere with each other.
[0085]
Further, each connecting piece 351 of the first manifold plate 300 is easily bent along one side of the second manifold plate 400 and the cover plate 200 with the notch grooves 353A and 353B on both sides of the connecting piece 351 as fulcrums. 351 are cut along the half groove 354 formed. Therefore, each cut connection piece 351 does not protrude from one side of the first manifold plate 300. Further, as shown in FIGS. 36 and 45, the connection pieces 351 and 451 of the first manifold plate 300 are separated from the connection pieces 451 and 251 located on both sides of each connection piece 351 by a predetermined width. , 251 do not interfere with each other.
[0086]
Further, each connecting piece 251 of the cover plate 200 is easily bent along one side of the first manifold plate 300 with the cutout grooves 253A and 253B on both sides of the connecting piece 251 as fulcrums, and the half formed on the connecting piece 251 is formed. It will be cut along the groove 254. Therefore, the cut connection pieces 251 do not protrude from one side of the cover plate 200. Further, as shown in FIGS. 36 and 45, the connection pieces 351 are separated from the connection pieces 351 located adjacent to the connection pieces 251 of the cover plate 200 by a predetermined width, so that the connection pieces 251 and 351 interfere with each other. I will not.
[0087]
As described in detail above, in the method of manufacturing an ink jet head according to the present embodiment, first, ten connection pieces 251, 351, 10 are provided in the frame frames 250, 350, 450, 550, 650, 750, 850, 950. The cover plate 200 supported by 451, 551, 651, 751, 851, 951, the first manifold plate 300, the second manifold plate 400, the third manifold plate 500, the supply plate 600, the aperture plate 700, the base plate 800, and the cavity The plate 900 is laminated and bonded together with the frame frames 250, 350, 450, 550, 650, 750, 850, and 950, so that the cover plate 200, the first manifold plate 300, the second manifold plate 400, Manifold plate 500, a supply plate 600, an aperture plate 700, a base plate 800 to form a laminated structure of the cavity plate 900.
[0088]
At this time, for example, in the cavity plate 900, as shown in FIG. 46, a pair of cutout grooves 953A and 953B adjacent to both ends of one end of each connection piece 951 are provided for each connection piece 951, and further, An elongated half groove 954 having a longitudinal center line L3 located on one side of the cavity plate 900 is provided for each connecting piece 951. The same applies to the cover plate 200, the first manifold plate 300, the second manifold plate 400, the third manifold plate 500, the supply plate 600, the aperture plate 700, and the base plate 800.
[0089]
Therefore, after that, by cutting each connecting piece 251, 351, 451, 551, 651, 751, 851, 951, the cover plate 200, the first manifold plate 300, the second manifold plate 400, the third manifold plate Even if the stacked structure of the supply plate 500, the supply plate 600, the aperture plate 700, the base plate 800, and the cavity plate 900 is taken out from each of the frame frames 250, 350, 450, 550, 650, 750, 850, and 950, for example, 951 is bent at the longitudinal center line L3 of the elongated half groove 954 of the connecting piece 951 with a pair of cutout grooves 953A, 953B adjacent to both sides of one end of the connecting piece 951 as a fulcrum, and the cavity plate 900 is bent. Cut on one side That. This point is the same for the connecting pieces 251, 351, 451, 551, 651, 751, 851.
[0090]
Therefore, the manufacturing method of the inkjet head according to the present embodiment includes the cover plate 200, the first manifold plate 300, the second manifold plate 400, the third manifold plate 500, the supply plate 600, the aperture plate 700, the base plate 800, the cavity plate When the 900 laminated structure was taken out of each of the frame frames 250, 350, 450, 550, 650, 750, 850, 950, the cut connection pieces 251, 351, 451, 551, 651, 751, 851 were cut. , 951 are the cover plate 200, the first manifold plate 300, the second manifold plate 400, the third manifold plate 500, the supply plate 600, the aperture plate 700, the base plate 800, It said from the side of the laminated structure of Ti plate 900 as that prevents the jumping protruding.
[0091]
Further, in the method of manufacturing an ink jet head according to the present embodiment, as shown in FIGS. 37 to 44, each of the connecting pieces 251, 351, 451, 551, 651, 751, 851, 951 includes the cover plate 200 and The first manifold plate 300, the second manifold plate 400, the third manifold plate 500, the supply plate 600, the aperture plate 700, the base plate 800, and the cavity plate 900 are provided at different positions. Then, the cover plate 200, the first manifold plate 300, the second manifold plate 400, the third manifold plate 500, the supply plate 600, the aperture plate 700, the base plate 800, and the cavity plate 900 are formed by the respective frame frames 250, 350, 450, When laminated together with 550, 650, 750, 850, and 950, as shown in FIG. 36, for example, adjacent connection pieces 251 and 351 are separated from each other by a distance of the width of the notch grooves 253A and 353B. Are arranged. This is the same for adjacent ones of the connecting pieces 351, 451, 551, 651, 751, 851, 951.
[0092]
Therefore, for example, since each connecting piece 951 can be located on one side of the base plate 800 stacked on the cavity plate 900 provided with the connecting piece 951, the cover plate 200 and the first manifold plate 300, The laminated structure of the second manifold plate 400, the third manifold plate 500, the supply plate 600, the aperture plate 700, the base plate 800, and the cavity plate 900 is combined with each frame 250, 350, 450, 550, 650, 750, 850, 950. In the case of taking out from each other, each connecting piece 951 can be easily bent by pressing it against one side of the base plate 800, and each connecting piece 951 can be cut without interfering with each adjacent connecting piece 851.
[0093]
In addition, since each connecting piece 851 can be positioned below one side of the cavity plate 900 and one side of the aperture plate 700 stacked on the base plate 800 on which the connecting piece 851 is provided, the cover plate 200 and The laminated structure of the first manifold plate 300, the second manifold plate 400, the third manifold plate 500, the supply plate 600, the aperture plate 700, the base plate 800, and the cavity plate 900 is divided into respective frame frames 250, 350, 450, 550, and 650. , 750, 850, 950, each connecting piece 851 can be easily bent by pressing it against one side of the cavity plate 900 or one side of the aperture plate 700, and further, the connecting pieces 851 are adjacent to each other. It can be cut without interfering with the connecting piece 951,751.
[0094]
In addition, since each connecting piece 751 can be positioned below one side of the base plate 800 and one side of the supply plate 600 stacked on the aperture plate 700 provided with the connecting piece 751, the cover plate 200 and The laminated structure of the first manifold plate 300, the second manifold plate 400, the third manifold plate 500, the supply plate 600, the aperture plate 700, the base plate 800, and the cavity plate 900 is divided into respective frame frames 250, 350, 450, 550, and 650. , 750, 850, 950, each connecting piece 751 can be easily bent by pressing it against one side of the base plate 800 and one side of the supply plate 600, and further, connecting each connecting piece 751 to each adjacent connecting piece. It can be cut without interfering with 51,651.
[0095]
In addition, since each connecting piece 651 can be positioned below one side of the aperture plate 700 and one side of the third manifold plate 500 stacked on the supply plate 600 provided with the connecting piece 651, the cover plate 200, and a stacked structure of the first manifold plate 300, the second manifold plate 400, the third manifold plate 500, the supply plate 600, the aperture plate 700, the base plate 800, and the cavity plate 900, into respective frame frames 250, 350, 450, When the connection pieces 651 are taken out from 550, 650, 750, 850, and 950, each connection piece 651 can be easily bent by pressing it against one side of the aperture plate 700 and one side of the third manifold plate 500. It can be cut without interfering with the connecting members 751,551 adjacent phases.
[0096]
In addition, since each connecting piece 551 can be located below one side of the supply plate 600 and one side of the second manifold plate 400 stacked on the third manifold plate 500 provided with the connecting piece 551, The laminated structure of the cover plate 200 and the first manifold plate 300, the second manifold plate 400, the third manifold plate 500, the supply plate 600, the aperture plate 700, the base plate 800, and the cavity plate 900 is divided into respective frame frames 250, 350, When taking out from 450, 550, 650, 750, 850, 950, each connecting piece 551 can be easily bent by pressing it against one side of the supply plate 600 and one side of the second manifold plate 400. 51 can be a cutting without interfering with the connecting members 651,451 adjacent phases.
[0097]
In addition, each connection piece 451 can be positioned below one side of the third manifold plate 500 and one side of the first manifold plate 300 stacked on the second manifold plate 400 provided with the connection piece 451. Therefore, the cover plate 200 and the laminated structure of the first manifold plate 300, the second manifold plate 400, the third manifold plate 500, the supply plate 600, the aperture plate 700, the base plate 800, and the cavity plate 900 are combined with each frame 250, When taken out from 350, 450, 550, 650, 750, 850, 950, each connecting piece 451 can be easily bent by pressing against one side of the third manifold plate 500 and one side of the first manifold plate 300, La, can be cut without interfering with the connecting members 551,351 adjacent the respective coupling pieces 451 phase.
[0098]
In addition, since each connecting piece 351 can be positioned below one side of the second manifold plate 400 and one side of the cover plate 200 stacked on the first manifold plate 300 provided with the connecting piece 351, The laminated structure of the cover plate 200 and the first manifold plate 300, the second manifold plate 400, the third manifold plate 500, the supply plate 600, the aperture plate 700, the base plate 800, and the cavity plate 900 is divided into respective frame frames 250, 350, When taken out from 450, 550, 650, 750, 850, 950, each connecting piece 351 can be easily bent by pressing it against one side of the second manifold plate 400 and one side of the cover plate 200. It can be cut without interfering with the connecting members 451,251 adjacent phases.
[0099]
In addition, since each connecting piece 251 can be located below one side of the first manifold plate 300 laminated on the cover plate 200 provided with the connecting piece 251, the cover plate 200 and the first manifold plate 300 , The second manifold plate 400, the third manifold plate 500, the supply plate 600, the aperture plate 700, the base plate 800, and the laminated structure of the cavity plate 900 are combined with the respective frame frames 250, 350, 450, 550, 650, 750, 850, When taking out from the 950, it is possible to easily bend each connecting piece 251 by pressing it against one side of the first manifold plate 300, and to cut each connecting piece 251 without interfering with each adjacent connecting piece 351. Can be.
[0100]
Further, in the method of manufacturing an inkjet head according to the present embodiment, the cover plate 200, the first manifold plate 300, the second manifold plate 400, the third manifold plate 500, the supply plate 600, the aperture plate 700, the base plate 800, the cavity plate When taking out the laminated structure 900 from each of the frame frames 250, 350, 450, 550, 650, 750, 850, 950, the cover plate 200, the first manifold plate 300, the second manifold plate 400, and the third manifold are used. The stress generated in the adhesive layer of the laminated structure of the plate 500, the supply plate 600, the aperture plate 700, the base plate 800, and the cavity plate 900 can be reduced.
[0101]
In the method of manufacturing an ink jet head according to the present embodiment, as shown in FIGS. 37 to 44, each of the connecting pieces 251, 351, 451, 551, 651, 751, 851, 951 has each of the half grooves 254, 354, Since 454, 554, 654, 754, 854, and 954 are provided, when the connection pieces 251, 351, 451, 551, 651, 751, 851, and 951 are bent, the cover plate 200 and the first manifold plate It is possible to reduce the stress applied to the adhesive layer of the laminated structure including the 300, the second manifold plate 400, the third manifold plate 500, the supply plate 600, the aperture plate 700, the base plate 800, and the cavity plate 900.
[0102]
In the method of manufacturing an ink jet head according to the present embodiment, as shown in FIGS. 37 to 44, each of the connecting pieces 251, 351, 451, 551, 651, 751, 851, 951 includes the cover plate 200 and the They are provided at different positions on one manifold plate 300, second manifold plate 400, third manifold plate 500, supply plate 600, aperture plate 700, base plate 800, and cavity plate 900. Accordingly, the cover plate 200 supported on the frame frames 250, 350, 450, 550, 650, 750, 850, 950 with the respective connecting pieces 251, 351, 451, 551, 651, 751, 851, 951, and the first manifold The plate 300, the second manifold plate 400, the third manifold plate 500, the supply plate 600, the aperture plate 700, the base plate 800, and the cavity plate 900 are combined with the respective frame frames 250, 350, 450, 550, 650, 750, 850, and 950. As shown in FIG. 45, when the layers are bonded and bonded, the connecting pieces 251, 351, 451, 551, 651, 751, 851, 951 are arranged regularly, so that the cover plate 200 and the first manifold plate 300, No. It is determined whether or not the manifold plate 400, the third manifold plate 500, the supply plate 600, the aperture plate 700, the base plate 800, and the cavity plate 900 are correctly laminated by the connection pieces 251, 351, 451, 551, 651, 751, 851, 851. It can be confirmed instantaneously at the position 951.
[0103]
Note that the present invention is not limited to the above-described embodiment, and various changes can be made without departing from the gist of the present invention.
For example, in the method of manufacturing an ink jet head according to the present embodiment, the half groove 954 of each connecting piece 951 of the cavity plate 900 has its longitudinal center line L3 coincident with one side of the cavity plate 900 as shown in FIG. However, as shown in FIG. 48, it may be arranged such that the center line L3 in the longitudinal direction is located inside one side of the cavity plate 900. By doing so, it is possible to further ensure that the cut connection pieces 951 do not protrude from the cavity plate 900. This point has been described by taking the cavity plate 900 as an example. However, these points are the same as the cover plate 200, the first manifold plate 300, the second manifold plate 400, the third manifold plate 500, the supply plate 600, the aperture plate 700, The same applies to the base plate 800.
[0104]
Further, in the method of manufacturing an inkjet head according to the present embodiment, the cover plate 200, the first manifold plate 300, the second manifold plate 400, the third manifold plate 500, the supply plate 600, the aperture plate 700, the base plate 800, the cavity plate When the frame 900 is laminated and bonded together with the frame frames 250, 350, 450, 550, 650, 750, 850 and 950, for example, as shown in FIG. Although they are arranged at a distance equal to the width of the notch grooves 253A, 353B, they may be arranged at a distance greater than the width of the notch grooves 253A, 353B. This is the same for the adjacent ones of the connecting pieces 351, 451, 551, 651, 751, 851, 951.
[0105]
【The invention's effect】
In the method for manufacturing an ink jet head of the present invention, first, an ink jet head having a laminated structure of plates is formed by laminating and bonding a plurality of plates supported by a plurality of connecting pieces to a frame together with each frame. At this time, a pair of notch grooves adjacent to both sides of one end of each connecting piece are provided in each plate for each connecting piece, and further, the plate is placed on one side of the plate or from one side of the plate. Since an elongated half groove in which the longitudinal center line is located is provided on each connecting piece on the side of, after that, by cutting each connecting piece, it is possible to take out the inkjet head from each frame. Each connecting piece has a pair of cutout grooves adjacent to both sides of one end of the connecting piece as a fulcrum, and the longitudinal direction of the elongated half groove of the connecting piece is Since the bend is bent on the plate side from the core wire or the center line and cut on one side of the plate or on the side of the plate from one side of the plate, the method of manufacturing an inkjet head according to the present invention includes a plurality of plates. It can be said that when the ink jet head having the laminated structure of the above is taken out from each frame, each cut connection piece is prevented from protruding from the side surface of the ink jet head.
[0106]
Furthermore, in the method for manufacturing an ink jet head of the present invention, each connecting piece is disposed at a different position on each plate, and when adjacent connecting pieces are laminated and bonded to each plate together with each frame. As long as the connecting pieces are arranged at a distance equal to or greater than the width of the notch groove, each connecting piece can be positioned above or below one side of a plate stacked on the plate provided with the connecting piece. Therefore, when taking out the ink jet head from each frame, each connecting piece can be easily bent by pressing it against one side of the plate, and further, each connecting piece can be cut without interfering with each other.
[Brief description of the drawings]
FIG. 1 is a perspective view showing a state in which a cavity plate is supported by a frame in a method of manufacturing an ink jet head according to an embodiment of the present invention.
FIG. 2 is an exploded perspective view showing a laminated structure of the inkjet head according to one embodiment of the present invention.
FIG. 3 is a plan view showing a group of small-diameter ink jet nozzles provided on a nozzle plate in the inkjet head according to the embodiment of the present invention.
FIG. 4 is a plan view showing a group of through-holes for a small-diameter ink passage provided in a cover plate in the inkjet head according to the embodiment of the present invention.
FIG. 5 is a plan view showing a part of a lower side of a cover plate in the inkjet head according to the embodiment of the present invention.
FIG. 6 is a plan view showing a part of the front side of the first manifold plate in the inkjet head according to the embodiment of the present invention.
FIG. 7 is a plan view showing a part of a front side of a second manifold plate in the inkjet head according to the embodiment of the present invention.
FIG. 8 is a plan view showing a part of the front side of a third manifold plate in the inkjet head according to the embodiment of the present invention.
FIG. 9 illustrates a group of through-holes for a small-diameter ink passage and a through-hole for introducing a micro-diameter ink, and a small-diameter ink supply port provided in a supply plate in the inkjet head according to the embodiment of the present invention. It is the top view shown.
FIG. 10 is an enlarged plan view of a small-diameter ink introduction through hole provided in a supply plate in the inkjet head according to the embodiment of the present invention.
FIG. 11 is an enlarged cross-sectional view of a small-diameter ink introduction through hole provided in a supply plate in the inkjet head according to the embodiment of the present invention.
FIG. 12 shows a group of through-holes for a small-diameter ink passage provided in an aperture plate, a small-diameter ink supply port, and a small-diameter ink supply port in an ink-jet head according to an embodiment of the present invention. FIG.
FIG. 13 is an enlarged plan view of a diaphragm portion for introducing minute ink provided on an aperture plate in the inkjet head according to the embodiment of the present invention.
FIG. 14 shows a group of through-holes for a small-diameter ink passage and through-holes for introducing a micro-diameter ink, and a small-diameter ink supply port provided in a base plate in the ink jet head according to one embodiment of the present invention. FIG.
FIG. 15 is a plan view showing a group of ink pressure chambers provided in a cavity plate and a small-diameter ink supply port in the inkjet head according to one embodiment of the present invention.
FIG. 16 is an enlarged plan view of a small-diameter ink supply port provided on a supply plate in the inkjet head according to the embodiment of the present invention.
FIG. 17 is a plan view showing a piezoelectric sheet in the inkjet head according to one embodiment of the present invention.
FIG. 18 is an enlarged plan view of a driving electrode of a piezoelectric sheet in the inkjet head according to one embodiment of the present invention.
FIG. 19 is an enlarged cross-sectional view of a piezoelectric sheet and a driving electrode in the inkjet head according to one embodiment of the present invention.
FIG. 20 is an enlarged sectional view of one common electrode of a piezoelectric sheet in the ink jet head according to one embodiment of the present invention.
FIG. 21 is an enlarged sectional view of the other common electrode of the piezoelectric sheet in the ink jet head according to one embodiment of the present invention.
FIG. 22 is an enlarged sectional view of a dummy electrode of a piezoelectric sheet in the ink jet head according to one embodiment of the present invention.
FIG. 23 is a plan view of an extended portion of an FPC board in the inkjet head according to one embodiment of the present invention.
FIG. 24 is a partially enlarged view of an extended portion of an FPC board in the inkjet head according to one embodiment of the present invention.
FIG. 25 is a cross-sectional view of a contact land portion of an extended portion of the FPC board in the inkjet head according to one embodiment of the present invention.
FIG. 26 is a cross-sectional view when an FPC board and a piezoelectric sheet are connected in the inkjet head according to one embodiment of the present invention.
FIG. 27 is a cross-sectional view illustrating a flow path of ink ejected from one nozzle of a nozzle plate in the inkjet head according to an embodiment of the present invention.
FIG. 28 is a perspective view showing a part of a flow path of ink ejected from one nozzle of a nozzle plate in the inkjet head according to one embodiment of the present invention.
FIG. 29 is a plan view showing a part of a flow path of ink ejected from one nozzle of a nozzle plate in the inkjet head according to one embodiment of the present invention.
FIG. 30 is a plan view showing an ink manifold channel from the front side of a third manifold plate in the ink jet head according to one embodiment of the present invention.
FIG. 31 is a plan view showing the ink manifold flow paths from the front side of the third manifold plate in the ink jet head according to one embodiment of the present invention, and shows only the ink manifold flow paths formed in the upper half in the longitudinal direction. It is shown.
FIG. 32 is a plan view showing the ink manifold flow path from the front side of the third manifold plate in the ink jet head according to one embodiment of the present invention, and shows only the ink manifold flow path formed in the lower half in the longitudinal direction. It is shown.
FIG. 33 is a perspective view showing a part of an ink manifold channel in the inkjet head according to an embodiment of the present invention.
FIG. 34 is an exploded perspective view showing a schematic configuration of an inkjet head according to an embodiment of the present invention.
FIG. 35 is an exploded perspective view showing a configuration when a plurality of plates are stacked and bonded in the method of manufacturing an ink jet head according to an embodiment of the present invention.
FIG. 36 is a plan view showing the vicinity of one connection piece of a cavity plate when a plurality of plates supported by a frame are laminated and bonded in the method of manufacturing an ink jet head according to an embodiment of the present invention. It is.
FIG. 37 is a plan view showing the vicinity of one connecting piece of the cavity plate in the method of manufacturing an ink jet head according to an embodiment of the present invention.
FIG. 38 is a plan view showing the vicinity of one connecting piece of the base plate in the method of manufacturing an ink jet head according to an embodiment of the present invention.
FIG. 39 is a plan view showing the vicinity of one connecting piece of the aperture plate in the method of manufacturing an ink jet head according to an embodiment of the present invention.
FIG. 40 is a plan view showing the vicinity of one connecting piece of the supply plate in the method of manufacturing an inkjet head according to an embodiment of the present invention.
FIG. 41 is a plan view showing the vicinity of one connecting piece of the third manifold plate in the method of manufacturing an ink jet head according to an embodiment of the present invention.
FIG. 42 is a plan view showing the vicinity of one connecting piece of the second manifold plate in the method of manufacturing an ink jet head according to an embodiment of the present invention.
FIG. 43 is a plan view showing the vicinity of one connecting piece of the first manifold plate in the method of manufacturing an ink jet head according to an embodiment of the present invention.
FIG. 44 is a plan view showing the vicinity of one connecting piece of the cover plate in the method of manufacturing an inkjet head according to an embodiment of the present invention.
FIG. 45 is a plan view showing a part of a cavity plate when a plurality of plates supported by a frame are laminated and bonded in the method for manufacturing an ink jet head according to an embodiment of the present invention.
FIG. 46 is an enlarged plan view showing the vicinity of a connection piece of a cavity plate in a method of manufacturing an ink jet head according to an embodiment of the present invention.
FIG. 47 is an enlarged cross-sectional view showing a half groove of a connecting piece of a cavity plate in a method of manufacturing an ink jet head according to an embodiment of the present invention.
FIG. 48 is a plan view showing another form of the half groove of the connection piece of the cavity plate in the method of manufacturing an ink jet head according to one embodiment of the present invention.
FIGS. 49A and 49B are diagrams illustrating a laminate in which lead frames are adhered in a laminated state in a conventional method of manufacturing an ink jet head, and FIG. (B) is a sectional view taken along line VIIb of (a), and (c) is a sectional view taken along line VIIc of (a).
[Explanation of symbols]
1 inkjet head
200 cover plate
250 Cover plate frame
251 Connecting piece of cover plate
253A, 253B Notch groove of cover plate
254 Half groove of cover plate
300 First manifold plate
350 Frame of first manifold plate
351 Connecting piece of first manifold plate
353A, 353B Notch groove of first manifold plate
354 Half groove of first manifold plate
400 Second manifold plate
450 Frame of second manifold plate
451 Connecting piece of second manifold plate
453A, 453B Notch groove of second manifold plate
454 Half groove of the second manifold plate
500 Third manifold plate
550 Frame for Third Manifold Plate
551 Connecting piece of third manifold plate
553A, 553B Notched groove of third manifold plate
554 Half groove of the third manifold plate
600 supply plate
650 Supply plate frame
651 Supply plate connection piece
653A, 653B Notch groove of supply plate
654 Supply plate half groove
700 aperture plate
750 aperture plate frame
751 Connection piece of aperture plate
753A, 753B Notch groove of aperture plate
754 Half groove of aperture plate
800 base plate
850 Base plate frame
851 Base plate connecting piece
853A, 853B Notched groove of base plate
854 Half groove of base plate
900 cavity plate
950 Cavity plate frame
951 Connection piece of cavity plate
953A, 953B Notched groove of cavity plate
954 Half groove of cavity plate
L3 Longitudinal center line of half groove of cavity plate

Claims (2)

A plate supported by a plurality of connecting pieces on a frame is laminated and bonded together with a plurality of frame frames to form an inkjet head having a laminated structure of plates, and then the connecting pieces are cut to form the inkjet. In a method of manufacturing an ink jet head for removing a head from each frame,
A pair of notch grooves adjacent to both sides of one end of each connection piece are provided in each plate for each connection piece, and the longitudinal center line is on one side of the plate or on the side of the plate from one side of the plate. A method for manufacturing an ink jet head, characterized in that a positioned elongated half groove is provided in each connecting piece. A method for manufacturing an ink jet head according to claim 1,
Each connecting piece is arranged at a different position on each plate, and adjacent connecting pieces are arranged at a distance equal to or greater than the width of the notch groove when each plate is laminated and bonded together with each frame. A method for manufacturing an ink jet head.

Images