JP2004110916A - Device and method for manufacturing magnetic head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a device and a method for manufacturing a magnetic head, capable of accurately forming a distorted shape on a slider, and improving productivity. <P>SOLUTION: The backside 34B of an air bearing of a slider of the magnetic head is irradiated with a laser pulse emitted by a YAG pulse laser and shaped to be a cross-sectional area smaller than the backside 34B a plurality of times, successive pulses being separated from each other at a predetermined interval. A distorted shape is highly accurately formed on the slider. Laser pulses may be radiated to partially overlap each other. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a magnetic head manufacturing apparatus and manufacturing method for applying distortion to a magnetic head by laser pulse irradiation, and in particular, applying a laser pulse a plurality of times at predetermined intervals to apply minute distortion to the magnetic head with high accuracy. Further, the present invention relates to a magnetic head manufacturing apparatus and a manufacturing method capable of improving productivity.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, processing has been performed in which a laser pulse is applied to the surface of a ceramic plate, for example, a slider surface of a magnetic head used in a hard disk device or the like to distort the slider and plastically deform it into a desired shape. The slider is made of a ceramic such as AlTiC (a ceramic made of Al ₂ O ₃ and TiC), and has a rectangular parallelepiped having a side of about 2 mm or less and a thickness of about several hundred μm. In addition, an air bearing surface on which rail-like pads and the like that determine flying characteristics are formed is provided on one surface of the slider. A thin film magnetic head element is formed on a surface perpendicular to the air bearing surface on the outflow end side of the air at the time of flying. The slider is supported by a leaf spring-shaped head suspension, and a small amount of the surface is stably floated from the magnetic disk surface by the balance between the pressure applied to the air bearing surface and the spring force of the head suspension, and recording and reproduction are performed by the thin film magnetic head element. Do.
[0003]
If the slider has a convex shape, the impact on the magnetic disk when the slider accidentally collides with the magnetic disk is mitigated to prevent damage to the slider itself. When the slider rests on the magnetic disk, the slider Adsorption to the magnetic disk is prevented.
[0004]
In order to give such a convex shape, the back surface of the air bearing surface is irradiated with laser light, and the surface is instantaneously melted and contracted so that the air bearing surface becomes convex. For example, Japanese Patent Application Laid-Open No. 11-285869 discloses a method of obtaining a desired convex shape by controlling the energy density of laser light to be radiated as a method of strain processing a ceramic plate. According to this publication, the amount of protrusion can be increased by increasing the energy density.
[0005]
Japanese Patent Laid-Open No. 2001-150162 discloses a desired convex shape by irradiating a laser beam having a cross-sectional area smaller than the area of the workpiece a plurality of times over the entire irradiation region of the ceramic plate. Is disclosed.
[0006]
[Patent Document 1]
JP 11-285869 A [Patent Document 2]
JP 2001-150162 A.
[0007]
[Problems to be solved by the invention]
By the way, due to the demand for higher recording density of the magnetic disk medium, the flying height of the magnetic head is required to be 10 nm or less. In such extremely low flying height, it is necessary to accurately control the distortion shape of the air bearing surface. The
[0008]
However, in the former method described above, since one laser plate, that is, one slider, is irradiated with laser light all at once, there arises a problem that the convex amount cannot be controlled with high accuracy.
[0009]
In both the former and the latter methods, the amount of protrusion is controlled by controlling the energy density of the laser. In order to control the energy density of the laser, it is necessary to change the laser power of the laser oscillator, and there is a problem that it takes time to reach a predetermined energy. Furthermore, depending on the set laser power, there is a problem that the energy stability of the laser oscillator deteriorates and stable laser processing cannot be performed.
[0010]
Accordingly, the present invention has been made in view of the above problems, and an object of the present invention is to provide a magnetic head manufacturing apparatus and manufacturing method capable of accurately forming a distorted shape and improving productivity. It is.
[0011]
[Means for Solving the Problems]
According to one aspect of the present invention, in a manufacturing apparatus of a magnetic head having an air bearing surface that generates a levitation force by an air flow generated by a rotating magnetic disk, a laser pulse emitting unit that emits a laser pulse, and the laser pulse emitting And an irradiation position control means for controlling the irradiation position of the laser pulse. The regions irradiated with the laser pulse overlap with each other based on the control of the laser pulse emitting means and the irradiation position control means. Thus, there is provided a magnetic head manufacturing apparatus that irradiates the back surface of the air bearing surface with a plurality of laser pulses so as to be separated or separated from each other to generate distortion in the magnetic head.
[0012]
According to the present invention, the back surface of the air bearing surface of one magnetic head is irradiated with a plurality of laser pulses. By separating the areas irradiated by the respective laser pulses or by irradiating them so as to partially overlap each other, a part of the back surface is melted and solidified and pulled without changing the energy of each laser pulse. Generate stress. Due to the tensile stress locally generated in the region irradiated with the laser pulse, it is possible to give a fine strain shape with a convex on the air bearing surface side with high accuracy. Thus, since it is not necessary to change the laser power of the laser pulse emitting means, the time for stabilizing the laser power can be omitted and the productivity can be improved. The laser pulse emitting means is a YAG (yttrium, aluminum, garnet crystal) pulse laser oscillator, a YLF pulse laser oscillator, or the like. The laser pulse irradiation position control means is a galvano scanner mirror, an acousto-optic element, an electro-optic element, or the like.
[0013]
The apparatus further includes shaping means for defining the cross-sectional shape of the laser pulse, and the area of the region where the laser pulse is irradiated on the back surface of the air bearing surface is smaller than the area of the back surface. By making the cross-sectional shape of the laser pulse irradiated to the back surface of the air bearing surface of the magnetic head, for example, rectangular or linear, tensile stress is generated on the back surface of the air bearing surface with good symmetry compared to the circular shape. It becomes possible to make it. The region irradiated with the laser pulse is a part of this back surface. When irradiating the entire surface, the heat generated by the irradiation is concentrated near the center of the back surface, so the tensile stress is concentrated near the center, and the strain shape is determined by this stress. It was difficult to form well. According to the present invention, a tensile stress can be generated uniformly over the entire back surface, and a strained shape can be imparted to the peripheral portion with high accuracy. The shaping means is a mask or a liquid crystal mask whose shape and size to be cut out are variable.
[0014]
The irradiation position control means is a galvano scanner and irradiates the back surface with laser pulses at a predetermined interval based on the operation speed of the galvano scanner. By adjusting the laser pulse irradiation interval on the back surface of the air bearing surface according to the operation speed of the galvano scanner, the number and energy of laser pulses irradiated on the entire back surface can be adjusted to control the amount of distortion. .
[0015]
Energy density control means for controlling the energy density of the laser pulse after being emitted from the laser pulse emitting means is further provided. When the energy density of the laser pulse is changed by the laser pulse emitting means, it takes time until the energy becomes stable. The energy density can be changed in a short time by an attenuator, a liquid crystal mask, or the like, which is an energy density control means, and a distorted shape can be formed with higher accuracy without reducing productivity.
[0016]
According to another aspect of the present invention, in a method of manufacturing a magnetic head having an air bearing surface that generates levitation force by an air flow generated by a rotating magnetic disk, the back surface of the air bearing surface has a smaller cross-sectional area than the back surface. There is provided a method of manufacturing a magnetic head including a step of generating a distortion in a magnetic head by irradiating laser pulses a plurality of times so as to overlap or not overlap at a predetermined interval.
[0017]
According to the present invention, the back surface of the air bearing surface is irradiated with a plurality of laser pulses having a smaller cross-sectional area than the back surface. By the same action as described above, a fine strain shape having a convex surface on the air bearing surface can be provided with high accuracy. Thus, since it is not necessary to change the laser power of the laser pulse emitting means, the time for stabilizing the laser power can be omitted and the productivity can be improved.
[0018]
The laser pulses may be irradiated with different energy densities. A distortion shape can be formed with higher accuracy.
[0019]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0020]
FIG. 1 is a diagram showing a schematic configuration of a magnetic head manufacturing apparatus according to an embodiment of the present invention. Referring to FIG. 1, the magnetic head manufacturing apparatus 10 according to the present embodiment changes the reflection angle of a laser pulse emitted from a laser oscillator 12 minutely by a galvano scanner 15, and magnetizes it by imaging lenses 18 and 19. The distortion processing is performed by irradiating a predetermined position on the back surface of the air bearing surface (hereinafter referred to as ABS surface) of the slider array 30 of the head.
[0021]
Specifically, the magnetic head manufacturing apparatus 10 includes a control unit 11 including a microcomputer, a laser oscillator 12, a uniform optical system 13 that uniformizes the intensity of a laser pulse emitted by the laser oscillator 12, and a uniform A mask 14 that cuts the cross-sectional shape of the laser pulse from the optical system 13 into a rectangular shape, and a slider that operates in synchronization with the emission of the laser pulse by the control unit 11, and the laser pulse cut by the mask 14 is a workpiece. A galvano scanner 15 for scanning the array 30, a collimation lens 16 for making a laser pulse reflected by the galvano scanner 15 and incident obliquely parallel to the optical axis of the optical system, and a laser transmitted through the collimation lens 16 Imaging lenses 18 and 19 for imaging pulses on the slider array 30 , An energy monitor 20 for monitoring the energy abnormality of the laser beam, an observation optical system 21 for observing the slider array 30, an XY stage 22 for moving the slider array 30, and a reflecting mirror 23 for changing the optical path To 27, a damper 29, and the like.
[0022]
The laser oscillator 12 uses a solid-state laser oscillator such as YAG. For example, a YAG laser oscillator having a pulse width of 0.02 to 20 ms, a repetition frequency of 100 Hz to 1 kHz, and a peak power of 100 W to 5 kW can be used.
[0023]
The uniform optical system 13 includes, for example, an optical fiber bundle. The laser pulse emitted from the YAG laser oscillator 12 is made uniform in intensity distribution of the laser pulse by an optical fiber, for example, an SI (step index) type optical fiber having a wide spatial distribution of refractive index. An optical path may be formed by an optical fiber between the laser oscillator 12 and the uniform optical system 13.
[0024]
The mask 14 has a rectangular or slit-shaped opening. The mask 14 cuts out the light beam of the laser pulse from the uniform optical system 13 into a predetermined shape, for example, a 10 mm × 1 mm rectangular light beam. This light beam is reduced to about 1/10 by an optical system such as the rear imaging lenses 18 and 19 and becomes a laser pulse having a cross-sectional shape of, for example, 1 mm × 0.1 mm on the back surface of the ABS surface.
[0025]
Further, a liquid crystal mask can be used to shape the cross-sectional shape of the laser pulse into an arbitrary shape instead of the mask 14. The liquid crystal mask is composed of a TN (twisted nematic) liquid crystal cell, and the amount of transmission of the laser pulse, for example, transmission and blocking, for each liquid crystal cell matrix, is turned on and off by a voltage applied to electrodes sandwiching the liquid crystal cell. The laser pulse can be cut into any shape or size. For example, when a laser pulse is applied to the entire back surface of the ABS surface of one slider to give a distortion shape as a whole and then a distortion shape is given partially, the size and shape of the laser pulse light flux can be changed by a liquid crystal mask. It can be changed and processed efficiently. The liquid crystal mask can also be used as an attenuator that transmits, for example, 50% of the incident laser pulse, in addition to turning the transmission amount on and off. By irradiating the back surface of one ABS surface with laser pulses having different energy densities, the strain amount and the strain shape can be adjusted with higher accuracy.
[0026]
The galvano scanner 15 is a mirror mounted on a motor with a biaxial rotary encoder. The laser pulse cut out by the mask 14 is oscillated by the mirror whose angle changes, and the position where the laser pulse is irradiated is determined. Control. Laser pulses can be irradiated in two directions on the back surface of the ABS surface, for example, in the X-axis and Y-axis directions of the XY stage 22. The galvano scanner 15 sends the optical axis to the rear optical system so that the laser pulse is not irradiated onto the XY stage 22 when the XY stage 22 is moving or when the slider array 30 is replaced. First, the laser pulse is irradiated to the damper 29 or the like. This is because when the oscillation of the laser oscillator 12 is stopped, the energy density immediately after re-oscillation becomes unstable and it takes time to stabilize. The damper 29 is provided with cooling means such as cooling water in order to absorb heat generated by the irradiated laser pulse.
[0027]
The collimation lens 16 is shaken by the galvano scanner 15 and used to make a laser pulse incident obliquely with respect to the optical axis of the collimation lens 16 parallel to the optical axis. The collimation lens 16 is set to a size that allows the laser pulse waved by the galvano scanner 15 to be incident.
[0028]
The imaging lenses 18 and 19 are used to form an image of the laser pulse transmitted through the collimation lens 16 on the back side of the ABS surface on the XY stage 22. The reduction ratio of the light flux of the laser pulse is set by the imaging lenses 18 and 19. At least one of the imaging lenses 18 and 19 may be provided with a lens fine movement control device (not shown) for focusing.
[0029]
The observation optical system 21 is constituted by a CCD camera or the like that receives visible light transmitted through the reflection mirror 26. This is for observing the processed surface of the slider array 30 on the XY stage 22 and is used for alignment of the slider array 30.
[0030]
The energy monitor 20 measures energy for each pulse of the laser pulse partially transmitted through the reflection mirror 26. It is determined whether or not the laser pulse is within a predetermined energy value range. If the laser pulse is equal to or lower than the predetermined value, re-irradiation processing is performed, and processing defects due to the laser pulse irradiation amount can be reduced.
[0031]
The XY stage 22 is finely moved with high precision on the X and Y axes, and a jig or the like (not shown) for fixing the slider array 30 is mounted thereon. The XY stage 22 is used to switch and select a slider to be laser irradiated.
[0032]
The operation of the above-described magnetic head manufacturing apparatus 10 will be described below. The relationship between the energy density of the laser pulse to be irradiated, the shape and size of the irradiation region, the irradiation position, the distortion shape of the slider, and the distortion amount is stored in advance in the storage device of the control unit 11, for example. The irradiation position is controlled by the mirror angle and the operation speed of the galvano scanner 15 with respect to the slider array 30 previously positioned on the XY stage 22. The size of the irradiation laser pulse is determined by the size of the opening of the mask 14 and the reduction ratio of the imaging lenses 18 and 19. Based on these relationships, the control unit 11 emits a laser pulse from the laser oscillator 12, operates the galvano scanner 15 in synchronization with this emission, and swings the optical axis of the laser pulse. A laser pulse at a predetermined position of the slider array is irradiated.
[0033]
Next, a method for manufacturing a magnetic head according to an embodiment of the present invention will be described.
[0034]
2A to 2D are diagrams showing the manufacturing process of the magnetic head. 2A, a large number of thin film magnetic head elements 33 are formed on an Altic substrate 32 by a wafer process. Specifically, a read head element (not shown) composed of a write head element and an MR element which are the thin film magnetic head elements 33 is formed in a matrix. Each layer of these elements is formed by a plating method, a sputtering method, a CVD method, or the like, and fine shape processing is patterned by a lithography method or the like, and is ground by dry etching or the like.
[0035]
Next, in the step of FIG. 2B, the substrate 32 on which the thin film magnetic head element 33 is formed is cut out in each row. This cut out is called a slider array 35. After the cut surface of the slider array 35 is polished to smooth the surface, a tapered surface is formed on the ABS surface 34A opposite to the side on which the thin film magnetic head element is formed. Next, for example, a positive resist film having photosensitivity is attached to the ABS surface 34A. A mask (not shown) on which a rail-like pad pattern is formed is brought into contact with the head array 35, and the resist film is exposed by irradiating ultraviolet light or the like from the mask. The resist film is then developed and the exposed portions are removed. Next, a predetermined amount is ground by ion milling using the remaining resist as a mask to form a rail-like pad pattern on the ABS surface 34A. Next, a DLC (diamond like carbon) film for suppressing wear or the like is formed on the ABS surface 34A by sputtering or the like.
[0036]
Next, in the process of FIG. 2C, the slider array 35 of FIG. 2B is turned upside down and placed on a jig (not shown) of the XY stage 22 of the magnetic head manufacturing apparatus 10, and is attached to the XY stage 22. Position. For example, the major axis direction (direction in which the sliders 34 are connected) of the slider array 35 is the X axis, and the minor axis direction is the Y axis. Next, a laser pulse is applied to each slider 34.
[0037]
FIGS. 3A and 3B are diagrams illustrating a procedure for irradiating the back surface of the ABS surface with a laser pulse. In the figure, a back surface 34B (hereinafter referred to as an irradiation surface) of the ABS surface of one slider 34 is shown, and irradiation regions 36A to 36D of one pulse of the laser pulse are shown by one hatched rectangle.
[0038]
Referring FIG. 3 (A), the irradiated surface 34B, for example, 4 pulses irradiating the X-axis direction at the same intervals _{L X.} The irradiation region 36 of one pulse is represented by W _X × W _Y. In the conventional method, the entire irradiation surface is irradiated with one pulse or a plurality of pulses so as to cover the entire irradiation surface. In the irradiation method that is a feature of the present invention, as shown in FIG. 3A, the irradiation surfaces 34B are separated from each other and irradiated, for example, in the X direction as laser pulses 36A to 36D. When irradiated in this way, the AlTiC in the irradiated region is instantaneously melted and solidified to locally generate tensile stress, and the relationship between the laser pulse irradiation interval L _X and the amount of strain described later (FIG. 5 ( As is clear from (A) and (B)), a shape with a smaller distortion amount can be given with high accuracy.
[0039]
Note that this irradiation is performed by synchronizing the emission of the laser pulse from the laser oscillator 12 and the galvano scanner 15 shown in FIG. For example, for one axis of the galvano scanner 15 that can scan in the X-axis direction on the XY stage 22, the mirror angle of the galvano scanner 15 and the laser pulse are synchronized, and the operation speed of the galvano scanner 15, the repetition period of laser pulse emission, and the result After irradiating at the irradiation interval Lx set by the reduction ratio of the image lenses 18 and 19 and irradiating a predetermined number of laser pulses, the mirror of the galvano scanner 15 is set to the angle of the damper 29 so that the irradiation surface is not irradiated. . These controls are performed by the control unit 11.
[0040]
Further, as shown in FIG. 3B, the irradiation interval L _X is made narrower than the laser pulse width W _X in the X-axis direction, that is, irradiation is performed so that adjacent irradiation regions overlap. By irradiating in this way, the amount of distortion can be increased. Also in this case, since it is not necessary to change the irradiation energy of each laser pulse, it can be processed in a short time. In this case, as compared with FIG. 3A, the size of the irradiation region 36 is changed by changing the mask 14 shown in FIG. 1 or controlling the transmission range using a liquid crystal mask instead of the mask. To achieve.
[0041]
Moreover, you may combine the method of FIG. 3 (A) and (B). The energy of the laser pulse irradiated to the irradiation surface 34B can be controlled more precisely, and the distortion shape can be given with high accuracy. At this time, the energy density of the laser pulse used in the methods of FIGS. 3A and 3B may be different. The energy of the laser pulse to be irradiated can be controlled more precisely. The energy density is changed by using a liquid crystal mask instead of the mask shown in FIG. 1 and controlling the laser pulse transmittance.
[0042]
FIG. 4 is a diagram for explaining another example of a procedure for irradiating an irradiation surface with a laser pulse. As shown in FIG. 4, the laser pulse may be irradiated by setting the irradiation interval L _Y not only in the X-axis direction but also in the Y-axis direction. In order to irradiate in this way, in addition to the irradiation in the X-axis direction described above, after irradiating the irradiation areas 36A and 36B in the X-axis direction, the angle of the mirror of the galvano scanner 15 that scans in the Y-axis direction is changed. Irradiate the irradiation areas 36C and 36D.
[0043]
When irradiated in this way, the irradiation surface contracts in the Y-axis direction, that is, the inflow end-outflow end direction of the slider 34, and a convex distortion shape in the inflow end-outflow end direction is added to the ABS surface 34A side. it can.
[0044]
Returning to FIG. 2D, the slider array 35 is cut into individual sliders 34. A magnetic head having a distortion amount _CW and having a convex distortion shape on the ABS surface 34A side is formed.
[0045]
According to the present embodiment, as described above, the laser pulse having a cross-sectional area smaller in area than the irradiation surface 34B is irradiated so that the irradiation regions do not overlap with each other, whereby a tensile stress is locally generated and is smaller. A distortion amount shape can be imparted. In addition, by irradiating the laser pulse so that the irradiation areas overlap, the total irradiation energy irradiated to the irradiation surface can be increased without changing the setting of the irradiation energy of one laser pulse, and a larger distortion amount. The shape can be imparted. Furthermore, by irradiating a laser pulse with the galvano scanner 15 in the Y-axis direction as well as the X-axis direction, it is possible to give a distortion shape also in the Y-axis direction, enabling more accurate distortion processing. It becomes.
[Example]
A laser pulse was applied to a slider array having a size of 1 mm × 1 mm and a thickness of 0.3 mm. The laser pulse irradiation is performed by the method described with reference to FIG. 3A, and the size of the irradiation area of one laser pulse is 0.2 mm in the X-axis direction, 0.8 mm in the Y-axis direction, and the energy density on the irradiation surface. It was set to 250 mJ / mm ² . The irradiation interval in the X-axis direction was set to 50 to 150 μm, and irradiation was performed so that the laser pulse did not protrude in the X-axis direction (width direction) of the slider. Further, irradiation was performed at equal intervals in the X-axis direction with respect to the number of laser pulses. The amount of distortion is measured using a laser interferometer with the height of the apex of the curved convex shape with respect to the reference surface consisting of the three ends of the slider (positive value when convex on the ABS surface side). Was measured.
[0046]
FIG. 5A is a diagram showing the relationship between the distortion amount and the irradiation interval, and FIG. 5B is a diagram showing the relationship between the distortion amount and the number of irradiation pulses per slider. For the amount of distortion, the difference between the amounts of distortion before and after laser irradiation is obtained. Referring to FIG. 5A, the distortion amount decreased when the irradiation interval was increased. This is considered because the total irradiation energy decreases as the irradiation interval increases. By adjusting the irradiation interval, it was possible to apply a small strain amount of several nm to a large strain amount of several tens of nm without changing the energy density of the laser pulse.
[0047]
Referring to FIG. 5B, the amount of distortion increased when the number of irradiation pulses per slider was increased. This is because the total irradiation energy increases in proportion to the number of irradiation pulses, and the amount of distortion increases. By adjusting the number of pulses, it was possible to apply a small amount of distortion of several nm to a large amount of distortion of several tens of nm without changing the energy density of the laser pulse.
[0048]
Although the preferred embodiments of the present invention have been described in detail above, the present invention is not limited to the specific embodiments, and various modifications and changes can be made within the scope of the present invention described in the claims. Is possible.
[0049]
【The invention's effect】
As is clear from the above detailed description, according to the present invention, the areas irradiated by the respective laser pulses are separated from each other or partially overlapped on the back surface of the air bearing surface of one magnetic head. By irradiating, the fine distortion shape in which the air bearing surface side is convex can be provided with high accuracy without changing the energy of each laser pulse. In addition, since it is not necessary to change the laser power of the laser pulse emitting means in this way, the time for stabilizing the laser power can be omitted, and the productivity can be improved.
[Brief description of the drawings]
FIG. 1 is a diagram showing a schematic configuration of a magnetic head manufacturing apparatus according to an embodiment of the present invention.
FIGS. 2A to 2D are diagrams showing a manufacturing process of a magnetic head.
FIGS. 3A and 3B are diagrams illustrating an example of a procedure for irradiating a back surface of an ABS surface with a laser pulse. FIGS.
FIG. 4 is a diagram for explaining another example of a procedure for irradiating a back surface of an ABS surface with a laser pulse.
5A is a diagram showing the relationship between the amount of distortion and the irradiation interval, and FIG. 5B is a diagram showing the relationship between the amount of distortion and the number of irradiation pulses per slider.
[Explanation of symbols]
10 of the magnetic head manufacturing apparatus 11 control unit 12 the laser oscillator 14 mask 15 galvano scanners 30 and 35 the slider array 34 slider 36A~36D irradiation area _L X, _{L Y} irradiation interval _W X, _{W Y} irradiation area width

Claims (6)

In an apparatus for manufacturing a magnetic head having an air bearing surface that generates levitation force by an air flow generated by a rotating magnetic disk,
Laser pulse emitting means for emitting a laser pulse;
It operates in synchronization with the laser pulse emitting means, and includes an irradiation position control means for controlling the irradiation position of the laser pulse,
Based on the control of the laser pulse emitting means and the irradiation position control means, the back surface of the air bearing surface is irradiated with a plurality of laser pulses so that the regions irradiated with the laser pulses overlap or separate from each other. An apparatus for manufacturing a magnetic head, characterized by causing distortion in the magnetic head. 2. The magnetism according to claim 1, further comprising shaping means for defining a cross-sectional shape of the laser pulse, wherein an area of the back surface of the air bearing surface irradiated with the laser pulse is smaller than an area of the back surface. Head manufacturing equipment. 3. The magnetic head manufacturing apparatus according to claim 1, wherein the irradiation position control means is a galvano scanner, and irradiates the back surface with laser pulses at a predetermined interval based on an operation speed of the galvano scanner. . 4. The magnetic head manufacturing apparatus according to claim 1, further comprising energy density control means for controlling an energy density of the laser pulse after being emitted from the laser pulse emitting means. In a method of manufacturing a magnetic head having an air bearing surface that generates a levitation force by an air flow generated by a rotating magnetic disk,
A step of generating a distortion in the magnetic head by irradiating the back surface of the air bearing surface with laser pulses having a cross-sectional area smaller than the back surface at a predetermined interval or by irradiating a plurality of times so as not to overlap. Manufacturing method of the head. 6. The method of manufacturing a magnetic head according to claim 5, wherein irradiation is performed with different energy densities of the laser pulses.

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