JP2004110072A - Photomask repairing method, inspection method, inspection device and photomask manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pattern defect repairing device where a problem when a laser beam is adopted as a light source of an inspection device of a pattern defect, the defect of a pattern is inspected with higher resolution and the defect of the mask pattern can highly precisely be repaired. <P>SOLUTION: The device is provided with an illumination optical system 5 irradiating a photomask 2 with the laser beam in a state where a phase of the laser beams is changed and brightness distribution of the laser beam is uniformized and a defect detection device (central operating unit 2) detecting an image of the photomask by an accumulation-type sensor 17 while the laser beam and the photomask 2 are relatively moved, taking out an output signal from the accumulation-type sensor 17 in connection to the movement, forming a picture of the mask and detecting the defect of the mask pattern based on the picture of the mask. <P>COPYRIGHT: (C)2004,JPO

Description

The present invention relates to a photomask repair method for inspecting a mask pattern of a photomask used for manufacturing a semiconductor device and repairing a defect in the mask pattern based on the inspection.

検 査 As an inspection apparatus applied to a semiconductor manufacturing process, there is an apparatus for inspecting a mask pattern defect of a photomask (for example, see Patent Document 1). This device has an illumination optical system for illuminating a photomask, a sensor for detecting an image of the photomask and outputting an image signal, and an inspection device for inspecting a mask pattern based on the output image signal. ing.

As a light source used in the illumination optical system, a mercury lamp is generally used. According to this mercury lamp, the photomask can be illuminated using light having a wavelength from the visible light region to the ultraviolet region (around 365 nm) (for example, see Non-Patent Document 1).
U.S. Pat. No. 4,559,603 M. Tabata, et al., “A new die-to-database mask inspection system with i-line optics for 256Mbit and 1Gbit DRAMs”, SPIE Vol. 3096, 1997, p.415-422

In recent years, the mask pattern of a photomask has been increasingly miniaturized and highly integrated with the advancement of the performance of semiconductor devices. Accordingly, inspection apparatuses are required to exhibit high resolution. In order to realize high resolution, it is necessary to shorten the wavelength of the illumination light. However, in the conventional mercury lamp, an illuminance that can be used for an inspection device cannot be obtained in a short wavelength region. Therefore, it is necessary to use a laser light source such as an ultraviolet laser instead of the mercury lamp.

However, when laser light is used as the light source of the defect inspection apparatus, a certain interference fringe (speckle) may be generated due to the coherence of the laser. When this interference fringe occurs, unevenness in brightness appears in the detection image output from the sensor. Therefore, at the time of defect inspection, it is determined whether the unevenness is caused by a pattern defect or a laser interference fringe. There is a problem that it becomes impossible.

Therefore, the present invention solves the problem when laser light is employed as a light source of a pattern defect inspection apparatus, inspects pattern defects with higher resolution, and thereby can perform high-resolution mask pattern defect repair. It is an object of the present invention to provide a pattern defect repairing apparatus.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems, and an illumination for irradiating a laser beam onto a photomask in a state where the phase of the laser beam is changed and the brightness distribution of the laser beam is made uniform. A step of detecting the image of the photomask with a stacked type (TDI) sensor while relatively moving the laser beam and the photomask, and extracting an output signal from the stacked type sensor in association with the movement; A photomask repair method, an inspection method, and a photomask manufacturing method, including an image acquisition step of forming an image of the mask, and a defect detection step of detecting a defect of a mask pattern based on the image of the mask; An inspection device for performing is provided.

According to such a configuration, a photomask image that is not affected by the coherence of the laser beam can be obtained, and a highly accurate inspection can be performed based on the image. Then, the defect repair of the photomask can be performed based on the highly accurate defect information.

According to the configuration described above, it is possible to solve the problem when the laser light is used as the light source of the pattern defect inspection apparatus, inspect the pattern for defects with higher resolution, and thereby repair the defect of the high-definition mask pattern. Can be performed.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings (first embodiment).
FIG. 1 shows a mask pattern inspection apparatus and a mask repair apparatus 20 for repairing a mask based on the inspection result of the mask pattern inspection apparatus.

Ｘ An XY table is indicated by reference numeral 1 in FIG. The XY table 1 holds a photomask 2 to be inspected / repaired and drives the photomask 2 in an arbitrary XY direction. The XY table 1 is connected to a central control unit 4 via an XY table driving driver 3.

The inspection apparatus has an illumination optical system 5 that illuminates the photomask 2 held on the XY table 1. The illumination optical system 5 includes an Ar laser 6 as a laser light source that oscillates laser light, a laser light homogenizing optical system 7 that changes interference fringes of the laser light to uniform the brightness distribution of the laser light, And an objective lens 8 for irradiating the laser beam passed through the chemical optical system 7 onto the photomask 2 in a spot form.

The uniformizing optical system 7 includes a fly-eye lens 10 (fly array lens), a rotating phase plate 11, and a vibrating mirror 12.

First, the fly's eye lens 10 has a structure in which a plurality of lenses 10a are arranged in an array and integrated. According to the fly-eye lens 10, a plurality of secondary light source images can be formed, and since these pupil images overlap on the photomask 2, the intensity distribution of the laser 6 can be made uniform.

FIG. 2A is a front view showing the rotary phase plate 11. The rotary phase plate 11 has a light transmissive structure in which a large number of steps 11a to 11d having different depths are randomly provided on the surface as shown in an enlarged part of FIGS. 2 (b) and 2 (c). It is a disk. According to such a rotary phase plate 11, since the thickness varies depending on the location, the laser beam is transmitted while rotating the rotary phase plate 11, thereby changing the phase of the laser light to the depth of each of the steps 11a to 11d. Can be changed according to Each of the steps 11a to 11d is formed to a thickness such that the phase of the laser beam can be shifted by 0, ４λ, λλ, and ／ λ.

The rotary phase plate 11 is driven to rotate by a rotary drive motor 13 shown in FIG. 1, and the motor 13 is connected to the central control unit 4 via a motor driver (not shown). The central controller 4 controls the motor 13 to rotate the rotating phase plate 11 at, for example, 10,000 rpm.

ラ ン ダ ム By randomly changing the phase of the laser light in this way, the interference fringes of the laser light can be changed, and by performing this at high speed, the brightness of the laser light can be made uniform.

On the other hand, the oscillating mirror 12 is configured to be oscillated and oscillated at a frequency of, for example, 100 Hz by a mechanical driving unit 15 such as a piezo element, and the optical axis of the laser light reflected by the mirror 12 is periodically changed. It has a shifting function.

By shifting the optical axis of the laser light in this manner, the interference fringes of the laser light are changed as described with reference to FIGS. 3A and 3B and FIGS. 4A to 4D. be able to. That is, FIG. 3A is a plan view showing a brightness distribution (interference fringes) of the laser light oscillated from the laser light source 6, and FIG. 3B shows a brightness distribution in a section III-III. It is a waveform.

By vibrating the vibrating mirror 12, the brightness distribution waveform shown in FIG. 3B can be shifted in the horizontal direction as shown in FIGS. 4A to 4D, and the shift width is one wavelength. By vibrating the vibrating mirror 12 at a high speed with an amplitude equal to or larger than (λ shown in the figure), the brightness of the laser beam can be made uniform as shown in FIG. The amplitude and frequency of the vibration mirror 12 are determined and controlled by the central control unit 4.

From the above, the laser light passing through the vibrating mirror 12 is irradiated onto the photomask 2 through the objective lens 8 in a state where the brightness is made uniform.

{Circle around (1)} This device uses a storage (TDI) sensor 17 shown in FIG. 1 as a sensor for detecting the image of the photomask 2. This accumulation type sensor 17 is composed of photoelectric conversion elements of a total of 64 lines, 1048 pixels per line. The accumulation type sensor 17 is controlled by a sensor circuit indicated by 18 in FIG. That is, the accumulation type sensor 17 accumulates the light intensity output signal from one line sequentially and the light intensity output signal from the adjacent line in synchronization with the moving speed of the photomask 2 (XY table 1). , 64 lines having a special function of outputting the accumulated intensity signals.

Here, the time required for signal accumulation of the accumulation type sensor 17 (signal accumulation time) is equal to the time required for detecting the same portion of the photomask 2 in all of the first to 64th lines. The signal accumulation time is preferably set to a minimum time during which the brightness of the laser beam can be made uniform by the uniforming optical system 7.

In this embodiment, for example, in the process shown in FIGS. 4A to 4D, if the time during which the waveform of the light corresponding to the interference fringes can be shifted by the wavelength λ matches the signal accumulation time, the laser light , It is possible to obtain a uniform detection signal which is not affected by the coherence.

On the contrary, the number of rotations of the rotating phase plate 11 and the number of vibrations of the vibration mirror 12 may be determined in accordance with the signal accumulation time of the accumulation type sensor 17.

In other words, when the signal accumulation time of the accumulation type sensor 17 is short, it is necessary to equalize the brightness of the laser light within this short time. Therefore, it is necessary to increase the number of rotations of the rotating phase plate 11 and the number of vibrations of the vibrating mirror 12.

In this embodiment, as described above, the rotation speed of the rotary phase plate 11 is 10,000 rpm, the vibration frequency of the vibrating mirror 12 is 100 Hz, the scan time of one line of the accumulation type sensor is 30 μsec, and the signal accumulation time is 30 μsec *. By setting 64 = 1.92 msec, a uniform detection signal could be obtained.

As described above, by illuminating the photomask 2 and detecting its image using the uniformizing optical system 7 and the accumulation type sensor 17, a photomask image which is not affected by the coherence of the laser beam can be detected. can do. Therefore, it is possible to detect the mask pattern of the photomask 2 with high resolution.

The mask pattern image thus detected is used for inspection of the mask pattern by the central control unit 4, and the inspection result is sent to the mask repair device 20 to be used for repair of the mask pattern.

Hereinafter, this inspection and repair process will be described with reference to the flowchart shown in FIG.

First, in the defect inspection, it is necessary to inspect whether the pattern is formed at the designed position and whether the formed pattern has any defect. Here, the pattern defect includes a case where a part of the pattern is missing (missing defect), a case where an unnecessary portion remains without being removed (remaining defect), and a case where foreign matter is attached. (Foreign matter adhesion) is also included.

When the detection of the mask pattern image is completed in step S1, the central control unit 4 specifies the position where the defect has occurred and the type of the defect based on the detection result (step S2).

Here, as the pattern defect inspection method, an actual pattern comparison method and a design pattern comparison method can be appropriately selected and adopted. The actual pattern comparison method is a method of comparing and inspecting adjacent identical patterns. The design pattern comparison method is a method of comparing pattern design data with measurement data for inspection.

In this embodiment, the design data development device 21 is shown in FIG. 1 as a design pattern comparison method. That is, in this method, the position of the mask pattern image obtained from the accumulation type sensor 17 and the design pattern image (CAD data) developed by the design data developing device 21 are aligned and compared. The defect position and the defect type are specified.

If it is determined in step S2 that no defect has occurred, the inspection processing ends (END). If the defect is an unrepairable defect (step S3), such as when the defect extends over a plurality of adjacent patterns, the mask pattern film is removed and patterning is performed again (step S3). S4).

If the defect position and the defect type are specified in step S2, the central control unit 4 transfers the defect information to the photomask repairing apparatus 20 together with the photomask 2.

The photomask repairing apparatus 20 executes an appropriate repairing method according to the type of defect. That is, when it is determined that the defect is a missing defect (step S5), a pattern is added based on the information of the detected missing position and corrected to a normal pattern shape (step S6). If the defect is a remaining defect (step S7), an unnecessary pattern is removed by an electron beam or the like based on the information on the detected remaining position, and the pattern is restored to a normal pattern shape (step S8).

{Circle around (4)} If the defect is foreign matter adhesion (step S9), the foreign matter is removed by transferring the photomask 2 to the cleaning step (step S10).

After the above steps are performed, the photomask repairing device 20 transfers the photomask 2 to the photomask inspection device (FIG. 1) together with the defect position information.

The central control unit 4 detects only the image of the defect repairing part of the photomask 2 based on the defect position information, and performs the inspection in step S2 again based on this image. Then, if necessary, the photomask 2 is transferred to the repairing device 20 again to execute the repairing process of steps S4 to S10.

According to such a configuration, a photomask image that is not affected by the coherence of the laser beam can be obtained, and a highly accurate inspection can be performed based on the photomask image. Then, the defect repair of the photomask 2 can be performed based on the highly accurate defect information.

In the first embodiment, the homogenizing optical system 7 having the vibration mirror 12 has been described. However, a certain effect can be obtained without providing the vibration mirror 12.

FIG. 6 shows an embodiment according to this example. Also in this example, the accumulation time of the accumulation type sensor 17 may be determined according to the time during which the brightness of the laser light can be made uniform by the rotation of the rotary phase plate.

Alternatively, the number of rotations of the rotating phase plate may be determined according to the accumulation time of the accumulation type sensor.

(Second embodiment)
Next, a second embodiment of the present invention will be described with reference to FIG. This embodiment shows another embodiment of the homogenizing optical system 7 of the apparatus shown in FIG. Therefore, other parts are omitted from the drawings, and the same components as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

The uniformizing optical system 7 ′ of this embodiment includes a fly-eye lens 10, a first rotating phase plate 11 ′ disposed on a secondary light source surface of the fly-eye lens 10, a relay optical system 22, It has a second rotating phase plate 11 "disposed at a position conjugate with the first rotating phase plate 11 'with the relay optical system 22 interposed therebetween.

The first and second rotary phase plates 11 'and 11 "may be the same as those in the first embodiment. Further, since the light source image is inverted by the relay optical system 22, the light source image is inverted. , The rotation directions of the first and second rotating phase plates 11 ′ and 11 ″ are reversed.

Even with such a configuration, the laser light passes through the fly-eye lens 10 to make the intensity distribution of the light source uniform, and then passes through the first and second rotating phase plates 11 'and 11 ". As in the embodiment, the interference fringes can be changed and the brightness of the laser beam can be made uniform.

In this case, the total number of rotations of the first and second rotating phase plates 11 'and 11 "may be set as the number of rotations of the rotating phase plate 11 of the first embodiment. , 11 "can be reduced, and the load on the apparatus is reduced.

It is important in this embodiment that the difference between the rotation speeds of the first and second rotating phase plates 11 'and 11 "does not match the natural frequency of the device. Is equal to the natural frequency, resonance occurs and the homogenizing effect may be insufficient, and in the worst case, the device may be damaged.

(Third embodiment)
Next, a third embodiment of the present invention will be described with reference to FIG.

This embodiment relates to still another example of the homogenizing optical system of the first embodiment. Therefore, illustration of the other components is omitted.

First, it is assumed that the laser light source 6 outputs linearly polarized laser light having a light beam diameter of 2L.

(4) The laser light is incident on the first light beam splitting unit 31. This light beam splitting unit 31 splits the laser light into upper and lower light beams as shown in FIG. 9, passes the upper half light beam of the laser light as it is, and is installed at an angle of 45 degrees with respect to the lower half light beam. The lower half light beam is reflected by the mirrors 31a, 31b, 31c, and 31d to be detoured. The detoured optical path is set so that the optical path length is longer than the coherent distance of the laser than the detoured optical path. Then, after the mirror 31d, the upper half and the lower half of the light beam merge.

According to such a light beam splitting unit 31, at the downstream position A (FIG. 8) of the mirror 31d, the light beam of the laser beam is split into upper and lower portions a1 and a2 as shown in FIG.

A second light beam splitting unit 32 is provided downstream of the light beam splitting unit 31. As shown in FIG. 10, the light beam splitting unit 32 splits the incident light beam into two right and left beams, passes the left half of the laser light as it is, and converts the right half light beam into the right half light beam. The mirrors 32a, 32b, 32c, and 32d, which are installed at an angle of 45 degrees with respect to, are deflected by reflection. The detoured optical path is set so that the optical path length is longer than the coherent distance of the laser than the detoured optical path.

As described above, the laser beam that has passed through the first and second beam splitting units 30 and 31 at the downstream position B of the mirror 32d shown in FIG. It is divided into b1 to b4.

反射 A reflection mirror 33 is provided downstream of the light beam splitting unit 32. The light beam of the laser beam is bent 90 degrees by the reflection mirror 33.

(4) The laser beam reflected by the reflection mirror 33 is incident on a 1 / 2λ plate 34 which rotates the deflection direction of a part of the laser beam by 90 degrees.

That is, the deflection direction of the laser light passing through the 1 / 2λ plate 34 is as shown in FIG.

A fly-eye lens 35 for eliminating laser light interference is provided on the downstream side of the 1 / 2λ plate 34.

回 転 A rotary phase plate 36 is provided downstream of the fly's eye lens 35. The rotation of the rotation phase plate 36 is controlled by a motor (not shown). The rotary phase plate 36 has the same configuration as that of the first embodiment, and has a function of changing interference fringes of laser light.

{Circle around (4)} The optical path of the laser light passing through the rotating phase plate 36 is bent by 90 degrees by the reflection mirror 37.

(4) The laser light reflected by the reflection mirror 37 is condensed by the condenser lens 38 and condensed on the objective lens 39. Then, the spot 41 is focused on the mask pattern 40 by the objective lens 19.

According to such a configuration, the coherence of the laser beam can be reduced by changing or rotating the optical path length by detouring a part of the laser beam, and this can be used as a rotating phase plate. By passing the light, the brightness can be made uniform. Therefore, it is possible to obtain substantially the same effects as in the first embodiment.

According to such a configuration, the laser beam can be divided into four beams that do not interfere with each other with only eight mirrors, so that the configuration and the optical transmission efficiency are improved.

By providing the wedge prism 42 as shown in FIG. 14 in front of the 1 / 2λ plate 34 shown in FIG. 8, speckle can be further reduced.

The wedge-shaped prism 42 may be provided behind, instead of in front of the 1 / 2λ plate 34.

FIG. 1 is a schematic configuration diagram showing a first embodiment of the present invention. (A)-(c) is a figure for demonstrating 1st Embodiment of this invention, Comprising: It is a schematic block diagram which shows a rotation phase plate. (A), (b) is a figure for demonstrating 1st Embodiment of this invention, Comprising: The top view which showed the interference fringe on the sample produced by the coherence of a laser beam, and shows a brightness distribution. Waveform diagram. (A)-(e) is a figure for demonstrating 1st Embodiment of this invention, Comprising: The waveform diagram which shows the process of making a brightness uniform by shifting an optical axis. FIG. 4 is a diagram for explaining the first embodiment of the present invention, and is a flowchart for explaining a mask inspection and mask repair process. FIG. 2 is a schematic configuration diagram showing a modification of the first embodiment of the present invention. FIG. 4 is a schematic configuration diagram showing a second embodiment of the present invention. FIG. 9 is a schematic configuration diagram illustrating a third embodiment of the present invention. FIG. 9 is a diagram for explaining a third embodiment of the present invention, and is a schematic configuration diagram showing a first light beam splitting unit. FIG. 9 is a diagram for explaining a third embodiment of the present invention, and is a schematic configuration diagram showing a second light beam splitting unit. FIG. 9 is a diagram for explaining a third embodiment of the present invention, and is an explanatory diagram for explaining a deflection direction of laser light after passing through a first light beam splitting unit. FIG. 9 is a diagram for explaining the third embodiment of the present invention, and is an explanatory diagram for explaining a deflection direction of laser light after passing through a second light beam splitting unit. FIG. 9 is a diagram for explaining the third embodiment of the present invention, and is an explanatory diagram for explaining a deflection direction of a laser beam in a state where a part of a light beam is rotated. FIG. 13 is a schematic configuration diagram illustrating a modification of the third embodiment.

Explanation of reference numerals

DESCRIPTION OF SYMBOLS 1 ... XY table, 2 ... Photo mask, 3 ... XY table drive driver, 4 ... Central control part, 5 ... Illumination optical system, 6 ... Laser light source, 7 ... Uniform optical system, 8 ... Objective lens, 10 ... Fly Eye lens, 11: rotational phase plate, 12: vibrating mirror, 13: rotational drive motor, 15: mechanical drive unit, 17: storage type sensor, 19: objective lens, 20: mask repair device, 21: design data development device , 22 ... Relay optical system.

Claims (36)

An illumination step of continuously changing the phase of the laser beam and irradiating the photomask with the laser beam in a state where the brightness distribution of the laser beam is made uniform;
While relatively moving the laser beam and the photomask, an image of the photomask is detected by a storage type sensor, and an output signal from the storage type sensor is taken out in conjunction with the movement, and an image of the mask is obtained. An image acquisition step to be formed;
A defect detection step of detecting a defect in the mask pattern based on the image of the mask;
A defect repairing step of identifying a pattern defect position based on the pattern defect detection result and repairing a mask pattern defect. The photomask repair method according to claim 1,
The photomask repair method according to claim 1, wherein the signal accumulation time of the accumulation type sensor is determined according to a minimum time during which the brightness distribution of the laser light can be made uniform in the illumination step. The photomask repair method according to claim 1,
A method for repairing a photomask, wherein a laser light source of a laser beam used in the illumination step is a continuous wave laser. The photomask repair method according to claim 1,
The lighting step includes:
A photolithography method comprising: changing the optical axis of laser light continuously or intermittently with respect to a photomask, thereby changing interference fringes of the laser light, and uniforming the brightness distribution of the laser light. Mask repair method. The photomask repair method according to claim 4,
A method of repairing a photomask, wherein a cycle of changing an optical axis of the laser light with respect to a photomask is determined according to a signal accumulation time of the accumulation type sensor. The photomask repair method according to claim 1,
The lighting step includes:
The method includes a step of changing the phase of the laser light by transmitting the laser light while rotating a light-transmitting plate having a different thickness depending on the location, and making the brightness distribution of the laser light uniform. Photomask repair method. The method for repairing a photomask according to claim 6,
The photomask repair method according to claim 1, wherein the light-transmitting rotation number is determined according to a signal accumulation time of the accumulation-type sensor. The photomask repairing method according to claim 6,
The lighting step includes:
A step of sequentially transmitting the laser beam through a plurality of rotating translucent plates. The method for repairing a photomask according to claim 6,
A photomask repair method, wherein the total number of rotations of the plurality of translucent plates is determined according to a signal accumulation time of the accumulation type sensor. The photomask repair method according to claim 1,
The lighting step includes:
A first detouring step of detouring only a part of the laser beam;
A second detouring step of detouring a part of the laser beam having passed through the first detouring step in a direction different from the detouring direction of the first detouring step;
By splitting the luminous flux of the laser light source,
A photomask repair method characterized by changing interference fringes of a laser beam to make the brightness distribution of the laser beam uniform. The photomask repair method according to claim 1,
The lighting step includes:
The first detouring step detours only half of the laser beam,
The second detouring step detours a half of the laser beam that has passed through the first detouring step in a direction different from the detouring direction of the first detouring step by 90 degrees. A photomask repair method characterized in that the light beam is divided into four light beams having no interference with each other, thereby changing interference fringes of the laser light and making the brightness distribution of the laser light uniform. The method for repairing a photomask according to claim 10,
By making the optical path difference between each detour in the first detour step and the second detour step and the optical path not detoured equal to or longer than the coherence length of the laser light source, the luminous fluxes of the laser light source interfere with each other. A method for restoring a photomask, comprising dividing the light into four light beams having no characteristic. The method for repairing a photomask according to claim 10,
The method of repairing a photomask, further comprising: a 1 / 2λ plate for rotating a deflection direction of a part of the laser beam including the center of the laser beam among the laser beams that have passed through the second detouring step by 90 degrees. The method for repairing a photomask according to claim 12,
A method for repairing a photomask, comprising: providing a wedge-shaped prism in front of or behind said 1 / 2λ plate. An illumination step of irradiating the photomask with the laser light while changing the phase of the laser light and making the brightness distribution of the laser light uniform;
While relatively moving the laser beam and the photomask, an image of the photomask is detected by a storage type sensor, and an output signal from the storage type sensor is taken out in conjunction with the movement, and an image of the mask is obtained. An image acquisition step to be formed;
A defect detection step of detecting a defect in a mask pattern based on the image of the mask. The photomask inspection method according to claim 15,
A method for inspecting a photomask, wherein a signal accumulation time of the accumulation type sensor is determined according to a minimum time during which the brightness distribution of laser light can be made uniform in the illumination step. The photomask inspection method according to claim 15,
A photomask inspection method, wherein a laser light source of a laser beam used in the illumination step is a continuous wave laser. The photomask inspection method according to claim 15,
The lighting step includes:
A photolithography method comprising: changing the optical axis of laser light continuously or intermittently with respect to a photomask, thereby changing interference fringes of the laser light, and uniforming the brightness distribution of the laser light. Mask inspection method. The photomask inspection method according to claim 18,
A photomask inspection method, wherein a cycle of changing the optical axis of the laser beam with respect to a photomask is determined according to a signal accumulation time of the accumulation type sensor. The photomask inspection method according to claim 15,
The lighting step includes:
The method includes a step of changing the phase of the laser light by transmitting the laser light while rotating a light-transmitting plate having a different thickness depending on the location, and making the brightness distribution of the laser light uniform. Photomask inspection method. The photomask inspection method according to claim 20,
The photomask inspection method according to claim 1, wherein the light-transmitting rotation speed is determined according to a signal accumulation time of the accumulation-type sensor. In the photomask inspection method according to claim 20,
The lighting step includes:
A step of sequentially transmitting the laser light through a plurality of rotating translucent plates. The photomask inspection method according to claim 20,
A total number of rotations of the plurality of translucent plates is determined according to a signal accumulation time of the accumulation type sensor. The photomask inspection method according to claim 15,
The lighting step includes:
A first detouring step of detouring only a part of the laser beam;
A second detouring step of detouring a part of the laser beam having passed through the first detouring step in a direction different from the detouring direction of the first detouring step;
By splitting the luminous flux of the laser light source,
A photomask inspection method characterized by changing interference fringes of a laser beam to make the brightness distribution of the laser beam uniform. The photomask inspection method according to claim 15,
The lighting step includes:
The first detouring step detours only half of the laser beam,
The second detouring step detours a half of the laser beam that has passed through the first detouring step in a direction different from the detouring direction of the first detouring step by 90 degrees. A photomask inspection method characterized in that by dividing the light beam into four light beams having no interference with each other, the interference fringes of the laser light are changed, and the brightness distribution of the laser light is made uniform. The photomask inspection method according to claim 24,
By making the optical path difference between each detour in the first detour step and the second detour step and the optical path not detoured equal to or longer than the coherence length of the laser light source, the luminous fluxes of the laser light source interfere with each other. A method for restoring a photomask, comprising dividing the light into four light beams having no characteristic. The photomask inspection method according to claim 24,
The method of repairing a photomask, further comprising: a 1 / 2λ plate for rotating a deflection direction of a part of the laser beam including the center of the laser beam among the laser beams that have passed through the second detouring step by 90 degrees. The photomask inspection method according to claim 26,
A method for repairing a photomask, comprising: providing a wedge-shaped prism in front of or behind said 1 / 2λ plate. A photomask manufactured through a process including the inspection method according to claim 15. An illumination optical system that irradiates the laser beam to a photomask in a state where the phase of the laser beam is changed and the brightness distribution of the laser beam is made uniform;
An image of the photomask is detected by a sensor while relatively moving the laser beam and the photomask, and an output signal is taken out from the storage type sensor in conjunction with the movement to form an image of the mask. An image acquisition unit;
A defect detection device for detecting a defect in a mask pattern based on the image of the mask. The photomask inspection method according to claim 30, wherein the sensor is a storage-type (TDI) sensor. 31. The photomask inspection device according to claim 30, wherein the illumination optical system has a rotating phase change plate. 31. The photomask inspection apparatus according to claim 30, wherein the illumination optical system has a fly array lens. 31. The photomask inspection apparatus according to claim 30, wherein the illumination optical system has a vibrating mirror. The photomask inspection apparatus according to claim 30,
The illumination optical system has a first optical path and a second optical path, and the first optical path and the second optical path have different lengths. Forming a pattern on a photomask;
An illumination step of irradiating the photomask with the laser light while changing the phase of the laser light and making the brightness distribution of the laser light uniform;
While relatively moving the laser beam and the photomask, an image of the photomask is detected by a storage type sensor, and an output signal from the storage type sensor is taken out in conjunction with the movement, and an image of the mask is obtained. An image acquisition step to be formed;
A defect detection step of detecting a defect in the mask pattern based on the image of the mask;
A defect repair step of, when a defect of the mask pattern is detected, identifying a defect position of the pattern based on the pattern defect detection result and repairing the defect of the mask pattern.

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