JP2004101554A

JP2004101554A - Mirror device, optical switch, electronic equipment, and mirror device driving method

Info

Publication number: JP2004101554A
Application number: JP2002259014A
Authority: JP
Inventors: Masahiro Fujii; 藤井　正寛; Shuji Koeda; 小枝　周史; Ryuichi Kurosawa; 黒沢　龍一
Original assignee: Seiko Epson Corp
Current assignee: Seiko Epson Corp
Priority date: 2002-09-04
Filing date: 2002-09-04
Publication date: 2004-04-02

Abstract

<P>PROBLEM TO BE SOLVED: To provide a mirror device which can drive a mirror in a larger way with smaller driving force, an optical switch, electronic equipment and a mirror device driving method. <P>SOLUTION: The mirror device is provided with mirror side operating parts 43 and 44 which are formed integrally with a mirror and counter side operating parts 41 and 42 on a supporting substrate of the mirror. The operating part 43 and operating part 41 on the side of an X direction is formed to be spaced narrower than the spacing between the operating part 44 and operating part 42 on the side opposite to the X direction. The mirror device is adapted to once tilt the mirror to the X direction by generating the attraction force resulting from a potential difference in the operating part 43 and the operating part 41, then to tilt the mirror in a direction opposite to the X direction in a large way by eliminating the potential difference between the operating part 43 and the operating part 41 to cancel the attraction force and by generating the attraction force resulting from the potential difference in the operating part 44 and the operating part 42. <P>COPYRIGHT: (C)2004,JPO

Description

【０００１】
【発明の属する技術分野】
本発明は、ミラーデバイス、光スイッチ、電子機器およびミラーデバイス駆動方法に関する。
【０００２】
【背景技術および発明が解決しようとする課題】
ミラーデバイスを駆動する場合、より少ない駆動力でミラーをより大きく駆動することが課題となっている。
【０００３】
このような課題を解決するため、特開２００１−３１１９００号公報では、ミラーの駆動方向の下面に傾斜面を有する対向電極を設け、当該傾斜面の傾斜方向に溝を設けた光走査装置が提案されている。
【０００４】
すなわち、ミラーデバイスを駆動する駆動力については、例えば、クーロン力によって静電駆動する場合、電極間の距離が近いほど駆動力が増し、電極間の距離が遠いほど駆動力が減る距離依存性を有する。
【０００５】
したがって、上記公報の方式では、傾斜が緩やかな場合には適用可能と思われるが、傾斜角を大きくするほどミラーと対向電極との距離が離れてしまい、より大きな駆動力が必要となり、より少ない駆動力でミラーをより大きく駆動するという課題を適切に解決することはできない。
【０００６】
本発明は、上記の課題に鑑みなされたものであり、その目的は、より少ない駆動力でミラーをより大きく駆動することが可能なミラーデバイス、光スイッチ、電子機器およびミラーデバイス駆動方法を提供することにある。
【０００７】
【課題を解決するための手段】
上記課題を解決するため、本発明に係るミラーデバイスは、所定の距離依存性駆動力によって駆動されるミラーを有するミラー基板と、当該ミラー基板を支持する支持基板とを有するミラーデバイスにおいて、
前記ミラー基板は、前記距離依存性駆動力が作用するとともに、駆動する一方向側および当該一方向とは逆の逆方向側に設けられる複数のミラー側作用部を有するミラーを含み、
前記支持基板は、前記ミラー側作用部との間で前記距離依存性駆動力が作用する複数の対向側作用部を有し、
前記ミラー側作用部および前記対向側作用部は、前記距離依存性駆動力として吸引力を発生可能に形成され、
前記一方向側にある前記ミラー側作用部および前記対向側作用部が吸引力を発生することによって当該ミラー側作用部と当該対向側作用部との間に吸引作用を生じさせて前記ミラーを前記一方向側に傾けた状態で、
当該ミラー側作用部および当該対向側作用部が吸引力を解除することによって当該ミラー側作用部に反動作用を生じさせ、前記逆方向側にある前記ミラー側作用部および前記対向側作用部が吸引力を発生することによって当該ミラー側作用部と当該対向側作用部との間に吸引作用を生じさせることによって前記ミラーを前記逆方向側に傾けるために、
前記一方向側にある前記ミラー側作用部と前記対向側作用部との間隔を、前記逆方向側にある前記ミラー側作用部と前記対向側作用部との間隔と比較して狭く形成したことを特徴とする。
【０００８】
また、本発明に係る光スイッチは、上記ミラーデバイスを有し、前記ミラーの駆動によって光路を切り替えることを特徴とする。
【０００９】
また、本発明に係る電子機器は、上記ミラーデバイスを有することを特徴とする。
【００１０】
また、本発明に係るミラーデバイス駆動方法は、所定の距離依存性駆動力が作用するとともに、ミラーが駆動される一方向側および当該一方向とは逆の逆方向側のミラーに設けられる複数のミラー側作用部と、前記ミラー側作用部との間で前記距離依存性駆動力が作用する複数の対向側作用部とを有するミラーデバイスを駆動するミラーデバイス駆動方法において、
前記一方向側にある前記ミラー側作用部と前記対向側作用部との間隔は、前記逆方向側にある前記ミラー側作用部と前記対向側作用部との間隔と比較して狭く形成され、
前記ミラー側作用部および前記対向側作用部は、前記距離依存性駆動力として吸引力を発生可能に形成され、
前記一方向側にある前記ミラー側作用部および前記対向側作用部が吸引力を発生することによって当該ミラー側作用部と当該対向側作用部との間に吸引作用を生じさせて前記ミラーを前記一方向側に傾け、
当該ミラー側作用部および当該対向側作用部が吸引力を解除することによって当該ミラー側作用部に反動作用を生じさせ、
前記逆方向側にある前記ミラー側作用部および前記対向側作用部が吸引力を発生することによって当該ミラー側作用部と当該対向側作用部との間に吸引作用を生じさせることによって前記ミラーを前記逆方向側に傾けることを特徴とする。
【００１１】
また、前記ミラーデバイス、前記光スイッチおよび前記電子機器において、前記ミラー基板は、前記ミラーと一体的に形成され、前記ミラーとは異なる位置に設けられ、前記一方向および前記逆方向の少なくとも一方に前記距離依存性駆動力を生じさせる少なくとも１つのミラー側作用部を有してもよい。
【００１２】
また、前記ミラーデバイス駆動方法において、前記ミラーデバイスは、前記ミラーと一体的に形成され、前記ミラーとは異なる位置に設けられ、前記一方向および前記逆方向の少なくとも一方に前記距離依存性駆動力を生じさせる少なくとも１つのミラー側作用部を有してもよい。
【００１３】
また、本発明に係るミラーデバイスは、所定の距離依存性駆動力によって駆動されるミラーを有するミラー基板と、当該ミラー基板を支持する支持基板とを有するミラーデバイスにおいて、
前記ミラー基板は、前記ミラーと一体的に形成され、前記ミラーとは異なる位置であって、かつ、前記ミラーが駆動する一方向側および当該一方向とは逆の逆方向側に設けられ、前記距離依存性駆動力が作用する複数のミラー側作用部を有し、
前記支持基板は、前記ミラー側作用部との間で前記距離依存性駆動力が作用する複数の対向側作用部を有し、
前記ミラー側作用部および前記対向側作用部は、前記距離依存性駆動力として吸引力を発生可能に形成され、
前記一方向側にある前記ミラー側作用部および前記対向側作用部が吸引力を発生することによって当該ミラー側作用部と当該対向側作用部との間に吸引作用を生じさせて前記ミラーを前記一方向側に傾けた状態で、
当該ミラー側作用部および当該対向側作用部が吸引力を解除することによって当該ミラー側作用部に反動作用を生じさせ、前記逆方向側にある前記ミラー側作用部および前記対向側作用部が吸引力を発生することによって当該ミラー側作用部と当該対向側作用部との間に吸引作用を生じさせることによって前記ミラーを前記逆方向側に傾けるために、
前記一方向側にある前記ミラー側作用部と前記対向側作用部との間隔を、前記逆方向側にある前記ミラー側作用部と前記対向側作用部との間隔と比較して狭く形成したことを特徴とする。
【００１４】
また、本発明に係る光スイッチは、上記ミラーデバイスを有し、前記ミラーの駆動によって光路を切り替えることを特徴とする。
【００１５】
また、本発明に係る電子機器は、上記ミラーデバイスを有することを特徴とする。
【００１６】
また、本発明に係るミラーデバイス駆動方法は、所定の距離依存性駆動力によって駆動されるミラーと一体的に形成され、前記ミラーとは異なる位置であって、かつ、前記ミラーが駆動する一方向側および当該一方向とは逆の逆方向側に設けられ、前記距離依存性駆動力が作用する複数のミラー側作用部と、当該ミラー側作用部との間で前記距離依存性駆動力が作用する複数の対向側作用部とを有するミラーデバイスを駆動するミラーデバイス駆動方法であって、
前記一方向側にある前記ミラー側作用部と前記対向側作用部との間隔は、前記逆方向側にある前記ミラー側作用部と前記対向側作用部との間隔と比較して狭く形成され、
前記ミラー側作用部および前記対向側作用部は、前記距離依存性駆動力として吸引力を発生可能に形成され、
前記一方向側にある前記ミラー側作用部および前記対向側作用部が吸引力を発生することによって当該ミラー側作用部と当該対向側作用部との間に吸引作用を生じさせて前記ミラーを前記一方向側に傾けた状態で、
当該ミラー側作用部および当該対向側作用部が吸引力を解除することによって当該ミラー側作用部に反動作用を生じさせ、前記逆方向側にある前記ミラー側作用部および前記対向側作用部が吸引力を発生することによって当該ミラー側作用部と当該対向側作用部との間に吸引作用を生じさせることによって前記ミラーを前記逆方向側に傾けることを特徴とする。
【００１７】
本発明によれば、ミラーデバイス等は、距離依存性のある駆動力（例えば、クーロン力、電磁気力等）を用いてミラーを駆動する場合に、一方向側にあるミラー側作用部と対向側作用部との間隔を、逆方向側にあるミラー側作用部と対向側作用部との間隔と比較して狭く形成しておき、一旦、一方向側にミラーを傾けた後、その反動で逆方向側にミラーを傾けることができる。
【００１８】
すなわち、一方向側にあるミラー側作用部と対向側作用部との間隔は狭いので、ミラーデバイス等は、一方向側にあるミラー側作用部および対向側作用部に吸引力を発生させることにより、少ない駆動力でミラーを傾けることができる。
【００１９】
そして、ミラーデバイス等は、一方向側にミラーを傾けた状態で、一方向側にあるミラー側作用部および対向側作用部の吸引力を解除することにより、その反動でミラーを若干逆方向側に傾けることができる。
【００２０】
この状態では、初期状態と比べて逆方向側のミラー側作用部と対向側作用部との間隔は狭くなっている。
【００２１】
この状態で、ミラーデバイス等は、逆方向側のミラー側作用部および対向側作用部に吸引力を発生させることにより、ミラーを逆方向側に傾けることができる。
【００２２】
以上の手順により、ミラーデバイス等は、より少ない駆動力で、ミラーをより大きく駆動することができ、ミラーをより大きく傾けることができる。
【００２３】
なお、吸引力を発生する手法としては、例えば、前記距離依存性駆動力としてクーロン力を用いる場合には、前記ミラー側作用部と前記対向側作用部に電位差を生じさせる手法を採用し、前記距離依存性駆動力として電磁気力を用いる場合には、前記ミラー側作用部と前記対向側作用部の極性を逆（例えば、Ｎ極とＳ極）にする手法を採用してもよい。
【００２４】
また、ミラーの駆動をより効率的に行う手法としては、例えば、吸引とその解除のタイミングを前記ミラー側作用部、ミラーの回転軸部によって構成される振動系の共振周波数にほぼ一致させる手法を採用してもよい。
【００２５】
また、前記ミラーデバイス、前記光スイッチおよび前記電子機器において、前記ミラー基板は、前記ミラーと一体的に形成され、前記ミラーを回転可能に支持する回転軸部を有し、
前記ミラー側作用部は、前記回転軸部から前記ミラーの回転方向側の端部方向にずれた位置に前記距離依存性駆動力が作用するように、前記回転軸部に設けられていてもよい。
【００２６】
また、前記ミラーデバイス駆動方法において、前記ミラーと一体的に形成され、前記ミラーを回転可能に支持する回転軸部から前記ミラーの回転方向側の端部方向にずれた位置で前記距離依存性駆動力を作用させてもよい。
【００２７】
これによれば、ミラーデバイス等は、ミラーの回転方向側の端部方向にずれた位置で距離依存性駆動力を作用させることにより、回転軸部をねじり、ミラーを回転駆動することができる。
【００２８】
また、前記ミラーデバイス、前記光スイッチおよび前記電子機器において、前記回転軸部に対して対向する位置に複数の前記ミラー側作用部が設けられていてもよい。
【００２９】
また、前記ミラーデバイス駆動方法において、前記回転軸部に対して対向する位置に複数のミラー側作用部が設けられ、
前記ミラーを一方向に傾けさせる場合は、当該一方向側にある複数のミラー側作用部と当該ミラー側作用部に対向する前記対向側作用部との間に前記距離依存性駆動力を付与し、前記ミラーを逆方向に傾けさせる場合は、当該逆方向側にあり、前記一方向側にある複数のミラー側作用部と対向する位置にある複数のミラー側作用部と当該ミラー側作用部に対向する前記対向側作用部との間に前記距離依存性駆動力を付与してもよい。
【００３０】
これによれば、ミラーデバイス等は、ミラーを正逆両方向に回転駆動するそれぞれの場合において、少ない駆動力でミラーを駆動することが可能となる。
【００３１】
これにより、ミラーデバイス等は、より少ない駆動力でミラーの振れ角をより大きなものとすることが可能となる。
【００３２】
また、前記ミラーデバイス駆動方法において、前記対向側作用部は、前記ミラー側作用部と対向する位置ごとに設けられ、
前記ミラー側作用部と当該ミラー側作用部に対向する前記対向側作用部ごとに前記距離依存性駆動力を付与してもよい。
【００３３】
これによれば、各ミラー側作用部と対向側作用部との組ごとに距離依存性駆動力を付与することにより、ミラーの振れ角を段階的に制御することが可能となる。
【００３４】
また、前記ミラーデバイス、前記光スイッチ、前記電子機器および前記ミラーデバイス駆動方法において、前記距離依存性駆動力はクーロン力であってもよい。
【００３５】
また、前記ミラーデバイス、前記光スイッチ、前記電子機器および前記ミラーデバイス駆動方法において、前記ミラー側作用部および前記対向側作用部の少なくとも一方は電極であってもよい。
【００３６】
これによれば、ミラーデバイス等は、クーロン力（静電気力）によって低電圧駆動でもミラーを大きく駆動することができる。また、ミラーデバイス等は、静電駆動方式を採用することにより、ミラーの駆動のために必要となる消費電力と発熱を抑制することができる。
【００３７】
また、前記ミラーデバイス、前記光スイッチおよび前記電子機器において、前記ミラー基板は導電性シリコン基板であってもよい。
【００３８】
これによれば、ミラーデバイス等は、導電性シリコン基板を用いることにより、ミラー基板に電極を用いることなく、静電駆動することが可能となる。
【００３９】
【発明の実施の形態】
以下、本発明を、ミラーの傾きによって光路を切り替えるミラーデバイスに適用した場合を例に採り、図面を参照しつつ説明する。なお、以下に示す実施形態は、特許請求の範囲に記載された発明の内容を何ら限定するものではない。また、以下の実施形態に示す構成の全てが、特許請求の範囲に記載された発明の解決手段として必須であるとは限らない。
【００４０】
（第１の実施例）
まず、本実施形態のミラーデバイスの動作原理について説明する。
【００４１】
図１は、本実施形態の一例に係るミラーの動作状態を示す模式図であり、図１（Ａ）はｔ１時点でのミラーの動作状態を示す模式図であり、図１（Ｂ）はｔ２時点でのミラーの動作状態を示す模式図であり、図１（Ｃ）はｔ３時点でのミラーの動作状態を示す模式図である。また、図２は、本実施形態の一例に係るミラー側作用部４３、４４と対向側作用部４１、４２の電圧の変化を示すタイミングチャートを示す図である。
【００４２】
ここでは、ミラーの回転軸部であるヒンジ４５と、ヒンジ４５に設けられ、ミラーとは異なる位置にミラーの回転方向の両側に設けられるミラー側作用部４３、４４と、ミラーの支持基板４６上に設けられる対向側作用部４１、４２を含むミラーデバイスについて説明する。
【００４３】
ミラー側作用部４３、４４および対向側作用部４１、４２は、電圧のＯＮ、ＯＦＦの設定が可能である。
【００４４】
また、本実施形態のミラーデバイスは、図１（Ａ）〜図１（Ｃ）に示すように、ミラーが駆動する一方向（Ｘ方向）側にあるミラー側作用部４３と対向側作用部４１との間隔は、当該一方向の逆方向（Ｘ方向の逆方向）側にあるミラー側作用部４４と対向側作用部４２との間隔と比較して狭く形成されている。
【００４５】
図１（Ａ）および図２に示すように、初期状態のｔ１時点では、ミラー側作用部４３、４４および対向側作用部４１、４２のすべてがＯＦＦになっている。
【００４６】
そして、図１（Ｂ）および図２に示すように、ｔ２時点で、ミラーデバイスは、ミラー側作用部４３、４４と対向側作用部４２の電圧をＯＮにし、対向側作用部４１の電圧をＯＦＦのままとする。
【００４７】
これにより、一方向側にあるミラー側作用部４３と対向側作用部４１との間に電位差が生じ、クーロン力による吸引力が発生し、ミラー側作用部４４と対向側作用部４２との間には電位差が生じず、吸引力は発生しない。
【００４８】
この作用により、図１（Ｂ）に示すように、ミラーは、一方向側に傾く。
【００４９】
そして、この状態で、一旦全ての電圧をＯＦＦにすることにより、ヒンジ４５のねじりトルク（ばね力）によって、ミラー側作用部４３、４４は振動する。この振動によってミラー側作用部４４が対向側作用部４２に接近した時点、すなわち、図１（Ｃ）および図２に示すｔ３時点で、ミラーデバイスは、対向側作用部４１の電圧をＯＮにし、対向側作用部４２の電圧をＯＦＦにし、ミラー側作用部４３、４４をＯＮとする。
【００５０】
これにより、逆方向側にあるミラー側作用部４４と対向側作用部４２との間に電位差が生じ、クーロン力による吸引力が発生し、ミラー側作用部４３と対向側作用部４１との間には電位差が生じず、吸引力は発生しない。
【００５１】
この作用により、図１（Ｃ）に示すように、ミラーは、逆方向側に大きく傾く。
【００５２】
このように、ミラーの駆動方向において、段差を設け、吸引力と反動力を組み合わせてミラーを駆動することにより、より少ない駆動力でより大きくミラーを駆動することができる。
【００５３】
次に、本実施形態のミラーデバイスの構成について説明する。
【００５４】
図３は、本実施形態の一例に係るミラーデバイスの斜視図である。また、図４は、本実施形態の一例に係るミラーデバイスの組立分解斜視図である。また、図５は、本実施形態の一例に係るミラーデバイスの平面図である。
【００５５】
図３〜図５に示すように、本実施形態のミラー側基板であるシリコン基板１は、ミラー１０と、ミラー１０を回転可能に支持する回転軸部として機能するヒンジ１９と、ミラー１０の両側に所定間隔で配置され、ヒンジ１９を挟んで対向する位置に１つずつ設けられ、ミラー１０を駆動する８つのミラー側作用部１１〜１８と、ミラー側作用部１１〜１８に電力を供給する共通電極２３とを含んで構成されている。
【００５６】
なお、ミラー１０、ヒンジ１９およびミラー側作用部１１〜１８は、一体的に形成されている。
【００５７】
また、シリコン基板１の下面に陽極接合され、シリコン基板１を支持する支持基板であるガラス基板２は、ミラー側作用部１１〜１８に対向して設けられ、駆動力を発生する８つの対向側作用部３１〜３８と、対向側作用部３１〜３８に電力を供給するセグメント電極２１、２２と、陽極接合する際にミラー１０がガラス基板２に接合されることを防止するための等電位配線２５とを含んで構成されている。
【００５８】
また、シリコン基板１とガラス基板２とを陽極接合する際には、シリコン基板１と等電位配線２５とは同電位となるようにミラーデバイスを構成する。なお、等電位配線２５を、ミラー１０を直接駆動する電極として構成してもよい。
【００５９】
また、ミラー側作用部１１〜１８と対向側作用部３１〜３８は、いわゆる平行平板静電アクチュエータとして機能する。これにより、ミラー側作用部１１〜１８と対向側作用部３１〜３８との間には距離依存性のある（距離が遠くなるほど作用が弱くなる）駆動力の一種であるクーロン力（静電気力）が作用する。
【００６０】
また、ミラー側作用部１１〜１８と対向側作用部３１〜３８との間隔は、Ｘ方向側の各作用部の間隔のほうがＸ方向の逆方向の各作用部の間隔よりも狭く、かつ、ミラー１０から遠い各作用部の間隔のほうがミラー１０から近い各作用部の間隔よりも狭く形成されている。
【００６１】
なお、このようなミラーデバイスを実現するための材料としては、例えば、以下のものを適用できる。
【００６２】
シリコン基板１としては、例えば、シリコンにボロンドープ剤を塗布して導電性を付与したもの等を用い、ガラス基板２としては、例えば、ホウケイ酸ナトリウムガラス等を用い、ミラー１０およびミラー側作用部１１〜１８としては、例えば、シリコン基板１と同材料であってもよく、ミラー１０としてアルミニウム等を用い、ミラー側作用部１１〜１８としてＩＴＯ等の透明電極を用いてもよい。
【００６３】
また、セグメント電極２１、２２、対向側作用部３１〜３８としては、例えば、ＩＴＯ等の透明電極を用いてもよく、共通電極２３としては、例えば、プラチナ等を用いてもよく、等電位配線２５等の配線としては、例えば、ＩＴＯ、クロム、金等を用いてもよい。
【００６４】
ガラス基板２側に形成するこれらの電極パターンの材料としてＩＴＯを適用することにより、シリコン基板１とガラス基板２の接合後においても、ガラス基板２の外部から透明な電極（ＩＴＯ）を通してガラス基板２内部のアクチュエータを検査することが可能となる。さらに、この場合ＩＴＯは、酸化物電極であるため、耐久性にも優れるといった利点を有する。
【００６５】
なお、本実施形態のミラーデバイスの製造方法としては、一般的なマイクロマシニング技術を用いて実現でき、例えば、特開平９−１５９９３７号公報に記載された手法を用いてもよい。特に、マイクロマシニング技術を用いることにより、ミラーデバイスを容易に小型化することが可能となる。
【００６６】
次に、本実施形態のミラーデバイスの動作について説明する。
【００６７】
初期状態（図１（Ａ）に示す状態）では、ミラー側作用部１１〜１８および対向側作用部３１〜３８の電圧はすべてＯＦＦ（例えば０Ｖ）になっている。
【００６８】
そして、ミラーデバイスは、ミラー側作用部１１〜１８の電圧をＯＮ（例えば＋１０Ｖ）に設定し、Ｘ方向側の対向側作用部３１〜３４の電圧をＯＦＦのままとし、Ｘ方向の逆方向側の対向側作用部３５〜３８の電圧をＯＮに設定する。
【００６９】
上述したように、ミラー１０から遠いミラー側作用部１１、１４と対向側作用部３１、３４の間隔のほうがミラー１０から近いミラー側作用部１２、１３と対向側作用部３２、３３の間隔よりも狭い。
【００７０】
また、ミラー側作用部１１、１４と対向側作用部３１、３４の間隔のほうがミラー側作用部１５、１８と対向側作用部３５、３８の間隔よりも狭い。
【００７１】
このため、上記設定により、まず、ミラー側作用部１１、１４と対向側作用部３１、３４の間にクーロン力による吸引力が生じ、ヒンジ１９がねじられることにより、ミラー１０とミラー側作用部１１〜１４がＸ方向に傾く。
【００７２】
これにより、ミラー側作用部１２、１３と、対向側作用部３２、３３との間隔は初期状態よりも狭くなる。
【００７３】
この状態となることにより、ミラー側作用部１２、１３と、対向側作用部３２、３３との間にもクーロン力による吸引力が生じ、ヒンジ１９がさらにねじられることにより、ミラー１０とミラー側作用部１１〜１４がさらにＸ方向に傾く。
【００７４】
これにより、ミラー１０は、図１（Ｂ）に示すように、間隔の狭いＸ方向側に傾いた状態となる。
【００７５】
この状態で、ミラーデバイスは、ミラー側作用部１１〜１８の電圧をＯＮのままとし、Ｘ方向側の対向側作用部３１〜３４の電圧をＯＮに変更し、Ｘ方向の逆方向側の対向側作用部３５〜３８の電圧をＯＦＦに変更する。
【００７６】
上述したように、ミラー１０から遠いミラー側作用部１５、１８と対向側作用部３５、３８の間隔のほうがミラー１０から近いミラー側作用部１６、１７と対向側作用部３６、３７の間隔よりも狭い。
【００７７】
このため、上記設定により、まず、ミラー側作用部１５、１８と対向側作用部３５、３８の間にクーロン力による吸引力が生じる。
【００７８】
これにより、ヒンジ１９がＸ方向の逆方向にねじられることにより、ミラー１０とミラー側作用部１５〜１８がＸ方向の逆方向に傾く。
【００７９】
これにより、ミラー側作用部１６、１７と、対向側作用部３６、３７との間隔は初期状態よりも狭くなる。
【００８０】
この状態となることにより、ミラー側作用部１６、１７と、対向側作用部３６、３７との間にもクーロン力による吸引力が生じ、ヒンジ１９がさらにねじられることにより、ミラー１０とミラー側作用部１５〜１８がさらにＸ方向の逆方向に傾く。
【００８１】
これにより、ミラー１０は、図１（Ｃ）に示すように、Ｘ方向の逆方向に大きく傾いた状態となる。
【００８２】
以上の手順により、ミラーデバイスは、ミラー１０を一旦Ｘ方向に傾けた後、その反動でＸ方向の逆方向により大きく傾けることができる。
【００８３】
以上のように、本実施形態によれば、ミラーデバイスは、クーロン力を用いてミラーを駆動する場合に、一方向側にあるミラー側作用部１１〜１４と対向側作用部３１〜３４との間隔を、逆方向側にあるミラー側作用部１５〜１８と対向側作用部３５〜３８との間隔と比較して狭く形成しておき、一旦、一方向側にミラー１０を傾けた後、その反動で逆方向側にミラー１０を傾けることができる。
【００８４】
すなわち、一方向側にあるミラー側作用部１１〜１４と対向側作用部３１〜３４との間隔は狭いので、ミラーデバイスは、一方向側にあるミラー側作用部１１〜１４および対向側作用部３１〜３４に吸引力を発生させることにより、少ない駆動力でミラーを傾けることができる。
【００８５】
そして、ミラーデバイスは、一方向側にミラー１０を傾けた状態で、一方向側にあるミラー側作用部１１〜１４および対向側作用部３１〜３４の吸引力を解除することにより、その反動でミラー１０を若干逆方向側に傾けることができる。
【００８６】
この状態では、初期状態と比べて逆方向側のミラー側作用部１５〜１８と対向側作用部３５〜３８との間隔は狭くなっている。
【００８７】
この状態で、ミラーデバイスは、逆方向側のミラー側作用部１５〜１８および対向側作用部３５〜３８に吸引力を発生させることにより、ミラー１０を逆方向側に傾けることができる。
【００８８】
以上の手順により、ミラーデバイスは、より少ない駆動力で、ミラー１０をより大きく駆動することができ、ミラー１０をより大きく傾けることができる。
【００８９】
また、本実施の形態によれば、ミラー１０と一体的に形成され、ミラー１０から離れた位置にあるミラー側作用部１１、１４、１５、１８と対向側作用部３１、３４、３５、３８との間隔を、ミラー１０から近い位置にあるミラー側作用部１２、１３、１６、１７と対向側作用部３２、３３、３６、３７との間隔と比較して狭く形成することにより、より少ない駆動力でより大きなミラー１０の振れ角を実現することができる。
【００９０】
すなわち、初期状態では、ミラー１０とガラス基板２との間隔は広く、そのままミラー１０を傾けるためには大きな駆動力が必要となるが、段差を設け、間隔が狭い電極から徐々に駆動することにより、徐々にミラー１０とガラス基板２との間隔や電極間の間隔を狭めていくことができる。
【００９１】
また、ミラー１０とミラー側作用部１１〜１８とはヒンジ１９によって接合されているため、ミラーデバイスは、ミラー側作用部１１〜１８をミラー１０の外側から順に静電駆動することにより、徐々にヒンジ１９をねじり、ミラー１０を徐々に回転することができる。
【００９２】
また、このような構成を採用することにより、設計上、ミラー１０とガラス基板２との間隔を広く設定することができる。
【００９３】
したがって、より少ない駆動力でより大きなミラー１０の振れ角を実現することができる。
【００９４】
また、本実施形態のミラーデバイスは、ミラー側作用部１１〜１８と対向側作用部３１〜３８の組ごとにクーロン力を付与することができるため、ミラー１０の振れ角を段階的に制御することが可能となる。
【００９５】
また、ミラーデバイスは、クーロン力を用いてミラー１０等を静電駆動するため、消費電力と発熱を低減することができる。
【００９６】
また、ミラー基板を導電性のシリコン基板１として形成することにより、ミラー１０やミラー側作用部１１〜１８に電極を設ける必要はないため、消費電力と発熱をより低減することができる。
【００９７】
（第２の実施例）
なお、本発明は、第１の実施例に限定されず、種々の変形が可能である。例えば、第１の実施例では、ミラー１０およびミラー１０の対向位置に電極を設けていないが、ミラー１０およびミラー１０の対向位置に電極を設けてもよい。
【００９８】
図６は、本実施形態の他の一例に係るミラーデバイスの組立分解斜視図である。また、図７は、本実施形態の他の一例に係るミラーデバイスの平面図である。
【００９９】
本実施例では、ミラー１０の駆動方向の端部のそれぞれに対向する位置に対向側作用部３９、４０を設けている。
【０１００】
ミラー１０を一方向（例えば、図６に示すＸ方向）に傾ける場合は、まず、対向側作用部３１、３４に電圧を印加し、次に、対向側作用部３２、３３に電圧を印加し、最後に、対向側作用部３９に電圧を印加することにより、ミラー１０を一方向に傾けることができる。
【０１０１】
また、ミラー１０を逆方向（例えば、図６に示すＸ方向の逆方向）に傾ける場合は、まず、対向側作用部３５、３８に電圧を印加し、次に、対向側作用部３６、３７に電圧を印加し、最後に、対向側作用部４０に電圧を印加することにより、ミラー１０を逆方向に傾けることができる。
【０１０２】
このように、ミラー１０の対向位置に対向側作用部３９、４０を設けた場合であっても、ミラーデバイスは、ミラー１０を一旦、一方向側に傾けた後、その反動で逆方向に傾けることが可能である。
【０１０３】
また、ミラーデバイスは、本実施例においても、ミラー１０を段階的に駆動することにより、より少ない駆動力でより大きなミラー１０の振れ角を得ることができる。
【０１０４】
（変形例）
また、本発明の適用は、上述した第１および第２の実施例に限定されず、種々の変形が可能である。
【０１０５】
例えば、上述した実施例では、ミラー１０の両側に静電アクチュエータを設けたが、ミラー１０の片側を固定し、他の片側に静電アクチュエータを設けてもよい。この場合、当該静電アクチュエータの対向位置にのみ電極を設け、当該静電アクチュエータのない片側の対向位置には電極を設ける必要はない。
【０１０６】
また、例えば、上述した実施例では、ミラー１０およびミラー側作用部１１〜１８としてシリコン基板１と同材料のものを用いたが、ミラー１０およびミラー側作用部１１〜１８のそれぞれに電極を設け、対向側の対向側作用部３１〜４０ではなく、当該電極に電圧を印加し、電位差を長じさせ、ミラー側作用部１１〜１８で距離依存性駆動力を発生することにより、上述した段階的な駆動を行ってもよい。
【０１０７】
また、電位差は、＋１０Ｖだけでなく、＋２０Ｖ、−１０Ｖ等の種々の電位差を適用可能である。
【０１０８】
また、上述した実施例では、距離依存性のある駆動力としてクーロン力を用いたが、例えば、電磁気力等を用いてもよい。
【０１０９】
また、本発明に係るミラーデバイスは、ミラーの傾きによって光路を切り替える光スイッチのほか、ルータ、プロジェクタ等の種々の電子機器に実装することが可能である。
【０１１０】
さらに、上述した実施例ではいわゆる平行平板の静電アクチュエータ方式を採用したが、シリコン基板１側およびガラス基板２側の少なくとも一方に傾きを設けてもよく、電極の配置されるガラス基板２を階段状ではなく、ミラー１０の位置が最も深い逆Ｖ字型に形成してもよい。
【０１１１】
また、上述した実施例では、図１（Ａ）に示すように、２段構成であったが、３段以上の構成としたり、１段構成としてもよい。
【０１１２】
また、上述した実施例では、ミラー側作用部１１〜１８をミラー１０の回転方向と直交する方向に配置したが、例えば、ミラー１０の対角線方向等に設けてもよい。
【０１１３】
さらに、ミラーの駆動方法は、上述した１軸の回転駆動に限定されず、種々の駆動方法に対して本発明を適用可能である。
【０１１４】
例えば、矩形のミラーを手前奥方向と左右方向の２軸で回転駆動する場合、ミラーの外側の対角線方向に所定間隔でミラー側作用部と対向側作用部を設ければよい。
【０１１５】
そして、ミラーを手前側に傾ける場合は、左手前位置および右手前位置にあるミラー側作用部と対向側作用部を静電駆動し、ミラーを奥側に傾ける場合は、左奥位置および右奥位置にあるミラー側作用部と対向側作用部を静電駆動し、ミラーを左側に傾ける場合は、左手前位置および左奥位置にあるミラー側作用部と対向側作用部を静電駆動し、ミラーを右側に傾ける場合は、右手前位置および右奥位置にあるミラー側作用部と対向側作用部を静電駆動することにより、ミラーを２軸で回転駆動することができる。
【図面の簡単な説明】
【図１】本実施形態の一例に係るミラーの動作状態を示す模式図であり、図１（Ａ）はｔ１時点でのミラーの動作状態を示す模式図であり、図１（Ｂ）はｔ２時点でのミラーの動作状態を示す模式図であり、図１（Ｃ）はｔ３時点でのミラーの動作状態を示す模式図である。
【図２】本実施形態の一例に係るミラー側作用部と対向側作用部の電圧の変化を示すタイミングチャートを示す図である。
【図３】本実施形態の一例に係るミラーデバイスの斜視図である。
【図４】本実施形態の一例に係るミラーデバイスの組立分解斜視図である。
【図５】本実施形態の一例に係るミラーデバイスの平面図である。
【図６】本実施形態の他の一例に係るミラーデバイスの組立分解斜視図である。
【図７】本実施形態の他の一例に係るミラーデバイスの平面図である。
【符号の説明】
１　シリコン基板（ミラー基板）、　２　ガラス基板（支持基板）
１０　ミラー、　１１〜１８、４３、４４　ミラー側作用部
１９　ヒンジ（回転軸部）、　２１、２２　セグメント電極
２３　共通電極、　２５　等電位配線、　３１〜４２　対向側作用部[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a mirror device, an optical switch, an electronic device, and a mirror device driving method.
[0002]
BACKGROUND ART AND PROBLEMS TO BE SOLVED BY THE INVENTION
When driving a mirror device, it has been an issue to drive the mirror larger with less driving force.
[0003]
In order to solve such a problem, Japanese Patent Application Laid-Open No. 2001-311900 proposes an optical scanning device in which a counter electrode having an inclined surface is provided on a lower surface in a driving direction of a mirror, and a groove is provided in an inclined direction of the inclined surface. Have been.
[0004]
That is, as for the driving force for driving the mirror device, for example, in the case of electrostatic driving by Coulomb force, the driving force increases as the distance between the electrodes becomes shorter, and the driving force decreases as the distance between the electrodes becomes longer. Have.
[0005]
Therefore, the method disclosed in the above publication is considered to be applicable when the inclination is gentle, but as the inclination angle is increased, the distance between the mirror and the counter electrode is increased, so that a larger driving force is required, and a smaller driving force is required. The problem of driving the mirror larger by the driving force cannot be properly solved.
[0006]
The present invention has been made in view of the above problems, and has as its object to provide a mirror device, an optical switch, an electronic device, and a mirror device driving method capable of driving a mirror larger with a smaller driving force. It is in.
[0007]
[Means for Solving the Problems]
In order to solve the above problem, a mirror device according to the present invention is a mirror device having a mirror substrate having a mirror driven by a predetermined distance-dependent driving force, and a support substrate supporting the mirror substrate,
The mirror substrate, while the distance-dependent driving force acts, includes a mirror having a plurality of mirror-side action portions provided on one side to be driven and the opposite side opposite to the one direction,
The support substrate has a plurality of opposing-side operating portions on which the distance-dependent driving force acts between the mirror-side operating portion and
The mirror-side operating portion and the opposing-side operating portion are formed so as to be able to generate an attractive force as the distance-dependent driving force,
The mirror-side operating portion and the opposing-side operating portion on the one direction side generate a suction force to generate a suction action between the mirror-side operating portion and the opposing-side operating portion, thereby causing the mirror to move. While tilting in one direction,
The mirror-side operating portion and the opposing-side operating portion release the suction force, thereby causing the mirror-side operating portion to perform a counter-operation, and the mirror-side operating portion and the opposing-side operating portion on the opposite side are attracted. In order to incline the mirror in the opposite direction by generating a force to generate a suction action between the mirror-side operating portion and the opposite-side operating portion,
An interval between the mirror-side operating portion and the opposite-side operating portion on the one direction side is formed to be narrower than an interval between the mirror-side operating portion and the opposite-side operating portion on the opposite direction side. It is characterized by.
[0008]
Further, an optical switch according to the present invention includes the mirror device described above, and switches an optical path by driving the mirror.
[0009]
Further, an electronic apparatus according to the present invention includes the above-mentioned mirror device.
[0010]
In addition, the mirror device driving method according to the present invention is configured such that a predetermined distance-dependent driving force acts, and a plurality of mirrors are provided on a mirror on one side where the mirror is driven and a mirror on the opposite side opposite to the one direction. A mirror device driving method for driving a mirror device having a mirror-side operating portion and a plurality of opposed-side operating portions on which the distance-dependent driving force acts between the mirror-side operating portion,
An interval between the mirror-side operating portion and the opposing-side operating portion on the one direction side is formed to be narrower than an interval between the mirror-side operating portion and the opposing-side operating portion on the opposite direction side,
The mirror-side operating portion and the opposing-side operating portion are formed so as to be able to generate an attractive force as the distance-dependent driving force,
The mirror-side operating portion and the opposing-side operating portion on the one direction side generate a suction force to generate a suction action between the mirror-side operating portion and the opposing-side operating portion, thereby causing the mirror to move. Tilt in one direction,
The mirror-side operating portion and the opposing-side operating portion release a suction force to cause the mirror-side operating portion to generate a counter-operation,
The mirror-side action section and the opposite-side action section on the opposite side generate a suction force to generate a suction action between the mirror-side action section and the opposite-side action section, thereby causing the mirror to move. It is characterized in that it is inclined in the opposite direction.
[0011]
In the mirror device, the optical switch, and the electronic apparatus, the mirror substrate is formed integrally with the mirror, provided at a position different from the mirror, and provided in at least one of the one direction and the reverse direction. The image display device may further include at least one mirror-side operation unit that generates the distance-dependent driving force.
[0012]
Further, in the mirror device driving method, the mirror device is formed integrally with the mirror and provided at a position different from the mirror, and the distance-dependent driving force is provided in at least one of the one direction and the reverse direction. May be provided at least one mirror-side action portion.
[0013]
Further, a mirror device according to the present invention is a mirror device having a mirror substrate having a mirror driven by a predetermined distance-dependent driving force, and a support substrate supporting the mirror substrate,
The mirror substrate is formed integrally with the mirror, is provided at a position different from the mirror, and is provided on one direction side where the mirror is driven and on the opposite side opposite to the one direction, Having a plurality of mirror-side operating portions on which a distance-dependent driving force acts,
The support substrate has a plurality of opposing-side operating portions on which the distance-dependent driving force acts between the mirror-side operating portion and
The mirror-side operating portion and the opposing-side operating portion are formed so as to be able to generate an attractive force as the distance-dependent driving force,
The mirror-side operating portion and the opposing-side operating portion on the one direction side generate a suction force to generate a suction action between the mirror-side operating portion and the opposing-side operating portion, thereby causing the mirror to move. While tilting in one direction,
The mirror-side operating portion and the opposing-side operating portion release the suction force, thereby causing the mirror-side operating portion to perform a counter-operation, and the mirror-side operating portion and the opposing-side operating portion on the opposite side are attracted. In order to incline the mirror in the opposite direction by generating a force to generate a suction action between the mirror-side operating portion and the opposite-side operating portion,
An interval between the mirror-side operating portion and the opposite-side operating portion on the one direction side is formed to be narrower than an interval between the mirror-side operating portion and the opposite-side operating portion on the opposite direction side. It is characterized by.
[0014]
Further, an optical switch according to the present invention includes the mirror device described above, and switches an optical path by driving the mirror.
[0015]
Further, an electronic apparatus according to the present invention includes the above-mentioned mirror device.
[0016]
Also, the mirror device driving method according to the present invention may be such that the mirror device driving method is formed integrally with a mirror driven by a predetermined distance-dependent driving force, at a position different from the mirror, and in one direction in which the mirror is driven. The distance-dependent driving force acts between a plurality of mirror-side acting portions provided on the side and the opposite direction opposite to the one direction and to which the distance-dependent driving force acts, and the mirror-side acting portion. A mirror device driving method for driving a mirror device having a plurality of opposing side working portions,
An interval between the mirror-side operating portion and the opposing-side operating portion on the one direction side is formed to be narrower than an interval between the mirror-side operating portion and the opposing-side operating portion on the opposite direction side,
The mirror-side operating portion and the opposing-side operating portion are formed so as to be able to generate an attractive force as the distance-dependent driving force,
The mirror-side operating portion and the opposing-side operating portion on the one direction side generate a suction force to generate a suction action between the mirror-side operating portion and the opposing-side operating portion, thereby causing the mirror to move. While tilting in one direction,
The mirror-side operating portion and the opposing-side operating portion release the suction force, thereby causing the mirror-side operating portion to perform a counter-operation, and the mirror-side operating portion and the opposing-side operating portion on the opposite side are attracted. The mirror is tilted in the opposite direction by generating a force to generate a suction action between the mirror-side operating portion and the opposing-side operating portion.
[0017]
According to the present invention, when a mirror device or the like is driven with a distance-dependent driving force (eg, Coulomb force, electromagnetic force, or the like), the mirror device and the mirror-side action portion in one direction are opposed to the mirror device. The gap between the action section and the mirror-side action section and the opposite-side action section on the opposite side is formed to be narrower, and once the mirror is tilted in one direction, the reaction is reversed. The mirror can be tilted to the direction side.
[0018]
That is, since the distance between the mirror-side operating portion and the opposing-side operating portion on one side is narrow, the mirror device or the like generates a suction force on the mirror-side operating portion and the opposing-side operating portion on one side. The mirror can be tilted with a small driving force.
[0019]
The mirror device or the like releases the attraction force of the mirror-side operating portion and the opposing-side operating portion in one direction while the mirror is tilted in one direction. Can be tilted.
[0020]
In this state, the distance between the mirror-side operating portion and the opposing-side operating portion on the opposite side is smaller than in the initial state.
[0021]
In this state, the mirror device or the like can tilt the mirror in the opposite direction by generating a suction force on the mirror-side operation portion and the opposite-side operation portion on the opposite direction.
[0022]
According to the above procedure, the mirror device or the like can drive the mirror more with less driving force and can tilt the mirror more.
[0023]
As a method of generating an attractive force, for example, when Coulomb force is used as the distance-dependent driving force, a method of generating a potential difference between the mirror-side operating portion and the opposing-side operating portion is adopted, When an electromagnetic force is used as the distance-dependent driving force, a method of reversing the polarities of the mirror-side operating portion and the opposing-side operating portion (for example, N pole and S pole) may be adopted.
[0024]
Further, as a method of driving the mirror more efficiently, for example, a method of making the timing of suction and release thereof substantially coincide with the resonance frequency of the vibration system formed by the mirror-side operating portion and the rotating shaft portion of the mirror. May be adopted.
[0025]
Further, in the mirror device, the optical switch, and the electronic apparatus, the mirror substrate is formed integrally with the mirror, and has a rotation shaft portion that rotatably supports the mirror,
The mirror-side operating portion may be provided on the rotation shaft portion such that the distance-dependent driving force acts on a position shifted from the rotation shaft portion toward an end portion on the rotation direction side of the mirror. .
[0026]
Further, in the mirror device driving method, the distance-dependent driving is performed at a position shifted from a rotation shaft portion integrally formed with the mirror and rotatably supporting the mirror toward an end portion on the rotation direction side of the mirror. A force may be applied.
[0027]
According to this, the mirror device or the like can twist the rotation shaft portion by rotating the mirror by applying a distance-dependent driving force at a position shifted toward the end portion on the rotation direction side of the mirror, and can rotate the mirror.
[0028]
Further, in the mirror device, the optical switch, and the electronic device, a plurality of the mirror-side operation units may be provided at positions facing the rotation shaft unit.
[0029]
Further, in the mirror device driving method, a plurality of mirror-side operating portions are provided at positions facing the rotating shaft portion,
When the mirror is tilted in one direction, the distance-dependent driving force is applied between a plurality of mirror-side operating portions on the one-way side and the opposing-side operating portion facing the mirror-side operating portion. When the mirror is tilted in the opposite direction, a plurality of mirror-side operating portions and a mirror-side operating portion located on the opposite side and opposed to the plurality of mirror-side operating portions on the one direction side. The distance-dependent driving force may be applied between the opposing opposing action portion.
[0030]
According to this, the mirror device or the like can drive the mirror with a small driving force in each case of rotating the mirror in both the forward and reverse directions.
[0031]
This allows the mirror device or the like to increase the deflection angle of the mirror with a smaller driving force.
[0032]
Further, in the mirror device driving method, the opposing side operation unit is provided at each position opposing the mirror side operation unit,
The distance-dependent driving force may be applied to each of the mirror-side operating portion and the opposing-side operating portion facing the mirror-side operating portion.
[0033]
According to this, the deflection angle of the mirror can be controlled in a stepwise manner by applying a distance-dependent driving force to each set of the mirror-side operating portion and the opposing-side operating portion.
[0034]
In the mirror device, the optical switch, the electronic device, and the mirror device driving method, the distance-dependent driving force may be a Coulomb force.
[0035]
Further, in the mirror device, the optical switch, the electronic apparatus, and the mirror device driving method, at least one of the mirror-side operating portion and the opposing-side operating portion may be an electrode.
[0036]
According to this, the mirror device or the like can largely drive the mirror by a Coulomb force (electrostatic force) even with a low voltage drive. In addition, the mirror device and the like can suppress power consumption and heat generation required for driving the mirror by adopting the electrostatic driving method.
[0037]
In the mirror device, the optical switch, and the electronic device, the mirror substrate may be a conductive silicon substrate.
[0038]
According to this, the mirror device and the like can be electrostatically driven by using the conductive silicon substrate without using an electrode on the mirror substrate.
[0039]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, the present invention will be described with reference to the drawings, taking as an example a case where the present invention is applied to a mirror device that switches an optical path according to the inclination of a mirror. The embodiments described below do not limit the contents of the invention described in the claims. In addition, all of the configurations described in the following embodiments are not necessarily essential as means for solving the invention described in the claims.
[0040]
(First embodiment)
First, the operating principle of the mirror device according to the present embodiment will be described.
[0041]
FIG. 1 is a schematic diagram illustrating an operation state of a mirror according to an example of the present embodiment. FIG. 1A is a schematic diagram illustrating an operation state of a mirror at time t1, and FIG. FIG. 1C is a schematic diagram illustrating an operation state of the mirror at a time point, and FIG. 1C is a schematic diagram illustrating an operation state of the mirror at a time point t3. FIG. 2 is a timing chart showing changes in voltages of the mirror-side operating portions 43 and 44 and the opposing-side operating portions 41 and 42 according to an example of the present embodiment.
[0042]
Here, a hinge 45 which is a rotation axis of the mirror, mirror-side operating portions 43 and 44 provided on the hinge 45 and provided on both sides in the mirror rotation direction at positions different from the mirror, and a mirror support substrate 46 The mirror device including the opposing side action portions 41 and 42 provided in the mirror device will be described.
[0043]
The mirror-side operating portions 43 and 44 and the opposing-side operating portions 41 and 42 can be set to ON and OFF of the voltage.
[0044]
Further, as shown in FIGS. 1A to 1C, the mirror device according to the present embodiment includes a mirror-side operating portion 43 and an opposing-side operating portion 41 on one side (X direction) where the mirror is driven. Is formed to be narrower than the space between the mirror-side operating portion 44 and the opposing-side operating portion 42 on the side opposite to the one direction (reverse direction of the X direction).
[0045]
As shown in FIGS. 1A and 2, at the time point t1 in the initial state, all of the mirror side operation parts 43 and 44 and the opposing side operation parts 41 and 42 are OFF.
[0046]
Then, as shown in FIG. 1 (B) and FIG. 2, at time t2, the mirror device turns on the voltages of the mirror-side operating portions 43 and 44 and the opposing-side operating portion 42, and reduces the voltage of the opposing-side operating portion 41. Leave OFF.
[0047]
As a result, a potential difference is generated between the mirror-side operating portion 43 and the opposing-side operating portion 41 on one side, and a suction force is generated by the Coulomb force, and the distance between the mirror-side operating portion 44 and the opposing-side operating portion 42 is increased. Has no potential difference, and no suction force is generated.
[0048]
By this action, as shown in FIG. 1B, the mirror tilts in one direction.
[0049]
Then, in this state, once all the voltages are turned off, the mirror-side operating portions 43 and 44 vibrate due to the torsional torque (spring force) of the hinge 45. The mirror device turns on the voltage of the opposing-side operating portion 41 at the time when the mirror-side operating portion 44 approaches the opposing-side operating portion 42 due to this vibration, that is, at the time t3 shown in FIGS. The voltage of the opposing side operating unit 42 is turned off, and the mirror side operating units 43 and 44 are turned on.
[0050]
As a result, a potential difference is generated between the mirror-side operating portion 44 and the opposing-side operating portion 42 on the opposite side, and a suction force is generated by the Coulomb force, and the distance between the mirror-side operating portion 43 and the opposing-side operating portion 41 is increased. Has no potential difference, and no suction force is generated.
[0051]
By this operation, as shown in FIG. 1C, the mirror is largely inclined in the opposite direction.
[0052]
In this manner, by providing a step in the mirror driving direction and driving the mirror by combining the suction force and the reaction force, the mirror can be driven more with a smaller driving force.
[0053]
Next, the configuration of the mirror device of the present embodiment will be described.
[0054]
FIG. 3 is a perspective view of a mirror device according to an example of the present embodiment. FIG. 4 is an exploded perspective view of a mirror device according to an example of the present embodiment. FIG. 5 is a plan view of a mirror device according to an example of the present embodiment.
[0055]
As shown in FIGS. 3 to 5, the silicon substrate 1 serving as the mirror-side substrate of the present embodiment includes a mirror 10, a hinge 19 functioning as a rotating shaft that rotatably supports the mirror 10, and both sides of the mirror 10. Are provided at predetermined intervals, and are provided one by one at opposing positions with the hinge 19 interposed therebetween, and supply eight mirror-side operating portions 11 to 18 for driving the mirror 10 and power to the mirror-side operating portions 11 to 18 The common electrode 23 is included.
[0056]
Note that the mirror 10, the hinge 19, and the mirror side action portions 11 to 18 are formed integrally.
[0057]
Further, a glass substrate 2, which is anodically bonded to the lower surface of the silicon substrate 1 and is a support substrate that supports the silicon substrate 1, is provided to face the mirror-side operating portions 11 to 18, and has eight opposite sides that generate a driving force. Equipotential wiring for preventing the mirror 10 from being bonded to the glass substrate 2 during anodic bonding, with the operating portions 31 to 38, the segment electrodes 21 and 22 for supplying power to the opposing operating portions 31 to 38. 25.
[0058]
When the silicon substrate 1 and the glass substrate 2 are anodically bonded, a mirror device is configured so that the silicon substrate 1 and the equipotential wiring 25 have the same potential. Note that the equipotential wiring 25 may be configured as an electrode that directly drives the mirror 10.
[0059]
Further, the mirror-side operating portions 11 to 18 and the opposing-side operating portions 31 to 38 function as so-called parallel plate electrostatic actuators. Thus, Coulomb force (electrostatic force), which is a type of driving force having a distance dependency (the effect becomes weaker as the distance increases) between the mirror-side acting portions 11 to 18 and the opposing-side acting portions 31 to 38. Works.
[0060]
In addition, the distance between the mirror-side acting portions 11 to 18 and the opposing side acting portions 31 to 38 is smaller in the interval between the acting portions in the X direction than in the direction opposite to the X direction, and The distance between the working parts far from the mirror 10 is formed smaller than the distance between the working parts near the mirror 10.
[0061]
In addition, as a material for realizing such a mirror device, for example, the following materials can be applied.
[0062]
As the silicon substrate 1, for example, a substrate obtained by applying conductivity by applying a boron doping agent to silicon is used. As the glass substrate 2, for example, sodium borosilicate glass or the like is used. For example, the same material as that of the silicon substrate 1 may be used as the elements 18 to 18, and aluminum or the like may be used as the mirror 10, and a transparent electrode such as ITO may be used as the mirror-side working parts 11 to 18.
[0063]
Further, as the segment electrodes 21 and 22 and the opposing side working portions 31 to 38, for example, a transparent electrode such as ITO may be used, and as the common electrode 23, for example, platinum or the like may be used. For example, ITO, chromium, gold, or the like may be used as the wiring such as 25.
[0064]
By applying ITO as a material for these electrode patterns formed on the glass substrate 2 side, even after the silicon substrate 1 and the glass substrate 2 are joined, the glass substrate 2 can be passed through the transparent electrode (ITO) from outside the glass substrate 2. It is possible to inspect the internal actuator. Further, in this case, since ITO is an oxide electrode, it has an advantage of being excellent in durability.
[0065]
The method of manufacturing the mirror device according to the present embodiment can be realized by using a general micromachining technique, and for example, a method described in Japanese Patent Application Laid-Open No. 9-159937 may be used. In particular, by using the micro-machining technology, the size of the mirror device can be easily reduced.
[0066]
Next, the operation of the mirror device of the present embodiment will be described.
[0067]
In the initial state (the state shown in FIG. 1A), the voltages of the mirror-side operating portions 11 to 18 and the opposing-side operating portions 31 to 38 are all OFF (for example, 0 V).
[0068]
Then, the mirror device sets the voltage of the mirror-side operating portions 11 to 18 to ON (for example, +10 V), keeps the voltage of the opposing-side operating portions 31 to 34 in the X direction to OFF, and sets the voltage in the opposite direction to the X direction. Are set to ON.
[0069]
As described above, the distance between the mirror-side operating parts 11 and 14 far from the mirror 10 and the opposing-side operating parts 31 and 34 is greater than the distance between the mirror-side operating parts 12 and 13 near the mirror 10 and the opposing-side operating parts 32 and 33. Is also narrow.
[0070]
Further, the distance between the mirror side operation parts 11 and 14 and the opposing side operation parts 31 and 34 is smaller than the distance between the mirror side operation parts 15 and 18 and the opposing side operation parts 35 and 38.
[0071]
For this reason, according to the above setting, first, an attractive force is generated between the mirror-side operating portions 11 and 14 and the opposing-side operating portions 31 and 34 by Coulomb force, and the hinge 19 is twisted. 11 to 14 are inclined in the X direction.
[0072]
As a result, the distance between the mirror-side operating portions 12 and 13 and the opposing-side operating portions 32 and 33 is smaller than in the initial state.
[0073]
In this state, a suction force due to Coulomb force is generated also between the mirror-side operating portions 12 and 13 and the opposing-side operating portions 32 and 33, and the hinge 19 is further twisted, so that the mirror 10 and the mirror-side The action portions 11 to 14 are further inclined in the X direction.
[0074]
Thereby, as shown in FIG. 1B, the mirror 10 is in a state of being inclined in the X direction at a small interval.
[0075]
In this state, the mirror device keeps the voltage of the mirror-side operating portions 11 to 18 ON, changes the voltage of the X-direction opposing side operating portions 31 to 34 to ON, and turns the opposing-side opposing direction in the X direction on. The voltage of the side action portions 35 to 38 is changed to OFF.
[0076]
As described above, the distance between the mirror-side operating portions 15 and 18 far from the mirror 10 and the opposing-side operating portions 35 and 38 is greater than the distance between the mirror-side operating portions 16 and 17 near the mirror 10 and the opposing-side operating portions 36 and 37. Is also narrow.
[0077]
Therefore, by the above setting, first, an attractive force is generated between the mirror-side operating portions 15 and 18 and the opposing-side operating portions 35 and 38 by Coulomb force.
[0078]
As a result, the hinge 19 is twisted in the direction opposite to the X direction, so that the mirror 10 and the mirror-side operating portions 15 to 18 are tilted in the direction opposite to the X direction.
[0079]
As a result, the distance between the mirror-side operating portions 16 and 17 and the opposing-side operating portions 36 and 37 becomes smaller than in the initial state.
[0080]
In this state, a suction force due to Coulomb force is also generated between the mirror-side operating portions 16 and 17 and the opposing-side operating portions 36 and 37, and the hinge 19 is further twisted, so that the mirror 10 and the mirror-side The action parts 15 to 18 further tilt in the direction opposite to the X direction.
[0081]
As a result, the mirror 10 is largely inclined in the direction opposite to the X direction, as shown in FIG.
[0082]
According to the above procedure, the mirror device can once tilt the mirror 10 in the X direction and then tilt the mirror 10 more largely in the opposite direction to the X direction by the reaction.
[0083]
As described above, according to the present embodiment, when the mirror device is driven by using the Coulomb force, the mirror device includes the mirror-side operating portions 11 to 14 and the opposing-side operating portions 31 to 34 on one side. The gap is formed to be narrower than the gap between the mirror-side action portions 15 to 18 and the opposing-side action portions 35 to 38 on the opposite side, and once the mirror 10 is inclined in one direction, The mirror 10 can be tilted in the opposite direction by the reaction.
[0084]
That is, since the distance between the mirror-side operating portions 11 to 14 on one side and the opposing-side operating portions 31 to 34 is narrow, the mirror device includes the mirror-side operating portions 11 to 14 and the opposing-side operating portion on one side. By generating a suction force at 31 to 34, the mirror can be tilted with a small driving force.
[0085]
Then, the mirror device releases the attraction force of the mirror-side operating portions 11 to 14 and the opposing-side operating portions 31 to 34 in the one-way side in a state where the mirror 10 is tilted in the one-way side. The mirror 10 can be tilted slightly in the opposite direction.
[0086]
In this state, the distance between the mirror-side operating portions 15 to 18 and the opposing-side operating portions 35 to 38 on the opposite side is smaller than in the initial state.
[0087]
In this state, the mirror device can tilt the mirror 10 in the reverse direction by generating a suction force on the mirror-side operation portions 15 to 18 and the opposing-side operation portions 35 to 38 on the opposite side.
[0088]
According to the above procedure, the mirror device can drive the mirror 10 more with less driving force, and can tilt the mirror 10 more.
[0089]
Further, according to the present embodiment, the mirror-side operating portions 11, 14, 15, and 18 and the opposing-side operating portions 31, 34, 35, and 38, which are formed integrally with the mirror 10 and located at positions away from the mirror 10, are provided. Is smaller than the distance between the mirror-side operating portions 12, 13, 16, 17 and the opposing-side operating portions 32, 33, 36, 37 that are closer to the mirror 10. A larger deflection angle of the mirror 10 can be realized by the driving force.
[0090]
That is, in the initial state, the distance between the mirror 10 and the glass substrate 2 is wide, and a large driving force is required to incline the mirror 10 as it is. However, a step is provided, and the mirror is gradually driven from a narrow electrode. Thus, the distance between the mirror 10 and the glass substrate 2 and the distance between the electrodes can be gradually reduced.
[0091]
Further, since the mirror 10 and the mirror-side operating portions 11 to 18 are joined by the hinge 19, the mirror device gradually drives the mirror-side operating portions 11 to 18 from the outside of the mirror 10 in order, thereby gradually. The hinge 19 can be twisted to rotate the mirror 10 gradually.
[0092]
In addition, by adopting such a configuration, the distance between the mirror 10 and the glass substrate 2 can be set wide in design.
[0093]
Therefore, a larger deflection angle of the mirror 10 can be realized with a smaller driving force.
[0094]
Further, the mirror device of the present embodiment can apply Coulomb force to each set of the mirror-side operating portions 11 to 18 and the opposing-side operating portions 31 to 38, so that the deflection angle of the mirror 10 is controlled stepwise. It becomes possible.
[0095]
Further, since the mirror device electrostatically drives the mirror 10 and the like using Coulomb force, power consumption and heat generation can be reduced.
[0096]
Further, by forming the mirror substrate as the conductive silicon substrate 1, there is no need to provide electrodes on the mirror 10 and the mirror-side working portions 11 to 18, so that power consumption and heat generation can be further reduced.
[0097]
(Second embodiment)
The present invention is not limited to the first embodiment, and various modifications are possible. For example, in the first embodiment, an electrode is not provided at the position where the mirror 10 and the mirror 10 face each other, but an electrode may be provided at a position where the mirror 10 and the mirror 10 face each other.
[0098]
FIG. 6 is an exploded perspective view of a mirror device according to another example of the present embodiment. FIG. 7 is a plan view of a mirror device according to another example of the present embodiment.
[0099]
In the present embodiment, opposing operation portions 39 and 40 are provided at positions opposing each end of the mirror 10 in the driving direction.
[0100]
When the mirror 10 is tilted in one direction (for example, the X direction shown in FIG. 6), first, a voltage is applied to the opposing action sections 31 and 34, and then a voltage is applied to the opposing action sections 32 and 33. Finally, the mirror 10 can be tilted in one direction by applying a voltage to the opposing side working portion 39.
[0101]
When the mirror 10 is tilted in the opposite direction (for example, the direction opposite to the X direction shown in FIG. 6), first, a voltage is applied to the opposing-side operating portions 35 and 38, and then the opposing-side operating portions 36 and 37 are applied. The mirror 10 can be tilted in the opposite direction by applying a voltage to the mirror 10 and finally applying a voltage to the opposing side working portion 40.
[0102]
As described above, even when the opposing side action portions 39 and 40 are provided at the opposing position of the mirror 10, the mirror device once tilts the mirror 10 to one direction side and then tilts the mirror 10 in the opposite direction by the reaction. It is possible.
[0103]
Also, in this embodiment, the mirror device can obtain a larger deflection angle of the mirror 10 with less driving force by driving the mirror 10 stepwise.
[0104]
(Modification)
Further, the application of the present invention is not limited to the first and second embodiments described above, and various modifications are possible.
[0105]
For example, in the above-described embodiment, the electrostatic actuator is provided on both sides of the mirror 10, but one side of the mirror 10 may be fixed and the electrostatic actuator may be provided on the other side. In this case, it is not necessary to provide an electrode only at the opposing position of the electrostatic actuator, and to provide an electrode at one opposing position without the electrostatic actuator.
[0106]
Further, for example, in the above-described embodiment, the same material as the silicon substrate 1 is used for the mirror 10 and the mirror-side operating portions 11 to 18, but electrodes are provided on each of the mirror 10 and the mirror-side operating portions 11 to 18. By applying a voltage to the electrode instead of the opposing side action portions 31 to 40 on the opposing side to lengthen the potential difference and generating a distance-dependent driving force in the mirror side action portions 11 to 18, the above-described steps are performed. Drive may be performed.
[0107]
As the potential difference, not only +10 V but also various potential differences such as +20 V and −10 V can be applied.
[0108]
In the above-described embodiment, the Coulomb force is used as the distance-dependent driving force. However, for example, an electromagnetic force or the like may be used.
[0109]
In addition, the mirror device according to the present invention can be mounted on various electronic devices such as a router and a projector, in addition to an optical switch that switches an optical path according to the tilt of the mirror.
[0110]
Further, in the above-described embodiment, a so-called parallel plate electrostatic actuator system is employed. However, at least one of the silicon substrate 1 side and the glass substrate 2 side may be provided with an inclination. Instead, the mirror 10 may be formed in an inverted V-shape where the position of the mirror 10 is the deepest.
[0111]
Further, in the above-described embodiment, as shown in FIG. 1A, a two-stage configuration is used. However, a three-stage configuration or a one-stage configuration may be used.
[0112]
Further, in the above-described embodiment, the mirror side action portions 11 to 18 are arranged in a direction orthogonal to the rotation direction of the mirror 10, but may be provided in a diagonal direction of the mirror 10, for example.
[0113]
Further, the method of driving the mirror is not limited to the above-described one-axis rotation drive, and the present invention is applicable to various driving methods.
[0114]
For example, when a rectangular mirror is driven to rotate in two axes, ie, a near-back direction and a left-right direction, a mirror-side operating portion and an opposing-side operating portion may be provided at predetermined intervals in a diagonal direction outside the mirror.
[0115]
When the mirror is tilted to the near side, the mirror-side operating portion and the opposing side operating portion at the left-front position and the right-front position are electrostatically driven. When the mirror-side operating portion and the opposing-side operating portion at the position are electrostatically driven, and the mirror is tilted to the left, the mirror-side operating portion and the opposing-side operating portion at the left front position and the left back position are electrostatically driven, When the mirror is tilted to the right, the mirror can be rotationally driven on two axes by electrostatically driving the mirror-side operating portion and the opposing-side operating portion at the right front position and the right back position.
[Brief description of the drawings]
FIGS. 1A and 1B are schematic diagrams illustrating an operation state of a mirror according to an example of the present embodiment. FIG. 1A is a schematic diagram illustrating an operation state of a mirror at time t1, and FIG. FIG. 1C is a schematic diagram illustrating an operation state of the mirror at a time point, and FIG. 1C is a schematic diagram illustrating an operation state of the mirror at a time point t3.
FIG. 2 is a diagram showing a timing chart illustrating a change in voltage between a mirror-side operating portion and an opposing-side operating portion according to an example of the present embodiment.
FIG. 3 is a perspective view of a mirror device according to an example of the embodiment.
FIG. 4 is an exploded perspective view of a mirror device according to an example of the embodiment.
FIG. 5 is a plan view of a mirror device according to an example of the embodiment.
FIG. 6 is an exploded perspective view of a mirror device according to another example of the embodiment.
FIG. 7 is a plan view of a mirror device according to another example of the embodiment.
[Explanation of symbols]
1 silicon substrate (mirror substrate), 2 glass substrate (support substrate)
DESCRIPTION OF SYMBOLS 10 Mirror, 11-18, 43, 44 Mirror side operation part 19 Hinge (rotation axis part), 21, 22 Segment electrode 23 Common electrode, 25 Equipotential wiring, 31-42 Opposition side operation part

Claims

In a mirror device having a mirror substrate having a mirror driven by a predetermined distance-dependent driving force, and a support substrate supporting the mirror substrate,
The mirror substrate, while the distance-dependent driving force acts, includes a mirror having a plurality of mirror-side action portions provided on one side to be driven and the opposite side opposite to the one direction,
The support substrate has a plurality of opposing-side operating portions on which the distance-dependent driving force acts between the mirror-side operating portion and
The mirror-side operating portion and the opposing-side operating portion are formed so as to be able to generate an attractive force as the distance-dependent driving force,
The mirror-side operating portion and the opposing-side operating portion on the one direction side generate a suction force to generate a suction action between the mirror-side operating portion and the opposing-side operating portion, thereby causing the mirror to move. While tilting in one direction,
The mirror-side operating portion and the opposing-side operating portion release the suction force, thereby causing the mirror-side operating portion to perform a counter-operation, and the mirror-side operating portion and the opposing-side operating portion on the opposite side are attracted. In order to incline the mirror in the opposite direction by generating a force to generate a suction action between the mirror-side operating portion and the opposite-side operating portion,
An interval between the mirror-side operating portion and the opposite-side operating portion on the one direction side is formed to be narrower than an interval between the mirror-side operating portion and the opposite-side operating portion on the opposite direction side. A mirror device.

In claim 1,
The mirror substrate is formed integrally with the mirror, is provided at a position different from the mirror, and has at least one mirror-side action for generating the distance-dependent driving force in at least one of the one direction and the reverse direction. A mirror device comprising a part.

In a mirror device having a mirror substrate having a mirror driven by a predetermined distance-dependent driving force, and a support substrate supporting the mirror substrate,
The mirror substrate is formed integrally with the mirror, is provided at a position different from the mirror, and is provided on one direction side where the mirror is driven and on the opposite side opposite to the one direction, Having a plurality of mirror-side operating portions on which a distance-dependent driving force acts,
The support substrate has a plurality of opposing-side operating portions on which the distance-dependent driving force acts between the mirror-side operating portion and
The mirror-side operating portion and the opposing-side operating portion are formed so as to be able to generate an attractive force as the distance-dependent driving force,
The mirror-side operating portion and the opposing-side operating portion on the one direction side generate a suction force to generate a suction action between the mirror-side operating portion and the opposing-side operating portion, thereby causing the mirror to move. While tilting in one direction,
The mirror-side operating portion and the opposing-side operating portion release the suction force, thereby causing the mirror-side operating portion to perform a counter-operation, and the mirror-side operating portion and the opposing-side operating portion on the opposite side are attracted. In order to incline the mirror in the opposite direction by generating a force to generate a suction action between the mirror-side operating portion and the opposite-side operating portion,
An interval between the mirror-side operating portion and the opposite-side operating portion on the one direction side is formed to be narrower than an interval between the mirror-side operating portion and the opposite-side operating portion on the opposite direction side. A mirror device.

In any one of claims 2 and 3,
The mirror-side action portion provided at a position different from the mirror is arranged at a predetermined interval in a direction intersecting a driving direction of the mirror,
The distance between the mirror-side operating portion and the opposing-side operating portion at a position away from the mirror is smaller than the distance between the mirror-side operating portion and the opposing-side operating portion at a position closer to the mirror. A mirror device configured to drive the mirror by generating the distance-dependent driving force in at least one of the mirror-side operating portion and the opposing-side operating portion.

In any one of claims 2 to 4,
The mirror substrate is formed integrally with the mirror, and has a rotation shaft portion that rotatably supports the mirror,
The mirror-side action portion provided at a position different from the mirror, the distance-dependent driving force acts on a position shifted from the rotation shaft portion toward the end of the rotation direction of the mirror. A mirror device provided on a rotating shaft portion.

In claim 5,
A mirror device, wherein a plurality of the mirror-side action sections are provided at positions facing the rotation shaft section.

In any one of claims 1 to 6,
The mirror device, wherein the distance-dependent driving force is a Coulomb force.

In claim 7,
A mirror device, wherein at least one of the mirror side action part and the opposite side action part is an electrode.

In any one of claims 7 and 8,
The mirror device according to claim 1, wherein the mirror substrate is a conductive silicon substrate.

An optical switch comprising the mirror device according to claim 1, wherein an optical path is switched by driving the mirror.

An electronic apparatus comprising the mirror device according to claim 1.

A predetermined distance-dependent driving force acts, and a plurality of mirror-side operating portions provided on a mirror on one side where the mirror is driven and a mirror on the opposite side opposite to the one direction; A mirror device driving method for driving a mirror device having a plurality of opposing side action portions on which the distance-dependent driving force acts between,
An interval between the mirror-side operating portion and the opposing-side operating portion on the one direction side is formed to be narrower than an interval between the mirror-side operating portion and the opposing-side operating portion on the opposite direction side,
The mirror-side operating portion and the opposing-side operating portion are formed so as to be able to generate an attractive force as the distance-dependent driving force,
The mirror-side operating portion and the opposing-side operating portion on the one direction side generate a suction force to generate a suction action between the mirror-side operating portion and the opposing-side operating portion, thereby causing the mirror to move. While tilting in one direction,
The mirror-side operating portion and the opposing-side operating portion release a suction force to cause the mirror-side operating portion to generate a counter-operation,
The mirror-side action section and the opposite-side action section on the opposite side generate a suction force to generate a suction action between the mirror-side action section and the opposite-side action section, thereby causing the mirror to move. A mirror device driving method, wherein the mirror device is tilted in the opposite direction.

In claim 12,
The mirror device is formed integrally with the mirror, is provided at a position different from the mirror, and has at least one mirror-side action that generates the distance-dependent driving force in at least one of the one direction and the reverse direction. A mirror device driving method, comprising a unit.

It is formed integrally with a mirror driven by a predetermined distance-dependent driving force, is at a position different from the mirror, and is one direction side where the mirror is driven and the opposite direction side opposite to the one direction. And a plurality of mirror-side operating portions on which the distance-dependent driving force acts, and a plurality of opposing-side operating portions on which the distance-dependent driving force acts between the mirror-side operating portions. A mirror device driving method for driving
An interval between the mirror-side operating portion and the opposing-side operating portion on the one direction side is formed to be narrower than an interval between the mirror-side operating portion and the opposing-side operating portion on the opposite direction side,
The mirror-side operating portion and the opposing-side operating portion are formed so as to be able to generate an attractive force as the distance-dependent driving force,
The mirror-side operating portion and the opposing-side operating portion on the one direction side generate a suction force to generate a suction action between the mirror-side operating portion and the opposing-side operating portion, thereby causing the mirror to move. While tilting in one direction,
The mirror-side operating portion and the opposing-side operating portion release the suction force, thereby causing the mirror-side operating portion to perform a counter-operation, and the mirror-side operating portion and the opposing-side operating portion on the opposite side are attracted. A mirror device driving method, characterized in that the mirror is tilted in the opposite direction by generating a force to generate a suction action between the mirror-side operating portion and the opposed-side operating portion.

In any one of claims 13 and 14,
The mirror-side action portion provided at a position different from the mirror is arranged at a predetermined interval in a direction intersecting a driving direction of the mirror,
The distance between the mirror-side operating portion and the opposing-side operating portion at a position away from the mirror is smaller than the distance between the mirror-side operating portion and the opposing-side operating portion at a position closer to the mirror. A mirror device driving method, wherein the mirror is driven by generating the distance-dependent driving force in at least one of the mirror-side operating portion and the opposed-side operating portion.

In any one of claims 12 to 15,
The distance-dependent driving force is applied at a position shifted from a rotation shaft portion integrally formed with the mirror and rotatably supporting the mirror toward an end portion on the rotation direction side of the mirror. Mirror device driving method.

In claim 16,
A plurality of mirror-side action portions are provided at positions facing the rotation shaft portion,
When the mirror is tilted in one direction, the distance-dependent driving force is applied between a plurality of mirror-side operating portions on the one-way side and the opposing-side operating portion facing the mirror-side operating portion. When the mirror is tilted in the opposite direction, a plurality of mirror-side operating portions and a mirror-side operating portion located on the opposite side and opposed to the plurality of mirror-side operating portions on the one direction side. The mirror device driving method, wherein the distance-dependent driving force is applied between the opposing opposing side action unit.

In any one of claims 12 to 17,
The opposing side operation unit is provided at each position facing the mirror side operation unit,
A mirror device driving method, wherein the distance-dependent driving force is applied to each of the mirror-side operating portion and the opposing-side operating portion facing the mirror-side operating portion.

In any one of claims 12 to 18,
The mirror device driving method, wherein the distance-dependent driving force is a Coulomb force.

In claim 19,
A mirror device driving method, wherein at least one of the mirror-side operating portion and the opposing-side operating portion is an electrode.