JP2004101224A - Terminal connection member and method for manufacturing the same, and inspection device of electronic component - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a terminal connection member for electrically connecting an external connection terminal provided on an electronic component to an inspection device or the like to electrically inspect the electronic component which is adaptable to a narrow pitch between the external connection terminals of the electronic components and capable of reducing the pressure to press the electronic component as much as possible so as to absorb the difference in level between the external connection terminals of the electronic components. <P>SOLUTION: In a terminal connection member 10 for electrically connecting solder balls 30 and 30 or the like provided on an electronic component to an inspection device or the like to electrically inspect the electronic component, abutting portions corresponding to the solder balls 30 and 30 or the like are formed on a tip part cut-erected from a metal plate 28 and located above a rear end of an arm-shaped portion 16 of spring property. The rear end side of the arm-shaped part 16 is joined with a pad 18 formed on one surface side of a resin circuit substrate 14 electrically connected to the inspection device or the like. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a terminal connection member, a method of manufacturing the same, and an electronic component inspection device. The present invention relates to a terminal connecting member for electrical connection, a method of manufacturing the same, and an inspection apparatus including the terminal connecting member.
[0002]
[Prior art]
Normally, electronic components such as manufactured semiconductor devices are inspected to determine whether or not internal electrical connections are complete. For such inspection, it is necessary to electrically connect the inspection apparatus main body and the external connection terminal of the electronic component. For this reason, conventionally, a terminal connecting member 100 shown in FIG. 9 is used.
The terminal connection member 100 has a plurality of sockets 104 mounted on a substrate 102, and an electronic component 106 is mounted on the socket 104 while being pressed by a lid 108.
As shown in FIG. 10, in the socket 104, rods 112 corresponding to solder balls 114, 114,... As external connection terminals mounted on the electronic component 106 are urged against springs 110 as urging members. It is provided.
According to the terminal connecting member 100 shown in FIGS. 9 and 10, even if the height of the solder balls 114, 114... Can reliably contact the rod 112 to be moved.
[0003]
However, in recent years, in the electronic component 106 such as a semiconductor device, the pitch interval between the solder balls 114, 114,.
In the inspection device for the electronic component 106 having the narrow pitch solder balls 114, 114,... As external connection terminals, the rods 112, 112,. The pitch interval also needs to be reduced.
However, since the rod 112 is urged by the spring 110, there is a limit in reducing the pitch gap.
For this reason, Japanese Patent Application Laid-Open No. 2002-151558 discloses that after an elastic layer made of an elastic material such as rubber is formed on the surface of a base substrate, a wiring layer is formed on the upper side of the elastic layer, and the wiring layer is connected to the wiring layer. An inspection device including a terminal connection member provided with a contact has been proposed.
[0004]
[Problems to be solved by the invention]
In the terminal connection member proposed in the above-mentioned publication, an elastic layer made of rubber or the like is employed as a biasing member instead of a spring, so that the pitch between the contacts is reduced to the narrow pitch between the external connection terminals of the electronic component. The pitch can be easily narrowed in accordance with the increase in the height, and the height difference between the external connection terminals of the electronic component can be absorbed by the elastic layer.
However, in order to absorb the height difference between the external connection terminals of the electronic component by such an elastic layer and securely contact the corresponding contact and the external connection terminal, a push for pressing the electronic component in the direction of the contact. It is necessary to increase the pressure.
As described above, increasing the pressing force for pressing the electronic component may deform or break the electronic component.
Therefore, an object of the present invention is to provide a terminal connection member that electrically connects an external connection terminal provided on an electronic component to an inspection device or the like that performs an electrical inspection of the electronic component. A terminal connecting member capable of coping with a narrow pitch between the terminals, and capable of reducing the pressing force for pressing the electronic component as much as possible in order to absorb a height difference between external connection terminals of the electronic component, and a method of manufacturing the same, and An object of the present invention is to provide an electronic component inspection device including a terminal connection member.
[0005]
[Means for Solving the Problems]
As a result of repeated studies to solve the above-described problems, the inventors of the present invention have found that electronic components are provided at the front end located above the rear end of a spring-like arm formed by cutting and raising a metal plate. The present inventors have found that it is possible to obtain a biasing force similar to that of a spring without using a spring formed as a separate member by forming a contact portion that comes into contact with the external connection terminal.
That is, the present invention provides an external connection terminal provided on an electronic component, an inspection device for performing an electrical inspection of the electronic component, and the like, a terminal connection member for electrically connecting the external connection terminal of the electronic component. An abutting portion is formed at a tip end located above a rear end of a spring-like arm-shaped portion formed by cutting and erecting a metal plate, and the rear end side is the inspection device. A terminal connecting member which is joined to a pad formed on one side of the resin circuit board electrically connected to the terminal connecting member.
[0006]
Further, according to the present invention, a terminal connection member for electrically connecting an external connection terminal provided on an electronic component and an electronic component inspection device for performing an electrical inspection of the electronic component is manufactured from a metal plate. At this time, after forming a tongue-shaped portion surrounded by a slit except for a portion connected to the metal plate, the tongue-shaped portion was subjected to press working, and the tongue-shaped portion was formed by bending. A contact portion that contacts an external connection terminal of an electronic component is formed at a tip portion located above a rear end portion of the arm portion, and then, a rear end portion of the arm portion having a spring property is formed. A method of manufacturing a terminal connection member, wherein the terminal connection member is electrically connected to a pad formed on one surface side of a resin circuit board electrically connected to an inspection device or the like. Furthermore, the present invention is also an electronic component inspection device including the above-described terminal connection member.
[0007]
In the present invention, after applying a resist to both surfaces of the metal plate except for the tongue-shaped portion and the vicinity thereof, the tongue-shaped portion is subjected to press processing, and the tongue-shaped portion is formed by bending the arm-shaped portion. A contact portion that contacts the external connection terminal of the electronic component is formed at the tip of the portion, and then the arm portion is formed by electrolytic plating using the metal plate as a power supply layer so as to impart spring properties to the arm portion. After metal plating is applied, the rear end of the arm is peeled off and the rear end of the arm is joined to a pad of a resin circuit board to form a bent arm and other predetermined portions. Metal plating can be easily applied.
In addition, one or a plurality of convex portions may be formed on the contact surface of the contact portion, which is formed at the distal end portion of the arm portion and contacts the external connection terminal of the electronic component, or may be formed on a flat surface. Thereby, the contact of the electronic component with the external connection terminal can be further ensured. Further, by using a metal plate made of a spring steel material as the metal plate forming the arm portion, the formed arm portion can exhibit sufficient spring properties.
[0008]
According to the present invention, a contact portion for contacting an external connection terminal of an electronic component is formed at a distal end located above a rear end of a spring-like arm-shaped portion formed by cutting and raising a metal plate. By doing so, a biasing force similar to a spring can be obtained without using a spring formed as a separate member.
In this manner, since a separate member spring is not used, the pitch interval between the arm-shaped portions having spring properties can be formed narrower than a conventional terminal connection member using a separate member spring.
Further, the arm-shaped portion exhibiting such a spring property can be formed by pressing a tongue-shaped portion formed on a metal plate, and the formation of the arm-shaped portion is easy.
[0009]
BEST MODE FOR CARRYING OUT THE INVENTION
FIG. 1 shows an example of the terminal connection member according to the present invention. The terminal connection member 10 shown in FIG. 1 is composed of a resin circuit board 14 electrically connected to an inspection device or the like and arm-shaped portions 16, 16,.
.. Are formed on one side of the resin circuit board 14, and solder balls 12, 12,... As connection terminals connected to external pads provided on an inspection device or the like on the other side.・ Attached.
The pads 18, 18,... And the solder balls 12, 12,... Are electrically connected via vias 22 penetrating the resin plate 20 and conductive patterns 24.
Further, the conductor pattern 24 is covered with a solder resist 26 except for a pad on which the solder ball 12 is mounted.
The arm-shaped portion 16 whose rear end is joined to each of the pads 18, 18... Formed on one surface side of the resin circuit board 14 has a strip-shaped tongue formed by cutting and raising a metal plate 28. The piece-like portion 28a is formed to bend from the rear end to the front end in a curved shape. For this reason, the tip of the arm 16 is located above the rear end.
The distal end of the arm-shaped portion 16 is bent to form a convex portion, and the distal end of the convex portion contacts the solder ball 30 as an external connection terminal of the semiconductor device as shown in FIG. Therefore, the tip of the arm 16 is a contact portion that contacts the external connection terminal of the electronic component.
[0010]
The arm-shaped portion 16 has a metal plating 32 of a predetermined thickness formed around a band-shaped tongue-shaped portion 28a which is bent in a direction from the rear end to the front end, and exhibits a spring property. .
For this reason, when the electronic component is pressed in the direction of the terminal connecting member 10 in a state where the solder ball 30 is in contact with the tip of the convex portion of the arm 16, the solder ball 30 is caused by the spring property of the arm 16. It receives a pressing force in the direction opposite to the pressing direction of the electronic component. Therefore, the electronic component sinks in the direction of the terminal connecting member 10 while the solder ball 30 and the convex portion of the arm-shaped portion 16 are in contact with each other. The pressing force applied to the electronic component can be smaller than that of the elastic layer made of rubber or the like proposed in the above-mentioned publication, and the possibility of deforming or breaking the electronic component can be eliminated.
Therefore, by sinking the electronic component in the direction of the terminal connection member 10 by a predetermined amount, even if each of the solder balls 30, 30,. It can be brought into contact with the projection.
[0011]
The metal plate 28 forming the tongue-like portion 28a and the like of the arm-like portion 16 may be a copper material, but is formed by using a spring steel material such as phosphor bronze or beryllium copper. Spring property can be further improved.
The metal plating 32 having a predetermined thickness formed around the tongue-like portion 28a or the like may be nickel alloy plating, particularly nickel (Ni) -cobalt (Co) plating. It is preferable in that it can improve. A gold plating layer may be formed on the metal plating 32 as a protective layer for the metal plating 32 that imparts spring properties to the arm 16 as described above.
[0012]
In order to form the terminal connecting member 10 shown in FIG. 1, first, as shown in FIG. 2, a strip-like tongue-like portion 28a surrounded by a slit 34 except for a portion connected to a metal plate 28 made of copper. To form The tongue-like portion 28a can be formed by piercing the slit 34 in the metal plate 28 by press working or etching. Usually, a plurality of the tongue-like portions 28a are formed on one metal plate 28.
As shown in FIG. 3, the metal plate 28 on which the tongue-shaped portion 28a is formed is inserted into a pair of press dies 36, 36 to press the tongue-shaped portion 28a, and the tongue-shaped portion 28a is pressed. The tip is bent while raising the tip. By this press working, the tongue-shaped portion 28a is formed in a shape curved toward the rear end portion in a state where the tip portion having one convex portion is lifted upward.
As described above, it is difficult to apply a resist to a predetermined portion of the metal plate 28 after the tongue-shaped portion 28a is formed into a predetermined shape by performing the press working. For this reason, as shown in FIG. 3, a resist is applied to both surfaces of the metal plate 28 except for a predetermined portion of the metal plate 28 on which the tongue-like portion 28a is formed, for example, near the outer periphery of the tongue-like portion 28a and the slit 34. It is preferable to form a resist layer 38 by coating.
[0013]
After the press working, electrolytic plating using the metal plate 28 as a power supply plate is applied to the vicinity of the outer periphery of the tongue-shaped portion 28a and the slit 34 where the metal plate 28 is exposed. By such electrolytic plating, the metal plating 32 is formed on the outer peripheral surface near the outer peripheral edge of the tongue-like portion 28a and the slit 34, and the arm-like portion 16 exhibiting spring properties can be formed. As this electrolytic plating, it is preferable to adopt nickel (Ni) -cobalt (Co) plating.
After the electrolytic plating is completed, the resist layer 38 is peeled off, and as shown in FIG. 4, a plurality of arms curving toward the rear end with the front end raised upward as shown in FIG. Are formed. The rear end of the arm 16 extends from the metal plate 28.
Further, by subjecting the arms 16, 16,... To heat treatment as needed, the spring properties of the arms 16, 16,.
The metal plate 28 on which the plurality of arms 16 are formed is mounted on the resin circuit board 14. At this time, the rear ends of the arms 16 are joined to the pads 18 of the resin circuit board 14. Such bonding can be performed by a conductive adhesive, ultrasonic connection, thermocompression bonding, or the like.
Thereafter, the portion where the metal plate 28 is exposed is removed by etching, and the arms 16 are electrically insulated from each other.
In each of the lands 12a of the resin circuit board 14, after the portions where the metal plate 28 is exposed are etched, solder as connection terminals to be connected to external pads provided in an inspection device or the like is provided. The ball 12 is mounted.
[0014]
In the resin circuit board 14 shown in FIG. 4, the pads 18, 18... Formed on one surface side and the lands 12 a on the other surface side on which the solder balls 12 are mounted penetrate the resin plate 20. Vias 22 and conductive patterns 24.
Such a resin circuit board 14 can be formed by a known manufacturing method. For example, after a through hole is formed at a predetermined portion of the resin plate 20 by a laser or the like, a thin metal layer formed by electroless plating over the entire surface of the resin plate 20 including the inner wall surface of the through hole is used as a power supply layer. A metal layer having a predetermined thickness is formed by plating. By this electrolytic plating, the via 22 can be formed by filling the inside of the through hole with metal.
Next, the resist layer formed on the surface of the formed metal layer is patterned, and the resist layer is left on the pad 18, the conductor pattern 24 and the land 12a to be formed. By removing by etching, the resin circuit board 14 shown in FIG. 4 can be obtained.
Further, as the metal plate 28 shown in FIG. 4, a spring steel material such as phosphor bronze or beryllium copper can be suitably used.
[0015]
The terminal connection member 10 shown in FIG. 1 formed in the steps shown in FIGS. 2 to 4 has solder balls 12, 12,... As connection terminals connected to external pads provided in an electronic component inspection device. As shown in FIG. 1, each of the tips of the arms 16, 16,... Comes into contact with the corresponding solder ball 30 of the electronic component to be inspected. Therefore, the electronic component to be inspected can be electrically connected to the inspection device.
In this manner, when the distal ends of the arms 16, 16,... Of the terminal connection member 10 mounted on the inspection device are brought into contact with the corresponding solder balls 30 of the electronic component to be inspected, the electronic component is removed. By lightly pressing, even if there is a slight difference in height between each of the solder balls 30, 30,... Of the electronic component, the solder balls 30, 30,... As a result, electrical inspection of the electronic component can be easily performed.
[0016]
In FIG. 4, one projection is formed at the tip of the tongue-shaped portion 28a by pressing, but as shown in FIGS. 5A and 5B, two projections are formed at the tip of the tongue-shaped portion 28a. May be formed.
The two protrusions shown in FIG. 5A have substantially the same height. Therefore, when the solder ball 30 of the electronic component comes into contact with the two convex portions formed at the distal end of the arm 16, the distal ends of the two convex portions come into contact almost simultaneously.
On the other hand, the two convex portions shown in FIG. 5B have different heights. For this reason, when the solder ball 30 of the electronic component comes into contact with the two protrusions formed at the tip of the arm 16, first, after contacting the tip of the protrusion formed in the tip direction, When the electronic component is further pressed, the electronic component comes into contact with the front end of the projection formed in the rear end direction. As described above, if there is a time delay in which the solder ball 30 of the electronic component comes into contact with the tip of the convex portion, the tip of the convex portion that contacts first rubs the surface of the solder ball 30, and the surface of the solder ball 30 It can be expected that the formed oxide film or the like is scraped off.
[0017]
Further, as shown in FIG. 5C, the tip of the tongue-like portion 28a may be formed into a flat surface by press working. In the arm 16 formed from the tongue-like portion 28a, the contact surface that contacts the solder ball 30 of the electronic component is formed as a flat surface. In this manner, by forming the contact surface in contact with the solder ball 30 with a flat surface, the contact surface in contact with the solder ball 30 is compared with a case where the tip of the arm-shaped portion 16 is formed in a convex portion. Can be formed widely.
When the contact surface that contacts the solder ball 30 is formed as a flat surface, as shown in FIG. 6, the tip of the tongue-like portion 28a is formed in a circular shape, and a flat portion is formed near the center thereof. Press working may be performed.
Further, as the tongue-shaped portion 28a formed on the metal plate 28, as shown in FIG. 7A, a tongue-shaped portion 28a having a sharp tip may be formed. In this case, as shown in FIG. 7B, the tongue-shaped portion 28a that has been subjected to the press working is bent in a curved shape from the front end portion with the sharp front end facing upward to the rear end portion.
As shown in FIG. 8A, the tongue-shaped portion 28a having a sharp tip may be formed in a triangular shape. As shown in FIG. It is good also as a shape.
[0018]
【The invention's effect】
ADVANTAGE OF THE INVENTION According to the terminal connection member which concerns on this invention, even if there exists a slight level difference in each of the external connection terminals of an electronic component by lightly pressing an electronic component, it can be easily attached to the front-end | tip part of a corresponding arm-shaped part. Can be abutted.
For this reason, by attaching this terminal connection member to the inspection device, each of the external connection terminals provided on the electronic component to be inspected and the inspection device can be easily electrically connected by the terminal connection member. . As a result, the electrical inspection of the electronic component can be sufficiently performed, and a highly reliable electronic component can be supplied.
[Brief description of the drawings]
FIG. 1 is a partial cross-sectional view for explaining an example of a terminal connection member according to the present invention.
FIG. 2 is a partial front view for explaining a part of a process of manufacturing the terminal connecting member shown in FIG.
FIG. 3 is a schematic cross-sectional view for explaining a part of a step of manufacturing the terminal connecting member shown in FIG.
FIG. 4 is a partial cross-sectional view for explaining a part of a step of manufacturing the terminal connecting member shown in FIG.
FIG. 5 is a partial cross-sectional view showing another example of a tongue-shaped portion subjected to press working.
FIG. 6 is a partial front view showing another example of a tongue-shaped portion formed on a metal plate.
FIG. 7 is a partial front view showing another example of a tongue-shaped portion formed on a metal plate.
FIG. 8 is a partial front view showing another example of a tongue-shaped portion formed on a metal plate.
FIG. 9 is a schematic front view of a conventional terminal connection member.
FIG. 10 is a partial sectional view of a conventional terminal connection member.
[Explanation of symbols]
10 terminal connection member 12 connection terminal (solder ball)
12a Land 14 Resin circuit board 16 Arm 18 Pad 20 Resin plate 22 Via 24 Conductive pattern 26 Solder resist 28 Metal plate 28a Tongue-shaped portion 30 External connection terminal (solder ball)
34 slit 36 press die 38 resist layer

Claims (11)

An external connection terminal provided on the electronic component, an inspection device for performing an electrical inspection of the electronic component, and the like, a terminal connection member for electrically connecting,
A contact portion that contacts the external connection terminal of the electronic component is formed at a tip end located above a rear end of a spring-like arm-shaped portion formed by cutting and raising a metal plate,
A terminal connecting member, wherein the rear end side is joined to a pad formed on one surface side of a resin circuit board electrically connected to the inspection device or the like. The terminal connecting member according to claim 1, wherein the arm-shaped portion is provided with metal plating on an outer peripheral surface thereof so that a spring property is imparted to the arm-shaped portion formed by cutting and raising a metal plate. 3. The contact portion which is formed at the tip of the arm and which contacts the external connection terminal of the electronic component, has one or a plurality of protrusions formed on the contact surface. Terminal connection member. The terminal connection member according to any one of claims 1 to 3, wherein a contact surface of a contact portion that contacts an external connection terminal of the electronic component formed at a tip portion of the arm-shaped portion is formed as a flat surface. . The terminal connection member according to any one of claims 1 to 4, wherein the metal plate that cuts the arm portion is a metal plate made of a spring steel material. When manufacturing an external connection terminal provided on an electronic component and an electronic component inspection device or the like that performs an electrical inspection of the electronic component, a terminal connection member that electrically connects the metal component to a metal plate,
After forming a tongue-shaped portion surrounded by slits except for the portion connected to the metal plate,
An abutting portion that contacts the external connection terminal of the electronic component at a tip located above a rear end of the arm-shaped portion formed by pressing the tongue-shaped portion and bending the tongue-shaped portion. Form
Next, a terminal formed by electrically connecting a rear end portion of the arm-shaped portion exhibiting a spring property to a pad formed on one surface side of the resin circuit board electrically connected to the inspection device or the like. A method for manufacturing a connection member. After forming the resist layer on both sides of the metal plate except for the vicinity of the outer edge of the tongue-shaped part and the slit,
Pressing the tongue-shaped portion, forming a contact portion to be in contact with the external connection terminal of the electronic component at the tip of the arm-shaped portion formed by bending the tongue-shaped portion,
Then, after applying metal plating to the arm portion by electrolytic plating using the metal plate as a power supply layer in order to impart a spring property to the arm portion,
7. The method for manufacturing a terminal connecting member according to claim 6, wherein after the resist layer is peeled off, a rear end of the arm-shaped portion is joined to a pad of a resin circuit board. 8. The terminal connection according to claim 6, wherein one or a plurality of protrusions are formed on the contact surface of the contact portion which is formed at the tip of the arm portion and contacts the external connection terminal of the electronic component. Manufacturing method of the member. 8. The method for manufacturing a terminal connecting member according to claim 6, wherein the contact surface of the contact portion that contacts the external connection terminal of the electronic component formed at the tip of the arm portion is formed as a flat surface. The method for manufacturing a terminal connecting member according to claim 6, wherein a metal plate made of a spring steel material is used as the metal plate forming the arm portion. An electronic component inspection apparatus comprising the terminal connection member according to claim 1.

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