JP2004101106A - Control circuit for air conditioner and control method for air conditioner - Google Patents

Control circuit for air conditioner and control method for air conditioner Download PDF

Info

Publication number
JP2004101106A
JP2004101106A JP2002265348A JP2002265348A JP2004101106A JP 2004101106 A JP2004101106 A JP 2004101106A JP 2002265348 A JP2002265348 A JP 2002265348A JP 2002265348 A JP2002265348 A JP 2002265348A JP 2004101106 A JP2004101106 A JP 2004101106A
Authority
JP
Japan
Prior art keywords
air conditioner
control circuit
circuit
valve
controlling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002265348A
Other languages
Japanese (ja)
Inventor
Masato Handa
半田 正人
Isao Kawasaki
川▲崎▼ 功
Sadao Yajima
矢島 禎夫
Mitsuo Kajima
鹿嶋 美津夫
Yuichi Itoi
糸井 裕一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2002265348A priority Critical patent/JP2004101106A/en
Publication of JP2004101106A publication Critical patent/JP2004101106A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Air Conditioning Control Device (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a control circuit for an air conditioner operable without being influenced by intrusion of noise from a valve mechanism provided on a cooling medium circuit, with enhanced reliability of a system. <P>SOLUTION: The control circuit for the air conditioner is provided with a control circuit part for controlling the whole air conditioner; a valve driving circuit for controlling the valve mechanism of a refrigerating cycle; and an insulation circuit provided between the control circuit part and the valve driving circuit and transmitting signals in an electrically insulated state, in the air conditioner provided with the refrigerating cycle having the valve mechanism for controlling a circulation flow rate and a circulation direction of the cooling medium. The control circuit part and the valve driving circuit are driven by a power source electrically insulated respectively. <P>COPYRIGHT: (C)2004,JPO

Description

【0001】
【発明の属する技術分野】
この発明は、圧縮機を駆動して熱交換器に冷媒を循環させる空気調和機に係り、空気調和機全体を制御する制御回路部と、冷媒の循環流量や循環方向を制御する弁機構の駆動回路を有する空気調和機の制御回路及び空気調和機の製造方法に関するものである。
【0002】
【従来の技術】
図3は従来の空気調和機の制御回路のブロック図である。図において、1は交流電源、2は交流電源1からの交流入力を直流に変換するコンバータ、3はコンバータ2より得られた直流を任意の交流に変換するインバータ、4はインバータ3により駆動される圧縮機、5は各種回路用の直流電源、6は空気調和機全体を制御する制御回路、7は冷媒回路に装備された弁機構を動作させるドライバ回路、8はドライバ回路7により駆動する弁である。
【0003】
従来の空気調和機においては、図3のように交流電源1より得られた交流入力をコンバータ2にて直流入力に変換し、インバータ3にて任意の交流に再度変換し、圧縮機4を駆動する。制御回路6はインバータ3を介して、圧縮機4の駆動を制御し、また同時に空気調和機の各部制御も行なっている。その一部に冷媒の流れ方向や流量を制御する弁8を制御しており、制御回路6はドライバ回路7を介して弁8を駆動している。制御回路6・ドライバ回路7・弁8は直流電源5より電源供給を受けて動作し、直流電源5の構成は制御回路6・ドライバ回路7・弁8すべての部位に対して、回路接地電位が同じ(以下非絶縁構成と示す)電源を供給する仕組みとなっている。
【0004】
【特許文献1】
特開平9−126530号公報
【0005】
【発明が解決しようとする課題】
従来の空気調和機の制御回路は、制御回路6・ドライバ回路7・弁8の電源である直流電源5が非絶縁構成であることから回路構成が簡素にでき、且つ安価に構築できる。しかし、雷やその他機器からの発生するノイズが弁8から侵入した場合、非絶縁構成であるため、最終的には制御回路6までにノイズが侵入し、制御の誤動作やシステムの異常停止等の状態に陥り、空気調和機全体の信頼性を損ねるという問題点があった。
【0006】
そのため、図4に示すように外来ノイズの対策として、ドライバ回路7と弁8の間にノイズ侵入軽減のためのコア10を追加挿入し、対策を行なっている。しかし、コア10はノイズ侵入を軽減することはできるが、電気的に完全遮断することは出来ないので効果のバラツキが大きく、抑制効果を完全に期待できなかった。
【0007】
この発明は、上記のような問題点を解決するためになされたもので、冷媒回路に装備された弁機構からのノイズ侵入に対して制御回路が影響を受けることなく動作でき、システムの信頼性を向上できる空気調和機の制御回路及び空気調和機の製造方法を提供することを目的とする。
【0008】
【課題を解決するための手段】
この発明に係る空気調和機の制御回路は、冷媒の循環流量や循環方向を制御する弁機構を有する冷凍サイクルを備えた空気調和機において、空気調和機全体を制御する制御回路部と、冷凍サイクルの弁機構を制御する弁駆動回路と、制御回路部と弁駆動回路との間に設けられ、電気的に絶縁された状態で信号伝達を行う絶縁回路と、を具備し、制御回路部と弁駆動回路は、それぞれ電気的に絶縁された電源にて駆動されることを特徴とする。
【0009】
また、この発明に係る空気調和機の制御回路は、絶縁回路をフォトカプラ等の光半導体で構成したことを特徴とする。
【0010】
また、この発明に係る空気調和機の制御回路は、絶縁回路を磁気リレーで構成したことを特徴とする。
【0011】
また、この発明に係る空気調和機の制御回路は、絶縁回路をソリッドステートリレーで構成したことを特徴とする。
【0012】
この発明に係る空気調和機の制御方法は、冷媒の循環流量や循環方向を制御する弁機構を有する冷凍サイクルを備えた空気調和機において、空気調和機全体を制御する制御回路部と冷凍サイクルの弁機構を制御する弁駆動回路との間の信号伝達を、絶縁回路により電気的に絶縁された状態で信号伝達を行い、制御回路部と弁駆動回路を、それぞれ電気的に絶縁された電源にて駆動することを特徴とする。
【0013】
【発明の実施の形態】
以下、この発明の実施の形態を図面に基づいて説明する。
実施の形態1.
図1は実施の形態1を示す図で、空気調和機の制御回路のブロック図である。図において、1は交流電源、2は交流電源1からの交流入力を直流に変換するコンバータ、3はコンバータ2より得られた直流を任意の交流に変換するインバータ、4はインバータ3により駆動される圧縮機、5は各種回路用の直流電源、6は空気調和機全体を制御する制御回路、7は冷媒回路に装備された弁機構を動作させるドライバ回路、8はドライバ回路7により駆動する弁、9は制御回路6とドライバ回路7との間に、電気的に絶縁し信号伝達を行なう絶縁回路であり、この絶縁回路9には一般的にフォトカプラ等の光半導体を用いる。
【0014】
さらに、直流電源5は制御回路6とドライバ回路7に供給する電源それぞれに回路接地を設け、制御回路6とドライバ回路7とで異なる回路接地としている。
【0015】
交流電源1より得られた交流入力をコンバータ2にて直流入力に変換し、インバータ3にて任意の交流に再度変換し、圧縮機4を駆動する。制御回路6はインバータ3を介して、圧縮機4の駆動を制御し、また同時に空気調和機の各部制御も行なっている。その一部に冷媒の流れ方向や流量を制御する弁8を制御しており、弁8を駆動する回路動作は、制御回路6より駆動信号が絶縁回路9に送信される。絶縁回路9ではフォトカプラによって、駆動信号が電気信号から光信号に変換され、再度電気信号に変換され、その後ドライバ回路7へ入力される。ドライバ回路7では入力された信号に従って、弁8を駆動する。
【0016】
以上の回路構成とすることにより、制御回路6とドライバ回路7とは電気的には接続されていない絶縁された状態になる。仮に、弁8からノイズ侵入があっても、制御回路6には侵入しないため制御回路6はノイズの影響を受けることが無くなり、誤動作や停止といった状態に陥ることが無くなる。
【0017】
上述の実施の形態では、絶縁回路9にフォトカプラを用いたものを示したが、フォトカプラ以外の光半導体を用いてもよい。
【0018】
実施の形態2.
図2は実施の形態2を示す図で、空気調和機の制御回路のブロック図である。実施の形態1では絶縁回路9にフォトカプラを用いた場合を示したが、この部位は磁気リレーを使った場合でも同様に効果が得られる。
【0019】
図2は絶縁回路9に磁気リレーを使った場合の構成であり、その他は実施の形態1で示した図1と同様である。
【0020】
絶縁回路9にフォトカプラを用いる場合は、制御回路6からドライバ回路7への信号伝達は光によって行なうことになるが、磁気リレーを用いた場合は制御回路6からの信号により、磁気リレーの一次巻線側に電流を導通して磁気を発生させ、二次側接点を動作させる。フォトカプラを用いた時と同様に、制御回路6とドライバ回路7を電気的に絶縁することができるので、実施の形態1と同様の効果を得ることができる。
【0021】
実施の形態3.
上記実施の形態では、絶縁回路9にフォトカプラ、磁気リレーを用いたものを示したが、その他に光で信号のやりとりを行うソリッドステートリレーを用いても良く、フォトカプラを用いた時と同様に、制御回路6とドライバ回路7を電気的に絶縁することができるので、実施の形態1と同様の効果を得ることができる。
【0022】
【発明の効果】
この発明に係る空気調和機の制御回路は、制御回路部と弁駆動回路との間に電気的に絶縁された状態で信号伝達を行う絶縁回路を備え、制御回路部と弁駆動回路をそれぞれ電気的に絶縁された電源にて駆動されるようにしたので、弁からのノイズ侵入に対して制御回路が影響受けることなく動作でき、システムの信頼性が向上する効果が得られる。
【0023】
この発明に係る空気調和機の制御方法は、空気調和機全体を制御する制御回路部と冷凍サイクルの弁機構を制御する弁駆動回路との間の信号伝達を、絶縁回路により電気的に絶縁された状態で信号伝達を行い、御回路部と弁駆動回路をそれぞれ電気的に絶縁された電源にて駆動するようにしたので、弁からのノイズ侵入に対して制御回路が影響受けることなく動作でき、システムの信頼性が向上する効果が得られる。
【図面の簡単な説明】
【図1】実施の形態1を示す図で、空気調和機の制御回路のブロック図である。
【図2】実施の形態2を示す図で、空気調和機の制御回路のブロック図である。
【図3】従来の空気調和機の制御回路のブロック図である。
【図4】従来の弁機構からのノイズ侵入抑制対策のブロック図である。
【符号の説明】
1 交流電源、2 コンバータ、3 インバータ、4 圧縮機、5 直流電源、6 制御回路、7 ドライバ回路、8 弁、9 絶縁回路。
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an air conditioner that drives a compressor to circulate a refrigerant through a heat exchanger, and a control circuit unit that controls the entire air conditioner and a valve mechanism that controls a circulating flow rate and a circulating direction of the refrigerant. The present invention relates to a control circuit for an air conditioner having a circuit and a method for manufacturing an air conditioner.
[0002]
[Prior art]
FIG. 3 is a block diagram of a control circuit of the conventional air conditioner. In the figure, 1 is an AC power supply, 2 is a converter for converting an AC input from the AC power supply 1 to DC, 3 is an inverter for converting DC obtained from the converter 2 to an arbitrary AC, and 4 is driven by the inverter 3 Compressor, 5 is a DC power supply for various circuits, 6 is a control circuit for controlling the entire air conditioner, 7 is a driver circuit for operating a valve mechanism provided in the refrigerant circuit, and 8 is a valve driven by a driver circuit 7. is there.
[0003]
In the conventional air conditioner, as shown in FIG. 3, an AC input obtained from an AC power supply 1 is converted into a DC input by a converter 2 and is again converted into an arbitrary AC by an inverter 3 to drive the compressor 4. I do. The control circuit 6 controls the driving of the compressor 4 via the inverter 3 and at the same time controls each part of the air conditioner. A part thereof controls a valve 8 for controlling the flow direction and flow rate of the refrigerant, and the control circuit 6 drives the valve 8 via a driver circuit 7. The control circuit 6, the driver circuit 7, and the valve 8 operate by receiving power supply from the DC power supply 5, and the configuration of the DC power supply 5 is such that a circuit ground potential is applied to all parts of the control circuit 6, the driver circuit 7, and the valve 8. The power supply is the same (hereinafter referred to as a non-insulated configuration).
[0004]
[Patent Document 1]
JP-A-9-126530
[Problems to be solved by the invention]
The control circuit of the conventional air conditioner can be constructed simply and inexpensively because the DC power supply 5, which is the power supply for the control circuit 6, the driver circuit 7, and the valve 8, has a non-insulated configuration. However, when noise generated from lightning or other equipment intrudes from the valve 8, the noise eventually enters the control circuit 6 due to the non-insulated configuration, and may cause control malfunction or abnormal system stop. There has been a problem that the air conditioner falls into a state and the reliability of the entire air conditioner is impaired.
[0006]
For this reason, as shown in FIG. 4, as a countermeasure against external noise, a core 10 for reducing noise intrusion is additionally inserted between the driver circuit 7 and the valve 8 to take countermeasures. However, although the core 10 can reduce noise intrusion, it cannot electrically cut off completely, so that the effect varies widely and the suppression effect cannot be expected completely.
[0007]
SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems, and the control circuit can operate without being affected by noise intrusion from a valve mechanism provided in the refrigerant circuit, and the reliability of the system can be improved. It is an object to provide a control circuit of an air conditioner and a method of manufacturing the air conditioner, which can improve the air conditioner.
[0008]
[Means for Solving the Problems]
A control circuit of an air conditioner according to the present invention includes a control circuit for controlling an entire air conditioner in an air conditioner including a refrigeration cycle having a valve mechanism for controlling a circulation flow rate and a circulation direction of a refrigerant; A valve drive circuit for controlling the valve mechanism, and an insulating circuit provided between the control circuit unit and the valve drive circuit and transmitting signals in an electrically insulated state. The driving circuits are each driven by an electrically insulated power supply.
[0009]
Further, the control circuit of the air conditioner according to the present invention is characterized in that the insulating circuit is constituted by an optical semiconductor such as a photocoupler.
[0010]
Further, the control circuit of the air conditioner according to the present invention is characterized in that the insulating circuit is constituted by a magnetic relay.
[0011]
Further, the control circuit of the air conditioner according to the present invention is characterized in that the insulation circuit is constituted by a solid state relay.
[0012]
An air conditioner control method according to the present invention is directed to an air conditioner including a refrigeration cycle having a valve mechanism for controlling a circulation flow rate and a circulation direction of a refrigerant. The signal transmission between the valve drive circuit that controls the valve mechanism and the signal transmission is performed in a state where the signal is electrically insulated by the insulating circuit, and the control circuit unit and the valve drive circuit are each connected to an electrically insulated power supply. It is characterized by being driven.
[0013]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
Embodiment 1 FIG.
FIG. 1 shows the first embodiment and is a block diagram of a control circuit of the air conditioner. In the figure, 1 is an AC power supply, 2 is a converter for converting an AC input from the AC power supply 1 to DC, 3 is an inverter for converting DC obtained from the converter 2 to an arbitrary AC, and 4 is driven by the inverter 3 A compressor 5, a DC power supply for various circuits, 6 a control circuit for controlling the entire air conditioner, 7 a driver circuit for operating a valve mechanism provided in the refrigerant circuit, 8 a valve driven by the driver circuit 7, Reference numeral 9 denotes an insulating circuit that electrically insulates and transmits signals between the control circuit 6 and the driver circuit 7. The insulating circuit 9 generally uses an optical semiconductor such as a photocoupler.
[0014]
Further, the DC power supply 5 is provided with a circuit ground for each of the power supplies supplied to the control circuit 6 and the driver circuit 7, and the control circuit 6 and the driver circuit 7 have different circuit grounds.
[0015]
The AC input obtained from the AC power supply 1 is converted into a DC input by the converter 2, converted again into an arbitrary AC by the inverter 3, and the compressor 4 is driven. The control circuit 6 controls the driving of the compressor 4 via the inverter 3 and at the same time controls each part of the air conditioner. A valve 8 for controlling the flow direction and flow rate of the refrigerant is partly controlled, and in the circuit operation for driving the valve 8, a drive signal is transmitted from the control circuit 6 to the insulating circuit 9. In the insulating circuit 9, the drive signal is converted from an electric signal to an optical signal by a photocoupler, converted into an electric signal again, and then input to the driver circuit 7. The driver circuit 7 drives the valve 8 according to the input signal.
[0016]
With the above circuit configuration, the control circuit 6 and the driver circuit 7 are in an insulated state where they are not electrically connected. Even if noise enters from the valve 8, it does not enter the control circuit 6, so that the control circuit 6 is not affected by the noise and does not fall into a state such as malfunction or stop.
[0017]
In the above-described embodiment, an example in which a photocoupler is used for the insulating circuit 9 is described, but an optical semiconductor other than the photocoupler may be used.
[0018]
Embodiment 2 FIG.
FIG. 2 shows the second embodiment and is a block diagram of a control circuit of the air conditioner. In the first embodiment, the case where a photocoupler is used for the insulating circuit 9 has been described. However, the same effect can be obtained in the case where a magnetic relay is used.
[0019]
FIG. 2 shows a configuration in the case where a magnetic relay is used for the insulation circuit 9, and the other configuration is the same as that of the first embodiment shown in FIG.
[0020]
When a photocoupler is used for the insulating circuit 9, the signal transmission from the control circuit 6 to the driver circuit 7 is performed by light, but when a magnetic relay is used, the primary signal of the magnetic relay is transmitted by the signal from the control circuit 6. The current is conducted to the winding side to generate magnetism, and the secondary side contact is operated. As in the case where the photocoupler is used, the control circuit 6 and the driver circuit 7 can be electrically insulated, so that the same effect as in the first embodiment can be obtained.
[0021]
Embodiment 3 FIG.
In the above embodiment, the insulation circuit 9 uses a photocoupler and a magnetic relay. However, a solid-state relay that exchanges signals by light may be used, and the same as when a photocoupler is used. In addition, since the control circuit 6 and the driver circuit 7 can be electrically insulated, the same effect as in the first embodiment can be obtained.
[0022]
【The invention's effect】
The control circuit of the air conditioner according to the present invention includes an insulating circuit that transmits signals in a state of being electrically insulated between the control circuit unit and the valve drive circuit, and electrically connects the control circuit unit and the valve drive circuit to each other. Since the control circuit is driven by a power supply that is electrically insulated, the control circuit can operate without being affected by noise intrusion from the valve, and the effect of improving the reliability of the system can be obtained.
[0023]
In the control method of the air conditioner according to the present invention, the signal transmission between the control circuit unit that controls the entire air conditioner and the valve drive circuit that controls the valve mechanism of the refrigeration cycle is electrically insulated by the insulating circuit. The control circuit and valve drive circuit are driven by electrically insulated power supplies, respectively, so that the control circuit can be operated without being affected by noise intrusion from the valve. This has the effect of improving the reliability of the system.
[Brief description of the drawings]
FIG. 1 is a diagram illustrating a first embodiment, and is a block diagram of a control circuit of an air conditioner.
FIG. 2 shows a second embodiment, and is a block diagram of a control circuit of the air conditioner.
FIG. 3 is a block diagram of a control circuit of a conventional air conditioner.
FIG. 4 is a block diagram of a conventional measure for suppressing noise intrusion from a valve mechanism.
[Explanation of symbols]
1 AC power supply, 2 converters, 3 inverters, 4 compressors, 5 DC power supply, 6 control circuit, 7 driver circuit, 8 valves, 9 insulation circuit.

Claims (5)

冷媒の循環流量や循環方向を制御する弁機構を有する冷凍サイクルを備えた空気調和機において、
空気調和機全体を制御する制御回路部と、
前記冷凍サイクルの弁機構を制御する弁駆動回路と、
前記制御回路部と前記弁駆動回路との間に設けられ、電気的に絶縁された状態で信号伝達を行う絶縁回路と、
を具備し、前記制御回路部と前記弁駆動回路は、それぞれ電気的に絶縁された電源にて駆動されることを特徴とする空気調和機の制御回路。
In an air conditioner equipped with a refrigeration cycle having a valve mechanism for controlling the circulation flow rate and the circulation direction of the refrigerant,
A control circuit for controlling the entire air conditioner;
A valve drive circuit for controlling a valve mechanism of the refrigeration cycle,
An insulation circuit that is provided between the control circuit unit and the valve drive circuit and transmits a signal in an electrically insulated state,
Wherein the control circuit section and the valve drive circuit are each driven by an electrically insulated power supply.
前記絶縁回路をフォトカプラ等の光半導体で構成したことを特徴とする請求項1に記載の空気調和機の制御回路。The control circuit for an air conditioner according to claim 1, wherein the insulating circuit is formed of an optical semiconductor such as a photocoupler. 前記絶縁回路を磁気リレーで構成したことを特徴とする請求項1に記載の空気調和機の制御回路。The control circuit for an air conditioner according to claim 1, wherein the insulation circuit is configured by a magnetic relay. 前記絶縁回路をソリッドステートリレーで構成したことを特徴とする請求項1に記載の空気調和機の制御回路。The control circuit for an air conditioner according to claim 1, wherein the insulation circuit is a solid state relay. 冷媒の循環流量や循環方向を制御する弁機構を有する冷凍サイクルを備えた空気調和機において、
空気調和機全体を制御する制御回路部と前記冷凍サイクルの弁機構を制御する弁駆動回路との間の信号伝達を、絶縁回路により電気的に絶縁された状態で信号伝達を行い、
前記制御回路部と前記弁駆動回路を、それぞれ電気的に絶縁された電源にて駆動することを特徴とする空気調和機の制御方法。
In an air conditioner equipped with a refrigeration cycle having a valve mechanism for controlling the circulation flow rate and the circulation direction of the refrigerant,
Signal transmission between a control circuit unit that controls the entire air conditioner and a valve drive circuit that controls the valve mechanism of the refrigeration cycle, performs signal transmission in a state in which it is electrically insulated by an insulating circuit,
The control method of an air conditioner, wherein the control circuit unit and the valve drive circuit are driven by power supplies that are electrically insulated from each other.
JP2002265348A 2002-09-11 2002-09-11 Control circuit for air conditioner and control method for air conditioner Pending JP2004101106A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002265348A JP2004101106A (en) 2002-09-11 2002-09-11 Control circuit for air conditioner and control method for air conditioner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002265348A JP2004101106A (en) 2002-09-11 2002-09-11 Control circuit for air conditioner and control method for air conditioner

Publications (1)

Publication Number Publication Date
JP2004101106A true JP2004101106A (en) 2004-04-02

Family

ID=32264514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002265348A Pending JP2004101106A (en) 2002-09-11 2002-09-11 Control circuit for air conditioner and control method for air conditioner

Country Status (1)

Country Link
JP (1) JP2004101106A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010139158A (en) * 2008-12-11 2010-06-24 Aisin Seiki Co Ltd Outdoor unit for heat pump type air conditioner
JP2014027809A (en) * 2012-07-27 2014-02-06 Kyuhen Co Ltd Slave station for automatic voltage regulator
JP2017037846A (en) * 2009-10-21 2017-02-16 ラム リサーチ コーポレーションLam Research Corporation Heating plate and substrate support assembly

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010139158A (en) * 2008-12-11 2010-06-24 Aisin Seiki Co Ltd Outdoor unit for heat pump type air conditioner
JP2017037846A (en) * 2009-10-21 2017-02-16 ラム リサーチ コーポレーションLam Research Corporation Heating plate and substrate support assembly
KR101919675B1 (en) * 2009-10-21 2019-02-08 램 리써치 코포레이션 Heating plate with planar heater zones for semiconductor processing
US10236193B2 (en) 2009-10-21 2019-03-19 Lam Research Corporation Substrate supports with multi-layer structure including independent operated heater zones
US10720346B2 (en) 2009-10-21 2020-07-21 Lam Research Corporation Substrate support with thermal zones for semiconductor processing
JP2014027809A (en) * 2012-07-27 2014-02-06 Kyuhen Co Ltd Slave station for automatic voltage regulator

Similar Documents

Publication Publication Date Title
CN102483255B (en) Compressor and condenser assemblies for hvac systems
JP2010243051A (en) Air conditioner
JP2008312342A (en) Controller for electric compressor
US11368118B2 (en) Motor driving device and air conditioner
WO2018078849A1 (en) Electric motor driving device and air conditioner
JP2009055781A (en) Motor driving controller, air conditioner, ventilation fan, and heat-pump water heater
CN110073591B (en) Motor drive device and air conditioner
KR100573649B1 (en) Power Source System and Air Conditioning Device
JP2007064542A (en) Refrigeration apparatus and inverter device for use therein
US20200321900A1 (en) Motor drive unit, compressor, and air conditioner
JP2004101106A (en) Control circuit for air conditioner and control method for air conditioner
JP2005257266A (en) Refrigerating apparatus and inverter device used therefor
JP4164554B2 (en) Refrigeration apparatus and inverter apparatus used therefor
JP2010139158A (en) Outdoor unit for heat pump type air conditioner
JP2010142052A (en) Outdoor unit of heat pump air conditioner
JP2007166782A (en) Refrigerator and inverter device used therefor
KR102261277B1 (en) Cooling fan controller in engine room and controlling method thereof
JP4623220B2 (en) Power circuit
JP6121290B2 (en) Refrigeration equipment
KR20120087733A (en) Apparatus for controlling motor and air conditioner having the apparatus
JP2010112585A (en) Heat pump device
JP6466023B2 (en) Air conditioner
KR100395945B1 (en) Method for control carrier frequency in inverter airconditioner
US20230139257A1 (en) Power Conversion Device
WO2015107639A1 (en) Inverter device and air conditioner using inverter device

Legal Events

Date Code Title Description
RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20040119

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20040519

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20041025