JP2004093513A - X-ray analysis apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an X-ray analysis apparatus capable of obtaining the clear optical image of a sample by suppressing stray light generated when light emitted from a light source is irregularly reflected by a transmission film. <P>SOLUTION: This X-ray analysis apparatus is provided with an X-ray analysis apparatus body 1 having the transmission film 10 capable of transmitting X-rays and visible light, and emitting X-rays toward the sample 6 disposed in a position where the X-rays are transmitted through the transmission film 10; light sources 13, 13 emitting visible light toward the sample 6; and an image pickup means 17 disposed inside the X-ray analysis apparatus body 1 to pick up the image of the sample 6. Through holes 14, 14 are formed around the transmission film 10, and the light sources 13, 13 are arranged in the through holes 14, 14. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an X-ray analyzer that irradiates a sample with primary X-rays to detect secondary X-rays, and irradiates the sample irradiated with primary X-rays with light to capture an optical image.
[0002]
[Prior art]
The X-ray analyzer irradiates a sample with primary X-rays generated by an X-ray source, and detects secondary X-rays generated at that time with an X-ray detector. Based on the detection result of the X-ray analyzer, analysis of the constituent elements of the sample or analysis of the structure can be performed.
[0003]
In the X-ray analyzer that detects fluorescent X-rays as the secondary X-ray described above, in particular, an apparatus having the following configuration has been proposed in order to reliably detect light elements such as Na, Mg, and Al. . That is, as shown in FIG. 5, the X-ray analyzer includes an X-ray source (not shown) and a box-shaped X-ray apparatus main body 21 provided below the X-ray source. The X-ray apparatus main body 21 has an X-ray conduit extending in the vertical direction for narrowing down the primary X-rays generated from the X-ray source and irradiating it downward through the transmission film 22 provided on the bottom 21a. 23 and an X-ray detector 24 (indicated by a two-dot chain line) for detecting secondary X-rays. The sample 27 irradiated with the primary X-ray is placed on a placing table 28 provided below the permeable membrane 22.
[0004]
The inside of the X-ray apparatus main body 21 is a sealed space separated from the outside, and the primary X-ray irradiated to the sample 27 and the generated secondary X-ray are generated by setting the sealed space in a vacuum state. Vacuum most of the path. Thereby, the absorption of primary X-rays and secondary X-rays by the atmosphere is greatly reduced, and light elements can be reliably detected.
Further, in order to observe which position of the sample 27 is irradiated with the primary X-ray, the light source 25 and the imaging means 26 are directed toward the sample 27 in the vicinity of the transmission film 22 inside the X-ray apparatus main body 21. Is arranged. The imaging means 26 images the sample 27 irradiated through the transmissive film 22 with visible light emitted from the light source 25 (see, for example, Patent Document 1).
[0005]
[Patent Document 1]
JP-A-8-15187 gazette
[Problems to be solved by the invention]
In the X-ray analyzer, the X-ray apparatus main body 21 is arranged as close as possible to the sample 27 in order to further reduce the absorption of primary X-rays and secondary X-rays by the atmosphere and reliably detect light elements. The distance between the bottom 21a and the mounting table 28 is about 1 mm. For this reason, the light source 25 cannot be disposed between the bottom 21 a and the mounting table 28, and the light source 25 is disposed inside the X-ray apparatus main body 21. With such an arrangement, the light emitted from the light source 25 is transmitted through the transmission film 22 and applied to the sample 27. Therefore, the light is irregularly reflected at the transmission film 22 and stray light is generated. There is a problem that an optical image becomes unclear.
[0007]
The present invention has been made in view of such circumstances, and an object of the present invention is to suppress stray light due to the transmission film by arranging the light source in an area where the sample can be irradiated with light without passing through the transmission film. Even another object is to provide an X-ray analyzer capable of obtaining a clear optical image of a sample.
[0008]
Another object of the present invention is to provide light shielding means for shielding light emitted from the light source between the light source and the transmissive film, thereby shielding light emitted from the light source toward the transmissive film. Thus, an object of the present invention is to provide an X-ray analyzer that can obtain a clear optical image of a sample without generating stray light due to a transmission film.
[0009]
Furthermore, another object of the present invention is to provide a frame having a permeable membrane having holes formed around the permeable membrane, and disposing the light source in the holes, By irradiating the sample with light passing through the hole from a light source at a low angle toward the sample placed close to the frame, stray light from the transmission film can be suppressed, and the sample can be clearly seen. An object of the present invention is to provide an X-ray analyzer capable of obtaining an optical image.
[0010]
[Means for Solving the Problems]
An X-ray analyzer according to a first aspect of the present invention is an X-ray conduit for guiding primary X-rays generated by an X-ray source, and is capable of transmitting X-rays and light, and the primary guided by the X-ray conduit. A permeable membrane that transmits X-rays, a detection means that detects secondary X-rays generated by irradiating the sample with primary X-rays transmitted through the permeable membrane, and a light source that irradiates the sample with light The light source is arranged in a region where the sample can be irradiated with light without passing through the permeable film.
[0011]
In the first invention, since the light emitted from the light source is irradiated on the sample without passing through the transmission film, it is possible to suppress stray light from being irregularly reflected in the transmission film, and to obtain clear optical characteristics of the sample. An image can be obtained.
[0012]
The X-ray analyzer according to the second invention is characterized in that a light shielding means for shielding light emitted from the light source is provided between the light source and the transmission film.
[0013]
In the second invention, the light irradiated from the light source in the direction of the transmissive film is shielded by the light shielding means, so that the generation of stray light by the transmissive film can be prevented and a clearer optical image of the sample can be obtained.
[0014]
An X-ray analysis apparatus according to a third aspect of the present invention includes a frame body provided with the permeable membrane, the frame body having a hole formed around the permeable film, and the light source is provided in the hole. It is arranged.
[0015]
In the third invention, since the light emitted from the light source is irradiated toward the sample through the hole, a clear optical image of the sample irradiated with the light without passing through the transmission film can be obtained.
[0016]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described with reference to the drawings illustrating embodiments thereof.
Embodiment 1
FIG. 1 is a schematic diagram showing a main configuration of an X-ray analyzer according to the present invention, and FIG. 2 is an enlarged view around a permeable membrane provided in the X-ray analyzer.
The X-ray analyzer according to the present invention includes an X-ray source 3 and a box-shaped X-ray analyzer main body (hereinafter referred to as the apparatus main body) 1 provided below the X-ray source 3. A seal member 2 is provided between the X-ray source 3 and the apparatus main body 1.
Below the apparatus main body 1, a mounting table 7 for mounting the sample 6 is provided so as to be movable by a driving mechanism (not shown) facing the bottom 1 a of the apparatus main body 1.
[0017]
The apparatus main body 1 guides the primary X-rays generated by the X-ray source 3 with a narrow beam diameter of about 10 to 100 μm inside, and is a mounting table at a position where the transmission film 10 provided on the bottom 1a is transmitted. An X-ray conduit 5 extending in the vertical direction is provided for irradiating the sample 6 placed on 7.
Further, a semiconductor sensor for detecting secondary X-rays (fluorescent X-rays) b generated when the sample 6 is irradiated with primary X-rays a is used in the vicinity of the permeable membrane 10 inside the apparatus main body 1. An X-ray detector 11 is provided. The X-ray detector 11 is connected to a tank 12 in which a cooling medium is accommodated, and is cooled by a cooling medium supplied from the tank 12.
[0018]
An opening 4 having a size suitable for detecting the secondary X-ray b by the X-ray detector 11 is formed on the bottom 1a, and the above-described permeable membrane 10 is stretched so as to close the opening 4. Has been. The inside of the apparatus main body 1 is maintained in a vacuum state, and the permeable membrane 10 is made of a material that can withstand a pressure of about atmospheric pressure and transmits X-rays and visible light well, such as a polyethylene resin.
[0019]
In addition, through holes 14 and 14 are formed around the opening 4 in the bottom 1a, and light sources 13 and 13 made of LEDs or the like that emit visible light are airtightly arranged in the through holes 14 and 14, respectively. is there. The through holes 14 and 14 are formed so as to be inclined from the vertical direction to the central axis direction of the apparatus main body 1 so that the light emitted from the light sources 13 and 13 can be reliably irradiated by the sample 6 through the through holes 14 and 14. The light sources 13, 13 are arranged toward the direction of the sample 6. In the present embodiment, two light sources 13 are provided, but the number is not limited to two and may be one or three or more. The through holes 14 are formed corresponding to the number of the light sources 13.
[0020]
Further, in the vicinity of the permeable membrane 10 inside the apparatus main body 1, an imaging means 17 composed of a CCD camera or the like for imaging the sample 6 irradiated to the primary X-ray a is directed in the direction of the sample 6 mounted on the mounting table 7. It is arranged toward.
[0021]
With the above configuration, the primary X-ray a generated by the X-ray source 3 is guided by the X-ray conduit 5, passes through the permeable membrane 10, and is irradiated toward the sample 6. The generated secondary X-rays b pass through the transmission film 10 and are detected by the X-ray detector 11.
Further, the light c emitted from the light sources 13 and 13 is irradiated to the sample 6 through the through holes 14 and 14 without passing through the transmission film 10. And the imaging means 17 images the sample 6 irradiated with the light c, whereby a clear optical image of the sample 6 is obtained.
[0022]
Thus, an electrical signal corresponding to the optical image captured by the imaging unit 17 is output to the computer 18. The computer 18 has an image processing function and the like, and causes the display device 19 to display the result of appropriate image processing based on the electrical signal output from the imaging means 17. Thereby, the optical image of the sample 6 imaged by the imaging means 17 is displayed on the display device 19, and it is possible to observe which position of the sample 6 is irradiated with the primary X-ray a.
[0023]
A signal corresponding to the detection result of the X-ray detector 11 is also output to the computer 18. Based on the signal output from the X-ray detector 11, the computer 18 performs a calculation for analyzing an element included in the position irradiated with the primary X-ray a of the sample 6, and the calculation result is displayed on the display device 19. Display.
[0024]
Embodiment 2
FIG. 3 is an enlarged view around the permeable membrane of the X-ray analyzer according to Embodiment 2 of the present invention.
The X-ray analysis apparatus according to the second embodiment includes cylindrical portions 15, 15 that are connected to the through holes 14, 14 that the X-ray analysis apparatus according to the first embodiment has in the bottom 1 a of the apparatus main body 1 and that extend to the inside of the apparatus main body 1. Furthermore, the light sources 13 and 13 are airtightly arrange | positioned inside the cylinder parts 15 and 15. FIG.
[0025]
With such a configuration, the light c emitted from the light sources 13 and 13 disposed inside the tube portions 15 and 15 is guided only in the direction of the sample 6 through the inside of the tube portions 15 and 15 and the through holes 14 and 14. , It is not guided in directions other than the sample 6 direction. Therefore, the light c emitted from the light sources 13 and 13 is irradiated toward the sample 6 through the insides of the cylindrical portions 15 and 15 and the through holes 14 and 14. And the imaging means 17 images the sample 6 irradiated with the light c, whereby a clearer optical image of the sample 6 can be obtained than when the cylindrical portions 15 are not provided.
Since other configurations and operations are the same as those in the first embodiment, the same reference numerals are given to the same members, and detailed descriptions thereof are omitted.
[0026]
Embodiment 3
FIG. 4 is an enlarged view of the periphery of the permeable membrane of the X-ray analyzer according to Embodiment 3 of the present invention.
The X-ray analyzer according to the third embodiment has a wall-like light extending upward from between each of the through holes 14 and 14 provided in the bottom 1a of the apparatus main body 1 and the transmission film 10 in the X-ray analyzer according to the first embodiment. The shielding means 16 and 16 are provided, and the light sources 13 and 13 are airtightly arrange | positioned in the through-holes 14 and 14 vicinity.
[0027]
With such a configuration, light emitted from the light sources 13 and 13 arranged in the vicinity of the through holes 14 and 14 toward the transmissive film 10 is shielded by the light shielding means 16 and 16, so that the transmissive film 10 is irradiated with light. It will never be done. Therefore, the light c emitted from the light sources 13 and 13 is irradiated to the sample 6 through the through holes 14 and 14. And the imaging means 17 images the sample 6 irradiated with the light c, whereby a clear optical image of the sample 6 is obtained.
Since other configurations and operations are the same as those in the first embodiment, the same reference numerals are given to the same members, and detailed descriptions thereof are omitted.
[0028]
In the first to third embodiments, the light sources 13 and 13 are provided on the inner side of the apparatus main body 1, but the light source may be provided on the outer side of the apparatus main body 1. For example, a recess capable of storing a light source is provided below the bottom portion 1a, and the light source is disposed in the recess toward the sample 6. Also in this embodiment, since the light emitted from the light source can be irradiated toward the sample 6 without passing through the transmission film 10, a clear optical image of the sample 6 can be obtained.
[0029]
【The invention's effect】
According to the first invention, the light emitted from the light source is applied to the sample without passing through the transmissive film, so that it is possible to suppress stray light from being irregularly reflected in the transmissive film, and the clearness of the sample can be suppressed. An optical image can be obtained.
[0030]
According to the second invention, light emitted in the direction of the transmissive film from the light source arranged in the vicinity of the hole formed around the permeable film is shielded by the light shielding means provided between the hole and the permeable film. Therefore, the generation of stray light by the transmission film can be prevented, and a clearer optical image of the sample can be obtained.
[0031]
According to the third aspect of the invention, the light emitted from the light source disposed in the hole formed around the permeable film is irradiated toward the sample through the hole, so that the generation of stray light by the transmissive film can be suppressed, and the sample can be suppressed. A clear optical image can be obtained.
[Brief description of the drawings]
FIG. 1 is a schematic diagram showing a main configuration of an X-ray analyzer according to the present invention.
FIG. 2 is an enlarged view around a permeable membrane of an X-ray analyzer.
FIG. 3 is an enlarged view around a permeable membrane of an X-ray analyzer according to Embodiment 2 of the present invention.
FIG. 4 is an enlarged view around a permeable membrane of an X-ray analyzer according to Embodiment 3 of the present invention.
FIG. 5 is a schematic diagram showing a configuration around a permeable membrane of a conventional X-ray analyzer.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 X-ray analyzer main body 6 Sample 10 Transmission membrane 11 X-ray detector 13 Light source 14 Through-hole 15 Tube part 16 Light shielding means 17 Imaging means

Claims (3)

An X-ray conduit for guiding primary X-rays generated by an X-ray source; a transmission membrane capable of transmitting X-rays and light; and transmitting primary X-rays guided by the X-ray conduit; In an X-ray analyzer comprising: a detecting means for detecting secondary X-rays generated by irradiating a sample with primary X-rays transmitted through the film; and a light source for irradiating the sample with light.
The X-ray analyzer according to claim 1, wherein the light source is arranged in a region where the sample can be irradiated with light without passing through the transmission film. The X-ray analysis apparatus according to claim 1, further comprising a light shielding unit that shields light emitted from the light source between the light source and the transmission film. A frame provided with the permeable membrane;
The frame has holes formed around the permeable membrane,
The X-ray analysis apparatus according to claim 1, wherein the light source is disposed in the hole.

Images