JP2004085931A5 - - Google Patents

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Publication number
JP2004085931A5
JP2004085931A5 JP2002247337A JP2002247337A JP2004085931A5 JP 2004085931 A5 JP2004085931 A5 JP 2004085931A5 JP 2002247337 A JP2002247337 A JP 2002247337A JP 2002247337 A JP2002247337 A JP 2002247337A JP 2004085931 A5 JP2004085931 A5 JP 2004085931A5
Authority
JP
Japan
Prior art keywords
group
alicyclic hydrocarbon
hydrocarbon group
linear
carbon atoms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002247337A
Other languages
English (en)
Japanese (ja)
Other versions
JP4031323B2 (ja
JP2004085931A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002247337A priority Critical patent/JP4031323B2/ja
Priority claimed from JP2002247337A external-priority patent/JP4031323B2/ja
Publication of JP2004085931A publication Critical patent/JP2004085931A/ja
Publication of JP2004085931A5 publication Critical patent/JP2004085931A5/ja
Application granted granted Critical
Publication of JP4031323B2 publication Critical patent/JP4031323B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2002247337A 2002-08-27 2002-08-27 ポジ型レジスト組成物 Expired - Lifetime JP4031323B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002247337A JP4031323B2 (ja) 2002-08-27 2002-08-27 ポジ型レジスト組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002247337A JP4031323B2 (ja) 2002-08-27 2002-08-27 ポジ型レジスト組成物

Publications (3)

Publication Number Publication Date
JP2004085931A JP2004085931A (ja) 2004-03-18
JP2004085931A5 true JP2004085931A5 (enExample) 2005-09-22
JP4031323B2 JP4031323B2 (ja) 2008-01-09

Family

ID=32055014

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002247337A Expired - Lifetime JP4031323B2 (ja) 2002-08-27 2002-08-27 ポジ型レジスト組成物

Country Status (1)

Country Link
JP (1) JP4031323B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010237313A (ja) * 2009-03-30 2010-10-21 Jsr Corp 感放射線性樹脂組成物
US10377692B2 (en) 2009-09-09 2019-08-13 Sumitomo Chemical Company, Limited Photoresist composition
JP5747456B2 (ja) * 2009-09-09 2015-07-15 住友化学株式会社 レジスト組成物
US9229321B2 (en) * 2013-12-13 2016-01-05 Sumitomo Chemical Company, Limited Salt and photoresist composition comprising the same

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