JP2004085931A5 - - Google Patents
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- Publication number
- JP2004085931A5 JP2004085931A5 JP2002247337A JP2002247337A JP2004085931A5 JP 2004085931 A5 JP2004085931 A5 JP 2004085931A5 JP 2002247337 A JP2002247337 A JP 2002247337A JP 2002247337 A JP2002247337 A JP 2002247337A JP 2004085931 A5 JP2004085931 A5 JP 2004085931A5
- Authority
- JP
- Japan
- Prior art keywords
- group
- alicyclic hydrocarbon
- hydrocarbon group
- linear
- carbon atoms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000002723 alicyclic group Chemical group 0.000 claims 7
- 125000004432 carbon atom Chemical group C* 0.000 claims 5
- 125000000217 alkyl group Chemical group 0.000 claims 4
- 150000001875 compounds Chemical class 0.000 claims 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims 2
- 239000004215 Carbon black (E152) Substances 0.000 claims 1
- 239000002253 acid Substances 0.000 claims 1
- -1 alicyclic hydrocarbon Chemical class 0.000 claims 1
- 239000003513 alkali Substances 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 125000000753 cycloalkyl group Chemical group 0.000 claims 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims 1
- 229930195733 hydrocarbon Natural products 0.000 claims 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims 1
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 claims 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 claims 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims 1
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims 1
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 claims 1
- 230000005855 radiation Effects 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002247337A JP4031323B2 (ja) | 2002-08-27 | 2002-08-27 | ポジ型レジスト組成物 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002247337A JP4031323B2 (ja) | 2002-08-27 | 2002-08-27 | ポジ型レジスト組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004085931A JP2004085931A (ja) | 2004-03-18 |
| JP2004085931A5 true JP2004085931A5 (enExample) | 2005-09-22 |
| JP4031323B2 JP4031323B2 (ja) | 2008-01-09 |
Family
ID=32055014
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002247337A Expired - Lifetime JP4031323B2 (ja) | 2002-08-27 | 2002-08-27 | ポジ型レジスト組成物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4031323B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010237313A (ja) * | 2009-03-30 | 2010-10-21 | Jsr Corp | 感放射線性樹脂組成物 |
| US10377692B2 (en) | 2009-09-09 | 2019-08-13 | Sumitomo Chemical Company, Limited | Photoresist composition |
| JP5747456B2 (ja) * | 2009-09-09 | 2015-07-15 | 住友化学株式会社 | レジスト組成物 |
| US9229321B2 (en) * | 2013-12-13 | 2016-01-05 | Sumitomo Chemical Company, Limited | Salt and photoresist composition comprising the same |
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2002
- 2002-08-27 JP JP2002247337A patent/JP4031323B2/ja not_active Expired - Lifetime