JP2004083308A - Method for producing quartz-based glass product - Google Patents

Method for producing quartz-based glass product Download PDF

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Publication number
JP2004083308A
JP2004083308A JP2002243865A JP2002243865A JP2004083308A JP 2004083308 A JP2004083308 A JP 2004083308A JP 2002243865 A JP2002243865 A JP 2002243865A JP 2002243865 A JP2002243865 A JP 2002243865A JP 2004083308 A JP2004083308 A JP 2004083308A
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Japan
Prior art keywords
glass product
quartz
glass
producing
press
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Pending
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JP2002243865A
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Japanese (ja)
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JP2004083308A5 (en
Inventor
Akio Koike
小池　章夫
Naoki Sugimoto
杉本　直樹
Hiroshi Wakatsuki
若月　博
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AGC Inc
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Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to JP2002243865A priority Critical patent/JP2004083308A/en
Publication of JP2004083308A publication Critical patent/JP2004083308A/en
Publication of JP2004083308A5 publication Critical patent/JP2004083308A5/ja
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06—Construction of plunger or mould
    • C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
    • C03B11/082—Construction of plunger or mould for making solid articles, e.g. lenses having profiled, patterned or microstructured surfaces
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06—Construction of plunger or mould
    • C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
    • C03B11/084—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/12—Cooling, heating, or insulating the plunger, the mould, or the glass-pressing machine; cooling or heating of the glass in the mould
    • C03B11/122—Heating
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/08—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant
    • C03B2201/12—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant doped with fluorine
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/02—Press-mould materials
    • C03B2215/05—Press-mould die materials
    • C03B2215/07—Ceramic or cermets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/02—Press-mould materials
    • C03B2215/08—Coated press-mould dies
    • C03B2215/14—Die top coat materials, e.g. materials for the glass-contacting layers
    • C03B2215/24—Carbon, e.g. diamond, graphite, amorphous carbon
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/40—Product characteristics
    • C03B2215/41—Profiled surfaces
    • C03B2215/413—Profiled surfaces optical fibre alignment, fixing or connecting members having V-grooves
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/06—Doped silica-based glasses
    • C03C2201/08—Doped silica-based glasses containing boron or halide
    • C03C2201/12—Doped silica-based glasses containing boron or halide containing fluorine

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Glass Compositions (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for producing a quartz-based glass product without needing any grinding. <P>SOLUTION: In the method for producing a quartz-based glass product, glass essentially consisting of, by mass, 90 to 98.8% SiO<SB>2</SB>and 1.2 to 10% F is held at a temperature at which its viscosity reaches 10<SP>5</SP>to 10<SP>12.5</SP>poise, and is subjected to press forming. A press mold used in the press forming preferably consists of glassy carbon, SiC or Si<SB>3</SB>O<SB>4</SB>. <P>COPYRIGHT: (C)2004,JPO

Description

【０００１】
【発明の属する技術分野】
本発明は石英系ガラス製品の製造方法に関する。
【０００２】
【従来の技術】
石英系ガラスは、近紫外域から近赤外域までの広範囲の波長域にわたって透明である、膨張係数がきわめて小さい、等の特徴を有し、レンズ、Ｖ溝基板、等のガラス製品に広く用いられている。
このような石英系ガラス製品は従来、石英系ガラス素材を研削・研磨加工して、または石英系ガラス素材を加熱後プレス成形して概略製品形状とした後研磨加工して製造されていた。
【０００３】
【発明が解決しようとする課題】
従来の石英系ガラス製品の製造方法においては最終製品とするために最後に研磨されることが多く、製造工程が多いという問題があった。
本発明は、このような研磨を行なうことなく石英系ガラス製品を製造できる方法の提供を目的とする。
【０００４】
【課題を解決するための手段】
本発明は、質量百分率表示で、ＳｉＯ２　９０〜９８．８％、Ｆ　１．２〜１０％、から本質的になるガラスをその粘度が１０５〜１０１２．５ポアズとなる温度に保持してプレス成形することを特徴とする石英系ガラス製品の製造方法を提供する。
【０００５】
【発明の実施の形態】
以下、ガラス中の各成分の含有量は質量百分率表示で示す。
本発明においてはＳｉＯ２を９０〜９８．８％含有するガラス製品を石英系ガラス製品という。
また、ＳｉＯ２　９０〜９８．８％、Ｆ　１．２〜１０％、から本質的になるガラスを本発明のガラスという。
【０００６】
本発明のガラスにおいて、Ｆは粘度を低下させ後述するプレス成形を可能とするための成分であり必須である。Ｆが１．２％未満では粘度の低下が不充分になる。好ましくは１．４％以上である。１０％超では化学的耐久性が低下する。好ましくは８％以下であることが好ましい。
【０００７】
本発明のガラスは本質的にＳｉＯ２およびＦからなるが、その他の成分を本発明の目的を損なわない範囲で含有してもよい。
前記その他成分として、たとえばＢ２Ｏ３、Ｐ２Ｏ５、ＴｉＯ２、Ａｌ２Ｏ３、Ｇｅ２Ｏ３、希土類金属酸化物等が挙げられるが、これらその他成分の含有量の合計は８％以下であることが好ましい。より好ましくは５％以下、特に好ましくは２％以下、最も好ましくは０．２％以下である。
【０００８】
本発明のガラスはその粘度が１０５〜１０１２．５ポアズとなる温度に保持してプレス成形される。プレス成形する温度が１０５ポアズとなる温度よりも高いと、たとえば１５００℃以上の高温に保持してプレス成形しなければならなくなり、プレス型の繰り返し使用が困難になる。好ましくは１０７ポアズとなる温度以下、より好ましくは１０８ポアズとなる温度以下である。１０１２．５ポアズとなる温度よりも低いとプレス成形時にガラスが割れやすくなる。好ましくは１０１２ポアズとなる温度以上、より好ましくは１０１０ポアズとなる温度以上である。
【０００９】
プレス成形は典型的には、圧力１〜５０ＭＰａ、加圧時間１０〜３００秒の条件で行なわれる。
【００１０】
プレス成形するときに使用されるプレス型は、プレス成形時に変形せず、またガラスと反応しないものからなる。このようなものとして、グラッシーカーボン等のカーボン、ＳｉＣ、Ｓｉ３Ｎ４、ＢＮ、ＷＣ、ＴｉＮ、ＴｉＣ等が例示されるが、グラッシーカーボン、ＳｉＣまたはＳｉ３Ｎ４からなることが好ましい。なお、本発明においてたとえばプレス型がグラッシーカーボンからなるとは、ガラスと接するプレス型表面がグラッシーカーボンからなることをいい、たとえばプレス型全体がグラッシーカーボンからなる場合はこれに相当する。
【００１１】
本発明の方法によって光学レンズを製造する場合、たとえば次のようにして製造される。すなわち、直径１０ｍｍの棒状の本発明のガラスを所望の質量となるように切断して円柱状ガラス（高さは典型的には１０ｍｍ）とする。この円柱状ガラスをプリフォームとし、グラッシーカーボン製プレス型を用いて所望の形状の石英系光学レンズを製造する。
前記光学レンズは波長が４５０〜１７００ｎｍの光に対して好適である。
【００１２】
本発明の方法によってＶ溝基板を製造する場合、たとえば次のようにして製造される。すなわち、直径５０ｍｍの棒状の本発明のガラスを所望の質量となるように切断して円柱状ガラス（高さは典型的には１ｍｍ）とする。この円柱状ガラスをプリフォームとし、グラッシーカーボン製プレス型を用いて所望の形状の石英系Ｖ溝基板を製造する。
【００１３】
通常は６〜１５個の石英系Ｖ溝基板が１回のプレス成形で製造され、その後これら複数の石英系Ｖ溝基板は切り離されて最終製品の石英系Ｖ溝基板とされる。前記最終製品の石英系Ｖ溝基板の典型的な形状は、厚みが１ｍｍ、大きさが５ｍｍ×５ｍｍ、Ｖ溝が３〜６４本である。
【００１４】
【実施例】
ＳｉＯ２　９８．８％、Ｆ　１．２％からなり、直径３０ｍｍ、厚み１ｍｍの円柱状ガラスをプリフォームとし、グラッシーカーボン製Ｖ溝基板用プレス型を用いてプレス温度１４００℃、プレス圧力２５ＭＰａ、プレス時間１２０秒の条件でプレス成形して、厚みが１ｍｍ、大きさが５ｍｍ×５ｍｍ、Ｖ溝が８本のＶ溝基板６個を作製した。これら石英系Ｖ溝基板のいずれにも割れは認められなかった。
【００１５】
比較のために、円柱状ガラスがＳｉＯ２　９９．９％、Ｆ　０．１％からなる以外は上記Ｖ溝基板作製方法と同様にしてＶ溝基板を作製しようとしたが、プレス圧力印加時に円柱状ガラスに割れが発生しＶ溝基板を作製することはできなかった。
【００１６】
【発明の効果】
本発明によれば研磨を行なうことなく石英系ガラス製品を製造することができる。[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for producing a quartz glass product.
[0002]
[Prior art]
Quartz glass has characteristics such as being transparent over a wide wavelength range from the near ultraviolet region to the near infrared region, and having an extremely small expansion coefficient, and is widely used for glass products such as lenses and V-groove substrates. ing.
Conventionally, such a quartz glass product has been manufactured by grinding and polishing a quartz glass material, or by heating and pressing a quartz glass material to obtain an approximate product shape, followed by polishing.
[0003]
[Problems to be solved by the invention]
In the conventional method for producing a silica-based glass product, there is a problem that it is often polished at the end in order to obtain a final product, and there are many production steps.
An object of this invention is to provide the method of manufacturing a quartz type glass product, without performing such grinding | polishing.
[0004]
[Means for Solving the Problems]
In the present invention, the glass consisting essentially of SiO 2 90-98.8% and F 1.2-10% is maintained at a temperature at which the viscosity is 10 5 -10 12.5 poises in terms of mass percentage. And a method for producing a silica-based glass product, characterized by being press-molded.
[0005]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the content of each component in the glass is indicated by mass percentage.
In the present invention, a glass product containing 90 to 98.8% of SiO 2 is referred to as a quartz glass product.
Further, SiO 2 90~98.8%, F 1.2~10 %, the glass consisting essentially of glass of the present invention from.
[0006]
In the glass of the present invention, F is a component for lowering the viscosity and enabling press molding described later, and is essential. When F is less than 1.2%, the viscosity is not sufficiently lowered. Preferably it is 1.4% or more. If it exceeds 10%, the chemical durability is lowered. Preferably it is 8% or less.
[0007]
The glass of the present invention consists essentially of SiO 2 and F, but may contain other components as long as the object of the present invention is not impaired.
Examples of the other components include B 2 O 3 , P 2 O 5 , TiO 2 , Al 2 O 3 , Ge 2 O 3 , and rare earth metal oxides. The total content of these other components is 8%. The following is preferable. More preferably, it is 5% or less, particularly preferably 2% or less, and most preferably 0.2% or less.
[0008]
The glass of the present invention is press-molded while maintaining the viscosity of 10 5 to 10 12.5 poise. If the temperature at which press molding is performed is higher than the temperature at which 10 5 poise is reached, for example, it is necessary to perform press molding while maintaining a high temperature of 1500 ° C. or more, and it becomes difficult to repeatedly use the press die. The temperature is preferably 10 7 poise or less, more preferably 10 8 poise or less. If the temperature is lower than 10 12.5 poise, the glass tends to break during press molding. The temperature is preferably at least 10 12 poise, more preferably at least 10 10 poise.
[0009]
The press molding is typically performed under conditions of a pressure of 1 to 50 MPa and a pressing time of 10 to 300 seconds.
[0010]
A press die used for press molding is made of a material that does not deform during press molding and does not react with glass. Examples of such materials include carbon such as glassy carbon, SiC, Si 3 N 4 , BN, WC, TiN, TiC, and the like, but it is preferably made of glassy carbon, SiC, or Si 3 N 4 . In the present invention, for example, that the press die is made of glassy carbon means that the surface of the press die in contact with glass is made of glassy carbon, and this corresponds to the case where the entire press die is made of glassy carbon, for example.
[0011]
When an optical lens is manufactured by the method of the present invention, for example, it is manufactured as follows. That is, the rod-shaped glass of the present invention having a diameter of 10 mm is cut to have a desired mass to obtain cylindrical glass (height is typically 10 mm). Using this cylindrical glass as a preform, a quartz optical lens having a desired shape is manufactured using a glassy carbon press mold.
The optical lens is suitable for light having a wavelength of 450 to 1700 nm.
[0012]
When a V-groove substrate is manufactured by the method of the present invention, for example, it is manufactured as follows. That is, a rod-shaped glass of the present invention having a diameter of 50 mm is cut to a desired mass to obtain a cylindrical glass (height is typically 1 mm). Using this cylindrical glass as a preform, a quartz-based V-groove substrate having a desired shape is manufactured using a glassy carbon press die.
[0013]
Normally, 6 to 15 quartz-based V-groove substrates are manufactured by one press molding, and thereafter, the plurality of quartz-based V-groove substrates are separated to form the final quartz-based V-groove substrate. A typical shape of the quartz-based V-groove substrate of the final product has a thickness of 1 mm, a size of 5 mm × 5 mm, and 3 to 64 V-grooves.
[0014]
【Example】
A cylindrical glass having a diameter of 30 mm and a thickness of 1 mm made of SiO 2 98.8% and F 1.2% was used as a preform, and a press temperature of 1400 ° C., a press pressure of 25 MPa was used using a glassy carbon V-groove substrate press die. Six V-groove substrates having a thickness of 1 mm, a size of 5 mm × 5 mm, and eight V-grooves were formed by press molding under a press time of 120 seconds. No cracks were observed in any of these quartz-based V-groove substrates.
[0015]
For comparison, an attempt was made to produce a V-groove substrate in the same manner as the V-groove substrate production method except that the columnar glass was composed of 99.9% SiO 2 and 0.1% F. A crack was generated in the columnar glass, and a V-groove substrate could not be produced.
[0016]
【The invention's effect】
According to the present invention, a quartz glass product can be produced without polishing.

Claims (4)

質量百分率表示で、ＳｉＯ２　９０〜９８．８％、Ｆ　１．２〜１０％、から本質的になるガラスをその粘度が１０５〜１０１２．５ポアズとなる温度に保持してプレス成形することを特徴とする石英系ガラス製品の製造方法。Represented by mass percentage, SiO 2 90~98.8%, F 1.2~10 %, press-molded to hold the glass consisting essentially of a temperature at which its viscosity is 105 to 12.5 poise from A method for producing a quartz-based glass product. プレス成形するときに使用されるプレス型が、グラッシーカーボン、ＳｉＣまたはＳｉ３Ｏ４からなることを特徴とする請求項１に記載の石英系ガラス製品の製造方法。The method for producing a silica-based glass product according to claim 1, wherein a press die used for press molding is made of glassy carbon, SiC or Si 3 O 4 . 石英系ガラス製品が光学レンズである請求項１または２に記載の石英系ガラス製品の製造方法。The method for producing a quartz glass product according to claim 1 or 2, wherein the quartz glass product is an optical lens. 石英系ガラス製品がＶ溝基板である請求項１または２に記載の石英系ガラス製品の製造方法。The method for producing a quartz glass product according to claim 1 or 2, wherein the quartz glass product is a V-groove substrate.
JP2002243865A 2002-08-23 2002-08-23 Method for producing quartz-based glass product Pending JP2004083308A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002243865A JP2004083308A (en) 2002-08-23 2002-08-23 Method for producing quartz-based glass product

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Application Number Priority Date Filing Date Title
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JP2004083308A true JP2004083308A (en) 2004-03-18
JP2004083308A5 JP2004083308A5 (en) 2005-11-04

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008053545A (en) * 2006-08-25 2008-03-06 Nichia Chem Ind Ltd Light emitting device, and its manufacturing method
JP2008060428A (en) * 2006-08-31 2008-03-13 Nichia Chem Ind Ltd Light emitting device and its manufacturing method
US9027365B2 (en) 2013-01-08 2015-05-12 Heraeus Quartz America Llc System and method for forming fused quartz glass

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008053545A (en) * 2006-08-25 2008-03-06 Nichia Chem Ind Ltd Light emitting device, and its manufacturing method
JP2008060428A (en) * 2006-08-31 2008-03-13 Nichia Chem Ind Ltd Light emitting device and its manufacturing method
JP4650378B2 (en) * 2006-08-31 2011-03-16 日亜化学工業株式会社 Method for manufacturing light emitting device
US9027365B2 (en) 2013-01-08 2015-05-12 Heraeus Quartz America Llc System and method for forming fused quartz glass

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