JP2004074359A - X-y table - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an X-Y table that is smoothly driven and correctly positioned, prevents wiring trouble, and has a large movable range. <P>SOLUTION: The X-Y table is provided with a base plate 1, a first movable member 2 on which the base plate 1 is movable in Y-direction, an X-direction fixing member 4 on which the first movable member 2 is movable in X-direction, a connection member 6 fixed to the base plate 1, a second movable member 8 engaged with a lower end part of the connection member 6, on which the connection member 6 is provided to be movable in the X-direction, and a Y-direction fixing member 9 on which the second movable member 8 is placed to be movable in the Y-direction. The X-direction fixing member 4 and the Y-direction fixing member 9 are fixed to a device main body. The base plate 1 is movable in the X-direction and the Y-direction without the load of the Y-direction fixing member 9 on the X-direction fixing member 4. It is thus smoothly moved and correctly positioned. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an XY table used for positioning a placed object by moving in two orthogonal directions.
[0002]
[Prior art]
Conventionally, an XY table used for accurately positioning a placed object has the following structure. First, the base plate on which the object is placed is placed on a linear guide provided on the first moving mechanism so as to be movable in one direction, for example, the X direction. . The first moving mechanism on which the base plate is mounted is provided on the second moving mechanism so as to be movable in another direction orthogonal to the above-described one direction, for example, in the Y direction. It is placed on a linear guide. With this structure, the base plate can move in both directions of the X direction and the Y direction, so that arbitrary positioning is possible within the movement range.
[0003]
[Problems to be solved by the invention]
However, according to the above-described conventional XY table, the following problem may occur. In recent years, depending on the technical field, a large moving range is required for the XY table. For example, for an XY table used in the manufacture of electronic components, the diameter of a silicon wafer (silicon substrate) has to be increased, the number of printed boards or ceramic substrates on which semiconductor chips are mounted has to be increased, and the size has to be increased. The trend is remarkable. Therefore, various processes such as inspection, exposure, and cutting of a silicon substrate, a bonding process of a semiconductor chip to a printed board, and the like, and further, an inspection process after resin-sealing the semiconductor chip to a printed board, a cutting process, and the like, A large moving range is required for the XY table.
[0004]
As a result, the first moving mechanism for moving the base plate in the X direction and the second moving mechanism on which the first moving mechanism is mounted and moves it in the Y direction are also increased in size and weight. I have. Therefore, when the load of the first moving mechanism mounted on the second moving mechanism is applied to the second moving mechanism, minute mechanisms such as a ball screw and the like constituting the second moving mechanism are generated. Since deformation such as bending occurs, smooth movement and accurate positioning of the base plate may be hindered.
Further, in the first moving mechanism located on the upper side, the length of the wiring route to the motor or the like and the moving distance of the wiring increase, so that a trouble such as disconnection may occur.
[0005]
The present invention has been made to solve the above-described problems, and is an XY table having a large moving range, capable of performing smooth driving and accurate positioning, and preventing wiring trouble. An object of the present invention is to provide an XY table that can be used.
[0006]
[Means for Solving the Problems]
In order to solve the above-mentioned technical problem, an XY table according to the present invention is mounted on an apparatus main body and moves a base plate in an X direction and a Y direction orthogonal to the X direction within a certain plane. A first moving member mounted so that the base plate is movable in the Y direction, and a first moving member fixed to the apparatus main body so that the first moving member is movable in the X direction. An X-direction fixing member mounted thereon, a connecting member integrally provided on the base plate, and engaged with the connecting member, and the base plate and the first moving member are engaged via the connecting member. A second moving member provided so as to be movable in the X direction, and a Y direction fixed to the apparatus main body and mounted so as to be movable in the Y direction. Moving the first fixing member and the first moving member in the X direction. An X-direction moving mechanism and a Y-direction moving mechanism for moving the second moving member in the Y direction are provided, and the first moving member can move in the X direction with the base plate mounted thereon, and The second moving member is capable of moving in the Y direction while being engaged with the connecting member.
[0007]
According to this, the base plate and the connecting member provided integrally move in the Y direction as follows. That is, while moving on the first moving member, it moves on the Y-direction fixed member via the second moving member engaged with the connecting member. Further, the base plate and the connecting member move in the X direction as follows. That is, it moves on the X-direction fixing member via the first moving member, and moves along the second moving member engaged with the connecting member. Further, both the X-direction fixing member and the Y-direction fixing member are fixed to the apparatus main body. Therefore, the Y-direction fixing member located below the X-direction fixing member does not receive the load of the X-direction fixing member, and the base plate can move in both directions of the X direction and the Y direction. .
[0008]
Further, in the resin molding apparatus according to the present invention, in the above-described XY table, a part of the load of the base plate, the connecting member, and the first moving member is applied to the X-direction fixing member, and the base plate and the connecting member are connected. The remaining portion of the load between the first moving member and the second moving member and the load of the second moving member are applied to the Y-direction fixing member.
[0009]
According to this, the loads of the base plate, the connecting member, and the first moving member are distributed and applied to the X-direction fixing member and the Y-direction fixing member. Thereby, the load applied to the Y-direction fixing member located below the X-direction fixing member is reduced, so that the Y-direction fixing member is less likely to be minutely deformed. Therefore, in both the X direction and the Y direction, the base plate moves smoothly and is accurately positioned.
[0010]
An XY table according to the present invention is characterized in that, in the above-described XY table, a substrate for an electronic component is placed on a base plate.
[0011]
According to this, in the process of performing processing, mounting, and the like on the electronic component substrate, the base plate on which the substrate is placed moves smoothly and is accurately positioned.
[0012]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, an XY table according to the present invention will be described with reference to FIG. FIG. 1 is a perspective view showing the structure of the XY table according to the present invention. Here, the case where the XY table is mounted on the bonding apparatus will be described as an example. In this case, a board for electronic components is placed on the XY table, and the board is moved and positioned in the X direction on the horizontal plane and the Y direction orthogonal to the X direction on the horizontal plane.
[0013]
In FIGS. 1 and 2A and 2B, a base plate 1 on which a substrate for an electronic component is mounted is movable in a Y direction on a linear motion guide 3 of a first moving member 2. It is provided in. The first moving member 2 is provided movably in the X direction on a linear motion guide 5 of an X-direction fixing member 4 fixed to the apparatus main body. The connecting member 6 fixed to the side surface of the base plate 1 extends downward through an opening 7 provided in the bottom plate of the first moving member 2. The lower end of the connecting member 6 is engaged with a linear motion guide (not shown) provided at the rising portion of the second moving member 8 having an L-shape, and the second member is connected to the second moving member 8. It is provided movably in the X direction along the moving member 8. Therefore, the base plate 1 and the connecting member 6 provided integrally move on the linear motion guide 5 of the X-direction fixing member 4 via the first moving member 2 in the X direction, and are connected. The movable member 8 can move along a linear guide (not shown) of the second moving member 8 which engages with the member 6.
[0014]
The second moving member 8 is provided movably in the Y direction on a linear motion guide 10 of a Y-direction fixing member 9 fixed to the apparatus main body. Therefore, the base plate 1 and the connecting member 6 provided integrally move on the translation guide 3 of the first moving member 2 in the Y direction, and engage with the connecting member 6 in the second direction. Can be moved on the linear motion guide 10 of the Y-direction fixing member 9 via the moving member 8.
[0015]
The servo motor 11 is a drive source that is attached to the X-direction fixing member 4 and moves the first moving member 2 in the X direction via a ball screw 12 and a block (not shown). The linear motion guide 5, the servo motor 11, and the ball screw 12 together form an X-direction moving mechanism 13.
Similarly, the servo motor 14 is a drive source that is attached to the Y-direction fixing member 9 and moves the second moving member 8 in the Y direction via the ball screw 15 and a block (not shown). The linear motion guide 10, the servomotor 14, and the ball screw 15 together form a Y-direction moving mechanism 16.
[0016]
Here, the X-direction fixing member 4 and the Y-direction fixing member 9 are fixed independently or via a frame to an apparatus main body in which the XY table is used. Accordingly, the base plate 1 moves in both directions of the X direction and the Y direction without the Y direction fixing member 9 located below the X direction fixing member 4 receiving the load of the X direction fixing member 4. be able to. The electronic component substrate (not shown) placed on the base plate 1 moves smoothly in both the X direction and the Y direction and is accurately positioned. Therefore, even when a large substrate is used in flip-chip bonding that requires accurate positioning, smooth movement and accurate positioning can be performed over a wide moving range.
[0017]
As described above, according to the XY table according to the present invention, the base plate 1 can be moved in both the X direction and the Y direction without the Y direction fixing member 9 receiving the load of the X direction fixing member 4. Moving. As a result, for example, even in an XY table having a large moving distance exceeding 200 mm, deformation such as minute bending of the ball screw 15 or the like in the Y-direction fixing member 9 is less likely to occur. Therefore, the base plate 1 moves smoothly in both the X direction and the Y direction, particularly without any deflection in the Z direction (the direction orthogonal to the plane formed by the X direction and the Y direction). Further, the base plate 1 is accurately positioned in both the X direction and the Y direction without causing a shake in the Z direction.
[0018]
Further, since the X-direction fixing member 4 and the Y-direction fixing member 9 to which the servomotors 11 and 14 are respectively attached are fixed to the apparatus main body, the wiring to the servomotors 11 and 14 may move. Disappears. Therefore, occurrence of troubles such as disconnection is prevented, and a cable carrier for storing a cable having a length corresponding to the moving range is not required.
Further, since the load on the Y-direction fixing member 9 is reduced, a low-capacity, low-torque motor can be used as the servomotor 14.
[0019]
In the above description, the X direction and the Y direction on the horizontal plane have been described. However, the present invention is not limited to this, and the present invention can be applied if the X direction and the Y direction are orthogonal.
[0020]
Further, the XY table according to the present invention can be used in combination with a movement mechanism in the Z direction and a rotation mechanism in the θ direction that rotates on a plane formed by the X direction and the Y direction.
[0021]
Although the connecting member 6 is a member separate from the base plate 1, the connecting member 6 may be integral with the base plate 1. Further, although the flat plate-shaped connecting member 6 is fixed to the side surface of the base plate 1, the connecting member 6 may be formed in an inverted L-shape and the upper portion thereof may be fixed to the lower surface of the base plate 1. Furthermore, even in other configurations, the base plate 1 and the connecting member 6 may be provided integrally.
[0022]
In addition, the base plate 1 on which the electronic component substrate is mounted has been described. The substrate here includes a semiconductor substrate such as a silicon substrate, a printed substrate or a ceramic substrate on which a semiconductor chip is mounted, and a printed substrate or a ceramic substrate after the semiconductor chip is sealed with a resin. In addition, the present invention can be similarly applied to a base plate on which a workpiece such as a workpiece is mounted other than such a substrate.
[0023]
In addition, as a process in which the XY table according to the present invention is used, each process such as inspection, exposure, cutting, die bonding, and flip chip bonding for a substrate for an electronic component can be considered. In addition, each step of cutting, cutting, opening, and the like for the workpiece can be considered.
[0024]
In addition, the present invention is not limited to the above-described embodiment, and can be arbitrarily and appropriately changed and selected as needed without departing from the spirit of the present invention.
[0025]
【The invention's effect】
According to the present invention, the base plate moves in both the X direction and the Y direction without the Y-direction fixing member located below the X-direction fixing member receiving the load of the X-direction fixing member. Therefore, since the minute deformation is less likely to occur in the Y direction fixing member, the base plate moves smoothly and is accurately positioned in both the X direction and the Y direction. Further, since both the X-direction fixing member and the Y-direction fixing member are fixed, the wires used in these members do not move. Accordingly, since no load is applied to the wiring, the occurrence of disconnection or the like is prevented.
Therefore, the present invention has an excellent practical effect of providing an XY table capable of smooth driving and accurate positioning and capable of preventing wiring trouble.
[Brief description of the drawings]
FIG. 1 is a perspective view showing the structure of an XY table according to the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Base plate 2 1st moving member 3,5,10 Linear motion guide 4 X direction fixing member 6 Connecting member 7 Opening 8 2nd moving member 9 Y direction fixing member 11,14 Servo motor 12,15 Ball Screw 13 X direction moving mechanism 16 Y direction moving mechanism

Claims (3)

An XY table mounted on the apparatus main body and configured to move a base plate in an X direction and a Y direction orthogonal to the X direction within a certain plane,
A first moving member mounted so that the base plate is movable in the Y direction;
An X-direction fixing member fixed to the apparatus main body and mounted so that the first moving member is movable in the X direction;
A connecting member integrally provided on the base plate,
A second moving member which is engaged with the connecting member, and is provided so that the base plate and the first moving member are movable in the X direction via the connecting member; ,
A Y-direction fixing member fixed to the apparatus main body and mounted so that the second moving member is movable in the Y direction;
An X-direction moving mechanism that moves the first moving member in the X direction;
A Y-direction moving mechanism for moving the second moving member in the Y-direction,
The first moving member can move in the X direction with the base plate mounted thereon, and the second moving member moves in the Y direction while engaging with the connecting member. An XY table, wherein the XY table can be used. The XY table according to claim 1,
A part of the load of the base plate, the connecting member, and the first moving member is applied to the X-direction fixing member,
An XY table, wherein the remaining portion of the load of the base plate, the connecting member, and the first moving member and the load of the second moving member are applied to the Y-direction fixing member. The XY table according to claim 1 or 2,
An XY table, wherein a substrate for an electronic component is mounted on the base plate.

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