JP2004071484A - Corpuscular beam apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent a drop of a sample holder in transferring it, and to easily attach and detach the sample holder to/from a sample changing rod. <P>SOLUTION: According to this application, in order to accomplish the purpose, a holding member using spring force like a banana chip is attached to the sample changing rod, and inserted into a hole of the sample holder to elastically hold it. The spring force is set to a level allowing the sample holder to be detached from the holding member (sample changing rod) when attached to a sample stage. By virtue of this structure, the drop of the sample holder in transferring it is effectively prevented, and the sample holder can easily be attached and detached to/from the sample changing rod. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a particle beam device, and more particularly to a sample exchange device for a particle beam device.
[0002]
[Prior art]
FIG. 1 shows an outline of a conventional scanning electron microscope (SEM) and a sample stage, and FIG. 2 shows a sample exchange device. The scanning electron microscope irradiates the electron beam generated by the electron gun 1 while scanning the sample 5 in the sample chamber 4 through the condenser lens 2 and the objective lens 3, and detects secondary electrons coming out of the sample. The shape of the surface of the sample is observed with the instrument 6. A sample stage 7 is mounted on the sample chamber 4, an X table 9, a Y table 10, and an R portion 11 for rotating the sample 5 are mounted on a T base 8. The T base 8 is connected to a Z table 12, and the sample 5 is rotated. And the Z table 12 moves the sample in the vertical direction. The holder receiver 13 is attached to the R part 11, and the sample holder 14 is held by the holder receiver 13. The sample exchange chamber 15 is attached to the sample chamber 4 via a gate valve 16, and an exchange rod guide 17 is attached to an end surface of the sample exchange chamber 15, and an exchange rod 18 is axially movable and rotatable on the exchange rod guide 17. Mounted. The sample stage is provided with a holder receiver. Reference numerals 18 to 22 denote vacuum evacuation systems for evacuating the sample chamber 4, the sample exchange chamber 15, the electron gun chamber 22, and the like.
[0003]
FIG. 3 shows a state where the sample holder 14 is inserted and held in the holder receiver 13 of the sample stage 7. FIG. 4 is a view taken in the direction of arrows AA in FIG. Next, a sample exchange method will be described. When the sample 5 is mounted on the sample stage 7, the sample exchange chamber 15 is opened to the atmosphere, and the male thread 24 at the tip of the exchange rod is screwed into the female thread 23 provided on the sample holder 14 on which the sample 5 is placed. After the sample exchange chamber 15 is evacuated to a predetermined pressure, the gate valve 16 is opened, and the exchange rod 18 is pushed in to introduce the sample holder 14 into the sample chamber 4. Further, the exchange rod 18 is pushed in, and the sample holder is inserted into the holder receiver 13. The sample holder is pushed downward by the holding springs 25a and 25b, is pushed leftward by the holding spring 26, and is held in the holder receiver. The exchange rod 18 is removed from the female thread portion 23 of the sample holder 14, pulled back into the sample exchange chamber 15, and the gate valve 16 is closed. Thereafter, observation with an electron microscope is performed. When the sample 5 is taken out of the sample stage 7 after the observation is completed, the gate valve 16 is opened after the sample exchange chamber 15 has reached a predetermined pressure, and the exchange rod 18 is pushed into the sample chamber 4, and the male screw portion at the tip 24 is screwed into the female thread portion 23 of the sample holder 14, and the sample holder 14 is pulled back to the sample exchange chamber 15. The gate valve 16 is closed, the sample exchange chamber 15 is opened to the atmosphere, and the sample holder 14 is removed from the exchange rod 18.
[0004]
[Problems to be solved by the invention]
In the above-mentioned prior art, when the sample holder 14 is attached to and detached from the exchange rod 18, the exchange rod 18 has to be rotated many times, resulting in poor workability. Further, the female thread portion 23 of the sample holder 14 and the male thread portion 24 of the exchange rod 18 are damaged, so that the exchange rod 18 and the sample holder 14 cannot be detached from each other. The sample holder 14 was liable to be damaged. At this time, only a small amount of screwing could be performed, and the sample holder 14 sometimes dropped during transfer. Further, if the exchange rod 18 is not sufficiently screwed into the sample holder 14, the sample holder 14 is rotated during the transfer from the exchange chamber 15 and cannot be kept horizontal, and cannot be inserted into the holder receiver 13 or transferred to the sample exchange chamber 15. When the sample 5 is large, the sample 5 may be caught on the gate valve 16 and cannot be pulled back.
[0005]
[Means for Solving the Problems]
In the present invention, in order to solve the above problems, a sample exchange rod for exchanging a sample is constituted by an outer cylinder and a shaft, the shaft is rotatably disposed inside the outer cylinder, and a hook is attached to a tip of the shaft. The two elastic bodies are attached to the tip of the outer cylinder at a symmetrical position so as to sandwich the hook in the horizontal direction to form a holding mechanism for the sample holder. The sample holder is connected between the sample exchange chamber and the holder holder for the sample stage. During the transfer, the sample holder is held in the horizontal and vertical directions. A hook holder is attached to the sample holder, and a portion to be held by the elastic member is provided on both sides of the hook holder. The holding force of the sample holder holding mechanism provided on the outer cylinder during the transfer between the sample stage and the holder holder holding mechanism is set smaller than the holding force of the sample holder holding mechanism provided on the sample stage. When the axis of the sample exchange rod is rotated by a predetermined angle, the hook at the tip of the shaft and the holder of the sample holder overlap in the axial direction, and the hook hooks the holder and detaches the sample holder from the holder receiver. When the shaft is rotated by a predetermined angle in the opposite direction, the hook at the tip of the shaft does not overlap with the holder of the sample holder, and the sample exchange shaft can be pulled out from the sample holder. A particle beam apparatus characterized by the above feature.
[0006]
The replacement rod is composed of a replacement shaft and a replacement rod outer cylinder, and a hook is fixed to the tip of the replacement shaft. The replacement holder at the tip of the replacement rod outer cylinder is symmetrical so that two elastic bodies sandwich the hook in the horizontal direction The sample holder is provided with a hook and a portion on both sides thereof which is held by two elastic bodies of an exchange holder.
[0007]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 5 shows a first embodiment of the present invention. FIG. 6 is a plan view of FIG. The sample exchange rod 30 includes an outer cylinder 31 and a shaft 32. The outer cylinder 31 is axially movably inserted into an exchange rod holder 34 attached to the sample exchange chamber 33, and the shaft 32 is rotatably inserted into the outer cylinder 31. A vacuum seal between the sample exchange chamber 33 and the exchange rod holder 34 is performed by an O-ring 35, a vacuum seal between the exchange rod holder 34 and the outer cylinder 31 is performed by an O-ring 36, and a vacuum seal between the outer cylinder 31 and the shaft 32 is performed by an O-ring 37. Is A female screw is cut at the tip of the shaft 32, a hook 38 is screwed in, and the loosening is stopped with an adhesive. Two banana chips 39a and 39b are attached to the tip of the outer cylinder 31 at symmetrical positions so as to sandwich the hook 38 in the horizontal direction.
[0008]
The banana chip is widely used as an electric component that connects and disconnects an electric signal by being inserted into and removed from a socket, and has a configuration in which four plate-like springs are arranged around a mandrel. The rotation stopper 40 of the sample exchange rod 30 is fixed to the rear end of the outer cylinder 31, and a rotation stopper shaft 41 having one end fixed to the lower surface of the sample exchange chamber 33 is inserted into a hole provided at the lower part of the rotation stopper 40. Then, the rotation stopper 40 and the sample exchange rod 30 can move in the axial direction, and the rotation of the sample exchange rod 30 is restricted. A knob 42 is attached to the rear end of the shaft 32.
[0009]
FIG. 7 is a diagram showing the sample holder side of the first embodiment of the present invention. 8 is a side sectional view taken along the line BB in FIG. 7, and FIG. 12 is a view as viewed in the direction of the arrow C in FIG. A hook holder 44 is fixed to the sample holder 43, and banana chips 39a,
Two holes 45a and 45b into which 39b are inserted are provided.
[0010]
FIG. 9 is a diagram showing a positional relationship between the hook 38 and the hook receiver 44. When attaching the sample holder 43 to the sample stage, the sample exchange chamber is opened to the atmosphere, and the axis of the sample exchange rod 30 is rotated clockwise to bring the hook 38 into contact with the banana chip 39a (dashed line). In this state, the positional relationship is set so that the hook 38 and the hook receiver 44 do not overlap in the axial direction. In this state, the banana chips 39a and 39b are inserted into the holes 45a and 45b of the sample holder 43. The banana chips 39a and 39b are inserted until the tip of the hook 38 contacts the flat portion of the hook receiver 44.
[0011]
The sample exchange chamber 33 is lowered to a predetermined pressure, the gate valve is opened, the knob 42 is pushed, the sample holder 43 is introduced into the sample chamber, and further pushed to be inserted and held in the holder receiver 46. The holding of the sample holder 43 to the holder receiver 46 is performed by holding springs 47a, 47b, and 48. The sample holder 43 is pressed downward by the holding springs 47a and 47b, is pushed leftward by the holding spring 48, and is held in the holder receiver 46. Thereafter, the user pulls the knob 42 to pull out the banana chips 39a and 39b from the holes 45a and 45b of the sample holder. Then, the sample exchange rod 30 is pulled back to the sample exchange chamber 33, and the gate valve is closed. The diameters of the holes 45a, 45b of the sample holder 43 are set so that the holding force of the banana chips 39a, 39b on the sample holder 43 is smaller than the holding force of the pressing springs 47a, 47b, 48 on the sample holder 43. That is, the axial frictional force of the sample exchange rod 30 between the banana chips 39a, 39b and the holes 45a, 45b is the axial frictional force of the sample exchange rod 30 between the sample holder 43, the holder receiver 46, and the holding springs 47a, 47b, 48. When the banana chips 39a and 39b are pulled out from the holes 45a and 45b, the sample holder 43 remains on the sample stage while being held by the holder receiver 46.
[0012]
When the sample holder 43 is pulled back from the sample stage to the sample exchange chamber 33, the sample exchange chamber 33 is set to a predetermined pressure, the sample exchange axis is rotated clockwise, and the hook 38 (solid line) is brought into contact with the banana chip 39b. The gate valve is opened, the knob 42 is pushed, the sample exchange rod 30 is introduced into the sample chamber, and further pushed to insert the banana chips 39a, 39b into the holes 45a, 45b of the sample holder 43, and the tip of the hook 38 is received by the hook receiver. 44 to make contact with the flat part. The knob 42 is turned counterclockwise, and the hook 38 is rotated to contact the banana chip 39b (solid line).
[0013]
In this state, the positional relationship is set so that the hook 38 and the hook receiver 44 overlap in the axial direction. When the knob 42 is pulled, the hook 38 is hooked on the hook receiver 44, and further, the sample holder 43 is pulled out of the holder receiver 46 and pulled back to the sample exchange chamber 33. The gate valve is closed, the sample exchange chamber 33 is opened to the atmosphere, the knob 42 is rotated clockwise to bring the hook 38 into contact with the banana chip 39a, and the sample holder 43 is pulled out from the banana chips 39a and 39b.
[0014]
The holding force of the banana chips 39a and 39b with respect to the holes 45a and 45b of the sample holder 43 may be set to such an extent that the banana chips 39a and 39b do not come off during the transfer. That is, it is sufficient to apply a frictional force sufficient to prevent the sample holder 43 from falling off the banana chips 39a and 39b due to the outer tube 31 being inclined in the small gap between the outer tube 31 and the exchange shaft holder 34. For this reason, the work of attaching and detaching the sample holder 43 to and from the sample exchanging rod 30 in the sample exchanging chamber 33 opened to the atmosphere only requires inserting and removing the banana chips 39a and 39b into the holes 45a and 45b with a small force. The sample holder 43 can be easily attached to the rod 30, and the sample holder 43 can be easily removed from the sample exchange rod 30.
[0015]
When the sample holder 43 is transferred from the sample exchange chamber 33 to the holder receiver 46 of the sample stage, and is mounted, the sample exchange rod 30 is inserted into the sample holder 43 in the sample exchange chamber 33 and transported. Is inserted, the sample exchange rod 30 is pulled out in this state, and the sample exchange rod 30 can be pulled back to the sample exchange chamber 33, so that the work of attaching the sample holder 43 to the holder receiver 46 is simplified. When the sample holder 43 is pulled back from the holder receiver 46 to the sample exchange chamber 33, the shaft 32 may be slightly rotated to hook the hook 38 on the hook receiver 44 and then pulled back. Can be pulled back to the sample exchange chamber 33.
[0016]
When transferring the sample holder 43 from the sample exchange chamber 33 to the holder receiver 46 and from the holder receiver 46 to the sample exchange chamber 33, the holding force of the two banana chips 39a and 39b on the sample holder 43 causes the sample holder 43 to move. Stabilizes the posture, does not rattle and does not drop. Since the frictional force between the holes 45a, 45b of the sample holder 43 and the banana chips 39a, 39b may be small, the frictional force between the holding springs 47a, 47b, 48 for holding the sample holder 43 in the holder receiver 46 and the sample holder 43. And the difference can be made large. Therefore, when the sample holder 43 is inserted into the holder receiver 46 and the banana chips 39a and 39b are pulled out from the sample holder 43, the sample holder 43 can be securely held by the holder receiver 46 and left on the sample stage. Further, the frictional force between the banana chips 39a, 39b and the holes 45a, 45b may be small, and the pressing force of the banana chips 39a, 39b against the holes 45a, 45b can be set small, so that the banana chips 39a, 39b and the holes 45a, 45b. Wear is reduced and reliability is improved.
[0017]
FIG. 10 shows the tip of the sample exchange rod according to the second embodiment of the present invention, and FIG. 11 is a top view of FIG. FIG. 12 shows a sample holder according to a second embodiment of the present invention. Two curved leaf springs 51a and 51b are attached to the outer cylinder 50 at symmetrical positions so as to sandwich the hook 52 in the horizontal direction, and the sample holder 53 has a hook receiver 54 and leaf springs 51a and 51 on both sides thereof. Two square holes 55a and 55b into which 51b is inserted are provided. The leaf springs 51a and 51b hold the sample holder in the horizontal direction by gripping the vertical surfaces inside the square holes 55a and 55b, and vertically move between the upper ends of the leaf springs 51a and 51b and the upper surfaces of the square holes 55a and 55b. Hold. The mechanism for holding the holder receiver with respect to the sample holder 53 is the same as in the first embodiment. If the frictional force between the leaf springs 51a, 51b and the square holes 55a, 55b of the sample holder 53 and the frictional force of the sample holder, the sample receiving member, and the holding spring in the axial direction of the replacement rod are set to be the same as those in the first embodiment. , The effect is obtained.
[0018]
FIG. 13 shows a third embodiment of the present invention, in which the structure of the sample receiver 60 is different from the first and second embodiments. The sample receiver 60 includes an inclined portion 60a having two inclined surfaces on the upper portion and a lower shaft portion 60b. A leaf spring 61 is fixed to a lower end of the shaft portion 60b. Fixed to. A downward force acts on the slope 60 a by the leaf spring 61. At the lower part of the sample holder 64, there is provided a slope groove 64a inserted into the slope of the sample receiver. The distal end of the outer cylinder has the same configuration as in FIG. The sample holder 64 is provided with square grooves 65a and 65b for inserting the leaf springs 51a and 51b attached to the outer cylinder 50. The leaf springs 51a and 51b hold the vertical surfaces inside the square grooves 65a and 65b to hold the sample. The holder is held in the horizontal direction, and is held vertically by the upper ends of the leaf springs 51a and 51b and the upper surfaces of the square grooves 65a and 65b. The frictional force between the leaf springs 51a, 51b and the angular grooves 65a, 65b of the sample holder 64 is determined by using the exchange rod between the slope 64a of the sample holder 64, the slope 60a, the R portion 63 of the sample holder 60, and the bottom of the sample holder 64. If the frictional force is set smaller than the axial frictional force, the same functions and effects as those of the first embodiment can be obtained.
[0019]
The above embodiment relates to a sample exchange method for a scanning electron microscope, but can also be applied to other apparatuses using a particle beam, such as a focused ion beam apparatus having a sample exchange mechanism having a similar configuration.
[0020]
【The invention's effect】
In the particle beam apparatus according to the present invention, the frictional force of the holding mechanism of the sample exchange rod with respect to the sample holder can be reduced, so that the sample holder can be easily attached to and detached from the exchange rod, and the friction of the sample exchange rod with respect to the sample holder can be reduced. The difference between the force and the frictional force of the sample holder holding mechanism of the sample stage with respect to the sample holder can be made large, and the sample holder can be easily attached to the holder holder by the proper positional relationship between the sample exchange rod hook and the sample holder hook holder. In addition, it can be mounted and removed securely. In addition, the two holders horizontally arranged on the sample exchange rod stabilize the posture of the sample holder during transfer, effectively prevent the sample holder from falling off from the sample exchange rod, and improve the workability of sample exchange. Reliability can be improved. Since the frictional force can be reduced by reducing the force acting on the holding mechanism of the sample exchange rod and the sample holder, and the wear of the holding mechanism can be reduced, the reliability is improved.
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional view of one embodiment of a conventional scanning electron microscope.
FIG. 2 is a diagram showing one embodiment of a conventional sample exchange device.
FIG. 3 is a diagram showing a relationship between a holder receiver and a sample holder.
FIG. 4 is a view taken in the direction of arrows AA in FIG. 3;
FIG. 5 is a view showing a sample exchange rod according to the first embodiment of the present invention.
FIG. 6 is a top view of FIG. 5;
FIG. 7 is a view showing a sample holder according to the first embodiment of the present invention.
FIG. 8 is a view taken along line BB of FIG. 7;
FIG. 9 is a diagram showing a positional relationship between a hook and a hook receiver.
FIG. 10 is a diagram showing a tip end of a sample exchange rod according to a second embodiment of the present invention.
FIG. 11 is a top view of FIG. 10;
FIG. 12 is a view showing a sample holder according to a second embodiment of the present invention.
FIG. 13 is a view showing a sample holder according to a third embodiment of the present invention.
[Explanation of symbols]
4 sample chamber, 5 sample, 7 sample stage, 13, 46 holder holder, 14, 43 sample holder, 15 sample exchange chamber, 18, 30 sample exchange rod, 25a, 25b, 26, 47a, 47b, 48: presser spring, 31: outer cylinder, 32: shaft, 38: hook, 39a, 39b: banana chip, 45a, 45b: hole.

Claims (7)

The sample chamber is provided with a sample stage for moving the sample, the sample stage is provided with a holding mechanism for holding the sample holder on which the sample is mounted by a spring force, and the sample exchange chamber equipped with a sample exchange rod is provided through a gate valve. The sample holder is transported between the sample exchange chamber and the holder receiver by the sample exchange rod, the sample holder is mounted on the holder receiver, the sample is scanned with a particle beam, and the signal generated from the sample is detected. In a particle beam device that detects with a detector and displays a sample image based on the detected signal,
The sample exchange rod is composed of an outer cylinder and a shaft, two elastic bodies are horizontally attached to the tip of the outer cylinder, and a sample holder is provided with a portion that is held by the two elastic bodies of the outer cylinder. During transfer between the sample exchange chamber and the sample stage, it is held by the two elastic members at the tip of the outer cylinder, and the shaft is rotated by a predetermined angle and fixed to the sample holder by a hook member fixed to the shaft tip. The sample holder is pulled out from the sample holder holding mechanism of the sample stage by hooking the hook member. When the shaft is rotated by a predetermined angle, the hook between the hook member at the tip of the shaft and the hook member of the sample holder is released, and the sample holder can be pulled out from the sample exchange rod. Specially And the particle beam apparatus. In claim 1,
The two elastic bodies of the outer cylinder holding the sample holder are formed of leaf springs, and the shape of the portion of the sample holder held by the leaf spring is two or more parallel to the sample exchange rod for one leaf spring. A particle beam device comprising a flat surface. In claim 1,
The two elastic bodies of the outer cylinder holding the sample holder are constituted by two banana chips, and the shape of the portion of the sample holder held by the banana chip is constituted by holes parallel to the sample exchange rod. Particle beam device. The sample chamber is provided with a sample stage for moving the sample, the sample stage is provided with a holder receiver for holding a sample holder on which the sample is mounted, and the sample holder is held by a leaf spring attached to the holder receiver. A sample exchange chamber equipped with a rod is attached to the sample chamber via a gate valve, the sample exchange rod transfers the sample holder between the sample exchange chamber and the holder receiver, attaches the sample holder to the holder receiver, and places the sample on the sample holder. In a particle beam apparatus that scans with a particle beam, detects a signal generated from a sample by a detector, and displays a sample image based on the detected signal, a sample exchange rod includes an outer cylinder and an axis, and the axis is an outer cylinder. The two banana tips are mounted horizontally at the tip of the outer cylinder, and two holes are held in the sample holder by the two banana tips of the outer cylinder. sample During the transfer between the exchange chamber and the sample stage, it is held by the two banana chips at the tip of the outer cylinder, the shaft is rotated by a predetermined angle, and the hook fixed to the sample holder by the hook member fixed to the shaft tip The sample holder is pulled out from the sample holder holding mechanism of the sample stage by hooking the member, and the holding force to the sample holder by the two banana tips of the outer cylinder is a plate attached to the holder receiver provided on the sample stage. When the shaft is rotated by a predetermined angle, the hook between the hook at the tip of the shaft and the hook at the sample holder is released, and the sample exchange rod is pulled out of the sample holder. A particle beam apparatus characterized by being able to perform. In claim 4,
When the shaft of the sample exchange rod is turned and the hook member at the tip of the shaft is brought into contact with one banana chip, the hook member of the shaft and the hook member of the sample holder are hooked. A particle beam apparatus having a positional relationship such that a hook member at a tip of a shaft and a hook member of a sample holder do not catch when hitting a banana chip. A charged particle source, a focusing lens for focusing charged particles emitted from the charged particle source, a sample stage on which a sample irradiated with the charged particles focused by the focusing lens is mounted, and the sample stage is arranged. In a charged particle beam device having a sample chamber to be
A sample introduction mechanism for introducing a sample from outside the sample chamber, wherein the sample introduction mechanism is configured to transfer the sample holder holding the sample into the sample chamber while being held by a spring force. A charged particle beam device characterized by the above-mentioned. A charged particle source, a focusing lens for focusing charged particles emitted from the charged particle source, a sample stage on which a sample irradiated with the charged particles focused by the focusing lens is mounted, and the sample stage is arranged. In a charged particle beam device having a sample chamber to be
The charged particle beam device, wherein the sample stage is configured to hold a sample holder for holding the sample by a spring force.

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