JP2004071163A - Manufacturing method of spacer, and spacer - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a spacer having irregularities for restraining the surface from electrification capable of being easily manufactured with a good precision of the shape. <P>SOLUTION: For the manufacturing method of the spacer formed by cutting a glass mother material having a plurality of grooves on the outer surface into intended length by heating it at a drawing temperature and drawing thereof, the glass mother material is formed into a complex structure composed of a glass material with low viscosity (2) arranged in an inner layer of the glass mother material, and a glass material with high viscosity (3) arranged in an area including at least an outer surface extending along the elongated direction of the cross section. The glass material with high viscosity includes at least a member having the plurality of grooves on the outer surface side, and the viscosity of both of the glass material with low viscosity and the glass material with high viscosity ranges between 10<SP>5</SP>to 10<SP>10</SP>dPa×s, and the glass material is drawn at such a drawing temperature that makes the viscosity of the glass material with high viscosity becomes higher than that of the glass material with low viscosity. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a spacer manufacturing method and a spacer interposed between a pair of substrates in an electronic / electric device and supporting the substrates. More specifically, the present invention relates to a method of manufacturing a spacer, for example, which is disposed between a pair of front and back substrates of a panel-shaped display, and has a surface formed with irregularities for suppressing charge and the like, and a spacer.
[0002]
[Prior art]
In recent years, surface-conduction type electron-emitting devices are arranged in a matrix on a substrate, and emitted electrons are radiated to phosphors provided on a substrate facing each other so as to hermetically seal the electron-emitting devices to form an image. The development of a panel-shaped display to be formed is in progress.
[0003]
Such a method of manufacturing a spacer for supporting a space between substrates of an electron beam apparatus in which an electron source is hermetically sealed between a pair of substrates includes a glass base material having a rectangular cross section, and a delivery roller sandwiching the glass base material. On the other hand, the glass base material that has been sent out is sandwiched between the take-up rollers, and the glass base material is heated and softened between the feed-out roller and the take-up roller. Stretched by the difference in speed between the feed speed of the feed roller and the take-up speed of the take-off roller to form a stretched glass base material having a similar cross-sectional shape to the glass base material. There is known a heat stretching method (Japanese Patent Application Laid-Open No. 2000-164129).
[0004]
On the other hand, the spacer used in such an electron beam device is charged by a part of the electrons emitted from the electron source hitting the spacer, or the ions ionized by the action of the emitted electrons adhere to the spacer. It is pointed out that it may cause it. When the spacer is charged, the trajectory of the electrons emitted from the electron source cannot be accurately controlled, which leads to a problem that a displayed image is distorted, for example.
[0005]
In order to solve such a problem, Japanese Patent Application Laid-Open No. 2000-311608 discloses a technique in which a concavo-convex structure is provided on the surface of a spacer to suppress charging of the spacer. In Japanese Patent Application Laid-Open No. 2000-31608, the above-described heating and stretching method is applied, and a method of forming unevenness on the surface while performing heating and stretching, or forming unevenness on a glass base material in advance and then applying the glass base material A method of stretching by heating is mentioned.
[0006]
[Problems to be solved by the invention]
By the way, in general, the glass material is stretched by heating so that the viscosity of the glass material is in the range of 10 ⁵ to 10 ¹⁰ dPa · s.
[0007]
In the above-mentioned conventional manufacturing method as well, stretching is performed by heating so that the viscosity of the glass base material is in the range of 10 ⁵ to 10 ¹⁰ dPa · s. However, the stretching is performed by setting the viscosity to be relatively low, that is, the heating temperature is increased. When the film is stretched at a higher height, as shown in FIG. 10, both ends of the obtained thin plate-shaped spacer in the longitudinal direction of the cross section become round and easily swell. When such a swelling occurs, when the obtained thin plate-shaped spacer is installed vertically on the substrate, the contact surface with the substrate is curved, so that the stability is poor and the assembling property is poor. In addition, there is a problem that it is difficult to obtain the supporting strength.
[0008]
In addition, when stretching is performed with a higher viscosity set, that is, when stretching is performed with a lower heating temperature, as shown in FIG. 11, the intermediate portion of the obtained thin plate-shaped spacer in the cross-sectional length direction is easily constricted. When such constriction occurs, the desired strength cannot be obtained.For example, when used as a spacer disposed between a pair of front and back substrates of a panel-shaped display, the pressure between the pair of substrates is reduced. In some cases, high atmospheric pressure resistance cannot be obtained.
[0009]
If the controllability of the cross-sectional shape at the time of manufacturing the spacer is poor, the shape of the unevenness for suppressing charge as described above cannot be obtained as designed, and the desired charge suppression effect can be obtained. Also leads to the problem that it cannot be obtained.
[0010]
The present invention has been made in view of the above problems, and has as its object to provide a spacer having a surface on which irregularities for suppressing charge and the like are formed, which can be manufactured with higher shape accuracy and more easily. .
[0011]
[Means for Solving the Problems]
By the way, it is considered that the cause of the occurrence of the swelling and constriction is that when heating a glass base material having a cross-sectional shape having different vertical and horizontal dimensions, both ends in the cross-sectional longitudinal direction are more likely to be heated than the intermediate portion. . For example, in a glass base material having a rectangular cross section, if a surface along the longitudinal direction is a long surface and a surface along the short direction is a short surface, an intermediate portion in the cross section is heated by heat from the long surface. On the other hand, both ends in the cross-section longitudinal direction are heated by receiving heat from both the long side and the short side, and are more likely to be heated as compared with the intermediate part. For this reason, if it is attempted to heat the entire length of the glass base material in the cross-sectional longitudinal direction to a state where the glass base material has a viscosity that facilitates stretching, it is considered that the heating of the both ends becomes excessive, the viscosity is reduced, and swelling is caused. Further, if the heating temperature is lowered to suppress the bulging, the heating of the intermediate portion becomes insufficient, the viscosity of the intermediate portion increases, and the concentration of stress during stretching is considered to cause necking.
[0012]
The present invention has been made in view of the causes of the above-mentioned swelling and constriction.
A spacer with irregularities formed on the surface has a cross-sectional shape with different vertical and horizontal dimensions, and a glass base material having a plurality of grooves on the outer surface along the cross-sectional longitudinal direction is heated to the drawing temperature and drawn to a required length. In a method of manufacturing a spacer manufactured by cutting into
A glass base material, from a low-viscosity glass material arranged in the inner layer of the glass base material and a high-viscosity glass material arranged in a region including at least the outer surface along the cross-sectional longitudinal direction in the surface layer portion of the glass base material Composite structure
The high-viscosity glass material includes at least a member having a plurality of grooves on the outer surface side,
The low-viscosity glass material and the high-viscosity glass material both have a viscosity in the range of 10 ⁵ to 10 ¹⁰ dPa · s, and are heated to a stretching temperature at which the viscosity of the high-viscosity glass material becomes higher than the viscosity of the low-viscosity glass material. A method for manufacturing a spacer, characterized in that:
[0013]
The present invention provides, in the above first invention,
"The low-viscosity glass material has a rectangular cross-sectional shape, and the high-viscosity glass material is addressed to at least two surfaces on the long side of the cross-section of the low-viscosity glass material."
"The high-viscosity glass material addressed to two surfaces on the long side of the cross section of the low-viscosity glass material includes a plurality of thin plate members, and the thin plate members have the same width as the pitch of the plurality of grooves. Having two different thicknesses corresponding to the peaks and valleys of the groove ",
"The resistivity of the high-viscosity glass material addressed to the two surfaces on the longer side of the cross-section of the low-viscosity glass material is 10 ⁸ to 10 ¹⁰ Ω · cm."
"The high-viscosity glass material is further addressed to the two surfaces on the short side of the cross-section of the low-viscosity glass material."
"The resistivity of the high-viscosity glass material addressed to the two short-side sides of the low-viscosity glass material is 10 ³ to 10 ⁴ Ω · cm.”
"Using multiple types of glass materials as high-viscosity glass materials",
Is included as a preferable embodiment.
[0014]
The second aspect of the present invention is as follows.
In the spacer with irregularities formed on the surface,
A low-viscosity glass material disposed on the inner layer of the spacer and a composite structure in which a high-viscosity glass material disposed on at least the region where the irregularities are formed in the surface layer portion of the spacer are integrated,
When the low-viscosity glass material and the high-viscosity glass material are heated to a temperature at which both the low-viscosity glass material and the high-viscosity glass material have a viscosity in the range of 10 ⁵ to 10 ¹⁰ dPa · s, The spacer is characterized by being a glass material in which the viscosity of a highly viscous glass material becomes higher.
[0015]
The present invention provides, in the above second invention,
"The low-viscosity glass material has a rectangular cross-sectional shape, and the high-viscosity glass material is integrated with at least two surfaces on the long side of the cross-section of the low-viscosity glass material."
"The resistivity of the high-viscosity glass material integrated with the two surfaces on the long side of the cross section of the low-viscosity glass material is 10 ⁸ to 10 ¹⁰ Ω · cm”,
"The high-viscosity glass material is further integrated with the two surfaces on the short side of the cross section of the low-viscosity glass material."
"The resistivity of the high-viscosity glass material integrated with the two surfaces on the short side of the cross section of the low-viscosity glass material is 10 ³ to 10 ⁴ Ω · cm.”
"A plurality of types of glass materials are used as high-viscosity glass materials."
Is included as a preferable embodiment.
[0016]
BEST MODE FOR CARRYING OUT THE INVENTION
FIG. 1 is an explanatory view showing an example of a method of manufacturing a spacer according to the present invention, FIG. 2 is a partially enlarged view of the glass base material shown in FIG. 1, and FIG. 3 is a view of a spacer according to the present invention obtained by the method of FIG. It is an expansion perspective view.
[0017]
In FIG. 1, reference numeral 1 denotes a glass base material, and the glass base material 1 is a low-viscosity glass material having a rectangular cross section (a cross section in a direction perpendicular to the stretching direction of the glass base material 1), as shown in FIG. 2 and a plate-like high-viscosity glass material 3 sandwiching the low-viscosity glass material 2 between two surfaces (surfaces along the cross-section longitudinal direction) on the longer side of the cross-section, the cross-section becomes substantially rectangular as a whole. It has been combined as follows.
[0018]
Although a plurality of grooves are not shown in FIG. 1 for simplification of the drawing, the high-viscosity glass material 3 constituting the glass base material 1 has an outer surface as shown in FIGS. A plurality of grooves are provided on the side, that is, the surface opposite to the surface directed to the low-viscosity glass material 2 along the stretching direction.
[0019]
Although the cross-sectional shape of the glass preform 1 in this example is substantially rectangular, the present invention is not limited to the glass preform 1 having such a cross-sectional shape, and the glass preform 1 having a cross-sectional shape having different vertical and horizontal dimensions, for example, the cross-sectional shape Is also useful for the glass base material 1 having a substantially elliptical shape, a substantially trapezoidal shape, or the like. Particularly, since the heating state at the middle portion in the longitudinal direction and the heating state at both ends are likely to be different, the dimension in the longitudinal direction is smaller than the dimension in the shorter direction. This is effective for a glass base material 1 having a cross-sectional shape that is five times or more. The term “substantially rectangular” in this specification includes not only a shape in which four corners intersect at right angles, but also a shape in which corners are chamfered or rounded (R-processed). That is, considering the parts. However, in order to obtain a spacer that stably supports between the substrates, and to form the cross-sectional shape including the shape of the groove with a desired control with good controllability, a preferable form is a substantially rectangular cross-section. .
[0020]
The combination of the low-viscosity glass material 2 and the high-viscosity glass material 3 may be any of a pressed state, a fitted state, and a bonded state. In this example, as shown in FIG. 1, the low viscosity glass material 2 and the high viscosity glass material 3 are combined while being pressed against each other by tightening the periphery of the glass base material 1 with the mechanical chuck 4. I have.
[0021]
The glass constituting the low-viscosity glass material 2 and the high-viscosity glass material 3 can be selected from, for example, elemental glass, oxide glass, fluoride glass, chloride glass, sulfide glass and the like according to the application. Among these, oxide glass (for example, silicate glass, phosphate glass, borate glass, borosilicate glass, etc.) is preferable from the viewpoint of processability.
[0022]
In the example shown in FIG. 1, a glass base material 1 in which the low-viscosity glass material 2 and the high-viscosity glass material 3 are combined is used. The glass base material 1 is fastened and held by a mechanical chuck 4, and the lower portion is heated by a heater 6. It is heated and stretched, and the lower part of the stretched stretched glass base material 1 ′ is sandwiched between the take-up rollers 5. In this state, while gradually lowering the mechanical chuck 4, the take-off roller 5 is rotated to take out the drawn glass base material 1 ′ at a take-up speed higher than the descending speed of the mechanical chuck 4, and the mechanical chuck 4 and the take-up roller 5 In the meantime, the glass base material 1 is heated to the stretching temperature by the heater 6 and softened. Then, by the speed difference between the descending speed of the mechanical chuck 4 and the take-up speed by the take-off roller 5, the glass base material 1 heated to the drawing temperature and softened is drawn, and the low-viscosity glass material 2 and the high-viscosity glass material 3 are separated. A stretched glass base material 1 ′ that is integrated and has a cross-sectional shape substantially similar to that of the glass base material 1 is continuously formed. Then, the stretched glass base material 1 ′ that has passed through the take-off roller 5 in a state of being cooled and solidified is cut by a cutter 7 to obtain a plate-like or column-like spacer 8 having a desired thinness (see FIG. 3). .
[0023]
The shape of the groove provided in the high-viscosity glass material 2 constituting the glass preform 1 is, for example, rectangular, trapezoidal, or semicircular in cross section, as shown in Japanese Patent Application Laid-Open No. 2000-31608. The angle may be determined as appropriate in accordance with a design that makes it possible to minimize the incident angle of electrons incident on the surface of the spacer 8 with the spacer 8 placed between the substrates. FIG. 2 shows a case where the cross section of the groove is rectangular, while FIG. 6 shows a case where the cross section of the groove is trapezoidal. As shown in FIG. 6, it is preferable that the cross section of the groove be trapezoidal because the angle of incidence of electrons incident on the spacer surface can be further reduced.
[0024]
The dimensions such as the width, depth, and pitch of the groove differ depending on how much stretching is performed, and this is also appropriately determined according to the design of the completed state. The grooves in the present invention are not necessarily provided continuously in the stretching direction of the glass base material, and may be interrupted on the way, but considering the ease of processing, grooves continuous in the stretching direction are considered. Is preferably provided.
[0025]
The stretching of the glass base material 1 is performed when the viscosity of the low-viscosity glass material 2 and the viscosity of the high-viscosity glass material 3 are both within the range of 10 ⁵ to 10 ¹⁰ dPa · s and the viscosity of the high-viscosity glass material 3 is higher than the viscosity of the low-viscosity glass material 2. The stretching is performed by heating to a stretching temperature at which the viscosity of the polymer becomes high. When the viscosity of the low-viscosity glass material 2 and the high-viscosity glass material 3 at the stretching temperature is out of the range of 10 ⁵ to 10 ¹⁰ dPa · s, the stretching of the glass base material 1 becomes difficult. The specific stretching temperature varies depending on the material of the low-viscosity glass material 2 and the high-viscosity glass material 3 and the like, but is generally about 500 to 1000 ° C.
[0026]
The low-viscosity glass material 2 and the high-viscosity glass material 3 are both heated to a stretching temperature at which the viscosity of the high-viscosity glass material 3 is within the range of 10 ⁵ to 10 ¹⁰ dPa · s and the viscosity of the high-viscosity glass material 3 is higher than the viscosity of the low-viscosity glass material 2. In the stretching, the low-viscosity glass material and the high-viscosity glass material in the present invention were heated to a temperature at which both the viscosity of the low-viscosity glass material and the high-viscosity glass material were within the range of 10 ⁵ to 10 ¹⁰ dPa · s. Sometimes, it can be performed by using a glass material in which the viscosity of the high-viscosity glass material is higher than the viscosity of the low-viscosity glass material. The adjustment of the viscosity of the low-viscosity glass material 2 and the high-viscosity glass material 3 can be performed by adjusting the components of the low-viscosity glass material 2 and the high-viscosity glass material 3 and the amounts thereof. For example, in an oxide glass, the viscosity in a high-temperature region can be reduced (increased) by increasing (decreasing) the content of the contained alkali oxide, boron oxide, lead oxide, and the like. By increasing (decreasing) the content of silicon oxide, aluminum oxide, titanium oxide, zirconium oxide, or the like, the viscosity in the high-temperature region can be increased (decreased). Further, the adjustment of the above-mentioned components and their blending amount and the adjustment of the heating temperature of the low-viscosity glass material 2 and the high-viscosity glass material 3 can be used together. The heating temperature is adjusted by, for example, irradiating infrared rays through a lens or a concave mirror focused on the central portion of the low-viscosity glass material 2 so that the low-viscosity glass material 2 is compared with the high-viscosity glass material 3. To a high temperature.
[0027]
According to the above method, a spacer 8 without swelling and constriction as shown in FIG. 3 can be obtained. This is because the viscosity of the high-viscosity glass material 3 covering both longitudinal surfaces of the low-viscosity glass material 2 is higher than the viscosity of the low-viscosity glass material 2 at the above stretching temperature. It is considered that even if the viscosity of the low-viscosity glass material 2 at both ends becomes too low, the high-viscosity glass material 3 covering the low-viscosity glass material 2 can suppress swelling. Therefore, when the glass base material 1 is composed of only the low-viscosity glass material 2, even when the glass base material 1 is heated to a stretching temperature that causes swelling at both ends in the cross-section longitudinal direction, the swelling does not occur, and neither swelling nor constriction occurs. No spacer 8 can be obtained.
[0028]
In addition, since grooves need only be formed on one side of the high-viscosity glass material, it is possible to simplify the manufacturing machine, simplify the process, and shorten the time. Furthermore, the range of choice of material combinations is broadened by using low-viscosity glass materials and high-viscosity glass materials. The material selection criteria for low-viscosity glass materials consider the strength and the coefficient of thermal expansion (the relationship between the thermal stress and the substrate). ), Etc., and the effect of suppressing charge can be emphasized as a material selection criterion for a high-viscosity glass material.
[0029]
Usually, the thickness of the spacer 8 is about 0.05 to 0.5 mm, and the thickness of the high-viscosity glass material 3 when the spacer 8 having such a thickness is preferably 0.5 to 5 μm. That is, the thickness of the glass base material 1 and the thickness of the low-viscosity glass material 2 and the high-viscosity glass material 3 in the glass base material 1 are preferably such that the thickness after stretching is within the above range. If the thickness of the high-viscosity glass material 3 in the glass base material 1 is too large, it is difficult to perform stretching, and if the thickness of the high-viscosity glass material 3 is too small, it is difficult to obtain the effect of suppressing the swelling. Further, the difference in viscosity between the low-viscosity glass material 2 and the high-viscosity glass material 3 at the stretching temperature is preferably 0.1 dPa · s or more in order to easily obtain the effect of suppressing swelling. In this specification, the thickness of the high-viscosity glass material having a groove indicates the maximum thickness corresponding to the crest of the groove.
[0030]
By the way, as a method of using a member having a plurality of grooves on the outer surface side along the stretching method as a high-viscosity glass material, there is also a form in which the high-viscosity glass material is formed in a single plate-like member as described above. An embodiment in which the high-viscosity glass material is composed of a plurality of members including a plurality of thin plate members is also a preferred embodiment. As the thin plate member for this purpose, a member having the same width as the pitch of the plurality of grooves and having two different thickness portions corresponding to the peaks and valleys of the grooves is used. FIG. 7 is a conceptual diagram for explaining an embodiment in which a high-viscosity glass material is constituted by a plurality of members including such a plurality of thin plate members. In FIG. 7, 3 ″ represents a thin plate member. In this embodiment, a plurality of thin plate members 3 ″ having the same shape are prepared, and as a result, as shown in FIG. A high-viscosity glass material is formed by covering the surface on the long side of the cross section of the peripheral side surface.
[0031]
Note that the shape of the thin plate member may be formed in a form of one pitch in accordance with grooves having various shapes such as a rectangular shape and a trapezoidal shape, as described above, formed in a high-viscosity glass material.
[0032]
According to the configuration in which the high-viscosity glass material is constituted by such a plurality of thin plate members, the production of a single-shaped member can be simplified more than the provision of a groove in the plate material, so that further production is possible. Cost reduction becomes possible.
[0033]
The resistivity of the high-viscosity glass material addressed to the two long-side sides of the cross-section of the low-viscosity glass material having a rectangular cross-section is high enough to prevent excessive current flow between the substrates, The resistance is preferably 10 ⁸ to 10 ¹⁰ Ω · cm because the resistance is low enough to discharge properly.
[0034]
Further, since the shape stability of the spacer is good, another effect can be obtained. This effect will be described with reference to FIGS. FIG. 8 is a conceptual cross-sectional view for explaining a state in which spacers are arranged so as to support between the substrates, and FIG. 9 is a conceptual view for explaining a step of forming a low-resistance film on a bonding surface of the spacer with the substrate. FIG. In FIG. 8, reference numeral 9 denotes a low-resistance film, 1000 denotes a substrate, and 1001 denotes a wiring arranged on the substrate.
[0035]
In order to suppress the charging of the spacers, not only is the provision of unevenness on the spacers 8 to prevent the inflow or outflow of the charges causing the charging from the exposed surface, but also, as shown in FIG. It is preferable to provide a low-resistance film 9 on the joint surface between the spacer 8 and the substrate 1000 or the wiring 1001 disposed on the substrate in order to allow the resistance to escape.
[0036]
Various methods for forming the low-resistance film 9 are conceivable. As a method for forming a high-quality low-resistance film 9 on a large number of spacers, a method as shown in FIG. 9 is considered. That is, a large number of spacers 8 are bundled in a state where the bonding surface with the substrate is exposed, and a low-resistance material such as a metal is deposited on the exposed portion by a sputtering method or the like.
[0037]
However, the shape stability is poor. For example, when spacers having a distorted shape as shown in FIGS. 10 and 11 are bundled, a gap is formed between the spacers. And the predetermined low resistance film 9 cannot be formed.
[0038]
If the spacer 8 is formed with good shape stability by the method as in the present invention, such a problem at the time of forming the low-resistance film 9 can be avoided, and a good low-resistance film 9 can be obtained. Will be.
[0039]
4 is a partially enlarged view showing another example of the glass base material, and FIG. 5 is a perspective view showing a spacer according to the present invention obtained from the glass base material of FIG. 4, and the same reference numerals as those in FIGS. It is shown. Reference numeral 3 'denotes a high-viscosity glass material addressed to the short side of the cross-section of the low-viscosity glass material 2 having a rectangular cross section.
[0040]
In the glass base material 1 in this example, the high-viscosity glass material 3 ′ is also directed to the short-side of the cross-section of the low-viscosity glass material 2 having a rectangular cross-sectional shape. By doing so, the spacer 8 obtained has the short side covered with the high-viscosity glass material, and the smoothness of the short side can be more easily obtained. Further, in this example, the high-viscosity glass material 3 on the long side of the cross-section of the low-viscosity glass material 2 and the high-viscosity glass material 3 ′ on the short-side of the cross section of the low-viscosity glass 2 are of different types and / or different amounts of the contained components. And the swelling prevention control can be performed precisely.
[0041]
In the embodiment shown in FIG. 4, the resistivity of the high-viscosity glass material 3 'addressed to the two short-side surfaces of the low-viscosity glass material is 10 ³ to 10 ⁴ Ω · cm. By doing so, it can also be used as the low resistance film 9 described with reference to FIG.
[0042]
【Example】
(Example 1)
The spacer 8 was formed by stretching the heated glass base material 1 using the mechanical chuck 4 and the take-off roller 5 as shown in FIG.
[0043]
As the glass base material 1, in the form shown in FIG. 2, a low-viscosity glass material 2 having a rectangular cross section of 4 mm × 48 mm has a maximum thickness of 1 mm and a high viscosity of 48 mm width on the long side surface of the cross section. the glass material 3 intended was Ate', the cross-sectional area _{S 1} of the rectangle circumscribing the entire cross-section of about 288 mm ² (dimensions of the bounding rectangle is 6 mm × 48 mm) was used for. The groove of the high-viscosity glass material 3 was formed in a rectangular cross section as shown in FIG. 2, and the depth of the groove was 0.3 mm, the width was 0.3 mm, and the pitch was 0.9 mm. As a material, the low-viscosity glass material 2 has a viscosity of ^106.0 dPa · s at a heating temperature of 800 ° C. during stretching, the high-viscosity glass material 3 has a resistivity of 10 ⁹ Ω · cm, and a heating temperature of 800 when stretching. ℃ viscosity ¹⁰ 7.6 dPa · s in were used, respectively.
[0044]
The glass base material 1 is sent out by lowering the mechanical chuck 4 at a speed of V ₁ = 5 mm / min, is heated to about 800 ° C. by a heater 6, and is discharged by a take-up roller 5 disposed near the heater 6 to V _2. = 4500 mm / min, the film was heated and stretched, and finally cut with a cutter 7 to a length of 1000 mm. The cross-sectional area S ₂ of the obtained spacer 8 was about 0.32 mm ² (0.2 mm × 1.6 mm), and the above-described partial necking and bulging were not observed. The groove had a rectangular cross section, a depth of 10 μm, a width of 10 μm, and a pitch of 30 μm.
[0045]
The sheet resistance of the high viscosity glass material 3 was 10 ¹² Ω / □.
(Example 2)
In this example, low viscous glass material 2 with viscosity ¹⁰ 6.5 dPa · s at a heating temperature 800 ° C. at the time of stretching, the high viscosity glass material 3 resistivity of 10 ⁹ Ω · cm to heating during the stretching except for using the viscous ¹⁰ 7.0 dPa · s at a temperature of 800 ° C. in the same manner as in example 1 was prepared a spacer.
[0046]
Also in this example, a high-quality spacer similar to that in Example 1 was obtained.
[0047]
(Comparative example)
In this example, a spacer was prepared in the same manner as in Example 1 except that a viscosity of 10 ⁷ dPa · s at a heating temperature of 800 ° C. during stretching was used for the entire glass base material.
[0048]
The obtained spacer was swollen as a whole and rounded, and the groove could not have the designed shape.
[0049]
(Example 3)
The spacer of this embodiment is different from that of the first embodiment in that a periodic band-shaped groove of the high-viscosity glass material 3 is formed by arranging a plurality of thin plate members 3 ″ as shown in FIG. Was prepared in the same manner as in Example 1.
[0050]
The dimension of one thin plate member 3 ″ is 0.9 mm in overall width, of which the width of the maximum thickness portion is 0.6 mm, the width of the minimum thickness portion is 0.3 mm, and the maximum thickness is 0.3 mm. The thickness was 1 mm, and the minimum thickness was 0.7 mm.
[0051]
Also in this example, a high-quality spacer similar to that in Example 1 was obtained.
[0052]
(Example 4)
The spacer 8 was formed by stretching the heated glass base material 1 using the mechanical chuck 4 and the take-off roller 5 as shown in FIG.
[0053]
As the glass base material 1, in the form shown in FIG. 4, a low-viscosity glass material 2 having a rectangular cross section of 4 mm × 46 mm has a maximum thickness of 1 mm and a high viscosity of 46 mm width on the surface on the longer side of the cross section. A high-viscosity glass material 3 'having a thickness of 1 mm and a width of 6 mm is applied to the surface on the short side of the cross section of the glass material 3 and the low-viscosity glass material 2, respectively, and the total cross-sectional area S1 is about 288 mm ² (circumscribed rectangle) Having a size of 6 mm × 48 mm). The groove of the high-viscosity glass material 3 was formed in a rectangular cross section, the depth of the groove was 0.3 mm, the width was 0.3 mm, and the pitch was 0.9 mm. The low-viscosity glass material 2 has a viscosity of ^106.0 dPa · s at a heating temperature of 800 ° C. during stretching, and the high-viscosity glass materials 3 and 3 ′ have a resistivity of 10 ⁹ Ω · cm and a heating temperature of 800 ° C. during stretching. The viscosity at ^107.6 dPa · s was used.
[0054]
The glass base material 1 is sent out by lowering the mechanical chuck 4 at a speed of V ₁ = 5 mm / min, is heated to about 800 ° C. by a heater 6, and is discharged by a take-up roller 5 disposed near the heater 6 to V _2. = 4500 mm / min, the film was heated and stretched, and finally cut with a cutter 7 to a length of 1000 mm. The cross-sectional area S ₂ of the obtained spacer 8 is about 0.32 mm ² (0.2 mm × 1.6 mm), and the above-mentioned partial necking and bulging are not observed. It was superior to the spacer of Example 1. The grooves had a rectangular cross section, a depth of 10 μm, a width of 10 μm, and a pitch of 30 μm.
[0055]
The sheet resistance of the high-viscosity glass materials 3 and 3 ′ was 10 ¹² Ω / □.
[0056]
(Example 5)
In this example, a 10 nm-thick Ti film and a 200 nm-thick Pt film are formed by sputtering on the spacers manufactured in Examples 1 to 4 in this order by the method described with reference to FIG. A low resistance film was formed.
[0057]
As a result, no wraparound of the film-forming material was observed on the side surface on the longer side of the cross section of the spacer 8, and a desired low-resistance film having a sheet resistance of 10 ³ Ω / □ was obtained.
[0058]
(Example 6)
In the present example, the material of the high-viscosity glass material 3 ′ addressed to the surface on the short side of the cross section of the low-viscosity glass material 2 is prepared by applying a material having a resistivity of 10 ⁴ Ω · cm and a viscosity of 10 ⁷ at a heating temperature of 800 ° C. during stretching ^{. A} spacer was prepared in the same manner as in Example 4 except that the thickness was set to ⁶ dPa · s.
[0059]
In the spacer obtained in this example, the portion of the high-viscosity glass material 3 ′ had a sheet resistance of 10 ³ Ω / □, which was sufficient to function as a low-resistance film.
[0060]
【The invention's effect】
The present invention is as described above, and a spacer having a surface with irregularities for suppressing charge or the like can be manufactured with higher shape accuracy and more easily.
[0061]
Furthermore, a high-quality low-resistance film can be formed in a desired state without sneaking into an unnecessary portion.
[Brief description of the drawings]
FIG. 1 is an explanatory view showing an example of a method for manufacturing a spacer according to the present invention.
FIG. 2 is a partially enlarged view of the glass base material shown in FIG.
FIG. 3 is an enlarged perspective view of a spacer according to the present invention obtained by the method of FIG. 1;
FIG. 4 is a partially enlarged view showing another example of the glass base material.
FIG. 5 is a perspective view showing a spacer according to the present invention obtained from the glass base material of FIG. 4;
FIG. 6 is a cross-sectional view of a trapezoidal cross section of a groove provided in a high-viscosity glass material.
FIG. 7 is a conceptual diagram for explaining an embodiment in which a high-viscosity glass material is constituted by a plurality of thin plate members.
FIG. 8 is a conceptual cross-sectional view for explaining a state where spacers are arranged to support between substrates.
FIG. 9 is a conceptual diagram for explaining a step of forming a low-resistance film on a bonding surface of a spacer with a substrate.
FIG. 10 is an explanatory diagram of a state of occurrence of swelling.
FIG. 11 is an explanatory diagram of a state of occurrence of constriction.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Glass base material 1 'Stretched glass base material 2 Low-viscosity glass material 3, 3' High-viscosity glass material 3 "Thin plate member 4 Mechanical chuck 5 Pick-up roller 6 Heater 7 Cutter 8 Spacer 9 Low-resistance film 1000 Substrate 1001 Wiring

Claims (13)

A spacer with irregularities formed on the surface has a cross-sectional shape with different vertical and horizontal dimensions, and a glass base material having a plurality of grooves on the outer surface along the cross-sectional longitudinal direction is heated to the drawing temperature and drawn to a required length. In a method of manufacturing a spacer manufactured by cutting into
A glass base material, from a low-viscosity glass material arranged in the inner layer of the glass base material and a high-viscosity glass material arranged in a region including at least the outer surface along the cross-sectional longitudinal direction in the surface layer portion of the glass base material Composite structure
The high-viscosity glass material includes at least a member having a plurality of grooves on the outer surface side,
The low-viscosity glass material and the high-viscosity glass material both have a viscosity in the range of 10 ⁵ to 10 ¹⁰ dPa · s, and are heated to a stretching temperature at which the viscosity of the high-viscosity glass material becomes higher than the viscosity of the low-viscosity glass material. A method for producing a spacer, comprising: 2. The spacer according to claim 1, wherein the low-viscosity glass material has a rectangular cross-sectional shape, and the high-viscosity glass material is addressed to at least two surfaces on the long side of the cross-section of the low-viscosity glass material. 3. Production method. The high-viscosity glass material addressed to the two surfaces on the longer side of the cross section of the low-viscosity glass material includes a plurality of thin plate members, and the thin plate members have the same width as the pitch of the plurality of grooves. 3. The method according to claim 2, wherein the spacer has two portions having different thicknesses corresponding to the peaks and the valleys. 4. The spacer according to claim 2, wherein the resistivity of the high-viscosity glass material addressed to the two long-side surfaces of the low-viscosity glass material is 10 ⁸ to 10 ¹⁰ Ω · cm. 5. Production method. The method for manufacturing a spacer according to any one of claims 2 to 4, wherein the high-viscosity glass material is further applied to two surfaces on the short side of the cross section of the low-viscosity glass material. The method for manufacturing a spacer according to claim 5, wherein the resistivity of the high-viscosity glass material directed to the two short-side sides of the low-viscosity glass material is 10 ³ to 10 ⁴ Ω · cm. . The method for manufacturing a spacer according to any one of claims 1 to 6, wherein a plurality of types of glass materials are used as the high-viscosity glass material. In the spacer with irregularities formed on the surface,
A low-viscosity glass material disposed on the inner layer of the spacer and a composite structure in which a high-viscosity glass material disposed on at least the region where the irregularities are formed in the surface layer portion of the spacer are integrated,
When the low-viscosity glass material and the high-viscosity glass material are heated to a temperature at which both the low-viscosity glass material and the high-viscosity glass material have a viscosity in the range of 10 ⁵ to 10 ¹⁰ dPa · s, A spacer characterized in that the viscosity of the high-viscosity glass material is higher. The spacer according to claim 8, wherein the low-viscosity glass material has a rectangular cross-section, and the high-viscosity glass material is integrated at least on two surfaces on the long side of the cross-section of the low-viscosity glass material. . The spacer according to claim 9, wherein the resistivity of the high-viscosity glass material integrated with the two surfaces on the longer side of the cross section of the low-viscosity glass material is 10 ⁸ to 10 ¹⁰ Ω · cm. The spacer according to claim 9, wherein the high-viscosity glass material is further integrated with two surfaces on the short side of the cross section of the low-viscosity glass material. The spacer according to claim 11, wherein the resistivity of the high-viscosity glass material integrated with the two surfaces on the short side of the cross section of the low-viscosity glass material is 10 ³ to 10 ⁴ Ω · cm. The spacer according to any one of claims 8 to 12, wherein a plurality of types of glass materials are used as the high-viscosity glass material.

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