JP2004069756A - Optical module manufacturing method and device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To surely set the incident efficiency of light emitted from a 1st optical element on a 2nd optical element to be equal to or above a specified target value without requiring troublesome operation. <P>SOLUTION: An optical module manufacturing device is equipped with an external force applying mechanism part 20 for displacing a housing B previously mutually bonded and fixed on a package P so as to change the incident position of the light emitted from a light emitting element LE on a condensing lens ML in a plurality of directions, a control means 40 measuring the characteristic of the light made incident on an optical fiber OF while displacing the housing B with respect to the package P by driving the mechanism part 20 and detecting a state where the light comes to show desired characteristic, and a laser radiation mechanism part 30 provided with a new bonding and fixing point FP' between the package P and the housing B so as to maintain the state detected by the control means 40. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention provides a first holding member holding a first optical element that emits light, a second holding member holding a second optical element that receives light emitted from the first optical element, A third holding member that holds a third optical element that is joined and fixed between the first holding member and the second holding member and condenses light emitted from the first optical element to the second optical element. The present invention relates to a method and an apparatus for manufacturing an optical module.
[0002]
[Prior art]
FIGS. 10A and 10B conceptually show a general structure of an optical module. In the optical module OM, light emitted from a light emitting element (first optical element) LE such as a laser diode (LD) is made incident on an optical fiber (second optical element) OF, and light is led out through the optical fiber OF. With such a configuration, a condenser lens (third optical element) ML is provided between the light emitting element LE and the optical fiber OF. The condensing lens ML is for condensing the light having a spread emitted from the light emitting element LE onto the optical fiber OF in order to efficiently enter the light into the optical fiber OF. 10A is an auxiliary lens between the light emitting element LE and the condenser lens ML for converting light emitted from the light emitting element LE into substantially parallel light.
[0003]
The light emitting element LE, the optical fiber OF, and the condenser lens ML described above are held by individual holding members. That is, the light emitting element LE (and the auxiliary lens SL) is held by the package (first holding member) P, the optical fiber OF is held by the sleeve (second holding member) S via the ferrule F, and furthermore, the condenser lens The ML is held by the housing (third holding member) B, and the relative positions of the package P, the sleeve S, and the housing B are adjusted such that the light emitted from the light emitting element LE enters the optical fiber OF most efficiently. After that, the optical module OM is configured by bonding and fixing between the package P and the housing B and between the housing B and the sleeve S. The package P, the housing B, and the sleeve S are formed of metal, for example, the package P is formed of Cu-W, and the housing B and the sleeve S are formed of stainless steel, and a YAG (Yttrium Aluminum Garnet) laser is provided at a joint fixing position. Is generally applied for welding.
[0004]
Here, when the metals are welded to each other, the material once melted solidifies, so that shrinkage at that time and deformation due to internal residual stress occur. When such shrinkage or deformation occurs unevenly in the housing B and the sleeve S, the relative positions of the light emitting element LE, the optical fiber OF, and the condenser lens ML deviate from the adjusted state, and the optical fiber of the light emitted from the light emitting element LE There is a possibility that the incidence efficiency for OF is reduced.
[0005]
For this reason, in the related art, utilizing the fact that each of the casing B, the sleeve S, and the optical fiber OF has a circular cross section, as shown by a symbol FP in FIG. By simultaneously irradiating a YAG laser of the same output to three equally divided positions, that is, three positions that are shifted in phase by 120 ° in the circumferential direction from an arbitrary point, between the package P and the housing B, and between the package P and the housing B And the sleeve S are joined and fixed respectively. That is, if the same output YAG laser is simultaneously applied to three positions at regular intervals, the internal residual stress generated at each position accompanying the welding is theoretically the same, and the effects of shrinkage and deformation are canceled out. In addition, it is possible to suppress a situation in which the incidence efficiency of light emitted from the light emitting element LE to the optical fiber OF is reduced.
[0006]
[Problems to be solved by the invention]
However, even when the above-described method is applied, some of the manufactured optical modules OM have a light incident efficiency to the optical fiber OF lower than a target value. May not be improved. That is, even when the YAG lasers of the same output are simultaneously irradiated, it is very difficult to equalize the internal stress generated by welding at three positions, and completely cancel the effects of shrinkage and deformation. Therefore, it is difficult to prevent the occurrence of the optical module OM in which the efficiency of light incidence on the optical fiber OF falls below the target value.
[0007]
For this reason, in the related art, a rework operation for adjusting again the light incident efficiency to the optical fiber OF that is lower than the target value, that is, the bonding and fixing state of the package P, the sleeve S, and the housing B is temporarily released, After adjusting the relative positions of the three members, the work is re-joined and fixed to improve the yield.
[0008]
However, in this rework operation, when the package P, the sleeve S, and the housing B, which have been released from the bonded and fixed state, are to be bonded and fixed again, each bonding and fixing surface must be polished and smoothed, which significantly complicates the manufacturing operation. Cause
[0009]
In addition, the process of joining and fixing the package P, the sleeve S, and the housing B again does not differ from the first process in any way, so that it is not always possible to guarantee an improvement in the efficiency of light incidence on the optical fiber OF. Even if a rework operation is performed, a desired optical module is not always obtained.
[0010]
Note that the various problems described above are not limited to the optical module OM in which the light emitted from the light emitting element LE is made to enter the optical module OM via the condenser lens ML. Light emitted from an optical module, for example, an optical fiber (first optical element) is incident on a light receiving element (second optical element) such as a PD (photodiode) via a condenser lens (third optical element). This can also occur in the optical module described above.
[0011]
The present invention has been made in view of the above circumstances, and has been made in consideration of the above circumstances. A light capable of surely setting an incidence efficiency of light emitted from a first optical element to a second optical element to be equal to or higher than a predetermined target value without requiring complicated work An object of the present invention is to provide a module manufacturing method and a manufacturing apparatus.
[0012]
[Means for Solving the Problems]
The method for manufacturing an optical module according to claim 1, wherein the first holding member holds the first optical element that emits light, and the second optical element receives the light emitted from the first optical element. Holding member, and a third optical element that is bonded and fixed between the first holding member and the second holding member, and condenses light emitted from the first optical element to the second optical element. And a third holding member holding the first optical element, wherein the light emitted from the first optical element is incident on the third optical element so as to change an incident position on the third holding element. On the other hand, the third holding member, which has been joined and fixed to each other in advance, is displaced in a plurality of directions, and the characteristic of light incident on the second optical element is measured to detect a state where the light has desired characteristics. The detecting step and the detecting step In characterized in that it comprises a re-bonding fixing step to provide a new joint fixing point between said third retaining member and the first holding member to maintain the detected state.
[0013]
Further, in the method for manufacturing an optical module according to claim 2 of the present invention, in the above-mentioned claim 1, the detecting step includes the step of holding the third holding member and / or the second holding state while holding the first holding member. By applying an external force to the member, the third holding member is displaced with respect to the first holding member, and a position where the external light is applied and a magnitude of the external force at which light incident on the second optical element has desired characteristics. Is detected.
[0014]
Further, in the method for manufacturing an optical module according to claim 3 of the present invention, in the above-described claim 2, the re-joining step comprises welding the first holding member and the third holding member to each other. A joint fixing point is provided, and the joint fixing point contracts after welding, thereby applying a tensile stress to a position shifted by 180 ° from a position where the external force is detected by the detecting means.
[0015]
Also, in the optical module manufacturing apparatus according to claim 4 of the present invention, the first holding member holding the first optical element that emits light, and the second holding member that receives the light emitted from the first optical element. A second holding member that holds the optical element, and a third holding member that is bonded and fixed between the first holding member and the second holding member and condenses light emitted from the first optical element to the second optical element. An apparatus for manufacturing an optical module comprising: a third holding member holding an optical element; wherein the first holding unit changes an incident position of light emitted from the first optical element with respect to the third optical element. Displacing means for displacing the third holding member, which has been previously joined and fixed to the member, in a plurality of directions, and displacing the third holding member with respect to the first holding member by driving the displacement means. Between the second optics Detecting means for measuring a characteristic of light incident on the element and detecting a state where the light has a desired characteristic; the first holding member and the third holding member for maintaining the state detected by the detecting means And a re-joining fixing means for providing a new joining fixing point between the two.
[0016]
According to a fifth aspect of the present invention, in the optical module manufacturing apparatus according to the fourth aspect, the displacement unit holds the first holding member rotatably around the optical axis of the first optical element. By moving relatively toward / away from the mechanism unit and the holding mechanism unit, an external force is applied from around the third holding member and / or the second holding member toward the optical axis of the first optical element. And an external force applying mechanism for applying the force.
[0017]
Also, in the optical module manufacturing apparatus according to claim 6 of the present invention, in the above-mentioned claim 5, the detection unit is configured to determine an external force applying position and an external force at which light incident on the second optical element has desired characteristics. And the re-joining and fixing means irradiates a laser having an output corresponding to the magnitude of the external force detected by the detecting means, so that the first holding member and the third holding member And a laser irradiation mechanism for providing the joint fixing point by welding the parts to each other.
[0018]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, preferred embodiments of a method and an apparatus for manufacturing an optical module according to the present invention will be described in detail with reference to the accompanying drawings.
[0019]
FIG. 1 conceptually shows an optical module manufacturing apparatus according to an embodiment of the present invention. The manufacturing apparatus exemplified here converts the light emitted from the optical module shown in FIG. 10, that is, the light emitting element (first optical element) LE such as an LD, into the auxiliary lens SL and the light condensing element, similarly to the above. This is for manufacturing an optical module OM that causes light to enter the optical fiber (second optical element) OF via a lens (third optical element) ML and guides light through the optical fiber OF. A housing (third holding member) B holding the condenser lens ML includes a package (first holding member) P for holding and a sleeve (second holding member) S for holding the optical fiber OF via the ferrule F. It is intended to be applied to the one fixed to each other via the.
[0020]
As shown in FIG. 1, the manufacturing apparatus includes a holding mechanism 10 for holding the optical module OM, an external force applying mechanism 20 for applying an external force to the optical module OM held by the holding mechanism 10, A laser irradiation mechanism 30 for irradiating the optical module OM held by the mechanism 10 with a laser.
[0021]
As shown in FIG. 2, the holding mechanism unit 10 includes a guide member 12 on the upper surface of a θ stage 11 that rotates around a rotation axis C along the vertical direction, and a slide member 13 on the upper side of the guide member 12. It has. The guide member 12 has an L-shape in which a guide base portion 12a and a guide holding portion 12b are integrally formed at right angles to each other, and is fixed to the upper surface of the θ stage 11 via the guide base portion 12a. The slide member 13 has an L-shape in which a slide base 13a and a slide holding portion 13b are integrally formed at right angles to each other, and a slide table is provided between the slide base 13a and the guide base 12a of the guide member 12. The slide holding portion 13b and the guide holding portion 12b of the guide member 12 are disposed above the guide member 12 in such a manner that the slide holding portion 13b and the guide holding portion 12b of the guide member 12 move toward and away from each other.
[0022]
The guide base 12a of the guide member 12 extends on the upper surface of the θ stage 11 in a radial direction about the turning axis C. The guide pinching portion 12b of the guide member 12 has a package P of the optical module OM on a surface of the slide member 13 facing the slide pinching portion 13b (hereinafter, simply referred to as the guide pinching surface 12c) in such a manner that the optical fiber OF faces vertically upward. 6 is arranged at a position where the optical axis LEC of the light emitting element LE (see FIG. 6A) can coincide with the turning axis C of the θ stage 11.
[0023]
A mounting portion 12d is provided on the guide holding surface 12c of the guide member 12, while a slide contact portion 13c is provided on each side of the slide holding portion 13b of the slide member 13.
[0024]
The mounting portion 12d holds the optical fiber OF vertically upward when the end surface of the package P of the optical module OM is in contact with the upper surface thereof, and joins and fixes the package P and the housing B. It is a trapezoidal portion for positioning the portion slightly above the guide holding portion 12b of the guide member 12 and the slide holding portion 13b of the slide member 13. The slide contact portions 13c project from both sides of the slide holding portion 13b toward the guide holding portion 12b of the guide member 12, and contact the mounting portion 12d at a position avoiding the mounting portion 12d. This is for holding the package P of the optical module OM between the optical module OM and the guide holding surface 12 c of the guide member 12.
[0025]
On the other hand, the holding mechanism 10 is provided with a linear motion actuator 15 between the guide base 12a of the guide member 12 and the slide base 13a of the slide member 13, while the guide holding section 12b of the guide member 12 and the slide member An elastic return member 16 is provided between the slide holding portion 13b and the slide holding portion 13b, and a heat radiation mechanism 17 is provided on the guide holding portion 12b of the guide member 12.
[0026]
The linear motion actuator 15 is for moving the slide holding portion 13b of the slide member 13 close to the guide holding portion 12b of the guide member 12, and in this embodiment, a pneumatic drive type cylinder actuator is applied. . The elastic return member 16 is for pressing the slide holding portion 13b of the slide member 13 in the direction of always moving away from the guide holding portion 12b of the guide member 12, and in the present embodiment, a coil spring is applied. . The heat dissipating mechanism 17 is for dissipating heat through the back side surface of the guide holding portion 12b, and is not explicitly shown in the drawing, but in the present embodiment, a thermo module for temperature adjustment, a heat dissipating fin, a cooling fan, etc. Is provided. The configuration of these components is optional.
[0027]
In the holding mechanism 10 configured as described above, when the package P of the optical module OM is brought into contact with the mounting portion 12d of the guide member 12 and the linear motion actuator 15 is driven from this state, the pressing force of the elastic return member 16 The slide member 13 moves in opposition to the above, and the slide holding portion 13b moves closer to the guide holding portion 12b of the guide member 12, and the optical axis LEC of the light emitting element LE moves to the turning axis C of the θ stage 11. The optical module OM can be sandwiched and held between the guide sandwiching portion 12b of the guide member 12 and the slide contact portion 13c of the slide member 13 with the optical module OF being aligned and the optical fiber OF being directed vertically upward.
[0028]
When the drive of the linear motion actuator 15 is stopped from the above-described state, the slide holding portion 13b of the slide member 13 moves away from the guide holding portion 12b of the guide member 12 by the elastic restoring force of the elastic return member 16, and the guide member The optical module OM can be removed from between the guide holding portion 12b of the slide 12 and the slide contact portion 13c of the slide member 13.
[0029]
As shown in FIG. 3, the external force applying mechanism 20 includes a push unit on the upper surface of the X stage 21. The X stage 21 slides along the horizontal direction in a manner of moving toward and away from the holding mechanism unit 10 described above. The push unit includes a reference member 22 on the upper surface of the X stage 21 and a pressing member 23 above the reference member 22. The reference member 22 has an L-shape formed by fixing a reference base 22a and a reference wall 22b to each other at a right angle to each other. The reference member 22 is attached to the X stage 21 via the lower surface of the reference table 22a in such a manner that the reference table 22a is horizontal and the reference wall 22b is located at a position separated from the turning axis C of the θ stage 11 on the reference table 22a. It is stuck. The pressing member 23 has a U-shape in a side view in which a pressing table 23a and a front wall 23b and a rear wall 23c extending at right angles from both ends of the pressing table 23a in the same direction are integrally formed. It is. The pressing member 23 is provided with a slide table 24 interposed between the pressing table 23a and the reference table 22a of the reference member 22 in a state where the rear wall 23c faces the reference wall 22b of the reference member 22. The reference wall 22b of the reference member 22 and the reference wall 22b are disposed above the reference member 22 in such a manner as to move toward and away from each other.
[0030]
On the other hand, in the external force applying mechanism 20, an elastic pressing member 25 is provided between a reference wall 22b of the reference member 22 and a rear wall 23c of the pressing member 23, and a pusher 26 is provided on a front wall 23b of the pressing member 23. Is provided. The elastic pressing member 25 is for pressing the pressing member 23 in a direction in which the pressing member 23 moves away from the reference wall 22b of the reference member 22 when the pressing member 23 moves close to the reference wall 22b. A known coil spring is applied. The pusher 26 is a small-diameter, high-rigidity columnar member whose front end surface is flattened, and extends horizontally from the front surface of the front wall 23b. The center axis of the pusher 26 is slightly higher than the guide holding section 12b of the guide member 12 in the holding mechanism section 10 described above, and the extension of the center axis of the pusher 26 corresponds to the position of the θ stage 11 in the holding mechanism section 10. When the optical module OM is held between the guide holding portion 12b of the guide member 12 and the slide holding portion 13b of the slide member 13 in the holding mechanism 10 described above, Thus, the distal end face is arranged to face the sleeve S of the optical module OM. Although not shown in the drawing, the center axis of the pusher 26 is also located on a vertical plane including the slide axis of the X stage 21 described above.
[0031]
As shown in FIGS. 4A and 4B, the laser irradiation mechanism 30 includes a laser irradiation head 33 at the tip of an arm 32 extending from the Z stage 31. The Z stage 31 moves up and down along a guide rail 31a that stands vertically upward. The arm 32 temporarily extends from the Z stage 31 in the horizontal direction, and then extends downward in an inclined manner, and holds the above-mentioned laser irradiation head 33 on the upper surface of the inclinedly extended portion. The laser irradiation head 33 is for irradiating a YAG laser from an emission port (not shown) on the front surface, and holds the laser at a position where the emission direction of the laser is shifted by 180 ° from the central axis extension of the pusher 26 described above. The mechanism unit 10 is disposed so as to pass through the turning axis C of the θ stage 11. In addition, when the laser irradiation head 33 holds the optical module OM between the guide holding portion 12b of the guide member 12 and the slide holding portion 13b of the slide member 13 in the holding mechanism 10, the package of the optical module OM is provided. The focus is set so that the focal point coincides with the joint fixing portion between P and the housing B.
[0032]
FIG. 5 shows control means for controlling the holding mechanism 10, the external force applying mechanism 20, and the laser irradiation mechanism 30 described above. As shown in FIG. 5, the control unit 40 includes a main control unit 41, an LD drive unit 42, an optical characteristic measurement unit 43, a heat radiation mechanism drive unit 44, a θ stage drive unit 45, an X stage drive unit 46, and an external force calculation. A section 47 and a laser drive section 48 are provided.
[0033]
The main control unit 41 controls the control unit 40 in accordance with programs and data stored in the memory 49. The LD drive section 42 is for passing a drive current through the electrode CE to the optical module OM sandwiched and held by the holding mechanism section 10 when a drive signal is given from the main control section 41. The optical characteristic measuring unit 43 measures the characteristics of the light led out through the optical fiber OF while the driving current is flowing from the LD driving unit 42 to the optical module OM, and transmits the measurement result to the main control unit. 41. The light characteristics measured by the light characteristic measuring unit 43 include light output, wavelength, waveform, and the like. The heat radiating mechanism driving section 44 is for supplying a driving signal to the heat radiating mechanism 17 while a driving current is flowing from the LD driving section 42 to the optical module OM. The stage drive unit 45 drives the θ stage 11 when a drive signal is given from the main control unit 41 to rotate the optical module OM sandwiched and held by the holding mechanism unit 10 around the rotation axis C. It is for. The X stage drive section 46 drives the X stage 21 when a drive signal is given from the main control section 41 to slide the push unit. The external force calculation unit 47 monitors the relative movement distance of the pressing member 23 with respect to the reference member 22 in the above-described external force applying mechanism unit 20, and determines the relative movement distance of the reference member 22 and the pressing member 23 and the known elastic pressing member 25. This is for calculating the magnitude of the external force (= spring constant × relative moving distance) based on the spring constant and giving the calculation result to the main control unit 41. When a calculation result is given from the external force calculation unit 47 through the main control unit 41, the laser drive unit 48 calculates an output of a laser capable of applying a tensile stress equivalent to the calculation result, and calculates the calculated output. This is for giving a drive signal to the laser irradiation mechanism 30 to irradiate the laser.
[0034]
Hereinafter, a method of manufacturing the optical module OM by using the manufacturing apparatus configured as described above will be described. The manufacturing apparatus according to the present embodiment may be incorporated into an existing manufacturing line for manufacturing the optical module OM, or may be used as a correction dedicated line for correcting the optical module OM manufactured through the existing manufacturing line. The installation mode is optional.
[0035]
First, an optical module in which a package P holding a light emitting element LE and a sleeve S holding an optical fiber OF via a ferrule F are already fixed to each other via a housing B holding the condenser lens ML. The OM is inspected to determine whether the light guided through the optical fiber OF has desired characteristics set in advance. In this case, as described above, the optical module OM to be inspected adjusts the relative positions of the package P, the housing B, and the sleeve S so that light derived from the optical fiber OF has desired characteristics. Thereafter, three positions having a phase shift of 120 ° in the circumferential direction are simultaneously irradiated with a YAG laser having the same output to fix them to each other.
[0036]
As a result of the inspection, as shown in FIG. 6A, with respect to the optical module OM in which the light output through the optical fiber OF has desired characteristics, it is possible to finish the manufacturing process and handle it as a product. Become.
[0037]
On the other hand, in the case of the optical module OM in which the light output through the optical fiber OF does not have the desired characteristics, that is, the light emitting element LE and the light are affected by shrinkage and deformation due to internal residual stress when the metals are welded to each other. As shown in FIG. 6B, the relative positions of the fiber OF and the condenser lens ML are shifted from the adjusted state, and as shown in FIG. 6B, the optical module OM in which the incidence efficiency of the light emitted from the light emitting element LE to the optical fiber OF is reduced is maintained. In the mechanism section 10, the package P is sandwiched and held between the guide sandwiching section 12b of the guide member 12 and the slide sandwiching section 13b of the slide member 13 with the optical fiber OF directed upward, and the optical axis of the light emitting element LE The LEC is made to coincide with the turning axis C of the θ stage 11. Further, the electrode CE of the optical module OM is connected to the LD driving section 42, the optical fiber OF is connected to the optical characteristic measuring section 43, and the heat radiation mechanism 17 of the holding mechanism section 10 is connected to the heat radiation mechanism driving section 44. At this time, the X stage 21 is in the initial state, and the distal end surface of the pusher 26 is arranged at a position sufficiently separated from the holding mechanism 10.
[0038]
When a start switch (not shown) is turned on from this state, a drive current is supplied to the optical module OM through the LD drive unit 42 by a drive signal from the main control unit 41, and light emitted from the light emitting element LE is supplied to the auxiliary lens SL and While being incident on the optical fiber OF via the condenser lens ML, the characteristic of light derived from the optical fiber OF via the optical characteristic measuring unit 43, for example, the output of light is measured. At this time, the main controller 41 appropriately drives the heat radiating mechanism 17 through the heat radiating mechanism driving section 44 to control the temperature of the optical module OM, thereby always maintaining the optical module OM at a desired temperature state.
[0039]
Next, the main controller 41 drives the X stage 21 through the X stage driver 46 to slide the push unit in a direction approaching the holding mechanism 10 by a preset distance. When the push unit slides, the distal end surface of the pusher 26 comes into contact with the peripheral surface of the sleeve S in the optical module OM, and the sleeve S is integrated with the housing B and thereafter displaced with respect to the package P. become. As a result, in the optical module OM, as shown in FIG. 6C, the incident position of the light emitted from the light emitting element LE to the condenser lens ML changes, and the output of the light incident on the optical fiber OF, that is, The output of the light measured by the light characteristic measuring unit 43 also changes accordingly. At this time, the pusher 26 presses the sleeve S of the optical module OM by driving the X stage 21, but the pressing force is applied via the elastic pressing member 25. Therefore, even if the X stage 21 slides carelessly, no excessive pressing force acts on the sleeve S of the optical module OM.
[0040]
When the sliding amount of the push unit reaches a preset distance, the main control unit 41 measures the light output through the optical characteristic measuring unit 43, and determines the measurement result and the rotational movement amount of the θ stage 11 at that time (the above-described rotation movement amount). Is stored in the memory 49 in association with each other. Thereafter, by driving the X stage 21, the push unit 26 is returned to the initial state so as to separate the pusher 26 from the optical module OM, and the θ stage 11 is rotated by the preset rotation amount through the θ stage driving unit 45. Rotate and move.
[0041]
Thereafter, the main control unit 41 repeats the above-described operation. After this operation is completed in the range of 360 °, that is, over the entire circumference of the sleeve S, the light output is output from the measurement results stored in the memory 49. The rotational movement amount of the θ stage 11 which becomes the maximum is specified, and the θ stage 11 is appropriately rotated and moved based on the specified rotational movement amount, so that the measurement result of the optical mechanism measuring unit 43 of the holding mechanism unit 10 becomes the maximum. To restore the lost state. As a result, when the optical module OM held by the holding mechanism unit 10 presses the sleeve S via the pusher 26, the output of light incident on the optical module OM is maximized.
[0042]
Next, the main control unit 41 drives the X stage 21 again through the X stage driving unit 46, thereby sequentially sliding the push units in the direction approaching the holding mechanism unit 10, and the optical module OM through the tip of the pusher 26. By pressing the sleeve S, the sleeve S and the housing B are integrated to give a displacement to the package P. Also in this case, the incident position of the light emitted from the light emitting element LE with respect to the condenser lens ML changes, and the output of the light incident on the optical fiber OF, that is, the output of the light measured by the optical characteristic measuring unit 43 also changes. Is the same as before. During this time, the main control unit 41 monitors the relative movement distance of the pressing member 23 with respect to the reference member 22 through the external force calculation unit 47, and measures the light output through the optical characteristic measurement unit 43. The external force is calculated from the relative movement distance of the pressing member 23 with respect to the reference member 22 at the time when the condition becomes, that is, the pressing force applied via the pusher 26 is calculated.
[0043]
The main control unit 41 that has calculated the pressing force drives the X stage 21 to return the push unit to the initial state so that the pusher 26 is separated from the optical module OM. Is applied to the optical module OM, and a new joint fixing point FP 'is provided on the optical module OM. A joint fixing point FP 'newly provided by this laser irradiation is a position 180 ° shifted from the position where the pressing force by the pusher 26 is applied at the joint between the package P and the housing B of the optical module OM. In addition, a tensile stress equivalent to the pressing force given by the pusher 26 is applied to the portion. That is, the optical module OM is maintained in the same state as when the pressing force is applied by the pusher 26 even when the pusher 26 is separated.
[0044]
Therefore, according to the manufacturing apparatus, in a state where the package P, the housing B, and the sleeve S are already bonded and fixed, the optical module OM in which the output of the light output through the optical fiber OF is lower than the target value, The light output can be reliably corrected to a target value or more, and the yield can be improved.
[0045]
In addition, the efficiency of light incidence on the optical fiber OF can be improved without once releasing the joint and fixed state of the package P, the sleeve S and the housing B. There is no need to perform operations such as polishing, and the situation that the production operation becomes extremely complicated is not caused.
[0046]
Note that, in the above-described embodiment, the optical module OM that causes the light emitted from the light emitting element LE to enter the optical fiber OF via the auxiliary lens SL and the condenser lens ML, and guides the light through the optical fiber OF. Although a manufacturing apparatus for manufacturing is illustrated, the present invention is not limited to this.
[0047]
For example, as shown in FIG. 7A, the light emitted from the light emitting element LE without the auxiliary lens is made incident on the optical fiber OF via the condenser lens ML, and the light is transmitted through the optical fiber OF. An optical module OM to be led out, in which a package (first holding member) P for holding the light emitting element LE and a sleeve (second holding member) S for holding the optical fiber OF via the ferrule F are already collected. The present invention can also be applied to a case where the optical lens ML is joined and fixed to each other via a housing (third holding member) B that holds the optical lens ML. When the distal end surface of the pusher 26 abuts on the peripheral surface of the sleeve S in the optical module OM, the sleeve S becomes integral with the housing B and is displaced with respect to the package P. become. Accordingly, as shown in FIG. 7B and FIG. 7C, the incident position of the light emitted from the light emitting element LE to the condenser lens ML changes, and the characteristics of the light incident on the optical fiber OF, that is, the light The characteristics of the light measured by the characteristic measuring section 43 also change accordingly, and the above-described manufacturing apparatus can be applied as it is. Further, the light emitted from the light emitting element LE is not limited to the optical module OM configured to be incident on the optical module OM via the condenser lens ML, but may be an optical module for receiving light, for example, an optical fiber ( The same applies to an optical module in which light emitted from the first optical element is made incident on a light receiving element (second optical element) such as a PD (photodiode) via a condenser lens (third optical element). It is possible to apply to.
[0048]
Further, in the above-described embodiment, only a new joint fixing point FP 'is provided at a position shifted by 180 ° from the position where the external force is applied, so that a tensile stress is applied here. As shown in (1), the same operation and effect can be obtained even if new joint fixing points FP 'are simultaneously provided at portions symmetrical to each other with respect to a position shifted by 180 ° from the position where the external force is applied. In other words, if a new joint fixing point FP 'is provided at a position symmetrical to each other with respect to a position shifted by 180 ° from the position where external force is applied, a tensile stress is applied to a position shifted by 180 ° from the position where external force is applied. Therefore, it is possible to maintain a state in which light incident on the optical fiber has desired characteristics. The new fixing point FP 'is not necessarily limited to welding by laser irradiation, but may be an adhesive or solder, for example. However, in these cases, since shrinkage and deformation due to welding cannot be expected, it is preferable to provide a new joint fixing point FP 'while the external force is applied by the pusher 26.
[0049]
In the above-described embodiment, the X stage 21 is provided in the external force applying mechanism 20, and the push unit of the external force applying mechanism 20 is moved close to the holding mechanism 10 to be held by the holding mechanism 10. The external force is applied to the optical module OM. For example, as shown in FIG. 9, the push unit of the external force applying mechanism 20 is fixedly installed on the floor FD, while the θ stage 11 of the holding mechanism 10 is An X stage 18 may be provided between the optical module OM and the floor FD, and an external force may be applied to the optical module OM held by the holding mechanism 10 by moving the holding mechanism 10 close to the push unit. . In FIG. 9, the same components as those in the embodiment shown in FIG. 1 are denoted by the same reference numerals.
[0050]
Further, in the above-described embodiment, the displacement is applied between the package P and the housing B via the sleeve S. However, the external force is directly applied to the housing B to cause the displacement between the package P and the housing P. Of course.
[0051]
【The invention's effect】
As described above, according to the optical module manufacturing method of the present invention, a state in which light incident on the second optical element has desired characteristics is detected in the detecting step, and the state is changed in the re-bonding fixing step. Since this is maintained, the incidence efficiency of the light emitted from the first optical element to the second optical element can be reliably set to a predetermined target value or more, and the yield can be improved. In addition, in the rejoining and fixing step, there is no need to perform operations such as polishing on the first to third holding members, so that a situation in which the manufacturing operation becomes extremely complicated does not occur.
[0052]
Further, according to the optical module manufacturing apparatus of the present invention, the state in which the light incident on the second optical element has the desired characteristics is detected by the displacement means and the detection means, and the state is maintained by the rejoining and fixing means. Therefore, the incidence efficiency of the light emitted from the first optical element to the second optical element can be reliably set to a predetermined target value or more, and the yield can be improved. In addition, in the rejoining and fixing step, there is no need to perform operations such as polishing on the first to third holding members, so that a situation in which the manufacturing operation becomes extremely complicated does not occur.
[Brief description of the drawings]
FIG. 1 is a conceptual diagram showing an optical module manufacturing apparatus according to a first embodiment of the present invention.
FIG. 2 is a view showing a holding mechanism of the manufacturing apparatus shown in FIG.
FIG. 3 is a view showing an external force applying mechanism of the manufacturing apparatus shown in FIG. 1;
FIG. 4 is a view showing a laser irradiation mechanism of the manufacturing apparatus shown in FIG. 1;
FIG. 5 is a block diagram illustrating a control unit of the manufacturing apparatus shown in FIG. 1;
6A and 6B show an optical module to be manufactured according to the present invention, in which FIG. 6A is a cross-sectional side view, FIG. 6B is a conceptual diagram in which light incidence efficiency on a second optical element is lower than a target value, (c) is a conceptual diagram showing a state where the third holding member is displaced with respect to (b).
7A and 7B show another optical module to be manufactured according to the present invention, in which FIG. 7A is a cross-sectional side view, and FIG. 7B is a conceptual view in which light incidence efficiency on a second optical element is lower than a target value. (C) is a conceptual diagram showing a state where the third holding member is displaced with respect to (b).
FIG. 8 is a plan view showing a modification of the laser irradiation mechanism shown in FIG.
FIG. 9 is a conceptual diagram showing a modified example of the manufacturing apparatus shown in FIG.
10A is a sectional side view conceptually showing a general structure of an optical module, and FIG. 10B is a diagram showing an end face of the optical module shown in FIG.
[Explanation of symbols]
10 Holding mechanism
11 θ stage
12 Guide member
12a Guide base
12b Guide holding part
12c Guide holding surface
12d mounting part
13 Slide member
13a Slide base
13b Slide holding section
13c Slide contact part
14 Slide table
15 Linear actuator
16 Elastic return member
17 Heat dissipation mechanism
18 X Stage
20 External force applying mechanism
21 X Stage
22 Reference material
22a Reference platform
22b Reference wall
23 Pressing member
23a Press table
23b front wall
23c rear wall
24 slide table
25 Elastic pressing member
26 Pusher
30 Laser irradiation mechanism
31 Z stage
31a Guide rail
32 arms
33 Laser irradiation head
40 control means
41 Main control unit
42 LD driver
43 Optical characteristics measurement section
44 Heat dissipation mechanism drive
45 θ stage driver
46 X stage driver
47 External force calculator
48 Laser driver
49 memory
B case
C pivot axis
CE electrode
F Ferrule
FD floor
FP 'New joint fixing point
LE light emitting element
LEC optical axis
ML condenser lens
OF optical fiber
OM optical module
P package
S sleeve
SL auxiliary lens

Claims (6)

A first holding member that holds a first optical element that emits light,
A second holding member that holds a second optical element to which light emitted from the first optical element is incident;
A third holding member holding a third optical element fixed and joined between the first holding member and the second holding member and condensing light emitted from the first optical element to the second optical element; A method for manufacturing an optical module comprising:
Displacing in a plurality of directions the third holding member which has been joined and fixed to the first holding member in advance so as to change the incident position of the light emitted from the first optical element with respect to the third optical element; A step of measuring characteristics of light incident on the second optical element, and detecting a state in which the light has desired characteristics;
An optical module manufacturing method, comprising: re-joining and fixing a new joint fixing point between the first holding member and the third holding member to maintain the state detected in the detecting step. . The detecting step includes applying an external force to the third holding member and / or the second holding member in a state where the first holding member is held, thereby causing the third holding member to move with respect to the first holding member. The method for manufacturing an optical module according to claim 1, wherein the optical module is displaced to detect a position where an external force is applied and a magnitude of the external force at which light incident on the second optical element has desired characteristics. In the re-joining step, the first holding member and the third holding member are welded to each other to provide the joint fixing point, and the joint fixing point contracts after welding, so that the detecting means The method for manufacturing an optical module according to claim 2, wherein a tensile stress is applied to a position shifted by 180 degrees from the applied position of the external force. A first holding member that holds a first optical element that emits light,
A second holding member that holds a second optical element to which light emitted from the first optical element is incident;
A third holding member holding a third optical element fixed and joined between the first holding member and the second holding member and condensing light emitted from the first optical element to the second optical element; An apparatus for manufacturing an optical module provided with:
Displacement for displacing the third holding member, which is previously joined and fixed to the first holding member, in a plurality of directions with respect to the first holding member so as to change the incident position of the light emitted from the first optical element with respect to the third optical element. Means,
The characteristic of light incident on the second optical element while the third holding member is displaced with respect to the first holding member by driving the displacement means is measured, and the light has desired characteristics. Detecting means for detecting a state;
Manufacturing an optical module, comprising: a rejoining fixing means for providing a new joining fixing point between the first holding member and the third holding member so as to maintain the state detected by the detecting means. apparatus. A holding mechanism for holding the first holding member rotatably around an optical axis of the first optical element;
An external force for applying an external force from the periphery of the third holding member and / or the second holding member toward the optical axis of the first optical element by relatively moving toward / away from the holding mechanism unit; The apparatus for manufacturing an optical module according to claim 4, further comprising an application mechanism. The detecting means detects an applied position of external force at which light incident on the second optical element has desired characteristics and a magnitude of the external force, and the rejoining and fixing means detects the external force. A laser irradiation mechanism that irradiates a laser having an output corresponding to the magnitude of the external force thus applied and welds the first holding member and the third holding member to each other to provide the joint fixing point. The apparatus for manufacturing an optical module according to claim 5.

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