JP2004068935A - Diaphragm valve device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a new diaphragm valve device capable of solving problems such as coagulation at once by providing a function capable of regulating flow rate of fluid in a wide range and fully opening a valve element. <P>SOLUTION: In this device, a diaphragm part 21 with a fixed outer peripheral part 22 is provided in a valve chest 13 having inflow part 11 and outflow part 12 for controlled fluid, and the valve element 20 to control flow rate amount of fluid is arranged in the outflow part 12. The device has an opening regulating mechanism 30 for retreating and advancing the valve element 20 for the outflow part 12 to regulate the opening amount. The device is provided with a full open switching mechanism 60 for reciprocating the valve element 20 between a regulated opening position F1 regulated by the opening regulating mechanism 30 and a full open position R1 retreated from the regulated opening position F1. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a diaphragm valve device for fluid, and more particularly to a diaphragm valve device such as a needle valve for supplying a fixed amount of liquid.
[0002]
[Prior art]
For example, in a semiconductor manufacturing process, it is required to supply slurry to a wafer quantitatively and stably. Conventionally, a method of discharging a slurry controlled to a constant pressure by an orifice at a constant rate has been adopted. .
[0003]
However, in the case of using the orifice, when the supply amount of the slurry is changed, the pressure is changed, but this method cannot make the variable range of the supply amount wide. There was a problem.
[0004]
Therefore, it has been proposed to replace the method using an orifice with a method using a needle valve capable of finely adjusting the flow rate in order to widen the variable range. However, the flow path of the orifice has a circular cross-section, whereas the flow path of the needle valve has a ring-shaped cross-section and a narrow gap. There were many problems with that.
[0005]
[Problems to be solved by the invention]
The present invention has been made in view of such a situation, and is capable of adjusting a flow rate of a fluid in a wide range and has a function of fully opening a valve body, thereby solving problems such as solidification and the like at a stroke. The present invention provides a novel diaphragm valve device structure that can be used.
[0006]
[Means for Solving the Problems]
That is, according to the first aspect of the present invention, a valve body having an outer peripheral portion fixed to a valve chamber having an inflow portion and an outflow portion of a controlled fluid, and a valve body for controlling the outflow amount of the fluid is disposed at the outflow portion. An opening adjustment mechanism for adjusting the opening amount of the valve body by moving the valve body forward and backward with respect to the outflow portion, and an adjustment opening position adjusted by the opening degree adjustment mechanism and the adjustment opening position. The present invention relates to a diaphragm valve device provided with a full-open switching mechanism for reciprocating between a full-open position retracted from a position.
[0007]
According to a second aspect of the present invention, the opening adjustment mechanism comprises a screw device that advances and retreats the operating member integrally connected to the rear portion of the valve element in the valve axis direction of the valve element by turning an adjustment screw. The present invention relates to a diaphragm valve device described in (1).
[0008]
The invention according to claim 3 relates to the diaphragm valve device according to claim 2, wherein the screw device comprises a differential screw mechanism including a plurality of screw devices having different screw pitches.
[0009]
According to a fourth aspect of the present invention, the full-open switching mechanism comprises a cylinder device that reciprocates an operating member integrally connected to the rear portion of the valve body by switching a working fluid. The present invention relates to a diaphragm valve device.
[0010]
The invention according to claim 5 relates to the diaphragm valve device according to any one of claims 1 to 4, wherein the fully-open switching mechanism has a limiting member that regulates the fully-open position so as to be adjustable.
[0011]
The invention according to claim 6 relates to the diaphragm valve device according to any one of claims 1 to 5, wherein the valve body has a needle shape.
[0012]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.
1 is a longitudinal sectional view showing a diaphragm valve device according to an embodiment of the present invention, FIG. 2 is a longitudinal sectional view showing a fully opened state of the diaphragm valve device of FIG. 1, and FIG. 3 is another diaphragm valve device of the present invention. FIG. 4 is a longitudinal sectional view showing a fully opened state of the diaphragm valve device of FIG. 3, FIG. 5 is a longitudinal sectional view showing still another embodiment of the diaphragm valve device of the present invention, and FIG. FIG. 6 is a longitudinal sectional view showing a fully opened state of the diaphragm valve device of FIG. 5.
[0013]
As shown in FIGS. 1 and 2, the diaphragm valve device 10 (10A) of the present invention controls the outflow amount of the fluid to the outflow portion 12 of the valve chamber 13 having the inflow portion 11 and the outflow portion 12 of the controlled fluid. A valve body 20 is disposed. In the figure, reference numerals 14 and 15 denote valve blocks, 16 denotes an outside air communication port, and x denotes a valve axis direction in which the valve element 20 moves. When the controlled fluid is a chemical solution or the like, the valve blocks 14, 15 and the valve body 20 are desirably formed of a fluorine resin or the like having high corrosion resistance and chemical resistance.
[0014]
As shown in the figure, the valve body 20 is formed of a so-called diaphragm valve having a diaphragm portion 21 having an outer peripheral portion 22 fixed to the valve chamber 13. In such a diaphragm valve, the controlled fluid is prevented from coming into contact with the valve body mechanism by the diaphragm portion 21, and thus there is an advantage that clean fluid control can be performed.
[0015]
Further, the valve element 20 represents a so-called needle valve in which the valve element shape is formed into a needle shape, as defined in the fifth aspect of the present invention. As described above, the needle valve has an advantage that the flow rate can be easily adjusted, particularly, finely adjusted. It is needless to say that the present invention is not limited to the needle-shaped valve body but can be applied to other shapes.
[0016]
In addition, the diaphragm valve device 10 (10A) of the present invention has an opening adjustment mechanism 30 for moving the valve body 20 forward and backward with respect to the outflow portion 12 to adjust the opening amount, and opening the valve body 20 to the open position. A full-open switching mechanism 60 is provided for reciprocating between an adjustment opening position adjusted by the degree adjustment mechanism 30 and a full opening position retracted from the adjustment opening position. FIG. 1 shows a state in which the valve body 20 is advanced to the adjustment opening position F1 so that the opening amount of the outflow portion 12 becomes a predetermined amount, and FIG. 2 shows the state in which the valve body 20 is moved from the adjustment opening position F1 of FIG. This shows a state in which the vehicle is retracted.
[0017]
First, the opening adjustment mechanism 30 will be described. In the embodiment, as described in the second aspect of the present invention, the operating member 31 integrally connected to the rear part of the valve body 20 is turned by the adjustment screw 50 to rotate the valve. Screw devices B1 and B2 that advance and retreat in the valve axis direction x of the body 20 are disclosed. In the drawing, reference numeral 17 denotes an operating block having an operating space 32 for an operating member 31, and reference numeral 18 denotes an adjusting block disposed at the rear of the operating block 17. The operation space 32 of the operation block 17 is formed in a cylindrical shape in relation to a fully-open switching mechanism 60 described later, and the operation member 31 is inserted into the operation space 32.
[0018]
The adjustment block 18 has an outer peripheral screw portion 36 formed on the outer periphery thereof to be screwed with the inner peripheral screw portion 51 of the adjustment screw 50 (screw device B1), and a through-hole portion 37 into which the screw rod 40 is fitted at the center thereof. Is formed. The screw rod 40 penetrates the adjustment block 18 and its tip reaches the operating member 31, and the outer peripheral screw portion 41 at the front is screwed to the inner peripheral screw portion 33 of the operating member 31 (screw device B <b> 2). On the other hand, an engagement groove 42 that engages with the engagement projection 52 of the adjusting screw 50 is formed at the rear portion of the screw rod 40 so that the screw rod 40 rotates integrally with the rotation of the adjusting screw 50. It has become. Note that the engagement protrusion 52 of the adjustment screw 50 and the engagement groove 42 of the screw rod 40 are movable in the valve axis direction x.
[0019]
Then, the rotation of the screw bar 40 is transmitted to the inner peripheral thread 33 of the operating member 31 via the outer peripheral thread 41. As shown in the drawing, the rotation of the operating member 31 is restricted by the rotation preventing portion 34 and the guide groove 19 formed in the inner wall of the operating space 32 of the operating block 17. Move. The rotation preventing portion 34 of the operation member 31 can move the guide groove 19 of the operation block 17 in the valve axis direction x. As a result, the valve element 20 advances and retreats in the valve axis direction x.
[0020]
Next, the fully open switching mechanism 60 will be described. The full-open switching mechanism 60 is for reciprocating the valve body 20 between an adjustment opening position F1 adjusted by the opening adjustment mechanism 30 and a full opening position R1 retracted from the adjustment opening position F1. In the embodiment, as shown and shown as the third aspect of the present invention, the fully-open switching mechanism 60 is configured to reciprocate the operating member 31 integrally connected to the rear portion of the valve body 20 by switching the working fluid. It is composed of Reference numerals 62 and 63 in the figure denote an inlet / outlet of a working fluid (for example, air), and reference numeral 64 denotes a forward spring body. Here, the above-described operation block 17 corresponds to a cylinder block, the operation member 31 corresponds to a piston, and the operation space 32 corresponds to a cylinder chamber.
[0021]
Then, when the working fluid flows into the front portion 32f of the working space 32 from the outlet port 62, the valve body 20 retreats to the fully open position R1 shown in FIG. When the inflow of the working fluid is stopped and exhausted from the front portion 32f of the working space 32, the operating member 31 advances by the urging force of the spring body 64, and the valve body 20 returns to the adjustment opening position F1 shown in FIG. .
[0022]
The case where the valve body 20 is retracted to the fully open position R1 by the fully open switching mechanism 60 means that, for example, when a certain amount of slurry or the like flows out, clogging occurs between the valve body 20 and the outflow portion 12 as it is, Since the drop occurs and eventually leads to the closed state, it is performed to avoid this. Before the flow rate decreases, the valve body 20 can be retracted to the fully open position R1 to discharge the solidified slurry fluid. Further, the valve body 20 may be retracted to the fully open position R1 periodically for a predetermined time. Further, if necessary, the flow path can be completely flushed by switching from a controlled fluid such as slurry to clean water such as pure water at the fully open position R1. Of course, the flow of the fluid may be controlled in two stages: the adjustment opening position F1 and the full opening position R1. In this case, switching control can be performed with one touch.
[0023]
In the diaphragm valve device 10 (10B) shown in FIGS. 3 and 4, the screw device of the opening adjustment mechanism 30B includes a plurality of screw devices B3 and B4 having different screw pitches. Consists of a differential screw mechanism. FIG. 3 shows a state where the valve body 20 has been advanced to the adjustment opening position F2, and FIG. 4 shows a state where the valve body 20 has been retracted from the adjustment opening position F2 of FIG. 3 to the fully opened position R2.
[0024]
In this example, the rotation of the adjusting screw 50B is transmitted to the screw rod 40B via the fixed inner screw member 55. Reference numeral 52B in the figure denotes an engagement projection formed on the adjustment screw 50B, reference numeral 56 denotes an inner peripheral thread portion of the fixed internal screw member 55, and reference numeral 57 denotes a detent. The engagement projection 52B of the adjustment screw 50B engages with the engagement notch groove 42B of the screw rod 40B to rotate integrally. The fixed inner screw member 55 is prevented from rotating by the detent 57 engaging with the notch groove 19B of the adjustment block 18B, and the rear outer threaded portion 43 (screw) of the screw bar 40B screwed with the inner peripheral threaded portion 56 is formed. The screw rod 40B is rotated via the device B3). Then, the operating member 31 is advanced and retracted via the inner peripheral screw portion 33 (the screw device B4) of the operating member 31 that is screwed with the front outer peripheral screw portion 41 of the screw rod 40B. The engaging projection 52B formed on the adjusting screw 50B and the engaging notch groove 42B of the screw rod 40 are movable in the valve axis direction x. The inside of the notch groove portion 18B of 18B can be moved in the valve axis direction x. 3 and 4, the same reference numerals as those described above denote the same components.
[0025]
Like the opening adjustment mechanism 30B of this embodiment, two screw devices formed on the screw rod 40B, that is, an inner screw portion 56 of the fixed inner screw member 55 and a rear outer screw portion 43 of the screw rod 40B are provided. When the screw device B3 and the screw device B4 including the front outer screw portion 41 of the screw rod 40B and the inner screw portion 33 of the actuating member 31, the screw pitch of both is changed (for example, the screw device). By making the screw pitch of B4 smaller than the screw pitch of the screw device B3), a differential screw mechanism can be provided, and fine adjustment of the adjustment opening position F2 of the valve body 20 by the adjustment screw 50 can be performed easily and easily. Can be.
[0026]
Next, a diaphragm valve device 10C shown in FIG. 5 and FIG. 6 is an embodiment provided with a limiting member 70 that regulates the fully open position R3 so as to be adjustable, as defined in the invention of claim 4. This diaphragm valve device 10C is an example in which a stopper 71 which is a limiting member 70 is provided in the diaphragm valve device 10 (10A) shown in FIGS. 1 and 2 described above, and the same members are denoted by the same reference numerals. The restricting member 70 is screwed from the upper part of the main body of the adjusting screw 50 so as to be able to advance and retreat so as to be substantially coaxial with the screw rod 40. Reference numeral 72 denotes a knob for adjusting the rotation of the limiting member 70, 73 denotes a shaft, and 74 denotes an outer thread formed on the outer periphery of the shaft, which is screwed with the inner thread 53 of the adjusting screw 50. . The tip of the shaft 73 is at the limit position T. Reference numeral 75 denotes a lock nut for fixing the position of the restriction member 70.
[0027]
As shown in FIG. 6, when the fully-open switching mechanism 60 is operated to retract the valve body 20 from the adjustment opening position F3, the operating member 31 becomes the fully-opened position R3 at the limited position T where the operating member 31 contacts the limiting member 70. . Thus, the desired full open position R3 of the valve body 20 is obtained by the restriction member 70. Incidentally, in the case where the restricting member 70 is not provided, for example, in the case of FIGS. 2 and 4, the positions where the retreat of the operating member 31 is restricted are the fully open positions R1 and R2. In this example, the flow of the fluid can be controlled with one touch by two stages of the adjustment opening position F3 and the adjusted full opening position R3.
[0028]
【The invention's effect】
As shown and described above, according to the diaphragm valve device of the present invention, the diaphragm valve device has the opening adjustment mechanism for moving the valve body to and from the outflow portion to adjust the opening amount thereof, and the valve body is opened. Since it is provided with a full-open switching mechanism for reciprocating between an adjustment opening position adjusted by the degree adjustment mechanism and a full opening position retracted from the adjustment opening position, the flow rate of the fluid can be adjusted in a wide range. At the same time, by providing a function to fully open the valve, problems such as clogging and solidification can be solved at once. Further, if necessary, the flow of the fluid can be controlled with one touch by two stages of the adjustment opening position and the full opening position.
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional view showing a diaphragm valve device according to one embodiment of the present invention.
FIG. 2 is a longitudinal sectional view showing a fully opened state of the diaphragm valve device of FIG. 1;
FIG. 3 is a longitudinal sectional view showing another embodiment of the diaphragm valve device of the present invention.
FIG. 4 is a longitudinal sectional view showing a fully opened state of the diaphragm valve device of FIG. 3;
FIG. 5 is a longitudinal sectional view showing still another embodiment of the diaphragm valve device of the present invention.
FIG. 6 is a longitudinal sectional view showing a fully opened state of the diaphragm valve device of FIG. 5;
[Brief description of reference numerals]
DESCRIPTION OF SYMBOLS 10 Diaphragm valve device 11 Inflow part 12 Outflow part 13 Valve room 14, 15 Valve block 17 Operation block 18 Adjustment block 20 Valve element 21 Diaphragm part 30 Opening adjustment mechanism 31 Operating member 32 Operating space 40 Screw rod 50 Adjustment screw 60 Fully open switching Mechanisms 62, 63 Working fluid outflow / inlet port 64 Spring body 70 Restriction member

Claims (6)

In a valve body having a diaphragm portion whose outer peripheral portion is fixed to a valve chamber having an inflow portion and an outflow portion of a controlled fluid, and a valve body that controls an outflow amount of the fluid is arranged in the outflow portion,
The valve body has an opening adjustment mechanism for moving the valve body forward and backward with respect to the outflow portion to adjust the opening amount, and the valve body is retracted from the adjustment opening position adjusted by the opening adjustment mechanism and the adjustment opening position. A diaphragm valve device comprising a fully open switching mechanism for reciprocating between a fully open position and a fully open position. The diaphragm valve device according to claim 1, wherein the opening adjustment mechanism comprises a screw device that advances and retreats an operating member integrally connected to the rear portion of the valve element in a valve axial direction of the valve element by turning an adjustment screw. 3. The diaphragm valve device according to claim 2, wherein the screw device comprises a differential screw mechanism including a plurality of screw devices having different screw pitches. The diaphragm valve device according to any one of claims 1 to 3, wherein the full-open switching mechanism includes a cylinder device that reciprocates an operating member integrally connected to a rear portion of the valve body by switching a working fluid. The diaphragm valve device according to any one of claims 1 to 4, wherein the fully-open switching mechanism has a limiting member that regulates the fully-open position so as to be adjustable. The diaphragm valve device according to any one of claims 1 to 5, wherein the valve body has a needle shape.

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