JP2004066606A5 - - Google Patents

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Publication number
JP2004066606A5
JP2004066606A5 JP2002228117A JP2002228117A JP2004066606A5 JP 2004066606 A5 JP2004066606 A5 JP 2004066606A5 JP 2002228117 A JP2002228117 A JP 2002228117A JP 2002228117 A JP2002228117 A JP 2002228117A JP 2004066606 A5 JP2004066606 A5 JP 2004066606A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002228117A
Other languages
Japanese (ja)
Other versions
JP2004066606A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2002228117A priority Critical patent/JP2004066606A/en
Priority claimed from JP2002228117A external-priority patent/JP2004066606A/en
Priority to PCT/JP2003/009929 priority patent/WO2004012942A1/en
Priority to EP03766746A priority patent/EP1534525B1/en
Priority to CNB038221098A priority patent/CN100340405C/en
Priority to DE60326962T priority patent/DE60326962D1/en
Priority to US10/521,055 priority patent/US7416281B2/en
Publication of JP2004066606A publication Critical patent/JP2004066606A/en
Priority to HK05105290.1A priority patent/HK1072036A1/en
Publication of JP2004066606A5 publication Critical patent/JP2004066606A5/ja
Priority to US12/174,342 priority patent/US8052249B2/en
Pending legal-status Critical Current

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JP2002228117A 2002-08-06 2002-08-06 Liquid drop ejecting head, its manufacturing process and inkjet recorder Pending JP2004066606A (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2002228117A JP2004066606A (en) 2002-08-06 2002-08-06 Liquid drop ejecting head, its manufacturing process and inkjet recorder
US10/521,055 US7416281B2 (en) 2002-08-06 2003-08-05 Electrostatic actuator formed by a semiconductor manufacturing process
DE60326962T DE60326962D1 (en) 2002-08-06 2003-08-05 BY ELECTROSTATIC ACTUATOR MADE BY A SEMICONDUCTOR MANUFACTURING METHOD
EP03766746A EP1534525B1 (en) 2002-08-06 2003-08-05 Electrostatic actuator formed by a semiconductor manufacturing process
CNB038221098A CN100340405C (en) 2002-08-06 2003-08-05 Electrostatic actuator formed by a semiconductor manufacturing process
PCT/JP2003/009929 WO2004012942A1 (en) 2002-08-06 2003-08-05 Electrostatic actuator formed by a semiconductor manufacturing process
HK05105290.1A HK1072036A1 (en) 2002-08-06 2005-06-24 Electrostatic actuator formed by a semiconductor manufacturing process
US12/174,342 US8052249B2 (en) 2002-08-06 2008-07-16 Liquid discharge head, liquid supply cartridge, and liquid jet apparatus having electrostatic actuator formed by a semiconductor manufacturing process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002228117A JP2004066606A (en) 2002-08-06 2002-08-06 Liquid drop ejecting head, its manufacturing process and inkjet recorder

Publications (2)

Publication Number Publication Date
JP2004066606A JP2004066606A (en) 2004-03-04
JP2004066606A5 true JP2004066606A5 (en) 2006-03-02

Family

ID=32014884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002228117A Pending JP2004066606A (en) 2002-08-06 2002-08-06 Liquid drop ejecting head, its manufacturing process and inkjet recorder

Country Status (1)

Country Link
JP (1) JP2004066606A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5084175B2 (en) * 2005-05-31 2012-11-28 株式会社半導体エネルギー研究所 Micro structure and manufacturing method thereof

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