JP2004050639A - Substrate for inkjet recording head, inkjet recording head, inkjet recording apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To realize a substrate for an inkjet recording head, an inkjet recording head, and an inkjet recording apparatus which enable recording by better images. <P>SOLUTION: In the substrate for the inkjet recording head, an ink supply port forming part of a slim shape, a plurality of electric heating converters set in an array along the ink supply port forming part, a plurality of switching elements set for flowing a current correspondingly to the plurality of electric heating converters, and level shift circuits for stepping down and generating a driving power supply voltage of the switching elements from a power supply voltage for flowing the current are accumulated on a semiconductor substrate. A plurality of level shift circuits are formed to be nearly parallel to a longitudinal direction of the ink supply port forming part and to be axially symmetric with respect to a center line orthogonal to the longitudinal direction. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a substrate for an ink jet recording head, an ink jet recording head using the substrate, and an ink jet recording apparatus.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, recording apparatuses used as various output terminals include, as a recording head, an electrothermal transducer, an element for switching the electrothermal transducer (hereinafter, a switch element), and a drive for driving the switch element. The circuit is mounted on the same substrate.
[0003]
FIG. 6 is a schematic sectional view showing a part of a recording head having a conventional configuration.
[0004]
Reference numeral 901 denotes a p-type semiconductor substrate made of single crystal silicon. Reference numeral 912 denotes a p-type well region, 908 denotes an n-type drain region, 916 denotes an n-type electric field relaxation drain region, 907 denotes an n-type source region, and 914 denotes a gate electrode. These are MIS (Metal Insulator Semiconductor) type. A switching element 930 using a field-effect transistor is formed. 917 is a heat storage layer and a silicon oxide layer as an insulating layer, 918 is a tantalum nitride film as a heat resistance layer, 919 is an aluminum alloy film as a wiring, and 920 is a silicon nitride film as a protective layer. A head base 940 is formed. Here, 950 is a heat generating unit, and ink is discharged from the ink discharge unit 960. The top plate 970 forms a liquid passage 980 in cooperation with the base 940.
[0005]
By the way, many improvements have been made to the recording head and the switch element having the above-mentioned structure, but in recent years, high-speed driving, energy saving, high integration, low cost, and high performance have been realized for products. It has become even more demanding. For this reason, a plurality of MIS field-effect transistors 930 used as switch elements as shown in FIG. 6 are formed in the semiconductor substrate 901, and these MIS field-effect transistors 930 are operated singly or simultaneously, The connected electrothermal transducer is driven.
[0006]
However, when the conventional MIS field-effect transistor 930 functions under a large current required to drive the electrothermal transducer, the pn reverse bias junction between the drain and the well cannot withstand a high electric field. Then, a leakage current was generated, and the breakdown voltage required for the switching element could not be satisfied. Furthermore, if the ON resistance of the MIS field-effect transistor used as a switch element is large, the current required for driving the electrothermal conversion element cannot be obtained due to wasteful consumption of current here. There was a problem to be.
[0007]
In order to solve the problem of the withstand voltage, an MIS field effect transistor 1030 as shown in FIG. 7 can be considered.
[0008]
In FIG. 7, a semiconductor substrate 1001, an n-type source region 1007, an n-type drain region 1008, a gate electrode 1014, a silicon oxide layer 1017 as a heat storage layer and an insulating layer, a tantalum nitride film 1018 as a thermal resistance layer, wiring Alloy substrate 1040 as a protective layer, a silicon nitride film 1020 as a protective layer, a recording head substrate 1040, a heating unit 1050, an ink discharge unit 1060, a top plate 1070, and a liquid path 1080 are each a semiconductor substrate 901 shown in FIG. , An n-type source region 907, an n-type drain region 908, a gate electrode 914, a silicon oxide layer 917 as a heat storage layer and an insulating layer, a tantalum nitride film 918 as a thermal resistance layer, an aluminum alloy film 919 as a wiring, and protection. Silicon nitride film 920 as a layer, base 940 of recording head, heating section 9 0, ink discharge portion 960, top plate 970 is similar to the liquid path 980.
[0009]
The structure of the MIS field-effect transistor shown in FIG. 7 is different from a normal structure. A p-type semiconductor substrate 1001 has a shape in which a periphery of an n-type source region 1007 is surrounded by a p-type base region 1005. Thus, a part of the n-type well region 1002 is used as a drain, and is called a DMOS (Double diffused MOS transistor). As described above, by forming a channel in the drain by using the n-type well region 1002, the depth of the drain that determines the breakdown voltage can be made deep and low in concentration. This makes it possible to solve the problem of withstand voltage.
[0010]
Next, a level shift circuit used in a driver circuit for driving the thermal resistance layer will be described.
[0011]
A signal of a general driver IC is transmitted as shown in FIG. First, an input signal of 5.0 V to 3.3 V is given as Hi. The signal is transmitted to an arbitrary Bit by the decoder. Thereafter, the signal passes through an inverter circuit of a CMOS configuration with a source ground, and is input to the gate of a MOS transistor as a switch element.
[0012]
What is important here is an arbitrary voltage VHT applied to the inverter circuit having the CMOS configuration. By minimizing the on-resistance of the MOS transistor, the size of the MOS which is the switching element can be minimized. Therefore, the voltage VHT is set so that the on-resistance of the MOS transistor is minimized.
[0013]
Since the voltage VHT is not input from outside, it is necessary to convert the voltage level in the IC. As a level shift circuit for converting the voltage level as described above, there is a method of obtaining a constant voltage by connecting a plurality of diodes in series in the forward direction as shown in FIG. In addition to the effect of the multiplier, it is necessary to increase the size of the diode in order to prevent a current-dependent voltage fluctuation, which is not a practical method.
[0014]
As a commonly used level shift circuit, there is a circuit which obtains a voltage through a source follower transistor. FIG. 10 is a diagram showing a configuration of a circuit in which a source follower transistor is interposed in the circuit shown in FIG.
[0015]
In the circuit shown in FIG. 10, when the drain voltage VH for driving the switch MOS is 30 V, VGNDH is 0 V, and the gate voltage VHT is 12 V, a back gate voltage of -12 V is applied to the source follower transistor used for level shift. Also, it can be seen that a drain-source breakdown voltage of 18 V or more is required.
[0016]
FIG. 11 is a top view showing an arrangement state of the inkjet recording head substrate 801.
[0017]
The inkjet recording head substrate 801 includes a switching element 802 and an electrothermal converter 803 having the configuration shown in FIG. 7, a level shift circuit 806 including a level shift element as shown in FIG. 10, and a level shift circuit 806. An input voltage pad 805 for a level shift circuit and a plurality of pads 804 used to receive an input voltage of the input signal and a drive signal to the switching element 802 from the outside, and an ink supply port forming portion 807 are formed.
[0018]
The 256 electrothermal converters 803 are provided in a row at intervals of 1200 DPI (Dot Per Inch) with the ink supply port forming portion 807 interposed therebetween. A flow path (not shown) is formed on the ink supply port forming portion 807 and the electrothermal converter 803. The substrate 801 for an ink jet recording head is combined with a top plate (not shown), and an ink discharge port is formed at a position corresponding to the electrothermal converter 803 on the top plate. The electrothermal transducer 803 is driven to generate heat, the ink on the electrothermal transducer 803 foams, and the ink is ejected from the ejection port by the energy.
[0019]
FIG. 12 is a top view showing an arrangement state of the inkjet recording head substrate 901 on which more ejection nozzles are formed.
[0020]
In the figure, the switching element 902, the electrothermal converter 903, the pad 904, the input voltage pad 905 for the level shift circuit, the level shift circuit 906, and the ink supply port forming unit 907 respectively include the switching element 802, the electrothermal converter 803, The pad 804, the input voltage pad 805 for the level shift circuit, the level shift circuit 806, and the ink supply port forming unit 807 are the same as the pad 804, but in the example shown in FIG. 12, the electrothermal converters 903 are 512 or more at 1200 dpi intervals. In this case, two level shift circuits 906 are provided.
[0021]
FIG. 13 shows a substrate 1001 for an ink jet recording head formed by forming a plurality of the configurations shown in FIG. 12 in parallel on the same substrate.
[0022]
The switching element 1002, the electrothermal converter 1003, the pad 1004, the input voltage pad 1005 for the level shift circuit, the level shift circuit 1006, and the ink supply port forming unit 1007 shown in FIG. These are the same as the thermal converter 903, the pad 904, the input voltage pad 905 for the level shift circuit, the level shift circuit 906, and the ink supply port forming unit 907.
[0023]
In any of the substrates for the ink jet recording head shown in FIGS. 11 to 13, both the pad and the input voltage pad for the level shift circuit are provided at one end of the substrate for convenience of connection with the outside.
[0024]
FIG. 14 is a circuit diagram showing a specific configuration of a circuit formed on the substrate for an ink jet print head as shown in FIGS.
[0025]
Reference numeral 43 denotes an array of electrothermal converters as loads, 41 denotes an array of switching elements, 49 denotes a level shift circuit, 52 denotes a driver array, 54 denotes a latch circuit, and 55 denotes a shift register. 46 is a logic gate array to which the power supply voltage VDD is supplied, 48 is a terminal (pad) to which the ground voltage VSS is supplied, ΦST is a terminal to which an enable signal for controlling ON timing of the switching element is inputted, and ΦLT is a latch circuit 54, a terminal for inputting an image signal, and CLK a terminal for inputting a clock signal. The array 41 of electrothermal transducers, the array 41 of switching elements, the logic gate array 46, the driver array 52, and the latch circuit 54 are respectively arranged in parallel on one chip.
[0026]
The digital image signals input from the terminal DATA are rearranged in parallel by the shift register 55 and latched by the latch circuit 54. When the logic gate 46 is enabled, the switching element 41 is turned on or off in accordance with the signal latched by the latch circuit 54, and a current flows through the selected electrothermal converter 43.
[0027]
The DMOS transistor shown in FIG. It is suitably used as the above switching element.
[0028]
[Problems to be solved by the invention]
In order to cope with recent high-speed printing and high-quality printing, the number of nozzles constituting a print head is increasing year by year. In addition, the number of ink supply ports provided on the same substrate tends to further increase in order to support multiple colors.
[0029]
On the other hand, since the level shift circuit supplies the power of the switching element for switching the electrothermal converter, when the number of simultaneously driven nozzles increases, the number of the level shift circuits themselves must be increased.
[0030]
On the other hand, in spite of the tendency that the number of nozzles described above tends to increase, energy saving and cost reduction are further required. As described above, an electrothermal converter is used to perform high-voltage driving by utilizing features such as downsizing of a substrate, reduction of on-resistance, and high withstand voltage, and to reduce current to save energy and reduce costs. In recent years, a DMOS transistor has been used as a switching element for switching the current.
[0031]
By using a DMOS transistor as a switching element, energy saving, cost reduction, and size reduction can be achieved. However, since the input voltage to the level shift circuit using the same voltage as the voltage to the electrothermal converter increases, the power consumption in the level shift circuit substantially increases, and accordingly, the amount of heat generated also increases.
[0032]
The amount of heat generated in the level shift circuit is increasing in conjunction with the increase in the number of nozzles and the number of colors described above, and is a problem that cannot be ignored because it may affect the state of ink ejection from the nozzles. . In particular, as shown in FIGS. 11 to 14, when the level shift circuits are collectively arranged on one side end of the inkjet recording head substrate, they are not arranged on the side end where the level shift circuits are arranged. The temperature at the side ends is different. For this reason, a temperature distribution also occurs in the ink inside the ink supply port forming portion formed between the both ends, and the viscosity of the ink also partially differs, which also adversely affects the recorded image. There is a danger.
[0033]
The above problem is particularly concerned when a DMOS transistor is used as a switching element, but can sufficiently occur when a normal switching element is used.
[0034]
The present invention has been made in view of the above-described problems of the related art, and is capable of performing recording with better images, a substrate for an inkjet recording head, an inkjet recording head, and an inkjet recording apparatus. It is intended to be realized.
[0035]
[Means for Solving the Problems]
An ink jet recording head substrate according to the present invention includes an elongated ink supply port forming portion, a plurality of electrothermal converters provided in a row along the ink supply port forming portion, and the plurality of electrothermal converters. A plurality of switching elements provided correspondingly to allow a current to flow through the body, and a level shift circuit configured to generate a drive power supply voltage of the switching element by lowering the power supply voltage from the power supply voltage for flowing the current, on a semiconductor substrate. In the inkjet recording head substrate integrated in the
A plurality of the level shift circuits are formed so as to be substantially parallel to a longitudinal direction of the ink supply port forming portion and to be line-symmetric with respect to a center line orthogonal to the longitudinal direction. substrate.
[0036]
In this case, the level shift circuit may be provided with a pad for supplying a voltage before step-down from outside the substrate.
[0037]
Further, the pads may be independently provided on both side ends of the substrate orthogonal to the longitudinal direction of the ink supply port forming portion.
[0038]
In any of the above, the plurality of switching elements for flowing current to the plurality of electrothermal transducers may be DMOS transistors.
[0039]
Further, a plurality of liquid ejection ports corresponding to a plurality of electrothermal transducers may be provided.
[0040]
An ink jet recording head of the present invention includes the above-described substrate for an ink jet recording head and a liquid container that stores liquid ejected from a plurality of liquid ejection ports.
[0041]
The inkjet recording apparatus of the present invention is an inkjet recording apparatus using an inkjet recording head,
The power supply voltage to the electrothermal converter and the input voltage to the level shift circuit are the same.
[0042]
BEST MODE FOR CARRYING OUT THE INVENTION
Next, embodiments of the present invention will be described with reference to the drawings.
[0043]
FIG. 1 is a top view showing the arrangement of an embodiment of an ink jet recording head substrate according to the present invention.
[0044]
The inkjet recording head substrate 101 includes a switching element 102 and an electrothermal converter 103 having the configuration shown in FIG. 7, a level shift circuit 106 including a level shift element as shown in FIG. 10, and a level shift circuit 106. An input voltage pad 105 and a plurality of pads 104 for a level shift circuit used to receive an input voltage and a drive signal to the switching element 102 from the outside, and an ink supply port forming unit 107 are formed.
[0045]
The switching elements 102 and the electrothermal converters 103 are provided in two rows of 512 or more at intervals of 1200 DPI (Dot Per Inch) with the ink supply port forming section 107 interposed therebetween. A channel (not shown) is formed on the ink supply port forming unit 107 and the electrothermal converter 103. The ink jet recording head substrate 101 is combined with a top plate (not shown), and ink discharge ports are formed in portions of the top plate corresponding to the electrothermal transducers 103. The electrothermal transducer 103 is driven to generate heat, the ink on the electrothermal transducer 103 foams, and the ink is ejected from the ejection port by the energy.
[0046]
The ink supply port forming section 107, and the switching element 102 and the electrothermal converter 103 formed so as to be opposed to each other with the ink supply port forming section 107 interposed therebetween, are arranged as a group and a plurality of them are arranged in parallel.
[0047]
The present embodiment is different from the conventional example shown in FIGS. 11 to 13 in that two level shift circuits 106 are provided at both ends of an elongated ink supply port forming unit 107, and that a switching element 102 is provided. The point is that pads 10 for receiving a drive signal to the outside from the outside are arranged on both side ends of the ink jet recording head substrate 101 orthogonal to the longitudinal direction of the ink supply port forming portion 107.
[0048]
A plurality of level shift circuits 106 are formed to be substantially parallel to the longitudinal direction of the ink supply port forming unit 107 and to be line-symmetric with respect to a center line (AA ′ line) perpendicular to the longitudinal direction.
[0049]
An input voltage is supplied to each level shift circuit 106 from the outside via a level shift circuit input voltage pad 105 provided on the inkjet recording head substrate 101.
[0050]
In the present embodiment configured as described above, since the level shift circuit 106, which is a heating element, is provided at both ends of the ink supply port forming unit 107, it is orthogonal to the longitudinal direction of the ink supply port forming unit 107. Both sides of the inkjet recording head substrate 101 have substantially the same temperature. Therefore, the temperature distribution does not occur in the ink inside the ink supply port forming unit 107, and the ink viscosity and the like do not partially differ, so that the ink jet recording head manufactured using this embodiment can be used. The recorded image was also good.
[0051]
FIG. 2 is a top view showing the arrangement of the inkjet recording head substrate 201 according to the second embodiment of the present invention.
[0052]
In the figure, the switching element 202, the electrothermal converter 203, the pad 204, the input voltage pad 205 for the level shift circuit, the level shift circuit 206, and the ink supply port forming unit 207 are respectively the switching element 102 shown in FIG. The thermal converter 103, the pad 104, the input voltage pad 105 for the level shift circuit, the level shift circuit 106, and the ink supply port forming unit 107 are the same as the input voltage pad 205 for the level shift circuit in this embodiment. The ink supply port forming unit 107 is provided at both side ends of the ink jet recording head substrate 101 orthogonal to the longitudinal direction.
[0053]
In the present embodiment configured as described above, the voltage supply path from the level shift circuit input voltage pad 205 to each level shift circuit 206 is perpendicular to the longitudinal direction of the ink supply port forming unit 107. Since both sides of the 101 are substantially equal and the temperatures at both sides are also equal, the image recorded by the ink jet recording head manufactured by using this embodiment is also excellent.
[0054]
In any of the above embodiments, a plurality of level shift circuits are formed so as to be substantially parallel to the longitudinal direction of the ink supply port forming portion and to be line-symmetric with respect to a center line orthogonal to the longitudinal direction. Are substantially equal at both ends of the substrate for an ink jet recording head orthogonal to the longitudinal direction of the ink supply port forming portion, the temperature distribution does not occur in the ink inside the ink supply port forming portion, and the viscosity of the ink partially It is important to eliminate the difference, and the substrate for an ink jet recording head according to the present invention is characterized by having such a configuration.
[0055]
FIG. 3 is a schematic diagram of an ink jet recording head manufactured using the ink jet recording head substrate shown in FIG. 1 or FIG.
[0056]
Electric current is generated on the element substrate 52 which is the substrate for the ink jet recording head shown in FIG. 1 or 2 by the flow of electric current, and the air generated by the heat is used to discharge ink from the discharge port 53. Heat conversion elements (heaters) 41 are arranged in a plurality of rows. Each of the electrothermal transducers is provided with a wiring electrode 54, and one end of the wiring electrode 54 is electrically connected to the switching element 42 described above. A flow path 55 for supplying ink to a discharge port 58 provided at a position facing the electrothermal transducer 41 is provided corresponding to each discharge square 53. Walls forming these discharge ports 53 and the flow path 55 are provided on the grooved member 56. By connecting these grooved members 56 to the above-described element substrate 52, the flow path 65 and the plurality of flow paths are formed. A common liquid chamber 57 for supplying ink is provided.
[0057]
FIG. 4 shows the structure of an ink jet head in which the element substrate 52 which is the substrate for the ink jet recording head shown in FIG. 1 or 2 is incorporated. The element base 52 is incorporated in a frame 58. A member 56 constituting the discharge port 63 and the flow path 55 shown in FIG. Further, a contact pad 59 for receiving an electric signal from the apparatus side is provided, and an electric signal serving as various drive signals is supplied from a controller of the apparatus body to the element base 62 via the flexible printed wiring board 60. Is done.
[0058]
FIG. 5 is a schematic view of an ink jet recording apparatus IJRA to which the ink jet head of the present invention is applied.
[0059]
A helical groove 5004 is provided in the lead screw 5005 which rotates via the driving force transmission gears 5011 and 5009 in conjunction with the forward / reverse rotation of the drive motor 501a. The carriage HC engaged with the spiral groove 5004 has a pin (not shown), and is reciprocated in the directions of arrows a and b. Reference numeral 5002 denotes a paper pressing plate, which presses the paper against a platen 5000 serving as a recording medium conveying unit in the carriage moving direction. Reference numerals 5007 and 5008 denote home position detecting means for confirming the presence of the carriage lever 5006 in this area by photocouplers and switching the rotation direction of the motor 5013. Reference numeral 5016 denotes a member for supporting a cap member 5022 for capping the front surface of the print head. Reference numeral 5015 denotes suction means for sucking the inside of the cap, and recovers the suction of the print head via the opening 5023 in the cap. Reference numeral 5017 denotes a cleaning blade. Reference numeral 5019 denotes a member which allows the cleaning blade 5017 to move in the front-rear direction. These members are supported by the main body support plate 5O18. It goes without saying that the cleaning blade 5017 is not limited to this form, and a well-known cleaning blade can be applied to the present embodiment. Reference numeral 5021 denotes a lever for starting suction for recovery of suction. The lever 5021 moves with the movement of the cam 5020 engaging with the carriage, and the driving force from the driving motor is controlled by a known transmission means such as clutch switching. Is said.
[0060]
still. The present apparatus has a controller (not shown) composed of an electric power supply for supplying an image signal, a drive control signal, and the like to the element substrate 52.
[0061]
【The invention's effect】
Since the present invention is configured as described above, it has the following effects.
[0062]
The temperature at both ends of the substrate for the inkjet recording head orthogonal to the longitudinal direction of the ink supply port forming portion is substantially equal. For this reason, the temperature distribution does not occur in the ink inside the ink supply port forming portion, and the ink viscosity and the like do not partially differ. Therefore, the ink was manufactured using the inkjet recording head substrate according to the present invention. An ink jet recording head and an ink jet recording apparatus using the same have an effect that a good image can be recorded.
[Brief description of the drawings]
FIG. 1 is a top view showing an arrangement state of an embodiment of an inkjet recording head substrate according to the present invention.
FIG. 2 is a top view illustrating an arrangement state of a substrate 201 for an inkjet recording head according to a second embodiment of the present invention.
FIG. 3 is a schematic diagram of an ink jet recording head manufactured using the ink jet recording head substrate shown in FIG. 1 or FIG. 2;
FIG. 4 is a view showing a structure of an ink jet head incorporating an element substrate 52 which is a substrate for the ink jet recording head shown in FIG. 1 or FIG.
FIG. 5 is a schematic view of an inkjet recording apparatus IJRA to which the inkjet head of the present invention is applied.
FIG. 6 is a schematic sectional view showing a part of a recording head having a conventional configuration.
FIG. 7 is a schematic sectional view showing a part of a recording head having a conventional configuration.
FIG. 8 is a circuit diagram showing a configuration of a level shift circuit.
FIG. 9 is a circuit diagram showing a configuration of a level shift circuit.
FIG. 10 is a diagram showing a configuration of a circuit in which a source follower transistor is interposed in the circuit shown in FIG. 8;
FIG. 11 is a top view showing an arrangement state of a conventional substrate for an ink jet recording head.
FIG. 12 is a top view showing an arrangement state of a conventional inkjet recording head substrate.
FIG. 13 is a top view showing an arrangement state of a conventional inkjet recording head substrate.
FIG. 14 is a circuit diagram showing a specific configuration of a circuit formed on the substrate for an ink jet recording head as shown in FIGS. 11 to 13;
[Explanation of symbols]
101, 102 Ink jet recording head substrate 102, 202 Switching element 103, 203 Electrothermal transducer 104, 204 Pad 105, 205 Input voltage pad 106, 206 for level shift circuit Level shift circuit 107, 207 Ink supply port forming section

Claims (7)

An elongated ink supply port forming portion, a plurality of electrothermal converters provided in a row along the ink supply port forming portion, and a plurality of electrothermal converters corresponding to flowing current to the plurality of electrothermal converters. A plurality of switching elements provided, and a level shift circuit that generates a drive power supply voltage of the switching elements by lowering the power supply voltage from a power supply voltage for flowing the current, and a level shift circuit that is integrated on a semiconductor substrate. ,
A plurality of the level shift circuits are formed so as to be substantially parallel to a longitudinal direction of the ink supply port forming portion and to be line-symmetric with respect to a center line orthogonal to the longitudinal direction. substrate. 2. The substrate for an ink jet recording head according to claim 1, wherein a pad for supplying a voltage before step-down from outside the substrate is provided in the level shift circuit. The inkjet recording head substrate according to claim 2,
A substrate for an ink jet recording head, wherein pads are independently provided on both side ends of the substrate orthogonal to the longitudinal direction of the ink supply port forming portion. The inkjet recording head substrate according to any one of claims 1 to 4,
A substrate for an ink jet recording head, wherein a plurality of switching elements for flowing a current to a plurality of electrothermal transducers are DMOS transistors. The inkjet recording head substrate according to any one of claims 1 to 4,
A substrate for an inkjet recording head, wherein a plurality of liquid ejection ports corresponding to a plurality of electrothermal transducers are provided. An ink jet recording head comprising: the ink jet recording head substrate according to claim 5; and a liquid container that stores liquid discharged from a plurality of liquid discharge ports. An inkjet recording apparatus using the inkjet recording head according to claim 5,
An ink jet recording apparatus, wherein the power supply voltage to the electrothermal transducer and the input voltage to the level shift circuit are the same.

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