JP2004045007A - Storage - Google Patents

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Publication number
JP2004045007A
JP2004045007A JP2002237204A JP2002237204A JP2004045007A JP 2004045007 A JP2004045007 A JP 2004045007A JP 2002237204 A JP2002237204 A JP 2002237204A JP 2002237204 A JP2002237204 A JP 2002237204A JP 2004045007 A JP2004045007 A JP 2004045007A
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JP
Japan
Prior art keywords
storage
humidity
air
refrigerator
air ions
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JP2002237204A
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Japanese (ja)
Inventor
Yoko Fujie
藤江 洋子
Yutaka Sakai
酒井 裕
Tadaichi Ushida
牛田 唯一
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Toyo Living Co Ltd
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Toyo Living Co Ltd
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Publication date
Application filed by Toyo Living Co Ltd filed Critical Toyo Living Co Ltd
Priority to JP2002237204A priority Critical patent/JP2004045007A/en
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Abstract

<P>PROBLEM TO BE SOLVED: To store articles in a good state for a long period by keeping the humidity of the air constant in storing products of industrial semiconductor wafer and electronic parts, and commercial-off-the-shelf optical lens products of half-finished product and components, cleaning the storage by filling the atmospheric ion, and removing the charge by static electricity. <P>SOLUTION: The air quality optimum for storing articles in the storage is realized by mounting a means for constantly keeping the humidity of the air in the storage and a means for releasing the atmospheric ion. A relative humidity in the storage is kept 40 % or less by the constant humidity keeping means, and the atmospheric ion is released into the storage by the atmospheric ion releasing means. The storage comprises a means having a heat source heating and regenerating a drying agent, and dehumidifying or/and humidifying the storage by opening and closing a shutter by expansion and contraction of a shape-memory alloy by heat of the heat source, and a means for releasing the atmospheric ion into the storage. The storage comprises a Peltier element having a low temperature-side heat radiation fin inside for condensing the vapor in the air of the storage to lower the humidity, and a high-temperature side heat radiation fin outside, a means for energizing the Peltier element, and the means for releasing the atmospheric ion into the storege. <P>COPYRIGHT: (C)2004,JPO

Description

【0001】
【発明の属する技術分野】
本発明は例えばカメラ、精密レンズ、顕微鏡や望遠鏡などの光学レンズ或いは半導体ウエハーなどの民生分野や産業分野における製品、半製品や部品を保存する空気環境の湿度を適切に調節し、かつ空気イオンを充満することに依って清浄な状態で静電気を除電し物品を長期に安定して保存する保管庫に係るものである。
【0002】
【従来の技術】
従来の技術の保管庫を例にとり以下に説明する。高湿度を嫌う食品、衣類など装身具やカメラなどのレンズにカビの発生を防止する目的で保管槽内の相対湿度を低下する形式のものが広く普及している。また湿度を適切に維持する以外に庫内のカビ菌などを殺菌し保管物を雑菌やカビから保護する形式のものが考案されてきた。例えば公開特許公報2000−300173 がある。これは農作物を保存する槽内の湿度、温度や農作物の量に応じてマイナスイオンの量を増減して発生させ菌やカビの繁殖を抑制する技術が開示されている。
【0003】
【発明が解決しようとする課題】
しかしながら単に庫内の温度や湿度および農作物の量に応じたマイナスイオン発生量を加減することでは限界があり、また保管を必要とする物品は農作物に限らず精密レンズやカメラ・顕微鏡・望遠鏡などの光学レンズをカビ菌から保護し、半導体ウエハーなどを酸化や有機・塩基やアルカリガスによる汚染物の付着を防止しかつ帯電した静電気を除去するなどの必要性が重要となってきた。また食品や薬品類によっては中湿度で保存することが要求されることも生じてきた。更に近年は保管物の性質や特性に最適な保存をするために空気環境を従来より一層厳しくが要求されるようになった。またカビの発生は雰囲気中の相対湿度が大きく影響し高湿度下では活発に増殖すること衆知のことであるが、汚染ガスがレンズなどに付着する際には空気中の水分が影響することが明瞭になってきた。
【0004】
炭化水素系の有機ガスである例えばフタル酸エステルや塩基性ガスである塩化アンモニュームガスなどが湿気の仲立ちで半導体ウェハーの表面に付着しその表面を汚染し欠陥を生じる。非常に高濃度の汚染ガスや汚染物質は単独に物体を汚染し、非常に高湿度の水蒸気はカビを増殖させるが通常の汚染状態の場合には汚染ガスが物体を汚染するのに湿気が大きな役割を果たすことも分かってきた。本発明はこの点に着目して保管槽内の空気を乾燥剤によって除湿し、有機ガスを空気イオンによって酸化させ炭酸ガスと水に分解させ、また塩基やアルカリガスも同様に分解するこによって清浄で適湿にした空気環境において保管物を汚染から保護することにある。
従来保管庫内の保管物に静電気が帯電する恐れから庫内の湿度を一定以下にすることが制限されていた用途も多い。本発明はこの点にも解決を図るものである。
【0005】
また工業的には光触媒を利用方法も開発されつつあるが、一般家庭にはその危険性や装置が大掛かりになる等の難点があった。このために常時稼動させる保管庫は家庭用として難点がある。更に低湿度と清浄空気の組合せにより食品の長期保存のために微生物の活動を防止するなどの需要は多く適切な家庭、工場や実験室などにおいて保管庫が求められている。更には高湿にするための除加湿装置に広く使用されている形状記憶合金製のバネの短寿命を錆から解放することで延長することも潜在的に求められている。本発明はこのようなことに鑑みて多様化する物品を保存するのに最適な技術を提供するものであり本発明は上述ような諸問題点を一挙に解決するものである。
【0006】
【課題を解決するための手段】
1.庫内の相対湿度を40%以下にする定湿化手段と空気イオンを発生し前記庫内に前記空気イオンを放出する空気イオン放出手段とを設けたことを特徴とする保管庫。
2.庫内の相対湿度を30乃至70%の範囲における任意の相対湿度に設定可能な湿度設定手段と前記湿度設定手段が設定した湿度に庫内を定湿化する定湿化手段と、空気イオンを発生し前記庫内に前記空気イオンを放出する空気イオン放出手段とを設けたことを特徴とする保管庫。
3.乾燥剤を加熱再生する熱源を有し、この熱源の熱によって形状記憶合金製の伸縮でシャッターの開閉を作動せしめ庫内を除湿するまたは/および加湿手段と空気イオンを発生し前記庫内に前記空気イオンを放出する空気イオン放出手段とを設けたことを特徴とする保管庫。
4.庫内の湿度を低下するために前記庫内の空気中の水蒸気を露結させる低温側放熱フインを庫内側に、高温側放熱フインを庫外に配置し取付けたペルチェ素子と前記ペルチェ素子を付勢する手段と空気イオンを発生し前記庫内に前記空気イオンを放出する空気イオン放出手段とを設けたことを特徴とする保管庫。
5.プラスとマイナスの両方の空気イオンを発生し前記庫内に前記空気イオンを放出する空気イオン放出手段と、少なくとも保管庫を設置する環境雰囲気より低湿度にする機能を有する定湿化手段とを設けたことを特徴とする保管庫。
【0007】
【発明の実施の形態】
次に、この発明の一実施例を図面に基づいて説明する。
図1において保管庫1は、前面の扉2が開閉自在なキャビネット10であり、扉2を閉めたときに密閉構造となる。図2、3において庫内最上後部にイオン発生器3、中央後面に定湿化する除加湿ユニット4を設け、3段の棚7上に載置したカメラ・レンズや電子部品あるいは食品、医薬品、化学品等の保管物8を、庫内に空気イオンを発生させ菌・カビを除菌し、定湿化させ庫内を安定させることで、品質変化が発生しないように保管し得るように構成されている。
【0008】
図4に機能ブロック図で示すように、制御回路9は電源回路20と各種の信号を受け取る入力回路21と出力装置に出力信号を出力する出力回路22及び入力回路21の信号に基づき演算処理し出力回路22に出力する中央処理装置(CPU)23から構成されている。入力回路21は湿度センサー24が検知した湿度情報とイオンカウンター25が検知したイオン濃度情報と操作部31の湿度設定器26によって設定された湿度設置値の信号及びイオン数設定器27によって設定されたイオン数値信号の各信号を受け入れる。出力回路22は湿度設定値や庫内湿度を表示する湿度表示器28にその信号を出力し、イオン数表示器29はイオン数設定値や庫内のイオン数値を出力する。さらに出力回路22は除加湿ユニット4の除湿ユニット5や加湿ユニット6を駆動する電気を出力し、またイオン発生器3を付勢しイオンの発生レベル信号も出力する。次に各部の説明をすると電源回路20は電源プラグ32からの交流電源を普通スイッチング回路で低電圧の直流にして入力回路21、出力回路22、中央処理装置(CPU)23に供給しさらに入出力回路を通じて各種設定器、センサー、表示器、除加湿ユニットやイオン発生器に動作用電力を供給する。入力回路21や出力回路22は通常の入出力回路なので詳細な説明を省略する。また中央処理装置23も一般的なマイクロコンピューターを用いた処理装置なので詳細な説明を省略する。湿度設定器26、イオン設定器27は可変抵抗器を使用した例を図示しているが押しボタンスイッチなどを使用しても良い。湿度センサー24は静電容量式や特殊フィルムの伸縮を利用したものなどがある。イオンカウンター25は空気の微弱な導電性利用して空気中のイオン数を測定するものが普通である。いずれも本発明の根幹ではないので詳細な説明を省略する。表示器28は3桁乃至4桁の7セグメントのLEDアレーやまたは針式のメーターでもよい。イオン発生器3と除加湿ユニット4については後述する。
【0009】
次に図5においてイオン発生器3は外郭ケース44の一面に格子状のステンレス製の網43があり、他の面は合成樹脂等で作られた箱状である。他の一面からは入力電線45が制御回路9に接続されている。図6において41は図7で示すイオンバーター回路46、高圧トランス47などを設けて密封されている。高圧トランス47の2次側巻線の一方は放電針42に接続され他方は前述の網43に接続されている。図7−Aはこのイオン発生器の電気概念図を示し交流の高電圧でプラスとマイナスの空気イオンを交互に発生させ、図7−Bは高圧トランス45に高圧ダイオード48を設けて放電針42はマイナスの空気イオンのみを発生させる場合の図である、インバーター回路46は普通1kHz乃至30kHzの周波数の交流を高圧トランス45、47に供給する。高圧トランス45、47の2次側には通常1000乃至7000Vの範囲で適切な電圧が発生するようになっており、放電針42と網43の間にコロナ放電が生じ空気イオンが発生する。発生したイオンの大部分はイオン風となって網43の開口部から庫内へ放出される。このイオンは主に空気中の酸素や水蒸気を電離して発生する。
【0010】
次に図8に基づき除加湿ユニット4について説明する。ケース51に開口部52、53を有し、その周囲に弁座54、55を設けている。シャッター56、57は複数の連結俸58によって一体的に左右に移動可能にするためケース51に開口した小穴(図示しない)前述の連結俸58が枢軸的に支承されている。ケース51の中央部に乾燥剤59を収納した多数の小穴を有する乾燥箱60が固定されている。乾燥箱60内の略中央部付近に加熱体61が設けられている。複数の連結俸58の内の1本は作動俸62でありその中央部付近に一方をケース51に固定したバイアスバネ63の他方を固定している。さらに作動俸62の中央部付近に一方を乾燥箱60に固定した形状記憶バネ64の他方を固定している。
【0011】
ここで動作について説明すると通常はバイアスバネ63の引張力が形状記憶バネ64の引張力より強くシャッター56、57はA方向に付勢され、従って開口部52はシャッター56が弁座54に圧接し気密状態となり、開口部52は弁座54とシャッター57が十分に離れ外部とケース51内は通風状態となっている。ケース51の中央部付近に壁65が設けられており、仮に左をA右側をBとするとこの状態ではケース内はA側と空気が通じているのでA側の空気中の水蒸気を乾燥剤59が吸湿する。従ってA側の湿度は低下する。
【0012】
ここで加熱体61に通電し温度が上がると形状記憶バネ64はその熱で縮む。すると作動俸62はバイアスバネ63に抗してB側に移動する。従ってシャッター56は弁座54から離れつまり開口部52が生じ他方シャッター57は弁座55と当接し開口部54がなくなる。また乾燥剤59は加熱体61の熱によって温度上昇し吸湿した水分を蒸気として放出する。
【0013】
この蒸気は開口部52を通りB側に排出される。所定の時間になると加熱体61の通電は停止するようになっているので、シャッター56、57は再び元の位置に戻り乾燥剤59はA側の水蒸気を吸収し湿度を下げる。
【0014】
このように一定の時間的周期で例えば加熱体61を30分間付勢し5時間30分失勢するようにタイマー手段などで設定しておくと自動的にA側を除湿しB側を加湿することになる。
故にA側を庫内B側を庫外に取り付ければ除湿ユニットとなり逆にB側を庫内A側を庫外に取り付ければ加湿ユニットとなる。この技術は公知の技術で例えば実用新案公告公報平1−31912がある。詳細にはこの公報を参照されたい。このユニットにおいて形状記憶バネ64は形状記憶合金で作られる。
【0015】
形状記憶合金は普通Ni−Ti合金であるが、加熱体61の熱を繰返し受けまた伸縮を繰り返すためにその純度が低い材料や表面の熱処理が不適切な場合には酸化し、つまり錆びるので比較的短寿命になる場合がある。空気イオンはこの酸化作用を抑制する性質があるので形状記憶合金の発錆を防止し形状記憶バネ64の寿命を飛躍的に向上することができる。
【0017】
また一般的に広く知られているので詳述しないが、除湿する手段として公知のペルチェ素子の低温側に放熱フインを設けて庫内に設置して庫内の空気をこのフインが冷却することで庫内空気の水蒸気を露滴させ、この露滴させた水を庫外に排出させることで除湿する方法もある。この除湿方法において、庫内側の放熱フインには常に水滴が結露し一般的に使用される熱伝導の良いアルミニューム製のフインはその表面処理が不適切な場合や純度の低いアルミニュームの場合には比較的に短時間でボロボロに錆び易い。空気イオンはこの酸化作用を抑制する性質があるので寿命を大幅に伸ばすことが出来る。
【0018】
本実施例の操作方法について説明するとまず電源スイッチを入りにしたあと湿度設定器26とイオン数設定器27のツマミ33、34を保管物の保存に適切な値になるように回し設定するためにこのツマミ33、34を回すと表示器30の湿度表示器28、イオン数表示器29は若干の間、例えば3秒間ぐらい設定値を表示し、その後庫内の湿度、イオン数を表示する。設定値に対して庫内湿度が設定値より高い場合除湿ユニット5が作動し湿度を低下させる。逆の場合には加湿ユニット6が作動する。庫内のイオン数が設定値より多い場合にはイオン発生器3の高圧トランス47の1次回路に供給するインバーター回路が電圧を低下させ逆の場合には上昇させイオン発生器3が放出するイオン数を設定値に近づけるように制御回路9の中央処理装置23が制御する。
【0018】
図9は従来の保管庫では除湿する装置を設けたものが多かったが、これは図9に示すようにカビを発生さる一般的なカビは高湿時に発生し、湿度が低下するとその繁殖率は急速に低下し、例えばカメラのレンズのカビの発生は大体防止できる。しかしながら頻度が少ないものの好乾性のカワキアオコウジカビのような菌はむしろ低湿下で活発に活動し繁殖する。
例えばビデオカメラのようなレンズの焦点を合わせる為や倍率を変化させる為にレンズを精密に移動させる機構を有するものには潤滑材が多用されており、かつこの潤滑材は相対湿度が約30%以下においては乾き潤滑剤としての性能が著しく劣化する。
【0019】
従って潤滑剤の観点からは相対湿度が40乃至50%が望ましい。しかしながら40%以上では一般的な真菌が増殖しやすいのは前述の通りである。また洋菓子や和菓子などの保存には相対湿度が50乃至60%が望ましく40%以下では乾いて乾燥して潤いがなくなり美味でなくなり、また逆に60%以上で保存するとふやけてしまい食に適さなくなるものが多い。これは穀物や野菜の保存についても同様のことが言える。しかしながら真菌や生菌の多くは相対湿度が50%以上で活発に増殖するものがほとんどである。ここで保存する庫内に空気イオンを放出するとこれらの菌の増殖は抑止される。
【0020】
半導体のシリコンウエハは高湿度において酸化による欠陥を生じやすくまた有機ガスや酸・塩基ガス雰囲気中に保存すると表面にそのガスの汚染成分が付着し欠陥を生じる。このことはその表面の接触角を測定することで付着の程度がわかる。モールドされた半導体素子やその他の電子部品の多くの保存あるいは実装工程における半田前の基板を含め高湿中に保存されると吸湿し半田槽に通したときに水蒸気爆発を生じこれらのデバイスを破壊し作業者に危険を及ぼす。
【0021】
特に近年採用されることが多い鉛フリーの半田の温度が高くこの現象が顕著に発生し易い。従ってこれらを保存する雰囲気の湿度は低いほどよいが静電気の観点からは相対湿度が40%以上が望ましいという二律背反がある。この実施例では庫内の相対湿度を十分に低下せしめイオン発生器3はプラスイオンとマイナスイオンを極めて周期の短い間隔で交互に発生させるので保管物に静電気を中和しまた帯電させないので前述の矛盾は一挙に解決される。また交流電圧でプラスとマイナスの空気イオンを交互に発生させる方法を説明したがプラスイオンとマイナスイオンをそれぞれ発生させる単一または複数個イオン発生器を設けてもよい。
【0022】
次に別の実施例について説明する。図11において保管庫1は、扉2をキャビネット10に閉めたときに密閉構造となる。実際には微細な隙間などがあり完全な密閉とはならないのが普通である。
【0023】
図12について説明すると、棚7の上に保管物8を載置して、イオン発生器3を備えるのは前の実施例と同じである。ここで70は調湿剤であり庫内の内面壁に設けてある。この調湿剤70の量や種類は対象とする保管物8に適したものを選ぶことが出来る。
【0024】
例えばB形シリカゲルや珪藻板などがある。B形シリカゲルの吸水率は図14に示すように相対湿度が高いときに吸水率が急激に上昇する特性を有する。そして調湿剤70にB形シリカゲルを使用したときに庫外即ち外気の相対湿度が変化した場合に庫内の相対湿度の変化は図15に示す通りになった。これはキャビネット10と扉2の気密性は完全でなく若干の通気性があるために外気の湿度の影響を受けるものの調湿剤70が水分を吸収したり排出したりして比較的に安定した相対湿度を維持することを示す。
【0025】
ここで問題は比較的に安定した相対湿度を維持するが必ずしも低湿に維持するとは限らない。つまり冬季に外気が低湿状態の日が多いと庫内も比較的に低い相対湿度に安定し、梅雨の時期に外気が高湿状態の日が多いと庫内も比較的に高い相対湿度に安定するに安定。ここでカメラなどを保管した際、庫内が比較的に高い相対湿度安定するとレンズにカビが繁殖しレンズを使用不能にする恐れがある。ここでイオン発生器3が空気イオンを発生させてこのカビ菌の増殖を防止する。
【0026】
図10に示すように空気イオン数が多いほどカビ菌数を減少させることができるので保存する対象物品に適切な能力を有するイオン発生器3を選択すれば、高価な積極的に除湿する手段を設けなくとも十分に保管庫としての機能を得ることが出来る。
【発明の効果】
【0027】
1.一般にカビ菌は高湿度を好み増殖するので低湿度環境にすると増殖を抑制しレンズや食品およびその他の物品をカビの害から守ることが出来る。しかし好乾菌と言われるカワキアオコウジカビなどは低湿度で繁殖する性質を有する種類も少数ながら時折発生することがある。この点、本発明によれば40%以下の低湿度環境下で良く発育するカワキアオコウジカビをマイナスの空気イオンを放出することで活動を抑制し、ほぼ完全に物品をカビの害から守ることが出来る。
【0028】
2.低湿度雰囲気において木質材料が変形する楽器や、干からびてしまう革製品の靴やベルト、また食品や医薬品類等の種類によっては低湿度雰囲気中で変質するものがある。これらは高湿度環境下においても低湿度と同様な或いは異なった害を受けるものが多い。そこで 中湿度雰囲気環境下に放置するとカビ菌が増殖しダメージを受け本来の用途には使用が不可能になる。そこで本発明は相対湿度が略30%乃至70%においてマイナスの空気イオンを庫内に放出するのでカビ菌や雑菌等から上述の物品を保護する。
【0029】
3.乾燥剤が庫内の水蒸気を吸収し定期の時間的インターバルで加熱し吸収した水分を庫外に放出する方式の除湿装置は除湿能力が高く多用されているが、その乾燥剤の通風路を庫内と庫外に切替えるシャッターの動作は加熱する熱源の熱で伸縮する形状記憶合金を利用するのが合理的で現状では一般的である。しかしこの形状記憶合金にTi−Ni合金製が普通であるが、昼夜を問わず作動するためにその純度が低い材料や表面の熱処理が不適切な場合には酸化し、つまり錆びるので比較的短寿命になる場合がある。空気イオンはこの酸化作用を抑制する性質があるので形状記憶合金の発錆を防止し形状記憶バネ64の寿命を飛躍的に向上することができる。
またペルチェ素子を利用して低温側の放熱フインについても常に結露する水のために比較的に短時間で錆が発生して時々交換せざるを得なかった。
本発明では酸化抑制作用のあるマイナスの空気イオンを庫内に放出するので庫内と連通する位置にある形状記憶合金は錆難くなりその寿命は長くなる。またペルチェ素子の放熱フインの寿命も長くなり頻繁なメンテナンスから解放される。更に空気イオンは庫内の物品を良好な状態で保存する効果を当然ながら有する。
【0030】
4.半導体用のシリコンウエハーなどの保管には低湿度環境下で酸化を防止し、かつ有機ガスや塩基・アルカリガスなどの汚染ガスはウエハーの表面を汚すと不良率が飛躍的に増加するので清浄な気体の環境下に保存する必要がある。本発明は定湿化手段で庫内を低湿度にしてかつ空気イオン放出手段で空気の汚染ガスを清浄化するので上述の条件を満たす。
【0031】
更には、低湿度環境下では必然的に生じる静電気による帯電を比較的に周波数が高い交流高電圧でプラスとマイナスの空気イオンを交互に発生し放出するので上記静電気による帯電を消去し帯電を防止するのでシリコンウエハーは破壊の危険から保護される。このことはシリコンウエハーに限らず電子部品やその他の基盤や他の物品にも適用されるのは言うまでもない。
【0032】
本発明はこのように多く現実的な優れた効果を発揮する画期的な発明と言える。
以上のように民生用・工業用として非常に優れた低湿・清浄保管庫を提供するが半導体ウエハーや液晶製造およびステッパー用レンズ等の保管にも応用できるものであり、また実施態様が異なっても本発明に該当することは言うまでもない。
【図面の簡単な説明】
【図1】保管庫の正面概念図
【図2】図1の扉を取り外した正面概念図
【図3】図1の縦断面概念図
【図4】図1における電気制御ブロック図
【図5】イオン発生器の立体図
【図6】図5の横断面概念図
【図7】イオン発生器の機能ブロック図
【図8】図2における除湿ユニット5及び加湿ユニット6の横断面を示す概念図
【図9】各カビ菌種をパラメーターとした湿度と増殖の関係を示す図
【図10】運転中の空気イオン放出量と一日運転後の残存カビ菌数
【図11】図1とは別の実施例における保管庫の正面概念図
【図12】図11の扉を取り外した正面概念図
【図13】図11の縦断面概念図
【図14】図11の調湿剤に使用する例としてのB形シリカゲルの吸水特性を示す図
【図15】図11の庫外湿度と庫内湿度の関係の一例を時間系列的に示す図
【符号の説明】
3…イオン発生器
4…除加湿ユニット
5…除湿ユニット
6…加湿ユニット
56,57…シャッター
61…加熱体
64…形状記憶バネ
70…調湿剤
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention, for example, cameras, precision lenses, optical lenses such as microscopes and telescopes or products in the consumer and industrial fields such as semiconductor wafers, appropriately adjust the humidity of the air environment for storing semi-finished products and parts, and remove air ions. The present invention relates to a storage in which static electricity is eliminated in a clean state by being filled, and articles are stably stored for a long period of time.
[0002]
[Prior art]
This will be described below by taking a conventional storage as an example. In order to prevent mold from occurring in foods and clothes that do not like high humidity, clothing such as accessories, and lenses such as cameras, those that reduce the relative humidity in the storage tank are widely used. Further, in addition to maintaining the humidity appropriately, a type has been devised in which fungi and the like in the refrigerator are sterilized to protect the stored items from various germs and mold. For example, there is JP-A-2000-300173. This discloses a technique for suppressing the growth of fungi and mold by increasing or decreasing the amount of negative ions in accordance with the humidity and temperature in a tank for storing agricultural products and the amount of agricultural products.
[0003]
[Problems to be solved by the invention]
However, there is a limit to simply adjusting the amount of negative ions generated in accordance with the temperature and humidity in the refrigerator and the amount of crops, and the items that need to be stored are not limited to crops, such as precision lenses, cameras, microscopes, and telescopes. It has become important to protect optical lenses from mold fungi, prevent oxidation of semiconductor wafers and the like, and prevent contaminants from adhering to organic, base and alkaline gases, and remove charged static electricity. Some foods and medicines have been required to be stored at a moderate humidity. Further, in recent years, the air environment has been required to be stricter than in the past in order to perform optimal storage according to the properties and characteristics of the stored items. It is well known that the occurrence of mold is greatly affected by the relative humidity in the atmosphere and proliferates actively under high humidity.However, when pollutant gas adheres to the lens, etc., moisture in the air may affect it. It has become clear.
[0004]
Hydrocarbon-based organic gas such as phthalic acid ester and basic gas such as ammonium chloride gas adhere to the surface of the semiconductor wafer due to moisture and contaminate the surface to generate defects. Very high concentrations of polluting gases and contaminants can contaminate objects alone, and very high humidity water vapor can cause mold to grow, but in normal polluting conditions the polluting gases can contaminate the objects and can be very humid. It has also been found to play a role. Focusing on this point, the present invention purifies by dehumidifying the air in the storage tank with a desiccant, oxidizing organic gas with air ions to decompose into carbon dioxide gas and water, and decomposing base and alkali gas in the same manner. Protecting stored items from contamination in an air environment humidified by air.
Conventionally, there has been a lot of applications in which keeping the humidity in the storage below a certain level has been restricted due to the possibility of static electricity being charged in the storage in the storage. The present invention also addresses this point.
[0005]
Industrially, a method using a photocatalyst is also being developed, but there are drawbacks such as dangers and large-scale equipment in general households. For this reason, the always-operated storage has drawbacks for home use. Furthermore, there is a lot of demand for preventing the activity of microorganisms for long-term preservation of foods by a combination of low humidity and clean air, and storage is required in appropriate homes, factories and laboratories. Further, there is a potential need to extend the short life of a spring made of a shape memory alloy widely used in a dehumidifying and humidifying device for increasing the humidity by releasing it from rust. In view of the above, the present invention provides an optimal technique for storing diversified articles, and the present invention solves the above-mentioned problems at once.
[0006]
[Means for Solving the Problems]
1. A storage provided with a humidifying means for reducing the relative humidity in the storage to 40% or less and an air ion emitting means for generating air ions and releasing the air ions in the storage.
2. Humidity setting means for setting the relative humidity in the refrigerator to an arbitrary relative humidity within a range of 30 to 70%; constant humidity means for humidifying the interior of the refrigerator to the humidity set by the humidity setting device; And a storage unit provided with air ion emitting means for generating and releasing the air ions in the storage.
3. It has a heat source to heat and regenerate the desiccant, and the heat of this heat source activates the opening and closing of the shutter by expansion and contraction made of a shape memory alloy to dehumidify the inside of the refrigerator or / and generate humidifying means and air ions to generate air ions in the refrigerator. A storage provided with air ion emitting means for emitting air ions.
4. A Peltier element and a Peltier element, in which a low-temperature radiation fin that exposes water vapor in the air in the refrigerator to reduce the humidity in the refrigerator and a high-temperature radiation fin is disposed outside the refrigerator and attached. A storage device provided with a power supply means and air ion emission means for generating air ions and releasing the air ions into the storage.
5. Air ion emitting means for generating both positive and negative air ions and releasing the air ions into the compartment, and constant humidity humidifying means having at least a function of lowering the humidity than the environmental atmosphere in which the storage is installed are provided. Storage.
[0007]
BEST MODE FOR CARRYING OUT THE INVENTION
Next, an embodiment of the present invention will be described with reference to the drawings.
In FIG. 1, a storage 1 is a cabinet 10 in which a front door 2 can be opened and closed, and has a closed structure when the door 2 is closed. 2 and 3, an ion generator 3 is provided at the uppermost rear portion of the refrigerator, and a dehumidifying / humidifying unit 4 is provided at a central rear surface of the refrigerator. A storage product 8 such as a chemical product can be stored so that quality changes do not occur by generating air ions in the refrigerator, removing bacteria and mold, and humidifying and stabilizing the refrigerator. Have been.
[0008]
As shown in the functional block diagram of FIG. 4, the control circuit 9 performs arithmetic processing based on the signals of the power supply circuit 20, the input circuit 21 for receiving various signals, the output circuit 22 for outputting output signals to the output device, and the input circuit 21. It comprises a central processing unit (CPU) 23 for outputting to the output circuit 22. The input circuit 21 is set by the humidity information detected by the humidity sensor 24, the ion concentration information detected by the ion counter 25, the signal of the humidity setting value set by the humidity setting unit 26 of the operation unit 31, and the ion number setting unit 27. Accepts each of the ion numerical signals. The output circuit 22 outputs the signal to a humidity display 28 for displaying the humidity set value and the humidity in the refrigerator, and the ion number display 29 outputs the ion count set value and the ion numerical value in the refrigerator. Further, the output circuit 22 outputs electricity for driving the dehumidifying unit 5 and the humidifying unit 6 of the dehumidifying / humidifying unit 4, and also activates the ion generator 3 to output an ion generation level signal. The power supply circuit 20 converts the AC power from the power plug 32 into a low-voltage DC through a normal switching circuit and supplies it to an input circuit 21, an output circuit 22, and a central processing unit (CPU) 23. It supplies power for operation to various setting devices, sensors, displays, dehumidification / humidification units and ion generators through the circuit. Since the input circuit 21 and the output circuit 22 are ordinary input / output circuits, detailed description will be omitted. Since the central processing unit 23 is also a processing device using a general microcomputer, a detailed description is omitted. Although the humidity setting device 26 and the ion setting device 27 illustrate an example using a variable resistor, a push button switch or the like may be used. The humidity sensor 24 includes a capacitance type sensor and a sensor using expansion and contraction of a special film. The ion counter 25 generally measures the number of ions in the air by utilizing the weak conductivity of the air. Neither is the basis of the present invention, so a detailed description is omitted. The display 28 may be a three- or four-digit seven-segment LED array or a needle-type meter. The ion generator 3 and the dehumidifying / humidifying unit 4 will be described later.
[0009]
Next, in FIG. 5, the ion generator 3 has a lattice-shaped stainless steel net 43 on one surface of an outer case 44, and the other surface has a box shape made of synthetic resin or the like. From another side, an input wire 45 is connected to the control circuit 9. In FIG. 6, reference numeral 41 is sealed by providing the ion bar circuit 46, the high-voltage transformer 47, and the like shown in FIG. One of the secondary windings of the high-voltage transformer 47 is connected to the discharge needle 42 and the other is connected to the above-described net 43. FIG. 7-A shows an electric conceptual diagram of the ion generator, in which positive and negative air ions are alternately generated at a high AC voltage, and FIG. 7-B shows a high voltage transformer 45 provided with a high voltage diode 48 and a discharge needle 42. Is a diagram in the case where only negative air ions are generated. The inverter circuit 46 normally supplies an alternating current having a frequency of 1 kHz to 30 kHz to the high voltage transformers 45 and 47. An appropriate voltage is normally generated in the secondary side of the high voltage transformers 45 and 47 in the range of 1000 to 7000 V, and corona discharge occurs between the discharge needle 42 and the net 43 to generate air ions. Most of the generated ions are emitted as ion wind and are discharged from the opening of the net 43 into the storage. These ions are mainly generated by ionizing oxygen or water vapor in the air.
[0010]
Next, the dehumidifying / humidifying unit 4 will be described with reference to FIG. The case 51 has openings 52 and 53, and valve seats 54 and 55 are provided around the openings 52 and 53. The shutters 56 and 57 are pivotally supported by a small hole (not shown) opened in the case 51 so that the shutters 56 and 57 can be integrally moved to the left and right by a plurality of connection charges 58. A drying box 60 having a large number of small holes in which a desiccant 59 is stored is fixed to the center of the case 51. A heating element 61 is provided near a substantially central portion in the drying box 60. One of the plurality of consolidated salaries 58 is an operating salary 62, and the other of a bias spring 63, one of which is fixed to the case 51, is fixed near the center thereof. Further, the other side of the shape memory spring 64, one of which is fixed to the drying box 60, is fixed near the center of the operating salary 62.
[0011]
The operation will now be described. Normally, the tensile force of the bias spring 63 is stronger than the tensile force of the shape memory spring 64, and the shutters 56 and 57 are urged in the A direction. In the airtight state, the valve seat 54 and the shutter 57 of the opening 52 are sufficiently separated from each other, and the outside and the inside of the case 51 are in a ventilation state. A wall 65 is provided near the center of the case 51. If the left side is A and the right side is B, in this state, the air in the case A is in communication with the side A, and the water vapor in the air on the side A is desiccant 59 Absorbs moisture. Therefore, the humidity on the A side decreases.
[0012]
Here, when the heating element 61 is energized and the temperature rises, the shape memory spring 64 shrinks due to the heat. Then, the operating fee 62 moves to the B side against the bias spring 63. Accordingly, the shutter 56 is separated from the valve seat 54, that is, the opening 52 is formed, while the shutter 57 is in contact with the valve seat 55 and the opening 54 is eliminated. The temperature of the desiccant 59 rises due to the heat of the heating element 61, and the desiccant 59 emits moisture absorbed as steam.
[0013]
This vapor is discharged to the B side through the opening 52. At a predetermined time, the power supply to the heating element 61 is stopped, so that the shutters 56 and 57 return to the original positions again, and the desiccant 59 absorbs the water vapor on the A side to lower the humidity.
[0014]
In this way, for example, if the heating means 61 is energized for 30 minutes and deactivated for 5 hours 30 minutes by a timer means or the like at a constant time period, the A side is automatically dehumidified and the B side is humidified. become.
Therefore, if the A side is mounted inside the refrigerator and the B side is mounted outside the refrigerator, the unit becomes a dehumidifying unit. This technique is a known technique, for example, as disclosed in Japanese Utility Model Publication No. Hei 1-31912. See this publication for details. In this unit, the shape memory spring 64 is made of a shape memory alloy.
[0015]
The shape memory alloy is usually a Ni-Ti alloy. However, when the heat of the heating element 61 is repeatedly received and expanded and contracted repeatedly, the material is oxidized, that is, rusts when the material having a low purity or the heat treatment of the surface is inappropriate. May have a very short life. Since air ions have the property of suppressing this oxidizing action, rust of the shape memory alloy can be prevented and the life of the shape memory spring 64 can be drastically improved.
[0017]
Although not widely described because it is generally widely known, a radiating fin is provided on a low-temperature side of a known Peltier element as a means for dehumidifying and installed in a refrigerator, and the fin cools air in the refrigerator. There is also a method of dehumidifying by dewatering the water vapor of the air in the refrigerator and discharging the dewed water to the outside of the refrigerator. In this dehumidifying method, aluminum fins with good thermal conductivity that water droplets always condense on the heat radiation fins inside the refrigerator are used when the surface treatment is inappropriate or when the purity is low. Is easily rusted in a relatively short time. Since air ions have the property of suppressing this oxidizing action, the life can be greatly extended.
[0018]
The operation method of this embodiment will be described. First, after turning on the power switch, the knobs 33 and 34 of the humidity setting device 26 and the ion number setting device 27 are turned and set to appropriate values for storage of the storage object. When the knobs 33 and 34 are turned, the humidity indicator 28 and the ion number indicator 29 of the indicator 30 display a set value for a short period of time, for example, about 3 seconds, and then display the humidity and the number of ions in the refrigerator. When the humidity in the refrigerator is higher than the set value, the dehumidifying unit 5 operates to lower the humidity. In the opposite case, the humidification unit 6 operates. When the number of ions in the chamber is larger than the set value, the inverter circuit supplying the primary circuit of the high-voltage transformer 47 of the ion generator 3 lowers the voltage, and in the opposite case, raises the voltage to increase the ions released by the ion generator 3. The central processing unit 23 of the control circuit 9 controls the number to approach the set value.
[0018]
In FIG. 9, most conventional storages were provided with a dehumidifying device. This is because, as shown in FIG. 9, general mold that generates mold occurs at high humidity, and when the humidity decreases, the reproductive rate increases. Is rapidly reduced, for example, the occurrence of mold on the camera lens can be substantially prevented. However, infrequent but less dry bacteria such as Aspergillus niger are active and proliferate under low humidity.
For example, a video camera such as a video camera which has a mechanism for precisely moving the lens in order to focus the lens or change the magnification uses a lubricant, and this lubricant has a relative humidity of about 30%. In the following, the performance as a dry lubricant is significantly deteriorated.
[0019]
Therefore, from the viewpoint of the lubricant, the relative humidity is desirably 40 to 50%. However, as described above, at 40% or more, general fungi easily grow. For the storage of Western confectionery or Japanese confectionery, the relative humidity is desirably 50 to 60%, and if it is 40% or less, it dries to dryness and loses its taste, and if it is stored at 60% or more, it becomes bloated and unfit for eating. There are many things. The same can be said for the storage of grains and vegetables. However, most of the fungi and viable bacteria grow actively at a relative humidity of 50% or more. When air ions are released into the storage room, the growth of these bacteria is suppressed.
[0020]
Semiconductor silicon wafers are liable to cause defects due to oxidation at high humidity, and when stored in an atmosphere of an organic gas or an acid / base gas, contaminants of the gas adhere to the surface to cause defects. This indicates the degree of adhesion by measuring the contact angle of the surface. Many of the molded semiconductor elements and other electronic components are stored or stored in high humidity, including the substrate before soldering in the mounting process. Danger to workers.
[0021]
In particular, the temperature of lead-free solder, which is often adopted in recent years, is high, and this phenomenon is likely to occur significantly. Therefore, the lower the humidity of the atmosphere in which these are stored, the better, but from the viewpoint of static electricity, there is a trade-off that the relative humidity is preferably 40% or more. In this embodiment, since the relative humidity in the storage is sufficiently reduced and the ion generator 3 generates positive ions and negative ions alternately at extremely short intervals, neutralization and neutralization of static electricity are not performed on the stored items. Contradictions are resolved at once. Also, a method of generating positive and negative air ions alternately with an AC voltage has been described, but a single or plural ion generators for generating positive and negative ions, respectively, may be provided.
[0022]
Next, another embodiment will be described. In FIG. 11, the storage 1 has a closed structure when the door 2 is closed to the cabinet 10. Actually, there are usually minute gaps and the like, and it is not usually perfect sealing.
[0023]
Referring to FIG. 12, the storage object 8 is placed on the shelf 7 and the ion generator 3 is provided as in the previous embodiment. Here, reference numeral 70 denotes a humidity control agent which is provided on the inner wall of the storage. The amount and type of the humidity control agent 70 can be selected as appropriate for the target storage object 8.
[0024]
For example, there are B-type silica gel and diatom plate. As shown in FIG. 14, the water absorption of the B-type silica gel has a characteristic that the water absorption rapidly increases when the relative humidity is high. When the relative humidity of the outside of the refrigerator, that is, the outside air changes when the B-type silica gel is used as the humidity control agent 70, the relative humidity in the refrigerator changes as shown in FIG. This is because the airtightness of the cabinet 10 and the door 2 is not perfect, and the airtightness is slightly high, so that the humidity control 70 absorbs and discharges moisture, but is relatively stable. Indicates that relative humidity is maintained.
[0025]
The problem here is to maintain a relatively stable relative humidity, but not necessarily to keep it low. In other words, if there are many days with low outside humidity in winter, the inside of the refrigerator is stable at relatively low relative humidity, and if there are many days with high humidity of outside air during the rainy season, the inside of the refrigerator is also stable at relatively high relative humidity. Stable to do. Here, when the camera or the like is stored, if the inside of the refrigerator is stabilized at a relatively high relative humidity, there is a risk that mold will propagate on the lens and render the lens unusable. Here, the ion generator 3 generates air ions to prevent the growth of the mold.
[0026]
As shown in FIG. 10, as the number of air ions increases, the number of fungi can be reduced. Therefore, if an ion generator 3 having an appropriate capacity for an object to be stored is selected, an expensive positive dehumidifying means can be provided. The function as a storage can be sufficiently obtained without providing.
【The invention's effect】
[0027]
1. In general, mold bacterium prefers high humidity and proliferates. Therefore, in a low humidity environment, proliferation can be suppressed and lenses, foods and other articles can be protected from mold damage. However, a small number of species having the property of propagating at low humidity, such as Kawakuji aspergillus, which is referred to as lyophile, may occasionally occur. In this respect, according to the present invention, it is possible to suppress the activity of the Aspergillus niger, which grows well in a low humidity environment of 40% or less, by emitting negative air ions, and to almost completely protect the articles from mold damage. I can do it.
[0028]
2. There are musical instruments whose wooden materials are deformed in a low-humidity atmosphere, leather shoes and belts that dry out, and some types of food and pharmaceuticals that deteriorate in a low-humidity atmosphere. These often suffer the same or different damages in low humidity environments even in high humidity environments. Therefore, if left in a moderately humid environment, the fungi will grow and be damaged, making it impossible to use it for its intended purpose. Therefore, the present invention protects the above-mentioned articles from mold fungi, various germs, etc. by releasing negative air ions into the chamber when the relative humidity is about 30% to 70%.
[0029]
3. A dehumidifier that absorbs water vapor in the desiccant and heats it at regular time intervals and discharges the absorbed moisture to the outside of the refrigerator has a high dehumidifying capacity and is often used. For the operation of the shutter for switching between the inside and the outside of the refrigerator, it is rational to use a shape memory alloy that expands and contracts by the heat of the heat source to be heated, and it is common at present. However, this shape memory alloy is usually made of a Ti-Ni alloy, but it is oxidized, that is, rusts when the material is low in purity or heat treatment of the surface is inappropriate because it operates day and night. Life may be reached. Since air ions have the property of suppressing this oxidizing action, rust of the shape memory alloy can be prevented and the life of the shape memory spring 64 can be drastically improved.
Also, the radiating fin on the low-temperature side using the Peltier element rusts in a relatively short time due to water that is always condensed, and has to be replaced from time to time.
In the present invention, since negative air ions having an oxidation inhibiting action are released into the refrigerator, the shape memory alloy located at a position communicating with the refrigerator hardly rusts and its life is prolonged. In addition, the life of the radiating fin of the Peltier element is prolonged, so that frequent maintenance is released. Furthermore, air ions naturally have the effect of preserving the articles in the refrigerator in a good condition.
[0030]
4. For storage of silicon wafers for semiconductors, oxidation is prevented in a low humidity environment, and contaminant gases such as organic gas, base, and alkali gas will clean up the surface of the wafer. It must be stored in a gaseous environment. The present invention satisfies the above-mentioned conditions because the inside of the refrigerator is made to have a low humidity by the constant humidity means and the air polluting gas is purified by the air ion emission means.
[0031]
Furthermore, the static electricity generated inevitably in a low humidity environment generates and emits positive and negative air ions alternately at a high AC voltage with a relatively high frequency. As a result, the silicon wafer is protected from the risk of destruction. It goes without saying that this applies not only to silicon wafers but also to electronic components and other substrates and other articles.
[0032]
The present invention can be said to be an epoch-making invention exhibiting such many realistic and excellent effects.
As described above, it provides a very excellent low-humidity and clean storage for consumer and industrial use, but it can be applied to storage of semiconductor wafers and liquid crystal production and lenses for steppers, etc. It goes without saying that the present invention is applicable.
[Brief description of the drawings]
FIG. 1 is a conceptual front view of a storage room; FIG. 2 is a schematic front view of a door with a door removed in FIG. 1; FIG. 3 is a schematic longitudinal sectional view of FIG. 1; FIG. 4 is an electric control block diagram in FIG. FIG. 6 is a conceptual view of the cross section of FIG. 5; FIG. 7 is a functional block diagram of the ion generator; FIG. 8 is a conceptual view of a cross section of the dehumidifying unit 5 and the humidifying unit 6 in FIG. 2; FIG. 9 is a graph showing the relationship between humidity and growth using each mold species as a parameter. FIG. 10 Air ion release during operation and the number of mold remaining after one day of operation. FIG. 11 is different from FIG. FIG. 12 is a conceptual front view of the storage in the embodiment with the door of FIG. 11 removed, FIG. 13 is a schematic longitudinal sectional view of FIG. 11, and FIG. FIG. 15 shows the water absorption characteristics of B-type silica gel. FIG. 15 shows an example of the relationship between the outside humidity and the inside humidity in FIG. Figure showing series EXPLANATION OF REFERENCE NUMERALS
DESCRIPTION OF SYMBOLS 3 ... Ion generator 4 ... Dehumidification unit 5 ... Dehumidification unit 6 ... Humidification units 56 and 57 ... Shutter 61 ... Heating body 64 ... Shape memory spring 70 ... Humidifier

Claims (6)

庫内の相対湿度を40%以下における任意の相対湿度に設定可能な湿度設定手段と前記湿度設定手段が設定した湿度に庫内を定湿化する定湿化手段と空気イオンを発生し前記庫内に前記空気イオンを放出する空気イオン放出手段とを設けたことを特徴とする保管庫。Humidity setting means capable of setting the relative humidity in the refrigerator to an arbitrary relative humidity of 40% or less, constant humidity means for humidifying the inside of the refrigerator to the humidity set by the humidity setting device, and air ions to generate air ions. A storage box provided with air ion emission means for emitting the air ions. 庫内の相対湿度を30乃至70%の範囲における任意の相対湿度に設定可能な湿度設定手段と前記湿度設定手段が設定した湿度に庫内を定湿化する定湿化手段と、空気イオンを発生し前記庫内に前記空気イオンを放出する空気イオン放出手段とを設けたことを特徴とする保管庫。Humidity setting means for setting the relative humidity in the refrigerator to an arbitrary relative humidity within a range of 30 to 70%; constant humidity means for humidifying the refrigerator to the humidity set by the humidity setting device; And a storage unit provided with air ion emitting means for generating and releasing the air ions in the storage. 乾燥剤を加熱再生する熱源を有し、この熱源の熱によって形状記憶合金製の伸縮でシャッターの開閉を作動せしめ庫内を除湿するまたは/および加湿手段と空気イオンを発生し前記庫内に前記空気イオンを放出する空気イオン放出手段とを設けたことを特徴とする保管庫。It has a heat source for heating and regenerating the desiccant, and the heat of this heat source activates the opening and closing of the shutter by expansion and contraction made of a shape memory alloy to dehumidify the inside of the storage or / and generate humidifying means and air ions to generate the air ions in the storage. A storage provided with air ion emitting means for emitting air ions. 庫内の湿度を低下するために前記庫内の空気中の水蒸気を露結させる低温側吸熱板を庫内側に、高温側放熱板を庫外に配置し取付けたペルチェ素子と前記ペルチェ素子を付勢する手段と空気イオンを発生し前記庫内に前記空気イオンを放出する空気イオン放出手段とを設けたことを特徴とする保管庫。A Peltier device and a Peltier device, in which a low-temperature heat-absorbing plate that exposes water vapor in the air in the refrigerator to lower the humidity in the refrigerator and a high-temperature heat sink is disposed outside the refrigerator and attached, are attached. A storage device provided with a power supply means and air ion emission means for generating air ions and releasing the air ions into the storage. プラスとマイナスの両方の空気イオンを発生し前記庫内に前記空気イオンを放出する空気イオン放出手段と、少なくとも保管庫を設置する環境雰囲気より低湿度にする機能を有する定湿化手段とを設けたことを特徴とする保管庫。Air ion emitting means for generating both positive and negative air ions and releasing the air ions into the storage, and a constant humidification means having a function of lowering the humidity at least than the environmental atmosphere in which the storage is installed are provided. Storage. 庫内と庫外とを通気的に略遮断し前記庫内の湿度を安定化するための調湿剤を前記庫内に配置し、かつ空気イオンを発生し前記庫内に前記空気イオンを放出する空気イオン放出手段を設けたことを特徴とする保管庫。A humectant for stabilizing the humidity in the refrigerator by substantially blocking the inside and the outside of the refrigerator from air is disposed in the refrigerator, and generates air ions and discharges the air ions into the refrigerator. A storage provided with a means for releasing air ions.
JP2002237204A 2002-07-12 2002-07-12 Storage Pending JP2004045007A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009019815A (en) * 2007-07-11 2009-01-29 Sharp Corp Cooling device
WO2014026369A1 (en) * 2012-08-14 2014-02-20 深圳市华星光电技术有限公司 Warehouse temperature and humidity monitoring method and monitoring system
CN106933278A (en) * 2017-04-20 2017-07-07 马鞍山纽泽科技服务有限公司 Curing chamber of accumulator plate temperature and humidity monitor method
CN111380130A (en) * 2020-03-13 2020-07-07 珠海格力电器股份有限公司 Air conditioner

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009019815A (en) * 2007-07-11 2009-01-29 Sharp Corp Cooling device
WO2014026369A1 (en) * 2012-08-14 2014-02-20 深圳市华星光电技术有限公司 Warehouse temperature and humidity monitoring method and monitoring system
CN106933278A (en) * 2017-04-20 2017-07-07 马鞍山纽泽科技服务有限公司 Curing chamber of accumulator plate temperature and humidity monitor method
CN111380130A (en) * 2020-03-13 2020-07-07 珠海格力电器股份有限公司 Air conditioner

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