JP2004043001A - Semiconductor wafer container - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a semiconductor wafer container having a structure in which the main body of the container and its lid can be easily fixed to or disengaged to each other, dust is hardly accumulated and a shock applied from outside is hardly transmitted to the wafer. <P>SOLUTION: This semiconductor wafer container 1 comprises a container main body 2 and a lid 3 for use closing the container main body 2. The container main body 2 includes a bottom plate 4, a wafer storing table part 5 formed to be raised from the upper surface of the bottom plate 4, a wafer storing space enclosed by a main body side wall 6 raised upward from inside rather than a raised circumferential edge of the wafer storing table part 5, and a plurality of ribs 7 protruded at the outer circumferential surface of the side wall 6. In addition, the lid 3 includes a lid upper plate 13 and a lid side wall 14 suspended from the lower surface of the lid upper plate 13. The lid side wall 14 covers the container main body side wall 6 and a rib 7 protruded at the outer circumferential surface of the side wall 6 and this lid side wall 14 is formed to have such a size as one covering at least a part of the raised circumferential edge 5a of the wafer storing table part. Further, the container main body 2 and the lid 3 are removably fixed by an engaging means. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a semiconductor wafer storage container.
[0002]
[Prior art]
As a storage container for transporting and storing semiconductor wafers (hereinafter simply referred to as wafers) in the next step, a cylindrical container body capable of storing a plurality of wafers stacked on each other, and a tube covering the cylindrical portion of the container body There is known a structure in which a screw is cut between the container body and the lid, and the lid is attached to the container body by screwing the lid (for example, USP 4,787, 508).
[0003]
The container described in US Pat. No. 4,787,508 has a structure in which, when a lid is mounted on a container main body, the cylindrical lid is covered on the cylindrical container main body, and both are rotated at least 360 ° or more. And a non-slip rotator made of streaky grooves is formed on the peripheral surface at the bottom of the container body and the peripheral surface at the top of the lid.
[0004]
[Problems to be solved by the invention]
In the above-mentioned container, when the lid is attached to and detached from the container main body, it is necessary to rotate both of them by 360 ° or more. Since it is a size that is difficult to grasp easily, the container body is erroneously dropped when the lid is attached or detached, and an operation error such as damage to the semiconductor is likely to occur. In addition, since there are a plurality of fine concave and convex grooves such as a rotette, there is also a problem that dust is accumulated in these grooves and it is difficult to remove them easily. On the other hand, there is also known a container in which the container body and the lid are attached and detached by locking the locking claw and the locking hole. However, the structure has a structure in which dust easily accumulates, or the wafer is exposed to an external impact. The protection performance was still insufficient.
[0005]
The present invention has been made in view of the above points, and it is an object of the present invention to provide a semiconductor wafer storage container having a structure in which a container main body and a lid can be easily attached and detached, dust hardly accumulates, and an external impact is hardly transmitted to the wafer. Aim.
[0006]
[Means for Solving the Problems]
That is, the present invention
(1) A semiconductor wafer storage container including a container main body and a lid for closing the container main body, wherein the container main body includes a bottom plate, a wafer storage table-like portion formed by rising from the upper surface of the bottom plate, and A wafer storage space surrounded by a main body side wall that rises upward from the inner side of the rising edge of the wafer storage base, and a plurality of ribs protruding from an outer peripheral surface of the side wall; It has a body upper surface plate and a lid side wall portion hanging down from the lower surface of the upper surface plate. When the lid is attached to the container main body, the lid side wall portion is the container main body side wall portion, and the outer periphery of the side wall portion is provided. It is formed to have a size that covers the ribs protruding from the surface and at least a part of the rising edge of the wafer storage pedestal, and the container main body and the lid are detachably fixed by locking means. Semiconductor wafer storage capacity ,
(2) A locking plate having a locking claw at the upper end is provided upright from the bottom plate of the container body, and a locking hole is formed at a position on the top plate of the lid corresponding to the locking plate to form a locking piece. The semiconductor wafer storage container according to the above (1), wherein the lid is detachably attached to the container body by engagement with the locking hole.
(3) When the lid is attached to the container main body, a gap is formed between the inner surface of the lid side wall and the protruding edge of the rib protruding from the outer peripheral surface of the container main body side wall. Or the semiconductor wafer storage container according to (2),
(4) While the notch portion is provided on the side wall portion of the lid, a label attaching plate is provided at a position corresponding to the notch portion on the side wall portion of the lid when the container body is closed with the lid on the side wall portion of the container. The semiconductor wafer storage container according to any one of the above (1) to (3), wherein the label attaching plate is fitted into the cutout portion of the lid side wall when the lid is mounted on the main body.
(5) The container body bottom plate and the lid top plate are formed in a rectangular shape, and the container body side wall and the lid side wall are formed in a cylindrical shape. Semiconductor wafer storage container,
Is the gist.
[0007]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, the present invention will be described with reference to the drawings.
1 and 2 show a semiconductor wafer storage container 1 of the present invention, and FIGS. 3 to 6 show a container main body 2 constituting the container 1 of the present invention, and FIGS. Indicates the lid 3 respectively.
[0008]
It is preferable that the container main body 2 and the lid 3 constituting the storage container 1 of the present invention are formed of conductive plastic. Examples of the conductive plastic include a plastic to which a conductive filler is added and a plastic which has been treated with a polymer alloy. Examples of the conductive filler include carbon black, graphite carbon, graphite, carbon fiber, metal powder, metal fiber, metal oxide powder, metal-coated inorganic fine powder, organic fine powder and fiber.
[0009]
As shown in FIGS. 3 to 6, the container body 2 includes a bottom plate 4, a wafer storage table-like portion 5 formed by rising from the upper surface of the bottom plate 4, and a rising edge 5 a of the wafer storage table-like portion 5. , A main body side wall portion 6 rising upward from the inside, and a space surrounded by the pedestal portion 5 and the main body side wall portion 6 forms a wafer storage space. A plurality of ribs 7 extending in the vertical direction of the main body side wall 6 are formed on the outer peripheral surface of the main body side wall 6, and the strength of the main body side wall 6 is enhanced by the ribs 7. A locking piece 9 having a locking claw 8 is provided at a corner of the bottom plate 4 of the container body 2.
[0010]
The main body side wall portion 6 is generally formed in a cylindrical shape in accordance with a disk-shaped wafer shape. The disk-shaped wafer has a nominal size of 5 inches, 6 inches, 8 inches, or the like, and the side wall 6 is formed in a size corresponding to the size of the wafer to be stored. A cutout 6a is provided in the main body side wall 6, and a notch 6b is provided in the side wall 6 above the cutout 6a. The notch 6a serves as an insertion port for an automatic machine arm when the semiconductor way is taken out. The notch 6b serves as an index of the upper limit position when a plurality of wafers are stacked and stored.
[0011]
The container body side wall 6 is provided with a label attaching plate 6c for attaching a wafer identification label or the like. As shown in FIG. 6, a plurality of ribs 10 and ring-shaped ribs 11 are provided on the back surface of the bottom plate 4 of the container body 2 to reinforce the bottom plate 4. A lip 12 is provided on the periphery of the bottom surface of the bottom plate 4 of the container body 2.
[0012]
As shown in FIGS. 7 to 9, the lid 3 has an upper surface plate 13 and a lid side wall portion 14 hanging down from the lower surface of the upper surface plate 13. A locking hole 15 for locking the locking piece 9 of the container body 2 is provided at a corner of the upper surface plate 13 of the lid 3. A notch 14a is provided in the lid side wall portion 14. When the lid 3 is attached to the container main body 2, the label attaching plate 6c provided on the side surface of the container main body 2 is attached to the notch 14a. It is configured to fit. A plurality of ring-shaped ribs 16 for increasing the strength of the lid upper plate 13 are provided on the inner surface side of the lid upper plate 13. Further, the lid side wall portion 14 is provided with a reinforcing portion 17 for preventing deformation and distortion of the side wall portion 14 due to external force. A rib 18 for reinforcement is also provided on the upper surface of the lid upper plate 13, and a lip 19 is formed on the periphery thereof (FIG. 10).
[0013]
The container body side wall portion 6 and the lid body side wall portion 13 are usually formed in a cylindrical shape corresponding to the shape of the wafer. However, when the container body bottom plate 4 and the cover body top plate 13 are formed in a rectangular shape, the lid body top plate is formed. 13 and the corner portion of the container body bottom plate 4 can be easily gripped, so that the container 1 can be easily carried. In addition, the stability of the container 1 is improved, and not only standing but also horizontal can be performed.
[0014]
When the lid 3 is attached to the container body 2, the side wall 14 of the lid 3 covers the container body side wall 6 and the rib 7 protruding from the outer peripheral surface of the side wall 6. It is formed to have a size that covers at least a part of the rising edge (rising edge 5a) of the wafer storage platform 5 (FIGS. 1 and 2). The container body 2 and the lid 3 are inserted with the locking pieces 9 of the container body 2 into the locking holes 15 of the lid, and the locking claws 8 are locked on the upper surface of the lid upper plate 13 around the locking holes 15. It is attached by letting it do. The lid 3 can be easily removed by releasing the locking by the locking claw 8.
[0015]
If one of the lip 12 on the back surface peripheral portion of the container body bottom plate 4 and the lip 19 on the top surface peripheral portion of the lid top plate 13 is formed slightly inside the peripheral portion (in the illustrated example, A lip 12 is provided on the peripheral edge of the back surface of the container body bottom plate 4 and a lip 19 is provided on the upper surface of the upper plate 13 of the lid 3 slightly inside the peripheral edge.) It becomes.
[0016]
The container 1 of the present invention is used when carrying or storing a wafer. At this time, as shown in FIG. 11, first, a sheet 20 having a buffering property is laid on the wafer storage base 5 of the container body 2. A plurality of wafers 22 are accommodated thereon while sequentially overlapping the separator 21, the wafer 22, the separator 21, the wafer 22, the separators 21, and so on. At this time, the notch 6b provided above the notch 6a of the container body side wall 6 is the upper limit position for wafer storage. The separator 21 and the buffering sheet 20 are placed on the uppermost wafer 21 and the lid 3 is attached, whereby the storage of the wafer 22 in the container 1 is completed.
[0017]
The ring-shaped ribs 16 provided on the inner surface side of the lid upper plate 13 have a reinforcing effect on the upper plate 13 as described above. However, when a plurality of wafers 22 are stored as shown in FIG. And has the effect of preventing rattling of the wafer.
[0018]
In the container 1 of the present invention, when the lid 3 is attached to the container main body 2 as shown in FIG. 11, the protruding edge 7a of the rib 7 provided on the container main body side wall 6 and the inner surface of the lid side wall 14 Preferably, a gap is formed between the side. With such a gap, even when a strong external force is applied to the lid side wall portion 14, the external force is not directly applied to the container body side wall portion 6, so that the protection of the wafer 22 is further improved.
[0019]
【The invention's effect】
As described above, in the semiconductor wafer storage container of the present invention, since the container main body and the lid can be attached and detached only by the engagement and disengagement of the locking means, the container main body and the lid are rotated by 360 ° or more to close the lid. Since the lid is easier to attach than the conventional container in which the body is attached and detached, there is little possibility of the wafer being dropped and damaged by mistake when attaching and detaching the lid. When the lid is attached to the container main body, the lid side wall covers the container main body side wall, the rib protruding from the outer peripheral surface of the side wall, and at least a part of the rising peripheral edge of the wafer storage base portion. Since the lid is formed to have a size to cover, even if an external force is applied to the lid side wall and deformation occurs, the lid side wall is supported by the peripheral edge of the rising portion of the wafer storage okay, and there is no possibility that further deformation will occur. Therefore, damage to the wafer due to external force can be prevented. Further, since the container of the present invention does not have a deep gap or a fine groove, there is no possibility that dust or the like is accumulated and cleaning is easy.
[0020]
Further, when the lid is attached to the container main body, a gap is formed between the inner surface of the lid side wall and the projecting edge of the rib protruding from the outer peripheral surface of the container main body side wall. Even if a strong external force is applied to the wafer 21, the external force is not directly applied to the container body side wall portion 6, so that the protection of the wafer 21 is further improved.
[0021]
A notch is provided in the lid side wall, and a label attaching plate is provided at a position corresponding to the notch in the lid side wall of the container main body side when the container body is closed with the lid. When the lid is attached to the main body, when the label attaching plate is configured to fit into the cutout portion of the lid side wall portion, the attachment of the label describing the type of the wafer stored in the label attaching plate can be performed. The stored wafer can be identified before and after the lid is attached.
[0022]
Furthermore, when the container main body bottom plate and the lid upper surface plate are formed in a rectangular shape, and the container main body side wall and the lid side wall are formed in a cylindrical shape, the container is easily carried, and the stability of the container is improved. This has the effect of enabling both vertical and horizontal storage.
[Brief description of the drawings]
FIG. 1 is a front view of the container of the present invention.
FIG. 2 is a side view of the container of the present invention.
FIG. 3 is a front view of the container body.
FIG. 4 is a side view of the container body.
FIG. 5 is a plan view of the container body.
FIG. 6 is a bottom view of the container body.
FIG. 7 is a front view of the lid.
FIG. 8 is a side view of the lid.
FIG. 9 is a bottom view of the lid.
FIG. 10 is a plan view showing a state where a lid is attached to the container body.
11 is a vertical sectional view taken along the line XI-XI in FIG.
[Explanation of symbols]
REFERENCE SIGNS LIST 1 semiconductor wafer storage container 2 container main body 3 lid 4 container main body bottom plate 5 wafer storage pedestal portion 5 a rising edge of trapezoidal portion 6 container main body side wall portion 6 c label attaching plate 7 rib 8 locking claw 9 locking piece 13 Lid upper surface plate 14 Lid side wall 14a Notch 15 Lock hole

Claims (5)

What is claimed is: 1. A semiconductor wafer storage container comprising: a container body; and a lid body for closing the container body, wherein the container body includes a bottom plate, a wafer storage table-like portion formed by rising from an upper surface of the bottom plate, and the wafer storage table. A wafer storage space surrounded by a main body side wall that rises upward from the inner side of the rising edge of the shaped portion; and a plurality of ribs protruding from an outer peripheral surface of the side wall. And a lid side wall portion hanging down from the lower surface of the upper plate. The lid side wall portion projects from the container main body side wall portion and the outer peripheral surface of the side wall portion when the lid body is attached to the container body. A semiconductor that is formed to have a size to cover the provided ribs and to cover at least a part of the rising edge of the wafer storage platform, and that the container body and the lid are detachably fixed by locking means. Wafer storage container. A locking plate having a locking claw at the upper end is erected from the bottom plate of the container body, and a locking hole is formed at a position on the top plate of the lid corresponding to the locking plate, and a locking piece and a locking hole are formed. 2. The semiconductor wafer container according to claim 1, wherein the lid is detachably attached to the container body by engagement with the container. 3. A gap is formed between the inner surface of the side wall of the lid and the projecting edge of the rib projecting from the outer peripheral surface of the side wall of the container when the lid is mounted on the container body. Semiconductor wafer storage container. While the notch portion is provided on the side wall portion of the lid, a label attaching plate is provided at a position corresponding to the notch portion of the side wall portion of the lid when the container body is closed with the lid on the side wall portion of the container body, and the lid is provided on the container body. The semiconductor wafer storage container according to any one of claims 1 to 3, wherein the label attaching plate is fitted into the notch in the side wall of the lid when the body is mounted. The semiconductor wafer storage container according to any one of claims 1 to 4, wherein the container main body bottom plate and the lid top plate are formed in a rectangular shape, and the container main body side wall and the lid side wall are formed in a cylindrical shape.

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