JP2004020221A5 - - Google Patents
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- Publication number
- JP2004020221A5 JP2004020221A5 JP2002171620A JP2002171620A JP2004020221A5 JP 2004020221 A5 JP2004020221 A5 JP 2004020221A5 JP 2002171620 A JP2002171620 A JP 2002171620A JP 2002171620 A JP2002171620 A JP 2002171620A JP 2004020221 A5 JP2004020221 A5 JP 2004020221A5
- Authority
- JP
- Japan
- Prior art keywords
- holder
- piezoelectric
- cantilever
- piezoelectric element
- end connected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002171620A JP2004020221A (ja) | 2002-06-12 | 2002-06-12 | カンチレバーホルダ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002171620A JP2004020221A (ja) | 2002-06-12 | 2002-06-12 | カンチレバーホルダ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004020221A JP2004020221A (ja) | 2004-01-22 |
JP2004020221A5 true JP2004020221A5 (es) | 2005-10-06 |
Family
ID=31171425
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002171620A Pending JP2004020221A (ja) | 2002-06-12 | 2002-06-12 | カンチレバーホルダ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2004020221A (es) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4895379B2 (ja) * | 2007-02-20 | 2012-03-14 | セイコーインスツル株式会社 | レバー加振機構及び走査型プローブ顕微鏡 |
KR101007816B1 (ko) | 2008-06-16 | 2011-01-25 | 두산메카텍 주식회사 | 원자력 현미경용 캔틸레버의 고정체 |
ES2438021B1 (es) * | 2011-08-02 | 2014-12-12 | Universidad De Castilla La Mancha | Micropalanca para microscopio de fuerzas atómicas y microscopio que incorpora dicha micropalanca |
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2002
- 2002-06-12 JP JP2002171620A patent/JP2004020221A/ja active Pending
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