JP2004020221A5 - - Google Patents

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Publication number
JP2004020221A5
JP2004020221A5 JP2002171620A JP2002171620A JP2004020221A5 JP 2004020221 A5 JP2004020221 A5 JP 2004020221A5 JP 2002171620 A JP2002171620 A JP 2002171620A JP 2002171620 A JP2002171620 A JP 2002171620A JP 2004020221 A5 JP2004020221 A5 JP 2004020221A5
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JP
Japan
Prior art keywords
holder
piezoelectric
cantilever
piezoelectric element
end connected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002171620A
Other languages
English (en)
Japanese (ja)
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JP2004020221A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002171620A priority Critical patent/JP2004020221A/ja
Priority claimed from JP2002171620A external-priority patent/JP2004020221A/ja
Publication of JP2004020221A publication Critical patent/JP2004020221A/ja
Publication of JP2004020221A5 publication Critical patent/JP2004020221A5/ja
Pending legal-status Critical Current

Links

JP2002171620A 2002-06-12 2002-06-12 カンチレバーホルダ Pending JP2004020221A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002171620A JP2004020221A (ja) 2002-06-12 2002-06-12 カンチレバーホルダ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002171620A JP2004020221A (ja) 2002-06-12 2002-06-12 カンチレバーホルダ

Publications (2)

Publication Number Publication Date
JP2004020221A JP2004020221A (ja) 2004-01-22
JP2004020221A5 true JP2004020221A5 (es) 2005-10-06

Family

ID=31171425

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002171620A Pending JP2004020221A (ja) 2002-06-12 2002-06-12 カンチレバーホルダ

Country Status (1)

Country Link
JP (1) JP2004020221A (es)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4895379B2 (ja) * 2007-02-20 2012-03-14 セイコーインスツル株式会社 レバー加振機構及び走査型プローブ顕微鏡
KR101007816B1 (ko) 2008-06-16 2011-01-25 두산메카텍 주식회사 원자력 현미경용 캔틸레버의 고정체
ES2438021B1 (es) * 2011-08-02 2014-12-12 Universidad De Castilla La Mancha Micropalanca para microscopio de fuerzas atómicas y microscopio que incorpora dicha micropalanca

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