JP2004014881A5 - - Google Patents
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- Publication number
- JP2004014881A5 JP2004014881A5 JP2002167736A JP2002167736A JP2004014881A5 JP 2004014881 A5 JP2004014881 A5 JP 2004014881A5 JP 2002167736 A JP2002167736 A JP 2002167736A JP 2002167736 A JP2002167736 A JP 2002167736A JP 2004014881 A5 JP2004014881 A5 JP 2004014881A5
- Authority
- JP
- Japan
- Prior art keywords
- fly
- illumination
- exposure apparatus
- eye
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005286 illumination Methods 0.000 claims 31
- 238000003384 imaging method Methods 0.000 claims 3
- 230000003287 optical effect Effects 0.000 claims 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002167736A JP2004014881A (ja) | 2002-06-07 | 2002-06-07 | 露光装置の照明系 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002167736A JP2004014881A (ja) | 2002-06-07 | 2002-06-07 | 露光装置の照明系 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004014881A JP2004014881A (ja) | 2004-01-15 |
| JP2004014881A5 true JP2004014881A5 (https=) | 2005-09-29 |
Family
ID=30434896
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002167736A Pending JP2004014881A (ja) | 2002-06-07 | 2002-06-07 | 露光装置の照明系 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2004014881A (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106707691B (zh) * | 2015-07-15 | 2018-10-16 | 上海微电子装备（集团）股份有限公司 | 曝光装置及方法 |
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2002
- 2002-06-07 JP JP2002167736A patent/JP2004014881A/ja active Pending