JP2004014881A5 - - Google Patents

Claims (10)

An illumination system of an exposure apparatus comprising at least one set of fly-eye lenses and a condenser lens disposed behind the fly-eye lens, wherein the fly-eye lens has an aperture shape similar to that of the illumination area. An illumination system of an exposure apparatus. An illumination system of an exposure apparatus including at least two sets of fly-eye lenses and a condenser lens arranged behind the fly-eye lenses, and each of the two sets of fly-eye lenses has an aperture shape of an element lens in an illumination area. An illumination system of an exposure apparatus that is similar in shape to the shape. An illumination system of an exposure apparatus including at least one set of fly-eye lenses, a condenser lens arranged behind the fly-eye lenses, an illumination mask, and an imaging optical system for illumination, comprising: An illumination system of an exposure apparatus in which the aperture shape, the effective area of the illumination mask, and the illumination area are substantially similar to each other.   The illumination system of the exposure apparatus according to claim 1, wherein the illumination area has a hexagonal shape.   The illumination system of an exposure apparatus according to claim 2, wherein the two sets of fly-eye lenses are integrated, and the element lenses are formed by forming convex lenses on both end faces of a rod-shaped transparent member.   3. An illumination system for an exposure apparatus according to claim 2, wherein the two sets of fly-eye lenses have the same focal length and are arranged with an interval equal to the focal length. At least one set of fly-eye lenses;
  An illumination system comprising a condenser lens disposed behind the fly-eye lens, wherein the fly-eye lens has an aperture shape similar to that of an illumination area. system. At least one set of fly-eye lenses;
  An exposure apparatus having an illumination system composed of a condenser lens disposed behind the fly-eye lens, wherein the fly-eye lens has an aperture shape similar to that of an illumination area. A featured exposure apparatus. At least one set of fly-eye lenses;
  A condenser lens arranged behind the fly-eye lens,
  An illumination mask;
  An illumination system of an exposure apparatus configured with an imaging optical system for illumination,
  An illumination system, wherein the aperture shape of the element lens of the fly-eye lens, the aperture shape of the illumination mask, and the shape of the illumination area are substantially similar to each other. At least one set of fly-eye lenses;
  A condenser lens arranged behind the fly-eye lens,
  An illumination mask;
  An exposure apparatus having an illumination system composed of an imaging optical system for illumination,
  An exposure apparatus characterized in that the aperture shape of the element lens of the fly-eye lens, the aperture shape of the illumination mask, and the shape of the illumination area are substantially similar to each other.