JP2004014398A - Manufacturing method and baking device of plasma display panel (pdp) - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a PDP capable of properly baking a panel structure with a simple structure and by a position correction method of a baking object without producing much abrasion powder, and to provide a baking device used for it. <P>SOLUTION: Materials of rollers 22a, 23a and 24a and that of a setter 103 are selected so as to become a combination having high slidability as a relative relationship between them, and a position correction means for correcting a position with the baking object kept mounted on the roller is formed at a point where displacement of the baking object frequently occurs. Thereby, the position correction method of the baking object without producing much abrasion powder can be realized with a simple structure, and thereby, this manufacturing method of the PDP capable of properly baking the baking object and this baking device used for it can be realized. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method for manufacturing a plasma display panel (hereinafter, referred to as a PDP) known as a large-screen, thin, and lightweight display device, and a baking apparatus used for the same.
[0002]
[Prior art]
The PDP is manufactured by sequentially forming panel structures such as electrodes, dielectrics, and phosphors on a surface of a substrate called a front plate substrate or a back plate substrate by a thick film forming process in which printing, drying, and firing processes are repeated. It has a step of forming and, finally, a step of sealing the front plate substrate and the back plate substrate, and a firing device is used in the drying and firing processes.
[0003]
Here, a so-called roller hearth type continuous firing furnace suitable for mass production is used as the firing device. The roller hearth type continuous firing furnace has a transport means configured by arranging a plurality of rollers side by side in the transport direction of the substrate, and when firing a panel structure formed on the substrate, scratches on the substrate are caused. From the viewpoint of prevention and the like, firing is carried out while being transported by a transporting means in a state where the substrate is placed on an auxiliary substrate called a setter (hereinafter, this state is referred to as an object to be fired).
[0004]
As described above, in order to fire the panel structure favorably, it is important that the heating state of the substrate during firing is uniform over the entire surface of the substrate. However, in the roller hearth type continuous firing furnace, since the object to be fired is transported by the rotation of the roller, the object to be fired meanders on the transport means depending on the contact state between the setter and the roller of the object to be fired, It may be deflected, and in such a case, in addition to the adverse effect on the heat uniformity of the substrate, if the degree of misalignment is severe, it will be caught in the baking apparatus, and the transfer will not be performed smoothly. .
[0005]
Therefore, in the roller hearth type continuous firing furnace, the displacement of the object to be fired on the transporting means is appropriately adjusted. There is a problem that rubbing occurs between the setter of the object and the roller, and if the abrasion powder generated by the rubbing adheres to or mixes with the panel structure, the quality of the panel structure is adversely affected.
[0006]
Therefore, conventionally, when the position of the object to be fired is to be adjusted, the object to be fired is once lifted from the roller, the position is adjusted while floating from the roller, and then the object to be fired is returned to the roller again. Is adopted.
[0007]
[Problems to be solved by the invention]
However, in the method of positioning the object to be fired as described above, a lifting mechanism for lifting the object to be fired is required, which complicates an apparatus configuration for position adjustment. In addition, even with the above-described setting method, rubbing may occur between the lifting mechanism and the object to be fired, and in such a case, similarly, adverse effects on the panel structure due to the generated abrasion powder are observed. May be
[0008]
SUMMARY OF THE INVENTION The present invention has been made in view of such circumstances, and has a simple configuration and a method of localizing a material to be fired with less generation of abrasion powder, and a method of manufacturing a PDP capable of favorably firing a panel structure. The purpose of the present invention is to realize a firing apparatus used for the apparatus.
[0009]
[Means for Solving the Problems]
In order to achieve the above object, a method of manufacturing a plasma display panel according to the present invention includes a transport unit configured by arranging a plurality of rollers side by side in a transport direction of a substrate. A method for manufacturing a plasma display panel, comprising transporting a mounted substrate and firing a panel structure formed on the substrate, wherein the setter is made of low expansion coefficient crystallized glass, and the roller is made of silicon carbide. And the positioning of the setter is performed while the setter is placed on the roller.
[0010]
Further, in order to achieve the above object, a method of manufacturing a plasma display panel according to the present invention includes a transport unit configured by arranging a plurality of rollers side by side in a substrate transport direction; Arranged side by side, and, having an elevating means configured to be able to move up and down, and conveying the substrate placed on the setter by the conveying means, firing the panel structure formed on the substrate, and then, Transferring the fired substrate from the terminal end of the transfer means to the elevating means, wherein the setter is made of low expansion coefficient crystallized glass, and the roller is made of silicon carbide. It is made of a material having, and the positioning of the setter is performed in a state where the setter is placed on the roller of the elevating means, and And performs lifting still lifting means holding the regulating state.
[0011]
Further, in order to achieve the above object, the plasma display panel baking apparatus of the present invention has a transport unit configured by arranging a plurality of rollers side by side in the transport direction of the substrate, and the transport unit is provided on a setter. A device for manufacturing a plasma display panel configured to carry a substrate mounted on a substrate and to bake a panel structure formed on the substrate, wherein the setter is made of crystallized glass having a low expansion coefficient, and the roller is formed. It is made of a material having silicon carbide, and the positioning of the setter is performed in a state where the setter is placed on the roller.
[0012]
Further, in order to achieve the above object, a plasma display panel baking apparatus of the present invention includes a transport unit configured by arranging a plurality of rollers side by side in a substrate transport direction, and a plurality of rollers in a substrate transport direction. Arranged side by side, and, having lifting means configured to be able to move up and down, while carrying the substrate placed on the setter by the carrying means, firing the panel structure formed on the substrate, after firing A baking apparatus for a plasma display panel configured to transfer the substrate from the terminal end of the transfer means to the elevating means, wherein the setter is made of low expansion coefficient crystallized glass, and the roller is made of a material having silicon carbide. The position adjustment of the setter is performed in a state where the setter is placed on the roller of the elevating means, and the adjustment state is maintained. Or one in which was configured to perform the raising and lowering of the lifting means.
[0013]
BEST MODE FOR CARRYING OUT THE INVENTION
That is, the invention according to claim 1 of the present invention has a transport unit configured by arranging a plurality of rollers side by side in a transport direction of the substrate, and the transport unit transports the substrate placed on the setter. A method for manufacturing a plasma display panel, comprising transporting and firing a panel structure formed on a substrate, wherein the setter is made of crystallized glass having a low expansion coefficient, and the roller is made of a material having silicon carbide. The setting of the position of the setter is performed while the setter is placed on the roller.
[0014]
In addition, the invention according to claim 2 is a transporting means configured by arranging a plurality of rollers in the direction of transporting the substrate, and a plurality of rollers is arranged in a direction of transporting the substrate, and can be moved up and down. And lifting and lowering means configured to transport the substrate placed on the setter by the transport means, and firing the panel structure formed on the substrate, and then, after firing the substrate, Transferring from the terminal end to the elevating means, comprising: the setter is made of low expansion coefficient crystallized glass; the roller is made of a material having silicon carbide; Position adjustment is performed in a state where the setter is placed on the roller of the elevating means, and the elevating means is moved up and down while maintaining the adjusted state. A.
[0015]
According to a third aspect of the present invention, in the first or second aspect, the material of the roller is a Si—SiC material containing 2 to 50 wt% of Si metal and 98 to 50 wt% of SiC.
[0016]
According to a fourth aspect of the present invention, in the first or second aspect, the low expansion coefficient crystallized glass has 50 to 65 wt% of SiO ₂ and ₁ to 15 wt% of Al ₂ O ₃ .
[0017]
In addition, the invention according to claim 5 has a transport unit configured by arranging a plurality of rollers in the transport direction of the substrate, and transports the substrate placed on the setter by the transport unit. An apparatus for manufacturing a plasma display panel configured to perform sintering of a panel structure formed on a substrate, wherein the setter is made of low expansion coefficient crystallized glass, and the roller is made of a material having silicon carbide, The positioning of the setter is performed in a state where the setter is placed on the roller.
[0018]
Further, the invention according to claim 6 is a transporting means configured by arranging a plurality of rollers in the transport direction of the substrate, and a plurality of rollers is arranged in the transport direction of the substrate, and is capable of ascending and descending. Having a lifting means configured to transport the substrate placed on the setter, firing the panel structure formed on the substrate, and transporting the fired substrate from the terminal end of the transporting means. A baking apparatus for a plasma display panel configured to be transferred to an elevating means, wherein the setter is made of crystallized glass having a low expansion coefficient, the roller is made of a material having silicon carbide, and the position of the setter is adjusted. The setting is performed with the setter placed on the roller of the elevating means, and the elevating means is moved up and down while maintaining the regulation state.
[0019]
According to a seventh aspect of the present invention, in the invention of the fifth or sixth aspect, the material of the roller is a Si—SiC material containing 2 to 50 wt% of Si metal and 98 to 50 wt% of SiC.
[0020]
According to an eighth aspect of the present invention, in the invention of the fifth or sixth aspect, the low expansion coefficient crystallized glass has 50 to 65 wt% of SiO ₂ and ₁ to 15 wt% of Al ₂ O ₃ .
[0021]
Hereinafter, an embodiment of the present invention will be described, but the embodiment of the present invention is not limited thereto.
[0022]
(First Embodiment)
PDPs generate ultraviolet light by gas discharge and excite phosphors with the ultraviolet light to emit light. Color display is roughly divided into two types: an AC type and a DC type in terms of driving. There are two types, a plasma discharge panel and a counter discharge type. However, at present, the mainstream of the plasma display panel is a surface discharge type having a three-electrode structure because of high definition, large screen, and easy manufacturing. The structure has a pair of display electrodes adjacent to each other in parallel on one substrate, and has an address electrode, a partition, and a phosphor layer arranged on the other substrate in a direction crossing the display electrodes. Since the thickness of the phosphor layer can be relatively large, the phosphor layer is suitable for color display.
[0023]
Such a PDP can display at a higher speed than a liquid crystal panel, has a wide viewing angle, is easy to increase in size, and has a high display quality because it is a self-luminous type. In recent years, panel displays have attracted particular attention, and have been used for various purposes as display devices in places where many people gather and display devices for enjoying large-screen images at home.
[0024]
Here, the structure of a general PDP is shown in FIG. The PDP includes a front substrate 1 and a rear substrate 2. The front substrate 1 is, for example, a striped display in which a scanning electrode 4 and a sustain electrode 5 form a pair formed on a transparent and insulating substrate 3 such as a glass substrate made of a sodium borosilicate glass or the like by a float method. It comprises an electrode 6, a dielectric layer 7 formed so as to cover the display electrode group 6, and a protective film 8 made of MgO formed on the dielectric layer 7. The scanning electrode 4 and the sustaining electrode 5 are formed of transparent electrodes 4a and 5a made of a transparent and conductive material such as ITO, and are formed so as to be electrically connected to the transparent electrodes 4a and 5a. The bus electrodes 4b and 5b are made of, for example, Ag.
[0025]
The rear substrate 2 has an address electrode 10 formed on a substrate 9 opposed to the substrate 3 in a direction orthogonal to the display electrode 6, and a dielectric layer 11 formed so as to cover the address electrode 10. And a plurality of partition walls 12 formed in a stripe shape in parallel with the address electrodes 10 on the dielectric layer 11 between the address electrodes 10, and a phosphor layer 13 formed between the partition walls 12. Note that, for color display, the phosphor layer 13 is usually arranged in three colors of red, green, and blue in order.
[0026]
In the PDP, the front substrate 1 and the rear substrate 2 described above are opposed to each other with a minute discharge space interposed therebetween so that the display electrodes 6 and the address electrodes 10 are orthogonal to each other. ), And the discharge space is filled with a discharge gas obtained by mixing neon and xenon.
[0027]
The discharge space of the PDP is partitioned into a plurality of partitions by partition walls 12, and display electrodes 6 are provided between the partition walls 12 so as to form a plurality of discharge cells serving as unit light emitting regions. The address electrodes 10 are arranged orthogonally. Then, a discharge is generated by a periodic voltage applied to the address electrode 10 and the display electrode 6, and the phosphor layer 13 is irradiated with ultraviolet rays by the discharge and converted into visible light, whereby an image is displayed.
[0028]
Next, a method of manufacturing the PDP having the above-described configuration will be described with reference to FIG. FIG. 2 is a diagram showing steps of a method of manufacturing a PDP according to an embodiment of the present invention.
[0029]
First, a front substrate process for manufacturing the front substrate 1 will be described. After the substrate receiving step (S11) for receiving the substrate 3, a display electrode forming step (S12) for forming the display electrodes 6 on the substrate 3 is performed. This includes a transparent electrode forming step (S12-1) for forming the transparent electrodes 4a and 5a, and a bus electrode forming step for forming the bus electrodes 4b and 5b performed thereafter. 2) a conductive paste application step (S12-2-1) of applying a conductive paste such as Ag by screen printing or the like, and a conductive paste baking step of firing the applied conductive paste (S12-2-1). 2-2). Next, a dielectric layer forming step (S13) of forming the dielectric layer 7 so as to cover the display electrode 6 formed in the display electrode forming step (S12) is performed. This is a paste containing a lead-based glass material (the composition is, for example, 70% by weight of lead oxide [PbO], 15% by weight of boron oxide [B ₂ O ₃ ], 15% by weight of silicon oxide [SiO ₂ ]). Is applied by a screen printing method (S13-1), and thereafter, a glass paste firing step (S13-2) of firing the applied glass material. Thereafter, a protection film forming step (S14) of forming a protection film 8 such as magnesium oxide (MgO) on the surface of the dielectric layer 7 by a vacuum deposition method or the like is performed. Thus, the front substrate 1 is manufactured.
[0030]
Next, a back substrate process for manufacturing the back substrate 2 will be described. After the receiving step (S21) for receiving the substrate 9, an address electrode forming step (S22) for forming the address electrodes 10 on the substrate 9 is performed. This includes, for example, a conductive paste application step (S22-1) of applying a conductive paste such as Ag by screen printing or the like, and a conductive paste firing step (S22-2) of firing the applied conductive paste. Having. Next, a dielectric layer forming step (S23) of forming the dielectric layer 11 on the address electrode 10 is performed. This includes a dielectric paste application step (S23-1) of applying a dielectric paste containing TiO ₂ particles and dielectric glass particles by screen printing or the like, and then firing the applied dielectric paste. And a body paste firing step (S23-2). Next, a partition forming step (S24) for forming the partition 12 between the address electrodes 10 on the dielectric layer 11 is performed. This involves a partition paste application step (S24-1) of applying a partition paste containing glass particles by printing or the like, and a partition paste baking step (S24-2) of subsequently firing the applied partition paste. Have. After that, a phosphor layer forming step (S25) of forming the phosphor layer 13 between the partition walls 12 is performed. This is a phosphor paste application step (S25-1) in which red, green, and blue phosphor pastes are prepared and applied to gaps between partition walls, and thereafter, the phosphor paste is fired. And a paste baking step (S25-2). Thus, the back substrate 2 is manufactured.
[0031]
Next, the sealing of the front substrate 1 and the rear substrate 2 manufactured as described above, and the subsequent evacuation and filling of discharge gas will be described. First, a sealing member forming step (S31) of forming a sealing member made of a sealing glass frit on one or both of the front substrate 1 and the rear substrate 2 is performed. This includes a step of applying a glass paste for sealing (S31-1) and a step of temporarily firing a glass paste for removing resin components and the like in the applied glass paste (S31-2). . Next, a superposition step (S32) is performed to superpose the display electrodes 6 of the front substrate 1 and the address electrodes 10 of the rear substrate 2 so as to be orthogonal to each other, and thereafter, the both substrates are heated. A sealing step (S33) is performed in which the sealing member is softened to seal by sealing. Next, an evacuation and baking step (S34) for baking the panel while evacuating the minute discharge space formed by the sealed substrates is performed, and thereafter, discharge gas sealing for sealing the discharge gas at a predetermined pressure. The PDP is completed by performing the step (S35) (S36).
[0032]
Here, in the above manufacturing method, the bus electrodes 4b and 5b, the dielectric layer 7, the address electrode 10, the dielectric layer 11, the partition 12, the phosphor layer 13, and the sealing member (the panel structure 2) which are the panel structures 2 in the above manufacturing method. The baking apparatus used in the baking step, which is the forming step of (b), will be described.
[0033]
FIG. 3 is a sectional view of a schematic configuration of a firing apparatus used in the PDP manufacturing method according to the present embodiment. The sintering device 21 includes a forward transporting unit 22 configured by arranging a plurality of rollers 22a in the transport direction, a return transport unit 23 configured by arranging a plurality of rollers 23a in the transport direction, and a plurality of rollers 24a arranged in the transport direction. And a lifter 24 configured to be able to ascend and descend between the forward transport means 22 and the return transport means 23.
[0034]
The substrate 101 of the object to be fired 104 is the front plate substrate 1 or the rear plate substrate 2 of the PDP. Similarly, the panel structure 102 includes the bus electrodes 4b and 5b, the dielectric layer 7, the address electrode 10, the dielectric layer 11, and the partition 12 , A phosphor layer 13 and a sealing member (not shown). When the substrate 101 is fired, for example, to prevent the substrate 101 from being damaged, the substrate 101 is placed on an auxiliary substrate called a setter 103 (the structure in which the substrate 101 is placed on the setter 103 is removed). Hereinafter, the object to be fired 104 is transported by the outward transport means 22.
[0035]
In the above configuration, a characteristic point of the present embodiment is that the rollers 22a, 23a, 24a and the setter 103 are made of a combination of materials having relatively good slipperiness, and the setting of the setter position is performed by the roller. That is, it is performed in a state where it is mounted.
[0036]
As a specific example of a combination of materials having relatively good slip properties, a roller mainly composed of a SiC (silicon carbide) material is used as the roller 7 (hereinafter, referred to as a SiC roller). An example using an expansion coefficient crystallized glass material, for example, Neoceram N-0 (trade name) manufactured by Nippon Electric Glass Co., Ltd. (hereinafter referred to as neoceram setter) can be given.
[0037]
The SiC roller will be described in more detail. After mixing the powder of the SiC material and the binder, the mixture is molded into a roller shape, and then heated together with the Si material, thereby firing and removing the binder and melting the Si material. And impregnated in the roller, and is defined as a Si-SiC material containing 2 to 50 wt% of Si metal and 98 to 50 wt% of SiC.
[0038]
Further, Neoceram is a SiO ₂ 50~65wt%, 1~15wt% of _Al 2 _{O 3,} and those having a Li traces.
[0039]
FIG. 4 shows an example of the position regulating means. FIG. 4 shows an example in which a position regulating means is provided in the elevating means 24, and is a front view of the elevating means 24 in the transport direction of the object 104 to be fired. In FIG. 4, the shape of the object to be fired 104 is simplified for simplicity. When the object to be fired 104 is carried into the elevating means 24 (FIG. 4A), for example, a pin-shaped setting guide 24b contacts the setter 103 of the object to be fired 104 between the rollers 24a (FIG. 4B). . As a result, the position of the object to be fired 104 is regulated while remaining on the roller 24a. Here, even when the object to be fired 104 is lowered by the lifting / lowering means 24, the position of the object to be fired 104 is likely to be shifted. The regulation is released (FIG. 4C).
[0040]
The object to be fired 104 (FIG. 4D) from which the setting guide 24 b has been released is transferred from the lifting / lowering means 24 to the return transportation means 23. According to the above-described setting method, it is not necessary to lift the object to be fired 104 from the roller 24a, so that the man-hour for raising and lowering the object to be fired 104 in position adjustment is reduced, and the configuration as the position adjusting device is also simplified. It can be assumed that.
[0041]
In the above-described example, an example in which the positioning means is provided in the elevating means has been described. However, the same positioning means may be provided with emphasis on a portion where the frequency of occurrence of misalignment is high.
[0042]
Next, a firing step using the above-described firing apparatus 21 will be described. First, the object to be fired 104 is placed on the start end portion 22b of the forward transportation means 22. Then, the object to be fired 104 is introduced into the upper passage 22c of the baking apparatus 21 by the forward transport means 22 and is transported by the forward transport means 22 as it is. (Not shown) or the like, and heated to a predetermined firing temperature and fired. Thereafter, in the slow cooling section, the object to be fired 104 is conveyed while being cooled toward the terminal end portion 22d of the forward path conveying means 22. Next, the object to be baked 104 is conveyed as it is even after being conveyed to the conveying end part 22 d of the forward conveying means 22 and reaches the lifter 24. Then, the object to be fired 104 that has reached the lifter 24 is lowered by the lifter 24 to a height at which the object 104 is connected to the return transport means 23, and then transported in a direction opposite to the transport direction of the forward transport means 22. As a result, it is transported to the transport start end 23b of the return transport means 23. Thereafter, the to-be-baked object 104 is cooled to room temperature by the return transport means 23 while being transported in the lower passage 23c which is a cooling section. When the object to be fired 104 arrives at the conveyance end portion 23d of the homeward conveyance means 23, the fired substrate 101 is taken out of the setter 103. Then, the empty setter 103 moves again to the transfer start end 22b of the forward transfer means 22 at the upper position, where the next substrate 101 is placed, and again in the upper passage 22c for firing. be introduced.
[0043]
Here, in the sintering apparatus 21 used in the method of manufacturing a PDP according to the present embodiment as described above, the materials of the rollers 22a, 23a, 24a and the setter 103 are defined as a relative relationship between the two and the slipperiness. Since the position setting means for adjusting the position while the object to be fired is placed on the roller is provided so as to form a good combination, the rollers 22a and 23a which have an adverse effect on the panel structure 102 are provided. , 24a and the setter 103 are reduced in generation of abrasion powder, and it is possible to reduce the displacement of the object to be fired 104 with a simple configuration.
[0044]
Further, since the configuration of the positioning means is simple, the positioning means can be easily provided at a position where the displacement of the object to be fired 104 occurs or the like, thereby further improving the effect of correcting the displacement. Can be enhanced.
[0045]
【The invention's effect】
ADVANTAGE OF THE INVENTION As mentioned above, according to this invention, the position of the to-be-fired object with a simple structure and little generation of abrasion powder is possible, and thereby the PDP manufacturing method which can fire the to-be-fired object well. And a firing apparatus used for the same.
[Brief description of the drawings]
FIG. 1 is a cross-sectional perspective view showing a configuration of a plasma display panel. FIG. 2 is a process flow chart showing steps of a method of manufacturing a plasma display panel according to an embodiment of the present invention. FIG. FIG. 4 is a cross-sectional view showing a configuration of a baking apparatus for a plasma display panel. FIG. 4 is a view showing an example of a setting means in an elevating means of the baking apparatus for a plasma display panel according to one embodiment of the present invention.
22 Outgoing path conveying means 22a Roller 23 Return path conveying means 23a Roller 24 Elevating means 24a Roller 101 Substrate 102 Panel structure 103 Setter

Claims (8)

A step of having a transport unit configured by arranging a plurality of rollers side by side in the transport direction of the substrate, transporting the substrate placed on the setter, and firing the panel structure formed on the substrate by the transport unit A method for manufacturing a plasma display panel comprising: the setter is made of crystallized glass having a low expansion coefficient; the roller is made of a material having silicon carbide; and the positioning of the setter is performed by setting the setter to the roller. A method for manufacturing a plasma display panel to be performed while mounted. A transport unit configured by arranging a plurality of rollers side by side in the substrate transport direction, and a lifting unit configured to arrange a plurality of rollers side by side in the substrate transport direction, and configured to be movable up and down, The transporting means transports the substrate placed on the setter and fires the panel structure formed on the substrate, and then transports the fired substrate from the terminal end of the transporting means to the elevating means. A method of manufacturing a plasma display panel comprising: setting the setter of low expansion coefficient crystallized glass; forming the roller of a material having silicon carbide; adjusting the position of the setter; A method of manufacturing a plasma display panel in which the apparatus is mounted on a roller, and the elevating means is moved up and down while maintaining a regulation state. . The method for manufacturing a plasma display panel according to claim 1, wherein the material of the roller is a Si—SiC material containing 2 to 50 wt% of Si metal and 98 to 50 wt% of SiC. The method for manufacturing a plasma display panel according to claim 1, wherein the low expansion rate crystallized glass has 50 to 65 wt% of SiO ₂ and ₁ to 15 wt% of Al ₂ O ₃ . It has a transport unit configured by arranging a plurality of rollers side by side in the transport direction of the substrate. The transport unit transports the substrate placed on the setter and performs firing of the panel structure formed on the substrate. An apparatus for manufacturing a plasma display panel configured as described above, wherein the setter is made of crystallized glass having a low expansion coefficient, the roller is made of a material having silicon carbide, and the position of the setter is adjusted, A baking device for a plasma display panel configured to be mounted on a roller. A transport unit configured by arranging a plurality of rollers side by side in the substrate transport direction, and a lifting unit configured to arrange a plurality of rollers side by side in the substrate transport direction, and configured to be movable up and down, A plasma display configured to transport the substrate placed on the setter by the transport unit, bake the panel structure formed on the substrate, and transfer the fired substrate from the terminal end of the transport unit to the elevating unit. A panel baking apparatus, wherein the setter is made of crystallized glass having a low expansion coefficient, the roller is made of a material having silicon carbide, and the position of the setter is set on the roller of the elevating means. A baking apparatus for a plasma display panel configured to perform lifting and lowering of the lifting and lowering means while maintaining the trained state while maintaining the regulated state. 7. The baking apparatus for a plasma display panel according to claim 5, wherein the material of the roller is a Si-SiC material containing 2 to 50 wt% of Si metal and 98 to 50 wt% of SiC. Low expansion crystallized glass, a SiO ₂ 50~65wt%, the firing device of a plasma display panel according to _Al 2 _{O 3} to claim 5 or 6 is one having 1 to 15 wt%.

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