JP2004006886A5 - - Google Patents

Download PDF

Info

Publication number
JP2004006886A5
JP2004006886A5 JP2003148359A JP2003148359A JP2004006886A5 JP 2004006886 A5 JP2004006886 A5 JP 2004006886A5 JP 2003148359 A JP2003148359 A JP 2003148359A JP 2003148359 A JP2003148359 A JP 2003148359A JP 2004006886 A5 JP2004006886 A5 JP 2004006886A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003148359A
Other languages
Japanese (ja)
Other versions
JP4314887B2 (ja
JP2004006886A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2003148359A priority Critical patent/JP4314887B2/ja
Priority claimed from JP2003148359A external-priority patent/JP4314887B2/ja
Publication of JP2004006886A publication Critical patent/JP2004006886A/ja
Publication of JP2004006886A5 publication Critical patent/JP2004006886A5/ja
Application granted granted Critical
Publication of JP4314887B2 publication Critical patent/JP4314887B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2003148359A 1997-11-26 2003-05-26 窒化物半導体素子 Expired - Lifetime JP4314887B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003148359A JP4314887B2 (ja) 1997-11-26 2003-05-26 窒化物半導体素子

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP32499797 1997-11-26
JP2003148359A JP4314887B2 (ja) 1997-11-26 2003-05-26 窒化物半導体素子

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP13283198A Division JP3456413B2 (ja) 1997-11-26 1998-05-15 窒化物半導体の成長方法及び窒化物半導体素子

Publications (3)

Publication Number Publication Date
JP2004006886A JP2004006886A (ja) 2004-01-08
JP2004006886A5 true JP2004006886A5 (enrdf_load_stackoverflow) 2005-09-22
JP4314887B2 JP4314887B2 (ja) 2009-08-19

Family

ID=30445545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003148359A Expired - Lifetime JP4314887B2 (ja) 1997-11-26 2003-05-26 窒化物半導体素子

Country Status (1)

Country Link
JP (1) JP4314887B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100533794C (zh) * 2003-02-07 2009-08-26 三洋电机株式会社 半导体元件
CN117401997B (zh) * 2023-11-01 2024-09-20 郑州宏拓精密工具有限公司 一种光伏籽晶掏刀及其制备方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3974667B2 (ja) * 1994-08-22 2007-09-12 ローム株式会社 半導体発光素子の製法
JP2828002B2 (ja) * 1995-01-19 1998-11-25 松下電器産業株式会社 半導体発光素子およびその製造方法
EP0852416B1 (en) * 1995-09-18 2002-07-10 Hitachi, Ltd. Semiconductor material, method of producing the semiconductor material, and semiconductor device
JP3350855B2 (ja) * 1995-10-16 2002-11-25 日本電信電話株式会社 Iii族窒化物半導体基板の製造方法
JP3139445B2 (ja) * 1997-03-13 2001-02-26 日本電気株式会社 GaN系半導体の成長方法およびGaN系半導体膜
JPH1143398A (ja) * 1997-07-22 1999-02-16 Mitsubishi Cable Ind Ltd GaN系結晶成長用基板およびその用途
JP3925753B2 (ja) * 1997-10-24 2007-06-06 ソニー株式会社 半導体素子およびその製造方法ならびに半導体発光素子
JPH11135882A (ja) * 1997-10-28 1999-05-21 Sharp Corp 化合物半導体基板、及び化合物半導体基板の製造方法、並びに発光素子

Similar Documents

Publication Publication Date Title
BE2015C050I2 (enrdf_load_stackoverflow)
BE2013C075I2 (enrdf_load_stackoverflow)
BE2013C070I2 (enrdf_load_stackoverflow)
BE2013C067I2 (enrdf_load_stackoverflow)
BE2013C038I2 (enrdf_load_stackoverflow)
BE2013C036I2 (enrdf_load_stackoverflow)
BE2011C030I2 (enrdf_load_stackoverflow)
JP2004084060A5 (enrdf_load_stackoverflow)
JP2004048741A5 (enrdf_load_stackoverflow)
BE2013C034I2 (enrdf_load_stackoverflow)
JP2004182217A5 (enrdf_load_stackoverflow)
BE2012C053I2 (enrdf_load_stackoverflow)
JP2004219163A5 (enrdf_load_stackoverflow)
JP2004148121A5 (enrdf_load_stackoverflow)
DE602004031730D1 (enrdf_load_stackoverflow)
JP2004060658A5 (enrdf_load_stackoverflow)
JP2003294381A5 (enrdf_load_stackoverflow)
JP2004208633A5 (enrdf_load_stackoverflow)
JP2004219922A5 (enrdf_load_stackoverflow)
JP2004221629A5 (enrdf_load_stackoverflow)
JP2004221934A5 (enrdf_load_stackoverflow)
AU2003210772A1 (enrdf_load_stackoverflow)
AU2002341898A1 (enrdf_load_stackoverflow)
AU2003207787A1 (enrdf_load_stackoverflow)
AU2003207750A1 (enrdf_load_stackoverflow)