JP2003504886A5 - - Google Patents
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- Publication number
- JP2003504886A5 JP2003504886A5 JP2001509652A JP2001509652A JP2003504886A5 JP 2003504886 A5 JP2003504886 A5 JP 2003504886A5 JP 2001509652 A JP2001509652 A JP 2001509652A JP 2001509652 A JP2001509652 A JP 2001509652A JP 2003504886 A5 JP2003504886 A5 JP 2003504886A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14283199P | 1999-07-08 | 1999-07-08 | |
| US60/142,831 | 1999-07-08 | ||
| PCT/US2000/018511 WO2001004022A1 (en) | 1999-07-08 | 2000-07-06 | Transport module with latching door |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003504886A JP2003504886A (ja) | 2003-02-04 |
| JP2003504886A5 true JP2003504886A5 (US20070244113A1-20071018-C00087.png) | 2007-08-30 |
| JP4549595B2 JP4549595B2 (ja) | 2010-09-22 |
Family
ID=22501466
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001509652A Expired - Lifetime JP4549595B2 (ja) | 1999-07-08 | 2000-07-06 | ラッチングドアを備えたウェハーコンテナ |
Country Status (8)
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002093622A2 (en) * | 2001-05-17 | 2002-11-21 | Ebara Corporation | Substrate transport container |
| US6749067B2 (en) * | 2002-01-16 | 2004-06-15 | Entegris, Inc. | Wafer carrier door with form fitting mechanism cover |
| US7325698B2 (en) | 2004-04-18 | 2008-02-05 | Entegris, Inc. | Wafer container door with particulate collecting structure |
| JP4573566B2 (ja) | 2004-04-20 | 2010-11-04 | 信越ポリマー株式会社 | 収納容器 |
| CN1313331C (zh) * | 2004-08-30 | 2007-05-02 | 财团法人工业技术研究院 | 洁净容器结构 |
| JP4540529B2 (ja) | 2005-04-18 | 2010-09-08 | 信越ポリマー株式会社 | 収納容器 |
| JP6544128B2 (ja) * | 2015-08-07 | 2019-07-17 | シンフォニアテクノロジー株式会社 | 収納容器の蓋体及び収納容器 |
| CN114628292B (zh) * | 2022-05-16 | 2022-07-29 | 上海果纳半导体技术有限公司武汉分公司 | 晶圆传输盒 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5173273A (en) * | 1990-10-11 | 1992-12-22 | Brewer Charles A | Cassette for dental instruments |
| US5915562A (en) * | 1996-07-12 | 1999-06-29 | Fluoroware, Inc. | Transport module with latching door |
| US5711427A (en) * | 1996-07-12 | 1998-01-27 | Fluoroware, Inc. | Wafer carrier with door |
| JP3476052B2 (ja) * | 1997-09-01 | 2003-12-10 | 信越ポリマー株式会社 | 輸送容器 |
| JP3722604B2 (ja) * | 1997-11-13 | 2005-11-30 | 大日本スクリーン製造株式会社 | 基板処理装置 |
| US6704998B1 (en) * | 1997-12-24 | 2004-03-16 | Asyst Technologies, Inc. | Port door removal and wafer handling robotic system |
-
2000
- 2000-07-06 CN CNB008115826A patent/CN1169696C/zh not_active Expired - Lifetime
- 2000-07-06 WO PCT/US2000/018511 patent/WO2001004022A1/en active Application Filing
- 2000-07-06 AU AU63419/00A patent/AU6341900A/en not_active Abandoned
- 2000-07-06 JP JP2001509652A patent/JP4549595B2/ja not_active Expired - Lifetime
- 2000-07-06 DE DE10084776T patent/DE10084776T5/de not_active Withdrawn
- 2000-07-06 EP EP00950296A patent/EP1218264A4/en not_active Withdrawn
- 2000-07-06 KR KR1020027000227A patent/KR100747041B1/ko active IP Right Grant
- 2000-07-07 MY MYPI20003119A patent/MY128807A/en unknown
