JP2003347187A - Edge exposure device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an edge exposure device which is capable of exposing the edge of a substrate to light having a uniform distribution of light intensity so as to carry out superior edge exposure. <P>SOLUTION: Light emitted from a light source unit has an irregular distribution of light intensity. Therefore, the intensity of light that impinges on optical fiber strands 33a and 33b composing light guides 31a and 31b reflects the light source having an irregular distribution of light intensity. When light having the irregular distribution of light intensity is incident on optical mixing optical elements 60a and 60b, the light is mixed inside the optical elements 60a and 60b, and lights emitted from light emitting surfaces 62a and 62b have nearly uniform distributions of light intensity. Moreover, the optical mixing optical elements 60a and 60b are pasted together as optically isolated from each other so as to prevent lights of the elements 60a and 60b from being mixed together. <P>COPYRIGHT: (C)2004,JPO

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotating semiconductor substrate, a glass substrate for a liquid crystal display, a glass substrate for a photomask, a substrate for an optical disk, and the like (hereinafter referred to as "substrate").
The present invention relates to an edge exposure apparatus that irradiates light to an edge portion of the device to expose the edge portion.

[0002]

2. Description of the Related Art Generally, for a substrate as described above,
A series of substrate processes is achieved by sequentially performing a resist coating process, a developing process, and a heat treatment associated therewith. Among these, the resist coating process is a process in which a photoresist (hereinafter, simply referred to as “resist”) is supplied while rotating the substrate, and the resist is applied to the entire surface of the substrate by centrifugal force.

Therefore, although a resist film is formed on the entire surface of the substrate after the resist coating process, a pattern such as a semiconductor chip is not formed at the edge of the substrate. Not only is it unnecessary, but it also causes dust and the like due to mechanical contact during transport of the substrate. Therefore, it is necessary to remove the resist film at the edge of the substrate positively.

For this reason, conventionally, light (generally, ultraviolet light) from a light source is guided by a light guide in which optical fibers are bundled, and is applied to the edge of the substrate to remove the resist film in the relevant portion by edge exposure. Has been done.

[0005]

As a general technical problem of substrate processing including edge exposure, there is a problem of shortening a tact time and improving a throughput. In particular, in recent years, the diameter of the substrate has been remarkably increased, and a substrate having a diameter of 300 mm or more is being handled. As the size of the substrate increases, the area of the edge of the substrate to be subjected to edge exposure (hereinafter, referred to as “exposure area”) also increases. When edge exposure is performed using the same apparatus as in the related art, the tact time required for edge exposure naturally increases as the exposure area increases, and there is a great demand to reduce the tact time required for edge exposure.

In order to shorten the tact time required for edge exposure, the present inventors are studying a technique of providing a plurality of light sources and joining light guides from the respective light sources to increase the irradiation area. . However, the intensity distribution of light emitted from each light source is generally non-uniform,
Naturally, the light intensity at the incident end face of each optical fiber constituting the light guide is also non-uniform. The light is guided toward the edge of the substrate by each optical fiber, and the intensity of the light emitted from the emission surface is also non-uniform. As a result, the light intensity distribution at the edge of the substrate exposed to the edge through the light guide becomes non-uniform, and a part of the resist film at the edge is not sufficiently exposed, and the development processing is performed after the edge exposure. Also, there is a problem that the resist film partially remains at the edge.

When a plurality of light sources are provided, not only is the light intensity distribution of each light source non-uniform, but also the intensity of the plurality of light sources is often different. In such a case, there arises a problem that the light intensity distribution at the edge of the substrate that has been edge-exposed through the light guides from the plurality of light sources becomes more non-uniform.

Further, when a plurality of light sources are provided,
Even when the lamp of one of the light sources is replaced, all the light sources must be turned off and the edge exposure apparatus must be stopped.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and provides an edge exposure apparatus capable of performing a favorable edge exposure process by exposing an edge portion of a substrate with a uniform light intensity distribution. This is the first object.

It is a second object of the present invention to provide an edge exposure apparatus capable of continuing the operation of the apparatus even when the lamp of the light source is replaced, while achieving the first object.

[0011]

According to a first aspect of the present invention, there is provided an edge exposure apparatus for irradiating an edge of a rotating substrate with light to expose the edge. (Where n is a natural number of 2 or more), and the light sources are provided in one-to-one correspondence with the n light sources,
A group of n wires formed by bundling a plurality of optical fiber wires, each of which guides light from a corresponding light source toward the edge, and the n which are separated from each other at an incident side end. The light guide path converging section, which forms a merging element group having one exit side end by merging the element groups in a state where the element groups are separated from each other, has a one-to-one correspondence with the n element groups. N provided
Light mixing optical elements, and each of the n light mixing optical elements is provided at an arbitrary position in a path of a wire group corresponding to the light mixing optical element, and Light from the corresponding light source is light-mixed therein.

According to a second aspect of the present invention, in the edge exposure apparatus according to the first aspect of the present invention, each of the n light-mixing optical elements is connected to an incident side of a wire group corresponding to the light-mixing optical element. After being provided in contact with the end portion, the light mixing optical element directly receives a part of the light from the light source corresponding to the element wire group and mixes the light, and then mixes the mixed light with the incident side of the element wire group. The light is emitted toward the end face of the end.

According to a third aspect of the present invention, in the edge exposure apparatus according to the first aspect of the present invention, each of the n light-mixing optical elements is connected to an incident side of a wire group corresponding to the light-mixing optical element. The element wire provided at any position from the end to the light guide path junction, and guided to the light mixing optical element by a portion of the element group upstream from the light mixing optical element. After receiving the light from the light source corresponding to the group and mixing the light, the mixed light is emitted toward the downstream side of the light mixing optical element in the element wire group.

According to a fourth aspect of the present invention, there is provided the edge exposure apparatus according to the first aspect of the present invention, wherein the n light-mixing optical elements are combined with each other while the n light-mixing optical elements are mutually optically blocked. From the light source corresponding to the group of wires guided by the upstream portion of the group of wires corresponding to the light mixing optical element to the respective light mixing optical elements. After the light is received and light-mixed, the mixed light is emitted toward a portion of the element group downstream of the light-mixing optical element.

According to a fifth aspect of the present invention, in the edge exposure apparatus according to the first aspect of the present invention, the n light-mixing optical elements are combined with each other while the n light-mixing optical elements are optically isolated from each other. Along with providing integrally at any position from the part to the exit side end of the merging element group,
Each light-mixing optical element receives light from the light source corresponding to the element group, which is guided by a portion of the element group corresponding to the light-mixing optical element that is located on the upstream side of the optical element, and performs light mixing. After that, the mixed light is emitted toward the downstream side of the light mixing optical element in the element wire group.

According to a sixth aspect of the present invention, in the edge exposure apparatus according to the first aspect of the present invention, the n light mixing optical elements are integrated with each other in a state where they are optically isolated from each other. Provided in contact with the exit side end of the merging element group, and receive light from the light source corresponding to the element group guided to each light mixing optical element by the element group corresponding to the light mixing optical element. After the light mixing, the mixed light is directly emitted toward the edge.

According to a seventh aspect of the present invention, in the edge exposure apparatus according to any one of the first to sixth aspects, the light mixing optical element and the core wire of the optical fiber are formed of the same material. ing.

According to an eighth aspect of the present invention, in the edge exposure apparatus according to the seventh aspect of the present invention, the light mixing optical element and the core of the optical fiber are formed of quartz.

[0019]

Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1 is a perspective view showing the entire configuration of an edge exposure apparatus according to the present invention. FIG. 1 shows an XYZ orthogonal coordinate system in which the XY plane is a horizontal plane and the Z-axis direction is a vertical direction.

The edge exposure apparatus shown in FIG. 1 is an apparatus for performing edge exposure by irradiating the edge of the substrate W with light while rotating the substrate W. A drive processing unit 20 for moving the irradiation position;
An irradiation processing unit 30 for irradiating light and a light receiver 50 are provided.

The rotation processing unit 10 includes a spin motor 11, a motor shaft 12, and a spin chuck 13. The spin chuck 13 vacuum-adsorbs the substrate W from the back surface and holds the substrate W in a substantially horizontal posture. The spin chuck 13 is connected to the spin motor 11 via a motor shaft 12. As a result, the rotation operation of the spin motor 11 is transmitted to the spin chuck 13 via the motor shaft 12, and rotates the substrate W held by the spin chuck 13 in a substantially horizontal plane (XY plane). Note that the spin chuck 13 is not limited to a form in which the substrate W is vacuum-sucked, but may be a form in which the substrate W is mechanically held.

The drive processing section 20 includes an X-direction drive section 22 and a Y-direction drive section 22.
A direction driving unit 24. The X-direction drive unit 22 is fixedly disposed on the edge exposure device, and includes a drive mechanism for driving the Y-direction drive unit 24 disposed on the upper surface thereof in the X direction as indicated by an arrow AR1 in the drawing. . When the X-direction drive unit 22 moves the Y-direction drive unit 24 along the X-direction, the exposure arm 28 disposed on the upper surface of the Y-direction drive unit 24 also moves along the X-direction.

The Y-direction drive section 24 has a drive mechanism for driving the exposure arm 28 disposed on the upper surface thereof in the Y-direction as indicated by an arrow AR2 in the drawing. Thus, the Y-direction drive unit 24 can drive the exposure arm 28 along the Y direction. Therefore, the drive processing unit 20
Moves the exposure arm 28 to an arbitrary position within the XY plane by the X-direction drive unit 22 and the Y-direction drive unit 24 (however, within the drivable range of the X-direction drive unit 22 and the Y-direction drive unit 24). Can be done. It should be noted that various known mechanisms such as a mechanism using a ball screw and a mechanism using a pulley and a belt can be adopted as the X-direction driving unit 22 and the Y-direction driving unit 24.

The irradiation processing unit 30 includes two light source units 40a and 40b for irradiating light, an irradiation head 29 provided at the tip of an exposure arm 28, and light guides 31a, 31b and 35 connecting them. ing. FIG. 2 is a diagram illustrating a schematic configuration of the irradiation processing unit 30.

The two light source units 40a and 40b are identical units. The light source unit 40a
Inside the lamp house 45a, a lamp 42a, a reflector 41a, a shutter motor 43a, a shutter 44a,
An aperture disk 46a and an aperture motor 47a are provided. The lamp 42a is a 200 W ultraviolet lamp. The reflector 41a reflects a part of the light emitted from the lamp 42a and collects the light at a predetermined position. A shutter 44a is arranged at this light condensing position, and is opened and closed by a shutter motor 43a connected to the shutter 44a. In addition, at this light condensing position, the incident side end 32a of the light guide 31a is fixed to the lamp house 45a by a light guide joint not shown. Further, an aperture disk 46a having an opening is arranged between the lamp 42a and the shutter 44a, and the size (diameter) of the aperture is adjusted by an aperture motor 47a connected to the aperture disk 46a.

For this reason, when the shutter 44a is opened by the shutter motor 43a, a part of the direct light from the lamp 42a and a part of the reflected light from the reflector 41a are transmitted to the incident end 3 of the light guide 31a.
2a. The amount of light incident on the light guide 31a at this time is defined by the stop disk 46a. On the other hand, when the shutter 44a is closed by the shutter motor 43a (the state in FIG. 2), the direct light from the lamp 42a and the reflected light from the reflector 41a are blocked, and their incidence on the light guide 31a is prohibited. You.

The configuration of the light source unit 40b is exactly the same as that of the light source unit 40a. That is, the light source unit 40
b denotes a lamp 42b, a reflector 41b, a shutter motor 43b, a shutter 4 inside a lamp house 45b.
4b, an aperture disk 46b, and an aperture motor 47b. The lamp 42b is a 200 W ultraviolet lamp. The reflector 41b reflects and collects a part of the light emitted from the lamp 42b. The shutter 4
4b is arranged, and is opened and closed by a shutter motor 43b connected to a shutter 44b. In addition, at this light condensing position, the incident side end 32b of the light guide 31b is fixed to the lamp house 45b by a light guide joint not shown. Further, an aperture disk 46b having an aperture is arranged between the lamp 42b and the shutter 44b, and the size (diameter) of the aperture is adjusted by an aperture motor 47b connected to the aperture disk 46b.

Therefore, when the shutter 44b is opened by the shutter motor 43b, a part of the direct light from the lamp 42b and a part of the reflected light from the reflector 41b are applied to the light-incident end 3 of the light guide 31b.
2b. The amount of light incident on the light guide 31b at this time is defined by the stop disk 46b. On the other hand, when the shutter 44b is closed by the shutter motor 43b (the state in FIG. 2), the direct light from the lamp 42b and the reflected light from the reflector 41b are blocked, and their incidence on the light guide 31b is prohibited. You.

The irradiation head 29 is fixed to the tip of the exposure arm 28 (see FIG. 1). As shown in FIG. 2, a projection lens 36, a fiber coupling section 34, and a slit mask 37 are provided inside the irradiation head 29. The outgoing end 39 of the light guide 35 is fitted and connected to the fiber connecting portion 34. In the present embodiment, a light mixing section 60 is provided in contact with the emission side end 39 of the light guide 35. The light mixing section 60 will be described in further detail later.

The slit mask 37 has a rectangular slit. Outgoing end 3 of light guide 35
The light exiting from the exit end surface of the projection lens 36 passes through the light mixing section 60 and the slit of the slit mask 37.
Is projected onto the edge of the substrate W held by the spin chuck 13.

The two light source units 40a and 40b and the irradiation head 29 are connected to light guides 31a and 31b as light guide paths.
Connected by The light guide 31a is provided with light (strictly speaking, a shutter 44a) from the light source unit 40a.
A group of optical fibers formed by bundling a plurality of optical fiber wires (reference numeral 33a in FIG. 3) for guiding the light emitted from the lamp 42a at the opening of the substrate W toward the edge of the substrate W held by the spin chuck 13. It is. Similarly, the light guide 31b
Is an optical fiber (FIG. 3) that guides light from the light source unit 40b (strictly, light emitted from the lamp 42b when the shutter 44b is opened) toward the edge of the substrate W held by the spin chuck 13. Is a group of wires formed by bundling a plurality of reference numerals 33b). In the present embodiment, each of the light guides 31a and 31b is 50
It is a bundle of zero optical fiber wires 33a and 33b. Further, the optical fiber strands 33a, 33
The core wire 3b is formed of quartz. Then, the light guide 31a and the light guide 31b are joined to the jig 38 for joining.
To form a light guide 35 as a group of merged wires.

FIG. 3 is a diagram showing an example of a connection state between the light guide and the light mixing section 60. In this embodiment, as shown in FIG.
The light guide 31a composed of 3a and the light guide 31b composed of 500 optical fiber strands 32b are merged by a merging jig 38 in a state where they are clearly separated from each other to form a light guide 35. That is,
For example, in FIG. 3, the light guide 31a
The 00 optical fiber wires 33a occupy the upper half inside the light guide 35, and the 500 optical fiber wires 33b constituting the light guide 31b are
Occupies the lower half of the interior.

As described above, in the present embodiment, the light guide 31a and the light guide 31b, which have been separated from each other at the incident side ends 32a and 32b, are simply separated by the merging jig 38 in a state where they are separated from each other. To form a light guide 35 having one exit side end 39,
The optical fibers themselves are not joined or branched from each other. In other words, the light guide 3 which is a group of merging wires
Reference numeral 5 denotes only an aggregate of the light guides 31a and 31b, and the light guides 31a and 31b (5) guide the light from the light source units 40a and 40b toward the edge of the substrate W held by the spin chuck 13. More precisely, the optical fiber wires 33a, 33 of the light guides 31a, 31b.
b).

The light mixing section 60 is provided in contact with the exit side end 39 of the light guide 35. More precisely, the entrance surface of the light mixing section 60 and the exit side end 3 of the light guide 35
The light mixing section 60 is arranged so that the light-emitting end face of the light-receiving section 9 comes into contact with the light-emitting end face.

The light mixing section 60 includes two light mixing optical elements 6
0a and 60b are bonded together, and are fixed in the fiber coupling portion 34. The light mixing optical elements 60a and 60b of the present embodiment are constituted by quartz rods. The exit end face of the optical fiber 33a of the light guide 31a is connected to the entrance face 61 of the light mixing optical element 60a.
a, which has been transmitted by the 500 optical fiber wires 33a of the light guide 31a.
The split light beams enter only the light mixing optical element 60a via the incident surface 61a of the light mixing optical element 60a. On the other hand, the exit end face of the optical fiber wire 33b of the light guide 31b is in contact with only the incident surface 61b of the light mixing optical element 60b, and the 500 divided light beams transmitted by the 500 optical fiber wires 33b of the light guide 31b. The light enters only the light mixing optical element 60b through the incident surface 61b of the light mixing optical element 60b.

From the light guide 31a to the light mixing optical element 6
The 500 divided lights incident on 0a are light-mixed inside the light mixing optical element 60a, and then emitted as one light from an emission surface 62a provided on the side opposite to the incidence surface 61a. On the other hand, the light mixing optical element 6
The 500 divided lights incident on 0b are light-mixed inside the light-mixing optical element 60b, and then emitted as one light from an emission surface 62b provided on the side opposite to the incidence surface 61b.

Here, the light mixing optical element 60a and the light mixing optical element 60b are bonded together in a state where they are optically shielded from each other, and are integrated as a light mixing section 60. Specifically, for example, a light shielding plate or a reflection plate is sandwiched between the light mixing optical element 60a and the light mixing optical element 60b. Therefore, the light incident on the light mixing optical element 60a does not enter the light mixing optical element 60b, and conversely, the light incident on the light mixing optical element 60b enters the light mixing optical element 60a. Nor.

Therefore, the light guided from the light source unit 40a by the light guide 31a is
0a, and is mixed light therein, and does not leak to the light mixing optical element 60b side during the mixing process.
a is emitted directly toward the edge of the substrate W. on the other hand,
The light guided by the light guide 31b from the light source unit 40b is incident only on the light mixing optical element 60b and is mixed inside the light mixing optical element 60b. Is emitted directly toward the edge of the. That is, in the present embodiment, the two light mixing optical elements 60a and 60b are integrated in a state where they are optically isolated from each other, and are integrated with the exit side end 39 of the light guide 35 that is a group of merging element wires. The light mixing optical element 60a (60b) is provided in contact with the light mixing optical element 60a (60b).
a (31b) led by the light guide 31a
After receiving the light from the light source unit 40a (40b) corresponding to (31b) and mixing the light, the mixed light is transferred to the substrate W
The light is emitted directly toward the edge.

The mixed light emitted from the emission surfaces 62a and 62b of the light mixing optical elements 60a and 60b in this manner passes through the slit of the slit mask 37 and passes from the projection lens 36 to the substrate W held on the spin chuck 13 by the projection lens 36. Is irradiated to expose the edge.

In this embodiment, a light receiver 50 is provided for judging the illuminance of the irradiation area formed by the irradiation processing section 30.

The configuration of the edge exposure apparatus of the present embodiment has been described above. Next, light irradiation in the edge exposure apparatus will be described. In the edge exposure apparatus of the present embodiment, it is possible to perform edge exposure using only one of the light source units 40a and 40b or to perform edge exposure using both. The processing using the light source units 40a and 40b will be described.

First, at an appropriate timing, the light source unit 4
The lamp 42a of Oa and the lamp 42b of the light source unit 40b are both turned on. The shutters 44a and 44b are closed until the edge exposure is started.
This prevents light from the lamps 42a and 42b from being incident on the light guides 31a and 31b. Then, the drive processing unit 20 moves the irradiation head 29 to an appropriate irradiation position (usually, just above the edge of the substrate W held by the spin chuck 13).

Start edge exposure, or light receiver 5
When the illuminance determination is performed based on 0, the shutter motor 4
The shutters 44a and 44b are respectively provided by 3a and 43b.
b is released, and light from the lamps 42a and 42b is guided to the irradiation head 29 side.

Shutter 4 for starting edge exposure
When both 4a and 44b are opened, at the same time, the light from the lamps 42a and 42b is transmitted to the light guide 3 respectively.
Light is incident on the incident end faces of the incident side ends 32a and 32b of 1a and 31b. Thereby, the light from the light source unit 40a is guided to the light mixing optical element 60a by the light guide 31a, and after being mixed inside the light mixing optical element 60a, the light is mixed from the emission surface 62a of the light mixing optical element 60a to the substrate. W
The light is emitted toward the edge of. On the other hand, the light source unit 40
b is guided by the light guide 31b to the light mixing optical element 60b, and after being mixed inside the light mixing optical element 60b, the light exit surface 62 of the light mixing optical element 60b.
b is emitted toward the edge of the substrate W. Then, the substrate W held by the spin chuck 13 is
By the rotation by 1, the exposure processing of the edge of the substrate W proceeds. In this process, the light from the light source unit 40a and the light from the light source unit 40b do not mix with each other as described above.

As described above, the light emitted from the light source units 40a and 40b has an uneven light intensity distribution. Therefore, each light guide 31a, 31
The intensity of light incident on each of the optical fiber strands 33a, 33b constituting b also reflects the non-uniform light intensity distribution, for example, the light guides 31a, 3a.
The light intensity distribution along the line AA in FIG. 3 at the position where 1b has merged is non-uniform as shown in FIG.

When the light having the non-uniform intensity distribution is incident on the light mixing optical elements 60a and 60b, the light is mixed (light mixed) inside the light mixing optical elements 60a and 60b, and the light emitted from the emission surfaces 62a and 62b is formed as shown in FIG. As shown in (b), the light intensity distribution is substantially uniform.

In this embodiment, only the light guided by the light guide 31a enters the light mixing optical element 60a, and the light guide 31 enters the light mixing optical element 60b.
b, only the light guided by b enters, and the light mixing optical element 6
The light mixing unit 60a and the light mixing optical element 60b are integrated as a light mixing unit 60 while being optically isolated from each other. That is, the light source units 40a, 40b and the light guides 31a, 31b are provided in one-to-one correspondence, and the light guides 31a, 31b and the light mixing optical elements 60a, 60b are also provided in one-to-one correspondence. The light from the light source unit 40a is light-mixed only in the light mixing optical element 60a, and the light from the light source unit 40b is light-mixed only in the light mixing optical element 60b. Therefore, light is mixed for each of the light source units 40a and 40b, and as shown in FIG.
Light intensity from light source unit 40a and light source unit 40
When the light intensity from b differs, the light mixing unit 60 provides a uniform light intensity distribution for each light source unit, but the difference in light intensity between the light source units remains.

In FIG. 4, the light source unit 40
In order to facilitate understanding of the fact that light is mixed by the light mixing unit 60 for each of the light source units 40a and 40b, the light source unit 40a
The case where the intensity distribution of the light from the light source unit 40b and the intensity distribution of the light from the light source unit 40b are different has been described as an example, but when performing edge exposure using both of the light source units 40a and 40b, the two light source units 40a and 40b Of course, it is preferable to use the same light intensity distribution.

FIG. 5 is a diagram showing a state of edge exposure of the substrate W. When both the shutter 44a and the shutter 44b are open, that is, the light guide 31
In the case where light is guided by all the optical fiber strands a and 31b, as shown in FIG. 5C, the irradiation area LA at the height of the main surface of the substrate W is equal to the irradiation width w1 and the exposure width w2. It becomes a rectangle. The “irradiation width” means the irradiation area L
A is the width of one side of the substrate W along the rotation direction, and the “exposure width” is the width of one side of the irradiation area LA along the radial direction of the substrate W.

The irradiation area LA includes the light source unit 40a
The irradiation area LA1 by light from the light source unit 40b is combined with the irradiation area LA2 by light from the light source unit 40b. Since the light is emitted after being mixed in each of the light source units 40a and 40b, the irradiation area LA1 is formed only by the light from the light source unit 40a, and the irradiation area LA2 is formed only by the light from the light source unit 40b. Is formed. Then, the light source unit 40
Since a uniform light intensity distribution is obtained in the light mixing section 60 for each of the light emitting elements a and 40b, the illuminance distribution in the irradiation area LA1 is uniform, and the illuminance distribution in the irradiation area LA2 is also uniform. When the light intensity distributions of the two light source units 40a and 40b are the same, the illuminance distribution in the entire irradiation area LA is also uniform.

In this manner, the edge portion of the substrate W can be exposed with a uniform light intensity distribution to perform a good edge exposure process, and the two light source units 40a, 40a,
The irradiation area can be increased by light irradiation from 40b. Therefore, since the rotation speed of the substrate W can be made higher than before, the takt time required for edge exposure can be shortened, and as a result, the throughput can be greatly improved.

In the present embodiment, the light source unit 40
The light from the light source unit 40a is emitted after the light is mixed only in the light mixing optical element 60a, and the light from the light source unit 40b is emitted after the light is mixed only in the light mixing optical element 60b. Even when only one of them is used, an irradiation area in which the light intensity distribution is completely uniform is secured. That is, for example, when only the light source unit 40a is used, the light from the light source unit 40a is
, The light is mixed only inside the light mixing optical element 60a, is emitted therefrom, is emitted from the emission surface 62a, and has an irradiation width w1 / 2 and an exposure width w2 as shown in FIG. The area LA1 is formed. Since light is prevented from being mixed from the light mixing optical element 60a into the light mixing optical element 60b, when only the light source unit 40a is used, the light reaches only the irradiation area LA1, and furthermore, the intensity distribution of the light Are uniform.

Conversely, when only the light source unit 40b is used, light from the light source unit 40b is incident only on the light mixing optical element 60b via the light guide 31b.
After the light is mixed therein, the light is emitted from the emission surface 62b, and the irradiation width w1 / 2 and the exposure width w as shown in FIG.
The second irradiation area LA2 is formed. Light mixing optical element 60b
Since light is prevented from being mixed into the light mixing optical element 60a, the light reaches only the irradiation area LA2 when only the light source unit 40b is used, and the intensity distribution of the light is made uniform. I have.

Therefore, even when the lamp of one of the light source units 40a and 40b is replaced, there is no need to stop the edge exposure apparatus. For example, the light source unit 4
Even when the lamp 42b of the light source unit 40b is exchanged while performing edge exposure using both the light sources 0a and 40b, the light source unit 40a is used continuously, as shown in FIG. The irradiation area LA1 in which the light intensity distribution is uniform as described above can be secured. Therefore, as compared with the case of performing edge exposure using both of the light source units 40a and 40b, the irradiation area is halved and the throughput is halved. Exposure processing efficiency is improved. Conversely, the lamp 42a of the light source unit 40a
When the light source unit 40b is continuously used, the irradiation area LA2 in which the light intensity distribution is uniform as shown in FIG. 5B can be secured by continuously using the light source unit 40b. Can continue.

As described above, since the light is individually mixed by the light mixing unit 60 for each light source unit and emitted individually, the edge exposure using only one of the light source units 40a and 40b is performed. Processing is possible.
As a result, continuous operation of the edge exposure apparatus by always switching and using one of the light source units is possible, so that not only the downtime of the apparatus can be reduced, but also the running cost as a whole can be reduced.

Also, since the light is individually mixed in the light mixing unit 60 for each light source unit and emitted individually, the light intensity distribution of the light source units 40a and 40b is intentionally made different, and The light source units 40a and 40b can be switched according to the type of resist applied to the substrate W. For example, when the light intensity distribution of the light source unit 40a is weakened and the light intensity distribution of the light source unit 40b is increased, the substrate W coated with a resist suitable for weak light (foaming or the like generates foaming). In this case, the light source unit 40a can be used, and when processing a substrate W coated with a resist suitable for strong light (which is not sensitive to weak light), the light source unit 40b can be used.

Further, the light source units 40a, 4
The light source units 40a and 40b can be switched according to the type of the resist applied to the substrate W to be exposed, with the type of the lamp 0b itself being different. For example, the light source unit 40a may be used as a light source for ultraviolet light, the light source unit 40b may be used as a light source for excimer laser, and the light source unit 40b may be used only when processing a substrate W coated with a chemically amplified resist. .

As described above, in the edge exposure apparatus of this embodiment, the light mixing unit 60 mixes and emits light individually for each light source unit. It is possible to make it.

Although the embodiment of the present invention has been described above, the present invention is not limited to the above-described example.
For example, in the above embodiment, two light mixing optical elements 60a and 60b are integrated and provided in contact with the emission side end 39 of the light guide 35. However, the arrangement of the light mixing optical elements 60a and 60b is changed. 6 to 9 may be used. 6 to 9, the same members as those in the above embodiment are denoted by the same reference numerals.

In the example shown in FIG. 6, the two light mixing optical elements 60a and 60b are respectively connected to the light guides 31a and 31b.
b is provided in contact with the incident side end. That is, the light mixing optical element 6 is located at the converging position of the light source unit 40a.
The incident surface 61a of the light mixing optical element 60a is directly incident on a part of the direct light from the lamp 42a and a part of the reflected light from the reflector 41a. The light exit surface 62a of the light mixing optical element 60a and the incident end surface of the incident side end 32a of the light guide 31a are configured to face each other. Therefore, part of the light from the light source unit 40a is
a, the light is directly mixed therein, and the light is mixed therein.
It is emitted from 2a. Emission surface 6 of light mixing optical element 60a
The light emitted from 2a enters through the incident end face of the incident side end 32a of the light guide 31a, and is guided as it is to the irradiation head 29 by the light guide 31a.
The light is emitted from the emission side end 39 of the light guide 35 toward the edge of the substrate W held by the spin chuck 13.

On the other hand, the incident surface 61b of the light mixing optical element 60b is arranged at the light condensing position of the light source unit 40b,
Part of the direct light from the lamp 42b and the reflector 41
Part of the reflected light from b is directly incident on the incident surface 61b of the light mixing optical element 60b. Then, the light mixing optical element 60b
Outgoing surface 62b of the light guide 31b and the incident side end 32 of the light guide 31b
It is configured such that the incident end face b is brought into face-to-face contact. Therefore, part of the light from the light source unit 40b is directly incident only on the light mixing optical element 60b, is mixed inside the light, and is emitted from the emission surface 62b. The light emitted from the emission surface 62b of the light mixing optical element 60b enters through the incident end surface of the incident side end 32b of the light guide 31b, and is guided as it is to the irradiation head 29 by the light guide 31b. Exit side end 39 of
Are emitted toward the edge of the substrate W held by the spin chuck 13.

That is, in the example shown in FIG. 6, each of the two light mixing optical elements 60a and 60b is a light guide 3 which is a strand group corresponding to the light mixing optical elements 60a and 60b.
After being provided in contact with the incident side ends 32a, 32b of the light guide units 1a, 31b and receiving a part of the light from the light source units 40a, 40b corresponding to the light guides 31a, 31b directly, the light is mixed and then mixed. Light guide 31
The light exits toward the end faces of the incident-side ends 32a and 32b of the a and 31b. In FIG. 6, the light mixing optical element 6
0a and the light mixing optical element 60b are spaced apart from each other, so that they are optically isolated from each other.
The light guide 35 is simply formed by the joining jig 38 in a state where the light guide 35 is clearly separated from each other.

Also in this case, since the light is individually mixed for each light source unit and emitted separately, it is possible to secure an irradiation area in which the light intensity distribution is uniform for each light source unit. Accordingly, the same effects as those of the above embodiment can be obtained, and the same device operation can be performed.

The two light mixing optical elements 60a, 60
The arrangement of b may be as shown in FIG. In the example shown in FIG. 7, the two light-mixing optical elements 60a and 60b are respectively the incident-side ends 32a and 32 of the light guides 31a and 31b.
It is interposed at any position from b to the joining jig 38. Specifically, the light guide 31a is cut at any position from the incident side end 32a to the merging jig 38, and the light mixing optical element 60a is sandwiched between the light guide 31a and the light mixing optical element 60a. The surface 61a and the emission surface 62a are configured so that the two cut end surfaces of the light guide 31a face each other. Therefore, the light guided by the light guide 31a from the light source unit 40a is incident on only the light mixing optical element 60a via the incident surface 61a, is mixed therein, and is emitted from the emission surface 62a. The light emitted from the emission surface 62a of the light mixing optical element 60a is again incident on the light guide 31a, and is guided to the irradiation head 29 by the light guide 31a as it is, and from the emission side end 39 of the light guide 35 to the spin chuck 13a. The light is emitted toward the edge of the substrate W held by the substrate.

Similarly, the light guide 31b is cut at any position from the incident side end 32b to the merging jig 38, and the light mixing optical element 60b is sandwiched between the light guide 31b and the light mixing optical element 60b. The light incident surface 61b and the light emitting surface 62b are configured to be in contact with both cut end surfaces of the light guide 31b. Therefore, the light source unit 40
The light guided from b through the light guide 31b is incident only on the light mixing optical element 60b via the incident surface 61b, is mixed therein, and is emitted from the emission surface 62b. The light emitted from the emission surface 62b of the light mixing optical element 60b enters the light guide 31b again, and is guided to the irradiation head 29 by the light guide 31b as it is,
The light is emitted from the emission side end 39 of the light guide 35 toward the edge of the substrate W held by the spin chuck 13.

That is, in the example shown in FIG. 7, each of the two light mixing optical elements 60a and 60b is a light guide 3 that is a group of wires corresponding to the light mixing optical elements 60a and 60b.
The light mixing optical element 60a of the light guides 31a, 31b is provided at any position from the incident side ends 32a, 32b of the light guides 1a, 31b to the merging jig 38 which is the light guide path merging portion. After receiving the light from the light source units 40a and 40b corresponding to the light guides 31a and 31b guided by the upstream portion of the light guides 60b and mixing them, the mixed light is mixed with the light guides 31a and 31b.
Out of the light mixing optical elements 60a and 60b. In FIG. 7, the light mixing optical element 60a and the light mixing optical element 60b are separated from each other because they are separated from each other, so that they are optically isolated from each other. The light guide 35 is simply formed by the merging jig 38 in a state where the light guide 31b and the light guide 31b are clearly separated from each other.

Also in this case, since the light is individually mixed for each light source unit and individually emitted, it is possible to secure an irradiation area in which the light intensity distribution is uniform for each light source unit. Accordingly, the same effects as those of the above embodiment can be obtained, and the same device operation can be performed.

Further, the two light mixing optical elements 60a, 60
The arrangement of b may be as shown in FIG. In the example shown in FIG. 8, the light mixing optical element 60 a and the light mixing optical element 60 b are bonded together in a state where they are optically isolated from each other, and the integrated light mixing section 60 is The guide 35 is interposed at any position up to the emission side end 39. Specifically, the light guide 35 is cut at any position from the joining jig 38 to the emission side end 39, and the light mixing unit 60 is sandwiched therebetween. At this time, the entrance surface 61a and the exit surface 62a of the light mixing optical element 60a face-to-face contact only with both cut end surfaces of the light guide 31a, and the entrance surface 61b and the exit surface 62b of the light mixing optical element 60b are connected to the light guide. The light mixing section 60 is interposed so as to face and contact only the two cut end faces of the base 31b.

Therefore, the light guided by the light guide 31a from the light source unit 40a is incident only on the light mixing optical element 60a via the incident surface 61a, is mixed inside the light mixing optical element 60a, and is emitted from the emission surface 62a. The light emitted from the emission surface 62a of the light mixing optical element 60a is again incident on the light guide 31a, and is
The light is guided to the irradiation head 29 by a, and is emitted from the emission side end 39 of the light guide 35 toward the edge of the substrate W held by the spin chuck 13. Further, the light guided by the light guide 31b from the light source unit 40b is incident on only the light mixing optical element 60b via the incident surface 61b, is mixed therein, and is emitted from the emission surface 62b. The light emitted from the emission surface 62b of the light mixing optical element 60b is again incident on the light guide 31b, guided as it is to the irradiation head 29 by the light guide 31b, and sent from the emission side end 39 of the light guide 35 to the spin chuck 13b. The light is emitted toward the edge of the substrate W held by the substrate.

That is, in the example shown in FIG. 8, the two light mixing optical elements 60a and 60b are joined to each other in a state where they are optically shut off from each other.
And the light mixing optical element 60a (60b) is integrally provided at any position from the light guide 35 to the emission side end 39 of the light guide 35.
0a (60b) corresponding to the light guide 31a (31
b) the light guide 31a guided by the upstream portion of the light mixing optical element 60a (60b).
After receiving and mixing the light from the light source unit 40a (40b) corresponding to (31b), the mixed light is mixed with the light mixing optical element 6 of the light guide 31a (31b).
The light is emitted toward the downstream side from 0a (60b). In FIG. 8, as in the above embodiment, the light mixing optical element 60a and the light mixing optical element 60b are bonded together in a state where they are optically isolated from each other. The light thus mixed does not enter the light mixing optical element 60b, and conversely, the light entering the light mixing optical element 60b does not enter the light mixing optical element 60a. Also, the light guide 31a and the light guide 31b are simply merged by the merging jig 38 in a state where they are clearly separated from each other to form the light guide 35.

Also in this case, since the light is individually mixed for each light source unit and emitted separately, it is possible to secure an irradiation area in which the light intensity distribution is uniform for each light source unit. Accordingly, the same effects as those of the above embodiment can be obtained, and the same device operation can be performed.

Further, the two light mixing optical elements 60a, 60
The arrangement of 0b may be as shown in FIG. In the example shown in FIG. 9, the light mixing unit 60 is integrated with the light mixing optical element 60a and the light mixing optical element 60b in a state where the light mixing optical element 60a is optically isolated from each other. Built in. Specifically, the light guides 31a, 31b
Is cut at the joining position in the joining jig 38, and the light mixing unit 60 is interposed therebetween. At this time, the light mixing optical element 6
The light incident surface 61a and the light outgoing surface 62a of the light mixing optical element 60b are in contact with only the two cut end surfaces of the light guide 31a.
Are configured to face and contact only the two cut end faces of the light guide 31b.

Therefore, the light guided by the light guide 31a from the light source unit 40a is incident on only the light mixing optical element 60a via the incident surface 61a, is mixed therein, and is emitted from the emission surface 62a. The light emitted from the emission surface 62a of the light mixing optical element 60a is again incident on the light guide 31a, and is
The light is guided to the irradiation head 29 by a, and is emitted from the emission side end 39 of the light guide 35 toward the edge of the substrate W held by the spin chuck 13. On the other hand, light guided by the light guide 31b from the light source unit 40b is incident only on the light mixing optical element 60b via the incident surface 61b, is mixed in the inside, and is emitted from the emission surface 62b. The light emitted from the emission surface 62b of the light mixing optical element 60b is again incident on the light guide 31b, guided as it is to the irradiation head 29 by the light guide 31b, and sent from the emission side end 39 of the light guide 35 to the spin chuck 13b. The light is emitted toward the edge of the substrate W held by the substrate.

That is, in the example shown in FIG. 9, the two light mixing optical elements 60a and 60b are joined to each other in a state where they are optically shut off from each other.
Integrated into each light mixing optical element 60a.
(60b) is the light guide 31a (31b) guided by the upstream portion of the light mixing optical element 60a (60b) of the light guide 31a (31b) corresponding to the light mixing optical element 60a (60b). After receiving the light from the light source unit 40a (40b) corresponding to the light guide 31a and performing light mixing, the mixed light is transmitted to the light guide 31a (3
The light is emitted toward the downstream side of the light mixing optical element 60a (60b) in 1b). In FIG. 9, as in the above embodiment, the light mixing optical element 60a and the light mixing optical element 60b are bonded together in a state where they are optically isolated from each other. The light thus mixed does not enter the light mixing optical element 60b, and conversely, the light entering the light mixing optical element 60b does not enter the light mixing optical element 60a. Also, the light guide 31a and the light guide 31b are simply merged by the merging jig 38 in a state where they are clearly separated from each other to form the light guide 35.

Even in this case, since the light is individually mixed for each light source unit and emitted separately, it is possible to secure an irradiation area in which the light intensity distribution is uniform for each light source unit. Accordingly, the same effects as those of the above embodiment can be obtained, and the same device operation can be performed.

As described above, the light mixing optical elements 60a, 60a
Ob may be provided in any of the light guide paths of the light guides 31a and 31b. Light mixing optical element 6
0a, 60b correspond to the corresponding light guides 31a,
If the light from the corresponding light source unit is mixed inside the light source unit at an arbitrary position (including both ends) in the light guide path of the light source unit 31b, the light is individually mixed for each light source unit. Since the light is individually emitted, it is possible to secure an irradiation area in which the light intensity distribution is uniform for each light source unit, and to expose the edge of the substrate W with a uniform light intensity distribution. A favorable edge exposure process can be performed, and the apparatus operation can be continued even when the lamp of the light source is replaced. However, the light mixing optical element 60a (60b) and the light guide 31a (3
Each time light is emitted and incident between 1b) and 1b), light loss occurs and the amount of transmitted light is reduced. Therefore, it is preferable that the number of such incidents and incidents is small. From this point of view, as shown in FIG. 3 or FIG.
Preferably, a and 60b are provided at the ends of the light guide paths of the light guides 31a and 31b.

In the above embodiment, the case where two light source units 40a and 40b are provided has been described. However, three or more light source units may be provided. That is, when n light source units (where n is a natural number of 2 or more) are provided, one-to-one
In response, n light guides are provided, and a light mixing optical element is provided at an arbitrary position in the light guide path for each of the n light guides, and light is separately mixed for each light source unit and individually. If the light is emitted, the same effect as in the above embodiment can be obtained.

In the above embodiment, the light mixing optical elements 60a and 60b are made of quartz rods. However, if the optical element can perform mixing (light mixing), a material other than quartz can be used. May be used. The example fluorite material other than quartz rod with light mixing optical element 60a of (CaF _2), 60
b may be configured. However, in the above embodiment, the core wires of the optical fiber wires 33a and 33b are formed of quartz. Thus, the light mixing optical elements 60a, 60
It is preferable to form the optical fiber 0b and the core wires of the optical fiber wires 33a and 33b from the same material (quartz in the above embodiment) in the following points. That is, although light loss cannot be avoided between the light mixing optical element and each optical fiber, the light mixing optical elements 60a and 60b and the optical fiber wires 33a and 33
If the core wire of b is made of the same material, that is, quartz, the light mixing optical elements 60a and 60b and the optical fiber wires 33a and
Light loss between the light emitting device and the light emitting device 33b can be minimized. This means that the light intensity of the light from the light source units 40a and 40b can be minimized and the exposure process can be performed with the highest possible light quantity, which is advantageous in improving the throughput.

In the above-described embodiment, the edge exposure process is performed by moving the irradiation head 29 and rotating the substrate W. However, at least one of the substrate W and the irradiation head 29 is relatively moved. The technology according to the present invention can be applied to an entire edge exposure apparatus that performs edge exposure processing by moving the image exposure apparatus.

Further, in the above embodiment, the number of optical fiber wires constituting each of the light guides 31a and 31b is 500. However, the present invention is not limited to this. .

[0082]

As described above, according to the first aspect of the present invention, each of the n light-mixing optical elements is located at an arbitrary position in the path of the wire group corresponding to the light-mixing optical element. In addition to being provided, the light from the light source corresponding to the element wire group is mixed inside the light source, so that the light is individually mixed and emitted individually for each light source. An irradiation area where the intensity distribution is uniformized can be secured, and the edge portion of the substrate can be exposed with a uniform light intensity distribution and a good edge exposure process can be performed.
Using any one of the light sources, the operation of the apparatus can be continued even when the lamp of another light source is replaced.

According to the second aspect of the present invention, each of the n light mixing optical elements is provided in contact with an incident side end of a group of wires corresponding to the light mixing optical element.
2. The method according to claim 1, wherein after a part of the light from the light source corresponding to the wire group is directly received and mixed, the mixed light is emitted toward the end face of the incident side end of the wire group. Similarly to the described invention, it is possible to perform a good edge exposure process by exposing the edge of the substrate with a uniform light intensity distribution,
Using any one of the light sources, the operation of the apparatus can be continued even when the lamp of another light source is replaced, and the light loss between the light mixing optical element and the element group can be minimized.

According to the third aspect of the present invention, each of the n light-mixing optical elements extends from the incident-side end of the element group corresponding to the light-mixing optical element to the light guide path junction. After being provided at any position, after receiving light from the light source corresponding to the element wire group guided by the upstream portion of the light mixing optical element of the element wire group and performing light mixing, Since the mixed light is emitted toward the downstream side of the light mixing optical element in the element group, a uniform light intensity distribution is applied to the edge of the substrate as in the invention according to claim 1. , And a favorable edge exposure process can be performed, and the apparatus can be operated even when one of the light sources is used and the lamp of another light source is replaced.

According to the fourth aspect of the present invention, the n light mixing optical elements are integrated and incorporated into the light guide path junction in a state where they are optically isolated from each other. The optical element receives light from the light source corresponding to the element group, which is guided by the upstream portion of the element group corresponding to the optical element, and mixes the light. To emit the mixed light toward the downstream side of the light mixing optical element in the element group,
Similarly to the first aspect of the present invention, the edge of the substrate can be exposed with a uniform light intensity distribution to perform a good edge exposure process, and one of the light sources can be used for the other light source. The apparatus operation can be continued even when the lamp is replaced.

Further, according to the fifth aspect of the present invention, the n light mixing optical elements are connected from the light guide path merging portion to the light emitting side end of the merging element group in a state where they are optically isolated from each other. In addition to being provided integrally at any position up to, each light mixing optical element is guided by a portion of the element group corresponding to the light mixing optical element on the upstream side of the light mixing optical element. After receiving the light from the light source corresponding to the element group and mixing the light, the mixed light is emitted toward the downstream side of the light mixing optical element in the element group, Similar to the invention described in Item 1, the edge of the substrate can be exposed with a uniform light intensity distribution to perform a favorable edge exposure process, and a lamp of another light source can be used by using one of the light sources. The device operation can be continued even at the time of replacement.

According to the sixth aspect of the present invention, the n light mixing optical elements are integrated in a state where they are optically isolated from each other, and come into contact with the exit side end of the merging element group. Each light mixing optical element receives light from a light source corresponding to the element group guided by the element group corresponding to the light mixing optical element, and performs light mixing, and then mixes the mixed light. Is emitted directly toward the edge of the substrate, so that the edge of the substrate can be exposed with a uniform light intensity distribution and a good edge exposure process can be performed, similarly to the first aspect of the invention. At the same time, the operation of the apparatus can be continued even when the lamp of another light source is replaced using one of the light sources, and the light loss between the light mixing optical element and the element group is minimized. it can.

According to the seventh aspect of the present invention, since the light mixing optical element and the core wire of the optical fiber are formed of the same material, light loss between the light mixing optical element and the element group is reduced. It can be minimized.

According to the eighth aspect of the present invention, since the cores of the light mixing optical element and the optical fiber are formed of quartz, light loss between the light mixing optical element and the element group is minimized. Can be suppressed.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an overall configuration of an edge exposure apparatus according to the present invention.

FIG. 2 is a diagram illustrating a schematic configuration of an irradiation processing unit of the edge exposure apparatus of FIG. 1;

FIG. 3 is a diagram illustrating an example of a connection state between a light guide and a light mixing unit.

FIG. 4 is a diagram showing intensity distributions before and after light mixing.

FIG. 5 is a diagram showing a state of edge exposure of a substrate by the edge exposure apparatus of FIG. 1;

FIG. 6 is a diagram showing another example of the connection state between the light guide and the light mixing unit.

FIG. 7 is a diagram illustrating another example of a connection state between the light guide and the light mixing unit.

FIG. 8 is a diagram illustrating another example of a connection state between the light guide and the light mixing unit.

FIG. 9 is a diagram showing another example of a connection state between the light guide and the light mixing unit.

[Explanation of symbols]

29 Irradiation head 30 Irradiation processing unit 31a, 31b, 35 Light guide 32a, 32b Optical fiber strand 38 Jig for merging 40a, 40b light source unit 60 Light mixing unit 60a, 60b Light mixing optical element W substrate

   ────────────────────────────────────────────────── ─── Continuation of front page    (72) Inventor Kenji Kamei             4-chome Tenjin that rises in Horikawa-dori temple in Kamigyo-ku, Kyoto             1 Kitamachi 1 Dainippon Screen Mfg. Co., Ltd.             In the formula company (72) Inventor Kazuya Akiyama             4-chome Tenjin that rises in Horikawa-dori temple in Kamigyo-ku, Kyoto             1 Kitamachi 1 Dainippon Screen Mfg. Co., Ltd.             In the formula company F term (reference) 5F046 LA18

Claims (8)

[Claims] 1. An edge exposure apparatus for irradiating an edge of a rotating substrate with light to expose the edge, wherein n (where n is a natural number of 2 or more) emitting light is provided. A light source, provided in one-to-one correspondence with the n light sources, and a plurality of n optical fiber wires formed by bundling a plurality of optical fiber wires each of which guides light from the corresponding light source toward the edge. The element group and the n element groups separated from each other at the incident side end are merged in a state where they are separated from each other to form a merged element group having one exit side end. A light guide path merging section; and n light mixing optical elements provided in one-to-one correspondence with the n element wire groups, wherein each of the n light mixing optical elements is The light from the light source corresponding to the element group is provided at an arbitrary position in the path of the element group corresponding to the mixing optical element. Edge exposure apparatus, characterized in that for optically mixed therein. 2. The edge exposure apparatus according to claim 1, wherein each of the n light-mixing optical elements is provided in contact with an incident-side end of a wire group corresponding to the light-mixing optical element, After directly receiving a part of the light from the light source corresponding to the element group and mixing the light, the mixed light is emitted toward the end face of the incident side end of the element group. Edge exposure equipment. 3. The edge exposure apparatus according to claim 1, wherein each of the n light-mixing optical elements is connected from the incident side end of a group of wires corresponding to the light-mixing optical element to the light guide path junction. And light mixing is performed by receiving light from a light source corresponding to the element group guided by a portion of the element group upstream of the light mixing optical element. An edge exposure apparatus that emits the mixed light toward a downstream portion of the element group from the light mixing optical element. 4. The edge exposure apparatus according to claim 1, wherein the n light-mixing optical elements are integrated and incorporated into the light-guide-path merging section in a state where each of the n light-mixing optical elements is optically cut off from each other. Each light-mixing optical element receives light from a light source corresponding to the element group, which is guided by a portion of the element group corresponding to the light-mixing optical element that is located upstream of the optical element, and performs light mixing. An edge exposure apparatus that emits the mixed light toward a portion downstream of the light mixing optical element in the group of element wires after the light exposure. 5. The edge exposure apparatus according to claim 1, wherein the n light mixing optical elements emit the converging element group from the converging portion of the light guide path in a state where each of the n light mixing optical elements is optically isolated from each other. The light mixing optical element is provided integrally at any position up to the side end, and each light mixing optical element is an upstream portion of the element group corresponding to the light mixing optical element on the upstream side of the light mixing optical element. After receiving the light from the light source corresponding to the group of element wires guided by the optical element and mixing the light, the mixed light is emitted toward a portion of the element group downstream of the light mixing optical element. An edge exposure apparatus. 6. The edge exposure apparatus according to claim 1, wherein the n light-mixing optical elements are integrated with each other in a state where they are optically isolated from each other, and the emission-side end of the merging element group. Each light mixing optical element is provided in contact with the light mixing optical element, and receives light from a light source corresponding to the element group guided by the element group corresponding to the light mixing optical element, and performs light mixing. An edge exposure device for directly emitting the emitted light toward the edge. 7. The edge exposure apparatus according to claim 1, wherein the light mixing optical element and the core of the optical fiber are formed of the same material. Exposure equipment. 8. An edge exposure apparatus according to claim 7, wherein the optical mixing optical element and the core of the optical fiber are made of quartz.