JP2003344782A - Imaging device for microscope - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an imaging device for a microscope which makes focusing easy by changing the scale of a focus indicator in correspondence respectively to the cases the observation conditions and specimen of the microscope are changed. <P>SOLUTION: The imaging device applied to imaging of the observed image by the microscope displays the focusing information of the image formed by the imaging device according to at least one state of the combinations of optical systems relating to at least objective lens (27) and photographic eyepiece (35a) on the microscope (1) side and a speculum method. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an image pickup device attached to a microscope, and more particularly, to a method of displaying focus information on a specimen by using an output signal of an image pickup device of the image pickup device.

[0002]

2. Description of the Related Art The following technique is known as a method of displaying focus information on a sample by using an output signal of an image pickup device of a microscope image pickup device or an image measuring device.

Japanese Patent Laid-Open No. 11-283035 discloses a focus adjusting device for displaying an indicator showing the contrast value of an image. In this device,
The contrast value is displayed so that 100% is displayed at the maximum contrast of the image, and the coarse scale that displays the contrast value in coarse units and the fine scale that displays in fine units are combined to achieve accurate focusing at peak times. It is easy to fit in position.

However, in the technique disclosed in Japanese Patent Laid-Open No. 11-283035, the display of the indicator is the peak value obtained by estimating the contrast value at the peak position once the peak value is once detected or the contrast curve. The contrast value at the position is set to 100%. Therefore, when the microscope operator performs an operation of changing the observation condition of the microscope, for example, an operation of changing the specimen, the contrast value at the peak position at the time of the previous observation is high, and at the peak position at the next observation, When the contrast value becomes low, the indicator can be shaken only at a low position. Therefore, focusing becomes difficult, and in order to prevent this, extra work such as manually resetting the maximum stored contrast value is required.

Further, Japanese Unexamined Patent Publication No. 2000-278558 discloses an adjusting method for matching the focus positions of the eyepiece side and the camera side of the microscope, and the focus information on the sample is displayed on the monitor as an indicator. Focusing is performed by adjusting the image forming lens of the camera while watching this.

In the technique disclosed in Japanese Patent Laid-Open No. 2000-278558, however, the focus information on the sample is displayed on the monitor as an indicator, but is normalized by a constant contrast value regardless of the contrast value. Since it is displayed, depending on the sample, the indicator may shake only at a low position, and it is highly possible that the focus position is difficult to find. That is, in the technique disclosed in Japanese Patent Application Laid-Open No. 2000-278558, since the contrast value immediately after the focus indicator is turned on is normalized, there is a possibility that the indicator may shake only at a low position due to a change in the sample or a change in the objective lens. is there.

[0007]

In order to solve the above-mentioned problems, the present invention changes the scale of the focus indicator and performs focusing in response to changes in the microscope observation conditions and specimens. An object is to provide an easy-to-use microscope imaging device.

[0008]

A microscope image pickup apparatus according to a first aspect of the present invention is an image pickup apparatus applied to pick up an observation image by a microscope, wherein at least the objective lens and the photographic eyepiece lens on the microscope side are projected. It is characterized in that the display of the focus information of the image captured by the image capturing apparatus is switched in accordance with the combination of the optical systems related to the magnification and at least one state of the speculum method.

An image pickup apparatus for a microscope according to a second aspect of the present invention is an image pickup apparatus applied to picking up an observation image by a microscope, wherein the image pickup apparatus according to exposure information obtained from an output signal of the image pickup apparatus. It is characterized in that the display of the focus information of the captured image is switched.

An image pickup device for a microscope according to a third aspect of the present invention is an image pickup device applied to picking up an observation image by a microscope, and focus information of an image picked up by the image pickup device,
It is characterized in that the display of the focus information of the image captured by the image capturing device is switched according to the elapsed time required for the display.

In each of the above aspects, it is preferable that the display of the focus information includes resetting of a focus indicator.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described with reference to the drawings.

(First Embodiment) FIG. 1 shows a first embodiment of the present invention.
It is a figure which shows the structure of the microscope system to which the imaging device for microscopes which concerns on embodiment of this is applied. In FIG. 1, an objective lens 27 is arranged in the microscope body 1 so as to face the sample 3 mounted on a sample stage 26. A trinocular barrel unit 5 is arranged above the microscope body 1 on the observation optical axis through the objective lens 27.
The eyepiece lens unit 6 is arranged via the trinocular tube unit 5, and the imaging device 36 is provided on the upper part of the trinocular tube unit 5 via the imaging lens unit 100.
Are arranged.

FIG. 2 is a diagram showing a detailed configuration of the microscope system shown in FIG. The microscope system shown in FIG.
For example, various spectroscopic methods such as transmission bright-field observation, dark-field observation, phase difference observation, differential interference observation, and fluorescence observation can be appropriately selected.

The microscope system shown in FIG. 2 includes a transmission illumination optical system 11 and an epi-illumination optical system 12 as illumination systems. The transmitted illumination optical system 11 includes a transmitted illumination light source 13
, Collector lens 14, and transmission filter unit 1
5, a transmission field stop 16, a transmission shutter 161, a folding mirror 17, a transmission aperture stop 18, a condenser optical element unit 19, and a top lens unit 20. On the optical path of the transmitted illumination light emitted from the transmitted illumination light source 13, the optical elements including the collector lens 14 to the top lens unit 20 are sequentially arranged from the transmitted illumination light source 13 side. The collector lens 14 collects the transmitted illumination light from the transmitted illumination light source 13. The epi-illumination optical system 12 includes an epi-illumination light source 21, an epi-illumination filter unit 22, an epi-illumination shutter 23, and an epi-illumination field stop 2.
4 and an incident aperture stop 25. On the optical path of the epi-illumination light emitted from the epi-illumination light source 21, the optical elements of the epi-illumination light source 21 side to the epi-illumination filter unit 22 to the epi-illumination aperture stop 25 are sequentially arranged.

Transmission illumination optical system 11 and epi-illumination optical system 12
On the observation optical path S where the optical axes of
, Revolver 28, and objective lens side optical element unit 2
9, a cube unit 30, and a beam splitter 31
And are arranged. A sample to be observed is placed on the sample stage 26. A plurality of objective lenses 27 are attached to the revolver 28.
One objective lens 27 is selected by the rotation operation and is positioned on the observation optical path S. The cube unit 30 switches the dichroic mirror on the observation optical path S according to various spectroscopic methods such as transmission bright-field observation or fluorescence observation. The beam splitter 31 is arranged in the trinocular barrel unit 5, and the observation optical path S is divided into a first observation optical path S ′ toward the eyepiece lens and a second observation optical path S ″ toward the imaging device 36. Branch off.

An eyepiece lens 6 is provided on the first observation optical path S '.
a is arranged and the observation light that has passed through the eyepiece lens 6a is observed by a spectroscope. Further, on the second observation optical path S ″, an imaging lens unit 100 including an intermediate variable magnification optical system (zoom lens barrel) 33 and a photographic eyepiece lens unit 35, and an imaging device 36 are arranged. Light can be captured by the image capturing device 36. The image capturing device 36 includes a display unit (not shown) whose details will be described later, and whether or not the current contrast value is in focus is displayed on this display unit. The focus indicator that indicates is displayed.

The intermediate variable-magnification optical system (zoom lens barrel) 33 incorporates a variable-magnification zoom lens 33a for varying the magnification of the image picked up by the image pickup device 36. If the intermediate magnification change is unnecessary, the intermediate magnification change optical system (zoom barrel) 33 can be removed. The image pickup device 36 includes an image pickup element 42 therein.

Observation light from the objective lens 27 is imaged on the image pickup surface of the image pickup device 42 by the photographic eyepiece lens 35a in the photographic eyepiece lens unit 35. The transmission filter unit 15, the transmission field stop 16, the transmission shutter 161, the transmission aperture stop 18, the condenser optical element unit 19, the top lens unit 20, and the epi-illumination filter unit in the epi-illumination optical system 12 in the trans-illumination optical system 11. 22, an epi-illumination shutter 23, an epi-illumination field stop 24,
And epi-aperture diaphragm 25, revolver 28, objective lens side optical element unit 29, cube unit 30, beam splitter 31, and intermediate variable magnification optical system (zoom barrel) 33.
Is driven by each motor (not shown) by each drive signal from the drive circuit section 37.

Further, the revolver 28, the objective lens side optical element unit 29 and the photographic eyepiece lens unit 35 include
An objective lens detector 38, a retardation adjustment operation detector 39, and a photographic eyepiece lens detector 40 are arranged respectively. The objective lens detection unit 38 detects the type of the objective lens 27 located on the observation optical path S. The retardation adjustment operation detector 39 detects the retardation adjustment operation. The photographic eyepiece detection unit 40 also detects the type of photographic eyepiece.

The microscope control unit 41 controls the operation of the entire microscope. The microscope control unit 41 includes a transillumination light source 13, an epi-illumination light source 21, and a drive circuit unit 3.
7, objective lens detection unit 38, retardation adjustment operation detection unit 39, photo eyepiece lens detection unit 40, and imaging device 3
6 is connected.

The microscope control unit 41 operates the transillumination light source 1 in accordance with an operation of an operation unit (not shown) by a microscopist.
3 and the light source 21 for epi-illumination are dimmed. Further, the microscope control unit 41 gives various control instructions to the drive circuit unit 37. In addition, the microscope control unit 41
From the objective lens detection unit 38, the retardation adjustment operation detection unit 39, and the photographic eyepiece lens detection unit 40, the control state for the transillumination light source 13 and the epi-illumination light source 21 and the control state for the drive circuit unit 37 are included. By outputting the detection information of 1 to the image pickup device 36, the focus indicator display in the image pickup device 36 is automatically set.

With reference to FIG. 3, a signal flow when the focus indicator is displayed according to the first embodiment will be described. FIG. 3 is a diagram showing a schematic configuration of each detection unit and the imaging device 36 in the microscope according to the first embodiment of the present invention. The image pickup device 36 includes an image pickup element 42, an A / D converter 43, a timing generator 44, a frame memory 45, a memory controller 46, a contrast calculation section 47, a display section 48, and a control section 49. There is.
The microscope includes an objective lens detection unit 50, a photographic eyepiece lens detection unit 51, and a microscopic detection unit 52. In the configuration as described above, the image sensor 42 converts incident light from the microscope into an electric signal. The timing generator 44 generates a drive timing signal for the image sensor 42. The electrical analog signal output from the image sensor 42 is converted into a digital signal by the A / D converter 43. The A / D converted digital signal is stored in the frame memory 45. In addition, the memory controller 4
Reference numeral 6 controls the write / read address of the frame memory 45. The contrast calculation unit 47 specifies a read address via the memory controller 46, reads the captured image data from the specified address, and calculates the contrast value of the image. The display unit 48 displays the contrast value calculated by the contrast calculation unit 47 together with the captured image as a focus indicator display. The control unit 49 controls various parts of the imaging device 36. The objective lens detection unit 50 also detects the type of objective lens currently arranged in the optical path. The photo eyepiece detection unit 51 detects the magnification of the photo eyepiece. The spectroscopic detection unit 52 detects switching of the spectroscopic methods such as bright field, dark field, fluorescence, polarization, and differential interference.

The operation relating to the focus indicator display in the microscope system including the image pickup device 36 according to the first embodiment configured as described above will be described. The microscopist operates the microscope 1 to observe the sample 3, and records an image with the imaging device 36 as necessary. At the time of observation and recording, it is necessary to focus on the sample 3, but in order to facilitate this focusing, the following focus indicator display is performed.

First, when an image is taken in accordance with a signal generated from the timing generator 44, the image pickup device 42
A charge corresponding to the image of the sample 3 is accumulated in the. Image sensor 4
The electric charge (electrical signal) accumulated in 2 is read out from the image pickup device 42 after the end of photographing, and is input to the A / D converter 43. The A / D converter 43 converts the image signal input from the image sensor 42 into a digital signal (digital image data) by analog / digital conversion. This digital image data is stored in the frame memory 45. By controlling writing / reading of the frame memory 45 by the memory controller 46, the image data from the image pickup device 42 is recorded in the frame memory 45 in real time, and at the same time, a real-time image is displayed on the display unit 48.

The contrast calculator 47 reads the recorded image data from the frame memory 45 and calculates the contrast value. The contrast value calculated by the contrast calculation unit 47 is displayed on the display unit 48. In this case, if the contrast value is displayed so that the magnitude of the contrast value can be visually recognized by using, for example, a bar graph, focusing can be easily performed.

FIG. 4 is a diagram showing contrast characteristics. In FIG. 4, the vertical axis represents the contrast value, and the horizontal axis represents the stage position in the Z direction (direction along the optical axis). The contrast value is obtained by, for example, the sum of squares of the differences between adjacent pixel data, and shows the highest value at the position where the sample is in focus (that is, the in-focus position) as shown in FIG. This contrast value tends to be relatively high during low-magnification observation where the spatial frequency of the image is high, and tends to be low during high-magnification observation, but the value varies greatly depending on the type of specimen, observation method, and the like. Therefore, in the first embodiment,
The following control is performed. The maximum value of the past contrast value (MAX
The contrast value is normalized based on (value) and displayed (FIG. 5A). Therefore, the current contrast value is 0
To MAX value. Here, when the contrast value exceeds the MAX value (FIG. 5B), the display of the indicator is saturated and the display cannot be performed. Therefore, in this case, the reference value for normalization is replaced with a new (current) maximum contrast value (FIG. 5C) to prevent the graph from being saturated. Resetting the threshold value is called "resetting" of the indicator>. At this time, if the current maximum contrast value is set to 100% as it is, there is a possibility that the contrast value will exceed 100%. To come. Thus, in addition to the case where the contrast value exceeds the MAX value, the subsequent contrast value may change depending on the detection results of the objective lens detection unit 50, the photographic eyepiece detection unit 51, and the microscopic detection unit 52. It is preferable to reset the indicator when it is expected. Also, the display width of the indicator is small (narrow),
The display may be difficult to see. In this case, for example, when the display of the indicator is 20% or less, it is preferable to reset the indicator so that the display is easy to see.

Specific processing of the first embodiment will be described with reference to FIGS. 6 and 7. FIG. 6 is a flowchart of the contrast calculation process. Since the calculation of the contrast value is started at the time when the image for one frame is stored in the frame memory 45, the vertical synchronization signal or the like normally output from the timing generator is used as an interrupt process. First, when an interrupt occurs, the contrast calculation unit 47 causes the memory controller 4
The image data is read from the frame memory 45 via 6 (step A1), and the contrast value is calculated (step A2). The contrast value calculated by the contrast calculation unit 47 is updated and saved as the current contrast value (step A3), and the interrupt process ends.

FIG. 7 is a flowchart relating to the display processing of the contrast value calculated according to the flowchart of FIG. When the display process is started, the current contrast value (on the indicator, the current indicator value: Eva
l_cur) is the maximum value of the past contrast value (the maximum indicator value on the indicator: Eval_max)
Greater than or equal to (Eval_cur> Eval_m
ax? ) Is determined (step B1). If the current contrast value is higher, is the indicator saturated (Eval_cur> Eval_MAX)?
? ), That is, whether the current contrast value exceeds the 100% display of the indicator (step B2). If the indicator is saturated in step B2, the indicator is reset (step B3). In this case, the indicator is reset by substituting a predetermined value (for example, 80%) into the indicator current value (Eval_cur) and the indicator maximum value (Eval_max). That is, the current contrast value is set to, for example, the 80% display position of the indicator. As a result, even if a contrast value higher than the current contrast value is detected thereafter, it is not necessary to reset the indicator each time. In step B2, when the indicator is not saturated, the current contrast value is updated to the maximum value (Eval_max =
Eval_cur: Step B4).

In step B1, if the current contrast value is less than the maximum value, it is determined whether the current contrast value is less than or equal to the minimum threshold value (MIN value: 20% of indicator display, for example). (Step B5). If the current contrast value is less than or equal to the MIN value in step B5, the indicator shake is too small, and the indicator is reset (step B3). Also in this case, for example, the current contrast value is set as, for example, the 80% display position of the indicator.

When the current contrast value is larger than the minimum threshold value in step B5, it is judged whether or not the switching of the objective lens is detected (step B).
6). When the switching of the objective lens is detected in step B6, the indicator is reset (step B3). Hereinafter, when the switching of the photographic eyepieces is detected <Step B7> and when the switching of the speculum is detected (Step B8), the indicators are reset (Step S8) as in the case where the switching of the objective lens is detected. B3), if neither switching is detected, the process ends.

The MIN value (20%) of the indicator described in the first embodiment and the set value after reset (8%
0%) is an example and can be set arbitrarily. It is also possible to prepare a plurality of these parameters and switch the setting values for each of the objective lens, the photographic eyepiece lens, and the microscopic method. It is also possible to make the reaction of the indicator sensitive to the calculated contrast value by calculating an offset value or the like.

In addition to automatically resetting the indicator as in the first embodiment, it is possible to provide a focus indicator reset button on the operation unit or reset the indicator by operating the menu. It is also possible not to reset the indicator when the observation method or the specimen is specified, for example, in the semiconductor inspection process.

Further, the timing of resetting the focus indicator only causes the sensor to detect that the operation of each part of the microscope has been completed. In the electric microscope, when the changeover switch of each part is pressed, the indicator of the indicator is reset. You may reset. Further, when the camera settings are stored for each observation condition of the microscope, it is possible to reset the indicator when the data is read.

(Second Embodiment) The structure and detailed structure of a microscope system according to the second embodiment are the same as those in FIGS. 1 and 2, and therefore, illustration and description thereof will be omitted. Figure 8
The flow of signals when the focus indicator is displayed according to the second embodiment will be described with reference to FIG. FIG. 8 is a diagram showing a schematic configuration of the imaging device 36 according to the second embodiment. In FIG. 8, the same parts as those in FIG. 3 are designated by the same reference numerals, and detailed description thereof will be omitted. In the second embodiment, the AE calculation unit 5 is added to the image pickup device 36 according to the first embodiment.
3 has been added. In addition, the objective lens detection unit 50, the photographic eyepiece detection unit 51, and the microscopic detection unit 52 included in the microscope 1 are configured not to input signals from the detection units. In this configuration, the AE calculation unit 53
Calculates the optimal exposure time.

The operation relating to the focus indicator display in the image pickup apparatus 36 according to the second embodiment configured as described above will be described. The microscopist operates the microscope 1 to observe the sample 3 and, if necessary, the imaging device 3
Record the image at 6. At the time of observation and recording, it is necessary to focus on the sample 3, but in order to facilitate this focusing, the following focus indicator display is performed.

First, when photographing is performed according to the signal generated from the timing generator 44, the image pickup element 42
A charge corresponding to the image of the sample 3 is accumulated in the. Image sensor 4
The electric charge (electrical signal) accumulated in 2 is read out from the image pickup device 42 after the end of photographing, and is input to the A / D converter 43. The A / D converter 43 converts the image signal input from the image sensor 42 into a digital signal (digital image data) by analog / digital conversion. This digital image data is stored in the frame memory 45. By controlling writing / reading of the frame memory 45 by the memory controller 46, the image data from the image pickup device 42 is recorded in the frame memory 45 in real time, and at the same time, a real-time image is displayed on the display unit 48.

The contrast calculator 47 reads the recorded image data from the frame memory 45 and calculates the contrast value. The contrast value calculated by the contrast calculation unit 47 is displayed on the display unit 48. On the other hand, the data read from the frame memory 45 is AE
The optimum exposure time is calculated based on the data input to the calculation unit 53. The calculated exposure time is set in the timing generator 44 by the control unit 49 and is used for the next imaging, and when the exposure time is largely changed, it is determined that the observation condition of the microscope is changed or the sample is switched. Judge and reset the focus indicator.

Specific processing of the second embodiment will be described with reference to FIGS. 9 and 10. 9 and 10, the same parts as those of FIGS. 3 and 7 are denoted by the same reference numerals. FIG. 9 is a flowchart of the contrast calculation process. The contrast value calculation shown in FIG. 9 is performed as an interrupt process as in the first embodiment. First, when an interrupt occurs, the contrast calculation unit 47 reads image data from the frame memory 45 via the memory controller 46 (step A1),
The contrast value is calculated (step A2). The contrast value calculated by the contrast calculator 47 is updated and saved as the current contrast value (step A).
3). The image data read from the frame memory 45 in step A1 is
It is also input to the E calculation unit 53, and the exposure time is calculated by the AE calculation unit 53 (step C1). The exposure time calculated by the AE calculator 53 is updated and saved as the current exposure time (step C2). The above series of processing is performed, and the interruption is ended (step A4).

FIG. 10 is a flowchart relating to the display processing of the contrast value calculated according to the flowchart of FIG. Step B5 after the display process is started
The process up to is similar to that of FIG. 7. That is, when the display process is started, it is determined whether or not the current contrast value is larger than the maximum past contrast value (step B1). If the current contrast value is higher, it is determined whether the indicator is saturated (step B2). If the indicator is saturated in step B2, the indicator is reset (step B3). In step B2,
If the indicator is not saturated, the current contrast value is updated to the maximum value (step B4). Step B
In 1, when the current contrast value is less than the maximum value, it is determined whether the current contrast value is less than or equal to the minimum threshold value (step B5). If the current contrast value is less than or equal to the MIN value in step B5, the indicator is reset (step B3).

In step B5, if the current contrast value is larger than the minimum threshold value, the AE calculator 5
The present exposure time obtained in 3 is compared with the previous exposure time (step D1). If the difference (absolute value) between the current exposure time and the previous exposure time is greater than or equal to the exposure change determination threshold value (for example, ± 2 EV or more), it is determined that the microscope observation conditions or the sample has been switched. Judgment is made and the indicator is reset to cope with the change in the contrast value thereafter. In step D1, if the difference between the current exposure time and the previous exposure time is smaller than the threshold value, the process ends.

In the above-described second embodiment, the judgment criterion when the indicator is reset is when the difference between the present exposure time and the previous exposure time is ± 2 EV or more.
This threshold may be set arbitrarily. Also,
By taking a long exposure time history instead of the difference between the current exposure time and the previous exposure time, and comparing with the previous data (or its accumulated data), it is possible to expose by the noise mixed in the captured image etc. It is also possible to remove noise in the time calculation result and accurately determine observation condition switching or sample switching.

Further, in addition to automatically resetting the indicator as in the second embodiment, as in the first embodiment, a reset button for the focus indicator is provided on the operation portion, or the indicator is reset by operating the menu. It is possible to reset, or it is possible not to reset the indicator when the observation method and the specimen are specified, such as in the semiconductor inspection process.

(Third Embodiment) The configuration and detailed configuration of the microscope system according to the third embodiment are the same as those in FIGS. 1 and 2, and therefore, illustration and description thereof will be omitted. Figure 1
With reference to FIG. 1, a signal flow when the focus indicator according to the third embodiment is displayed will be described. Figure 11
FIG. 8 is a diagram showing a schematic configuration of an image pickup device 36 according to a third embodiment. In FIG. 11, the same parts as those in FIG. 8 are designated by the same reference numerals, and detailed description thereof will be omitted. In the third embodiment, the image pickup device 36 is the same as in the second embodiment.
A timer count unit 54 is provided instead of the E calculation unit 53. The timer count unit 54 counts up at a regular timing because the history of contrast values is associated with time.

The operation relating to the focus indicator display in the image pickup device 36 according to the third embodiment configured as described above will be described. The microscopist operates the microscope 1 to observe the sample 3 and, if necessary, the imaging device 3
Record the image at 6. At the time of observation and recording, it is necessary to focus on the sample 3, but in order to facilitate this focusing, the following focus indicator display is performed.

First, when photographing is performed according to the signal generated from the timing generator 44, the image pickup element 42
A charge corresponding to the image of the sample 3 is accumulated in the. Image sensor 4
The electric charge (electrical signal) accumulated in 2 is read out from the image pickup device 42 after the end of photographing, and is input to the A / D converter 43. The A / D converter 43 converts the image signal input from the image sensor 42 into a digital signal (digital image data) by analog / digital conversion. This digital image data is stored in the frame memory 45. By controlling writing / reading of the frame memory 45 by the memory controller 46, the image data from the image pickup device 42 is recorded in the frame memory 45 in real time, and at the same time, a real-time image is displayed on the display unit 48.

The contrast calculator 47 reads the recorded image data from the frame memory 45 and calculates the contrast value. The contrast value calculated by the contrast calculation unit 47 is displayed on the display unit 48. At this time, the timer count unit 54 saves the time and the cumulative count value as history data at predetermined time intervals (that is, at regular timings) together with the contrast value according to the time. Then, when the contrast value does not change for a certain period, it is determined that it is a focus fine adjustment period near the in-focus position, and the indicator is reset.

Specific processing of the third embodiment will be described with reference to FIG. 12, the same parts as those in FIG. 7 are designated by the same reference numerals. In the description of the present embodiment, the case where the amount of change in the contrast value in the past 5 seconds is equal to or less than the threshold value (5%) is set as the indicator reset condition. The calculation of the contrast value is performed as an interrupt process as in the first embodiment (FIG. 6). Therefore, illustration and description of the calculation of the contrast value are omitted.

FIG. 12 is a flowchart relating to the display process of the calculated contrast value. The process from the start of the display process to step B5 is the same as in FIG. That is, when the display process is started, it is determined whether or not the current contrast value is larger than the maximum past contrast value (step B1). If the current contrast value is higher, it is determined whether the indicator is saturated (step B2). Step B2
In, if the indicator is saturated, the indicator is reset (step B3). And
Reset the count value of the counter for continuous reset (co
unt = 0) (step E4). Here, the continuous reset counter is a variable indicating the time during which the change history of the contrast value is below the threshold value, and is incremented (incremented) at regular intervals by a timer interrupt process (not shown). This counter has a continuous reset time (that is, a predetermined count value: COUNT_
CONT) and above, the indicator is reset. When the indicator is not saturated in step B2, the current contrast value is updated to the maximum value (step B4). If the current contrast value is less than the maximum value in step B1, it is determined whether the current contrast value is less than or equal to the minimum threshold value (step B5). In step B5,
If the current contrast value is less than or equal to the MIN value,
The indicator is reset (step B3).

In step B5, when the current contrast value is larger than the minimum threshold value, the past history of the contrast value is determined as follows. First, the past history of the maximum value and the min value is updated using the current contrast value (step E1), and it is determined whether the past history is equal to or less than the change threshold for continuous reset (step E2). In step E2, if the past history is equal to or greater than the threshold value, the count value is reset and the process ends (step E4). On the other hand, if the past history is less than or equal to the threshold value at step E2, it is determined how long the history is continuous (step E3).

In step E3, if the counter value of the timer exceeds the continuous reset time (COUNT_CONT), the indicator is reset (step B3), the counter is reset (step E4), and the process ends. If the timer counter value is less than the continuous reset time, nothing is done and the process ends.

[0052]

According to each of the embodiments of the present invention, (1) since the focus indicator always swings at a high display position, focusing is easy. (2) Since the focus indicator is automatically reset, manual resetting does not occur and it is easy to use. And so on.

[Brief description of drawings]

FIG. 1 is a diagram showing a configuration of a microscope system to which a microscope image pickup apparatus according to a first embodiment of the present invention is applied.

FIG. 2 is a diagram showing a detailed configuration of the microscope system shown in FIG.

FIG. 3 is a diagram showing a schematic configuration of each detection unit and an imaging device in the microscope according to the first embodiment of the present invention.

FIG. 4 is a diagram showing contrast characteristics.

FIG. 5 is a diagram showing an example of an indicator display according to the embodiment of the present invention.

FIG. 6 is a flowchart related to contrast calculation processing.

7 is a flowchart relating to a display process of a contrast value calculated according to the flowchart of FIG.

FIG. 8 is a diagram showing a schematic configuration of an image pickup apparatus according to a second embodiment.

FIG. 9 is a flowchart related to contrast calculation processing.

10 is a flowchart relating to a display process of a contrast value calculated according to the flowchart of FIG.

FIG. 11 is a diagram showing a schematic configuration of an image pickup apparatus according to a third embodiment.

FIG. 12 is a flowchart relating to display processing of calculated contrast values.

[Explanation of symbols]

1 ... Microscope 3 ... Sample 5 ... Trinocular tube unit 6 ... Eyepiece unit 6a ... Eyepiece 11 ... Transmitted illumination optical system 12: Epi-illumination optical system 13 ... Light source for transmitted illumination 14 ... Collector lens 15 ... Transmission filter unit 17 ... Mirror 19 ... Condenser optical element unit 20 ... Top lens unit 21 ... Epi-illumination light source 22 ... Epi-illumination filter unit 23 ... Episcopic shutter 26 ... Sample stage 27 ... Objective lens 28 ... Revolver 29 ... Objective lens side optical element unit 30 ... Cube unit 31 ... Beam splitter 33 ... Intermediate variable power optical system 33a ... Zoom lens 35 ... Photo eyepiece unit 35a ... Photo eyepiece 36 ... Imaging device 37 ... Drive circuit section 38 ... Objective lens detector 39 ... Retardation adjustment operation detector 40 ... Photo eyepiece detection unit 41 ... Microscope control section 42 ... Image sensor 43 ... D converter 44 ... Timing generator 45 ... Frame memory 46 ... Memory controller 47 ... Contrast calculation unit 48 ... Display 49 ... Control unit 50 ... Objective lens detector 51 ... Photo eyepiece detection unit 52 ... Microscopic detection section 53 ... AE calculation unit 54 ... Timer counting section

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) H04N 5/225 G03B 3/00 AF term (reference) 2H011 AA06 BA31 DA05 2H051 AA11 BA45 BA47 CE23 EB20 2H052 AA01 AA05 AA09 AB05 AB06 AB10 AB24 AC04 AC05 AC06 AC07 AC14 AC27 AD07 AD33 AF14 AF21 AF25 2H102 AA17 AA33 BA15 5C022 AA08 AA13 AB01 AB28 AC03 AC13 AC42 AC54 AC77

Claims (4)

[Claims] 1. An image pickup apparatus applied to picking up an observation image by a microscope, comprising at least one of a combination of an optical system relating to a projection magnification of at least the objective lens and a photographic eyepiece on the microscope side, and a microscopic method. The imaging device for a microscope is characterized in that the display of the focusing information of the image taken by the imaging device is switched accordingly. 2. An image pickup device applied to picking up an observation image by a microscope, wherein display of focus information of an image picked up by the image pickup device is switched according to exposure information obtained from an output signal of the image pickup device. An imaging device for a microscope characterized by the above. 3. An image pickup apparatus applied to pick up an observation image by a microscope, wherein the image pickup apparatus picks up an image in accordance with focus information of the image picked up by the image pickup apparatus and elapsed time required for the display. An image pickup apparatus for a microscope, which switches display of focusing information of an image. 4. The microscope image pickup apparatus according to claim 1, wherein displaying the focus information includes resetting a focus indicator.