JP2003315698A - Optical switch - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical switch which can control the passage or blocking of even a signal having a relatively large luminous flux. <P>SOLUTION: The optical switch comprises a swing body 1 and a base substrate 2. The swing body 1 has a movable electrode 13 at one end of at least a moving element 12 and a switch plate 11 blocking light at the other end and is equipped with connectors 14 and 14 projecting from the moving element 12 and having elasticity in a twisting direction and an anchor 15 formed integrally therewith. The base substrate 2 has a support part 21 supporting the swing body 1 by abutting against the part of the moving element 12 where the connectors 14 and 14 are provided and has a fixed electrode 23 opposite the movable electrode 13; and the connectors 14 and 14 are provided at positions displaced from the center position of the moving element 12 toward the movable electrode 13 to increase the quantity of displacement of the switch plate 11. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical switch operatively displaced by electrostatic force.

[0002]

2. Description of the Related Art As a conventional optical switch, Japanese Patent Application Laid-Open No. 2000-2000
What is shown in -258702 is shown in FIG. This is a conductive silicon substrate 1 that serves as a fixed electrode.
01, a square movable electrode plate 102 made of polycrystalline silicon faces the silicon substrate 101 at a predetermined space via supports 103, 103, ... And fixed portions 105, 105 ,. It is arranged as follows. Further, rectangular cutouts 106, 106, ... Are formed at the center of each side of the movable electrode plate 102.
A support 10 in the form of a beam folded back inwardly of 6, 106, ...
, And fixed portions 105, 105 ,. Further, the inner ends of the supports 103, 103, ... Are connected to the movable electrode plate 102, and the outer ends thereof are fixed portions 105, 10.
Are connected to the silicon substrate 101 via 5 ,.
Further, a mirror 104 made of polycrystalline silicon is erected at a substantially central portion of the movable electrode plate 102.

Reference numerals 107, 108 and 109 denote optical fibers or optical waveguides, which are a silicon substrate 101 and a movable electrode plate 10.
When a voltage is not applied between 2 and 2, the light incident from the input side 107 is reflected by the mirror 104 and
The direction is changed by 0 ° and enters the output side 108. Further, when a voltage is applied between the silicon substrate 101 and the movable electrode plate 102, an electrostatic force is generated between them and the movable electrode plate 102 is generated.
Are sucked into the silicon substrate 101, and the supports 103, 10
3, ... Are elastically deformed to move the mirror 104 to the silicon substrate 10.
Move to 1 side. As a result, the light incident from the input side 107 passes above the mirror 104, goes straight, and is incident on another output side 109.

Therefore, in this optical switch, the mirror 10 is controlled by applying or not applying a voltage between the silicon substrate 101 and the movable electrode plate 102.
It is possible to displace and move 4 so that the light incident from the input side 107 is incident on either one of the output sides 108 and 109.

[0005]

The above optical switch is
Since the support members 103, 103, ... Are formed in a folded beam shape, their spring constants are smaller than those of linearly formed members of the same length, and in the case where the displacement amount of the mirror 104 is made equal. The size of the optical switch can be made small. However, when the diameter of the incident light, that is, the light flux increases, it is necessary to increase the displacement amount of the mirror 104 with respect to the silicon substrate 101 in order to completely control the light. However, in this structure, the amount of displacement depends on the gap between the silicon substrate 101 and the movable electrode plate 102, and the mirror 1
Even if 04 is displaced toward the substrate side, there is a concern that it is difficult to control the optical signal efficiently because a part of the light beam is applied to a part of the mirror 104.

The present invention has been made in view of the above points, and an object of the present invention is to provide an optical switch capable of controlling passage or interruption of an optical signal having a relatively large luminous flux. .

[0007]

In order to achieve the above object, an optical switch according to a first aspect of the present invention has a switch plate having a movable electrode at least at one end of a mover and blocking light at the other end. A rocking body provided with a connector protruding from the mover and having elasticity in a twisting direction and an anchor integrally formed with the mover, and a support for supporting the rocker by abutting on a portion of the mover where the connector is provided. A base substrate having a fixed electrode at a position opposite to the movable electrode, and the connector is provided at a position displaced from the center position in the longitudinal direction of the movable member to the movable electrode side. The switch plate is displaced by an electrostatic force between the fixed electrode and the fixed electrode.

According to a second aspect of the present invention, in the optical switch according to the first aspect, the movable electrode is provided so as to form a predetermined angle with respect to the movable element, and is fixed so as to face the movable electrode. The electrodes are arranged on the base substrate.

According to a third aspect of the present invention, in the optical switch according to the first or second aspect, the fixed electrode is provided on the base substrate so as to sandwich the supporting portion, and the movable electrode is opposed to the fixed electrode. It is supposed to be provided on the mover so as to do so.

According to a fourth aspect of the present invention, in the optical switch according to any one of the first to third aspects, the connector has a bent structure having a rectangular wave shape in the protruding direction.

An optical switch according to a fifth aspect of the present invention is the optical switch according to any one of the first to fourth aspects, wherein the base substrate is located at a position facing the mover in the switch plate direction from the supporting position of the oscillator. A stopper is provided to stop the displacement of the mover.

An optical switch according to a sixth aspect of the present invention is the optical switch according to any one of the first to fifth aspects, wherein the stopper has a protrusion on a contact surface with the mover, and the stopper and the mover are separated from each other. The contact is defined as point contact or line contact.

According to a seventh aspect of the present invention, in the optical switch according to any one of the first to sixth aspects, the stopper contacts the mover at a position lower than a contact position between the support and the mover. It is supposed to be formed in.

[0014]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings.

[First Embodiment] FIGS. 1A and 1B show an optical switch according to the present embodiment. FIG. 1A is a plan view thereof, and FIG. 1B is a sectional view taken along line AA. FIG. In addition, FIG. 2 is a sectional view showing a manufacturing process of the oscillator of the optical switch. Further, FIG. 3 is a sectional view showing a manufacturing process of the base substrate of the optical switch in the same manner.

The optical switch according to this embodiment includes an oscillator 1.
And the base substrate 2 is a main component. Of these, the oscillator 1 controls an optical signal by performing an oscillating motion (seesaw motion) on a base substrate 2 described later, and is formed of, for example, a semiconductor substrate made of silicon (Si). Also, this is a switch plate 11
, Mover 12, moveable electrode 13, connectors 14, 14
And an anchor 15. In addition, a material with high reflectance such as gold (A
u) etc. are vapor-deposited. Further, an electrode 18 for applying a potential to the movable electrode 13 is formed on the anchor 15.

The switch plate 11 passes or reflects the optical signal by interposing it on the optical path of the optical signal input to the optical switch, and is a portion serving as an action point of the mover 12. The shape is a flat plate having a substantially rectangular shape in a plan view. The size thereof is at least equal to or larger than the luminous flux of the optical signal to be controlled, and the size in the horizontal direction is, for example, approximately 1.4 times the size in the vertical direction.

The mover 12 displaces the switch plate 11 up and down (vertical direction in FIG. 1B) according to the applied voltage. Its shape is a rectangular body having a substantially quadrangular shape in plan view, and its thickness is, for example, about 10 μm.
It is a degree. In addition, the switch plate 1 is provided at one end of the mover 12.
1 is provided, and is provided so as to be substantially parallel to the longitudinal direction in a state of standing on the upper surface of the mover 12 (upper part of FIG. 1B).

The movable electrode 13 is a part which generates an electrostatic force by a voltage applied between the movable electrode 13 and a fixed electrode 23, which will be described later, to oscillate the movable element 12, and which is a force point of the movable element 12. The shape is a rectangular body having a substantially quadrangular shape in plan view, and has a thickness substantially equal to that of the mover 12. Also, this is a switch plate 11 of the mover 12.
Is integrally formed so as to be connected on the same plane to the end opposite to the end provided with.

The connectors 14 and 14 support the mover 12 so as to swing with respect to the base substrate 2. The shape is a beam that is a narrow quadrangle in a plan view. The connectors 14, 14 are provided on both sides of the mover 12, and are provided in the vicinity of the movable electrode 13 so as to project on the same plane as the mover 12 so that they are on the same axis. Further, this is formed with the same thickness as the mover 12 and the movable electrode 13, and has elasticity in the swinging direction of the mover 12 (the twisting direction in the connectors 14 and 14).

The anchor 15 is for fixing the semiconductor substrate forming the oscillator 1 to the joint portion 24 of the base substrate 2 and unifying the moving direction of the mover 12 only in the direction orthogonal to the base substrate 2. is there. The shape is such that the outer shape is a substantially quadrangular shape in a plan view, and all parts inside the movable element 12, the movable electrode 13, and the connectors 14, 14 constitute the anchor 15.

Subsequently, the base substrate 2 is for fixing and supporting the movable element 12 without disturbing the swing of the movable element 12.
Like the oscillator 1, it is formed of a semiconductor substrate made of silicon. In addition, this is composed of a portion that forms a support portion 21, a stopper 22, and a fixed electrode 23. Further, an electrode (not shown) for applying a potential to the fixed electrode 23 is formed at a predetermined position.

The support portion 21 swingably supports the mover 12, that is, serves as a fulcrum of the swing.
The shape is such that trapezoidal rods that narrow upward from the bottom surface of the base substrate 2 (upper side in FIG. 1B) in a cross-sectional view are integrally formed in two stacked layers, and at least the upper row thereof. The upper surface of the portion 21a (upper part of FIG. 1B) is formed to have a length substantially equal to the width of the mover 12 (direction orthogonal to the longitudinal direction) so as to be in almost line contact with the mover 12. Further, the upper surface of the lower step portion 21b has a length at least approximately equal to the longitudinal direction of the movable electrode 13. Further, the outer peripheral edge portion 21c on the upper surface of the lower step portion 21b with respect to the base substrate 2 is configured to make substantially line contact with the movable electrode 13 when the switch plate 11 is displaced above the base substrate 2. In addition, the support portion 21 is the lower surface of the mover 12 at the projecting position of the connectors 14, 14 (downward in FIG. 1B).
It is provided at a predetermined position on the base substrate 2 so as to abut. Further, an insulating film (not shown) is provided on the contact surface so as to maintain insulation with the mover 12.

The stopper 22 reduces the damage of the mover 12 due to collision with the base substrate 2 when the switch plate 11 is displaced toward the base substrate 2. The shape of the rod is a trapezoid that narrows upward (upper side in FIG. 1B) from the bottom surface of the base substrate 2 in cross-sectional view, and the upper surface thereof has a size substantially equal to the width of the mover 12. It is the body. Further, this is formed to have a height substantially equal to that of the lower step portion 21b of the support portion 21 (substantially equal to the amount of protrusion from the bottom surface of the base substrate 2), and the support portion 21 to the switch plate 11 is formed.
It is provided so as to contact the movable element 12 in the direction. Further, the surface of the stopper 22 that comes into contact with the mover 12 is formed with a protrusion 22a for suppressing adhesion (sticking) due to intermolecular force or the like generated between the stopper 22 and the mover 12.
The protrusion 22a is a triangular prism that narrows in the protruding direction in a cross-sectional view, and is in point contact with the mover 12. An insulating film (not shown) is provided on the contact surface of the protrusion 22a with the mover 12.

The fixed electrode 23 generates an electrostatic force by the voltage applied between the fixed electrode 23 and the movable electrode 13 to swing the mover 12. This is made of, for example, aluminum (Al), and is formed on the lower step portion 21 b of the support portion 21 so as to face the movable electrode 13. An insulating film (not shown) is formed on the upper surface of the insulating film to insulate it from the movable electrode 13.

The joints 24, 24 are fixed to the anchor 15 and fix the semiconductor substrate forming the oscillator 1 on the base substrate 2. The shape is such that the outer shape is a substantially quadrangular shape in a plan view, and a portion inside the anchor 15 which is joined to the anchor 15 is in a protruding direction in a cross-sectional view (FIG.
It has a trapezoidal shape that narrows above.

Next, the manufacturing method thereof will be described. In the present embodiment, the manufacturing process can be roughly classified into two manufacturing processes, one of which is a manufacturing process of the oscillator 1 and the other is a manufacturing process of the base substrate 2.

First, a method of manufacturing the oscillator 1 will be described with reference to FIG. An organic photosensitive material is applied to the surface of the active layer 3a of the SOI substrate 3 having a three-layer structure (active layer 3a, oxide film layer 3b, support layer 3c), and the mover 12 and the movable electrode 13 are formed by using a photolithography technique. After removing the organic photosensitive material other than the portions that will be the connectors 14, 14 and the anchor 15, the exposed portion of the active layer 3a is anisotropic until it reaches the oxide film layer (SiO2) 3b by using, for example, plasma etching. Etching is performed to separate the movable element 12, the movable electrode 13, and the connectors 14, 14 from the anchor 15 (FIG. 2A).

Next, after removing the organic photosensitive material, a photosensitive organic material is applied to the surface of the support layer 3c.

Then, after removing the organic photosensitive material other than the portion to be the switch plate 11 by using the photolithography technique, the exposed portion of the support layer 3c including the oxide film layer 3b is changed by using, for example, plasma etching. The switch plate 11 is formed by anisotropic etching (FIG. 2B).

Finally, after removing the organic photosensitive material, the SOI
Gold is vapor-deposited on the entire substrate 3 to complete the oscillator 1.

Next, a method of manufacturing the base substrate 2 will be described with reference to FIG. First, a nitride film (SiN) 5 serving as a mask is formed on one surface of the semiconductor substrate 4, and then an organic photosensitive material is applied to the surface.

Next, after removing the organic photosensitive material and the nitride film 5 except for the portions to be the upper portions 21a of the joints 24, 24 and the supporting portion 21 for fixing the anchor 15 by using the photolithography technique, the whole structure is removed. The organic photosensitive material is removed, and the exposed portion of the semiconductor substrate 4 is anisotropically etched using, for example, a KOH aqueous solution to form the upper step portion 21a (FIG. 3A).

Next, the nitride film 5 is once removed, then the nitride film 5 is formed again, an organic photosensitive material is applied, and then the upper step portion 21a and the lower step portion 21 are formed by photolithography.
b, the stopper 22, the organic photosensitive material and the nitride film 5 other than the portions to be the bonding portions 24, 24 are removed, and then the entire organic photosensitive material is removed. For example, an exposed portion of the semiconductor substrate 4 is formed using a KOH aqueous solution. Anisotropically etch the bottom part 21
b, the stopper 22, and the joint portions 24, 24 are formed (see FIG. 3).
(B)).

Then, the nitride film 5 is removed again, aluminum is vapor-deposited, and aluminum other than the position facing the movable electrode 13 of the lower step portion 21b is removed by photolithography technique to form the fixed electrode 23. To complete the base substrate 2 (FIG. 3C).

Finally, the oscillator 1 and the base substrate 2 are anchored with a bonding material such as gold / chrome (Cr).
5 and the joint portions 24, 24 are fixed to each other to complete the optical switch.

The optical switch thus formed is
First, when the voltage is not applied between the movable electrode 13 and the fixed electrode 23, the mover 12 has the protrusion 22 of the stopper 22.
It is in contact with a. Next, when a voltage is applied between the movable electrode 13 and the fixed electrode 23 through the electrode 18 formed on the anchor 15 and the electrode (not shown) formed on the base substrate 2, the voltage is applied between the two electrodes 13 and 23. Static electricity is generated and tries to attract each other. At this time, since the mover 12 is supported by the support portion 21, the movable electrode 1 is moved by electrostatic force.
When 3 is displaced in the direction of the base substrate 2, the switch plate 11 at the end opposite to the movable electrode 13 is displaced above the base substrate 2, and the switch plate when the movable electrode 13 and the fixed electrode 23 come into contact with each other. The position 11 is the maximum displacement position. Next, when the voltage application between the movable electrode 13 and the fixed electrode 23 is stopped in this state, the switch plate 11 is displaced in the direction of the base substrate 2 by the elastic force of the connectors 14, 14 in the twisting direction. These series of operations are performed by, for example, interposing the switch plate 11 on the optical path of the optical signal in the state where the voltage is applied between the movable electrode 13 and the fixed electrode 23 and the switch plate 11 is maximally displaced. 11 and 4
By installing the optical switch so as to form an angle of 5 °, when the switch plate 11 is on the base substrate 2 side, the optical signal goes straight, and when it is above the base substrate 2, the optical signal is reflected and the optical signal is reflected. The optical path can be refracted.

According to the optical switch of the above-described embodiment, the beam connectors 14 for elastically supporting the oscillator 1 in the torsional direction are provided at positions displaced from the center position of the mover 12 toward the movable electrode 13. Since the fulcrum of the oscillating body 1 is provided by supporting the position by the support portion 21, it is possible to increase the displacement amount of the switch plate 11 serving as the action point with respect to the displacement amount of the movable electrode 13 serving as the force point. Yes, for example 1
It is possible to control the passage or reflection of an optical signal having a relatively large luminous flux of about 50 μm. Further, since the stopper 22 is provided on the base substrate 2 in the direction of the switch plate 11 from the support portion 21 and is formed at a height substantially equal to that of the lower step portion 21b, when the switch plate 11 is displaced in the direction of the base substrate 2, The amount of downward displacement of the switch plate 11 can be reduced as compared with the case where the height of the stopper 22 is made substantially equal to that of the upper step portion 21a because the damage of the tip of the mover 12 colliding with the base substrate 2 can be reduced. Can be increased. further,
Since the protrusion 22a is provided on the upper surface of the stopper 22, sticking between the mover 12 and the stopper 22 due to intermolecular force can be reduced.

The semiconductor substrate used to form the oscillator 1 is not limited to the SOI substrate 3, and
For example, a single crystal silicon semiconductor substrate may be used. Also,
The center of gravity of the oscillating body 1 is preferably on the mover 12 in the direction of the switch plate 11 from the projecting position of the connectors 14, 14. By forming in this way, the switch plate 11 can be automatically displaced in the direction of the base substrate 2. Further, the material deposited on the oscillator 1 is not limited to gold, and may be, for example, silver, copper, aluminum, or the like. In addition, in the present embodiment, the oscillator 1 is fixed so that the mover 12 is substantially parallel to the diagonal line of the base substrate 2, but for example, the support portion 21 and the stopper 22 of the base substrate 2 are arranged at appropriate positions. Alternatively, the mover 12 may be fixed so as to be substantially parallel to the peripheral edge of the base substrate 2.

The base substrate 2 is not limited to the semiconductor substrate, and may be, for example, a glass substrate or a ceramic substrate as long as it can fix the oscillator 1 and can form irregularities.

The stopper 22 is not limited to the one formed so as to come into contact with the mover 12 at a position substantially equal to the lower step portion 21b of the support portion 21, and the light flux of the optical signal to be controlled is not limited thereto. When it is small or when it is not necessary to take a large amount of displacement, the upper step portion 21a may be contacted at substantially the same height. In addition, the protrusion 22a formed on the upper surface of the stopper 22
Is not limited to point contact,
For example, a line-like contact may be made like a trapezoidal bar that narrows in the protruding direction in a sectional view. Also,
The number may be plural as long as it does not stick.

The shape of the movable electrode 13 is not limited to a substantially quadrangular shape in plan view, and may be, for example, a substantially triangular shape or a polygonal shape.

[Second Embodiment] FIGS. 4A and 4B show an optical switch according to this embodiment. FIG. 4A is a plan view thereof, and FIG. 4B is a sectional view taken along line AA. FIG. In addition, FIG. 5 is a cross-sectional view showing a manufacturing process of the oscillator of the optical switch. Further, FIG. 6 is a cross-sectional view showing a manufacturing process of the base substrate of the optical switch in the same manner.

The optical switch of this embodiment has a movable electrode 1
6 and the position where the fixed electrode 23 is formed are different from those in the first embodiment, and the other constituent elements are substantially the same as those in the first embodiment, and therefore description thereof is omitted. Further, the same numbers are given to the same members as in the first embodiment.

The movable electrode 16 has the same function and shape as those of the first embodiment, but the formation position is different from that of the first embodiment. The formation position is the switch plate 11
Is formed integrally with the end opposite to the end provided with the so as to be connected on the same plane, but is 90 ° with the mover 12.
Are connected in the same direction as the standing direction of the switch plate 11. Further, a conductive material such as gold is vapor-deposited on the surface thereof.

Similar to the movable electrode 16, the fixed electrode 23 has the same function and shape as those of the first embodiment, but the formation position is different from that of the first embodiment. The formation position of the base substrate 2 is a peripheral portion 25 having a trapezoidal cross section,
It is formed on the side wall of 25 so as to face the movable electrode 16.

Next, the manufacturing method will be described with reference to FIGS.
It will be explained based on.

The method of manufacturing the oscillator 1 of this embodiment is different from that of the first embodiment in that the movable electrode 16 is formed on the support layer 3c of the SOI substrate 3.

First, an organic photosensitive material is applied to the surface of the active layer 3a of the SOI substrate 3, and the organic photosensitive material other than the portions to be the mover 12, the connectors 14, 14 and the anchor 15 is formed by using a photolithography technique. After removing
The exposed portion of the active layer 3a is anisotropically etched using plasma etching until it reaches the oxide film layer 3b, so that the mover 12 and the connectors 14 and 14 are separated from the anchor 15 (FIG. 5A). ).

After removing the organic photosensitive material, the photosensitive organic material is applied to the surface of the support layer 3c.

Then, after removing the organic photosensitive material other than the portion to be the movable electrode 16 and the switch plate 11 by using the photolithography technique, the exposed portion of the support layer 3c is removed by, for example, plasma etching to remove the exposed portion of the support layer 3c from the oxide film layer 3b. Is anisotropically etched to form the movable electrode 16 and the switch plate 11 (FIG. 5B).

Finally, after removing the organic photosensitive material, the SOI
Gold is vapor-deposited on the entire substrate 3 to complete the oscillator 1.

Subsequently, in the method of manufacturing the base substrate 2, first, the nitride film 5 serving as a mask is formed on one surface of the semiconductor substrate 4.
After forming, the surface is coated with an organic photosensitive material.

Then, the organic photosensitive material and the nitride film 5 other than the peripheral edge portions 25, 25 are removed by photolithography, and then the entire organic photosensitive material is removed.
For example, the exposed portion of the semiconductor substrate 4 is anisotropically etched using a KOH aqueous solution (FIG. 6A).

Next, the nitride film 5 is once removed, the nitride film 5 is formed again, and an organic photosensitive material is applied. Then, the peripheral portions 25, 25, the upper step portion 21a, and the bonding portion 24 are formed by photolithography. After removing the organic photosensitive material other than the above and the nitride film 5 and removing the organic photosensitive material, the exposed portion of the semiconductor substrate 4 is anisotropically etched using, for example, a KOH aqueous solution to form the upper step portion 21a and the joint portion 24. Formed (FIG. 6B).

Next, the nitride film 5 is removed again, the nitride film 5 is formed again, the organic photosensitive material is applied, and then the peripheral portions 25, 25, the upper step 21a, the lower step 21b, and the stopper are formed by the photolithography technique. After removing the organic photosensitive material and the nitride film 5 other than the portion to be 22 and removing the organic photosensitive material, the exposed portion of the semiconductor substrate 4 is anisotropically etched by using, for example, a KOH aqueous solution, and the peripheral edge portion 25, Two
5, the lower part 21b and the stopper 22 are formed (see FIG. 6).
(C)).

Then, the nitride film 5 is removed again, aluminum is vapor-deposited, and the aluminum other than the positions of the peripheral portions 25, 25 other than the position facing the movable electrode 16 is removed by using the photolithography technique to remove the fixed electrode 23. It is formed to complete the base substrate 2 (FIG. 6D).

Finally, the oscillator 1 and the base substrate 2 are anchored with a bonding material such as gold / chromium (Cr) 1 for example.
5 and the joint portion 24 are fixed to complete the optical switch.

The optical switch thus formed is
The operation is similar to that of the first embodiment.

According to the optical switch of the above-described embodiment, the beam-like connectors 14, 14 for elastically supporting the oscillator 1 in the twisting direction are provided at positions displaced from the center position of the mover 12 toward the movable electrode 13. Since the fulcrum of the oscillating body 1 is provided by supporting the position by the support portion 21, the displacement amount of the switch plate 11 serving as the action point can be increased with respect to the displacement amount of the movable electrode 16 serving as the force point. Yes, for example 1
It is possible to control the passage or reflection of an optical signal having a relatively large luminous flux of about 50 μm. Further, since the movable electrode 16 is provided at an angle of 90 ° with respect to the movable element 12, the first movable element 16 having the movable element 12 of the same size is provided.
The size can be reduced as compared with the optical switch according to the embodiment. Further, since the stopper 22 is provided on the base substrate 2 in the direction of the switch plate 11 from the support portion 21 and is formed at a height substantially equal to that of the lower step portion 21b of the support portion 21, the switch plate 11 moves in the direction of the base substrate 2. When displaced, the tip of the mover 12 can be prevented from colliding with and damaging the base substrate 2, and the height of the stopper 22 can be made substantially equal to that of the upper step portion 21a of the support portion 21. The amount of downward displacement of 11 can be increased. Further, since the protrusion 22a is provided on the upper surface of the stopper 22, sticking between the mover 12 and the stopper 22 due to intermolecular force can be reduced.

The angle formed by the movable element 12 and the movable electrode 16 is not limited to 90 °, but depends on the size of the luminous flux of the optical signal to be controlled, that is, the switch plate 1.
It can be appropriately designed according to the displacement amount of 1.

In addition, in the present embodiment, the oscillator 1 is fixed so that the movable element 12 is substantially parallel to the peripheral edge of the base substrate 2, but, for example, the support portion 21 and the stopper 22 of the base substrate 2 are fixed. The mover 12 may be disposed at a proper position and fixed so that the mover 12 is substantially parallel to the diagonal line of the base substrate 2.

[Third Embodiment] FIGS. 7A and 7B show an optical switch according to this embodiment. FIG. 7A is a plan view thereof, and FIG. 7B is a sectional view thereof.

The optical switch of this embodiment has a connector 1
7, 17, movable electrodes 13a and 13b, and fixed electrode 23
Since a and 23b are different from those of the first embodiment, and the other constituent elements are substantially the same as those of the first embodiment, description thereof will be omitted. Further, the same numbers are given to the same members as in the first embodiment.

The connectors 17 and 17 are the same in function and formation position as those in the first embodiment, but have the first shape.
The embodiment is different from the embodiment. The shape is a bent structure in which a beam that is substantially quadrangular in plan view is bent in a rectangular wave shape in the protruding direction. Also,
This is formed with the same thickness as the mover 12 and the movable electrodes 13a and 13b, and has elasticity in the swing direction of the mover 12 (the twist direction in the connectors 17 and 17). Further, on the surface thereof, as in the first embodiment,
A conductive material such as gold is deposited.

The movable electrodes 13a and 13b are the same in function as those in the first embodiment, but the number and the forming position thereof are different from those in the first embodiment. In this embodiment, two movable electrodes 13a and 13b are formed with the connectors 17 and 17 sandwiched therebetween, and the first movable electrode 13a is provided on the opposite side of the end of the movable element 12 where the switch plate 11 is provided. It is integrally formed with the end so as to be connected on the same plane.
The movable electrode 13b is formed at a position substantially line-symmetrical to the first movable electrode 13a with the connectors 17, 17 as an axis.
Further, a conductive material such as gold is vapor-deposited on the surface thereof.

The fixed electrodes 23a and 23b are the same in function as those in the first embodiment, but the number and formation position thereof are different from those in the first embodiment. In the present embodiment, the first movable electrode 13 is provided on the lower step portion 21b of the support portion 21.
Two pieces are formed so as to face a and the second movable electrode 13b.

Next, regarding the manufacturing method, the order is basically the same as that of the first embodiment except that the etching position is changed, and the description thereof is omitted.

According to the optical switch of the above-described embodiment, the connector 17, which elastically supports the oscillator 1 in the twisting direction,
17 from the center position of the mover 12 to the movable electrodes 13a, 13
Since it is provided at a position displaced in the b direction, and the fulcrum of the oscillating body 1 is provided by supporting the position by the support portion 21, the switch serving as the action point with respect to the displacement amount of the movable electrodes 13a and 13b serving as the force point. The amount of displacement of the plate 11 can be increased, and for example, the passage or reflection of an optical signal with a relatively large luminous flux of about 150 μm can be controlled. In addition, the movable electrodes 13a and 13b are connected to the connectors 17,17.
With the axis of symmetry as being approximately line-symmetrical,
Since the lower electrodes 21a and 23b are provided so as to face the movable electrodes 13a and 13b, the vertical displacement of the switch plate 11 can be controlled by the applied voltage.
The optical signal can be controlled without depending on the direction of gravity. In addition, since the connectors 17, 17 have a bent structure that forms a rectangular wave shape in the protruding direction, the connector 1 of the first embodiment.
As compared with Nos. 4 and 14, the lengths of the connectors 17 and 17 themselves become longer, the spring constant in the twisting direction becomes smaller, and the displacement amount of the switch plate 11 can be further increased for the same electrostatic force. Further, the stopper 22 is provided on the base substrate 2 in the direction of the switch plate 11 from the support portion 21, and the lower portion 2
The switch plate 1 has a height substantially equal to that of the switch plate 1b.
When 1 is displaced in the direction of the base substrate 2, it is possible to reduce the possibility that the tip of the mover 12 collides with the base substrate 2 and is damaged.
The amount of downward displacement of the switch plate 11 can be increased as compared with the case where the height of the stopper 22 is substantially equal to that of the upper step portion 21a. Further, since the protrusion 22a is provided on the upper surface of the stopper 22, sticking between the mover 12 and the stopper 22 due to intermolecular force can be reduced.

The center of gravity of the oscillating body 1 is preferably on the supporting portion 21. By forming in this way,
When the base substrate 2 is installed so as to be orthogonal to gravity, the oscillator 1 is balanced, and the voltages applied to the fixed electrodes 23a and 23b required when displacing the switch plate 11 can be the same.

Further, the connectors 17, 17 and the movable electrode 13a
The combination of 13b and the fixed electrodes 23a and 23b is not limited to that of the present embodiment, and may be used in combination with those of the first and second embodiments as appropriate.

In addition, in the present embodiment, the oscillator 1 is fixed so that the mover 12 is substantially parallel to the peripheral edge of the base substrate 2, but, for example, the support portion 21 and the stopper 22 of the base substrate 2 are fixed. The mover 12 may be disposed at a proper position and fixed so that the mover 12 is substantially parallel to the diagonal line of the base substrate 2.

Although the present invention has been described with respect to three embodiments, if all of these optical switches are installed so that the switch plate 11 forms an angle of 45 ° with respect to the optical path, an optical signal is transmitted or reflected. Function as an optical switch that can select the output destination. If the switch plate 11 is installed at an angle of 90 ° with respect to the optical path, it can function as an optical switch that passes or blocks an optical signal. Furthermore, by using a plurality of them and installing them in a matrix, they can be used like a multiplexer.

[0074]

According to the optical switch of the first aspect of the present invention, the oscillating body having the movable element provided with the switch plate and the movable electrode and oscillating in the torsion direction of the connector is movable from the center position of the movable element. Since it is supported on the base substrate at a position displaced to the electrode side, the displacement of the switch plate becomes larger than the displacement of the movable electrode, and even if an optical signal with a relatively large luminous flux is introduced into the optical switch, It is possible to reliably control passage or interruption of a signal.

In addition to the effect of the first aspect, the optical switch of the invention according to the second aspect is provided with the movable electrode so as to form a predetermined angle with respect to the movable element, and to face the movable electrode. Since the fixed electrode is arranged on the base substrate, it can be made smaller than an optical switch having a mover of the same size.

According to the optical switch of the invention described in claim 3, in addition to the effect of claim 1 or 2, the fixed electrode is provided on the base substrate so as to sandwich the supporting portion, and the movable electrode serves as the fixed electrode. Since the mover is provided so as to face each other, the displacement of the switch plate can be controlled by the applied voltage,
The optical signal can be controlled without depending on the direction of gravity.

In the optical switch of the invention according to claim 4, in addition to the effect according to any one of claims 1 to 3, the connector has:
Since it has a bent structure that makes a rectangular wave shape in the protruding direction,
The length of the connector itself becomes longer and the spring constant in the twisting direction becomes smaller than that of a connector that forms a linear beam, and the displacement of the mover can be further increased for the same electrostatic force. .

According to the optical switch of the fifth aspect of the present invention, in addition to the effects of the first to fourth aspects, the base substrate is located at a position facing the mover in the switch plate direction from the supporting position of the oscillator. Since the stopper for stopping the displacement of the mover is provided at the position, it is possible to reduce the damage of the tip of the mover that collides with the base substrate when the switch plate is displaced in the direction of the base substrate.

According to the optical switch of the invention described in claim 6, in addition to the effect described in any one of claims 1 to 5, the stopper has a protrusion on the contact surface with the movable element, and the stopper and the movable element are connected to each other. Since the contact is made point contact or line contact, sticking between the mover and the stopper due to intermolecular force can be reduced.

In the optical switch according to the seventh aspect of the invention, in addition to the effect according to any one of the first to sixth aspects, the stopper contacts the mover at a position lower than the contact position between the support portion and the mover. Since it is formed as described above, the displacement amount of the switch plate can be increased as compared with the case where the height of the stopper is substantially equal to that of the support portion.

[Brief description of drawings]

1A and 1B show an optical switch according to a first embodiment of the present invention, in which FIG. 1A is a plan view thereof, and FIG.
It is sectional drawing when it cut | disconnects along a line.

FIG. 2 is a cross-sectional view showing the manufacturing process of the oscillator of the optical switch according to the first embodiment of the invention.

FIG. 3 is a cross-sectional view showing the manufacturing process of the base substrate of the optical switch according to the first embodiment of the invention.

FIG. 4 shows an optical switch according to a second embodiment of the present invention, (a) is a plan view thereof, and (b) is AA.
It is sectional drawing when it cut | disconnects along a line.

FIG. 5 is a cross-sectional view showing the manufacturing process of the oscillator of the optical switch according to the second embodiment of the invention.

FIG. 6 is a cross-sectional view showing the manufacturing process of the base substrate of the optical switch according to the second embodiment of the present invention.

7A and 7B show an optical switch according to a third embodiment of the present invention, FIG. 7A is a plan view thereof, and FIG. 7B is a sectional view thereof.

FIG. 8 shows a conventional optical switch, (a)
Is a plan view thereof, and (b) is a sectional view taken along line AA.

[Explanation of symbols]

1 rocker 11 Switch board 12 mover 13 movable electrode 13a movable electrode 13b movable electrode 14 Connector 16 movable electrodes 17 Connector 2 base substrate 21 Support 22 Stopper 22a protrusion 23 Fixed electrode 23a fixed electrode 23b fixed electrode

Continued front page    (72) Inventor Kazukazu Miyajima             1048, Kadoma, Kadoma-shi, Osaka Matsushita Electric Works Co., Ltd.             Inside the company (72) Inventor Atsushi Ogihara             1048, Kadoma, Kadoma-shi, Osaka Matsushita Electric Works Co., Ltd.             Inside the company (72) Inventor Katsuhiro Hirata             1048, Kadoma, Kadoma-shi, Osaka Matsushita Electric Works Co., Ltd.             Inside the company F-term (reference) 2H041 AA04 AA14 AB02 AB13 AC06                       AZ02 AZ08

Claims (7)

[Claims] 1. A movable electrode is provided at least at one end of the mover, and a switch plate for blocking light is provided at the other end,
It has an oscillating body provided with a connector protruding from the mover and having elasticity in a twisting direction and an anchor integrally formed with the oscillating body, and a supporting portion for supporting the oscillating body by abutting on a portion of the mover where the connector is provided. And a base substrate having a fixed electrode at a position facing the movable electrode, and the connector is provided at a position displaced from the center position in the longitudinal direction of the mover to the movable electrode side, and the movable electrode and the fixed electrode are provided. An optical switch characterized in that the switch plate is displaced by an electrostatic force between the switch plate and the switch plate. 2. The optical switch according to claim 1, wherein the movable electrode is provided at a predetermined angle with respect to the mover, and the fixed electrode is arranged on the base substrate so as to face the movable electrode. 3. The optical switch according to claim 1, wherein the fixed electrode is provided on the base substrate so as to sandwich the supporting portion, and the movable electrode is provided on the mover so as to face the fixed electrode. 4. The optical switch according to claim 1, wherein the connector has a bent structure having a rectangular wave shape in a protruding direction. 5. The light according to claim 1, wherein the base substrate is provided with a stopper for stopping displacement of the mover at a position facing the mover in a switch plate direction from a supporting position of the oscillator. switch. 6. The optical switch according to claim 1, wherein the stopper has a protrusion on a contact surface with the mover, and the contact between the stopper and the mover is a point contact or a line contact. 7. The optical switch according to claim 1, wherein the stopper is formed so as to come into contact with the mover at a position lower than a contact position between the support portion and the mover.