JP2003314873A - Clean air supply device and replacement method of filter in it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To replace any of filters constituting a complex filter of any of respective fan filter bodies during operation of the respective fan filter bodies installed in a plurality of stages, in a clean air supply device. <P>SOLUTION: A plurality of air supply openings 4 are bored with spaces on the one-side wall surface 3 of a chamber 2, the plurality of fan filter bodies 5 are mounted and stored on respective mounting plates 11 over the plurality of stages outside the wall surface 3, and a holder 7 for storing a fan control unit 6 is fixed there. The fan filter body 5 is formed by mounting, closely to or separably from a fan case 17, the complex filter 20 formed by integrally jointing a plurality of filters 19 in the front part of the fan case 17 equipped with a fan 18, and the respective filters 19 are individually separably formed as well. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a semiconductor manufacturing apparatus,
The present invention also relates to an apparatus for supplying clean air to a liquid crystal manufacturing apparatus and a method for replacing a filter in the apparatus.

[0002]

2. Description of the Related Art Conventionally, a clean air supply apparatus used for a semiconductor manufacturing apparatus or a liquid crystal manufacturing apparatus is a filter for removing chemical contaminants, that is, for removing an acidic substance, an alkaline substance and an organic gas. Filters for each purpose are installed in multiple stages according to the work environment of the installation place, and a fan unit for supplying air to the filters installed in the multiple stages is stacked and stored in one casing. There is known a structure in which a fan filter body is used as a main body, or a structure in which the filters and the fan units installed in multiple stages are housed in separate casings and a duct is connected between them to form a fan filter body.

Recently, as the structure of semiconductors has become finer, chemical gas pollution has come to affect semiconductor manufacturing or liquid crystal manufacturing. In conventional semiconductor and liquid crystal manufacturing lines, chemical pollutants are contained in manufacturing equipment. The air from which is removed is being supplied.

[0004]

However, in the above-mentioned conventionally used clean air supply device, filters for removing acidic substances, alkaline substances and organic gases are installed at different locations. It is installed in multiple stages according to the work environment, and although there is a difference in the life of each filter depending on the concentration of suspended gas in the work environment, it is extremely short compared to the life of general dust removal filters. Of any of the filters installed over the period, the clean air supply device is stopped and the semiconductor or liquid crystal production line is stopped to replace the used (end of life) filter. , Or in the workplace for liquid crystal manufacturing equipment, the entire fan filter body must be disassembled and replaced with a new filter In a semiconductor or not the liquid crystal production is performed efficiently, and replacement of filters there is a problem that a very time-consuming.

Further, in a semiconductor manufacturing apparatus or a liquid crystal manufacturing apparatus work place, dust attached to a used filter is dropped when the filter is replaced or transported, thereby contaminating the semiconductor manufacturing apparatus or the liquid crystal manufacturing apparatus work place. There was a problem to do.

Further, the air blowing capacity of the conventional clean air supply device is set first, and there is a problem that the additional demand from the semiconductor or liquid crystal manufacturing device cannot be met in small increments.

The present invention has been made to solve the above-mentioned problems, and constitutes a composite filter formed by joining a plurality of filters for each purpose in a workshop for semiconductor manufacturing equipment or liquid crystal manufacturing equipment. Of each filter
When replacing one of the used filters, replace the filter of only the required fan filter body with a new replacement filter without disassembling the entire clean air supply device consisting of a combination of multiple fan filter bodies. In addition, the dust attached to the used filter does not drop and contaminate the workplace during filter replacement and transportation, and the ventilation capacity of the clean air supply device can be set arbitrarily and replaced. A clean air supply that can replace the filter without stopping the operation of the fan filter body with the filter and without stopping the operation of the other fan filter bodies, and thus without stopping the semiconductor or liquid crystal production line. Device and method for replacing filter in the device A.

[0008]

According to the present invention, a plurality of air supply openings are provided on one wall surface of a chamber at intervals.
And, on the outside of the wall surface, a plurality of fan filter bodies are placed and stored on each mounting plate in a plurality of stages, and a holder for storing a fan control unit is fixed,
In addition, the fan filter body is formed by a composite filter formed by integrally joining a plurality of filters to a front portion of a fan case in which a fan is installed, in close contact with or separable from the fan case. Further, means for forming each of the filters constituting the composite filter so as to be separable from each other, or forming an air supply opening with a plurality of intervals on one wall surface of the chamber,
And, on the outside of the wall surface, a plurality of fan filter bodies are placed and stored on each mounting plate in a plurality of stages, and a holder for storing a fan control unit is fixed,
In addition, the fan filter body is formed by a composite filter formed by integrally joining a plurality of filters to a front portion of a fan case in which a fan is installed, in close contact with or separable from the fan case. In addition, in the clean air supply device in which each of the filters constituting the composite filter is also separable, a new replacement filter and a used filter are used when any one of the filters constituting the composite filter is replaced. Two storage boxes having the same structure for respectively storing the filters are prepared, and the fan control unit stops the fan of the fan filter main body provided with the used filter, and the fan filter main body provided with the used filter. Pull out the fan case of the The filter to the fan case side, insert a closing plate into the air supply opening to close the air supply opening, and then insert a replacement filter next to the used filter of the fan filter body. Install the storage box and install the other empty storage box on the opposite side, and then insert the operation rod from the through hole drilled in the one storage box, and replace it. Push forward to slide the used filter abutting the replacement filter to the opposite side, place the replacement filter at a predetermined position on the mounting plate, and remove the used filter. Stored in the other storage box on the opposite side, the opening of each storage box is closed by a lid, each storage box is removed, and then the closing plate is pulled out, Means for pressing the fan case forward, joining the filters by the pressing force of the fan case to form a composite filter, and bringing the composite filter into close contact with the fan case and the opening edge of the air supply opening. Alternatively, a plurality of fan filter bodies may be provided on one wall surface of the chamber at a plurality of intervals so as to have a plurality of fan openings, and a plurality of fan filter bodies may be provided on each mounting plate on a plurality of stages outside the wall surface. In addition to being placed and stored, the holding body for storing the fan control unit is fixed, and the fan filter body is formed by integrally bonding a plurality of filters to the front part of the fan case in which the fan is installed. A composite filter is formed so as to be in close contact with or separate from the fan case,
Furthermore, in the clean air supply device in which each of the filters constituting the composite filter is separately formed,
When replacing one of the filters that make up the composite filter, a new replacement filter,
Two storage boxes of the same structure for storing the used filters are prepared, and the fan control unit stops the fan of the fan filter main body having the used filters to provide the fan having the used filters. After the fan case of the filter body is pulled out slightly toward the front, the composite filter is shifted toward the fan case side, and a closing plate is inserted into the air supply opening to close the air supply opening, and then the fan filter body is used. Install one empty storage box next to the filter, insert the operating rod from the through hole drilled in the one storage box, slide out the used filter, and pull out the one After storing in a storage box, the opening of one of the storage boxes is closed with a lid, and then a replacement filter is attached. Install the other storage box that has been stored in the part where the used filter is pulled out, insert the operation rod from the through hole that is drilled in the other storage box, and press the replacement filter forward. Then, the replacement filter is mounted at a predetermined position on the mounting plate, the opening of the other storage box is closed by a lid, and the other storage box is removed. After that, the closing plate is pulled out, the fan case is pressed forward, the filters are joined by the pressing force of the fan case to form a composite filter, and the composite filter is attached to the fan case and the air supply opening. The above-mentioned problem was solved by adopting a means of closely contacting with the opening edge portion.

[0009]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described in detail with reference to the drawings. 1 is a perspective view of the entire clean air supply apparatus of the present invention installed in a semiconductor manufacturing apparatus or a workplace for a liquid crystal manufacturing apparatus, FIG. 2 is a vertical sectional view of the same, and FIG. Show. Semiconductor manufacturing equipment not shown,
Alternatively, the wall surface 3 on one side of the chamber 2 provided with the supply port 1 for supplying the clean air to the liquid crystal manufacturing apparatus is provided with the air supply openings 4 for supplying the clean air into the chamber 2 at a plurality of intervals. A plurality of fan filter bodies 5 are housed on the outside of the wall surface 3 in a plurality of stages, and a holder 7 for housing a fan control unit 6 is fixed.

In the holding body 7, the vertical rod 8 and the horizontal rod 9 are joined and fixed in a cubic frame shape to form a frame member 10, and
In order to mount each of the fan filter bodies 5 in a plurality of stages, a mounting plate 11 is provided on the frame member 10 in a plurality of stages with an interval corresponding to the thickness of the fan filter body 5. While being fixed, a control unit housing portion 12 for housing the fan control unit 6 is provided at the lower end of the frame member 10. The size of the air supply opening 4 provided in the chamber 2 is substantially the same as the size of each fan filter body 5.

The fan filter main body 5 is mounted on each mounting plate 11 of the holding body 7, and the top plate 13 is arranged on the frame member 10 on the uppermost fan filter main body 5.

The fan filter body 5 mounted on each mounting plate 11 of the holder 7 has an air supply opening 14 for supplying air to a composite filter 20 to be described later on the downstream side and an upstream side. Of the motor M in a box-shaped fan case 17 having a suction hole 16 formed in the rear side plate 15 on the side thereof, and a fan 1 rotating using the motor M as a drive source.
And a filter 1 for removing each of an acidic substance, an alkaline substance and an organic gas in front of the downstream opening 14 of the fan case 17.
9 are properly combined as shown in FIG. 4 (see FIG.
In this case, the composite filter 20 is formed by closely adhering to each other so that they are integrated.

Each filter 19 constituting the composite filter 20 has a rectangular frame 21 as shown in FIGS.
The peripheral surface portion of the filter medium 22 is welded and fixed to the inner wall surface of the hot melt 23, and a gasket 24 made of urethane sponge or the like is provided on the upper and downstream peripheral wall surfaces of the rectangular frame 21.
Are circumferentially formed.

When the respective gaskets 24 of the plurality of filters 19 having the above-mentioned construction are pressed against each other, the gaskets 24 of the respective filters 19 are brought into close contact with each other by the pressed dies, and the rectangular frame to which the respective filters 19 are fixed. A composite filter 20 in which air does not enter the respective filters 19 from the four circumferences of the body 21 and is shielded from the outside air.
Is formed.

The gasket 24 located on the most upstream side of the composite filter 20 integrally formed by joining the plurality of filters 19 adheres to the outer peripheral edge of the opening 14 of the fan case 17, and the composite The fan filter body 5 is formed by the gasket 24 located on the most downstream side of the filter 20 being in close contact with the outer peripheral edge of the air supply opening 4 formed in the chamber 2. Then, the fan filter bodies 5 are mounted and fixed on the mounting plates 11, respectively.

As described above, in each fan filter body 5 mounted and fixed on each mounting plate 11, each filter 19 is integrated by the gasket 24 attached to each filter 19 constituting the composite filter 20. Since the composite filter 20 and the fan case 17 and the chamber 2 are adhered to each other while being joined, the rectangular frame 2 of each filter 19 constituting each composite filter 20 is joined.
Air does not enter from the four circumferences of No. 1 and each composite filter 20 is cut off from the air in the work space for semiconductor manufacturing equipment or liquid crystal manufacturing equipment.

The fan control unit 6 accommodated in the control unit accommodating portion 12 disposed below the holder 7.
Is a filter replacement speed command setting VR25 that sets the speed of the motor M when the filter is replaced, and a normal speed command setting VR26 that sets the speed of the motor M during normal operation (when the filter is not replaced). Motor M
And a fan control device 27 and a control device operating switch 28, respectively. In the figure, 29 and 30 are operation switches for selectively using or not using the filter replacement speed command setting VR25 and the normal speed command setting VR26, respectively.

Further, when the used (having a long life) filter is replaced with a new replacement filter, a semiconductor manufacturing apparatus or a liquid crystal manufacturing apparatus is operated from the air supply opening 4 of the fan filter body 5 equipped with the used filter. A closing plate 31 is attached to the air supply opening 4 of the fan filter body 5 in such a manner that it can be inserted and pulled out so that the air in the working space for use does not flow into the chamber 2.

The means for inserting / pulling out the closing plate 31 is not particularly limited, but preferably it is recommended that it be constructed as shown in FIGS. 8 to 11. That is, the closing plate 31 is inserted into the insertion notches 32 that are provided opposite to the top end edge of each mounting plate 11 and the bottom end edge of each horizontal rod 9 located on the upper surface of each mounting plate 11. It is formed so that the air supply opening 4 can be closed by sliding it. In addition, 3 in the figure
Reference numeral 3 is a handle used when the closing plate 31 is slid.

Next, an explanation will be given of a method of replacing the used filter with a new replacement filter among the filters constituting the composite filter mounted and fixed on the mounting plate 11 of the holder 7. First, in the filter replacement method according to the first embodiment of the present invention, a storage box serving both for storing a new replacement filter 19 and for storing a used filter 19a to be replaced. Two 34 are prepared.

As shown in FIG. 7, the storage box 34 has an opening 35 in one part and a wall plate 36 in the other part, and a storage part 3 for storing a filter therein.
7 is formed into a box shape, and a small-diameter through hole 38 for ventilation and exchange work is formed in the center of the wall plate 36, and a breathing filter 39 covering the through hole 38.
The wall plate 36 so that the opening / closing lid 40 having the
It is pivotally supported on the outer surface of the through hole 38, and is formed so that the through hole 38 can be opened or closed by rotating the opening / closing lid 40. Further, the lid plate 41 is inserted into and removable from the opening portion 35 so that the lid plate 41 can be slid to open or close the opening portion 35.

Then, the operating rod 42 is inserted from the through hole 38 of the storage box 34 to replace the filter 19 for replacement.
Need to be pushed forward, pulled forward, or the position of the replacement filter 19 must be adjusted. Therefore, a hook-shaped hooking device 43 is provided at the tip of the operation rod 42.
And a receiving member 44 for hooking the hooking device 43 is provided on each side surface portion on one side of each filter 19 constituting the composite filter 20 located on the hooking device 43 side. There is. Then, the hooking device 43 can be hooked on the receiving device 44, and the replacement filter 19 can be pressed forward or pulled forward to slide to adjust the position.

Next, a method of replacing the used filter in the first embodiment of the method of the present invention with a new replacement filter will be described with reference to FIGS. In the figure, a method of replacing the filter constituting the fan filter main body at the uppermost stage is shown. First, FIG.
The used filter 19a to be replaced shown in FIG.
The fan 18a of the fan filter main body 5a that is supplying air to the composite filter 20a having the above is stopped by turning off the control device operation switch 28a that operates the control device 27a of the fan 18a of the fan control unit 6.

Then, the operation switch 28a is turned off.
Then, the operation of the normal speed command setting VR 26 is stopped, the operation switch 29 is turned on to enable the filter replacement speed command setting VR25, and thereafter, the filter replacement speed command setting VR25 is appropriately operated. 1
Even if the individual fan filter bodies 5a cannot be used, the rotation speed of the remaining fans 18 is increased so as to increase the clean air supply capacity supplied by the other fan filter bodies 5. This allows the used filter 1
Even when 9a is replaced, the clean air of the same volume as before replacement can be supplied to the chamber 2 to keep the pressure in the chamber 2 constant.

Next, the composite filter 20a provided with the used filter 19a is installed in the chamber 2 for the air supply opening 4
The fan case 17a that has been pressed against the opening edge portion of a is slid toward you and pulled out,
And the composite filter 20a, and the composite filter 2
By releasing the close contact state between 0a and the opening edge of the air supply opening 4a, the composite filter 20a becomes slidable and movable in the direction of the fan case 17a, and each of the composite filters 20a is configured. The filters 19 can also be separated and each can be slid laterally and pushed out.

After that, the composite filter 20a is slightly displaced to the fan case 17a side, and the composite filter 20
When the closing plate 31 is inserted into the insertion notches 32 formed at the tip edge portion of the placing plate 11 on which the a is placed and the horizontal rod 9 above, and the handle 33 is slid forward, The closing plate 31 closes the air supply opening 4 on the downstream side of the fan filter body 5 to be replaced, and the chamber 2
The semiconductor manufacturing apparatus or the working space for the liquid crystal manufacturing apparatus is cut off, and the air in the working space for the semiconductor manufacturing apparatus or the liquid crystal manufacturing apparatus does not flow into the chamber 2.
In addition, even in the state before inserting the closing plate 31,
Since the inside of the chamber 2 has a positive pressure, the air in the work space for the semiconductor manufacturing apparatus or the liquid crystal manufacturing apparatus does not flow into the chamber 2 through the air supply opening 4.

In the above-mentioned state, an empty storage box 34a is arranged on the side surface of the one side of the used filter 19a to be replaced which is provided with the receiving member 44, and the other side of the used filter 19a is arranged. The storage box 34b in which the new replacement filter 19 is stored in the storage portion 37 is arranged on the side surface portion on the side. The storage boxes 34a and 34b are placed on an unillustrated underframe or the like and arranged on both side surfaces of the used filter 19a.

Further, the lid plate 41 of the opening 35 of the storage box 34b in which the replacement filter 19 is stored is pulled up and removed to open the opening 35, and
The lid plate 41 of the opening 35 of the storage box 34a for storing the used filter 19a is pulled up and removed. After that, the opening / closing lid 40 of the storage box 34b in which the replacement filter 19 is stored is rotated and the through hole 38 is opened.
The operation rod 42 is inserted through the through hole 38, and the hook 43 at the tip of the operation rod 42 is replaced with the replacement filter 19.
It is hooked on the receiving tool 44. Then, the operating rod 42 is pressed forward to bring the replacement filter 19 into the opening 35.
When the used filter 19a is slid and moved forward through the container, the used filter 19a is pressed and slid by the replacement filter 19 and is stored in the storage portion 37 through the opening 35 of the storage box 34a.

The used filter 19a is pressed by the replacement filter 19 to store the storage box 34a.
When the air is stored in the storage box 34a, the air in the storage box 34a flows due to the pressing force.
Since the dust attached to the used filter 19a is dropped into the storage box 34a and only the flowing air escapes to the outside, a breathing port with a filter is required. for that reason,
In the method of the present invention, the storage box 34 for storing the used filter 19a is used.
Also used as a. And when used as a storage box 34a for the used filter 19a,
The open / close lid 40 is used while being closed, and the breathing filter 3 is used.
Only the flowing air is exhausted from 9. That is, when the opening / closing lid 40 is opened, the through hole 38 acts as an operating port for the operating rod 42, and when the opening / closing lid 40 is closed, the through hole 38 acts as a breathing port with a filter.

When the used filter 19a is stored in the storage portion 37 of the storage box 34a, the lid 41 is immediately attached to the opening 35, and the dust adhering to the used filter 19a is produced in the semiconductor manufacturing process. The storage box 34a is removed so that the storage box 34a does not fall into the working space for the device or the liquid crystal manufacturing device.

On the other hand, the replacement composite filter 19 is
It is pressed by the operation rod 42 and slidably mounted on the mounting plate 11 in the front part of the fan case 17, but so as to be accurately mounted at a predetermined position in the front part of the fan case 17. The operating rod 42 is appropriately operated to slide the replacement filter 19 appropriately and to be placed at a predetermined position. Then, the operating rod 42 is taken out, the opening / closing lid 40 is closed to close the through hole 38, and the opening is formed. The lid 41 is attached to the housing 35, the air in the work space for the semiconductor manufacturing apparatus or the liquid crystal manufacturing apparatus is not allowed to enter the housing 37, the cleanliness is maintained, and the housing box 34b is removed.

After the replacement filter 19 is slid to a predetermined position and moved, the closing plate 31 that has closed the air supply opening 4a is pulled out with the hand 33, and the fan case 17 is moved forward by hand. When pressed to, the replaced new filter 19 is replaced with another non-replaced filter 19
To form the composite filter 20, and the fan case 17 is closely attached to the upstream side of the composite filter 20, and the downstream side of the composite filter 20 is the opening end edge of the air supply opening 4a of the chamber 2. Close contact and complete the replacement work. During the filter replacement work, the chamber 2 has a positive pressure, and the air supply opening 4a of the fan filter main body 5 which is performing the filter replacement work is closed by the closing plate 31. Air from the working space for semiconductor manufacturing equipment or liquid crystal manufacturing equipment does not flow into the chamber 2 through the air supply opening 4a.
The cleanliness inside the chamber 2 is maintained.

Then, the operation switch 29 is turned off.
Then, the operation of the speed command setting VR25 at the time of filter replacement is stopped, the operation switch 28a is turned on to enable the normal speed command setting VR26, and then the normal speed command setting VR26 is appropriately operated. Then, the rotation speeds of all the fans 18 are reduced so that the clean air supply capacity is supplied by using all the fan filter main bodies 5. As a result, the volume of clean air required when all the fan filter bodies 5 operate can be supplied into the chamber 2.

13 and 14 show the second method of the present invention.
FIG. 6 is a cross-sectional view showing a method of replacing a used filter in the embodiment of the present invention. Regarding the present embodiment, the first
In the same manner as described in the replacement method in the above embodiment, two storage boxes 34 in FIG. 7 are prepared.

First, similar to the method of replacing the filter in the first embodiment, although not shown, the fan case 17a provided with the used filter 19a is slightly slid forward and pulled out, and the composite filter 2
0a is also slightly shifted to the fan case 17a side, and the closing plate 31 is inserted into the insertion notch 32 and slid to close the air supply opening 4a.

Then, the storage portion 37 of the first storage box 34c is emptied and placed on the side surface portion of the used filter 19a on the one side provided with the receiving member 44, and the opening portion 35 is formed.
The lid plate 41 is pulled up and removed, the opening 35 is opened, the opening / closing lid 40 is rotated to open the through hole 38, and the operation rod 42 is inserted from the through hole 38. The hook 43 at the tip of the operating rod 42 is hooked on the catch 44 of the used filter 19a, and the operating rod 42 is pulled toward the front so that the used filter 19a is opened in the opening 35. It passes through and is stored in the storage part 37. The storage box 34c is placed on an underframe or the like (not shown) and arranged on the side surface of the used filter 19a.

When the used filter 19a is stored in the storage portion 37 of the storage box 34c, the operating rod 42 is taken out and the opening / closing lid 40 is closed to open the through hole 38.
On the other hand, the lid 41 is immediately attached to the opening 35 while the dust is attached to the used filter 19a so as not to fall into the work place for the semiconductor manufacturing apparatus or the liquid crystal manufacturing apparatus, and the storage box is closed. Remove 34c.

Thereafter, the replacement filter 1 is placed in the storage section 37.
The second storage box 34d storing 9 is arranged on the side surface of the mounting plate 11 after the used filter 19a is removed, and the cover plate 41 of the opening 35 is pulled up to be removed. The opening 35 is opened and the opening / closing lid 4 is opened.
0 is rotated to open the through hole 38, and the operation rod 42 is inserted from the through hole 38, and the hook 4 at the tip of the operation rod 42 is inserted.
3 is hooked on the receiving member 44 of the replacement filter 19, the operating rod 42 is pressed forward, and the replacement filter 19 is slid forward through the opening 35. In addition,
The storage box 34d is placed on an unillustrated underframe or the like, and is placed on the side surface of the placing plate 11 after the used filter 19a is removed.

The replacement filter 19 is slidably mounted on the mounting plate 11 in the front part of the fan case 17 through the opening 35. So that the replacement rod 19 is appropriately slid by the operating rod 42 and placed at a predetermined position, and then the operating rod 42 is taken out.
The opening / closing lid 40 is closed to close the through hole 38, and the lid body 41 is attached to the opening 35 so that the air in the work space for the semiconductor manufacturing apparatus or the liquid crystal manufacturing apparatus does not enter the storage section 37. Keeping the cleanliness, the storage box 3
Remove 4d. Then, after that, the filter replacement work is completed through the same work steps as those shown in the first embodiment.

[0040]

Since the present invention is as described above, in a clean air supply apparatus for supplying clean air to a semiconductor manufacturing apparatus or a liquid crystal manufacturing apparatus, a fan case and a plurality of filters having a purpose-specific function are provided. A fan filter body composed of a composite filter formed by joining is installed in a plurality of stages, the fan case of the fan filter body and the composite filter are separable, and the composite filter is configured. Each of the filters can be separated, and any of the filters can be slid laterally and taken out, so that a fan installed in multiple stages without disassembling the entire clean air supply device. Replace only the used filter of the filter body, whichever one of the used It is possible to easily exchange and use filters. Then, without exposing the new replacement filter to the outside air, and without scattering dust of the used filter to the semiconductor manufacturing apparatus, or the work place for the liquid crystal manufacturing apparatus, when further replacing the filter, the semiconductor manufacturing apparatus, Alternatively, the filter replacement work can be performed without causing the air in the working space for the liquid crystal manufacturing apparatus to flow into the chamber. Furthermore, when replacing the composite filter of any stage of the fan filter body installed over multiple stages,
Even if the fan of the fan filter main body is stopped, the fan control unit increases the rotation speed of each fan of the other fan filter main body to increase the amount of clean air supplied from the other fan filter main body, thereby increasing the chamber volume. Since the internal pressure can be kept constant at the same pressure as when all fan filter bodies are operating, it is not necessary to stop the entire fan filter body, and therefore the semiconductor manufacturing equipment or liquid crystal manufacturing equipment manufacturing line. Since it is not necessary to stop the operation, the manufacturing work can be performed efficiently.

[Brief description of drawings]

FIG. 1 is a perspective view showing an entire clean air supply device of the present invention.

FIG. 2 is a vertical cross-sectional view of the clean air supply device of the present invention.

FIG. 3 is a vertical cross-sectional view of a main part of the clean air supply device of the present invention.

FIG. 4 is a plan view of a composite filter in the clean air supply device of the present invention.

FIG. 5 is a perspective view of a filter that constitutes a composite filter in the clean air supply device of the present invention.

FIG. 6 is a vertical cross-sectional view of a filter that constitutes a composite filter in the clean air supply device of the present invention.

FIG. 7 is a perspective view of a storage box used when a filter is replaced in the clean air supply device of the present invention.

FIG. 8 is an overall perspective view showing a method of exchanging a filter constituting the fan filter main body of the uppermost stage according to the first embodiment in the clean air supply device of the present invention.

FIG. 9 is a perspective view of the main part.

FIG. 10 is an overall vertical sectional view showing a state in which the closing plate is inserted.

FIG. 11 is a vertical cross-sectional view of the main part.

FIG. 12 is an explanatory diagram showing a control method in the clean air supply device of the present invention.

FIG. 13 is a schematic vertical cross-sectional view showing a method of replacing a filter that constitutes a fan filter body according to a second embodiment of the clean air supply device of the present invention.

FIG. 14 is a schematic vertical cross-sectional view showing a method for replacing a filter that constitutes a fan filter body according to a second embodiment of the clean air supply device of the present invention.

[Explanation of symbols]

M motor, 1 supply port, 2 chambers, 3
Wall surface, 4 air supply opening, 5 fan filter main body, 6 fan control unit, 7 holding body, 8 vertical rod, 9 horizontal rod, 10 frame member, 11 mounting plate,
12 control unit storage part, 13 top plate, 14 opening part, 15 rear side plate, 16 intake hole, 17 fan case, 18 fan, 19 filter,
20 composite filter, 21 rectangular frame body, 22 filter medium, 23 hot melt, 24 gasket, 2
5 Speed command setting VR at the time of filter replacement, 26 Speed command setting VR at normal time, 27 Fan control device, 28
Control device operation switch, 29/30 operation switch,
31 closure plate, 32 insertion notch, 33 handle,
34 storage box, 35 opening, 36 wall plate, 37 storage part, 38 through hole, 39 breathing filter, 40 opening / closing lid, 41 lid plate, 42
Operation bar, 43 hooks, 44 catches.

   ─────────────────────────────────────────────────── ─── Continued front page    F term (reference) 3L058 BD01 BE02 BF02 BG03                 4D058 JA14 KB02 KB11 KC37 KC81                       QA01 QA21 SA04

Claims (6)

[Claims] 1. A plurality of fan filter bodies are provided on a wall surface on one side of the chamber at a plurality of intervals to form air supply openings, and a plurality of fan filter bodies are arranged on a plurality of stages outside the wall surface. The holder for mounting the fan control unit is fixed on the top of the fan filter unit, and the fan filter body is formed by integrally bonding a plurality of filters to the front part of the fan case in which the fan is installed. A clean air supply device, characterized in that the formed composite filter is formed so as to be in close contact with or separable from the fan case, and that each filter constituting the composite filter is also separable. 2. The clean air supply apparatus according to claim 1, wherein when any one of the filters constituting the composite filter is replaced, the supply amount of clean air to the fan filter main body other than the fan filter main body to be stopped is increased. A clean air supply device characterized in that the fan control unit controls the pressure of the chamber to be kept constant. 3. The clean air supply apparatus according to claim 1, wherein the fan case of the fan filter main body and the composite filter, and each filter constituting the composite filter can be separated from each other, and the respective filters slide laterally. A cleaning characterized in that the filter can be taken out, and when any one of the filters constituting the composite filter is replaced, only the fan filter body equipped with the used filter can be stopped to replace the filter. Air supply device. 4. A plurality of fan filter bodies are provided on a wall surface on one side of the chamber at intervals with a plurality of air supply openings, and a plurality of fan filter bodies are provided on a plurality of stages outside the wall surface. The holder for mounting the fan control unit is fixed on the top of the fan filter unit, and the fan filter body is formed by integrally bonding a plurality of filters to the front part of the fan case in which the fan is installed. In the clean air supply device, the formed composite filter is formed so as to be in close contact with or separable from the fan case, and each of the filters constituting the composite filter is also formed to be separable. When replacing one of the filters, a new replacement filter and two used filters with the same configuration A storage box is prepared, the fan control unit stops the fan of the fan filter main body provided with the used filter, and the fan case of the fan filter main body provided with the used filter is slightly pulled out to the front, After shifting the filter to the fan case side and inserting the closing plate into the air supply opening to close the air supply opening, one of the ones storing the replacement filter beside the used filter of the fan filter body Install the storage box and install the other empty storage box on the opposite side, and then insert the operation rod from the through hole drilled in the one storage box, and replace it. Push forward and slide, and push the used filter that contacts the replacement filter to the opposite side, While mounting the filter at a predetermined position on the mounting plate, the used filter is stored in the other storage box on the opposite side, and the opening of each storage box is closed by a lid, Remove each storage box, then pull out the closing plate,
The fan case is pressed forward, the filters are joined by the pressing force of the fan case to form a composite filter, and the composite filter is brought into close contact with the opening edges of the fan case and the air supply opening. A method of replacing a filter, which is characterized in that 5. A plurality of fan filter bodies are provided on a wall surface on one side of the chamber at intervals with a plurality of air supply openings, and a plurality of fan filter bodies are arranged on a plurality of stages outside the wall surface. The holder for mounting the fan control unit is fixed on the top of the fan filter unit, and the fan filter body is formed by integrally bonding a plurality of filters to the front part of the fan case in which the fan is installed. In the clean air supply device, the formed composite filter is formed so as to be in close contact with or separable from the fan case, and each of the filters constituting the composite filter is also formed to be separable. When replacing one of the filters, a new replacement filter and two used filters with the same configuration A storage box is prepared, the fan control unit stops the fan of the fan filter main body provided with the used filter, and the fan case of the fan filter main body provided with the used filter is slightly pulled out to the front, After shifting the filter to the fan case side and inserting the closing plate into the air supply opening to close the air supply opening, one empty storage box is placed next to the used filter of the fan filter body. Installed, insert the operation rod from the through hole formed in the one storage box, slide out the used filter, store it in the one storage box, and store it in the one storage box. The opening of the box is closed with a lid, and then the other storage box containing the replacement filter is replaced with the used filter. Installed in the part where the filter is pulled out, insert the operation rod from the through hole formed in the other storage box, push the replacement filter forward and slide it, and place the replacement filter. It is placed at a predetermined position on the plate, the opening of the other storage box is closed by the lid, the other storage box is removed, and then the closing plate is pulled out, and the fan case is moved forward. And the filters are joined by the pressing force of the fan case to form a composite filter,
A method of exchanging a filter, wherein the composite filter is brought into close contact with the fan case and an opening edge portion of the air supply opening. 6. The opening / closing lid equipped with a filter is rotatably attached to a through hole formed in a wall plate of a storage box, and the opening / closing lid is rotated to move the through hole. The method for replacing the filter is characterized in that when it is opened, it acts as an operating port for the operating rod, and when the through hole is closed by the opening / closing lid, it acts as a breathing port with a filter.