JP2003302746A - Method and system for repairing emulsion mask pattern defect - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To enable rapid repair of a defect by decreasing the number of times of coating application operations of a correcting fluid even when the translucent defect of a large size exists. <P>SOLUTION: The system is provided with a table to be placed on with the emulsion mask obtained by forming periodic patterns repetitively arrayed with the light shieldable patterns of prescribed shapes on a translucent emulsion film applied by coating on a transparent plate material, two coating application mechanism 30 for applying the light shieldable correcting fluid including a curing resin to the film segment of the defect portion in the system for correcting the emulsion mask pattern repairing the translucent defect produced in the light shielding patterns of the emulsion mask placed on the table, and a laser oscillator 20 for curing the correcting fluid applied thereto. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is used for a method of correcting an emulsion mask pattern defect, for example, for forming a resist pattern which is a mask for etching when manufacturing a shadow mask used for a cathode ray tube of a color television or an aperture grill. About emulsion mask,
The present invention relates to an emulsion mask pattern defect repairing method and device suitable for repairing a light-transmissive defect that occurs in a light-shielding pattern that forms a periodic pattern.

[0002]

2. Description of the Related Art Generally, a shadow mask and an aperture grill used for a cathode ray tube of a color television set are formed by exposing and developing a resist film coated on a metal plate using an emulsion mask having a predetermined periodic pattern. Using the resist pattern created by
It is manufactured by etching the metal plate.

The emulsion mask M used to form such a resist pattern is designed as shown in FIG. 7 (A) for the entire two sheets and in FIG. 7 (B) for the enlarged portion. A periodic pattern formed by repeatedly arranging light-shielding patterns P having a predetermined shape and size based on the value is
It is formed on the surface of the transparent glass plate G.
The light-shielding pattern P forming such a periodic pattern has a transparent emulsion film E containing a photosensitizer formed by coating a glass plate G with a high-resolution photographic emulsifier in advance. It can be formed by exposing and exposing based on a pattern.

When the pattern P having a predetermined shape (rectangle in this case) as described above is formed by exposure, as shown in FIG. 8A, for some reason, for example, fine foreign matter adheres to the emulsion film E before exposure. White defects as shown in the figure (B)
A partial pattern defect (translucent defect part) called white spot may occur.

When a pattern defect occurs in such an emulsion mask M, it is necessary to correct it. Conventionally, a correction liquid having a light shielding property containing a thermosetting resin is used, for example, a defect of a blank area. After being applied to the portion, the liquid curing laser oscillator (LD laser) 2 and the processing laser oscillator (YAG second harmonic) 4 schematically shown in FIG. It was corrected using a correction device that can.

FIG. 10 shows an image of a conventional correction method by the above-mentioned device using one pattern in which a blank portion (defective portion) K is generated and a corresponding partial sectional view passing through the blank portion. Show. First, as shown in FIG. 1A, a light-shielding pattern (shaded portion) P formed on a transparent emulsion film E coated on a glass plate.
The correction liquid (the coating liquid in the figure) attached to the tip of the coating needle 8 is applied to the blank portion K of FIG. The entire correction fluid thus applied is irradiated with an LD laser to be thermally cured as shown in FIG. 3B to form a coating film, and then the coating film portion protruding from the pattern P (hereinafter referred to as a protrusion). (Also referred to as a portion) is corrected by switching the oscillator and irradiating a processing laser composed of a YAG second harmonic as shown in FIG.

The coating size (diameter of the coating film) of the correction liquid applied during such a correction is the tip of the coating needle to be used, as shown in the image corresponding to the coating (use) needle in FIG. Depending on the diameter, the coating size (diameter) is slightly larger than the tip diameter (the coating size can be adjusted by repeating the process of applying the correction fluid to the needle and the coating operation consisting of the correction fluid coating process under appropriate conditions). It becomes almost constant according to the diameter).

In the conventional correction device, it is possible to change the application size by exchanging the application needle and changing the tip diameter, but since there is only one application means (mechanism), normal operation is not possible. The coating size will be limited to one type.

[0009]

However, since the size of the translucent defect varies in size, it is necessary to apply the correction liquid so as to completely cover the defect of any size. If the defect size is larger than the tip size (diameter) of the coating needle, one coating operation may not be enough. In such a case, a plurality of coating operations are required as shown in the image of the blank area K in FIG. 12, but since the coating needle must be accurately positioned for each operation. However, there is a problem that the operation becomes complicated.

In order to avoid this problem, it is conceivable to select and use a coating needle having an appropriate tip size according to the defect size.
Since only one type of coating needle can be installed, it is necessary for a person to manually replace the coating needle with one that matches the defect size and adjust the coating conditions each time, which requires a lot of time for defect correction. There is another problem.

The present invention has been made to solve the above-mentioned conventional problems. Even when a large-sized light-transmitting defect is present, the number of correction liquid application operations is minimized, and the correction liquid is applied for a short time. An object of the present invention is to provide an emulsion mask pattern defect repairing method and device capable of repairing defects by using the above method.

[0012]

DISCLOSURE OF THE INVENTION The present invention relates to an emulsion mask in which a light-transmitting emulsion film coated on a transparent plate material has a periodic pattern formed by repeatedly arranging light-shielding patterns of a predetermined shape. In an emulsion mask pattern defect repairing method for repairing a translucent defect part occurring in the light-shielding pattern, a curable resin is applied to the film part of the defect part by any of a plurality of coating means provided side by side. The above problem is solved by applying a light-shielding correction liquid containing the composition and curing the applied correction liquid.

According to the present invention, a table for placing an emulsion mask in which a transparent pattern is formed on a transparent emulsion film coated on a transparent plate material and a periodic pattern is formed by repeatedly arranging light-shielding patterns of a predetermined shape. And an emulsion mask pattern defect repairing device for repairing a translucent defect portion occurring in the light-shielding pattern for the emulsion mask placed on the table,
The problem is similarly solved by providing a plurality of coating means for coating a light-shielding correction liquid containing a curable resin on the film portion of the defective portion and a curing means for curing the applied correction liquid. It is a thing.

That is, in the present invention, since a plurality of coating means are provided side by side with one correction device, a plurality of types of coating tools such as needles having different tip diameters can be used together without replacement work. Therefore, it is possible to easily select an appropriate applicator according to the defect size. As a result, the number of coating operations can be reduced, and the correction work can be completed in a short time.

[0015]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described in detail below with reference to the drawings.

FIG. 1 is a schematic perspective view showing an entire emulsion mask pattern defect repairing apparatus according to an embodiment of the present invention.

In this correction apparatus, a table 12 for mounting an emulsion mask M made of a glass plate (transparent plate material) G as shown in FIG. An X drive stage 16 and a Y drive stage 18 for moving the correction head 14 in the X direction and the Y direction with respect to the table 12 are installed in order to correct a pattern defect existing in any formed light-shielding pattern. ing.

Inside the correction head 14, a laser oscillator 20 is provided with an objective lens 22 as shown in an enlarged view in FIG.
The laser oscillator 20 is fixed together with the L oscillator for liquid curing capable of thermally curing the light-shielding coating liquid as shown in FIG.
The D laser oscillator 2 and the processing laser oscillator 4 can be switched and used, and the second, third, and fourth harmonics of the YAG laser are respectively emitted from the processing laser oscillator 4. Switching oscillation is possible.

Similarly, inside the correction head 14,
Needle elevating actuators 24 are fixed at positions symmetrical with respect to the laser oscillator 20 at predetermined offset amounts (distances) in the X direction, and application needles 26, 26A held at the lower ends thereof are attached. It can be moved up and down, and a coating liquid pot 28 for attaching the correction liquid to the lower ends of the coating needles 26, 26A is rotatably attached. The application needles 26 and 26A may be dispensers that discharge the correction fluid from the tips.

The repairing apparatus of this embodiment comprises two coating mechanisms (coating means) 30. Each of these mechanisms 30 is arranged symmetrically with respect to the laser oscillator 20. The needle lifting actuator 24, the coating needle 26 (26A), and the coating liquid pot 28 are included. A large-diameter needle 26 having a large tip diameter, which will be described later, is mounted on the coating mechanism on the right side of the drawing, and a small-diameter needle 26A is mounted on the left side.

In the present embodiment, by using the above-mentioned correction device, a transparent emulsion film E coated on a glass plate (transparent plate material) G as shown in FIG. Regarding the emulsion mask M having a periodic pattern formed by repeatedly arranging the light-shielding patterns P, the light generated in any of the light-shielding patterns P as shown in FIGS. 8 and 10 is transmitted. The transparent white voids (defects) K are corrected with a light-shielding correction liquid containing a thermosetting resin as follows. As the correction liquid, for example, a phenol resin ink for printing can be used as in the conventional case.

First, the emulsion mask M is placed on the table 12 shown in FIG. 1, and the defective portion K is captured by the objective lens 22 attached to the laser oscillator 20. Next, it is determined which tip diameter of the needle 26 or the needle 26A is used. Here, it is assumed that the adoption of the large diameter needle 26 on the right side is decided for the sake of convenience, and the correction head 1 is moved toward the corresponding coating mechanism 30 as shown in FIG.
4 is moved in the X direction by an offset amount, and the coating needle 26 is aligned right above the defective portion (white spot). Next, the coating liquid vase 28 is swirled and moved directly below the coating needle 26, and the coating needle 26 is moved by the elevating actuator 24.
Is lowered, the tip of the needle is inserted into the jar 28, an appropriate amount of the correction liquid is adhered thereto, then the coating needle 26 is raised by the elevating actuator 24, and the jar 28 is swung to return to the original position.

Then, the lifting actuator 2 is again used.
4, the tip of the needle 26 to which the correction fluid is attached is
As shown in FIG. 0 (A), it is lowered until it comes into contact with the surface of the void K generated in the emulsion film, and the correction liquid (coating liquid) is applied to the surface, and then the coating needle 26 is moved by the actuator 24. To raise. Then, the correction head 14
Is moved to the original position by moving in the X direction by an offset amount, and after the objective lens 22 catches the correction liquid applied to the surface of the void K, the same as in the conventional case shown in FIG. The oscillator 20 irradiates an LD laser to thermally cure the applied correction fluid. Although the right side coating mechanism has been described in detail above, the left side coating mechanism is also configured such that the coating is executed by substantially the same operation although the directions are reversed.

In this embodiment, as described above,
As shown in the image of the size of the coating film in the actuators 24 respectively provided in the two coating mechanisms 30 installed at positions symmetrical with respect to the laser oscillator 20, the tip diameter is large, as shown in FIG. For example φ100μ
Since the needle 26 having a diameter of m and the needle 26A having a small tip diameter of, for example, φ30 μm are mounted, it is possible to selectively use them according to the defect size. Therefore, with respect to a large size blank portion K as shown in FIG. 7B, it is possible to apply the large-diameter needle 26 so as to cover the whole with one application operation, and as shown in FIG. As shown in the figure, when using the large-diameter needle 26, there is a concern that the correction fluid may squeeze out into the small size blank K in the corner portion, but by using the small-diameter needle 26A, Appropriate coating can be performed with one coating operation. However, it is needless to say that even if it protrudes, it can be shaped by curing the correction liquid and then irradiating the protruding portion with a processing laser.

According to the present embodiment described in detail above, by mounting two coating needles having different tip diameters on one repairing device, when a defect larger than one coating size is dealt with, The number of times of application can be reduced. As a result, as shown in the image of the case of one-point coating and two-point coating in FIG. 4, the film in the portion where the coating points overlap becomes thicker in the case of multiple coatings (in the case of more than double the one-point coating). Therefore, it is possible to suppress the occurrence of the deformation of the product shape during contact exposure as described below, which is observed when the film thickness is large, as much as possible.

That is, as shown in the image of the cross-sectional shape in FIG. 5 (A) with the direction being vertical for convenience, the emulsion mask M after pattern correction is used to coat the base material (not shown) which is the product material. In order to expose the resist film (exposed material) R which has been formed, when these two are brought into close contact with each other as shown in FIG. When the resist film R spreads to a position beyond the exposed position and is exposed in that state, as shown in the image of the resist film R in the plane direction in FIG. 6, the resist film has the original pattern shape (rectangle here) only in the corrected pattern portion.
Deformation of the resist pattern (deformation of the product shape) occurs because the light is shielded to a wider range, but according to the present embodiment, such a problem can be effectively prevented.

Further, in this embodiment, two coating mechanisms 30 are provided.
Are symmetrically arranged with respect to the laser oscillator 20, the moving distance of the correction head during the coating operation can be shortened and the positioning can be facilitated, so that the work efficiency can be improved.

Although the present invention has been specifically described above, the present invention is not limited to the one shown in the above embodiment, and various modifications can be made without departing from the spirit of the invention.

For example, the specific configuration of the correction device applied to the present invention is not limited to that shown in the above embodiment. Also, the number of coating means is not limited to two, and the installation position thereof does not necessarily have to be symmetrical with respect to the laser oscillator. Further, although the one containing a thermosetting resin has been taken as the correction liquid, the correction liquid is not limited to this and may include one containing an ultraviolet curable resin.

[0030]

As described above, according to the present invention,
Even if a large-sized light-transmitting defect is present, the defect can be repaired in a short time after minimizing the number of times of applying the correction liquid.

[Brief description of drawings]

FIG. 1 is a schematic perspective view showing an entire correction device applied to an embodiment according to the present invention.

FIG. 2 is a schematic perspective view showing an enlarged detail of a correction head included in the correction device.

FIG. 3 is an explanatory diagram showing an image of characteristics of pattern correction according to the embodiment.

4A and 4B are a plan view and a front view showing an image of characteristics of pattern correction according to the embodiment.

FIG. 5 is an enlarged partial cross-sectional view showing an image of a problem when a correction fluid is applied thickly.

FIG. 6 is a plan view showing an image of the above problems.

FIG. 7 is a schematic plan view showing an entire image of an emulsion mask and an enlarged image of a part thereof.

FIG. 8 is an explanatory diagram showing an image of a pattern defect of an emulsion mask.

FIG. 9 is an explanatory diagram showing an image of the relationship between a conventional correction device and an emulsion mask.

FIG. 10 is an explanatory diagram showing an image of characteristics of a conventional correction method.

FIG. 11 is another explanatory diagram showing an image of characteristics of a conventional correction method.

FIG. 12 is an explanatory diagram showing problems of the conventional correction method.

[Explanation of symbols]

M ... Emulsion mask G ... Glass plate E ... Emulsion film P ... Shading pattern K ... defective part R ... Resist film 2. Liquid curing laser oscillator 4 ... Laser oscillator for processing 10 ... Stand 12 ... table 14 ... Correction head 16 ... X drive stage 18 ... Y drive stage 20 ... Laser oscillator 22 ... Objective lens 24 ... Actuator 26 ... Coating needle 28 ... Coating liquid pot 30 ... Coating mechanism (means)

Claims (4)

[Claims] 1. An emulsion mask in which a light-transmitting emulsion film coated on a transparent plate is provided with a periodic pattern formed by repeatedly arranging light-shielding patterns having a predetermined shape. An emulsion mask pattern defect repairing method for repairing a translucent defective portion, in which a light-shielding correction liquid containing a curable resin is applied to the film portion of the defective portion by any of a plurality of coating means provided side by side. Then, a method for correcting a defect in an emulsion mask pattern, which comprises curing the applied correction liquid. 2. A table on which an emulsion mask having a periodic pattern formed by repeatedly arranging light-shielding patterns of a predetermined shape is placed on a transparent emulsion film coated on a transparent plate, and the table. In an emulsion mask pattern defect repairing device for repairing a translucent defect portion occurring in the light-shielding pattern of the emulsion mask placed on the emulsion mask, a film having a light-shielding property containing a curable resin in a film portion of the defect portion An emulsion mask pattern defect correction device comprising: a plurality of coating means for coating a correction fluid; and a curing means for curing the coated correction fluid. 3. The emulsion mask pattern defect repairing apparatus according to claim 2, wherein when the number of the coating means is two, the coating means are arranged at symmetrical positions with respect to the curing means. 4. The plurality of coating means and the curing means are installed in the same correction head that is movable with respect to the table on which an emulsion mask is mounted. Emulsion mask pattern defect repair device.