JP2003289547A - Imaging element - Google Patents
Imaging elementInfo
- Publication number
- JP2003289547A JP2003289547A JP2002093003A JP2002093003A JP2003289547A JP 2003289547 A JP2003289547 A JP 2003289547A JP 2002093003 A JP2002093003 A JP 2002093003A JP 2002093003 A JP2002093003 A JP 2002093003A JP 2003289547 A JP2003289547 A JP 2003289547A
- Authority
- JP
- Japan
- Prior art keywords
- color
- shading
- color filter
- light receiving
- receiving element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003384 imaging method Methods 0.000 title abstract 3
- 230000002093 peripheral effect Effects 0.000 claims abstract description 19
- 239000003086 colorant Substances 0.000 claims description 3
- 230000001681 protective effect Effects 0.000 description 13
- 239000000758 substrate Substances 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Color Television Image Signal Generators (AREA)
- Light Receiving Elements (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、被写体光を光電的
に取り込むことで被写体画像を得る撮像素子に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an image pickup device that obtains a subject image by photoelectrically capturing subject light.
【０００２】[0002]
【従来の技術】近年急速に普及しているデジタルカメラ
やビデオカメラの本体内には、被写体光を光電信号に変
換して画像を記録するＣＣＤイメージセンサ（以下ＣＣ
Ｄと略記する）などの撮像素子が組み込まれている。こ
のような撮像素子は、被写体光を受光して光電信号に変
換する受光素子などから構成される画素が複数配置され
た画素領域を備えている。2. Description of the Related Art A CCD image sensor (hereinafter referred to as CC) for converting an object light into a photoelectric signal to record an image is provided in a main body of a digital camera or a video camera which has been rapidly popularized in recent years.
(Abbreviated as D) and the like are incorporated. Such an image pickup device includes a pixel region in which a plurality of pixels each including a light receiving device that receives subject light and converts it into a photoelectric signal is arranged.
【０００３】図３は、ＣＣＤを用いた撮像素子の構成例
である。撮像素子１００は、受光素子１０１と、垂直Ｃ
ＣＤ１０２と、水平ＣＣＤ１０３と、出力バッファ１０
４とで構成される。この撮像素子１００では、受光素子
１０１により光電変換された信号電荷が、垂直ＣＣＤ１
０２、水平ＣＣＤ１０３へと順次転送され、出力バッフ
ァ１０４により増幅されて外部に出力される。FIG. 3 is a structural example of an image pickup device using a CCD. The image sensor 100 includes a light receiving element 101 and a vertical C
CD 102, horizontal CCD 103, output buffer 10
4 and 4. In this image pickup device 100, the signal charge photoelectrically converted by the light receiving device 101 is applied to the vertical CCD 1
02, sequentially transferred to the horizontal CCD 103, amplified by the output buffer 104, and output to the outside.
【０００４】上記のような構成の撮像素子では、カラー
画像を得るために色フィルタが各受光素子上に配置され
る。図４は、色フィルタの配列の一例を示す配置図であ
る。ＲＧＢは、それぞれ赤緑青のフィルタを示し、１１
０が赤の色フィルタ、１１１が青の色フィルタ、１１２
が緑の色フィルタである。In the image pickup device having the above structure, a color filter is arranged on each light receiving device in order to obtain a color image. FIG. 4 is a layout diagram showing an example of an array of color filters. RGB indicates red, green, and blue filters, respectively, and
0 is a red color filter, 111 is a blue color filter, 112
Is the green color filter.
【０００５】図５は、従来の撮像素子の断面図である。
撮像素子１２０は、基板１２１、受光素子１２２、第１
保護膜１２３、色フィルタ１２４、第２保護膜１２５、
マイクロレンズ１２６から構成される。基板１２１に受
光素子１２２が配置される。各受光素子１２２上には、
第１保護膜１２３を介して色フィルタ１２４が配置され
る。また、集光率を向上させるためにマイクロレンズ１
２６が第２保護膜１２５を介して受光素子１２２の真上
に配置される。これらの受光素子１２２、色フィルタ１
２４、およびマイクロレンズ１２６などにより、１つの
画素１２７（図中２点鎖線で囲む部分）が構成され、こ
の画素１２７が複数配置されて画素領域１２８が形成さ
れる。FIG. 5 is a sectional view of a conventional image pickup device.
The image pickup element 120 includes a substrate 121, a light receiving element 122, and a first
Protective film 123, color filter 124, second protective film 125,
It is composed of microlenses 126. The light receiving element 122 is arranged on the substrate 121. On each light receiving element 122,
The color filter 124 is disposed via the first protective film 123. In addition, in order to improve the light collection rate, the micro lens 1
26 is disposed right above the light receiving element 122 via the second protective film 125. These light receiving element 122, color filter 1
One pixel 127 (a part surrounded by a two-dot chain line in the drawing) is configured by 24, the microlens 126, and the like, and a plurality of the pixels 127 are arranged to form a pixel region 128.
【０００６】ところで、このような撮像素子には、画素
領域の中央部に比べて周辺部の信号出力が減衰するシェ
ーディングという現象が発生する。このシェーディング
は、周辺部へ入射光が斜めに入射して光電変換効率が悪
化することに起因する。また、中央部と周辺部で色フィ
ルタの各色毎にズレが生じる色シェーディングという現
象も知られている。シェーディングや色シェーディング
が発生すると、画素領域の中央部と周辺部で画像や色の
バランスが悪くなって、製品の性能を著しく低下させ
る。By the way, in such an image pickup device, a phenomenon called shading occurs in which the signal output in the peripheral portion is attenuated as compared with the central portion in the pixel region. This shading is caused by the incident light obliquely entering the peripheral portion and deteriorating the photoelectric conversion efficiency. Further, there is also known a phenomenon called color shading in which a deviation occurs between the central portion and the peripheral portion for each color of the color filter. When the shading or the color shading occurs, the balance between the image and the color in the central portion and the peripheral portion of the pixel area becomes poor, and the performance of the product is significantly deteriorated.
【０００７】一方、前記撮像素子は、入射光量に対する
光電変換し得る範囲、所謂ダイナミックレンジが狭いの
で、高コントラストの被写体を撮像する場合、高輝度部
が白一色となる白つぶれ、あるいは低輝度部が黒一色と
なる黒つぶれの問題がある。On the other hand, since the image pickup device has a narrow range in which photoelectric conversion can be performed with respect to the amount of incident light, that is, a so-called dynamic range, when a high-contrast subject is imaged, the high-luminance portion becomes a solid white color or the low-luminance portion. There is a problem of black underexposure that is a black color.
【０００８】この問題を解決する方法として、特開平１
０−１８９９３０号公報には、色フィルタを複数の異な
る濃度で形成することにより広いダイナミックレンジを
実現させた撮像素子が記載されている。As a method for solving this problem, Japanese Unexamined Patent Publication No.
Japanese Unexamined Patent Publication No. 0-189930 describes an image pickup device that realizes a wide dynamic range by forming color filters with a plurality of different densities.
【０００９】[0009]
【発明が解決しようとする課題】しかしながら、特開平
１０−１８９９３０号公報に記載の撮像素子は、シェー
ディングや色シェーディングへの対策がなされていない
ため、汎用性に乏しいという欠点があった。However, the image pickup device described in Japanese Patent Laid-Open No. 10-189930 has a drawback that it is poor in versatility because no measures are taken against shading and color shading.
【００１０】本発明は、画素領域の全面に亘ってシェー
ディングおよび色シェーディングのない良好な画像を得
ることができる撮像素子を提供することを目的とする。It is an object of the present invention to provide an image pickup device capable of obtaining a good image without shading and color shading over the entire surface of a pixel area.
【００１１】[0011]
【課題を解決するための手段】上記目的を達成するため
に、本発明は、被写体光を受光して光電信号に変換する
受光素子と、この受光素子上に形成された色フィルタと
から構成される画素が複数配置された画素領域を備えた
撮像素子において、色フィルタの膜厚または濃度を、前
記画素領域の中央部から周辺部に向かって徐々に変化さ
せることにより、シェーディングを補正するものであ
る。In order to achieve the above object, the present invention comprises a light receiving element for receiving subject light and converting it into a photoelectric signal, and a color filter formed on the light receiving element. In an image sensor having a pixel region in which a plurality of pixels are arranged, the shading is corrected by gradually changing the film thickness or the density of the color filter from the central portion to the peripheral portion of the pixel region. is there.
【００１２】また、本発明は、色フィルタが複数色で配
列され、前記膜厚または濃度の変化量を、各色フィルタ
毎に設定することにより、色シェーディングを補正する
ものである。Further, according to the present invention, the color shading is corrected by arranging the color filters in a plurality of colors and setting the variation amount of the film thickness or the density for each color filter.
【００１３】[0013]
【発明の実施の形態】図１に、本発明を実施した撮像素
子の第１の実施例を示す。撮像素子２は、基板３、受光
素子４、第１保護膜５、色フィルタ６、第２保護膜７、
マイクロレンズ８から構成される。基板３は、シリコン
ウエハなどの半導体からなり、この基板３上に受光素子
４が配置される。各受光素子４上には、第１保護膜５を
介して色フィルタ６が配置される。また、集光率を向上
させるためにマイクロレンズ８が第２保護膜７を介して
受光素子４の真上に配置される。これらの受光素子４、
色フィルタ６、およびマイクロレンズ８などにより、１
つの画素９（図中２点鎖線で囲む部分）が構成され、こ
の画素９が複数配置されて画素領域１０が形成される。DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a first embodiment of an image pickup device embodying the present invention. The image sensor 2 includes a substrate 3, a light receiving element 4, a first protective film 5, a color filter 6, a second protective film 7,
It is composed of microlenses 8. The substrate 3 is made of a semiconductor such as a silicon wafer, and the light receiving element 4 is arranged on the substrate 3. A color filter 6 is arranged on each light receiving element 4 with a first protective film 5 interposed therebetween. In addition, a microlens 8 is arranged directly above the light receiving element 4 via the second protective film 7 in order to improve the light collection rate. These light receiving elements 4,
1 by the color filter 6 and the microlens 8
One pixel 9 (a portion surrounded by a two-dot chain line in the figure) is configured, and a plurality of the pixels 9 are arranged to form a pixel region 10.
【００１４】色フィルタ６の膜厚は、画素領域１０の中
央部（中心線Ｏ１で示す部分）から周辺部（矢印Ｘ１方
向）に向かって徐々に変化する。すなわち、画素領域１
０の中央部における色フィルタ６の膜厚Ｌ１よりも、周
辺部における膜厚Ｌ２のほうが小になるように徐々に変
化する。これに伴い第２保護膜７の膜厚も中央部から周
辺部に向かって徐々に大となる。色フィルタ６の膜厚の
変化量は、各色フィルタ毎に、色シェーディングを補正
するための最適な値に設定される。The film thickness of the color filter 6 gradually changes from the central portion (portion indicated by the center line O1) of the pixel region 10 toward the peripheral portion (direction of arrow X1). That is, the pixel area 1
The film thickness L2 in the peripheral portion is gradually changed to be smaller than the film thickness L1 of the color filter 6 in the central portion of 0. Along with this, the film thickness of the second protective film 7 gradually increases from the central portion toward the peripheral portion. The amount of change in the film thickness of the color filter 6 is set to an optimum value for correcting color shading for each color filter.
【００１５】図２に、本発明を実施した撮像素子の第２
の実施例を示す。第１の実施例と同様に、撮像素子２０
は、基板２１、受光素子２２、第１保護膜２３、色フィ
ルタ２４、第２保護膜２５、マイクロレンズ２６から構
成される。基板２１は、シリコンウエハなどの半導体か
らなり、この基板２１上に受光素子２２が配置される。
各受光素子２２上には、第１保護膜２３を介して色フィ
ルタ２４が配置される。また、集光率を向上させるため
にマイクロレンズ２６が第２保護膜２５を介して受光素
子２２の真上に配置される。これらの受光素子２２、色
フィルタ２４、およびマイクロレンズ２６などにより、
１つの画素２７（図中２点鎖線で囲む部分）が構成さ
れ、この画素２７が複数配置されて画素領域２８が形成
される。FIG. 2 shows a second image pickup device embodying the present invention.
An example of is shown. Similar to the first embodiment, the image sensor 20
Is composed of a substrate 21, a light receiving element 22, a first protective film 23, a color filter 24, a second protective film 25, and a microlens 26. The substrate 21 is made of a semiconductor such as a silicon wafer, and the light receiving element 22 is arranged on the substrate 21.
A color filter 24 is arranged on each light receiving element 22 with a first protective film 23 interposed therebetween. Further, a microlens 26 is arranged directly above the light receiving element 22 via the second protective film 25 in order to improve the light collection rate. With these light receiving element 22, color filter 24, and microlens 26,
One pixel 27 (a portion surrounded by a two-dot chain line in the drawing) is configured, and a plurality of the pixels 27 are arranged to form a pixel region 28.
【００１６】色フィルタ２４の濃度は、画素領域２８の
中央部（中心線Ｏ２で示す部分）から周辺部（矢印Ｘ２
方向）に向かって徐々に変化する。すなわち、画素領域
２８の中央部における色フィルタ２４の濃度よりも、周
辺部における濃度のほうが薄くなるように徐々に変化す
る。この濃度の変化量は、各色フィルタ毎に、色シェー
ディングを補正するための最適な値に設定される。The density of the color filter 24 varies from the central portion (portion indicated by the center line O2) of the pixel region 28 to the peripheral portion (arrow X2).
Direction). That is, the density of the color filter 24 in the central portion of the pixel region 28 gradually changes so that the density of the peripheral portion becomes lighter. The density change amount is set to an optimum value for correcting the color shading for each color filter.
【００１７】第１の実施例では、画素領域１０の中央部
における色フィルタ６の膜厚Ｌ１よりも、周辺部におけ
る膜厚Ｌ２のほうが小になるように徐々に変化する。こ
のため、膜厚が均一な色フィルタを用いた場合よりも、
周辺部における光電変換効率が改善される。また、この
膜厚の変化量は、各色フィルタ毎に、色シェーディング
を補正するための最適な値に設定される。したがって、
画素領域の中央部に比べて周辺部の信号出力が減衰する
シェーディングと、中央部と周辺部で色フィルタの各色
毎にズレが生じる色シェーディングとを補正することが
でき、画素領域の全面に亘ってシェーディングおよび色
シェーディングのない良好な画像を得ることが可能であ
る。In the first embodiment, the film thickness L2 in the peripheral portion is gradually changed to be smaller than the film thickness L1 of the color filter 6 in the central portion of the pixel region 10. Therefore, compared to the case of using a color filter with a uniform film thickness,
The photoelectric conversion efficiency in the peripheral portion is improved. The amount of change in the film thickness is set to an optimum value for correcting color shading for each color filter. Therefore,
It is possible to correct shading in which the signal output in the peripheral portion is attenuated as compared with the central portion of the pixel area and color shading in which a deviation occurs for each color of the color filter in the central portion and the peripheral portion, and it is possible to cover the entire pixel area. It is possible to obtain a good image without shading and color shading.
【００１８】第２の実施例では、画素領域２８の中央部
における色フィルタ２４の濃度よりも、周辺部における
濃度のほうが薄くなるように徐々に変化する。このた
め、濃度が均一な色フィルタを用いた場合よりも、周辺
部における光電変換効率が改善される。また、この濃度
の変化量は、各色フィルタ毎に、色シェーディングを補
正するための最適な値に設定される。したがって、シェ
ーディングと色シェーディングとを補正することがで
き、画素領域の全面に亘ってシェーディングおよび色シ
ェーディングのない良好な画像を得ることが可能であ
る。In the second embodiment, the density of the color filter 24 in the central portion of the pixel region 28 is gradually changed to be lighter than that of the peripheral portion. Therefore, the photoelectric conversion efficiency in the peripheral portion is improved as compared with the case where a color filter having a uniform density is used. The amount of change in density is set to an optimum value for correcting color shading for each color filter. Therefore, it is possible to correct shading and color shading, and it is possible to obtain a good image without shading and color shading over the entire pixel area.
【００１９】なお、撮像素子としては、図３に示すＣＣ
Ｄによるものに限らず、ＭＯＳ型デバイスを用いたもの
にも本発明を適用できる。また、色フィルタの配列は、
図４に示すＲＧＢ３色による原色系の構成でもよいし、
シアン、イエロー、マゼンタの補色系による構成でもよ
く、これらを組み合わせて構成されるものでもよい。As the image pickup device, the CC shown in FIG. 3 is used.
The present invention can be applied to not only D type devices but also MOS type devices. The array of color filters is
The configuration of the primary color system of three RGB colors shown in FIG.
It may be configured by a complementary color system of cyan, yellow, and magenta, or may be configured by combining these.
【００２０】上記実施形態では、色フィルタの膜厚を変
化させる実施例と、濃度を変化させる実施例とを別にし
て説明したが、これらの実施例を同時に用いた場合につ
いても本発明は有効である。In the above-described embodiment, an example in which the film thickness of the color filter is changed and an example in which the density is changed are separately described, but the present invention is also effective when these examples are used simultaneously. Is.
【００２１】[0021]
【発明の効果】以上のように、本発明の撮像素子によれ
ば、色フィルタの膜厚または濃度を、撮像素子に形成さ
れた画素領域の中央部から周辺部に向かって徐々に変化
させることによりシェーディングを補正し、この膜厚ま
たは濃度の変化量を、各色フィルタ毎に設定することに
より色シェーディングを補正しているので、画素領域の
全面に亘ってシェーディングおよび色シェーディングの
ない良好な画像を得ることができる。As described above, according to the image pickup device of the present invention, the film thickness or density of the color filter is gradually changed from the central portion to the peripheral portion of the pixel area formed in the image pickup element. The shading is corrected by, and the color shading is corrected by setting the variation amount of the film thickness or the density for each color filter. Therefore, a good image without shading and color shading is formed over the entire pixel area. Obtainable.
【図１】本発明を実施した撮像素子の第１の実施例を示
す断面図である。FIG. 1 is a cross-sectional view showing a first embodiment of an image sensor embodying the present invention.
【図２】撮像素子の第２の実施例を示す断面図である。FIG. 2 is a cross-sectional view showing a second embodiment of the image sensor.
【図３】従来の撮像素子の構成例を示す概略図である。FIG. 3 is a schematic diagram showing a configuration example of a conventional image sensor.
【図４】色フィルタの配列の一例を示す配置図である。FIG. 4 is an arrangement diagram showing an example of an arrangement of color filters.
【図５】従来の撮像素子の断面図である。FIG. 5 is a cross-sectional view of a conventional image sensor.
２、２０ 撮像素子 ４、２２ 受光素子 ６、２４ 色フィルタ ８、２６ マイクロレンズ ９、２７ 画素 １０、２８ 画素領域 2, 20 Image sensor 4,22 Light receiving element 6, 24 color filter 8,26 micro lens 9,27 pixels 10, 28 pixel area
Claims (2)
受光素子と、該受光素子上に形成された色フィルタとか
ら構成される画素が複数配置された画素領域を備えた撮
像素子において、 前記色フィルタの膜厚または濃度を、前記画素領域の中
央部から周辺部に向かって徐々に変化させることによ
り、シェーディングを補正することを特徴とする撮像素
子。1. An image pickup device having a pixel region in which a plurality of pixels each including a light receiving element for receiving subject light and converting it into a photoelectric signal, and a color filter formed on the light receiving element are provided. An image sensor, wherein shading is corrected by gradually changing a film thickness or a density of the color filter from a central portion of the pixel region toward a peripheral portion thereof.
記膜厚または濃度の変化量を、各色フィルタ毎に設定す
ることにより、色シェーディングを補正することを特徴
とする請求項１に記載の撮像素子。2. The color shading is corrected by arranging the color filters in a plurality of colors, and setting the amount of change in the film thickness or density for each color filter to correct color shading. Image sensor.
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| JP2002093003A JP3920683B2 (en) | 2002-03-28 | 2002-03-28 | Image sensor |
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| JP2002093003A JP3920683B2 (en) | 2002-03-28 | 2002-03-28 | Image sensor |
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| JP3920683B2 JP3920683B2 (en) | 2007-05-30 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005327921A (en) * | 2004-05-14 | 2005-11-24 | Sony Corp | Solid state imaging apparatus |
| KR100943491B1 (en) | 2007-12-03 | 2010-02-22 | 주식회사 동부하이텍 | Image sensor and method for manufacturing the sensor |
| JP2018036338A (en) * | 2016-08-29 | 2018-03-08 | キヤノン株式会社 | Forming method of color filter array and manufacturing method of electronic device |
| CN109314746A (en) * | 2017-12-22 | 2019-02-05 | 深圳配天智能技术研究院有限公司 | The method of imaging sensor and its acquisition image, smart machine |
| US11929377B2 (en) | 2017-12-27 | 2024-03-12 | Interdigital Ce Patent Holdings, Sas | Image sensor comprising an array of pixels for reducing the shadowing effect, and corresponding designing method and computer program product |
-
2002
- 2002-03-28 JP JP2002093003A patent/JP3920683B2/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005327921A (en) * | 2004-05-14 | 2005-11-24 | Sony Corp | Solid state imaging apparatus |
| KR100943491B1 (en) | 2007-12-03 | 2010-02-22 | 주식회사 동부하이텍 | Image sensor and method for manufacturing the sensor |
| JP2018036338A (en) * | 2016-08-29 | 2018-03-08 | キヤノン株式会社 | Forming method of color filter array and manufacturing method of electronic device |
| CN109314746A (en) * | 2017-12-22 | 2019-02-05 | 深圳配天智能技术研究院有限公司 | The method of imaging sensor and its acquisition image, smart machine |
| CN109314746B (en) * | 2017-12-22 | 2021-08-10 | 深圳配天智能技术研究院有限公司 | Image sensor, method for acquiring image by image sensor and intelligent equipment |
| US11929377B2 (en) | 2017-12-27 | 2024-03-12 | Interdigital Ce Patent Holdings, Sas | Image sensor comprising an array of pixels for reducing the shadowing effect, and corresponding designing method and computer program product |
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| JP3920683B2 (en) | 2007-05-30 |
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