JP2003287132A - Gasket holder - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a gasket holder hard to be fallen off the bolts and allowing the bolts to be easily fitted thereto. <P>SOLUTION: This gasket holder is formed of an elastically deformable thin (0.1 mm in thickness) sheet body 1 holding a gasket therein. The portions of bolt holes 5 provided in the sheet body 1 projected between the top part and bottom part of the bolts by elastical deformation are formed in thin wall portions 5a having a thickness of 20 to 80% of the original thickness of the sheet body 1. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a gasket holder used for holding and arranging a metal gasket for preventing fluid leakage in ultra-high vacuum equipment used in semiconductor manufacturing equipment, nuclear equipment and the like. .

[0002]

2. Description of the Related Art Conventionally, various metal gaskets have been used in a semiconductor manufacturing apparatus or the like for the purpose of obtaining high airtightness. The gasket is used by closely contacting it so as to close the gap between two adjacent constituent members such as a flange, and is installed in a groove or the like of the constituent member to connect the two constituent materials. At this time, impurities may be attached to the gasket, or minute damage may occur on the gasket during handling, which may cause leakage. Furthermore, when the gasket is installed, it will be misaligned, resulting in uneven gasket tightening,
Leakage may occur. Therefore, to remove the gasket from the device without directly touching it,
A gasket retainer is used.

It is generally known that the gasket holder is made of an elastically deformable metal thin plate, and has a structure in which the metal thin plate has a gasket taking-in hole and a gasket supporting hole connected to the taking-in hole. In addition, by providing one gasket holder with a plurality of gasket holding portions, there is an advantage that a plurality of gaskets can be attached / detached at one time.

[0004]

In a gas supply device used in a semiconductor manufacturing apparatus, various parts such as valves, filters, regulators, and mass flow controllers are arranged with metal blocks called "substrate" having flow passages. Although various parts are attached to and used in, the problem is that it takes time to replace the parts because these parts are densely packed in a narrow space.

In the gas supply device, a gasket is used by inserting it between the substrate and various parts and fitting it into the groove of the substrate. In order to facilitate the mounting of the gasket, the gasket holding the gasket is attached. The tool and various parts may be fixed with bolts and then fixed on the substrate with bolts.

At this time, in order to hold the gasket holder on the bolt, it is formed to have a diameter smaller than the outer diameter of the thread portion of the bolt mounting hole and larger than the outer diameter of the thread root portion. By forming such a bolt mounting hole, the inner peripheral edge of the bolt mounting hole is elastically deformed and protrudes between the crests and troughs that form the bolt screw, and the gasket holder is free to be mounted on the bolt. Since it can be prevented from slipping in, the mountability of various parts and gaskets is improved.

Examples of the shape of the bolt mounting hole of the gasket holder include a circular shape, a square shape, and a rectangular shape. Here, if the outer diameter of the thread part of the bolt is too small compared to the diameter of the bolt mounting hole, the gasket retainer will easily come off the bolt, and the distance between the bolt mounting hole and the outer diameter of the thread part of the bolt will be small. If it is wide, the resistance when the bolt moves increases, making it difficult to fit the bolt.

Further, in order to improve the mountability, as shown in FIG. 6, one or a plurality of projecting portions 7 are provided in the mounting holes for passing the bolts, and the projecting portions 7 hold the bolts. However, if a strong force is applied to the protrusion during mounting, the protrusion will be deformed and the gasket holder will slip from the bolt.

The present invention has been made in order to solve the above problems of the conventional gasket holder, and provides a gasket holder which is difficult to drop from the bolt and is easy to install the bolt. The main purpose is that.

[0010]

In order to achieve the above object, the invention of claim 1 is a gasket holder comprising a plate body for sandwiching and holding an annular gasket having a groove on an outer peripheral surface thereof. Has a mounting hole for passing the bolt through, the mounting hole engages with the bolt at a curved portion along the outer peripheral portion of the bolt, and from the portion engaging with the bolt in a radial direction of the bolt of 0.5 to 2 mm. 20 to 8 of the original thickness of the plate
The gist is that it is 0%.

According to a second aspect of the present invention, there is provided a gasket holder comprising a plate body for sandwiching and holding an annular gasket having a groove on an outer peripheral surface thereof, and a mounting hole for passing a bolt through the plate body, The mounting hole engages with the bolt at a curved portion along the outer peripheral portion of the bolt, and a cut having a length of 0.5 to 2 mm is 1 from the portion engaging with the bolt in the radial direction of the bolt.
The main point is that a book or multiple books are included.

According to a third aspect of the present invention, in a gasket holder comprising a plate body for sandwiching and holding an annular gasket having a groove on the outer peripheral surface thereof, a mounting hole for inserting a bolt through the plate body, The mounting hole engages the bolt at a curved portion along the outer peripheral portion of the bolt, and a portion 0.5 to 2 mm from the portion engaging the bolt in the radial direction of the bolt is 20 to 80 of the original thickness of the plate body. %, And the gist is that one or a plurality of cuts having a length of 0.5 to 2 mm are made in the radial direction of the bolt from the portion engaging with the bolt.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION A first preferred embodiment of the present invention is shown in FIGS. 1 and 2, 1 is a plate body having a thickness of 0.1 mm made of an elastically deformable metal thin plate that constitutes a gasket holder, 2 is an annular gasket having a groove on the outer periphery attached to the plate body, and 3 is Gasket intake holes, 4 are support holes, and 5 are bolt holes.

The bolt hole 5 has a thin portion 5a whose inner peripheral edge portion engaging with a screw of the bolt is thinned by etching or the like, and the thin portion 5a which is thinned is the original thickness of the plate body 1. 20 to 80% of the height t, and the width w of the bolt in the radial direction from the portion engaging with the screw of the bolt is 0.5 to
It is set to 2 mm.

In FIG. 3, the above-mentioned gasket holder is provided with bolts 6.
2 shows a state in which the screw is engaged and held. Thus, in the bolt hole 5 of the gasket holder, the thin portion 5a of the hole is
Elastically deforms to project and engage between the crests and troughs of the bolt screw, and the engaging action holds the gasket holder on the bolt.

Here, when the thin portion 5a in which the bolt hole 5 is thin is less than 20% of the original thickness of the plate body 1, the portion in contact with the bolt is greatly deformed, and the gasket holder falls off from the bolt. If it is more than 80%, the mountability of the bolt does not change. Further, if the thinned portion 5a having a reduced thickness has a length shorter than 0.5 mm, it is not effective. Needless to say, the same effect can be obtained by forming the thin portion 5a by laser processing instead of etching processing.

4 to 5 show a second embodiment of the present invention. The same members as those in FIGS. 1 and 2 are designated by the same reference numerals. In the second embodiment, in the bolt hole 5 of the plate body 1, the thin portion 5 that engages with the screw of the bolt.
One or a plurality of cuts 5b having a radial length of 0.5 to 2.0 mm are formed in a.

According to the structure in which the notch 5b is formed in the thin portion 5a of the bolt hole as described above, the mountability of the bolt is improved. Here, the one with the notch in the bolt hole,
Compared to the case where a projection is provided in a mounting hole through which a bolt is inserted, there are many portions that engage with the bolt, and therefore, there is an advantage that the gasket holder is unlikely to drop from the bolt even when a strong external force is applied to the bolt.

The gasket holder is made of metal C.
It can be used for ring gaskets, gaskets in which a coil spring is mounted in a metal C ring, and the like having a groove on the outer peripheral portion.

[0020]

EXAMPLES Examples of the present invention will be specifically described below, but the present invention is not limited to these examples. Example 1 In Example 1, as shown in FIGS. 1 and 2, in a gasket holder that holds an annular gasket 2 having a groove on its outer peripheral surface, a metal plate made of SUS (having a thickness of 0. 10m
mounting hole 5 for inserting the bolt is formed so that it is smaller than the outer diameter of the thread portion of the bolt and larger than the outer diameter of the thread root portion of the bolt, and Is etched to a thickness of 0.0 mm in the radial direction of the bolt from the part that engages with the bolt.
A thin portion 5a of 5 mm is formed.

Example 2 In Example 2, as shown in FIGS. 4 to 5, a gasket holder for holding an annular gasket 2 having a groove on its outer peripheral surface is used. 0.10m
m), the mounting hole 5 for inserting the bolt is formed so as to be smaller than the outer diameter of the thread portion of the bolt and larger than the outer diameter of the screw root portion of the bolt, and the mounting hole 5 for inserting the bolt. Is etched to a thickness of 0.0 mm in the radial direction of the bolt from the part that engages with the bolt.
A thin portion 5a having a length of 5 mm is formed, and further four notches having a length of 1 mm are made in the radial direction in the thin portion 5a which engages with a screw of a bolt.

Comparative Example 1 In Comparative Example 1, as shown in FIG. 6, in a gasket holder for holding an annular gasket 2 having a groove on the outer peripheral surface, a mounting hole 5 for inserting a bolt has a thread portion of the bolt. The outer diameter was smaller than the outer diameter.

In order to compare the mountability of the bolts to the gasket holders of Examples 1 to 2 and Comparative Example 1 described above, it is necessary to mount the bolts at all four locations of the 10 gasket holders with the gaskets. The time taken was measured.

In order to compare the detachability from the bolt, the gasket holder was held at a position of 50 mm from the bottom of the bolt having a length of 100 mm, and this was subjected to a vibration test continuously for 1 hour at an acceleration of 10 G and a frequency of 60 Hz. Then, the amount of movement of the gasket holder was measured. The test results are shown in Table 1.

[0025]

[Table 1]

As is clear from Table 1, in Example 1 in which the inner peripheral portion of the bolt hole was halved in thickness by etching,
The mounting time is about 20% shorter than that of Comparative Example 1, and the amount of displacement is also halved. In addition, it is confirmed that the second embodiment in which the thickness is halved and the notch is further formed does not differ much from the first embodiment in the difficulty of displacement, but the mounting time is further shortened. It is considered that this is because the plate was easily deformed from the cut portion as a base point.

[0027]

As described in detail above, according to the gasket holder of the present invention, even when used in an ultra-high vacuum equipment such as a semiconductor manufacturing apparatus, the gasket does not easily come off and the bolt can be easily attached. The effect that there is is obtained.

[Brief description of drawings]

FIG. 1 is a plan view of a gasket holder according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view of a mounting hole for passing a bolt of a gasket holder.

FIG. 3 is a cross-sectional view showing a state in which a mounting hole of a plate body is engaged with a bolt.

FIG. 4 is a plan view of a gasket holder according to another embodiment of the present invention.

FIG. 5 is a sectional view of a mounting hole for inserting a bolt of a gasket holder.

FIG. 6 is a plan view of a conventional gasket holder.

[Explanation of symbols]

1 Plates that make up the gasket holder 2 gasket 3 Gasket intake hole 4 Gasket support hole 5 bolt holes 5a Thin part 5b cut 6 bolts

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[Procedure amendment]

[Submission date] May 22, 2002 (2002.5.2)
2)

[Procedure Amendment 1]

[Document name to be amended] Statement

[Correction target item name] Explanation of code

[Correction method] Change

[Correction content]

[Explanation of Codes] 1 Plate Body Constituting Gasket Holder 2 Gasket 3 Gasket Intake Hole 4 Gasket Support Hole 5 Bolt Hole 5a Thin Wall 5b Notch 6 Bolt 7 Protrusion

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Hideaki Mori             5-5-7 Kamijima, Hamamatsu City, Shizuoka Prefecture F term (reference) 3J040 BA01 EA17 FA01 HA03 HA04                       HA15

Claims (3)

[Claims] 1. A gasket holder comprising a plate body for sandwiching and holding an annular gasket having a groove on the outer peripheral surface, the plate body having a mounting hole for inserting a bolt, the mounting hole being the outer periphery of the bolt. Engage the bolt in a curved portion along the portion, and the portion 0.5 to 2 mm in the radial direction of the bolt from the portion engaging the bolt is set to 20 to 80% of the original thickness of the plate body. Characteristic gasket holder. 2. A gasket holder comprising a plate body sandwiching and holding an annular gasket having a groove on the outer peripheral surface, the plate body having a mounting hole for inserting a bolt, wherein the mounting hole is the outer periphery of the bolt. A gasket that engages with a bolt at a curved portion along the portion, and one or a plurality of cuts having a length of 0.5 to 2 mm are made in the radial direction of the bolt from the portion that engages with the bolt. Holding device. 3. A gasket holder comprising a plate body sandwiching and holding an annular gasket having a groove on the outer peripheral surface, the plate body having a mounting hole for inserting a bolt, wherein the mounting hole is the outer periphery of the bolt. The curved portion along the portion engages with the bolt, and a portion 0.5 to 2 mm from the portion engaging with the bolt in the radial direction of the bolt is set to 20 to 80% of the original thickness of the plate body. A gasket holder characterized in that one or a plurality of cuts having a length of 0.5 to 2 mm are made in the radial direction of the bolt from the mating portion.