JP2003286358A - Substrate for microchip and method for manufacturing the same - Google Patents

Substrate for microchip and method for manufacturing the same

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Publication number
JP2003286358A
JP2003286358A JP2002090244A JP2002090244A JP2003286358A JP 2003286358 A JP2003286358 A JP 2003286358A JP 2002090244 A JP2002090244 A JP 2002090244A JP 2002090244 A JP2002090244 A JP 2002090244A JP 2003286358 A JP2003286358 A JP 2003286358A
Authority
JP
Japan
Prior art keywords
substrate
microchip
norbornene
silicon compound
polyolefin resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002090244A
Other languages
Japanese (ja)
Inventor
Hiroshi Sawai
博 澤井
Kanehisa Yokoyama
兼久 横山
Hideyuki Shimaoka
秀行 島岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Bakelite Co Ltd
Original Assignee
Sumitomo Bakelite Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Bakelite Co Ltd filed Critical Sumitomo Bakelite Co Ltd
Priority to JP2002090244A priority Critical patent/JP2003286358A/en
Publication of JP2003286358A publication Critical patent/JP2003286358A/en
Pending legal-status Critical Current

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Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate for a microchip which can hold in a high density a functional group fixating a biochemically active substance and which can be manufactured by a simplified cheap method, as well as to provide a manufacturing method thereof. <P>SOLUTION: The substrate for a microchip, which is used for fixating the biochemically active substance, is characterized in that on the surface of a saturated cyclic polyolefin resin using as the raw material various monomers including norbornene or a norbornene derivative there is formed a layer 500 Åthick or thinner consisting of a silicon compound. This substrate can be manufactured by the dry coating of silicon oxide by vacuum deposition method, sputtering method, CVD method, and the like. <P>COPYRIGHT: (C)2004,JPO

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、生化学的活性物質
を固定するための支持体になるマイクロチップ用基板と
その製造方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microchip substrate which serves as a support for immobilizing a biochemically active substance and a method for producing the same.

【0002】[0002]

【従来の技術】現在、プロテインチップやDNAチップ
をはじめとするマイクロチップ用基板はガラス製が主流
である。その理由は、マイクロチップの特性として、検
出対象を蛍光標識で測定するときにバックグラウンドが
低いこと、耐熱性耐溶剤製に優れていることなどが必要
だからである。しかし、ガラスには破損しやすい、表面
処理が比較的困難、表面精度に優れた基板の大量生産が
難しい等の欠点がある。そこでガラスに代わる材料とし
て、プラスチックが注目されている。プラスチックは安
価であり、成形により同質製品の大量生産が可能である
等の理由で、マイクロチップ用基板の素材として今後幅
広く利用されるものと考えられている。プラスチック性
の基板の表面にタンパクなどの生化学的活性物質を固定
するためには官能基が必要である。アミノ基やアルデヒ
ド基等の官能基が導入された基板を得る方法して、官能
基を有するモノマーを含ませた共重合物で基板の成形を
行なう方法か、酸素または酸素を含むガス雰囲気下で低
温プラズマ放電処理等の酸化処理により導入されるカル
ボキシル基、水酸基を用いて表面処理を施す方法があ
る。生理活性物質を固定するための官能基を有する共重
合物を合成する場合、マイクロチップ用基板だけの用途
で作成するために必要なプラスチックは少量であり、汎
用のプラスチックと比較し遥かに小ロットでの生産とな
るため製造コストが高くなってしまう。一方、低温プラ
ズマ放電処理等の酸化処理等の酸化処理を行った場合、
表面の炭素分子全てにカルボキシル基、水酸基が導入さ
れてはおらず、まだ官能基の導入量を改善する必要があ
る。
2. Description of the Related Art At present, glass substrates are the mainstream for microchip substrates such as protein chips and DNA chips. The reason is that the characteristics of the microchip are that the background is low when the detection target is measured with a fluorescent label, and that it is excellent in heat resistance and solvent resistance. However, glass has drawbacks that it is easily broken, surface treatment is relatively difficult, and mass production of substrates having excellent surface precision is difficult. Therefore, plastic is drawing attention as a material that replaces glass. Plastic is considered to be widely used in the future as a material for substrates for microchips because it is inexpensive and allows mass production of homogeneous products by molding. Functional groups are required to immobilize biochemically active substances such as proteins on the surface of plastic substrates. As a method for obtaining a substrate into which a functional group such as an amino group or an aldehyde group is introduced, a method of molding the substrate with a copolymer containing a monomer having a functional group, or under a gas atmosphere containing oxygen or oxygen There is a method of performing a surface treatment using a carboxyl group or a hydroxyl group introduced by an oxidation treatment such as a low temperature plasma discharge treatment. When synthesizing a copolymer having a functional group for immobilizing a physiologically active substance, a small amount of plastic is required to make it for the purpose of using only a microchip substrate, and is a much smaller lot than a general-purpose plastic. Since the production is done at, the manufacturing cost becomes high. On the other hand, when an oxidation treatment such as a low temperature plasma discharge treatment is performed,
Carboxyl groups and hydroxyl groups are not introduced into all the carbon molecules on the surface, and it is still necessary to improve the introduced amount of functional groups.

【0003】[0003]

【発明が解決しようとする課題】本発明は、前述したガ
ラス基板の代わりにプラスチック基板を用いた場合の問
題点を解消すべく、生化学的活性物質を固定化する官能
基を高密度で保持でき、簡便で安価な方法により製造す
ることを可能とし、ガラスに代わることができるプラス
チック製のマイクロチップ用基板とその製造方法を提供
することである。
DISCLOSURE OF THE INVENTION In order to solve the above-mentioned problems when a plastic substrate is used instead of the glass substrate, the present invention holds functional groups for immobilizing biochemically active substances at a high density. It is an object of the present invention to provide a plastic microchip substrate that can be manufactured by a simple and inexpensive method and can replace glass, and a manufacturing method thereof.

【0004】[0004]

【課題を解決するための手段】本発明者らは、上記課題
を解決する検討を行った結果、多種の官能基を導入する
処理の段階の一つとしてノルボルネン樹脂の支持体に酸
化珪素の真空蒸着を行ない、表面に高密度の水酸基を導
入されたことを特徴とするマイクロチップ用基板を完成
するに至った。即ち本発明は、(1) 飽和環状ポリオ
レフィン系樹脂の少なくとも一部の表面に珪素化合物か
らなる層が形成されていることを特徴とするマイクロチ
ップ用基板、(2) 飽和環状ポリオレフィン系樹脂に
ノルボルネンまたはノルボルネン誘導物の少なくとも一
つがモノマー単位として含まれている(1)記載のマイ
クロチップ用基板、(3) 支持体の表面を構成する珪
素化合物の層が、厚さ500Å以下である、(1)また
は(2)記載のマイクロチップ用基板、(4) ドライ
コーティング法を用いて飽和環状ポリオレフィン系樹脂
の表面に珪素化合物からなる層を形成することを特徴と
するマイクロチップ用基板の製造方法、(5) ドライ
コーティング法が真空蒸着法、スパッタリング法、CV
D法のいずれかであることを特徴とする(4)記載のマ
イクロチップ用基板の製造方法、である。
As a result of studies to solve the above-mentioned problems, the present inventors have found that a vacuum of silicon oxide is applied to a norbornene resin support as one of the processing steps for introducing various functional groups. By vapor deposition, a high-density hydroxyl group was introduced on the surface to complete a microchip substrate. That is, the present invention provides: (1) a microchip substrate characterized in that a layer made of a silicon compound is formed on at least a part of a surface of a saturated cyclic polyolefin resin, (2) a saturated cyclic polyolefin resin and norbornene Alternatively, the microchip substrate according to (1), which contains at least one norbornene derivative as a monomer unit, (3) the silicon compound layer forming the surface of the support has a thickness of 500 Å or less, ) Or (2), the microchip substrate, (4) a method for producing a microchip substrate, characterized in that a layer made of a silicon compound is formed on the surface of a saturated cyclic polyolefin resin by a dry coating method. (5) Dry coating method is vacuum deposition method, sputtering method, CV
The method for producing a microchip substrate according to (4), which is any one of the D methods.

【0005】[0005]

【発明の実施の形態】本発明で用いられる飽和環状ポリ
オレフィン系樹脂は、マイクロチップ用基板として、検
出対象を蛍光標識で測定するときにバックグラウンドが
低いこと、耐熱性耐溶剤製に優れた特性がある。具体的
な分子構造としては、環状オレフィン構造を有する重合
体単独または環状オレフィンとα−オレフィンとの共重
合体を水素添加した飽和重合体であり、好適には、一般
式(1)で表されるノルボルネンの開環重合体の水素添
加物等が挙げられる。
BEST MODE FOR CARRYING OUT THE INVENTION The saturated cyclic polyolefin-based resin used in the present invention has a low background when measuring an object to be detected with a fluorescent label as a substrate for microchips, and is excellent in heat resistance and solvent resistance. There is. The specific molecular structure is a polymer having a cyclic olefin structure alone or a saturated polymer obtained by hydrogenating a copolymer of a cyclic olefin and an α-olefin, and is preferably represented by the general formula (1). And a hydrogenated product of a ring-opening polymer of norbornene.

【0006】[0006]

【化1】 (ただし、上記式(1)中、R1およびR2は水素または
炭素数1〜10の炭化水素残基でそれぞれ同一または異
なっていても良く、また、R1およびR2は互いに環を形
成しても良い。) 一般式(1)で表せる構造単位を有する重合体は、モノ
マーとしてノルボルネン、及びそのアルキル又はアルキ
リデン置換体であり、具体的には、5−メチル−2−ノ
ルボルネン、5,6−ジメチル−2−ノルボルネン、5
−エチリデン−2−ノルボルネン等があり、これ以外に
もジシクロペンタジエン、2,3−ジヒドロジシクロペ
ンタジエン、及びこれらのメチル、エチル等のアルキル
置換体を使用し、開環重合で得られる開環重合体を水素
添加して製造される飽和重合体がある。
[Chemical 1] (However, in the above formula (1), R 1 and R 2 may be the same or different from each other as hydrogen or a hydrocarbon residue having 1 to 10 carbon atoms, and R 1 and R 2 form a ring with each other. The polymer having a structural unit represented by the general formula (1) is norbornene as a monomer and an alkyl or alkylidene-substituted product thereof, specifically, 5-methyl-2-norbornene, 5, 6-dimethyl-2-norbornene, 5
-Ethylidene-2-norbornene and the like, and ring opening obtained by ring-opening polymerization using dicyclopentadiene, 2,3-dihydrodicyclopentadiene, and their alkyl-substituted compounds such as methyl and ethyl. There is a saturated polymer produced by hydrogenating the polymer.

【0007】また、一般式(2)で示される環状オレフ
ィン系モノマーの重合体、或いはエチレン、プロピレ
ン、イソプロピレン、1−ブテン、3−メチル−1−ブ
テン、1−ペンテン、1−ヘキセン等のα−オレフィン
と一般式(2)で示される環状オレフィン系モノマーの
ランダム共重合体を水素添加することにより製造される
飽和重合体を用いても良い。
Further, a polymer of a cyclic olefinic monomer represented by the general formula (2), or ethylene, propylene, isopropylene, 1-butene, 3-methyl-1-butene, 1-pentene, 1-hexene, etc. A saturated polymer produced by hydrogenating a random copolymer of α-olefin and the cyclic olefin-based monomer represented by the general formula (2) may be used.

【0008】[0008]

【化2】 (ただし、上記式(2)中、R1およびR8は水素及びハ
ロゲン原子及び炭化水素残基よりなる群から選ばれ、R
5〜R8は互いに環を形成しても良い。)
[Chemical 2] (However, in the above formula (2), R 1 and R 8 are selected from the group consisting of hydrogen, a halogen atom and a hydrocarbon residue;
5 to R 8 may form a ring with each other. )

【0009】さらには、一般式(3)で示される環状オ
レフィン系モノマーの重合体、或いはエチレン、プロピ
レン、イソプロピレン、1−ブテン、3−メチル−1−
ブテン、1−ペンテン、1−ヘキセン等のα−オレフィ
ンと一般式(3)で示される環状オレフィン系モノマー
のランダム共重合体を水素添加することにより製造され
る飽和重合体を用いても良い。
Further, a polymer of a cyclic olefin monomer represented by the general formula (3), or ethylene, propylene, isopropylene, 1-butene, 3-methyl-1-
A saturated polymer produced by hydrogenating a random copolymer of an α-olefin such as butene, 1-pentene, 1-hexene and the cyclic olefin monomer represented by the general formula (3) may be used.

【0010】[0010]

【化3】 (ただし、上記式(2)中、R1およびR12は水素及び
ハロゲン原子及び炭化水素残基よりなる群から選ばれ、
9〜R12は互いに環を形成しても良い。)
[Chemical 3] (However, in the above formula (2), R 1 and R 12 are selected from the group consisting of hydrogen, a halogen atom and a hydrocarbon residue,
R 9 to R 12 may form a ring with each other. )

【0011】一般式(1)〜(3)記載の飽和したポリ
オレフィン系樹脂を原材料として生化学的活性物質の固
定化の支持体となる基材を成形するが、基材の成形方
法、形状には特に制限はない。成形性を考慮すると、押
出成形、圧縮成形、射出成形等の方法が好適であり、ま
た試験方法やハンドリングを考慮し、フィルムシート、
ビーズ、スライド板等を基材の形状とすることが好まし
い。
A base material which is a support for immobilization of a biochemically active substance is formed by using a saturated polyolefin resin represented by the general formulas (1) to (3) as a raw material. Is not particularly limited. In consideration of moldability, methods such as extrusion molding, compression molding, and injection molding are suitable, and in consideration of the test method and handling, a film sheet,
It is preferable to form beads, slide plates and the like into the shape of the base material.

【0012】次に、これら基材に酸化珪素のドライコー
ティングを施して、基材の表面に厚さ500Å以下の珪
素化合物からなる層を導入する。珪素化合物の層の厚さ
が500Åを超える場合、マイクロチップ用基板に曲げ
応力をかけたときに表面にクラックが発生する可能性が
あり、表面の均一性、平面等の形状特性を損ないマイク
ロチップ用基板として使用することができない。
Next, these substrates are dry-coated with silicon oxide to introduce a layer of a silicon compound having a thickness of 500 Å or less on the surface of the substrates. If the thickness of the silicon compound layer exceeds 500Å, cracks may occur on the surface when a bending stress is applied to the microchip substrate, and the surface uniformity and flatness and other shape characteristics are not impaired. It cannot be used as a substrate.

【0013】ドライコーティングの方法には特に制限は
ないが、真空蒸着法、スパッタリング法、CVD法は簡
便かつ形状に制限されず、珪素化合物の導入量を調節し
やすく好適であり、もっとも好ましいのは真空蒸着法で
ある。上記記載の方法により、水溶液中においてこの支
持体の表面に存在する珪素原子ごとに水酸基が導入さ
れ、他の手法による処理を施した場合よりも多く導入さ
れることになり、生化学的活性物質の固定化を行なう上
で必要な官能基を高密度に導入することが可能である。
The method of dry coating is not particularly limited, but the vacuum deposition method, the sputtering method, and the CVD method are simple and not limited to the shape, and the amount of the silicon compound introduced is easily controlled, which is preferable. It is a vacuum deposition method. By the method described above, a hydroxyl group is introduced for each silicon atom present on the surface of this support in an aqueous solution, and more hydroxyl groups are introduced than in the case where treatment is performed by another method. It is possible to introduce a high density of functional groups required for immobilization of.

【0014】[0014]

【実施例】次に本発明の実施例について説明する。 (実施例1)エチレンとジシクロペンタジエンのランダ
ム共重合体の水素添加物を用いてマイクロチップ用基板
(76mm×26mm×1mm)を射出成形した。その
後、減圧下で一酸化珪素からなる蒸着源に電子銃を照射
して加熱し、酸化珪素の蒸気を発生させ、層の厚さが2
50Åとなるように真空蒸着を施した。
EXAMPLES Next, examples of the present invention will be described. Example 1 A microchip substrate (76 mm × 26 mm × 1 mm) was injection-molded using a hydrogenated product of a random copolymer of ethylene and dicyclopentadiene. Then, the vapor deposition source made of silicon monoxide is irradiated with an electron gun under reduced pressure and heated to generate vapor of silicon oxide.
It was vacuum-deposited so as to be 50Å.

【0015】(比較例1)エチレンとジシクロペンタジ
エンのランダム共重合体の水素添加物を用いてマイクロ
チップ用基板(76mm×26mm×1mm)を射出成
形した。その後、減圧下で酸素ガスを通気しながら高周
波低温プラズマを発生させて10分間の酸化処理を施し
た。
Comparative Example 1 A microchip substrate (76 mm × 26 mm × 1 mm) was injection-molded using a hydrogenated product of a random copolymer of ethylene and dicyclopentadiene. After that, high-frequency low-temperature plasma was generated while oxygen gas was passed under a reduced pressure to perform an oxidation treatment for 10 minutes.

【0016】(比較例2)石英ガラス製のマイクロチッ
プ用基板(76mm×26mm×1mm)を用いた。
Comparative Example 2 A microchip substrate (76 mm × 26 mm × 1 mm) made of quartz glass was used.

【0017】実施例、各比較例のマイクロチップ用基板
に一級アミノシランカップリング剤5%メタノール溶液
に浸漬し、2時間放置してアミノシラン処理を行ない、
これにグルタルアルデヒド5%水溶液に浸漬して、アル
デヒド基を導入した。これらにビオチンヒドラジドを
0.1mg/mlに調製した溶液0.1μLをスポット
し、37℃湿度99%で120分放置して基板にビオチ
ンヒドラジドを固相化する。次に未固定のビオチンヒド
ラジドを洗浄除去し、スキムミルクを1重量%に調製し
た溶液に基板を浸漬し37℃で90分放置してブロッキ
ング処理する。未固定のスキムミルクを洗浄除去し、ロ
ーダミン標識アビジンを1μg/mlに調製した溶液に
浸漬し、37℃で30分放置してビオチンとローダミン
標識アビジンの結合をおこなう。未固定のローダミン標
識アビジンを洗浄除去し、励起波長488nm、測定波
長515nmで蛍光強度を測定、比較評価した。評価結
果を表1に示す。これより上記実施例では比較例1の手
法よりも高いビオチンの吸着能を有し、比較例2のガラ
ス基板と同等であることを示した。
The microchip substrates of Examples and Comparative Examples were immersed in a 5% methanol solution of a primary aminosilane coupling agent and left for 2 hours for aminosilane treatment.
This was immersed in a 5% aqueous solution of glutaraldehyde to introduce an aldehyde group. 0.1 μL of a solution prepared by adjusting biotin hydrazide to 0.1 mg / ml is spotted on these and left to stand at 37 ° C. and 99% humidity for 120 minutes to immobilize biotin hydrazide on the substrate. Next, unfixed biotin hydrazide is removed by washing, and the substrate is immersed in a solution prepared by adding 1% by weight of skim milk and left at 37 ° C. for 90 minutes for blocking treatment. Unfixed skim milk is washed away, immersed in a solution of rhodamine-labeled avidin adjusted to 1 μg / ml, and left at 37 ° C. for 30 minutes to bind biotin and rhodamine-labeled avidin. The unfixed rhodamine-labeled avidin was removed by washing, and the fluorescence intensity was measured at an excitation wavelength of 488 nm and a measurement wavelength of 515 nm for comparative evaluation. The evaluation results are shown in Table 1. From this, it was shown that the above-mentioned Example has a higher biotin adsorption capacity than the method of Comparative Example 1 and is equivalent to the glass substrate of Comparative Example 2.

【0018】[0018]

【表1】 [Table 1]

【0019】[0019]

【発明の効果】本発明の飽和環状ポリオレフィン系樹脂
の表面に珪素化合物の層が存在するマイクロチップ用基
板は、生化学的活性物質を固定化する官能基を高密度に
保持できる、簡便で安価な方法により製造することが可
能である。
Industrial Applicability The microchip substrate of the present invention, in which a silicon compound layer is present on the surface of a saturated cyclic polyolefin resin, is capable of holding functional groups for immobilizing biochemically active substances at a high density, simple and inexpensive. Can be manufactured by various methods.

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) // C08L 65:00 C12N 15/00 F Fターム(参考) 4B024 AA19 AA20 CA01 CA09 CA11 HA12 HA20 4B029 AA07 AA21 BB15 BB20 CC02 CC03 CC08 FA12 FA15 4F006 AA11 AA12 AB76 BA00 CA00 DA01 ─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. 7 Identification code FI theme code (reference) // C08L 65:00 C12N 15/00 FF term (reference) 4B024 AA19 AA20 CA01 CA09 CA11 HA12 HA20 4B029 AA07 AA21 BB15 BB20 CC02 CC03 CC08 FA12 FA15 4F006 AA11 AA12 AB76 BA00 CA00 DA01

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 飽和環状ポリオレフィン系樹脂により成
形された基板であって、表面の少なくとも一部に珪素化
合物からなる層が形成されていることを特徴とするマイ
クロチップ用基板。
1. A substrate for a microchip, which is a substrate molded from a saturated cyclic polyolefin resin and has a layer made of a silicon compound formed on at least a part of its surface.
【請求項2】 飽和環状ポリオレフィン系樹脂にノルボ
ルネンまたはノルボルネン誘導物の少なくとも一つがモ
ノマー単位として含まれている請求項1記載のマイクロ
チップ用基板。
2. The substrate for a microchip according to claim 1, wherein the saturated cyclic polyolefin resin contains at least one of norbornene or a norbornene derivative as a monomer unit.
【請求項3】 珪素化合物からなる層が、厚さ500Å
以下である請求項1または請求項2記載のマイクロチッ
プ用基板。
3. A layer made of a silicon compound has a thickness of 500Å
The substrate for microchip according to claim 1 or 2, which is as follows.
【請求項4】 ドライコーティング法を用いて飽和環状
ポリオレフィン系樹脂の表面に珪素化合物からなる層を
形成することを特徴とするマイクロチップ用基板の製造
方法。
4. A method for producing a substrate for a microchip, which comprises forming a layer made of a silicon compound on the surface of a saturated cyclic polyolefin resin by using a dry coating method.
【請求項5】 ドライコーティング法が真空蒸着法、ス
パッタリング法、CVD法のいずれかであることを特徴
とする請求項4記載のマイクロチップ用基板の製造方
法。
5. The method for manufacturing a microchip substrate according to claim 4, wherein the dry coating method is any one of a vacuum deposition method, a sputtering method and a CVD method.
JP2002090244A 2002-03-28 2002-03-28 Substrate for microchip and method for manufacturing the same Pending JP2003286358A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008007787A1 (en) * 2006-07-13 2008-01-17 Kyoto University Method of bonding resins by light irradiation and process for producing resin article
JP2008224327A (en) * 2007-03-09 2008-09-25 Fujifilm Corp Biochip
JP2013535541A (en) * 2010-07-30 2013-09-12 ソニー株式会社 Polymer compound substrate having glass-like surface, and chip made of said polymer compound substrate

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008007787A1 (en) * 2006-07-13 2008-01-17 Kyoto University Method of bonding resins by light irradiation and process for producing resin article
JP2008224327A (en) * 2007-03-09 2008-09-25 Fujifilm Corp Biochip
JP2013535541A (en) * 2010-07-30 2013-09-12 ソニー株式会社 Polymer compound substrate having glass-like surface, and chip made of said polymer compound substrate
JP2016222913A (en) * 2010-07-30 2016-12-28 ソニー株式会社 Polymer compound substrate having glass-like surface and chip manufactured by polymer compound substrate
US9586810B2 (en) 2010-07-30 2017-03-07 Sony Corporation Polymeric substrate having an etched-glass-like surface and a microfluidic chip made of said polymeric substrate

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