JP2003282991A - Giant magnetostrictive linear actuator - Google Patents
Giant magnetostrictive linear actuatorInfo
- Publication number
- JP2003282991A JP2003282991A JP2002081799A JP2002081799A JP2003282991A JP 2003282991 A JP2003282991 A JP 2003282991A JP 2002081799 A JP2002081799 A JP 2002081799A JP 2002081799 A JP2002081799 A JP 2002081799A JP 2003282991 A JP2003282991 A JP 2003282991A
- Authority
- JP
- Japan
- Prior art keywords
- giant magnetostrictive
- magnetostrictive element
- pair
- linear actuator
- movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000036316 preload Effects 0.000 claims abstract description 36
- 230000033001 locomotion Effects 0.000 claims description 9
- 239000000696 magnetic material Substances 0.000 claims description 5
- 230000005284 excitation Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 25
- 230000008602 contraction Effects 0.000 description 11
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 5
- 230000003321 amplification Effects 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000004323 axial length Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 241001517546 Etrema Species 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 229910001329 Terfenol-D Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- KBQHZAAAGSGFKK-UHFFFAOYSA-N dysprosium atom Chemical compound [Dy] KBQHZAAAGSGFKK-UHFFFAOYSA-N 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
(57)【要約】
【課題】 振動の小さな超磁歪リニアアクチュエータを
提供する。
【解決手段】 極性が交番する磁界を発生させるための
励磁コイル1と、励磁コイル1による極性が交番する磁
界の強さによって長さが弾性変化する超磁歪素子2と、
超磁歪素子2の長さが弾性変化する方向におけるその超
磁歪素子2の両側にそれぞれ設けられる一対の可動部3
と、一対の可動部3に対し超磁歪素子2側へ予荷重を与
える一対の予荷重皿バネ4とを備えた。そして、各可動
部3の作用点32となる一端と他端31との間の支点寄
りの両可動部3に超磁歪素子2の両端がそれぞれ接する
配置構造にした。
(57) [Problem] To provide a giant magnetostrictive linear actuator with small vibration. SOLUTION: An exciting coil 1 for generating a magnetic field of alternating polarity, a giant magnetostrictive element 2 whose length is elastically changed by the strength of the magnetic field of alternating polarity by the exciting coil 1,
A pair of movable portions 3 provided on both sides of the giant magnetostrictive element 2 in a direction in which the length of the giant magnetostrictive element 2 elastically changes.
And a pair of preload disc springs 4 for applying a preload to the pair of movable parts 3 on the giant magnetostrictive element 2 side. The giant magnetostrictive element 2 has an arrangement in which both ends of the giant magnetostrictive element 2 are in contact with both movable parts 3 near a fulcrum between one end, which is the point of action 32 of each movable part 3, and the other end 31.
Description
【0001】[0001]
【発明の属する技術分野】本発明は、0.1mm〜1m
m程度の大変位振動が可能な超磁歪リニアアクチュエー
タに関するものである。TECHNICAL FIELD The present invention relates to 0.1 mm to 1 m.
The present invention relates to a giant magnetostrictive linear actuator capable of large displacement vibration of about m.
【0002】[0002]
【従来の技術】図19は従来の超磁歪アクチュエータの
構成図である。この超磁歪アクチュエータは、駆動力を
発生させる超磁歪素子2と、超磁歪素子2と接するよう
にして配設され出力を外部に伝える出力軸3Xと、磁気
バイアスを超磁歪素子2に与えるための永久磁石8と、
磁気回路を構成するヨーク7Xと、超磁歪素子2に予荷
重を付与する予荷重ばね4Xと、起磁力を付与するため
の励磁コイル1とからなる。2. Description of the Related Art FIG. 19 is a block diagram of a conventional giant magnetostrictive actuator. This giant magnetostrictive actuator includes a giant magnetostrictive element 2 that generates a driving force, an output shaft 3X that is arranged so as to be in contact with the giant magnetostrictive element 2 and that transmits an output to the outside, and a magnetic bias that applies to the giant magnetostrictive element 2. Permanent magnet 8 and
It comprises a yoke 7X forming a magnetic circuit, a preload spring 4X for applying a preload to the giant magnetostrictive element 2, and an exciting coil 1 for applying a magnetomotive force.
【0003】励磁コイル1に正弦波または矩形波等の交
流電流を与えると、図20に示すように、ヨーク7Xお
よび超磁歪素子2で構成される磁路中を通る磁束も交流
的に変化する。これにより、磁歪が生じ、駆動周波数と
同じ周波数の微小振動が生じる。その振動出力が出力軸
3Xを通して外部へ伝達される。When an alternating current such as a sine wave or a rectangular wave is applied to the exciting coil 1, as shown in FIG. 20, the magnetic flux passing through the magnetic path formed by the yoke 7X and the giant magnetostrictive element 2 also changes in an alternating manner. . As a result, magnetostriction occurs and minute vibration having the same frequency as the driving frequency occurs. The vibration output is transmitted to the outside through the output shaft 3X.
【0004】図21は超磁歪リニアアクチュエータの構
成図である(特願2001−262875)。この超磁
歪リニアアクチュエータは、L字状の可動部3Yを用
い、てこの原理と機械的共振を利用した振幅拡大機構を
有している。また、図22に示すように、L字状の可動
部3Yを一対用いてカウンタ動作を実現した超磁歪リニ
アアクチュエータも提案されている。なお、図21,図
22中の4は予荷重皿バネである。FIG. 21 is a block diagram of a giant magnetostrictive linear actuator (Japanese Patent Application No. 2001-262875). This giant magnetostrictive linear actuator uses an L-shaped movable portion 3Y and has an amplitude enlargement mechanism utilizing the lever principle and mechanical resonance. Further, as shown in FIG. 22, there is also proposed a giant magnetostrictive linear actuator that realizes a counter operation by using a pair of L-shaped movable portions 3Y. In addition, 4 in FIGS. 21 and 22 is a preload disc spring.
【0005】[0005]
【発明が解決しようとする課題】図19のアクチュエー
タでは、励磁コイル1を励磁することにより、出力軸3
Xに出力として微小振動が生じるが、出力変位は、超磁
歪素子2の伸縮による変位の振幅そのものであり、超磁
歪素子2の軸方向の長さに対して最大1000〜200
0ppmの微小振動しか取り出せない。例えば、超磁歪
素子の軸方向の長さを10mmとすると、最大10〜2
0μm程度の振動となる。In the actuator of FIG. 19, the output coil 3 is excited by exciting the exciting coil 1.
Although a small vibration is generated as an output at X, the output displacement is the amplitude itself of the displacement due to the expansion / contraction of the giant magnetostrictive element 2, and the maximum is 1000 to 200 with respect to the axial length of the giant magnetostrictive element 2.
Only 0ppm of minute vibration can be taken out. For example, assuming that the axial length of the giant magnetostrictive element is 10 mm, the maximum is 10 to 2
The vibration is about 0 μm.
【0006】図21のアクチュエータでは、てこの原理
と機械的共振を利用した振幅拡大機構により大振幅のリ
ニア駆動が可能になるが、可動部3Yが超磁歪素子2の
伸縮方向に対してほぼ直交方向に運動するので、振動が
発生する。In the actuator shown in FIG. 21, a large-amplitude linear drive can be performed by an amplitude expansion mechanism utilizing the lever principle and mechanical resonance, but the movable portion 3Y is substantially orthogonal to the expansion / contraction direction of the giant magnetostrictive element 2. Since it moves in the direction, vibration occurs.
【0007】図22のアクチュエータでは、一対の可動
部3Yが互いに逆向きに運動するので可動部3Yの運動
方向の振動は大幅に低減できるが、超磁歪素子2の伸縮
方向の振動を抑えることができない。In the actuator shown in FIG. 22, since the pair of movable portions 3Y move in opposite directions to each other, vibration in the moving direction of the movable portion 3Y can be greatly reduced, but vibration in the expansion / contraction direction of the giant magnetostrictive element 2 can be suppressed. Can not.
【0008】なお、図21,図22のアクチュエータは
開磁路構造であり、磁気効率が悪いという問題もある。The actuators shown in FIGS. 21 and 22 have an open magnetic circuit structure, and there is a problem that the magnetic efficiency is poor.
【0009】本発明は、上記事情に鑑みてなされたもの
であり、振動の小さな超磁歪リニアアクチュエータを提
供することを目的とする。The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a giant magnetostrictive linear actuator with small vibration.
【0010】[0010]
【課題を解決するための手段】上記課題を解決するため
の請求項1記載の発明の超磁歪リニアアクチュエータ
は、極性が交番する磁界を発生させるための励磁コイル
と、この励磁コイルによる極性が交番する磁界の強さに
よって長さが弾性変化する超磁歪素子と、この超磁歪素
子の長さが弾性変化する方向におけるその超磁歪素子の
両側にそれぞれ設けられる一対の可動部と、これら一対
の可動部に対し超磁歪素子側へ予荷重を与える付加手段
とを備え、各可動部の作用点となる一端と他端との間の
支点寄りの両可動部に上記超磁歪素子の両端がそれぞれ
接することを特徴とする。A giant magnetostrictive linear actuator according to a first aspect of the present invention for solving the above problems is an exciting coil for generating a magnetic field having alternating polarities, and the polarities of the exciting coils are alternating. A giant magnetostrictive element whose length changes elastically depending on the strength of the magnetic field, a pair of movable parts provided on both sides of the giant magnetostrictive element in the direction in which the length of this giant magnetostrictive element changes elastically, and a pair of these movable parts. And an additional means for applying a preload to the giant magnetostrictive element side, and both ends of the giant magnetostrictive element are in contact with both movable portions near the fulcrum between one end and the other end, which are the action points of each movable portion. It is characterized by
【0011】請求項1記載の発明は、請求項1記載の超
磁歪リニアアクチュエータにおいて、励磁コイルおよび
超磁歪素子は、固定部材の両側に設けられる2組の励磁
コイルおよび超磁歪素子により構成され、一方の組みの
超磁歪素子の一端と他方の組みの超磁歪素子の一端とが
一対の可動部とそれぞれ接することを特徴とする。According to a first aspect of the present invention, in the giant magnetostrictive linear actuator according to the first aspect, the exciting coil and the giant magnetostrictive element are composed of two sets of exciting coil and giant magnetostrictive element provided on both sides of the fixing member, One of the sets of giant magnetostrictive elements and one end of the other set of giant magnetostrictive elements are in contact with the pair of movable portions, respectively.
【0012】請求項3記載の発明は、請求項2記載の超
磁歪リニアアクチュエータにおいて、超磁歪素子への予
荷重をてこの原理を用いて付加することを特徴とする。The invention according to claim 3 is characterized in that, in the giant magnetostrictive linear actuator according to claim 2, a preload is applied to the giant magnetostrictive element using the lever principle.
【0013】請求項4記載の発明は、請求項1または2
記載の超磁歪リニアアクチュエータにおいて、一対の可
動部をこれらの各他端側で支持するとともに一対の可動
部間の励磁コイルおよび超磁歪素子を支持する支持体
と、一対の可動部間に設けられこれらの間の励磁コイル
および超磁歪素子を介して支持体と対向する磁性部材と
を備え、一対の可動部および支持体は磁性体であり、超
磁歪素子、一対の可動部、支持体および磁性部材により
閉磁路を形成することを特徴とする。The invention according to claim 4 is the invention according to claim 1 or 2.
In the giant magnetostrictive linear actuator described above, a pair of movable portions are provided between the movable body and a support body that supports the exciting coil and the giant magnetostrictive element between the movable portions and the pair of movable portions. The pair of movable portions and the support body are magnetic bodies, and the pair of movable portions and the support body are magnetic bodies. The pair of movable portions and the support body are magnetic bodies. It is characterized in that a closed magnetic circuit is formed by the members.
【0014】請求項5記載の発明は、請求項4記載の超
磁歪リニアアクチュエータにおいて、磁性部材と一対の
可動部との間の空隙が、可動部の運動に依らず一定とな
るように配置されることを特徴とする。According to a fifth aspect of the present invention, in the giant magnetostrictive linear actuator according to the fourth aspect, the gap between the magnetic member and the pair of movable portions is arranged to be constant regardless of the movement of the movable portions. It is characterized by
【0015】請求項6記載の発明の超磁歪リニアアクチ
ュエータは、磁性材料により一の開口点を持つ断面C字
状に形成されるヨークを備えるとともに、極性が交番す
る磁界を発生させるための励磁コイルと、この励磁コイ
ルによる極性が交番する磁界の強さによって長さが弾性
変化する超磁歪素子と、ヨークの開口点から一部が外部
に突出する可動部と、超磁歪素子の長さが弾性変化する
方向におけるその超磁歪素子の両側に予荷重を付加する
付加手段とを上記ヨークの内部に備え、励磁コイルおよ
び超磁歪素子は可動部の残部の両側に設けられる2組の
励磁コイルおよび超磁歪素子により構成され、付加手段
はヨークの内壁に固定されて一方の組みの超磁歪素子の
一端と他方の組みの超磁歪素子の一端とに予荷重を与
え、可動部が自己の残部先端寄りで2組の超磁歪素子に
より狭持されることを特徴とする。A giant magnetostrictive linear actuator according to a sixth aspect of the present invention includes a yoke formed of a magnetic material in a C-shaped cross section having one opening point, and an exciting coil for generating a magnetic field having alternating polarities. And a giant magnetostrictive element whose length elastically changes depending on the strength of a magnetic field whose polarity is alternated by this exciting coil, a movable part partially protruding outside from the opening point of the yoke, and the length of the giant magnetostrictive element being elastic. An additional means for applying a preload to both sides of the giant magnetostrictive element in the changing direction is provided inside the yoke, and the exciting coil and the giant magnetostrictive element are provided with two sets of exciting coils and supermagnets provided on both sides of the rest of the movable part. The addition means is composed of a magnetostrictive element, and the adding means is fixed to the inner wall of the yoke to apply a preload to one end of one set of supermagnetostrictive elements and one end of the other set of supermagnetostrictive elements, so that the movable part is self-contained. Characterized in that it is sandwiched by two sets of super-magnetostrictive element in parts tip-sided.
【0016】ここで、本発明では、可動部の運動方向と
超磁歪素子の伸縮方向とを一致させた振幅拡大機構によ
り低振動化を図る。また、閉磁路構造により高効率化を
実現する。Here, in the present invention, the vibration is reduced by the amplitude enlarging mechanism in which the moving direction of the movable portion and the expanding / contracting direction of the giant magnetostrictive element coincide with each other. Further, the closed magnetic circuit structure realizes high efficiency.
【0017】一般的な磁歪素子は、純Ni、Fe−Ni
系合金、NiやZnを添加したフェライト(酸化鉄)な
どの材料を用いて形成され、磁歪により全長の数十pp
m程度の長さ弾性変化する。これに対して、超磁歪材料
は、テルビウム(Tb)やディスプロジウム(Dy)な
どの希土類元素と鉄の合金により成り、磁歪により全長
の1000〜2000ppm程度の長さ弾性変化する。
このような超磁歪素子は、米国海軍によって開発され、
ETREMA社によって実用化され、Terfenol
−D(Tb0.3Dy0.7Fe1.91)などが知られている。
本発明ではこのような超磁歪素子などが用いられる。A general magnetostrictive element is pure Ni or Fe-Ni.
It is formed using a material such as a Ni-based alloy or ferrite (iron oxide) to which Ni or Zn is added, and its total length is several tens pp due to magnetostriction.
Elasticity changes about m. On the other hand, the giant magnetostrictive material is made of an alloy of rare earth elements such as terbium (Tb) and dysprosium (Dy) and iron, and elastically changes by 1000 to 2000 ppm of the total length due to magnetostriction.
Such a giant magnetostrictive element was developed by the US Navy,
Commercialized by ETREMA, Terfenol
Such as -D (Tb 0.3 Dy 0.7 Fe 1.91 ) is known.
In the present invention, such a giant magnetostrictive element or the like is used.
【0018】上記構成の本発明によれば、てこ機構によ
る増幅率、および共振系による増幅率を乗じたものが出
力振幅となるため、大振幅のリニアアクチュエータを実
現でき、可動部の出力の運動方向と超磁歪素子の伸縮方
向とを一致させた振幅拡大機構により振動を抑え、閉磁
路構造により高効率化が可能となる。According to the present invention having the above-mentioned structure, since the output amplitude is obtained by multiplying the amplification factor by the lever mechanism and the amplification factor by the resonance system, a large-amplitude linear actuator can be realized, and the movement of the output of the movable part can be realized. Vibration can be suppressed by the amplitude magnifying mechanism in which the direction and the expansion / contraction direction of the giant magnetostrictive element are matched, and the efficiency can be improved by the closed magnetic circuit structure.
【0019】[0019]
【発明の実施の形態】(第1実施形態)図1は本発明に
係る第1実施形態の超磁歪リニアアクチュエータの構成
図である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) FIG. 1 is a block diagram of a giant magnetostrictive linear actuator according to a first embodiment of the present invention.
【0020】第1実施形態の超磁歪リニアアクチュエー
タは、図1に示すように、極性が交番する磁界を発生さ
せるための励磁コイル1と、この励磁コイル1の軸内に
設けられ励磁コイル1による極性が交番する磁界の強さ
によって長さが弾性変化する棒状の超磁歪素子2と、こ
の超磁歪素子2の長さが弾性変化する方向におけるその
超磁歪素子2の両側にそれぞれ設けられる一対の可動部
3と、これら一対の可動部3に対し超磁歪素子2側へ予
荷重を与える一対の予荷重皿バネ4と、一対の可動部3
間の励磁コイル1および超磁歪素子2を支持する支持体
5とを備えている。In the giant magnetostrictive linear actuator of the first embodiment, as shown in FIG. 1, an exciting coil 1 for generating a magnetic field having alternating polarities and an exciting coil 1 provided in the axis of the exciting coil 1 are used. A rod-shaped giant magnetostrictive element 2 whose length elastically changes depending on the strength of a magnetic field of alternating polarity, and a pair of giant magnetostrictive elements 2 provided on both sides of the giant magnetostrictive element 2 in the direction in which the length of the giant magnetostrictive element 2 elastically changes. Movable part 3, a pair of preload disc springs 4 for applying a preload to the pair of movable parts 3 toward the giant magnetostrictive element 2, and a pair of movable parts 3
And an exciting coil 1 and a support 5 for supporting the giant magnetostrictive element 2.
【0021】この支持体5は断面コ字状に形成されてお
り、支持体5の各端部51の内面に予荷重皿バネ4が固
着されている。そして、各可動部3の作用点32となる
一端と他端31との間の支点寄りの両可動部3に超磁歪
素子2の両端がそれぞれ接する配置構造になっている。
ただし、図1の例では、超磁歪素子2の両端に半球状の
駆動力伝達部材21が設けられており、これらの駆動力
伝達部材21の極点が動作点となって両可動部3と接す
る。また、超磁歪リニアアクチュエータは、各可動部の
作用点32側が超磁歪素子2の伸縮による振動に共振す
るように構成される。さらに、支点は、動作点の上側
(作用点32側)のその動作点寄りに設けられる。The support 5 has a U-shaped cross section, and the preload disc spring 4 is fixed to the inner surface of each end 51 of the support 5. Further, both ends of the giant magnetostrictive element 2 are in contact with both movable parts 3 near the fulcrum between one end serving as the action point 32 of each movable part 3 and the other end 31.
However, in the example of FIG. 1, hemispherical driving force transmission members 21 are provided at both ends of the giant magnetostrictive element 2, and the poles of these driving force transmission members 21 are operating points and contact both movable parts 3. . Further, the giant magnetostrictive linear actuator is configured such that the action point 32 side of each movable portion resonates with the vibration due to the expansion and contraction of the giant magnetostrictive element 2. Further, the fulcrum is provided above the operating point (on the side of the action point 32) and near the operating point.
【0022】ここで、励磁コイル1の励磁周波数の2倍
の周波数で各可動部3が運動する。振幅は、支点から動
作点までの長さをl1 、支点から作用点32までの長さ
をl 2 とすると、超磁歪素子2の伸縮×0.5×l2 /
l1 ×共振増幅率で拡大される。Here, twice the exciting frequency of the exciting coil 1
Each movable part 3 moves at the frequency of. Amplitude changes from fulcrum
The length to the point is l1, Length from fulcrum to action point 32
L 2Then, expansion / contraction of the giant magnetostrictive element 2 × 0.5 × l2/
l1× Expanded by resonance amplification factor.
【0023】このような構造の超磁歪リニアアクチュエ
ータによれば、可動部3の作用点32の振動方向と超磁
歪素子2の伸縮方向とが一致し、そして一対の可動部3
が互いに逆方向に運動するので、各運動による振動がキ
ャンセルされることになり、振動の小さな超磁歪リニア
アクチュエータを実現することができる。According to the giant magnetostrictive linear actuator having such a structure, the vibration direction of the action point 32 of the movable portion 3 and the expansion / contraction direction of the giant magnetostrictive element 2 coincide with each other, and the pair of movable portions 3
Move in directions opposite to each other, so that the vibrations caused by the respective motions are canceled and a giant magnetostrictive linear actuator with small vibration can be realized.
【0024】なお、第1実施形態では、予荷重を付加す
る付加手段として皿バネが使用される構成になっている
が、本発明の付加手段は、これに限らず、例えばコイル
バネ等の他の弾性体でもよい。In the first embodiment, the disc spring is used as the addition means for applying the preload, but the addition means of the present invention is not limited to this, and other means such as a coil spring may be used. It may be an elastic body.
【0025】また、磁気バイアスをかけない構成になっ
ているが、磁石または直流電流により磁気バイアスをか
ける構成でもよい。磁気バイアスをかけると、励磁電流
の周波数と同じ周波数で可動部が運動する。Although the magnetic bias is not applied, the magnetic bias may be applied by a magnet or a direct current. When a magnetic bias is applied, the movable part moves at the same frequency as the exciting current frequency.
【0026】(第2実施形態)図2は本発明に係る第2
実施形態の超磁歪リニアアクチュエータの構成図であ
る。(Second Embodiment) FIG. 2 shows a second embodiment of the present invention.
It is a block diagram of the giant magnetostrictive linear actuator of embodiment.
【0027】第2実施形態の超磁歪リニアアクチュエー
タは、図2に示すように、第1実施形態との相違点とし
て、励磁コイルおよび超磁歪素子が、支持体5に連設さ
れる板状の固定部材52の両側に設けられる2組の励磁
コイル1A,1Bおよび超磁歪素子2A,2Bにより構
成され、一方の組みの超磁歪素子2Aの一端と他方の組
みの超磁歪素子2Bの一端とが一対の可動部3とそれぞ
れ接する構造になっている。As shown in FIG. 2, the giant magnetostrictive linear actuator of the second embodiment differs from the giant magnetostrictive actuator of the first embodiment in that the exciting coil and the giant magnetostrictive element are formed in a plate shape in which the support 5 is continuously provided. It is composed of two sets of exciting coils 1A and 1B and giant magnetostrictive elements 2A and 2B provided on both sides of the fixing member 52, and one end of one pair of giant magnetostrictive element 2A and one end of the other pair of giant magnetostrictive element 2B are provided. The structure is such that it contacts the pair of movable parts 3, respectively.
【0028】このような構造の超磁歪リニアアクチュエ
ータによれば、2つの超磁歪素子2A,2Bの各他端が
固定部材52に固定されるので、予荷重皿バネ4による
予荷重の調節を左右独立で行うことができる。これによ
り、初期調節が容易となり生産性が向上する。According to the giant magnetostrictive linear actuator having such a structure, since the other ends of the two giant magnetostrictive elements 2A and 2B are fixed to the fixing member 52, the adjustment of the preload by the preload disc spring 4 can be adjusted to the left and right. Can be done independently. This facilitates initial adjustment and improves productivity.
【0029】(第3実施形態)図3は本発明に係る第3
実施形態の超磁歪リニアアクチュエータの構成図であ
る。(Third Embodiment) FIG. 3 shows a third embodiment of the present invention.
It is a block diagram of the giant magnetostrictive linear actuator of embodiment.
【0030】第3実施形態の超磁歪リニアアクチュエー
タは、第2実施形態との相違点として、超磁歪素子への
予荷重をてこの原理を用いて付加する構造になってい
る。図3の例では、励磁コイル1A,1Bおよび超磁歪
素子2A,2Bの作用点32側の各可動部3に孔3aが
穿設され、両孔3aに棒状の予荷重付加用部材4Aが挿
通されている。そして、予荷重付加用部材4Aの両端
に、外形寸法が大きい端部41Aが固着され、各端部4
1Aと可動部3との間に、予荷重付加用部材4Aに挿通
された予荷重付加バネ42Aが設けられている。The difference from the second embodiment is that the giant magnetostrictive linear actuator of the third embodiment has a structure in which a preload is applied to the giant magnetostrictive element using the lever principle. In the example of FIG. 3, a hole 3a is formed in each movable part 3 of the exciting coils 1A and 1B and the giant magnetostrictive elements 2A and 2B on the side of the action point 32, and a rod-shaped preloading member 4A is inserted into both holes 3a. Has been done. Then, the end portions 41A having large outer dimensions are fixed to both ends of the preload applying member 4A.
A preload addition spring 42A inserted through the preload addition member 4A is provided between 1A and the movable portion 3.
【0031】このような構造の超磁歪リニアアクチュエ
ータによれば、てこの原理により、予荷重を増幅するこ
とができ、調整の幅が広がる。また、予荷重を超磁歪素
子の伸縮方向に設置する必要がなく、横幅を小さくする
ことができる。According to the giant magnetostrictive linear actuator having such a structure, the preload can be amplified by the lever principle, and the range of adjustment can be widened. Further, it is not necessary to install a preload in the expansion / contraction direction of the giant magnetostrictive element, and the width can be reduced.
【0032】(第4実施形態)図4は本発明に係る第4
実施形態の超磁歪リニアアクチュエータの構成図、図5
は同超磁歪リニアアクチュエータの特徴となる閉磁路の
説明図、図6は同超磁歪リニアアクチュエータの比較対
照となる閉磁路の説明図である。(Fourth Embodiment) FIG. 4 shows a fourth embodiment of the present invention.
FIG. 5 is a configuration diagram of the giant magnetostrictive linear actuator of the embodiment.
FIG. 6 is an explanatory view of a closed magnetic circuit which is a characteristic of the giant magnetostrictive linear actuator, and FIG. 6 is an explanatory view of a closed magnetic circuit which is a comparison and contrast of the giant magnetostrictive linear actuator.
【0033】第4実施形態の超磁歪リニアアクチュエー
タは、第1実施形態との相違点として、図4に示すよう
に、一対の可動部3間に設けられこれらの間の励磁コイ
ル1および超磁歪素子2を介して支持体5と対向する、
例えば鉄製の磁路バイパス6を備え、一対の可動部3お
よび支持体5は磁性体であり、超磁歪素子2、一対の可
動部3、支持体5および磁路バイパス6により閉磁路を
形成する構造になっている。The difference between the giant magnetostrictive linear actuator of the fourth embodiment and that of the first embodiment is that, as shown in FIG. 4, the exciting coil 1 and the giant magnetostriction provided between a pair of movable parts 3 are provided. Faces the support 5 through the element 2,
For example, a magnetic path bypass 6 made of iron is provided, and the pair of movable parts 3 and the support body 5 are magnetic bodies, and the giant magnetostrictive element 2, the pair of movable parts 3, the support body 5 and the magnetic path bypass 6 form a closed magnetic path. It is structured.
【0034】このような構造の超磁歪リニアアクチュエ
ータによれば、図5に示すように閉磁路が形成されるか
ら、図6に示す開磁路のものよりも磁気回路の磁気抵抗
が減少し、超磁歪素子2を伸縮させるために必要な交番
磁界を発生させる電流を抑えることができるため、高効
率化を図ることができる。According to the giant magnetostrictive linear actuator having such a structure, since the closed magnetic circuit is formed as shown in FIG. 5, the magnetic resistance of the magnetic circuit is smaller than that of the open magnetic circuit shown in FIG. Since it is possible to suppress the current that generates the alternating magnetic field necessary for expanding and contracting the giant magnetostrictive element 2, it is possible to achieve high efficiency.
【0035】なお、第4実施形態では、磁路バイパス6
を第1実施形態の超磁歪リニアアクチュエータに設けた
構造になっているが、図7に示すように、磁路バイパス
6を第2実施形態の超磁歪リニアアクチュエータに設け
る構造にしてもよい。この構造でも、図8に示すように
閉磁路が形成されるから、図9に示す開磁路のものより
も磁気回路の磁気抵抗が減少し、超磁歪素子2A,2B
を伸縮させるために必要な交番磁界を発生させる電流を
抑えることができるため、高効率化を図ることができ
る。ただし、図7における固定部材52も磁性体にな
る。In the fourth embodiment, the magnetic path bypass 6
Is provided in the giant magnetostrictive linear actuator of the first embodiment, but the magnetic path bypass 6 may be provided in the giant magnetostrictive linear actuator of the second embodiment as shown in FIG. Even in this structure, since the closed magnetic circuit is formed as shown in FIG. 8, the magnetic resistance of the magnetic circuit is smaller than that of the open magnetic circuit shown in FIG. 9, and the giant magnetostrictive elements 2A and 2B are formed.
Since it is possible to suppress the current that generates the alternating magnetic field necessary for expanding and contracting, the efficiency can be improved. However, the fixing member 52 in FIG. 7 also becomes a magnetic body.
【0036】(第5実施形態)図10は本発明に係る第
5実施形態の超磁歪リニアアクチュエータの外観図、図
11は同超磁歪リニアアクチュエータの構成図、図12
は同超磁歪リニアアクチュエータを出力部側から見た図
である。(Fifth Embodiment) FIG. 10 is an external view of a giant magnetostrictive linear actuator according to a fifth embodiment of the present invention, FIG. 11 is a configuration diagram of the giant magnetostrictive linear actuator, and FIG.
FIG. 3 is a view of the giant magnetostrictive linear actuator viewed from the output side.
【0037】第5実施形態の超磁歪リニアアクチュエー
タは、第4実施形態との相違点として、磁路バイパスと
一対の可動部との間の空隙が、可動部の運動に依らず一
定となることを特徴とする。図10〜図12の例では、
磁路バイパス6Aは2枚の平行磁性体により成ってい
る。The difference between the giant magnetostrictive linear actuator of the fifth embodiment and that of the fourth embodiment is that the gap between the magnetic path bypass and the pair of movable parts is constant regardless of the movement of the movable parts. Is characterized by. In the example of FIGS. 10 to 12,
The magnetic path bypass 6A is composed of two parallel magnetic bodies.
【0038】ここで、磁路バイパス6Aから可動部3、
可動部3から磁路バイパス6Aへの磁束の流れに対して
可動部3の運動方向を垂直にすることにより、磁路中の
空隙を一定とする。Here, from the magnetic path bypass 6A to the movable portion 3,
By making the moving direction of the movable part 3 perpendicular to the flow of the magnetic flux from the movable part 3 to the magnetic path bypass 6A, the gap in the magnetic path is made constant.
【0039】図4,図7の構造では、可動部3の運動に
より磁路中の空隙が大きくなり、磁路の磁気抵抗が増加
するが、第5実施形態によれば、可動部3の運動に対し
て磁路中の空隙が一定となり、安定的に高効率化を図る
ことができる。In the structures of FIGS. 4 and 7, the movement of the movable part 3 increases the air gap in the magnetic path and increases the magnetic resistance of the magnetic path. However, according to the fifth embodiment, the movement of the movable part 3 is increased. On the other hand, the air gap in the magnetic path becomes constant, and the efficiency can be stably increased.
【0040】なお、第5実施形態では、磁路バイパス6
Aを図4の超磁歪リニアアクチュエータに設けた構造に
なっているが、図13〜図15に示すように、磁路バイ
パス6Aを図7の超磁歪リニアアクチュエータに設けて
もよい。この構造でも安定的に高効率化を図ることがで
きる。In the fifth embodiment, the magnetic path bypass 6
Although the structure A is provided in the giant magnetostrictive linear actuator of FIG. 4, the magnetic path bypass 6A may be provided in the giant magnetostrictive linear actuator of FIG. 7 as shown in FIGS. Even with this structure, high efficiency can be stably achieved.
【0041】また、図10〜図15の例では、磁路バイ
パス6Aは2枚の平行磁性体により成るが、図16に示
すようなH字状の磁性体により磁路バイパス6Bを形成
するようにしてもよい。この構造でも安定的に高効率化
を図ることができる。In the example of FIGS. 10 to 15, the magnetic path bypass 6A is composed of two parallel magnetic bodies, but the magnetic path bypass 6B is formed of an H-shaped magnetic body as shown in FIG. You may Even with this structure, high efficiency can be stably achieved.
【0042】(第6実施形態)図17は本発明に係る第
6実施形態の超磁歪リニアアクチュエータの外観図、図
18は同超磁歪リニアアクチュエータの構成図である。(Sixth Embodiment) FIG. 17 is an external view of a giant magnetostrictive linear actuator according to a sixth embodiment of the present invention, and FIG. 18 is a configuration diagram of the giant magnetostrictive linear actuator.
【0043】第6実施形態の超磁歪リニアアクチュエー
タは、図17,図18に示すように、磁性材料により一
の開口点(支点)7aを持つ断面C字状に形成されるヨ
ーク7を備えているとともに、極性が交番する磁界を発
生させるための励磁コイル1と、この励磁コイル1によ
る極性が交番する磁界の強さによって長さが弾性変化す
る超磁歪素子2と、ヨーク7の開口点7aから一部32
Aが外部に突出する可動部3Aと、超磁歪素子2の長さ
が弾性変化する方向におけるその超磁歪素子2の両側に
予荷重を与える一対の予荷重皿バネ4とをヨーク7の内
部に備えている。As shown in FIGS. 17 and 18, the giant magnetostrictive linear actuator of the sixth embodiment comprises a yoke 7 formed of a magnetic material in a C-shaped cross section having one opening point (fulcrum) 7a. In addition, an exciting coil 1 for generating a magnetic field of alternating polarities, a giant magnetostrictive element 2 whose length elastically changes depending on the strength of the magnetic field of alternating polarities generated by the exciting coil 1, and an opening point 7a of the yoke 7 are formed. From part 32
Inside the yoke 7, there is provided a movable portion 3A in which A projects outward, and a pair of preload disc springs 4 for preloading both sides of the giant magnetostrictive element 2 in a direction in which the length of the giant magnetostrictive element 2 elastically changes. I have it.
【0044】励磁コイル1および超磁歪素子2は、可動
部7の残部31Aの両側に設けられる2組の励磁コイル
1A,1Bおよび超磁歪素子2A,2Bにより構成さ
れ、各予荷重皿バネ4は、ヨーク7の内壁に固定され
て、一方の組みの超磁歪素子2Aの一端と他方の組みの
超磁歪素子2Bの一端とに予荷重を与え、可動部3Aが
自己の残部31A先端寄りで2組の超磁歪素子2A,2
Bにより狭持される構造になっている。The exciting coil 1 and the giant magnetostrictive element 2 are composed of two sets of exciting coils 1A, 1B and giant magnetostrictive elements 2A, 2B provided on both sides of the remaining portion 31A of the movable part 7, and each preload disc spring 4 is , Is fixed to the inner wall of the yoke 7, and a preload is applied to one end of the super magnetostrictive element 2A of one set and one end of the super magnetostrictive element 2B of the other set, so that the movable portion 3A moves toward the tip of the remaining portion 31A of itself 2 Set of giant magnetostrictive elements 2A, 2
It is structured to be held by B.
【0045】ここで、超磁歪素子2A,2Bは、一方の
超磁歪素子が伸びている時にもう一方の超磁歪素子が縮
んだ状態となるように励磁される。これにより、2つの
超磁歪素子の伸縮に応じてその伸縮方向に可動部3Aが
運動する。なお、各超磁歪素子と接する、可動部3Aの
残部31Aの点が動作点であり、可動部3Aの一部32
Aの先端が作用点となる。また、開口点(支点)7aと
作用点との間の距離は、開口点(支点)7aと動作点と
の間の距離よりも長く設定される。Here, the giant magnetostrictive elements 2A and 2B are excited so that when one giant magnetostrictive element is extended, the other giant magnetostrictive element is in a contracted state. As a result, the movable portion 3A moves in the expansion / contraction direction according to the expansion / contraction of the two giant magnetostrictive elements. The point of the remaining portion 31A of the movable portion 3A, which is in contact with each giant magnetostrictive element, is the operating point, and the portion 32 of the movable portion 3A.
The tip of A is the point of action. The distance between the opening point (fulcrum) 7a and the action point is set longer than the distance between the opening point (fulcrum) 7a and the operating point.
【0046】このような構造の超磁歪リニアアクチュエ
ータでは、2組の励磁コイル1A,1Bに交互に通電す
ることにより可動部3Aが往復動するが、可動部3Aが
どちらの方向に運動しているときでも超磁歪素子による
駆動力が生じる。また、ほぼ閉磁路構造であるから、高
効率化を図ることができる。In the giant magnetostrictive linear actuator having such a structure, the movable portion 3A reciprocates by alternately energizing the two sets of exciting coils 1A and 1B, but the movable portion 3A moves in either direction. Even at times, a driving force is generated by the giant magnetostrictive element. Further, since the structure is almost a closed magnetic circuit, high efficiency can be achieved.
【0047】なお、第6実施形態では、磁気バイアスを
かけない構成になっているが、磁石または直流電流によ
り磁気バイアスをかける構成でもよい。磁気バイアスを
かけると、励磁電流の周波数と同じ周波数で可動部が運
動する。In the sixth embodiment, the magnetic bias is not applied, but the magnetic bias may be applied by a magnet or a direct current. When a magnetic bias is applied, the movable part moves at the same frequency as the exciting current frequency.
【0048】また、ヨーク全体の構造は、図17に示す
ように箱形に限らず、C字状の筒形でもよい。The structure of the entire yoke is not limited to the box shape as shown in FIG. 17, but may be a C-shaped cylinder.
【0049】[0049]
【発明の効果】以上のことから明らかなように、請求項
1記載の発明によれば、極性が交番する磁界を発生させ
るための励磁コイルと、この励磁コイルによる極性が交
番する磁界の強さによって長さが弾性変化する超磁歪素
子と、この超磁歪素子の長さが弾性変化する方向におけ
るその超磁歪素子の両側にそれぞれ設けられる一対の可
動部と、これら一対の可動部に対し超磁歪素子側へ予荷
重を与える付加手段とを備え、各可動部の作用点となる
一端と他端との間の支点寄りの両可動部に上記超磁歪素
子の両端がそれぞれ接するので、可動部の作用点の振動
方向と超磁歪素子の伸縮方向とが一致し、そして一対の
可動部が互いに逆方向に運動するので、各運動による振
動がキャンセルされることになり、振動の小さな超磁歪
リニアアクチュエータを実現することができる。As is apparent from the above, according to the invention described in claim 1, an exciting coil for generating a magnetic field having alternating polarities, and the strength of the magnetic field having alternating polarities by the exciting coil. Of a super magnetostrictive element whose length is elastically changed by a pair of movable parts provided on both sides of the super magnetostrictive element in the direction in which the length of the supermagnetostrictive element is elastically changed, and a giant magnetostrictive element for the pair of movable parts. Since the both ends of the giant magnetostrictive element are respectively in contact with both movable parts near the fulcrum between one end and the other end, which are the action points of the respective movable parts, with the addition means for applying a preload to the element side, Since the vibration direction at the point of action and the expansion / contraction direction of the giant magnetostrictive element match, and the pair of movable parts move in opposite directions, the vibration due to each motion is canceled, and the giant magnetostrictive linear actuator with small vibration is cancelled. It is possible to realize the data.
【0050】請求項1記載の発明によれば、請求項1記
載の超磁歪リニアアクチュエータにおいて、励磁コイル
および超磁歪素子は、固定部材の両側に設けられる2組
の励磁コイルおよび超磁歪素子により構成され、一方の
組みの超磁歪素子の一端と他方の組みの超磁歪素子の一
端とが一対の可動部とそれぞれ接するのであり、この構
造でも、振動が小さくなる。According to the invention of claim 1, in the giant magnetostrictive linear actuator of claim 1, the exciting coil and the giant magnetostrictive element are composed of two sets of exciting coil and giant magnetostrictive element provided on both sides of the fixing member. Then, one end of the super magnetostrictive element of one set and one end of the super magnetostrictive element of the other set are respectively in contact with the pair of movable parts, and this structure also reduces vibration.
【0051】請求項3記載の発明によれば、請求項2記
載の超磁歪リニアアクチュエータにおいて、超磁歪素子
への予荷重をてこの原理を用いて付加するので、てこの
原理により、予荷重を増幅することができ、調整の幅が
広がる。According to the third aspect of the invention, in the giant magnetostrictive linear actuator according to the second aspect, the preload is added to the giant magnetostrictive element by using the lever principle. Therefore, the preload is applied by the lever principle. Amplification is possible and the range of adjustment is expanded.
【0052】請求項4記載の発明によれば、請求項1ま
たは2記載の超磁歪リニアアクチュエータにおいて、一
対の可動部をこれらの各他端側で支持するとともに一対
の可動部間の励磁コイルおよび超磁歪素子を支持する支
持体と、一対の可動部間に設けられこれらの間の励磁コ
イルおよび超磁歪素子を介して支持体と対向する磁性部
材とを備え、一対の可動部および支持体は磁性体であ
り、超磁歪素子、一対の可動部、支持体および磁性部材
により閉磁路を形成するので、開磁路よりも磁気回路の
磁気抵抗が減少し、超磁歪素子を伸縮させるために必要
な交番磁界を発生させる電流を抑えることができるた
め、高効率化を図ることができる。According to a fourth aspect of the present invention, in the giant magnetostrictive linear actuator according to the first or second aspect, the pair of movable portions are supported on the respective other end sides thereof, and the exciting coil between the pair of movable portions and The pair of movable parts and the support body are provided with a support body that supports the giant magnetostrictive element and a magnetic member that is provided between the pair of movable portions and faces the support body via the exciting coil and the giant magnetostrictive element therebetween. Since it is a magnetic material and forms a closed magnetic path with a super magnetostrictive element, a pair of movable parts, a support and a magnetic member, the magnetic resistance of the magnetic circuit is reduced compared to the open magnetic path, and it is necessary to expand and contract the super magnetostrictive element. Since it is possible to suppress the current that generates a large alternating magnetic field, it is possible to achieve high efficiency.
【0053】請求項5記載の発明によれば、請求項4記
載の超磁歪リニアアクチュエータにおいて、磁性部材と
一対の可動部との間の空隙が、可動部の運動に依らず一
定となるように配置されるので、安定的に高効率化を図
ることができる。According to the fifth aspect of the present invention, in the giant magnetostrictive linear actuator according to the fourth aspect, the gap between the magnetic member and the pair of movable portions is constant regardless of the movement of the movable portions. Since they are arranged, high efficiency can be stably achieved.
【0054】請求項6記載の発明によれば、磁性材料に
より一の開口点を持つ断面C字状に形成されるヨークを
備えるとともに、極性が交番する磁界を発生させるため
の励磁コイルと、この励磁コイルによる極性が交番する
磁界の強さによって長さが弾性変化する超磁歪素子と、
ヨークの開口点から一部が外部に突出する可動部と、超
磁歪素子の長さが弾性変化する方向におけるその超磁歪
素子の両側に予荷重を付加する付加手段とを上記ヨーク
の内部に備え、励磁コイルおよび超磁歪素子は可動部の
残部の両側に設けられる2組の励磁コイルおよび超磁歪
素子により構成され、付加手段はヨークの内壁に固定さ
れて一方の組みの超磁歪素子の一端と他方の組みの超磁
歪素子の一端とに予荷重を与え、可動部が自己の残部先
端寄りで2組の超磁歪素子により狭持されるので、2つ
の励磁コイルに交互に通電することにより可動部が往復
動するが、可動部がどちらの方向に運動しているときで
も超磁歪素子による逆向きの駆動力が生じるから、振動
の小さな超磁歪リニアアクチュエータを実現することが
できる。また、閉磁路構造であるから、高効率化を図る
ことができる。According to the sixth aspect of the present invention, there is provided a yoke which is made of a magnetic material and has a C-shaped cross section having one opening point, and an exciting coil for generating a magnetic field of alternating polarity. A giant magnetostrictive element whose length elastically changes depending on the strength of a magnetic field in which the polarities of the exciting coil alternate.
Inside the yoke, there is provided a movable part partially protruding from the opening point of the yoke, and an addition means for applying a preload to both sides of the giant magnetostrictive element in the direction in which the length of the giant magnetostrictive element elastically changes. The exciting coil and the giant magnetostrictive element are composed of two sets of exciting coil and giant magnetostrictive element provided on both sides of the remaining part of the movable part, and the adding means is fixed to the inner wall of the yoke and is connected to one end of one pair of giant magnetostrictive element. A preload is applied to one end of the other set of giant magnetostrictive elements, and the movable part is sandwiched by the two sets of giant magnetostrictive elements near the tip of the rest of the self, so it can be moved by alternately energizing two exciting coils. Although the part reciprocates, the opposite direction driving force is generated by the giant magnetostrictive element when the movable part moves in either direction, so that a giant magnetostrictive linear actuator with small vibration can be realized. Further, since the structure is a closed magnetic circuit, high efficiency can be achieved.
【図1】本発明に係る第1実施形態の超磁歪リニアアク
チュエータの構成図である。FIG. 1 is a configuration diagram of a giant magnetostrictive linear actuator according to a first embodiment of the present invention.
【図2】本発明に係る第2実施形態の超磁歪リニアアク
チュエータの構成図である。FIG. 2 is a configuration diagram of a giant magnetostrictive linear actuator according to a second embodiment of the present invention.
【図3】本発明に係る第3実施形態の超磁歪リニアアク
チュエータの構成図である。FIG. 3 is a configuration diagram of a giant magnetostrictive linear actuator according to a third embodiment of the present invention.
【図4】本発明に係る第4実施形態の超磁歪リニアアク
チュエータの構成図である。FIG. 4 is a configuration diagram of a giant magnetostrictive linear actuator according to a fourth embodiment of the present invention.
【図5】同超磁歪リニアアクチュエータの特徴となる閉
磁路の説明図である。FIG. 5 is an explanatory diagram of a closed magnetic circuit that is a feature of the giant magnetostrictive linear actuator.
【図6】同超磁歪リニアアクチュエータの比較対照とな
る閉磁路の説明図である。FIG. 6 is an explanatory diagram of a closed magnetic circuit serving as a comparative reference of the giant magnetostrictive linear actuator.
【図7】図4中の磁路バイパスを図2の超磁歪リニアア
クチュエータに設けた場合の構造を示す図である。7 is a diagram showing a structure when the magnetic path bypass shown in FIG. 4 is provided in the giant magnetostrictive linear actuator shown in FIG.
【図8】同超磁歪リニアアクチュエータの特徴となる閉
磁路の説明図である。FIG. 8 is an explanatory diagram of a closed magnetic circuit that is a feature of the giant magnetostrictive linear actuator.
【図9】同超磁歪リニアアクチュエータの比較対照とな
る閉磁路の説明図である。FIG. 9 is an explanatory diagram of a closed magnetic circuit serving as a comparison reference of the giant magnetostrictive linear actuator.
【図10】本発明に係る第5実施形態の超磁歪リニアア
クチュエータの外観図である。FIG. 10 is an external view of a giant magnetostrictive linear actuator according to a fifth embodiment of the present invention.
【図11】同超磁歪リニアアクチュエータの構成図であ
る。FIG. 11 is a configuration diagram of the giant magnetostrictive linear actuator.
【図12】同超磁歪リニアアクチュエータを出力部側か
ら見た図である。FIG. 12 is a view of the giant magnetostrictive linear actuator seen from the output section side.
【図13】図10〜図12中の磁路バイパスを図2の超
磁歪リニアアクチュエータに設けた場合の外観図であ
る。13 is an external view when the magnetic path bypass shown in FIGS. 10 to 12 is provided in the giant magnetostrictive linear actuator of FIG.
【図14】同超磁歪リニアアクチュエータの構成図であ
る。FIG. 14 is a configuration diagram of the giant magnetostrictive linear actuator.
【図15】同超磁歪リニアアクチュエータを出力部側か
ら見た図である。FIG. 15 is a view of the giant magnetostrictive linear actuator seen from the output section side.
【図16】別の磁路バイパスの構造例を示す図である。FIG. 16 is a diagram showing a structural example of another magnetic path bypass.
【図17】本発明に係る第6実施形態の超磁歪リニアア
クチュエータの外観図である。FIG. 17 is an external view of a giant magnetostrictive linear actuator according to a sixth embodiment of the present invention.
【図18】同超磁歪リニアアクチュエータの構成図であ
る。FIG. 18 is a configuration diagram of the giant magnetostrictive linear actuator.
【図19】従来の超磁歪アクチュエータの構成図であ
る。FIG. 19 is a configuration diagram of a conventional giant magnetostrictive actuator.
【図20】同超磁歪アクチュエータの磁束の流れを示す
図である。FIG. 20 is a diagram showing a flow of magnetic flux of the giant magnetostrictive actuator.
【図21】特願2001−262875で提案されてい
る超磁歪リニアアクチュエータの構成図である。FIG. 21 is a configuration diagram of a giant magnetostrictive linear actuator proposed in Japanese Patent Application No. 2001-262875.
【図22】特願2001−262875で提案されてい
るカウンタ動作を実現した超磁歪リニアアクチュエータ
の構成図である。FIG. 22 is a configuration diagram of a giant magnetostrictive linear actuator that realizes a counter operation proposed in Japanese Patent Application No. 2001-262875.
1,1A,1B 励磁コイル 2,2A,2B 超磁歪素子 3,3A 可動部 4 予荷重皿バネ 4A 予荷重付加用部材 42A 予荷重付加バネ 5 支持体 52 固定部材 6,6A,6B 磁路バイパス 7 ヨーク 1,1A, 1B Excitation coil 2,2A, 2B giant magnetostrictive element 3,3A movable part 4 Preload disc spring 4A Preload addition member 42A preload spring 5 support 52 Fixing member 6,6A, 6B Magnetic path bypass 7 York
───────────────────────────────────────────────────── フロントページの続き (72)発明者 平田 勝弘 大阪府門真市大字門真1048番地 松下電工 株式会社内 (72)発明者 松井 康浩 東京都渋谷区神宮前3丁目1番14号 株式 会社モリテックス内 (72)発明者 鈴木 友彦 東京都渋谷区神宮前3丁目1番14号 株式 会社モリテックス内 ─────────────────────────────────────────────────── ─── Continued front page (72) Inventor Katsuhiro Hirata 1048, Kadoma, Kadoma-shi, Osaka Matsushita Electric Works Within the corporation (72) Inventor Yasuhiro Matsui 3-1, 14 Jingumae, Shibuya-ku, Tokyo Stocks Company Moritex (72) Inventor Tomohiko Suzuki 3-1, 14 Jingumae, Shibuya-ku, Tokyo Stocks Company Moritex
Claims (6)
励磁コイルと、この励磁コイルによる極性が交番する磁
界の強さによって長さが弾性変化する超磁歪素子と、こ
の超磁歪素子の長さが弾性変化する方向におけるその超
磁歪素子の両側にそれぞれ設けられる一対の可動部と、
これら一対の可動部に対し超磁歪素子側へ予荷重を与え
る付加手段とを備え、各可動部の作用点となる一端と他
端との間の支点寄りの両可動部に上記超磁歪素子の両端
がそれぞれ接することを特徴とする超磁歪リニアアクチ
ュエータ。1. An exciting coil for generating a magnetic field of alternating polarities, a super magnetostrictive element whose length elastically changes depending on the strength of a magnetic field of alternating polarities generated by the exciting coil, and the length of the super magnetostrictive element. A pair of movable parts respectively provided on both sides of the giant magnetostrictive element in the direction in which elasticity changes,
The pair of movable parts is provided with an addition means for applying a preload to the giant magnetostrictive element side, and the movable parts of the giant magnetostrictive element are provided on both movable parts near the fulcrum between one end and the other end, which are the action points of each movable part. A giant magnetostrictive linear actuator characterized in that both ends are in contact with each other.
材の両側に設けられる2組の励磁コイルおよび超磁歪素
子により構成され、一方の組みの超磁歪素子の一端と他
方の組みの超磁歪素子の一端とが一対の可動部とそれぞ
れ接することを特徴とする請求項1記載の超磁歪リニア
アクチュエータ。2. The exciting coil and the giant magnetostrictive element are composed of two sets of exciting coils and giant magnetostrictive elements provided on both sides of the fixing member, and one end of the one pair of giant magnetostrictive elements and the other pair of giant magnetostrictive elements. 2. The giant magnetostrictive linear actuator according to claim 1, wherein one end of each of the giant magnetostrictive linear actuators is in contact with each of the pair of movable portions.
いて付加することを特徴とする請求項2記載の超磁歪リ
ニアアクチュエータ。3. The giant magnetostrictive linear actuator according to claim 2, wherein a preload is applied to the giant magnetostrictive element using the lever principle.
するとともに一対の可動部間の励磁コイルおよび超磁歪
素子を支持する支持体と、一対の可動部間に設けられこ
れらの間の励磁コイルおよび超磁歪素子を介して支持体
と対向する磁性部材とを備え、一対の可動部および支持
体は磁性体であり、超磁歪素子、一対の可動部、支持体
および磁性部材により閉磁路を形成することを特徴とす
る請求項1または2記載の超磁歪リニアアクチュエー
タ。4. A support body, which is provided between the pair of movable portions, and a support body which supports the pair of movable portions at the other ends thereof and also supports the exciting coil and the giant magnetostrictive element between the pair of movable portions. Of the excitation coil and the magnetic member facing the support through the giant magnetostrictive element, the pair of movable portions and the support are magnetic bodies, and the supermagnetostrictive element, the pair of movable portions, the support and the magnetic member close the magnetic field. The giant magnetostrictive linear actuator according to claim 1 or 2, wherein a path is formed.
が、可動部の運動に依らず一定となるように配置される
ことを特徴とする請求項4記載の超磁歪リニアアクチュ
エータ。5. The giant magnetostrictive linear actuator according to claim 4, wherein the gap between the magnetic member and the pair of movable portions is arranged so as to be constant regardless of the movement of the movable portion.
字状に形成されるヨークを備えるとともに、極性が交番
する磁界を発生させるための励磁コイルと、この励磁コ
イルによる極性が交番する磁界の強さによって長さが弾
性変化する超磁歪素子と、ヨークの開口点から一部が外
部に突出する可動部と、超磁歪素子の長さが弾性変化す
る方向におけるその超磁歪素子の両側に予荷重を付加す
る付加手段とを上記ヨークの内部に備え、励磁コイルお
よび超磁歪素子は可動部の残部の両側に設けられる2組
の励磁コイルおよび超磁歪素子により構成され、付加手
段はヨークの内壁に固定されて一方の組みの超磁歪素子
の一端と他方の組みの超磁歪素子の一端とに予荷重を与
え、可動部が自己の残部先端寄りで2組の超磁歪素子に
より狭持されることを特徴とする超磁歪リニアアクチュ
エータ。6. A cross section C having a single opening made of a magnetic material.
An exciting coil for generating a magnetic field with alternating polarities, a giant magnetostrictive element whose length elastically changes depending on the strength of the magnetic field with alternating polarities by the exciting coil, and a yoke A movable part partially protruding from the opening point to the outside, and an addition means for applying a preload to both sides of the giant magnetostrictive element in the direction in which the length of the giant magnetostrictive element elastically changes are provided inside the yoke, The exciting coil and the super magnetostrictive element are composed of two sets of exciting coil and super magnetostrictive element provided on both sides of the remaining part of the movable part, and the adding means is fixed to the inner wall of the yoke and one end and the other end of the super magnetostrictive element of one set. A giant magnetostrictive linear actuator characterized in that a preload is applied to one end of the pair of giant magnetostrictive elements, and the movable part is sandwiched by two pairs of giant magnetostrictive elements near the tip of the rest of the self.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002081799A JP4284917B2 (en) | 2002-03-22 | 2002-03-22 | Giant magnetostrictive linear actuator |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002081799A JP4284917B2 (en) | 2002-03-22 | 2002-03-22 | Giant magnetostrictive linear actuator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003282991A true JP2003282991A (en) | 2003-10-03 |
| JP4284917B2 JP4284917B2 (en) | 2009-06-24 |
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ID=29230282
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|---|---|---|---|
| JP2002081799A Expired - Fee Related JP4284917B2 (en) | 2002-03-22 | 2002-03-22 | Giant magnetostrictive linear actuator |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010182804A (en) * | 2009-02-04 | 2010-08-19 | Taisei Corp | Oscillator |
-
2002
- 2002-03-22 JP JP2002081799A patent/JP4284917B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010182804A (en) * | 2009-02-04 | 2010-08-19 | Taisei Corp | Oscillator |
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| Publication number | Publication date |
|---|---|
| JP4284917B2 (en) | 2009-06-24 |
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