JP2003282401A - 塗布方法、塗布装置、カラーフィルタの製造方法、及び電気光学装置の製造方法 - Google Patents

塗布方法、塗布装置、カラーフィルタの製造方法、及び電気光学装置の製造方法

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Publication number
JP2003282401A
JP2003282401A JP2002079520A JP2002079520A JP2003282401A JP 2003282401 A JP2003282401 A JP 2003282401A JP 2002079520 A JP2002079520 A JP 2002079520A JP 2002079520 A JP2002079520 A JP 2002079520A JP 2003282401 A JP2003282401 A JP 2003282401A
Authority
JP
Japan
Prior art keywords
substrate
coating
supply point
rotation speed
color filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2002079520A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003282401A5 (enExample
Inventor
Takeshi Ichikawa
武 市川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2002079520A priority Critical patent/JP2003282401A/ja
Publication of JP2003282401A publication Critical patent/JP2003282401A/ja
Publication of JP2003282401A5 publication Critical patent/JP2003282401A5/ja
Withdrawn legal-status Critical Current

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  • Optical Filters (AREA)
  • Materials For Photolithography (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2002079520A 2002-03-20 2002-03-20 塗布方法、塗布装置、カラーフィルタの製造方法、及び電気光学装置の製造方法 Withdrawn JP2003282401A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002079520A JP2003282401A (ja) 2002-03-20 2002-03-20 塗布方法、塗布装置、カラーフィルタの製造方法、及び電気光学装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002079520A JP2003282401A (ja) 2002-03-20 2002-03-20 塗布方法、塗布装置、カラーフィルタの製造方法、及び電気光学装置の製造方法

Publications (2)

Publication Number Publication Date
JP2003282401A true JP2003282401A (ja) 2003-10-03
JP2003282401A5 JP2003282401A5 (enExample) 2005-07-21

Family

ID=29228963

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002079520A Withdrawn JP2003282401A (ja) 2002-03-20 2002-03-20 塗布方法、塗布装置、カラーフィルタの製造方法、及び電気光学装置の製造方法

Country Status (1)

Country Link
JP (1) JP2003282401A (enExample)

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