JP2003280205A5 - - Google Patents

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Publication number
JP2003280205A5
JP2003280205A5 JP2002086459A JP2002086459A JP2003280205A5 JP 2003280205 A5 JP2003280205 A5 JP 2003280205A5 JP 2002086459 A JP2002086459 A JP 2002086459A JP 2002086459 A JP2002086459 A JP 2002086459A JP 2003280205 A5 JP2003280205 A5 JP 2003280205A5
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JP
Japan
Prior art keywords
hydrogen atom
group
atom
acid
formula
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002086459A
Other languages
English (en)
Japanese (ja)
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JP3955489B2 (ja
JP2003280205A (ja
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Publication date
Application filed filed Critical
Priority to JP2002086459A priority Critical patent/JP3955489B2/ja
Priority claimed from JP2002086459A external-priority patent/JP3955489B2/ja
Publication of JP2003280205A publication Critical patent/JP2003280205A/ja
Publication of JP2003280205A5 publication Critical patent/JP2003280205A5/ja
Application granted granted Critical
Publication of JP3955489B2 publication Critical patent/JP3955489B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2002086459A 2002-03-26 2002-03-26 ポジ型レジスト組成物 Expired - Fee Related JP3955489B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002086459A JP3955489B2 (ja) 2002-03-26 2002-03-26 ポジ型レジスト組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002086459A JP3955489B2 (ja) 2002-03-26 2002-03-26 ポジ型レジスト組成物

Publications (3)

Publication Number Publication Date
JP2003280205A JP2003280205A (ja) 2003-10-02
JP2003280205A5 true JP2003280205A5 (cg-RX-API-DMAC7.html) 2005-04-07
JP3955489B2 JP3955489B2 (ja) 2007-08-08

Family

ID=29233052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002086459A Expired - Fee Related JP3955489B2 (ja) 2002-03-26 2002-03-26 ポジ型レジスト組成物

Country Status (1)

Country Link
JP (1) JP3955489B2 (cg-RX-API-DMAC7.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004013126A (ja) * 2002-06-11 2004-01-15 Jsr Corp 感放射線性樹脂組成物
JP4534765B2 (ja) * 2002-12-11 2010-09-01 旭硝子株式会社 フッ素化されたアダマンタン誘導体およびその製造方法
US7488847B2 (en) 2002-12-11 2009-02-10 Asahi Glass Company, Limited Fluorinated adamantane and its derivatives
WO2005123653A1 (ja) 2004-06-16 2005-12-29 Asahi Glass Company, Limited フルオロアダマンタン誘導体

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