JP2003278943A - High temperature operating valve - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a high temperature operating valve capable of effectively heating a flow passage of a flow passage body to a high temperature condition and capable of eliminating influence by the heat on other parts except the flow passage body. <P>SOLUTION: This high temperature operating valve is provided with the flow passage body 2 having the flow passage 3 through which a fluid flows, a valve element actuation part 12 having a valve element 17 for opening and closing the flow passage 3, a heat receiving part 23 provided on the flow passage body 2 and receiving the heat energy imparted to the flow passage 3, and heat insulating parts 16, 19 and 25 for shutting off heat transmission from the flow passage body 2 to parts except the flow passage body 2. Therefore, the temperature of the flow passage body 2 is raised when the heat energy is imparted to the heat receiving part 23. The transmission of the heat of the flow passage body 2 to the part except the flow passage body 2 is insulated by the heat insulating parts 13, 16 and 25, and thereby the temperature of the flow passage 3 of the flow passage body 2 can be effectively raised. Further, the influence by the heat transmission to the part other than the flow passage 2 of which temperature is raised can be avoided. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high temperature operating valve used when a fluid is heated to a high temperature and then transferred.

[0002]

2. Description of the Related Art A conduit for flowing a fluid such as a gas or a liquid is equipped with a valve as required. The valve has a valve body operating unit that operates a valve body for switching the opening / closing of a pipeline or adjusting the flow rate. There are a manual system and an automatic system as a system for operating the valve body. In the latter case, valves of pneumatic drive type and electromagnetic drive type are known.

Further, depending on the flowing fluid, the temperature is lowered due to adiabatic expansion in the flow passage and the valve, so that the fluid is condensed, and as a result, the flow rate, flow velocity, pressure, etc. cannot be controlled. For example, CVD of a semiconductor wafer (Chemi
Cal Vapor Deposition (Chemical Vapor Deposition) treatment requires a high temperature gas flow. Therefore, the valve used for controlling the flow rate is a high temperature operating valve capable of heating the flow path.

[0004]

The conventional high temperature operation valve has a seal member inside, but since a seal member weak against heat cannot be applied, SUS316L, Ni-C.
A seal member made of metal such as o alloy or brass is provided. Therefore, the heat of the heated flow path is conducted to the entire high temperature operation valve by the metal seal member. Further, there is a strong demand for miniaturization of the apparatus regardless of the type, and since this is the same for the apparatus for performing the CVD process, there is a strong demand for the integration of pipelines. For this reason, the heat transmitted to the entire high temperature operation valve may be conducted to other pipelines or connected devices in the pipelines, and trouble may occur due to the influence of the heat.

Therefore, an object of the present invention is to provide a high temperature operating valve capable of efficiently raising the temperature of the flow passage body to a high temperature state and eliminating the influence of heat on the portion other than the flow passage body. That is.

[0006]

The invention according to claim 1 is
A flow path body in which a flow path for flowing a fluid is formed, a valve body operating unit having a valve body that opens and closes the flow path, a heat receiving unit that is provided in the flow path body and receives heat energy applied, and the flow And a heat insulating section that blocks the transfer of heat from the passage body to the portion other than the passage body.

Therefore, when heat energy is applied to the heat receiving portion, the temperature of the flow path body is raised. The heat of the flow path body is
The conduction to the portion other than the flow path body is insulated by the heat insulating portion. Along with this, it becomes possible to avoid the influence of heat conduction to the portion other than the flow path body.

According to a second aspect of the present invention, there is provided a flow passage body provided with a flow passage body, a valve body having a valve body for opening and closing the flow passage, and a flow passage body provided with the flow passage body. A heat receiving portion that receives heat energy, a heat insulating portion that blocks heat transfer from the flow passage body to a portion other than the flow passage body, and a heat radiating portion that is provided in contact with the heat insulating portion. .

Therefore, when heat energy is applied to the heat receiving portion, the temperature of the flow path body is raised. The heat of the flow path body is
The conduction to the portion other than the flow path body is insulated by the heat insulating portion. Along with this, it becomes possible to avoid the influence of heat conduction to the portion other than the flow path body. Further, since the heat dissipation part is provided in contact with the heat insulating part, even if some heat of the flow path body is conducted to the outside of the flow path body through the heat insulating part, the heat is radiated by the heat dissipation part. It

According to a third aspect of the present invention, in the first or second aspect of the invention, a heater to which electric power is supplied is used as the heat receiving portion, and the temperature of the flow passage body is set in the flow passage body. A temperature measuring element that detects and outputs a detection signal corresponding to the temperature is provided.

Therefore, when electric power as thermal energy is applied to the heater, the temperature of the flow path body is raised. Since the temperature of the flow path body can be recognized by the detection signal output from the temperature measuring element, it is possible to improve the accuracy of power supply control to the heater.

According to a fourth aspect of the present invention, in the first or second aspect of the invention, the heat insulating portion is provided between the flow passage body and a member arranged in proximity to the flow passage body. It is a heat insulating material.

Therefore, since the heat of the flow path body is insulated by the heat insulating material, the conduction of the heat to other than the flow path body is prevented. Moreover, the structure as a heat insulating portion is also easy.

According to a fifth aspect of the present invention, in the second aspect of the invention, the heat radiating portion includes cooling fins or cooling pipes.

Therefore, it becomes possible to efficiently perform the heat dissipation action.

[0016]

BEST MODE FOR CARRYING OUT THE INVENTION A high temperature operation valve according to an embodiment of the present invention will be described with reference to FIG. FIG. 1 is a cross-sectional view showing the internal structure of the high temperature operation valve 1. In the figure, reference numeral 2 denotes a metal flow path main body, and the flow path main body 2 has a flow path 3 through which a fluid flows, an expansion chamber 4, and a top portion which coincides with the central portion of the bottom surface of the expansion chamber 4. The protrusion 5 is formed. The flow path 3 is
It is divided into an inlet side flow passage 7 communicated with the inlet 6 by the protrusion 5 and a discharge port side flow passage 9 communicated with the discharge port 8, and one end of the inlet side flow channel 7 and the discharge port side flow passage 9 Opening faces 10, 11
Is opened at the bottom of the expansion chamber 4.

The expansion chamber 4 side of the flow passage body 2 is connected to a valve body operating portion 12 that opens and closes the flow passage 3. The valve body operating unit 12 is a cylinder 13 made of metal capable of sucking and exhausting compressed air.
A metal piston 14 slidably fitted in the cylinder 13; a ceramic button 16 extending from one end of the piston 14 and supported by a metal connecting rod 15; A metal diaphragm 17 as a valve body that is pressed by the button 16 to close the flow path 3 and a spring 18 that biases the piston 14 in the upward returning direction.
And a second ceramic cylinder 19 provided between the flow path body 2 and the cylinder 13. The second cylinder 19 surrounds the periphery of the connecting rod 15 and slidably supports the button 16. The joint between the flow path body 2 and the second cylinder 19 is sealed by a metal O-ring 20, and the second cylinder 1
A joint surface between the cylinder 9 and the cylinder 13 is sealed by an O-ring 21, and an O-ring 22 that seals between the inner peripheral surface of the cylinder 13 and the outer circumference of the piston 14 is fitted.
The O-rings 21 and 22 are made of fluororubber such as Viton (registered trademark of DuPont).

A heater 23 as a heat receiving portion for receiving thermal energy (electric power) is arranged and buried in the flow path body 2 in the vicinity of the flow path 3, and the temperature of the flow path body 2 is detected. A thermocouple 24 as a temperature measuring element that outputs a detection signal corresponding to the temperature is embedded. Also,
A ceramic base 25 and a metal base 26 are sequentially connected to the lower portion of the flow path body 2.

Here, the ceramic button 16 and the second cylinder 19 block the transfer of heat from the flow passage main body 2 to the portion other than the flow passage main body 2 (the valve body operating portion 12 in this example). Functions as a heat insulating portion and a heat insulating member. The ceramic base 25 heats the flow passage body 2 to a portion other than the flow passage body 2 (for example, when used by connecting to a pipe passage of a CVD processing apparatus, a pipe casing of the processing apparatus). It functions as a heat insulating part and a heat insulating member that cut off the transmission of electricity. Further, the metal cylinder 13 has a large number of cooling fins 13a on its outer peripheral surface and functions as a heat radiating portion. Similarly, the metal base 26 also has a plurality of cooling fins 26a and functions as a heat radiating portion. A fluid such as gas necessary for the CVD process flows from the inlet 6 toward the discharge port 8 as shown by an arrow. When compressed air is supplied into the cylinder 13 and the supply pressure exceeds the pressure of the spring 18, the piston 14, the connecting rod 15, and the button 16 descend integrally, so that the diaphragm 17 is elastically pressed by the button 16. To bend. The magnitude of the bending action controls the gap between the diaphragm 17 and the bottom surface of the expansion chamber 4. A state where there is a gap is a state where the flow passage 3 is narrowed, and a state where there is no gap is a state where the flow passage 3 is blocked. When the compressed air in the cylinder 13 is decompressed, when the pressure becomes equal to or lower than the pressure of the spring 18, the piston 14, the connecting rod 15, and the button 16 are integrally returned upward by the pressure of the spring 18. Therefore, the diaphragm 17 restores to its original shape by its elasticity, and the flow rate of gas in the flow path 3 increases.

When the gas used for the CVD process or the like is supplied, electric power is applied to the heater 23 from the outside. As a result, the temperature of the flow path main body 2 becomes high, and the gas is maintained at a high temperature and supplied to the desired portion. In this case, the temperature of the flow path body 2 can be controlled by monitoring the detection signal from the thermocouple 24 and controlling the electric power to the heater 23.

As described above, when the flow path body 2 is heated to a high temperature, the heat is conducted from the flow path body 2 to the parts other than the flow path body 2 by the ceramic second cylinder 19 and the button 16. Since it is blocked by the base 25, the temperature of the flow passage 3 of the flow passage body 2 can be efficiently raised in a short time. The experimental results are shown in Tables 1 and 2.

This experiment is a comparison between the high temperature operating valve of this embodiment (see FIG. 1) and a conventional high temperature operating valve. In the conventional high temperature operation valve, the cylinder 13 is directly connected to the flow path main body 2 except for the base 25 as a heat insulating portion and the base 26 as a heat radiating portion, except for the second cylinder 19 from the configuration shown in FIG. The button 16 is made of metal. The experimental method is as follows. For the high temperature operating valve 1 in the present embodiment, the base 26 is fixed on the pipe casing (1.5 mm thick stainless plate) of the CVD processing apparatus, and for the conventional high temperature operating valve, the flow is set. The channel main body 2 is fixed on the pipe casing (made of stainless steel) of the CVD processing apparatus, and electric power is supplied to the heater 23 to flow nitrogen gas,
Every 3 minutes from the start of the supply, the temperature of the thermocouple 24, the temperature of the stainless steel plate immediately below the high temperature operation valve, and the temperature of the stainless steel plate 3 cm outside the high temperature operation valve were measured.

[0023]

[Table 1]

As is apparent from Table 1, in the case of the high temperature operation valve 1 of the present embodiment, the temperature of the thermocouple 24 rises within a short time and is stable after 24 minutes (in Table 1). , See left column). The temperature of the stainless steel plate just below the high temperature operation valve 1 is stable, with a minimum change of 22.9 ° C. and a maximum temperature of 38.2 ° C. (see the central column in Table 1). Regarding the temperature of the stainless steel plate 3 cm outside from the high temperature operation valve 1, the minimum is 23.1 ° C. and the maximum is 23.8 ° C. The change is minute and stable (see the right column in Table 1). These are due to the fact that the heat of the flow path body 2 does not escape from the flow path body 2 due to the existence of the button 16, the second cylinder 19, and the base 25 which function as a heat insulating portion. Therefore, the flow path body 2 can be heated in a short time with a small amount of heat energy. Further, it is possible to prevent deterioration of the O-rings 21 and 22 made of fluororubber, and it is possible to eliminate the influence of heat on the other pipelines.

Further, the metal cylinder 13 has a large number of cooling fins 13a on its outer peripheral surface and functions as a heat radiating portion. Similarly, the metal base 26 also has a plurality of cooling fins 2.
Since 6a is provided and functions as a heat dissipation portion, even if the heat of the flow path main body 2 is conducted to the outside of the flow path main body 2 via the button 16, the second cylinder 13, and the base 25, the heat is not generated. Heat is radiated from the second cylinder 13 having the cooling fins 13a and the base 26 having the cooling fins 26a. Therefore, the influence of heat conduction to the portion other than the flow path body 2 can be more surely avoided.

[0026]

[Table 2]

On the other hand, in the case of the conventional high-temperature operating valve, the temperature of the thermocouple 24 reached the maximum value after 39 minutes, but the increase was slow enough not to stabilize (Table 2, left column). reference). The temperature of the stainless steel plate just below the high temperature operation valve 1 rises with the passage of time, and reaches a high temperature of 219.3 ° C. after 39 minutes (see the center column in Table 2). Similarly, the temperature of the stainless steel plate 3 cm outside from the high temperature operation valve 1 also rises with the passage of time and reaches a high temperature of 167.9 ° C. after 39 minutes (see the right column in Table 2). . These are due to the fact that the heat of the channel body 2 easily escapes from the channel body 2. Therefore, in order to heat the flow path main body 2, much heat energy is required and it takes a long time. Further, it may cause heat deterioration of the O-rings 21 and 22 made of fluororubber, and there is a possibility that heat may affect other pipelines.

[0028]

According to the first aspect of the invention, the heat receiving portion is provided with the heat insulating portion that blocks the transfer of heat from the flow passage main body provided with the heat receiving portion to the portion other than the flow passage main body. The heat of the flow passage main body, which has been raised to a high temperature by applying thermal energy, is conducted to the parts other than the flow passage main body by the heat insulating portion, so that the temperature of the flow passage of the flow passage main body can be shortened in a short time. It can be increased efficiently. Further, the heat insulating portion can avoid the influence of heat conduction to other than the flow path body.

According to the second aspect of the present invention, the heat receiving portion is provided with the heat insulating portion that blocks the transfer of heat from the flow passage main body provided with the heat receiving portion to the portion other than the flow passage main body. The heat of the flow path main body, which has been raised to a high temperature by applying the above, is conducted to the parts other than the flow path main body by the heat insulating section, so that the temperature of the flow path of the flow path main body can be efficiently increased in a short time. Can be increased. Further, the heat insulating portion can avoid the influence of heat conduction to other than the flow path body. Further, since the heat dissipation portion provided in contact with the heat insulating portion is provided, even if a little heat of the flow passage body is conducted to the outside of the flow passage main body through the heat insulating portion, the heat is radiated by the heat radiation portion. be able to.

According to a third aspect of the present invention, in the first or second aspect of the invention, a heater to which electric power is supplied is used as the heat receiving section, and the temperature of the flow channel main body is set to the flow channel main body. Since a temperature measuring element that detects and outputs a detection signal corresponding to the temperature is provided, the temperature of the flow path main body is raised by applying electric power as heat energy to the heater,
Since the temperature of the flow path body can be recognized by the detection signal output from the temperature measuring element, the accuracy of power supply control to the heater can be improved.

According to the invention of claim 4, in the invention of claim 1 or 2, the heat insulating portion is provided between the flow path body and a member arranged in proximity to the flow path body. Since it is a heat insulating material, the heat of the flow path main body is insulated by the heat insulating material, so that the conduction of heat to other than the flow path main body is prevented. In addition, the structure as a heat insulating section becomes easy.

According to a fifth aspect of the present invention, in the second aspect of the invention, since the heat radiating portion includes the cooling fins or the cooling pipes, the heat radiating action can be efficiently performed.

[Brief description of drawings]

FIG. 1 is a cross-sectional view showing an internal structure of a high temperature operation valve according to an embodiment of the present invention.

[Explanation of symbols]

2 channel body 3 channels 12 Valve operating part 13,26 Heat dissipation part 13a, 26a Cooling fin 16,19,25 Thermal insulation, thermal insulation 17 valve body 23 Heat receiving part, heater 24 Temperature measuring element, thermocouple

Claims (5)

[Claims] 1. A flow passage body in which a flow passage for a fluid is formed, a valve body operating portion having a valve body for opening and closing the flow passage, and a heat receiving unit that is provided in the flow passage body and receives heat energy applied thereto. A high temperature operation valve comprising: a portion; and a heat insulating portion that blocks heat transfer from the flow passage body to a portion other than the flow passage body. 2. A flow passage main body in which a flow passage for flowing a fluid is formed, a valve body actuating portion having a valve body for opening and closing the flow passage, and a heat receiving unit which is provided in the flow passage main body and receives heat energy applied thereto. A high-temperature operation valve comprising: a section, a heat insulating section that blocks transfer of heat from the flow channel body to a portion other than the flow channel body, and a heat radiating section provided in contact with the heat insulating section. 3. The temperature receiving element, wherein a heater to which electric power is supplied is used as the heat receiving portion, and the temperature measuring element that detects the temperature of the flow path body and outputs a detection signal corresponding to the temperature of the flow path body. The high temperature operation valve according to claim 1 or 2, further comprising: 4. The high temperature operation valve according to claim 1, wherein the heat insulating portion is a heat insulating material provided between the flow path body and a member arranged in the vicinity of the flow path body. 5. The high temperature operation valve according to claim 2, wherein the heat radiating portion comprises a cooling fin or a cooling pipe.