JP2003274632A - Stage equipment for precision working - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide stage equipment for precision working wherein efficiency of an electromagnetic driving means for a movable table is improved, the movable table is operated smoothly, and size and weight reduction of the whole equipment is realized. <P>SOLUTION: This stage equipment is provided with a movable table 1 which is arranged movably in arbitrary directions on the same surface, a table holding mechanism 2 which permits movement of the movable table 1 and holds it in the state that an original position returning force is applied, and electromagnetic driving means 4, 34 for energizing a moving force to the movable table 1. The electromagnetic driving means 4, 34 are constituted of a plurality of magnets 6 to be driven which are installed on a movable table 1 side, driving coils 7 having a cross-in-square shape which are arranged opposite to the respective magnets 6, and a fixed plate 8 for holding the driving coil 7. The respective driving coils 7 can change and output the magnitude of an electromagnetic force in a direction along an X or Y axis. The combined driving vector forms a driving force passing an origin and excludes rotation component in the case of rectilinear movement. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a precision machining stage device, and more particularly to a precision machining stage device used for wiring work and inspection thereof in a semiconductor production process including integrated circuits such as IC and LSI. .

[0002]

2. Description of the Related Art Conventionally, in the semiconductor industry and the like, IC and L
In order to arrange and hold a workpiece in a precision machining field in a production process such as SI, a machining stage device provided with a movable table that can be precisely moved is often used.

In this case, in order to precisely move the movable table to an arbitrary position on the XY plane, usually, the entire movable table is first moved in the X direction by the X-direction moving mechanism, and then (or simultaneously). In many cases, the movable table and the X-direction moving mechanism as a whole are moved in the Y-direction by the Y-direction moving mechanism so as to have a moving body holding mechanism having a double stack structure.
The table driving means of this type of processing stage device is usually provided with an independent driving mechanism in each of the X direction and the Y direction. As a result, the size and weight of the entire apparatus have increased, which has always been accompanied by the inconvenience of poor portability.

On the other hand, recently, in order to reduce the size and weight of the entire apparatus, a planar drive system (see Japanese Patent Application Laid-Open No. 5-336730) equipped with a rectangular drive coil has been developed. This is a technology that can deal with this by utilizing a common space in both the X direction and the Y direction on the XY plane, and double the two driving mechanisms for the X direction and the Y direction. Since it does not have a means of stacking the two, it is effective in reducing the size and weight of the entire device.

[0005]

However, in the one disclosed in the above-mentioned Japanese Patent Laid-Open No. 5-336730, the terrace driving coil is provided in each quadrant of the first to fourth quadrants on the XY plane. Therefore, for example, if all four drive coils are operated, the driving in the directions along the X-axis and the Y-axis can be smoothly performed, but the X-axis and the Y-axis can be operated.
Regarding the driving in the intermediate direction (oblique direction) with respect to the shaft, there has always been a problem that the driving force cannot be smoothly performed due to the rotational force. For this reason, when the movable table is planarly moved in an oblique direction, for example, the driving of the rectangular drive coil located in the direction along the moving direction must be stopped, and the driving force is generally reduced. was there.

[0006]

It is an object of the present invention to improve the disadvantages of the conventional example, and in particular, to quickly move a movable work table for precision work in a predetermined direction on the XY plane without reducing the driving force as a whole. To provide a stage device for precision processing that can be moved and reduced in size and weight of the entire device.
To that end.

[0007]

In order to achieve the above object, the present invention adopts the following method. Claim 1
In the invention described above, a movable table arranged so as to be movable in an arbitrary direction on the same surface, and a table holding function that allows the movable table to move to hold the movable table and also has a function of returning to the original position. It is provided with a mechanism, a main body portion that supports the table holding mechanism, and an electromagnetic drive unit that is mounted on the main body portion and applies a moving force to the movable table described above.

The electromagnetic drive means is provided with a plurality of driven magnets fixedly installed at a predetermined position of the movable table, and is individually arranged so as to face each of the driven magnets, and the above-mentioned driven magnets are provided therebetween. The movable table is composed of a plurality of terrace-shaped drive coils that apply a predetermined electromagnetic driving force along a predetermined movement direction, and a fixed plate that holds the terrace-shaped drive coils.

Here, either the vertical direction or the horizontal direction of the cross-shaped coil side formed inside each of the above-mentioned terrace-shaped drive coils is located on the center point side on the XY plane on the movable table side. So as to face (so that the center point on the XY plane exists on the extension line of one of the coil sides),
The respective terrace drive coils were arranged and fixed on the above-mentioned fixed plate. Then, the configuration is adopted in which the outer contour coil portion of the above-mentioned terrace-shaped drive coil is set to be larger than the size of the driven magnet described above.

Therefore, the electromagnetic driving force generated between each of the plurality of terrace-shaped driving coils and the corresponding driven magnets is always X.
It is generated in the direction from the center point on the -Y plane to the outside, so that the resultant force always passes through the center point on the XY plane, and it always rotates even if the transfer direction changes at that point. It is possible to smoothly move the movable table in the plane (within the set range on the XY plane) without causing the movement.

That is, by appropriately setting the magnitude and the direction of the electromagnetic driving force generated by each terrace driving coil, the electromagnetic driving force generated for each terrace driving coil can be efficiently moved without rotation. It can be transmitted to the table, and the movable table can be efficiently transferred in a predetermined intended direction.

Further, when the movable table is rotationally driven, the coil portion passing through the center point on the XY plane, which is one of the cross-shaped coil sides of each terrace driving coil, is moved in a predetermined direction (electromagnetic force in the rotating direction). It is energized so that a driving force is generated. In this case, to intend a smooth rotation operation,
It is realized by arranging a plurality of driven magnets in advance on a movable table in a well-balanced manner and correspondingly mounting the drive coil on the fixed plate.

Here, in the present invention, since the electromagnetic driving force of an analog amount can be output in a predetermined direction by adjusting the energizing current to each of the plurality of terrace driving coils, the movable table can be moved in micron units. Precise movement is possible.

According to a second aspect of the present invention, in the precision machining stage device according to the first aspect, the table holding mechanisms are arranged in parallel on the same circumference of the peripheral end portion of the movable table at a predetermined interval. And at least one one of the rod-shaped elastic members whose one end is planted on the movable table, and a predetermined one on the same circumference corresponding to each of the one rod-shaped elastic members and outside the rod-shaped elastic members. At least three other rod-shaped elastic members of the same length, which are arranged in parallel at a distance and whose one end is held by the main body, and the other end of each of the one and the other rod-shaped elastic members are in parallel state. It is configured by a relay member that is integrally held while being maintained.

Then, a method is adopted in which the three sets of rod-shaped elastic members of the table holding mechanism are constituted by rod-shaped elastic members such as a piano wire having the same strength and the same length.

Therefore, in the invention according to claim 2,
In addition to having the same function as that of the invention described in claim 1, the movable table is movably held on the same plane by the table holding mechanism described above. in this case,
For example, when the movable table slides in the same direction as a whole, the rod-shaped elastic members of each set all deform in the same manner. On the other hand, since each rod-shaped elastic member on the main body side elastically deforms in a state in which the end portion is held, the height position of the movable table becomes unchanged due to the deformation operation of each rod-shaped elastic member on the table side that also elastically deforms, Instead, the height position of the relay member commonly supported by the rod-shaped elastic members changes.

That is, this relay member absorbs the variation of the height position caused by the deformation of each rod-shaped elastic member (piano wire or the like), so that the movable table is entirely varied in the height direction. Instead, slide in the same plane.
In this case, when the electromagnetic driving force is released, the movable table linearly returns to the original position by the spring action of each rod-shaped elastic member (actuation of the original position return function).

Further, even when the movable table is rotationally driven in the same plane, for the same reason, the movable table is rotated in the same plane while maintaining substantially the same height as a whole. . Also in this case, when the electromagnetic driving force is released, the movable table returns to the original position in a straight line by the spring action of each rod-shaped elastic member. In the operation of each of these parts, since there is no frictional part at all, smooth planar movement of the movable table is realized in a stable state.

According to a third aspect of the invention, in the precision machining stage device according to the first aspect, an auxiliary table is provided on the movable table in a state of being close to and facing the movable table, and via the auxiliary table. The table holding mechanism is configured to hold the movable table described above, and at least the auxiliary table is equipped with the plurality of driven magnets described above, whereby the electromagnetic driving means described above moves in a plane to the movable table through the auxiliary table. It is characterized by the fact that it applies force. Other configurations are the same as the invention described in claim 1 described above.

Therefore, according to the invention of claim 3,
In addition to having the same function as that of the invention described in claim 1, the electromagnetic driving means further urges the plane moving force to the movable table through the auxiliary table, so that there is a margin in the structure and this point. It is possible to boost productivity and maintainability.

According to a fourth aspect of the present invention, the above-mentioned table holding mechanism has the same structure as the table holding mechanism disclosed in the above-mentioned stage device for precision machining according to the second aspect, and the table holding mechanism assists the table holding mechanism. It is characterized in that the above-mentioned movable table is held via the table. The other constitution is the above-mentioned claim 3.
It is the same as the invention described.

Therefore, according to the invention of claim 4,
In addition to having the same function as that of the invention described in claim 3 described above, it also functions exactly the same as the table holding mechanism disclosed in claim 2 described above, and the movable table can be operated without changing the height position of the movable table. It is designed so that it can be moved in the plane. Also, in the invention according to claim 4 as well, since there is no frictional portion at the time of the operation of each part as in the table holding mechanism according to claim 2 described above, the planar movement of the movable table can be performed smoothly in a stable state. Is being realized.

According to a fifth aspect of the present invention, in the precision machining stage device according to the third or fourth aspect, each terrace drive coil is provided in a state of penetrating the fixed plate. The driven magnets are respectively arranged on the movable table and the auxiliary table in correspondence with the respective end faces of the terrace driving coils.

Therefore, according to the invention of claim 5,
Besides having inventions equivalent functions of the foregoing claims 3 or 4, further, since the disposed respectively driven magnets to each of the movable table and the auxiliary table, auxiliary table at twice the driving force (i.e., It is possible to drive the movable table) in a plane, and in this respect, there is an advantage that the performance of the entire apparatus can be expected to improve.

In each of the sixth to eighth aspects of the invention, in the precision machining stage apparatus according to the first, second, third, fourth or fifth aspect, an even number of driven magnets are provided and the even number of driven magnets is provided. It is characterized in that the arrangement of the drive magnets is limited.

That is, according to the sixth aspect of the present invention, an even number of driven magnets are arranged at equal intervals on the same circumference, and by this, each driven magnet whose position is specified is individually shaped. The drive coils were each placed on a fixed plate.

According to the invention of claim 7, an even number of covered objects is provided.
The drive magnets are arranged at line symmetric positions (horizontal symmetric positions) with respect to at least the X axis on the XY plane which is assumed to have the center of the movable table as the origin. Then, the above-mentioned D-shaped drive coil is arranged on the fixed plate in correspondence with each driven magnet whose position is specified.

Further, in the invention according to claim 8, the plurality of driven magnets described above are respectively arranged at predetermined positions on each of the positive and negative axes on the XY plane which is assumed to be the center of the movable table as an origin. Arrange each. Then, at least four terrace-shaped drive coils are individually provided on the fixed plate in correspondence with the respective at least four driven magnets whose positions are specified.

Therefore, each of the inventions described in claims 6 to 8 functions in the same manner as the invention described in any one of claims 1 to 5 described above, and also occurs in each driven magnet. A plurality of electromagnetic driving forces are generated with respect to the origin O of the central portion on the XY axes, and the resultant force is formed. At this point, the rotational movement component is surely eliminated, and the movable table is moved to the X-axis. It is possible to smoothly move in a predetermined direction on the Y axis without meandering.

According to each of the ninth to twelfth aspects of the invention, in the precision machining stage device according to any one of the first to eighth aspects, the outer shape of the terrace drive coil is specified. Have.

That is, in the present invention as defined in claim 9, each grid-shaped drive coil is composed of four rectangular small rectangular coils that can be independently energized, and the overall shape of the combination is rectangular. And In the invention according to claim 10, each of the terrace-shaped drive coils is composed of four triangular small rectangular coils that can be independently energized, and the overall shape of the combination is rhombic. Claim 1
In the invention described in 1, each of the terrace driving coils is composed of four fan-shaped rectangular small coils that can be independently energized, and the overall shape of the combination is circular. According to the twelfth aspect of the present invention, each grid-shaped drive coil is composed of four pentagonal small coils that can be independently energized, and the overall shape of the combination is octagonal.

Therefore, each of the inventions described in claims 9 to 12 functions in the same manner as the invention described in any one of claims 1 to 8 described above, and further, each square small coil is energized. By specifying the direction from the outside, for example, the total current value flowing in the cross-shaped portion inside the rice-shaped drive coil is apparently equivalent to a state in which the current is limited to either the vertical direction or the horizontal direction (operation It is possible to output an electromagnetic force that presses the driven magnet in a predetermined direction according to Fleming's left-hand rule for the correspondingly arranged driven magnet. You can

Therefore, in each of the inventions described in claims 9 to 12, it is possible to set the terrace-shaped drive coil corresponding to the shape and structure of the movable table and other environmental conditions. The versatility of can be improved.

According to a thirteenth aspect of the present invention, in the precision machining stage apparatus according to any one of the first to twelfth aspects, the end face portion on the side of the driven magnet of the terrace drive coil has a non-shape. A braking plate made of a magnetic metal member is arranged close to the magnetic pole surface of the driven magnet, and the braking plate is fixedly installed on the fixed plate side.

Therefore, the invention according to claim 13 has the same function as the invention according to any one of claims 1 to 12 described above, and further, an auxiliary table equipped with a driven magnet. Alternatively, when the movable table makes an abrupt movement, an electromagnetic braking force (eddy current brake) having a magnitude proportional to the moving speed is generated between the driven magnet and the braking plate, and the auxiliary table or the movable table suddenly moves. Such movements are suppressed and gradually move.

On the other hand, when the above-mentioned table holding mechanism having a spring property is adopted, the auxiliary table (or the movable table) is repeatedly operated under the influence of inertial force when the operation is stopped (reciprocating operation at the balance position). ) Occurs. Even in such a case, an eddy current having a magnitude proportional to the moving speed flows on the braking plate due to the abrupt movement of the driven magnet (including reciprocating reciprocating movement), and the eddy current is generated between the eddy current and the magnetic field line of the driven magnet. Electromagnetic braking (eddy current braking) similar to that described above occurs. The electromagnetic braking (eddy current braking) suppresses the reciprocating repetitive motion of the auxiliary table (or the movable table) to which the driven magnet is attached,
The auxiliary table (or movable table) will move smoothly to a predetermined position and stop in a stable state.

Further, the metallic braking plate made of a non-magnetic member mounted on the end face portion of each terrace drive coil constitutes the secondary side circuit of the transformer in relation to each terrace drive coil, In addition, a short circuit is formed through a predetermined low resistance (which causes eddy current loss). Therefore, in this case, each of the terrace drive coils forming the primary side circuit is
It can carry a relatively large current, which is why
Even if the braking plate is present between the driven magnet and the driven magnet, a relatively large electromagnetic force can be output.

Further, this braking plate also functions as a heat radiating plate, and in this respect, it is possible to effectively suppress the aging change (dielectric breakdown due to heat) due to the continuous operation of the D-shaped drive coil, and thus the entire device. The durability of the device can be increased, and the reliability of the entire device can be improved.

According to a fourteenth aspect of the present invention, in the precision machining stage device according to any one of the first to thirteenth aspects, the movable table is moved in a plane by the electromagnetic driving means. A motion control system that regulates Then, this operation control system selectively energizes and controls at least one of the crosswise coil sides of the plurality of cross-shaped drive coils included in the electromagnetic drive means so as to be operable, as described above. A coil drive control means for controlling movement of the movable table in a predetermined direction,
Is adopted.

Therefore, the invention according to claim 14 has the same function as the invention according to any one of claims 1 to 13 described above, and further, the operation control system functions effectively. It is possible to move the movable table in a predetermined direction by operating a plurality of terrace drive coils.

According to each of the fifteenth to sixteenth aspects of the invention, in the precision machining stage device according to any one of the first to thirteenth aspects, first, the electromagnetic driving means moves or rotates the movable table. A motion control system that regulates motion is also installed. This operation control system includes a coil drive control means for controlling the drive of each of the plurality of terrace-shaped drive coils of the electromagnetic drive means in accordance with a predetermined control mode, and a moving direction and a rotation direction of the movable table which is provided along with the coil drive control means. , And a program storage unit that stores a plurality of control programs according to a plurality of control modes whose operation amounts and the like are specified, and a data storage unit that stores predetermined coordinate data and the like used when executing each control program. It is configured with. The coil drive control means is provided with an operation command input section for instructing a predetermined control operation for each of the plurality of terrace drive coils (claim 15).

Further, the above-mentioned program storage section has a drive pattern storage area for storing four basic fixed energization patterns for the rectangular drive coil.

The program storage unit is arranged such that the movable table described above is moved in the positive and negative X-axis directions and the positive and negative Y-axis directions on the XY plane which is assumed to be the center of the fixed plate. First to fourth control modes for moving the movable table, fifth to eighth control modes for moving the movable table in a predetermined direction within each quadrant set on the XY plane, and the movable table at a predetermined position. And a control mode storage area for storing each operation program in each of the ninth to tenth control modes for rotating the positive or negative direction. And, in this program storage section,
The energization patterns and the operation programs described above are stored so as to be output to the coil drive control means described above (claim 16).

Therefore, each of the inventions described in claims 15 to 16 has a function equivalent to that of the invention described in any one of claims 1 to 13, and further, an operation command input unit The coil drive control means operates based on the command, and the information of the moving direction destination and a predetermined control mode for movement are taken out from the program storage section and the data storage section, and based on this, each of the plurality of electromagnetic drive means described above is extracted. The grid-shaped drive coil is drive-controlled, thereby functioning to move the movable table in a predetermined direction.

In this case, in particular, in the invention described in claim 16, the control mode (a mode of energization control) for each grid drive coil specified by the moving direction is stored in advance, and based on this, each grid drive is performed. The coil is drive-controlled. Therefore, there is an advantage that a command from the operation command input unit can be quickly responded to.

According to a seventeenth aspect of the present invention, in the precision machining stage device according to any one of the first to sixteenth aspects, a plurality of position detections for detecting the movement information of the movable table and outputting it to the outside are performed. Sensors are distributed and installed at a plurality of positions on the peripheral edge of the movable table, and a predetermined calculation is performed based on the information detected by the plurality of position detection sensors, and the moving direction of the movable table and its change amount, etc. Is provided and a position information calculation circuit for externally outputting the position information as position information is provided.

Therefore, the invention according to claim 17 has the same function as that of the invention according to any one of claims 1 to 16 described above, and further, the movement information of the movable table and the information after the movement. The position information can be output to the outside in real time, which allows the operator to easily grasp the moving direction of the movable table, the positional deviation after the movement, and the like from the outside, so that the necessity of redoing or correcting can be promptly confirmed. Therefore, it is possible to perform the moving operation of the auxiliary table (that is, the movable table) with high accuracy and speed.

According to the eighteenth aspect of the invention, in the precision machining stage device according to any one of the third, fourth and fifth aspects, a plurality of the moving table movement information are detected and externally output. The position detection sensors are separately installed at a plurality of positions of the auxiliary table described above, and predetermined calculation is performed based on the information detected by the plurality of position detection sensors, and the moving direction of the movable table and its change amount, etc. Is provided and a position information calculation circuit for externally outputting the position information as position information is provided.

Therefore, according to the eighteenth aspect of the present invention, in addition to having the same function as the above-mentioned third, fourth or fifth aspect of the present invention, the movement information of the movable table and the position information after the movement are real time. Can be output externally. As a result, the operator can claim the above-mentioned claim 17.
As in the case of the described invention, the moving direction of the movable table, the positional deviation after the movement, and the like can be easily grasped from the outside, so that the necessity of redoing or correction can be grasped promptly, and the auxiliary table ( That is, the moving work of the movable table) can be performed quickly and highly accurately.

According to a nineteenth aspect of the invention, in the precision machining stage device according to any one of the first to eighteenth aspects, the driven magnet is a permanent magnet.
The method is adopted.

Therefore, the nineteenth aspect of the present invention has the same function as the invention according to any one of the first to eighteenth aspects, and further, the energizing circuit required by the electromagnet is not required. As a result, since the structure is simplified, productivity and maintainability can be improved, the failure rate of the entire apparatus can be reduced, and durability can be improved in this respect.

[0052]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the accompanying drawings.

[0053]

[First Embodiment] A first embodiment of the present invention is shown in FIGS. 1 to 18, reference numeral 1 indicates a movable table, and reference numeral 2 indicates a table holding mechanism.
The table holding mechanism 2 is arranged in the lower portion of FIG. 1, and allows the movable table 1 described above to move in any direction within the same plane and has a function of returning the original position to the movable table 1. The movable table 1 is configured to be held in a state in which the original position restoring force can be applied to the movable table 1.

The table holding mechanism 2 is supported by a case main body 3 as a main body. Case body 3
In the present embodiment, as shown in FIG. 1, the box is formed in a box shape having an open upper portion and a lower portion. Appendix No. 4 shows an electromagnetic drive means. The electromagnetic driving means 4 has a main part held on the case body 3 side and has a function of urging a moving force to the movable table 1 described above. Reference numeral 3A indicates a driving means holding portion that is provided so as to project around the inner wall portion of the case body 3.
And this electromagnetic drive means 4 is arrange | positioned between the movable table 1 and the auxiliary table 5 mentioned later in this embodiment.

An auxiliary table 5 is connected to the movable table 1 in parallel with the movable table 1 at a predetermined interval. The table holding mechanism 2 described above is mounted on the side of the auxiliary table 5 and configured to hold the movable table 1 via the auxiliary table 5.

The above-mentioned electromagnetic drive means 4 is provided with four square-shaped driven magnets 6 fixedly mounted at predetermined positions of the auxiliary table 5 and the driven magnets 6 facing each other, as will be described later. A cross-shaped drive coil 7 which has a cross-shaped coil side and electromagnetically applies a predetermined driving force to the driven magnets 6 along the predetermined moving direction of the movable table 1 described above; It is provided with a fixed plate 8 mounted on the movable table 1 side of the above-mentioned auxiliary table 5 while holding the grid-shaped drive coil 7 in a fixed position. Of this,
The cross-shaped drive coil 7 and the fixed plate 8 constitute the main part of the electromagnetic drive means 4 described above.

Further, a braking plate 9 made of a non-magnetic metal member is provided close to the magnetic pole surface of the driven magnet 6 on the side of the end face of the above-mentioned terraced drive coil 7 facing the driven magnet 6 described above. It is installed in. This braking plate 9 is in a state of being fixed to the above-mentioned fixed plate 8 side.

This will be described in more detail below. [Movable Table and Auxiliary Table] First, in FIGS. 1 to 4, in the present embodiment, the movable table 1 is formed in a circular shape, and the auxiliary table 5 is formed in a quadrangular shape. The auxiliary table 5 is arranged in parallel with the movable table 1 so as to face the movable table 1 and at a predetermined interval, and the connecting column 1 at the center thereof.
It is integrally connected to the above-mentioned movable table 1 through 0. Therefore, this movable table can move integrally and rotate integrally while maintaining the parallel state with the auxiliary table 5.

The connecting column 10 is a connecting member for connecting the movable table 1 and the auxiliary table 5 as described above, and is formed in a cross-section having a collar portion 10A, 10B at both ends, and both ends thereof. A positioning hole 1 formed at the center of each of the movable table 1 and the auxiliary table 5 at the outer center of the part.
Protrusions 10a and 10b that engage with a and 5a are provided.

The movable table 1 and the auxiliary table 5
Is positioned by the projections 10a and 10b and the flange portions 10A and 10B, and is fixed and integrated with the connecting column 10. In this embodiment, an adhesive is used for this integration, but it may be partially joined by welding, or the protrusions 10a, 10b may be positioned in the positioning holes 1a,
You may press fit in 5a and may integrate other parts by an adhesive agent or welding.

The movable table 1 or the auxiliary table 5
Either one of them may be detachably fixed to the collar portion 10A or 10B of the connecting column 10 described above by screwing. In this case, it is advisable to drive several knock pins between the two engaging with each other for positioning and fixing after screwing (not shown). This is convenient because the movable table 1 and the auxiliary table 5 can be integrated more effectively.

[Table Holding Mechanism] In the present embodiment, the table holding mechanism 2 holds the movable table 1 and holds the movable table 1 in any direction on the same plane without changing the height position thereof. It also has a function that allows it to move freely, and at the same time, has a function of returning the movable table 1 to its original position when the external force is released. It is the one that is supposed to be executed.

The table holding mechanism 2 is an application of a link mechanism to a three-dimensional space as a whole, and is a piano wire (movable table 1 and auxiliary table) as two rod-shaped elastic members installed at a predetermined interval. As long as it is a rod-shaped elastic member having sufficient rigidity to support the table 5, it may be formed of other material) as a set to correspond to the corner portion around the end of the auxiliary table 5 in advance. Then, four sets of the piano wires are prepared, and the four sets of the piano wires are divided into the four corner portions of the relay plate 2G as a relay member formed in a quadrangular shape, and the piano wires are respectively planted in the upward direction. Then, the auxiliary table 5 is held from below by the four piano wires 2A located inside, and the relay plate 2G as a relay member is swingably suspended from the main body portion 3 by the four piano wires 2B located outside. The configuration was lowered.

As a result, the auxiliary table 5 (that is, the movable table 1) is held by the relay plate 2G and each of the four piano wires (bar-shaped elastic members) 2A, 2B in a stable manner in the air, and within the horizontal plane. As described later, it is possible to freely move in any direction while maintaining the same height position. Rotational movement in the same plane is possible in almost the same manner.

This will be described in more detail. The above-described table holding mechanism 2 includes four table-side piano wires (table-side rod-shaped elastic members) 2A which are planted downward from the four corners of the peripheral end portion of the auxiliary table 5 in FIG. 1, respectively. A relay plate 2G as a relay member mounted on the lower end of the table-side piano wire 2A in FIG. 1, and a relay plate 2G that is configured to hang the relay plate 2G from the main body side and is mounted on the outside of the table-side piano wire 2A described above. The main body side piano wire (main body side rod-shaped elastic member) 2B is provided.

The upper ends of the four piano wires 2A on the table side in FIG. 1 are fixed to the auxiliary table 5 and the lower ends thereof are fixed to the relay plate 2G. Reference numerals 5A and 5B
Indicates downward projections provided at two locations on the lower surface side of the auxiliary table 5. The fixed position of the table-side piano wire 2A is set by the downward protrusions 5A and 5B.

Also, each of the four piano wires 2A on the table side
Main body side piano wires 2B are individually and in parallel arranged on the outer side of the above, respectively and at predetermined intervals S. The main body side piano wire 2B has a lower end portion fixed to a relay plate (relay member) 2G similarly to the table side piano wire 2A described above, and an upper end portion thereof is a main body side protrusion provided on an inner wall portion of the case body 3. It is fixed to the portion 3B. Each of the piano wires 2A and 2B is formed of an elastic wire material having an appropriate rigidity sufficient to support the movable table 1 and the auxiliary table 5 as described above.

As a result, the movable table 1 described above is
First, the auxiliary table 5 is supported on the relay plate 2G by the inner four piano wires 2A on the table side,
Within the elastic limit of the four table-side piano wires 2A, their parallel movement and in-plane rotation are permitted according to the principle of the link mechanism.

On the other hand, since the relay plate 2G is suspended from the main body side protruding portion 3B by the outer four table side piano wires 2B on the relay plate 2G, it is parallel to the case main body 3. Movement and in-plane rotation are also allowed.

For this reason, when the auxiliary table 5 (that is, the movable table 1) moves or rotates in the plane thereof by being urged by an external force, each of the table side and the case body side is moved as shown in FIG. The piano wires 2A and 2B simultaneously elastically deform and the relay plate 2G moves up and down while maintaining the parallel state. That is, when the auxiliary table 5 (that is, the movable table 1) moves or rotates in its plane by an external force,
The variation of the height position is absorbed by the relay plate 2G. As a result, the movable table 1 can move in any direction while maintaining the same height within the elastic limit of the piano wires 2A and 2B even if the movable table 1 is moved by being urged by an external force. There is.

Therefore, in the present embodiment, four sets of the piano wires 2A and 2B on the table side and the case body side are equidistantly arranged, and the piano wire 2A on the table side and the piano wire on the case body side are installed. Since the line 2B and the line 2B are provided in close proximity to each other with a predetermined distance, the strength is well balanced, and the movable table 1 can be moved in a stable state.

Here, the piano wires 2A and 2B on the table side and the case body side have the same diameter and the same elasticity, and the lengths L of their exposed portions are set to be exactly the same. ing. Also, each piano wire 2A, 2
As shown in FIGS. 1 and 3, for example, B is arranged in the left-right direction with respect to the Y-axis and in the vertical direction with respect to the X-axis. At positions that are line-symmetric with respect to the axis (or each piano wire 2
As long as A and 2B are arranged substantially evenly, they may be arranged at a position other than the position shown in FIG.

Then, as described above, each piano wire 2A,
By arranging 2B, since elastic stress is uniformly generated in each piano wire 2A, 2B when the movable table 1 moves, the movable table 1 can be smoothly moved including the original position returning operation of the movable table 1. You can get the advantage of getting.

As described above, the table holding mechanism 2 described above is used.
Then, for example, when the auxiliary table 5 slides in the same direction as a whole, all the piano wires 2A and 2B of each set are deformed in the same manner. In this case, since the main body side piano wire 2B is elastically deformed in a state where the end portion is held, the height position of the auxiliary table 5 becomes unchanged due to the deformation operation of the table side piano wire 2A which is also elastically deformed, and instead, The height position of the relay plate 2G, which is commonly supported by both piano wires 2A and 2B, changes.

In other words, the relay plate 2G absorbs the variation of the height position caused by the deformation of the piano wires 2A and 2B, whereby the auxiliary table 5 (that is, the movable table 1) is entirely raised. It will slide in the same plane without changing. In this case, when the driving force is released from the auxiliary table 5, the auxiliary table 5 linearly returns to the original position by the spring action of the piano wires 2A and 2B (actuation of the original position returning function).

The auxiliary table 5 (movable table 1)
Even when is driven to rotate in the same plane, for the same reason, the auxiliary table 5 (movable table 1) is rotated in the same plane while maintaining substantially the same height as a whole. Also in this case, when the driving force is released, the auxiliary table 5 linearly returns to the original position by the spring action of the piano wires 2A and 2B (actuation of the original position returning function).

Here, the table holding mechanism 2 exemplifies a case in which four sets of eight piano wires 2A and 2B are provided, but both piano wires 2A and 2B are arranged in a proper balance (for example, at equal intervals). Therefore, it may be configured with three sets and six pieces. In this case, 3 sets of 6 piano wires 2A, 2B are 1
The pair of piano wires 2A and 2B may be arranged close to each other, and as a whole, the three pairs of piano wires 2A and 2B may be provided at substantially equal intervals (evenly in three places). Further, it is also possible to incorporate five or more sets of both piano wires 2A and 2B.

[Electromagnetic Driving Means] Between the movable table 1 and the auxiliary table 5, as described above, the auxiliary table 5 is provided.
An electromagnetic drive means 4 is provided to apply a predetermined moving force to the movable table 1 via the motor (see FIG. 1).

This electromagnetic drive means 4 is, as described above,
In this embodiment, four driven magnets mounted on the auxiliary table 5 (in this embodiment, permanent magnets are used)
6, four pad-shaped drive coils 7 that apply a predetermined electromagnetic force to the movable table 1 in a predetermined moving direction via the driven magnets 6, and hold the respective pad-shaped drive coils 7. And a fixed plate 8 for

As shown in FIG. 1, the fixed plate 8 is provided on the movable table 1 side of the auxiliary table 5 (between the auxiliary table 5 and the movable table 1), and the periphery thereof is fixed to the case body 3. Equipped. Here, the fixing plate 8 may be configured such that only the left and right ends of FIG. 1 are fixedly mounted on the case body 3. A through hole 8A is formed in the central portion of the fixed plate 8 to allow the parallel movement of the connecting column 10 within a predetermined range. In this embodiment, the through hole 8A has a circular shape, but may have a rectangular shape or another shape.

As described above, the entire periphery of the fixed plate 8 is held by the main body side protruding portion 3. In this case, the fixing plate 8 and the main body side protruding portion 3A may be integrated with a knock pin or the like after screwing, or may be integrated with welding or the like in order to make the integration robust. By doing so, there is an advantage that the fixed plate 8 can smoothly cope with displacement and movement in units of micron (μ) of the movable table without causing positional displacement with respect to the case body 3. Occurs.

As shown in FIGS. 2 and 3, the above-mentioned four driven magnets 6 are permanent magnets having a quadrangular surface facing the drive coil in the present embodiment. On the XY plane consisting of the orthogonal X and Y axes,
They are arranged and fixed on the X axis and the Y axis at positions equidistant from the center. At a position facing the four driven magnets 6, there is a cross-shaped coil side in the central portion, and an electromagnetic wave is applied to each of the driven magnets 6 along a predetermined moving direction of the movable table 1 described above. The field-shaped driving coil 7 that applies a predetermined driving force to the four driven magnets 6 described above.
Is fixedly installed at a fixed position on the fixed plate 8 in correspondence with the above.

That is, each of the four terrace-shaped drive coils 7 is fixedly mounted on the fixed plate 8 at a position (on the X-axis and the Y-axis) facing the above-mentioned four driven magnets 6.
In this case, one of the crosswise coil sides formed inside each of the terrace driving coils 7 in the vertical direction or the horizontal direction is directed toward the center point on the XY plane of the movable table 1 described above. It is located in. Therefore, for example, in the present embodiment, the X
The cross-shaped coil side of the grid-shaped drive coil 7 mounted on the shaft is on the fixed plate 8 with its longitudinal portion orthogonal to the X axis and its lateral portion along the X axis. It is fixedly installed in place.

In this case, the directions of the four driven magnets 6 are
In this embodiment, the magnetic poles on the side facing the D-shaped drive coil 7 are set to the N pole on the X axis and the S pole on the Y axis (see FIGS. 2 and 3). .

Therefore, the electromagnetic force generated between the current generated in the vertical or horizontal direction of the cross-shaped coil side and the driven magnet 6 is always unified in the X-axis direction or the Y-axis direction, and the resultant force is the same. It is always set to the maximum value. Therefore, the generated electromagnetic force can be efficiently output as a driving force for the movable table 1, which is convenient.

Further, the size of the above-mentioned terrace-shaped drive coil 7 is set such that the area of the inner side of the cross-shaped coil allows the maximum movement range of the driven magnet 6 described above. .

Therefore, the electromagnetic force generated between the four driven magnets 6 is transmitted through the driven magnets 6 by the fixed shape of the fixed driving plate 7 which is fixed on the fixing plate 8. As a result, the driving force for the auxiliary table 5 in the predetermined direction is reliably output.

[Rectangular Driving Coil] The rectangular driving coil 7 forming the main part of the electromagnetic driving means 4 is actually four rectangular small coils 7a that can be independently energized, as shown in FIG. 5, for example. , 7b, 7c, 7d.

Therefore, by switching the energization direction of each of the small rectangular coils 7a to 7d from the outside by the operation control system described later, for example, the current flowing in the cross-shaped portion inside the grid-shaped drive coil 7 is shown in the figure. It becomes possible to energize (including the forward or reverse direction) only in one of the vertical direction and the horizontal direction, and the driven magnet 6 arranged corresponding to this can be operated by the left hand of Fleming. According to the law, it is possible to output an electromagnetic force (reaction force) that presses each driven magnet 6 in a predetermined direction.

Therefore, the four small rectangular coils 7a to 7d
By combining the directions of the electromagnetic force generated in the crosswise coil side portion located inside the above-mentioned rice-shaped drive coil 7, the energization state in either the vertical direction or the horizontal direction is set, The electromagnetic driving force in a predetermined direction is output to the corresponding driven magnet 6 by. Then, by the resultant force of the electromagnetic driving forces generated in the above-mentioned four driven magnets 6, a moving force is urged to the above-mentioned auxiliary table 5 in an arbitrary direction including a rotational operation on the XY axes. It has become so.

A series of energization control methods for these four small rectangular coils 7a to 7d will be described in detail in the description section (FIGS. 6 and 8) of the program storage unit 22 described later.
Further, the four small rectangular coils 7a to 7d may be hollow coils, but may be filled with a conductive magnetic member such as ferrite inside. Reference numeral 9 indicates a braking plate fixedly provided on the side of the D-shaped drive coil 7 so as to closely face the driven magnet 6. The braking plate 9 will be described in detail later.

[Position Information Detection Means] The movement state of the auxiliary table 5 (that is, the movable table 1) driven by the electromagnetic drive means 4 is detected by the position information detection means 25.

As shown in FIG. 6, the position information detecting means 25 includes a capacitance sensor group 26 having a plurality of capacitance-type detection electrodes in this embodiment, and a plurality of capacitance sensor groups 26 detected by the capacitance sensor group 26. And a position information calculation circuit 27 as a calculation unit that converts the capacitance change component of the voltage into a voltage and performs a predetermined calculation to send it as position change information to the table drive control means 21 described later.

Of these, the position information arithmetic circuit (arithmetic unit) 27
Is a signal conversion circuit unit 27A for individually voltage-converting a plurality of capacitance change components detected by the capacitance sensor group 26 described above.
And a voltage signal applied to the plurality of capacitance change components converted by the signal conversion circuit unit 27 is converted into an X-direction position signal V _X and a Y-direction position signal V _Y indicating a position on the XY coordinates by a predetermined calculation. And a position signal calculation circuit section 27B for calculating and outputting the rotation angle signal θ.

As shown in FIGS. 1 to 4, the capacitance sensor group 26 having a plurality of detection electrodes described above is opposed to the lower surface portion around the auxiliary table 5 and the upper surface of the main body side protruding portion 3B described above. Eight prism-shaped capacitance detection electrodes 26X ₁ , 26X ₂ , 26X ₃ , 26X arranged at predetermined intervals
₄ , 26Y ₁ , 26Y ₂ , 26Y ₃ and 26Y _4, and a correspondingly wide common electrode (not shown) continuously provided on the lower surface around the auxiliary table 5 described above. It is composed by.

Therefore, in the case of the position detecting sensor,
Actually, each capacitance detection electrode 26X ₁, 26X₂, 26
X₃, 26X_Four, 26Y₁, 26Y₂, 26Y₃, 26
Y_FourAnd a common electrode (not shown)
However, here, for convenience, the capacitance detection electrode 26X₁, 26
X₂, 26X₃, 26X_Four, 26Y₁, 26Y₂, 26
Y₃, 26Y_FourShould be treated as a position sensor.
It

Each capacitance detection electrode (position detection sensor) 2
6X ₁ , 26X ₂ , 26X ₃ , 26X ₄ , 26Y ₁ , 2
Of 6Y ₂ , 26Y ₃ and 26Y ₄ , a pair of capacitance detection electrodes (position detection sensors) 26X ₁ and 26X ₂ are provided at the right end of FIGS. 2 and 3 at predetermined intervals along the vertical direction. On the other hand, another pair of capacitance detection electrodes (position detection sensor) 2
6X ₃ and 26X ₄ are provided at the left end of FIGS. 2 and 3 along the upper and lower sides at a predetermined interval.

Further, each of the capacitance detecting electrodes 26X₁, 26
X₂, 26X₃, 26X_Four, 26Y ₁, 26Y₂, 26
Y₃, 26Y_FourAmong them, a pair of capacitance detection electrodes (position detection
26Y₁, 26Y₂Is left and right on the upper end of Figs.
Along with the other, a pair of other capacity detection
Output electrode (position detection sensor) 26Y₃, 26Y_FourFigure 2
It is equipped at the lower end of Fig. 3 along the left and right with a predetermined interval.
ing.

That is, the above eight capacitance detection electrodes (position detection sensors) 26X ₁ , 26X ₂ , 26X ₃ , 26X ₄ ,
In the present embodiment, 26Y ₁ , 26Y ₂ , 26Y ₃ , and 26Y ₄ are arranged at positions symmetrical with respect to the X axis and the Y axis, respectively, as shown in FIGS. 2 to 4 and 7. Has been done.

Then, for example, the above-mentioned auxiliary table 5
When the movable table 1 (that is, the movable table 1) is urged by the electromagnetic drive means 4 to move in the direction of arrow F (upper right direction in the figure) as shown in FIG. 7A, in the present embodiment, the auxiliary table is used. One of the position detection sensors 26X ₁ , 26X ₂ (26Y ₁ , 26Y ₂ ) located on both sides (and in the vertical direction) of 5 and the other position detection sensor 26X ₃ , 26X ₄ (26Y ₃ ,
26Y ₄ ), the capacitance change component detected by the signal conversion circuit 27A is voltage-converted by the signal conversion circuit 27A and is then sent to the position signal calculation circuit 27B. The signal V _X and the Y-direction position signal V _Y are differentially output.

When the above-mentioned auxiliary table 5 is biased by the electromagnetic drive means 4 and is rotated in the direction of the arrow as shown in FIG. 7B, in the present embodiment, each section is the same as in the case described above. It operates so as to function in the same manner, and its change component is voltage-converted and differentially output as a predetermined rotation angle signal θ.

Here, as the auxiliary table 5 (movable table 1) moves, each of the four pairs of capacitance detection electrodes (position detection sensors) detects the capacitance change in real time and outputs it to the position information calculation circuit (calculation unit) 27. To do. The position information calculation circuit (calculation unit) 27 specifies the movement direction and the movement amount of the movable table based on the eight sensor information.

In this case, for example, when there is no change in the capacitance of the two pairs of position detection sensors mounted in the Y-axis direction, it means that the movable table has moved along the X-axis (without rotating operation). The amount of movement is determined and specified by increasing or decreasing the capacity of the two pairs of position detection sensors 26X ₁ , 26X ₂ and 26X ₃ , 26X _{4 in} the X-axis direction.

When the position detecting sensors in both the X-axis direction and the Y-axis direction detect the same capacitance change, it means that the movable table has moved in the 45 ° direction (without rotating operation). The movement direction is directly determined by the pattern of increase / decrease in the capacitance of each position detection sensor, and the movement amount is specified by the change amount of the capacitance of each position detection sensor.

Further, when the two position detection sensors forming a pair output different capacitance changes, it means that the movable table is rotating, and at the same time, the difference between the capacitance changes of the two position detection sensors of one side is detected. When the difference between the capacitance changes of the other two position detection sensors is equal, it means normal rotation.
In this case, the rotation direction of the movable table is determined by the pattern of increase / decrease in the capacity of each position detection sensor, and the amount of movement thereof is specified by the amount of change in the capacity of each position detection sensor.

Then, the movement direction is specified by the capacitance change pattern of each position detection sensor, and the relationship between the change amount of the position detection sensor capacitance and the movement amount of the movable table is actually experimentally beforehand. It is specified, mapped, and stored in a memory or the like, and the positional deviation or the like is judged based on this. As a result, speeding up of arithmetic processing is achieved.

Further, in the present embodiment, for example, FIG.
Noise that is simultaneously applied to each of the left and right (and up and down) capacitance detection electrodes is output as a differential output (for example, a difference in capacitance change detected by the capacitance detection electrodes arranged at one end and the other end in the X-axis direction). taking it: external noise immunity function) that can counteract the same time the change amount after the measurement value is converted into a voltage, for example, _{"(+ v X) - (-} v X) = 2v X " summed output as Therefore, there is an advantage that the position change information of the auxiliary table 5 (movable table 1) can be output with high sensitivity.

[Operation Control System] In the present embodiment, the electromagnetic drive means 4 described above is individually driven and controlled to individually drive the above-mentioned plurality of terrace-shaped drive coils 7, and the movable table 1 described above.
An operation control system 20 for restricting the movement or rotation of is also provided (see FIG. 6).

As shown in FIG. 6, this operation control system 20 individually drives each of the plurality of grid-shaped drive coils 7 of the electromagnetic drive means 4 in accordance with a predetermined control mode to drive the movable table 1 described above in a predetermined manner. Table drive control means 21 for controlling the movement in the direction, and the moving direction and rotation direction of the movable table 1 described above that is provided in parallel with the table drive control means 21.
And a program storage unit 22 that stores a plurality of control programs according to a plurality of control modes whose operation amounts and the like are specified, and a data storage unit 23 that stores predetermined data and the like used when executing each of these control programs. It has and.

The table drive control means 21 is provided with an operation command input section 24 for instructing a predetermined control operation for each of the plurality of terrace drive coils 7. Further, the position information during and after the movement of the movable table 1 is detected by the position detection sensor mechanism 25 described above, and is processed and sent to the table drive control means 21 with high sensitivity as described later. It is like this.

In the present embodiment, the above-mentioned table drive control means 21 operates based on a command from the operation command input section 24, and a predetermined control mode is set in the program storage section 2.
A main control unit 21A that controls the energization of a predetermined current to each of the plurality of terrace driving coils 7 selected from 2 and four predetermined terrace driving in accordance with the control mode set by the main controller 21A. .. and a coil selection drive control section 21B for controlling the drive of the coils 7, 7, ... Simultaneously and individually.

Further, the main controller 21A also has a function of calculating the position of the movable table 1 described above based on the input information from the position detecting sensor mechanism 25 for detecting the table position or performing other various calculations at the same time. ing. Reference numeral 4G indicates a power supply circuit section for supplying a predetermined current to each of the plurality of terrace driving coils 7 of the electromagnetic driving means 4 described above.

Further, the table drive control means 21 is
Information from the position detection sensor mechanism 25 described above is input to perform a predetermined calculation, and based on this, the operation command input unit 2 is preliminarily calculated.
The position deviation calculation function for calculating the deviation from the reference position information of the moving destination set in 4, and the electromagnetic driving means 4 is driven based on the calculated position deviation information to set the reference position of the moving destination to the preset reference position. It has a table position correction function for controlling the transfer of the movable table 1.

Therefore, in this embodiment, when the moving direction of the movable table 1 is deviated due to disturbance or the like, the movable table 1 is transferred and controlled in a predetermined direction while correcting the deviation. Thus, the movable table 1 is quickly and accurately transferred to a preset target position.

[Program Storage Unit] The table drive control means 21 described above operates in accordance with a predetermined control program (a predetermined energization pattern and a predetermined control mode which is a selected combination thereof) stored in the program storage unit 22 in advance. The four drive coils 7 of the drive means 4 are individually driven and controlled.

That is, in the program storage unit 22 described above, in the present embodiment, there are four basic energization patterns for executing the above-mentioned four terrace-shaped drive coils 7, 7 ,. The program is stored (see FIGS. 6 and 8).

FIG. 8 shows the terrace drive coil 7 (on the stator side).
4 kinds of energization patterns A, B, C, D for the four rectangular small coils 7a, 7b, 7c, 7d, and the directions of the currents generated at the cross-shaped portions of the respective rectangular drive coils at that time, and corresponding thereto The directions of the electromagnetic driving force (thrust) generated in the driven magnet (permanent magnet) 6 on the mover side are shown.

In FIG. 8, in the case of energization pattern A, the counterclockwise current is supplied to the small rectangular coils 7a and 7b, and the clockwise current is supplied to the small rectangular coils 7c and 7d. As a result, the magnetic flux output to the outside is entirely added or canceled at the cross-shaped coil side portion located in the central portion, and as a result, only the current I _{A in} the positive direction of the X axis is applied. It will be in the same state as.

In the energization pattern B, the rectangular small coils 7a to 7c are individually energized and controlled as shown in the drawing.
As a result, a state equivalent to that in which only the negative direction current I _{B on} the X axis is applied. In the energization pattern C, the rectangular small coils 7a to 7c are individually energized as shown in the figure, and the state is equivalent to that in which only the current I _{C in} the positive direction of the Y axis is energized. Similarly, the energization pattern D
Then, as shown in the drawing, the respective rectangular small coils 7a to 7c are individually controlled to be energized, whereby a state equivalent to that in which only the current I _{D in} the negative direction of the Y axis is energized is obtained. The above four energization patterns A, B, C, D are executed based on a predetermined control program stored in the program storage unit 22 in advance.

Further, the white arrows disclosed in FIG. 8 indicate electromagnetic drive generated between the driven magnet (permanent magnet) 6 on the mover side in correspondence with these energization patterns A, B, C and D. The direction of force (thrust) is shown respectively.

In this case, the corresponding electromagnetic force is generated by the Fleming's left-hand rule on the side of the energizing coil of the grid drive coil 7, but the grid drive coil 7 must be fixed on the fixed plate 8. The reaction force is generated as an electromagnetic driving force (thrust) toward the driven magnet (permanent magnet) 6 side. The white arrow disclosed in FIG. 8 indicates the reaction force (electromagnetic driving force). Therefore, the direction of this reaction force (electromagnetic driving force) is reversed depending on the types of the magnetic poles N and S of the driven magnet 6.

Further, in the program storage unit 22, the movable table 1 is set in the positive and negative directions of the X axis and the positive and negative directions of the Y axis on the XY plane which is assumed to have the center portion on the fixed plate 8 as the origin. First to fourth control modes for moving in two directions, fifth to eighth control modes for moving the movable table 1 in predetermined directions within each quadrant set on the XY plane, and a movable table. Each operation program for each of the ninth to tenth control modes for rotating 1 in the clockwise direction or the counterclockwise direction at a predetermined position is stored.

FIGS. 9 to 13 show the above-mentioned first
The following is an example of the functions of the respective rectangular shape drive coils 7 and the operating states of the auxiliary table (movable table 1) that occur when the operating programs according to the tenth to tenth control modes are executed.

FIGS. 9A and 9B show the state when the first control mode is executed. As shown in this figure, in this first control mode, the two grid-shaped drive coils 7 and 7 on the X-axis are energized and controlled by the method of the current pattern D, respectively, and the two grid-shaped drive coils on the Y-axis are controlled. 7,7
Are energized by the method of the current pattern C. In FIG. 9A, symbols N and S indicate the types of magnetic poles of each driven magnet (permanent magnet) 6.

As a result, in this first control mode, the arrows F _X1, F _X are applied to the driven magnets (permanent magnets) 6.
Electromagnetic driving force is generated in the directions of _X2, F _{X3, and} F _X4 , which drives the auxiliary table 5 in the positive direction (arrow + F _X ) on the X axis.

FIG. 9B shows each of the terrace driving coils 7,
The direction when the same electromagnetic driving force is generated on 7, ...
This is illustrated on the −Y coordinate. Therefore, when the auxiliary table 5 is transferred in the positive direction on the X axis,
It is important to generate a driving force of the same magnitude in each of the terrace driving coils 7, 7 on the Y axis.

In the case of the second control mode, since the auxiliary table 5 is transferred in the negative direction (not shown) on the X-axis, the respective grid drive coils 7, 7, ... Are energized. The current pattern may be set exactly opposite to that in the case of the above-mentioned first control mode. That is, in this second control mode, the two terrace-shaped drive coils 7 and 7 on the X-axis are energized and controlled by the method of the current pattern C, and the two terrace-shaped drive coils 7 and 7 on the Y-axis are respectively controlled. Current pattern D
Energization is controlled by this method. As a result, the auxiliary table 5 is smoothly transferred in the negative direction on the X axis (not shown).

FIGS. 10A and 10B show the state when the third control mode is executed. As shown in this figure, in this third control mode, the two grid-shaped drive coils 7 and 7 on the X-axis are each energized and controlled by the method of the current pattern A, and the two grid-shaped drive coils on the Y-axis are controlled. 7,
Each of 7 is energized by the method of the current pattern B.

As a result, in the third control mode, arrows F _Y1, F _Y are applied to each driven magnet (permanent magnet) 6.
Electromagnetic driving force is generated in the directions of _Y2, F _{Y3, and} F _Y4 , and as a result, the auxiliary table 5 is driven in the positive direction (arrow + F _Y ) on the Y axis.

FIG. 10 (B) shows each rice-shaped drive coil 7,
The direction of the resultant force when the same electromagnetic driving force is generated in 7, ... is illustrated on the XY coordinates. From this, Y
When transferring the auxiliary table 5 in the positive direction on the axis,
In particular, it is important to generate a driving force of the same magnitude in each of the terrace driving coils 7, 7 on the X axis.

In the case of the fourth control mode, the auxiliary table 5 is moved in the negative direction on the Y-axis (not shown), so that the respective coil drive coils 7, 7, ... Are energized. The current pattern may be set exactly opposite to that in the case of the above-mentioned third control mode. That is, in the second control mode, the two terrace-shaped drive coils 7 and 7 on the X-axis are energized and controlled by the method of the current pattern B, and the two terrace-shaped drive coils 7 and 7 on the Y-axis are respectively controlled. Current pattern A
Energization is controlled by this method. As a result, the auxiliary table 5 is smoothly transferred in the negative direction on the Y axis (not shown).

FIGS. 11A and 11B show the state when the fifth control mode is executed. As shown in this figure, in this fifth control mode, the two terrace-shaped drive coils 7 and 7 on the X-axis are energized and controlled by the method of the current pattern D, and the two terrace-shaped drive coils on the Y-axis are controlled. 7,
Each of 7 is energized by the method of the current pattern B.

As a result, in the fifth control mode, X
For the two driven magnets (permanent magnets) 6 on the axis, an electromagnetic driving force is generated in the directions of arrows F _X1, F _X3 , and for the two driven magnets (permanent magnets) 6 on the Y axis. Arrow F _Y2,
Electromagnetic driving force is generated in the direction of F _Y4 , which causes XY
The auxiliary table 5 is driven from the center point on the axis toward the first quadrant (arrow F _XY ).

FIG. 11B shows each of the terrace driving coils 7,
The direction of the resultant force when the same electromagnetic driving force is generated in 7, ... is illustrated on the XY coordinates. From this, X
When the auxiliary table 5 is driven in the direction from the center point on the Y axis toward the first quadrant (arrow F _XY ), the value of the current supplied to each of the terrace driving coils 7, 7 ,. It can be seen that the moving direction can be changed by appropriately setting the size. The magnitude of the energizing current is set and controlled by the main controller 21A described above.

In the case of the sixth control mode, the auxiliary table 5 is transferred from the center point on the XY axes in the direction of the third quadrant (not shown), so that each of the terrace driving coils 7 is moved. , 7, ... Can be set to be completely opposite to the current pattern for conducting the current, as compared with the case of the fifth control mode described above.
In other words, in the fifth control mode, the two terrace-shaped drive coils 7, 7 on the X-axis are energized by the method of the current pattern C, and the two terrace-shaped drive coils 7, 7 on the Y-axis are controlled.
Are energized by the method of current pattern B. As a result, the auxiliary table 5 is smoothly transferred from the center point on the XY axes toward the third quadrant (not shown).

FIGS. 12A and 12B show the state when the seventh control mode is executed. As shown in this figure, in this seventh control mode, the two grid-shaped drive coils 7 and 7 on the X-axis are each energized and controlled by the method of the current pattern C, and the two grid-shaped drive coils on the Y-axis are controlled. 7,
Each of 7 is energized by the method of the current pattern B.

As a result, in the seventh control mode, X
For the two driven magnets (permanent magnets) 6 on the axis,
Mark-F_X1,-F_X3The electromagnetic driving force is generated in the direction of
For the two driven magnets (permanent magnets) 6 of
_Y2,F_Y4Electromagnetic driving force is generated in the direction of
-From the center point on the Y axis toward the second quadrant (arrow
F _YX) And the auxiliary table 5 is driven toward
It

FIG. 12B shows each of the terrace driving coils 7,
The direction of the resultant force when the same electromagnetic driving force is generated in 7, ... is illustrated on the XY coordinates. From this, X
When the auxiliary table 5 is driven in the direction from the center point on the Y-axis toward the second quadrant (arrow F _YX ), the value of the current supplied to each of the terrace driving coils 7, 7 ,. It can be seen that the moving direction can be changed by appropriately setting the size. The magnitude of the energizing current is set and controlled by the main controller 21A described above.

In the case of the eighth control mode, since the auxiliary table 5 is transferred from the center point on the X-Y axes toward the fourth quadrant direction (not shown), each of the terrace drive coils 7 is moved. , 7, ... Can be set in the completely opposite manner to the current pattern for conducting the current in the above-mentioned seventh control mode.
In other words, in the eighth control mode, the two grid-shaped drive coils 7, 7 on the X-axis are energized by the method of the current pattern D, and the two grid-shaped drive coils 7, 7 on the Y-axis are controlled.
Are controlled by the method of the current pattern A. As a result, the auxiliary table 5 is smoothly transferred from the center point on the XY axes toward the fourth quadrant (not shown).

FIGS. 13A and 13B show the state when the ninth control mode is executed. As shown in this figure, in this ninth control mode, the auxiliary table 5
(Ie, the movable table 1) is rotated by a predetermined angle θ. In this control operation, the auxiliary table 5 having no central axis is circularly moved counterclockwise within a predetermined allowable range. It enables the stationary operation in.

That is, in the ninth control mode shown in FIG. 13 (A), the grid drive coil 7 on the positive axis of the X-axis is driven in the grid shape on the negative axis of the X-axis by the method of the current pattern A. The coil 7 uses the current pattern B method, the Y-axis positive drive coil 7 uses the current pattern D method, and the negative Y-axis drive drive coil 7 uses the current pattern C method. , Respectively, energization is controlled.

As a result, in the ninth control mode, the driven magnets (permanent magnets) 6 corresponding to the terrace driving coils 7, 7, ... Direction F _Y1 , −F _X2 , − that is orthogonal to each axis along the direction
Electromagnetic driving force is generated toward F _Y3 or F _X4 , respectively.

Therefore, as disclosed in FIG. 13 (B), by setting and controlling the magnitude of the electromagnetic driving force generated in each driven magnet (permanent magnet) 6 to the same magnitude P, it is possible to assist Even if the table 5 does not have a central axis within a predetermined allowable range, the table 5 makes a circular motion in the counterclockwise direction and can be stationary at a predetermined position.

In this case, the stop position after the circular movement becomes the balance point (the position rotated by a predetermined angle θ) between the entire electromagnetic driving force and the original position restoring force by the spring action of the table holding mechanism 2 described above, The position is experimentally specified in advance as a relationship between the set rotation angle and the electromagnetic driving force described above, and is graphically (mapped) in a searchable manner and stored in the data storage unit 23 described above.

FIG. 13B shows each of the terrace driving coils 7,
The direction when the same electromagnetic driving force is generated on 7, ...
This is illustrated on the −Y coordinate. From this, the auxiliary table 5 (that is, the center point O on the X-Y axes as the center of rotation)
The movable table 1) rotates counterclockwise by a predetermined angle θ and stops. In this case, the size of the rotation angle θ that sets the stop position after the rotation is determined by the respective shape drive coils 7, 7,
The rotation angle θ is determined by appropriately setting and controlling the magnitude of the same current value that is passed through. The magnitude of the energizing current is set and controlled by the main controller 21A described above.

In the tenth control mode, the auxiliary table 5 (that is, the movable table 1) is rotated clockwise. Therefore, in the tenth control mode, the direction of the same current supplied to each of the above-mentioned terrace driving coils 7, 7, ... May be set in the opposite direction.

That is, the grid drive coil 7 on the positive axis of the X-axis
Is the current pattern B, the X-axis negative-axis drive coil 7 is the current pattern A method, the Y-axis positive-axis drive coil 7 is the current pattern C method, and Y is the Y-axis positive axis. Energization of each of the grid drive coils 7 on the negative axis of the shaft is controlled by the method of the current pattern D.
As a result, the auxiliary table 5 is smoothly rotated clockwise by a predetermined angle θ on the XY axes (not shown).

The table drive control means 21 executes the operation programs related to the respective energization patterns and the respective control operations.
It is stored so as to be output to the operation program storage unit 22 provided side by side. Then, the table drive control means 21
Any one of the above-mentioned operation programs is selected based on a command from the operation command input unit 24, and the electromagnetic drive means 4 is driven and controlled based on the selected one.

[Braking Plate] As shown in FIG. 14, a metal braking plate made of a non-magnetic member is provided at the end face portion of each of the above-mentioned four terrace driving coils 7 facing the driven magnet 6. The magnets 9 are fixedly attached to the driven magnets 6 so as to face and be close to the magnetic pole surfaces of the driven magnets 6 while being insulated from the surroundings.

Each of the braking plates 9 has a function of gently moving the auxiliary table 5 (movable table 1) while suppressing the sudden movement of the auxiliary table 5 (movable table 1). There is. Here, FIG.
FIG. 1A is a partial sectional view showing a portion of the braking plate 9 shown in FIG. Further, FIG. 14B shows a plan view taken along the line AA of FIG. 14A.

That is, when the auxiliary table 5 or the movable table 1 equipped with the four driven magnets 6 makes a sudden movement, the driven magnets 6 and the braking plates 9 corresponding thereto are Electromagnetic braking (eddy current braking) works during. As a result, the auxiliary table 5 (that is, the movable table 1) is prevented from abruptly moving and gradually moves.

FIGS. 15A and 15B show the occurrence of the electromagnetic braking (eddy current braking). In this figure, the braking plate 9 is fixed to the end of the D-shaped drive coil 7 so as to face the N pole of the driven magnet 6.

Now, the speed of the auxiliary table 5 is rightward in the figure.
V₁If you move suddenly at, the metal braking plate 9
(Because it is fixed), the speed is relatively the same to the left in the figure.
Degree V ₂(= V₁) Will move rapidly. to this
Therefore, in the braking plate 9, Fleming's right-hand rule
According to speed V₂EMF proportional to_VFigure 15 (B)
Occurs in the direction shown in (upward in the figure).
Symmetrical eddy currents flow in the direction of the mark. Large of this eddy current
Kisamo speed V₂Proportional to.

Next, since the magnetic flux from the N pole exists in the generation region of the electromotive force E _V , the magnetic flux of the driven magnet 6 and the eddy current (in the electromotive force E _V direction) in the braking plate 9 are generated. And a predetermined moving force f ₁ according to Fleming's left-hand rule
Are generated in the braking plate 9 (toward the right in the figure).

On the other hand, the braking plate 9 is the fixed plate 8
Since it is fixed above, the moving force f ₁Reaction force f₂Is driven
It is generated as a braking force on the dynamic magnet 6, and its direction is the moving force f.
₁The direction is opposite to that of. That is, this braking force f₂Is
First sudden movement of driven magnet 6 (ie auxiliary table 5)
The direction is opposite to the moving direction, and its size is
Is the size proportional to the moving speed of the auxiliary table 5?
Therefore, the auxiliary table 5 is appropriately braked by its rapid movement.
Force f₂Is restrained by and moves smoothly in a stable state.
The Rukoto. The same applies to the other braking plate 9
A predetermined braking force f₂Occurs.

[0156] Therefore, the auxiliary table 5 with the driven magnets 6, for example, tends to occur reciprocated at the stop position is the time of sudden stop operation, the operation by the braking force f ₂ for this It will be moderately restrained and will move smoothly and gently. That is, as a whole, each of the braking plates 9 effectively functions, and a device in which the movement of the auxiliary table 5 (movable table 1) is stable can be obtained. Even when the auxiliary table 5 vibrates slightly in a reciprocating manner due to the vibration from the outside, the reciprocating minute vibration acts similarly and is effectively suppressed.

Further, as shown in FIG. 16, each braking plate 9 made of a metal made of a non-magnetic member and mounted on the end face portion of each terrace-shaped drive coil has a relationship with each terrace-shaped drive coil 7 as shown in FIG. A secondary side circuit of the transformer is configured, and is short-circuited via a predetermined low resistance r (which causes an eddy current loss).

In FIG. 16, K ₁ is a primary winding representing the terrace drive coil 7, and K ₂ is a secondary winding corresponding to the braking plate 9. FIG. 16A shows a state where the secondary winding portion is short-circuited via the electric resistance component (low resistance r: eddy current loss occurs) in the braking plate 9. The other parts to which the braking plate 9 is attached are also in the same state. In addition, FIG. 16B shows a state in which the braking plate 9 is not provided (a state in which the secondary winding portion is open).
Indicates.

For this reason, each of the terrace driving coils 7 forming the primary side circuit in this case is short-circuited on the secondary side even if there is a large resistance due to the inductance component of the coil at the time of startup (transitional state) at startup. The effect can be effectively reduced, and at this point, a relatively large current can be applied from the time of start-up.
The electromagnetic driving force can be output more quickly than in the case where the braking plate 9 is not provided between the driven magnet and the driven magnet.

Further, each of the braking plates 9 also has a function of radiating heat generated when each of the terrace driving coils 7 is driven. In this respect, an increase in resistance at high temperatures and a decrease in the energizing current value (that is, a decrease in the electromagnetic driving force) that occur with the continuous operation of the drive coil 7 are effectively suppressed, and the energizing current is set to a substantially constant level for a long time. Therefore, current control from the outside with respect to the electromagnetic drive force output from the electromagnetic drive means can be continued in a stable state, and secular change (dielectric breakdown due to heat) can be effectively suppressed. Therefore, the durability of the entire device, and thus the reliability of the entire device can be improved.

Although the above-described braking plate 9 is provided for each of the terrace driving coils 7 in the present embodiment, two or more terrace driving coils 7 or the terrace driving coils 7 are provided. It is also possible to cover all of them with a single braking plate.

[Overall Operation] Next, the overall operation of the first embodiment will be described. In FIG. 6, when an operation command for moving the movable table 1 to a predetermined position is input from the operation command input unit 24, the main control unit 21A of the table drive control means 21 immediately operates and the operation command is input. Based on this, the reference position information of the movement destination is selected from the data storage unit 23, and at the same time, the control program according to the predetermined control mode corresponding thereto is selected from the operation program storage unit 22, and then the coil selection drive control unit 21B is selected. The four drive coils 7 of the electromagnetic drive means 4 are energized and drive-controlled based on a predetermined control mode.

A command to move the movable table 1 to a predetermined position in the positive direction of the X-axis is input from the operation command input section 24, and based on this, a state in which the entire apparatus is operated is shown in FIG.
It shows in FIG. In this case, the control mode is shown in FIG.
The first control mode shown in FIG. 9 is selected, and accordingly, the energization pattern is selected for each of the four terrace drive coils 7 in the state shown in FIG.

In this case, in the stage holding mechanism 4 described above, when the auxiliary table 5 is urged to the right in the figure by the electromagnetic drive means 4, the auxiliary table 5 resists the elastic force of the piano wires 2A, 2B. 5 moves. Then, this auxiliary table 5 (that is, the movable table 1) is attached to each piano wire 2
It stops at the balance point (movement target position) of the elastic restoring force of A and 2B and the electromagnetic driving force of the electromagnetic driving means 4 applied to the auxiliary table 5.

In FIG. 17 and FIG. 18, the code T moves.
Indicates the distance. Also, in FIG. 18, the shaded area is the auxiliary text.
By moving the cable 5, the other capacitance detection electrode 2 described above is moved.
6X ₃, 26X_FourShows the part where the capacitance component of
The shaded area indicates the one capacitance detection electrode 26X described above.₁, 2
6X₂The portion in which the capacity component of is increased is shown. In addition, this Figure 1
In No. 8, there is no displacement in the Y-axis direction.

When the moving position of the auxiliary table 5 deviates from the target position due to disturbance or the like during operation, the capacitance detecting electrodes 26X ₁ , 26X ₂ , 26X ₃ , 26X are detected.
As described above, the actual position after the movement is detected based on the information of the increase / decrease of the capacitance component of ₄ , and the feedback control for preventing the positional deviation is performed. on the other hand,
When the electromagnetic driving force applied to the auxiliary table 5 is released from such a state, the auxiliary table 5 moves to the piano wire 2A,
It is returned to the original position by being urged by the elastic return force of 2B (actuation of the original position return function).

In such a series of operations, the movement operation of the auxiliary table 5 is usually performed rapidly regardless of whether the electromagnetic drive force application control or the electromagnetic release control is performed. Therefore, in such a case, the auxiliary table 5 (or the movable table 1) is
Repetitive reciprocating motion due to inertial force and spring force occurs at the stop position at the destination or at the stop position at the time of returning to the original position. However, in the present embodiment, such reciprocal reciprocating operation is suppressed by the electromagnetic braking (eddy current braking) generated between the braking plate and the driven magnet as described above, and the smooth movement toward the predetermined position is achieved. However, the stop is controlled in a stable state.

From the operation command input section 24, the movable table 1
Even when an operation command for moving the table to a predetermined position other than the above is input, the main control section 21A of the table drive control means 21 immediately operates similarly to the case described above, and based on the operation command. The reference position information of the moving destination is selected from the data storage unit 23, and at the same time, the operation program storage unit 22 is selected.
Then, the control program corresponding to the predetermined control mode is selected. Subsequently, the coil selection drive control unit 21
B is energized to drive and control the four rectangular drive coils 7 of the electromagnetic drive means 4 based on a predetermined control mode.

Also in this case, the control operation and the braking operation by the braking plate similar to those described above are executed, and the auxiliary table 5 (movable table 1) smoothly moves toward a predetermined position and is in a stable state. Is controlled by stop.

As described above, in the first embodiment, the table holding mechanism 2 applying the link mechanism moves the auxiliary table 5 (movable table 1) from the center position (within the predetermined range) without any sliding operation. In the above), it is possible to smoothly move or rotate in any direction on the XY plane while maintaining the same height position.

Therefore, according to the first embodiment described above, since the heavy and double structure of the X-Y axis movement holding mechanism which is conventionally required is not required, the size and weight of the entire apparatus can be reduced. At the same time, portability can be significantly improved by weight reduction, the number of parts can be reduced compared to the conventional example, and durability can be significantly improved in such a point, and no skill is required for adjustment during assembly. We were able to increase productivity.

Further, even if the auxiliary table 5 (movable table 1) equipped with the driven magnets changes suddenly, as described above, the driven magnets 6 and the braking plate 9 made of a non-magnetic metal member are used. Electromagnetic braking between (eddy current braking)
As a result, the movable table can be prevented from abruptly moving, and can move smoothly in a predetermined direction in a stable state.

Further, the braking plate 9 has a simple construction in which it is individually mounted on the terrace driving coil 7 in a state of facing the driven magnets 6, and the electromagnetic driving means 4 for generating an electromagnetic driving force is also provided. Since the driven magnet 6 provided on the auxiliary table 5 and the fixed-shaped drive coil 7 provided on the fixed plate 8 so as to face the driven magnet 6 have a simple structure, the overall size and weight of the device can be reduced in this respect as well. Not only is this possible and the portability is good, but also the workability is good because no particular skill is required for the assembly work.

Further, the driven magnet 6 of the drive coil described above is used.
The metal braking plate made of a non-magnetic member mounted on the end face portion on the side constitutes a circuit equivalent to the secondary side circuit of the transformer in relation to the drive coil, and the electric resistance component of the braking plate ( Eddy current loss is caused) to form a short-circuited form.

Therefore, the grid-shaped drive coil 7 which constitutes the primary side circuit in this case can pass a relatively large current as compared with the case where the secondary side circuit is in the open state, which is why the braking circuit 7 is used for braking. The plate 9 makes the gap between the terrace-shaped drive coil 7 and the driven magnet 6 somewhat larger, but the energizing current also increases, so that the electromagnetic driving force generated at this point is not reduced, and A relatively large electromagnetic force can be output to the drive magnet 6.

Further, the braking plate 9 also functions as a heat radiating plate, and in this respect, it is possible to effectively suppress the radial change (dielectric breakdown due to heat) due to continuous operation of the terrace drive coil 7. Also in this respect, it is possible to increase the durability of the entire device, and thus to improve the reliability of the entire device.

Further, in the present embodiment, since the four magnet drive coils 7 in the electromagnetic drive means and the respective driven magnets 6 corresponding thereto are equipped as described above, the four respective magnet drive coils 7 are Since the corresponding driven magnets 6 are operated so as to always press in the direction orthogonal to the X axis or the Y axis on the XY plane, the electromagnetic driving force applied to the auxiliary table 5 (that is, the movable table 1) is Even in the case of moving in the direction of, it always occurs in the direction from the center point side on the XY plane toward the outside. Therefore, even if the transfer direction of the auxiliary table 5 (that is, the movable table 1) is changed, the movable table 1 can be smoothly (in the allowable range) moved planarly without being rotated.

That is, by appropriately setting the magnitude of the electromagnetic driving force generated for each of the terrace driving coils 7 and the generation direction thereof in advance, the resultant force of the electromagnetic driving forces of each of the terrace driving coils 7 can be obtained. The auxiliary table 5 (that is, the movable table 1) can be smoothly transferred in a predetermined intended direction without rotating the auxiliary table 5 described above.

Further, when the movable table 1 is rotationally driven, the coil portion located on the line segment extending outward from the center point on the above-mentioned XY plane among the cross-shaped coil sides of each terrace driving coil 7. Is uniformly driven in the counterclockwise or clockwise direction (in short, so that the electromagnetic driving force is generated in the rotation direction). In this case, in order to smoothly drive the rotation, a plurality of driven magnets 6 are previously arranged on the auxiliary table 5 (or the movable table 1) in a well-balanced manner as in the above-described embodiment, and correspondingly, It is preferable to equip each of the terrace driving coils 7 on the fixed table 8.

As described above, in the above embodiment, the electromagnetic driving force which is continuous in the predetermined direction can be output by adjusting the energizing current to each of the plurality of terrace driving coils 7, so that the movable table 1 can be output. Can be continuously transferred, and at this point, precise movement in micron units is possible.

In the first embodiment described above, the case where the driven magnet 6 is mounted on the auxiliary table 5 has been illustrated, but the driven magnet 6 is mounted on the movable table 1 side and is opposed to this. Then, each of the above-mentioned terrace-shaped drive coils 7 may be arranged at a predetermined position on the fixed table 8. Further, although the movable table 1 has a circular shape as an example, it may have a rectangular shape or another shape. Although the auxiliary table 5 has a quadrangular shape as an example, it may have a circular shape or another shape as long as it can realize the functions described above.

Further, in the above-described first embodiment, the case where the braking plate 9 is provided is illustrated, but the braking plate 9 may not be provided if the speed of movement is not particularly required. Good.

[0183]

[Second Embodiment] FIGS. 19 to 20 show this. In the second embodiment shown in FIGS. 19 to 20, the auxiliary table 5 equipped in the first embodiment described above is deleted, the movable table 31 is directly held by the table holding mechanism 2, and the table drive control means is provided. The feature is that the movable table 31 is directly driven by 21.

19 to 20, reference numeral 31 denotes a square movable table. This movable table 31
Has a circular flat work surface 31A on its upper surface. Reference numeral 2 indicates the same table holding mechanism as the table holding mechanism in the first embodiment described above. The table holding mechanism 2 is disposed in the lower portion of FIG. 19 as in the first embodiment described above, allows the movable table 31 to move in an arbitrary direction within the same plane, and allows the movable table 31 to move. The movable table 31 is held in a state in which the original position returning force can be applied.

In other words, in the second embodiment, the movable table 31 is mounted on the case body as described above via the table holding mechanism 2 arranged inside the case body 33 as the body. It is supported by 33.

Also, the movable table 31 and the case body 3 are
The capacitive sensor group 26, which constitutes the sensor unit of the capacitive type position information detecting means for constantly detecting the moving position of the movable table 31, is provided between the driving means holding portion (main body side projecting portion) 33A, which will be described later. It is equipped as in the case of the first embodiment. That is, around the edge of the lower surface (bottom surface) of FIG. 19 of the movable table 31, a square-shaped spacer 31B having a flat surface of a predetermined width is provided, and the lower surface portion thereof is
A common electrode 31Ba of the capacitive type position detection sensor is provided. Further, the common electrode 31Ba capacitance detecting electrode and the same capacitance detecting electrodes in opposite to the aforementioned first embodiment in _{26X 1, 26X 2, 26X 3} , 26X 4, 26
Y ₁ , 26Y ₂ , 26Y ₃ and 26Y ₄ are the above-mentioned first
It is provided similarly to the case of the embodiment, and is provided on the upper surface of the drive means holding portion (main body side protruding portion) 33A described later.

Similar to the table holding mechanism 2 in the first embodiment described above, the table holding mechanism 2 is a piano wire which is two rod-like elastic members installed at a predetermined interval (sufficient to support the movable table 31). Other members may be used as long as they are elastic wire rods having appropriate rigidity) 2A, 2
Four sets of B are prepared in advance corresponding to the peripheral end portion of the movable table 31, and the four sets of the piano wires 2A and 2B are divided into respective four corner portions of the rectangular relay member 2G. Plant in the upward direction.

Then, the movable table 31 is held from below by the four piano wires 2A on the table side located inside, and the relay member 2 is held by the four piano wires 2B on the main body outside.
It has a structure in which G is suspended from the case body 33 so as to be swingable in the direction of 360 °.

As a result, the movable table 31 can move in any direction within the same plane without changing the height position as in the case of the above-described first embodiment, and at the same time within the allowable range. It is also possible to rotate with.

In the present embodiment, the case main body (main body) 33 is formed in a box-like shape whose upper and lower parts are open, as shown in FIG. Reference number 34 indicates an electromagnetic drive means. The electromagnetic drive means 34 is formed in the same manner as the electromagnetic drive means 4 in the first embodiment described above, and is arranged below the movable table 31 in FIG.
It is held on the third side and has a function of urging a moving force to the movable table 31 described above.

Reference numeral 33A indicates a driving means holding portion which is provided around the inner wall portion of the case body 33 so as to project. The electromagnetic driving means 34 is held by the case body 33 via the driving means holding portion 33A. The upper surface side of the drive means holding portion 33A in FIG. 19 is a flat surface as described above,
On this flat surface, the capacitance detection electrodes 26X ₁ , 26X ₂ , 26X ₃ , 2 for outputting the position information of the movable table 31 to the outside are provided.
6X ₄ , 26Y ₁ , 26Y ₂ , 26Y ₃ and 26Y ₄ are
It is equipped and functions similarly to the case of the first embodiment described above. As a result, the above-mentioned first
Similar to the capacitance sensor group 26 in the embodiment, the movement information of the movable table 31 can always be detected in real time, and the noise canceling information can be output as a whole through the arithmetic unit.

The electromagnetic driving means 34 described above is similar to the case of the first embodiment described above in that the movable table 31 shown in FIG.
4 has four driven magnets 6 fixedly mounted at predetermined positions on the lower surface of the lower part and cross-shaped coil sides arranged to face each of the driven magnets 6, and with respect to each of the driven magnets 6. The terrace-shaped drive coil 7 that electromagnetically applies a predetermined driving force along a predetermined moving direction of the movable table 31 described above.
And a fixed plate 38 that holds the grid drive coil 7 in place.

The fixed plate 38 is set in parallel with the movable table 31 at a predetermined interval and is disposed below the movable table 31 in FIG. 19 and the periphery thereof is the driving means holding portion 33A of the case body 33. Held in.

Further, the braking plate 9 made of a non-magnetic metal member is provided on the end surface side of the above-mentioned driven magnet 6 side of the terrace driving coil 7 as in the case of the above-mentioned first embodiment.
Are individually arranged close to the magnetic pole surface of the driven magnet 6.

In this embodiment, the braking plate 9 is fixed to the end face portion of the terrace driving coil 7, and is fixed to the above-mentioned fixing plate 38 side through the terrace driving coil 7. . The braking plate 9
With respect to the above, it may be configured to be fixed to the fixing plate 38 via another spacer member (not shown) while maintaining the state of being in contact with the end face portion of the terrace driving coil 7. This point is the same as in the case of the first embodiment described above.

The movable table 31 is held by the four table-side piano wires 2A located inside, as described above. Reference numeral 31C denotes the movable table 31 shown in FIG. 19 for engaging with the four table-side piano wires 2A.
4 shows four table-side legs protruding downward from the lower surface in FIG. The movable table 31 described above is connected and held to each of the four piano wires 2A on the table side via the four leg portions 31C on the table side.

Here, these four table side leg portions 31C
Is set to such a length that the exposed length L of the four table-side piano wires 2A located inside can be the same as the four piano wires 2B located outside.

Through holes 38A having a predetermined size are formed at the four corners of the fixing plate 38 described above. Although the through hole 38A is formed in a quadrangular shape in the present embodiment, the through hole 38A may have any other shape such as a circle as long as it has a size that allows the operation of the movable table 31 described above. Good.

The four table-side leg portions 31C described above are individually inserted through the through holes 38A, whereby the movable table 1 positioned in the upper portion of FIG.
Is held by four table-side piano wires 2A of the table holding mechanism 2 located in the lower part of the figure. Other configurations and functions are the same as in the case of the first embodiment described above.

Even in this case, the second embodiment has the same effects as the first embodiment described above, and in particular, the auxiliary table 5 equipped in the first embodiment described above is deleted. Since the movable table 31 is directly held by the table holding mechanism 2 and the movable table 31 is directly driven by the table drive control means 21, the structure is simplified and the size and weight can be reduced accordingly. Since the weight on the movable table 1 side is reduced, the operation of the drive control of the movable table 1 can be speeded up, and the durability of the table holding mechanism 2 as a holding mechanism can be improved, and the entire apparatus can be used. The portability can be improved. Furthermore, since the work process of connecting the auxiliary table 5 to the movable table 31 and assembling it is unnecessary, productivity and maintainability can be significantly improved, and the cost of the entire apparatus can be reduced. .

[0201]

[Third Embodiment] FIG. 21 shows an example of a third embodiment. The third embodiment is different from the first embodiment described above in that a plurality of braking plates 9 are individually provided at the ends of the plurality of terrace-shaped drive coils facing the driven magnets.
Is characterized in that it is shared by using a single plate-shaped member.

In FIG. 21, a case is shown in which one braking plate 39 made of the same material is installed in place of the four braking plates 9 equipped in the first embodiment described above.
In this case, in the central portion of the braking plate 39, the connection column 10 disclosed in FIG.
0 together with the auxiliary table 5 (and the movable table 1) is shown in FIG.
A through hole 39A having a size that allows movement in the plane of the first orthogonal axis XY is formed.

Here, this braking plate 39 is shown in FIG.
In FIG. 1 (A), a case is illustrated in which it is attached to the fixed plate 8 via each of the terrace driving coils 7 while being in contact with each end of each of the terrace driving coils 7. On the other hand, regarding this braking plate 39,
It may be configured to be fixed to the fixing plate 8 via another spacer member (not shown) while maintaining the state of being in contact with the end face portion of the. The other configuration is the same as that of the first embodiment described above.

In this way as well, it is possible to obtain the same operational effects as in the case of the above-described first embodiment, and in addition, the assembly work of the braking plate 39 is compared with the case of the above-described first embodiment. Since the braking plate 39 is greatly simplified and the entire surface area of the braking plate 39 is increased, the braking plate 39 can effectively function as a heat radiating plate, and the durability of each terrace driving coil 7 can be increased. There is an advantage that the durability of can be improved.

In the third embodiment, instead of the plurality of braking plates 9 in the above-described first embodiment, a single plate-shaped member made of the same material is used. Although illustrated, in place of the plurality of braking plates 9 in the above-described second embodiment, a single plate-shaped member made of the same material may be provided as a single braking plate 39.

[0206]

[Fourth Embodiment] FIG. 22 shows a fourth embodiment.
In the fourth embodiment, each of the four terrace drive coils 7 in the first embodiment is fixedly mounted on the fixed plate 48 in a state of penetrating through the fixed plate 48 described above, and each of the terrace shapes is formed. Each of the auxiliary table 5 and the movable table 1 described above is provided with a driven magnet 6 individually corresponding to the end face of the drive coil 7, and the electromagnetic drive means 44 is constituted by this.

Reference numeral 48A designates a through hole which allows the moving operation of the connecting column 10 like the through hole 8A in FIG.
Further, reference numerals 49 and 50 are fixedly attached to both end surfaces of the terrace driving coils 7 on both sides of the fixed plate 8 so as to face and be close to each of the driven magnets 6 described above. The braking plate is shown. The other configuration is the same as that of the first embodiment described above.

Even in this case, in addition to the same effects as the first embodiment described above, the driven magnet 6 is further added.
The electromagnetic drive force can be doubled, and therefore, the auxiliary table 5 and the movable table can be more quickly and stably provided. 1 can be driven in a plane, and in this respect, there is an advantage that the performance and reliability of the entire device can be improved.

Here, the above-mentioned braking plates 49, 5
Regarding 0, in the present embodiment, an example is shown in which each end face of each of the above-mentioned rice-shaped drive coils 7 is partitioned and individually mounted on the same face, but in the third embodiment described above. Similar to the case of the braking plate 39 (see FIG. 21), it is configured so as to face each driven magnet 6 on the auxiliary table 5 side (or the movable table 1 side) in common and be shared by one braking plate. You may.

Further, in the fourth embodiment shown in FIG. 22, the case where the braking plates 49 and 50 are provided is illustrated, but the braking plates 49 and 50 may be omitted. By doing so, the gap between each driven magnet 6 and each corresponding terrace driving coil 7 can be made small, and the advantage that the electromagnetic driving force acting between the two can be set large. is there.

[0211]

[Other Embodiments] Here, examples of other shapes of the terrace driving coil will be described. In each of the above-described first to fourth embodiments, the rectangular shaped driving coil has been exemplified, but the present invention does not necessarily limit the shaped driving coil to this, and the shape shown below. Also,
It can function as a grid-shaped drive coil.

(1). Ridge-shaped drive coil having an outer shape is shown in FIG. The grid-shaped drive coil 61 shown in FIG. 23 is configured by four triangular small rectangular coils 61a, 61b, 61c, 61d that can be independently energized, and the entire combination is formed into a rhombic shape ( In the state in which a quadrilateral is rotated by 90 °), a cross-shaped coil side is provided inside as shown in FIG.

In FIG. 23, the four terrace-shaped drive coils 61 thus formed are arranged and fixed on the respective axes on the XY Cartesian coordinates as in the case of the first embodiment described above. The case where the table 8 (not shown) is fixedly mounted is shown.

Also in this case, the driven magnets 6 are mounted on the auxiliary table 5 in correspondence with the cross-shaped coil sides of the terrace driving coils 61. Further, reference numeral 62 indicates a braking plate that functions similarly to the braking plate 39 in the above-described third embodiment. Similarly,
Reference numeral 5 indicates an auxiliary table. The other configuration is the same as that of the first embodiment described above.

Even in this manner, the terrace drive coil 61 is also provided.
Is the grid drive coil 7 in the first embodiment described above.
A precision machining stage device having the same function as that of the first embodiment can obtain the same effects as those of the first embodiment described above.

(2). The drive coil having a circular outer shape is shown in FIG. The grid-shaped drive coil 62 shown in FIG. 24 is composed of four fan-shaped rectangular small coils 62a, 62b, 62c, and 62d that can be independently energized, and the entire combination is circular.
As in the case of FIG. 23, a cross-shaped coil side is provided on the inner side.

FIG. 24 shows the four circular grid-shaped drive coils 62 thus formed on the respective axes on the XY Cartesian coordinates as in the case of the first embodiment. The figure shows a case where they are arranged and fixedly mounted on a fixed table 8 (not shown).

Also in this case, the driven magnets 6 are mounted on the auxiliary table 5 in correspondence with the cross-shaped coil sides of the terrace driving coils 62. Further, reference numeral 39 denotes the same braking plate as the braking plate in the third embodiment described above. Similarly, reference numeral 5 indicates an auxiliary table. The other configuration is the same as that of the first embodiment described above.

Even in this way, the circular rice-shaped drive coil 62 functions in the same manner as the square rice-shaped drive coil 7 in the first embodiment described above, and a precision machining stage device equipped with the same also operates. It is possible to obtain the same effect as that of the above-described first embodiment.

(3). A rectangular drive coil having an octagonal outer shape is shown in FIG. The grid drive coil 63 shown in FIG. 25 is composed of four pentagonal small coils 63a, 63b, 63c, 63d that can be independently energized, and the entire combination is octagonal. The inner side is provided with cross-shaped coil sides as in the case of FIG.

In FIG. 25, the four octagonal drive coils 63 thus formed are arranged on the respective axes on the XY Cartesian coordinates as in the case of the first embodiment. The figure shows a case where they are arranged and fixedly mounted on a fixed table 8 (not shown).

Also in this case, the driven magnets 6 are mounted on the auxiliary table 5 in correspondence with the cross-shaped coil sides of the terrace driving coils 63. Further, reference numeral 39 denotes the same braking plate as the braking plate in the third embodiment described above. Similarly, reference numeral 5 indicates an auxiliary table. The other configuration is the same as that of the first embodiment described above.

Even in this way, the octagonal drive coil 63 functions in the same manner as the square drive coil 7 of the first embodiment described above, and the precision machining stage device equipped with this also has the same shape. It is possible to obtain the same effect as that of the above-described first embodiment.

As described above, with respect to the rice-shaped drive coil of the present invention, as long as it has the cross-shaped coil side inside, the outer shape is not necessarily limited to the quadrangular shape, and is equivalent. Other shapes may be used as long as they function. Further, in each of the above-described embodiments, the case where the space region of the inner portion (cross-shaped coil side portion) of each rice-shaped drive coil is hollow is illustrated.
This portion may be filled with a non-conductive magnetic member such as ferrite.

Furthermore, in each of the above-mentioned first to fourth and other embodiments, the case where a permanent magnet is provided as the driven magnet 6 is illustrated, but an electromagnet is provided instead of the permanent magnet. May be. In this case, the drive control of the electromagnet is performed by the table drive control means 21 described above, and the forward direction, the reverse direction, or the non-energized state thereof is selected in accordance with the operation of each of the terrace drive coils 7 described above. The energization control is performed (not shown).

When the driven magnet 6 is an electromagnet, the drive control of the movable table can be changed in various ways. For example, when accelerating / decelerating during movement, both the drive coils and the electromagnets can be drive-controlled to respond to this, so that it is possible to quickly respond to changes in the moving direction of the movable table and the like. . That is, when the driven magnet 6 is an electromagnet, the magnetic flux density of the driven magnet (the strength of the magnet) can be freely set as necessary, so that the strength of the driven magnet is used. There is an advantage that it can be changed according to.

Further, in each of the above-mentioned embodiments, the four driven magnets 6 and the corresponding terrace driving coils 7, 61,
62 or 63 is the auxiliary table 5 (or the movable table 1)
The case where they are arranged on the X axis and the Y axis at positions equidistant from the center on the XY Cartesian coordinate on the upper surface of the above is illustrated, but the present invention is not necessarily limited to this, and each of the four The driven magnet 6 does not have to be equidistant from the center, which is the origin, as long as it is a balanced position on the XY orthogonal coordinates.

As for the driven magnets 6, an even number (not necessarily four) of the driven magnets 6 are prepared, and the even number of driven magnets 6 is used for the auxiliary table 5 (or the movable table 1).
Are arranged at equal intervals on the same circle, and the above-mentioned D-shaped drive coil 7 is arranged on the above-mentioned fixed plate 8 corresponding to each driven magnet 6 whose position is specified. Good.

As for the driven magnets 6, an even number of driven magnets 6 are prepared, and the even number of driven magnets 6 are used, for example, in the auxiliary table 5 (or the movable table 1).
Are arranged so as to be bilaterally symmetric (or vertically symmetric) with respect to the X-axis (or Y-axis) on the XY Cartesian coordinate in the plane, and individually correspond to each driven magnet 6 whose position is specified. Then, the above-mentioned terrace-shaped drive coil 7 may be arranged on each of the above-mentioned fixed plates 8. Even in this case, it is possible to obtain the precision machining stage device having substantially the same effects as those of the first to fourth embodiments and the other embodiments described above.

Furthermore, in each of the above-described embodiments, the case where the braking plate is provided is illustrated, but this braking plate does not necessarily have to be provided. On the other hand, the braking plate is fixedly mounted on the above-mentioned fixed table 8 in a region apart from the terrace-shaped drive coil by removing the correspondence relation with the terrace-shaped drive coil, and in the state of being close to and facing the stationary table 8. A new braking magnet may be provided at a predetermined position on the movable table (or the auxiliary table) described above so that the electromagnetic braking can be operated independently of the grid drive coil.

In each of the above embodiments, the capacitance sensor
Group 26 with eight capacitance detection electrodes 26X ₁, 26X₂, 26
X₃, 26X_Four, 26Y₁, 26Y₂, 26Y₃, 26
Y_FourOf the lower surface around the auxiliary table 5 or the movable table 1.
Each side (for example, in the XY plane) corresponding to the common electrode in a square shape
Space on both ends of each axis)
An example of arranging two of them is shown, but this is halved.
For example, a region located at the end of each axis in the positive direction on the XY plane.
Even if two pieces are arranged at a predetermined interval only in the area
Good.

In this way, although the noise eliminating function of the arithmetic unit is eliminated, not only the structure is simplified, but also the amount of detected information is halved, so that the arithmetic processing of position information can be performed more quickly. In this case, it is possible to more quickly correct the displacement of the movable table 1 during movement.

Further, in each of the above-described embodiments, the table holding mechanism 2 includes four table-side rod-shaped elastic members (table-side piano wires) 2A and four body-side rod-shaped members corresponding thereto which are located on the body side. An elastic member (piano wire on the main body side) 2B, and corresponding rod-shaped elastic members 2A,
2B has been described as a specific example in the case of arranging them in close proximity, the present invention is not necessarily limited to this.
The number of rod-shaped elastic members 2A and 2B may be three (six in total), provided that they are arranged in a well-balanced manner. Further, regarding the bar-shaped elastic members 2A and 2B on the table side and the main body side which form one set,
It is not always necessary to equip them in close proximity to each other.

Even in this manner, when the movable table 1 is moved, the rod-shaped elastic members 2A and 2B are elastically deformed in a substantially similar manner to deal with this. Therefore, as a whole, the respective embodiments described above are carried out. The same function and effect as the case of the table holding mechanism 2 can be obtained. Further, the rod-shaped elastic members 2A and 2B in the table holding mechanism 2 may be five sets or more.

[0235]

Since the present invention is constructed and functions as described above, according to the present invention, in the invention according to claim 1, each driven magnet to which the driving force of each terrace driving coil corresponds is always X.
-Because it operates so as to press in either the direction along the X axis on the Y plane or the direction orthogonal to each of the Y axes, the entire electromagnetic driving force (driving of each terrace driving coil) No matter which direction the movable table is moved, the resultant force is always output in the direction from the center point side on the XY plane to the outside, which changes the transfer direction (setting destination) of the movable table. However, the movable table can be smoothly planarly moved within the allowable range without rotation.

That is, according to the first aspect of the present invention, the direction and magnitude of the electromagnetic driving force generated for each rice-shaped drive coil are appropriately set in advance, so that the electromagnetic driving force is generated for each rice-shaped drive coil. With the resultant force of each electromagnetic driving force, the movable table can be smoothly transferred in a predetermined intended direction without rotating.

Further, in the invention described in claim 1,
The above-mentioned X in the cross-shaped coil side of each terrace drive coil
-Electrically drive the coil portion located on the line segment outward from the center point on the Y plane in the counterclockwise or clockwise direction (in short, so that the electromagnetic driving force is generated in the rotation direction). Thus, the movable table can be rotationally driven within a predetermined allowable range, and in this respect, the versatility of the entire apparatus can be improved.

As described above, according to the first aspect of the present invention, the electromagnetic driving force continuous in the predetermined direction can be output in a large and small manner by adjusting the energizing current to each of the plurality of terrace-shaped driving coils. It is possible to transfer the movable table in any direction within the same plane, including, and when linearly moving in a diagonal direction, it is possible to linearly move in a predetermined direction without rotating operation. The reliability of can be increased.

Further, as described above, since each of the plurality of terrace-shaped drive coils is provided on the same plane (on the XY plane) in the operation area of the movable table in correspondence with the movable table, A plurality of externally mounted drive motors and the like are not required, and the size and weight of the entire device can be reduced in this respect, and portability can be greatly improved in this respect.

Each of the inventions described in claims 2 to 19 has the same effects as the invention described in claim 1, and further has the following effects.

According to the second aspect of the invention, since the table holding mechanism is configured as described above, for example, when the movable table slides in the same direction as a whole, all the rod-shaped elastic members of each set all have the same elastic deformation. However, due to the nature of the link mechanism, the relay member absorbs (adjusts) height position fluctuations, so the movable table is smooth on the same surface without any change in height position or friction. Move to the plane. In this case, when the driving force is released, the movable table returns to the original position in a straight line by the spring action of each rod-shaped elastic member. The same function is achieved even when the movable table rotates on the same plane.

That is, according to the second aspect of the present invention, the movement and rotation in the direction of 360 ° with respect to the movable table on the same plane can be allowed within a predetermined range, and when the electromagnetic driving force is released, The movable table returns to its original position in a straight line by the spring action of each rod-shaped elastic member. In the operation of each of these parts, since there is no frictional part at all, it is possible to completely suppress the minute vibration generated during the frictional movement, and at this point, the planar movement of the movable table is realized in a stable state. It Further, as described above, when moving in the X direction and the Y direction, the sliding mechanism for precision finishing with the double structure, which was required in the conventional example, is not required. Therefore, the working and assembling work is greatly improved and the entire apparatus is improved. It is possible to reduce the size and weight and, in turn, the portability.

According to the invention described in claim 3, in the stage device for precision machining according to claim 1, the auxiliary table is integrally provided on the movable table, and the table holding mechanism is movable through the auxiliary table. It is characterized in that the table is held and the electromagnetic drive means applies a plane moving force to the movable table via the auxiliary table. Therefore, the invention according to claim 3 has the same effect as that of the invention according to claim 1 described above, and further, there is a margin in the structure, and in this respect, productivity and maintainability can be improved.

According to the invention described in claim 4, the table holding mechanism described above has the same structure as the table holding mechanism disclosed in the precision machining stage device according to claim 2 described above, and the table holding mechanism assists the table holding mechanism. It is characterized in that the above-mentioned movable table is held via the table. Even in this case, the table holding mechanism disclosed in claim 2 functions exactly the same as the table holding mechanism described above. The movable table is allowed to move in the plane without changing the height position of the movable table, and the movable table is smoothly moved in a stable state. It is possible to realize the plane movement of the movable table.

According to a fifth aspect of the present invention, in the precision machining stage device according to the third or fourth aspect, each terrace drive coil is provided in a state of penetrating the fixed plate. The driven magnets are respectively arranged on the movable table and the auxiliary table so as to correspond to the respective end faces of the terrace driving coils.

Therefore, according to the invention of claim 5,
Besides having inventions the same effects as in claim 3 or 4, wherein the aforementioned, further, the auxiliary table (i.e., a movable table) at about twice the driving force can be flat driving, at this point, There is an advantage that the improvement of the performance of the entire device can be expected.

According to each of the inventions described in claims 6 to 8, in the precision machining stage device according to claim 1, 2, 3, 4 or 5, an even number of driven magnets are provided and the even number of driven magnets is provided. It is characterized in that the arrangement of the drive magnets is limited.

That is, an even number of driven magnets are arranged at equal intervals on the same circumference (claim 6). In addition, an even number of terraced drive coils are arranged at symmetrical positions with respect to at least the X axis on the XY plane which is assumed to have the center of the movable table as the origin (claim 7). Further, a plurality of driven magnets are arranged at predetermined positions on each of the positive and negative axes on the XY plane which is assumed to be the center of the movable table as an origin (claim 8). Then, at least four terrace-shaped drive coils are individually provided on the fixed plate in correspondence with the respective at least four driven magnets whose positions are specified.

Therefore, each of the inventions described in claims 6 to 8 has the same function and effect as the invention described in any one of claims 1 to 5, and further each driven magnet. A plurality of electromagnetic driving forces generated at the center of the origin O of the central portion on the XY axes are used as a reference, and the resultant force is formed. At this point, the rotational motion component is surely eliminated, and the movable table is moved. It is possible to smoothly move in a predetermined direction on the XY axes without meandering.

In each of the ninth to twelfth aspects of the present invention, the precision machining stage device according to any one of the first to eighth aspects is characterized in that the outer shape of the terrace drive coil is specified. Have.

That is, each grid-shaped drive coil is constituted by four rectangular small rectangular coils that can be independently energized, and the overall shape of the combination is made rectangular (claim 9). Each grid drive coil is composed of four triangular small square coils that can be independently energized.
The entire shape of the combination is rhombic (claim 1
0). Each of the terrace-shaped drive coils is composed of four fan-shaped rectangular small coils that can be independently energized, and the overall shape of the combination is circular (claim 11). Each grid-shaped drive coil is composed of four pentagonal small rectangular coils that can be independently energized, and the overall shape of the combination is octagonal (claim 12).

Therefore, each of the inventions described in claims 9 to 12 has the same function and effect as the invention described in any one of claims 1 to 8, and further, the shape and structure of the movable table and the like. It is possible to set the grid-shaped drive coil corresponding to this in accordance with the environmental conditions, and in this respect, the versatility of the device can be enhanced.

According to a thirteenth aspect of the present invention, in the precision machining stage apparatus according to any one of the first to twelfth aspects, the end face portion on the driven magnet side of the terrace drive coil is not A braking plate made of a magnetic metal member is arranged close to the magnetic pole surface of the driven magnet, and the braking plate is fixedly installed on the fixed plate side.

Therefore, the invention according to claim 13 has the same operation and effect as the invention according to any one of claims 1 to 12, and further, an auxiliary device equipped with a driven magnet. When the table or the movable table makes an abrupt movement, electromagnetic braking (eddy current braking) works between the driven magnet and the braking plate, and the abrupt movement of the auxiliary table or the movable table is suppressed and gradually It will be moved.

According to the fourteenth aspect of the present invention, in the precision machining stage device according to any one of the first to thirteenth aspects, the movable table is moved in a plane by the electromagnetic drive means. A motion control system that regulates Then, this operation control system selectively energizes and controls at least one of the crosswise coil sides of the plurality of cross-shaped drive coils included in the electromagnetic drive means so as to be operable, as described above. The coil drive control means for controlling the movement of the movable table in a predetermined direction is provided.

Therefore, the invention according to claim 14 has the same operation and effect as the invention according to any one of claims 1 to 13 described above, and further, the operation control system functions effectively. It is possible to specifically move the movable table in a predetermined direction by operating a plurality of terrace drive coils.

In each of the fifteenth to sixteenth aspects of the invention, in the precision machining stage apparatus according to any one of the first to thirteenth aspects, first, the electromagnetic drive means moves or rotates the movable table. A motion control system that regulates motion is also installed. Then, this operation control system is more specifically configured as described above.

Therefore, each of the inventions described in claims 15 to 16 has the same operation and effect as the invention described in any one of claims 1 to 13 described above, and further, from the operation command input section. The coil drive control means operates on the basis of the command to extract the information of the moving direction destination and a predetermined control mode for movement from the program storage section and the data storage section, and based on this, the plurality of electromagnetic drive means described above are extracted. Each of the terrace drive coils is drive-controlled to move the movable table in a predetermined direction.

According to a seventeenth aspect of the invention, in the precision machining stage device according to any one of the first to sixteenth aspects, a plurality of pieces of movement information detection for detecting movement information of the movable table and externally outputting the movement information are detected. Sensors are separately installed at a plurality of locations on the peripheral edge of the movable table, and a predetermined calculation is performed based on the information detected by the plurality of movement information detection sensors to determine the moving direction of the movable table and its change amount. Etc. are specified and a position information calculation circuit section for externally outputting as position information is provided.

Therefore, the invention according to claim 17 has the same operation and effect as the invention according to any one of claims 1 to 16 described above, and further, the movement information of the movable table or the information after the movement. The position information of can be externally output in real time, which allows the operator to
Since the moving direction of the movable table and the displacement of the movable table after the movement can be easily grasped from the outside, it is possible to promptly grasp the necessity of redoing or correction. Therefore, movement of the auxiliary table (that is, the movable table) can be performed. Work can be performed with high accuracy and speed.

According to the eighteenth aspect of the invention, in the precision machining stage device according to any one of the third, fourth and fifth aspects, a plurality of the moving information of the movable table are detected and output to the outside. The position information detection sensors are separately installed at a plurality of locations on the auxiliary table described above, and a predetermined calculation is performed based on the information detected by the plurality of position information detection sensors to change the moving direction of the movable table and its change. The configuration is such that a position information calculation circuit unit that specifies the amount and the like and externally outputs the position information is provided.

Therefore, the invention of claim 18 has the same function as that of the invention of claim 3, 4 or 5, and further, the moving information of the movable table or the positional information after the movement is real time. Can be output externally. Therefore, as in the case of the invention described in claim 17 described above, the operator can easily grasp the movement direction of the movable table, the positional deviation after movement, and the like from the outside, and therefore, the necessity of redoing or correcting is eliminated. It can be grasped quickly, and the movement work of the auxiliary table (that is, the movable table) can be performed quickly and highly accurately.

According to a nineteenth aspect of the invention, in the precision machining stage device according to any one of the first to eighteenth aspects, the driven magnet is a permanent magnet.
The method is adopted.

Therefore, the invention according to claim 19 has the same function as that of the invention according to any one of 1 to 18 described above, and further, an energizing circuit required for the electromagnet is not required. Since the structure is simplified, productivity and maintainability can be improved, the failure rate of the entire apparatus can be reduced, and durability can be improved in this respect.

[Brief description of drawings]

FIG. 1 is a partially omitted schematic cross-sectional view showing a first embodiment of the present invention.

FIG. 2 is a partially cutaway plan view of FIG.

3 is a schematic cross-sectional view taken along the line AA of FIG.

FIG. 4 is a partially cutaway bottom view of FIG. 1 seen from below.

FIG. 5 is an explanatory diagram showing a positional relationship between the D-shaped drive coil disclosed in FIG. 1, a driven magnet, and a braking plate.

FIG. 6 is a block diagram showing a relationship between each component of FIG. 1 and its operation control system.

7 is a diagram showing an operation example of an auxiliary table (movable table) that is operated by being biased by the operation control system disclosed in FIG.
FIG. 7 (A) is an explanatory view showing a case where the auxiliary table (movable table) is moved in the direction of 45 ° in the upper right direction, FIG. 7 (B).
FIG. 6 is an explanatory view showing a case where an auxiliary table (movable table) is rotated by an angle θ.

FIG. 8 is a chart showing four energization patterns (energization programs are stored in a program storage unit in advance) for energizing the four rectangular small coils of the rectangular drive coil disclosed in FIGS. 1 to 4 and their functions. Is.

9 is a diagram showing a control mode and an operation direction of an auxiliary table (movable table) when the operation control system disclosed in FIG. 6 drives and controls four terrace-shaped drive coils, and FIG.
Is an explanatory view showing the first control mode and the operation of the auxiliary table (movable table) in the X-axis (positive) direction, and FIG. 9B is an explanation showing the relationship between the magnitude of the driving force and the action point in this case. It is a figure.

10 is a diagram showing a control mode and an operation direction of an auxiliary table (movable table) when the operation control system disclosed in FIG. 6 drives and controls four terrace drive coils.
10A is an explanatory diagram showing the third control mode and the operation of the auxiliary table (movable table) in the Y-axis (positive) direction, FIG.
(B) is an explanatory view showing the relationship between the magnitude of the driving force and the point of action in this case.

11 is a diagram showing a control mode and an operation direction of an auxiliary table (movable table) when the operation control system disclosed in FIG. 6 drives and controls four terrace-shaped drive coils.
FIG. 11A is an explanatory diagram showing the fifth control mode and the operation of the auxiliary table (movable table) in the first quadrant direction on the XY coordinates, and FIG. 11B is the magnitude and action of the driving force in this case. It is explanatory drawing which shows the relationship with a point.

12 is a diagram showing a control mode and an operation direction of an auxiliary table (movable table) when the operation control system disclosed in FIG. 6 drives and controls four terrace-shaped drive coils.
FIG. 11A is an explanatory diagram showing the seventh control mode and the operation of the auxiliary table (movable table) in the second quadrant direction on the XY coordinates, and FIG. 11B is the magnitude and action of the driving force in this case. It is explanatory drawing which shows the relationship with a point.

13 is a diagram showing a control mode and an operation direction of an auxiliary table (movable table) when the operation control system disclosed in FIG. 6 drives and controls four terrace-shaped drive coils.
FIG. 13A is an explanatory diagram showing the ninth control mode and the case where the auxiliary table (movable table) is rotated around the origin on the XY coordinates, and FIG. 13B is the magnitude of the driving force in this case. It is explanatory drawing which shows the relationship with an action point.

FIG. 14 is a diagram showing a positional relationship between the braking plate disclosed in FIG. 1, four terrace-shaped drive coils and driven magnets,
FIG. 14A is a partial cross-sectional view showing the structure of the portion including the braking plate, and FIG. 14B is a plan view taken along the line AA in FIG. 14A.

FIG. 15 is a diagram showing a braking force generation principle of the braking plate disclosed in FIG. 1, FIG. 15 (A) is an enlarged partial sectional view showing the braking plate portion of FIG. 1, and FIG. 15 (B) is this case. FIG. 16 is an explanatory diagram showing a situation of occurrence of eddy current braking occurring in the braking plate viewed along the line AA in FIG. 15 (A).

16 is a diagram showing an electrical relationship between the terrace drive coil and the braking plate disclosed in FIG. 1, and FIG. 16 (A) is an equivalent circuit showing a state in which both are connected;
(B) is an equivalent circuit showing the state of the terrace drive coil when there is no braking plate.

FIG. 17 is an explanatory diagram showing an overall operation example of the first embodiment disclosed in FIG. 1;

FIG. 18 is an explanatory diagram showing an example of a case where the operation example of FIG. 17 is viewed two-dimensionally.

FIG. 19 is a partially omitted schematic cross-sectional view showing a second embodiment of the present invention.

20 is a plan view of FIG. 19 with a part cut away.

FIG. 21 is a diagram showing a third embodiment of the present invention.
21A is a schematic partial sectional view with a part omitted, and FIG. 21B is a plan view with a part omitted as viewed along the line AA in FIG. 21A.

FIG. 22 is a partially omitted schematic cross-sectional view showing a fourth embodiment of the present invention.

FIG. 23 is a diagram showing another example of the grid drive coil disclosed in each embodiment of the present invention, and an explanatory view showing an example of the grid drive coil having a rhombus shape.

FIG. 24 is a diagram showing another example of the grid drive coil disclosed in each embodiment of the present invention, and an explanatory view showing an example of the grid drive coil having a circular shape.

FIG. 25 is a view showing another example of the grid drive coil disclosed in each embodiment of the present invention, and an explanatory view showing an example in which the grid drive coil has an octagonal shape.

[Explanation of symbols]

1,31 movable table 2 Table holding mechanism 2A, 2B Piano wire as rod-shaped elastic member Relay plate as 2G relay member 3,33 Case body as body 4,34,44 Electromagnetic drive means 5 Auxiliary table 6 Driven magnet 7,61,62,63 T-shaped drive coil 8,38,48 Fixed plate 9,39,49,50,59 Braking plate

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Yoshio Kano             4-26-1-103 Ukima, Kita-ku, Tokyo (72) Inventor Junichi Onozaki             1-19-43 Higashi Oizumi, Nerima-ku, Tokyo Co., Ltd.             Inside the Tamura Plant F-term (reference) 5F031 CA02 HA53 JA09 JA17 JA22                       JA32 KA06 LA04 LA08 MA33                       MA34 MA35                 5H303 AA06 BB02 BB18 DD12 FF04                       QQ03                 5H641 BB03 BB06 BB15 BB18 GG02                       GG05 GG07 GG10 GG26 HH03                       HH13 JA08

Claims (19)

[Claims] 1. A movable table which is arranged so as to be movable in any direction on the same surface, and a table holding which holds the movable table by allowing the movable table to move and also has a function of returning to the original position. A mechanism, a main body that supports the table holding mechanism, and an electromagnetic drive unit that is mounted on the main body and applies a moving force to the movable table. The electromagnetic drive unit is provided at a predetermined position of the movable table. A plurality of fixedly driven magnets, and a predetermined electromagnetic drive that is individually arranged to face each of the driven magnets and that moves along the predetermined moving direction on the movable table via the respective driven magnets. A configuration including a plurality of terrace-shaped drive coils for applying a force and a fixed plate for holding the terrace-shaped drive coils is provided. As one of the lateral direction moves toward the center point side on the X-Y plane in the movable table side,
For precision machining, each of the terrace driving coils is arranged and fixed on the fixed plate, and the contour coil portion outside the terrace driving coil is set to be larger than the size of the driven magnet. Stage device. 2. The at least three table holding mechanisms are arranged in parallel on the same circumference of the peripheral end of the movable table at a predetermined interval and one end of which is planted in the movable table. One rod-shaped elastic member and one rod-shaped elastic member are arranged in parallel on the same circumference at the outside of each rod-shaped elastic member at a predetermined interval and one end is held by the main body. At least three other rod-shaped elastic members having the same length, and a relay member integrally holding the other end of each of the one and the other rod-shaped elastic members while maintaining the parallel state, 2. The precision machining according to claim 1, wherein each of the three sets of bar-shaped elastic members of the table holding mechanism formed by the bar-shaped elastic members is a bar-shaped elastic member such as a piano wire having the same strength and the same length. Stage device. 3. A movable table arranged so as to be movable in an arbitrary direction on the same plane, and a table holding device which allows the movable table to move to hold the movable table and has a function of returning to the original position. A mechanism, a main body supporting the table holding mechanism, and an electromagnetic drive unit mounted on the main body to apply a moving force to the movable table. The auxiliary table is parallel to the movable table at a predetermined interval. And a structure in which the table holding mechanism holds the movable table via the auxiliary table, and the electromagnetic driving means is fixedly installed at a predetermined position of at least one of the movable table and the auxiliary table. A plurality of driven magnets and a plurality of driven magnets, which are individually arranged so as to face the driven magnets, and are provided on the movable table through the driven magnets. A configuration including a plurality of terrace-shaped drive coils that apply a predetermined electromagnetic drive force along the moving direction and a fixed plate that holds the terrace-shaped drive coils, and is formed inside each of the terrace-shaped drive coils. So that either one of the vertical direction or the horizontal direction of the cross coil side faces toward the center point side on the XY plane on the movable table side,
Precision machining characterized in that each of the terrace driving coils is arranged and fixed on the fixed plate, and the contour coil portion outside the terrace driving coil is set to be larger than the size of the driven magnet. Stage device. 4. The at least three rod-shaped elastic members, wherein the table holding mechanism is arranged in parallel on the same circumference of the peripheral end portion of the auxiliary table at a predetermined interval and one end portion is planted. Corresponding to each of the rod-shaped elastic members on one side, the rod-shaped elastic members are arranged in parallel on the same circumference outside the rod-shaped elastic members at a predetermined interval and have one end held by the main body. And a relay member that integrally holds the other end of each of the one rod-shaped elastic member and the other rod-shaped elastic member while maintaining the parallel state. The stage device for precision machining according to claim 3, wherein the four rod-shaped elastic members of the table holding mechanism are rod-shaped elastic members such as a piano wire having the same strength and the same length. 5. Each of the terrace driving coils is provided in a state of penetrating the fixed plate, and the driven magnets are provided on each of the movable table and the auxiliary table corresponding to each end face of each of the terrace driving coils. The stage device for precision processing according to claim 3 or 4, wherein each stage is provided. 6. An even number of driven magnets are provided, and
The even number of driven magnets are arranged at equal intervals on the same circumference, and the grid-shaped drive coils are arranged on the fixed plate respectively corresponding to the driven magnets whose positions are specified. Claims 1, 2, 3, characterized in that
The stage device for precision processing according to 4 or 5. 7. An even number of driven magnets are provided, and
The even number of driven magnets are arranged in line symmetric positions with respect to at least the X-axis on the XY plane which is assumed to be the center of the movable table, and the positions of the driven magnets are specified. The stage device for precision machining according to claim 1, 2, 3, 4, or 5, wherein the terrace drive coils are arranged on the fixed plate so as to correspond to the drive magnets individually. 8. The driven magnets are respectively arranged at predetermined positions on each of the positive and negative axes on the XY plane which is assumed to be the center of the movable table as an origin, and the positions are thereby changed. The at least four drive magnets are individually provided on the fixed plate so as to individually correspond to each of the identified at least four driven magnets.
The stage device for precision processing according to 3, 4, or 5. 9. Each of the terrace-shaped drive coils is composed of four rectangular small rectangular coils that can be independently energized, and the overall shape of the combination is rectangular. The stage device for precision processing according to any one of claims 1 to 8. 10. The drive coil is formed of four triangular small coils that can be independently energized, and the overall shape of the combination is a rhombus. The stage device for precision processing according to any one of claims 1 to 8. 11. The drive coil is formed of four fan-shaped small coils that can be independently energized, and the overall shape of the combination is circular. Item 9. A precision machining stage device according to any one of items 1 to 8. 12. Each of the terrace driving coils is composed of four pentagonal small coils which can be independently energized, and the overall shape of the combination is octagonal. Then, the stage device for precision processing according to any one of claims 1 to 8. 13. A braking plate made of a non-magnetic metal member is disposed at an end surface portion of the terrace-shaped drive coil on the side of the driven magnet, the braking plate being close to a magnetic pole surface of the driven magnet, 13. The precision machining stage device according to claim 1, wherein a plate is fixedly installed on the fixed plate side. 14. The electromagnetic drive means is provided with an operation control system for restricting movement of the movable table in a plane, and the operation control system is a cross of a plurality of terrace-shaped drive coils of the electromagnetic drive means. 14. A coil drive control means for selectively energizing at least one of the vertical direction and the horizontal direction of the coil side to control the movement of the movable table in a predetermined direction. The stage device for precision processing according to any one of claims. 15. The electromagnetic drive means is provided with an operation control system for restricting the movement or rotation operation of the movable table, and the operation control system is provided with a plurality of respective grid drive coils of the electromagnetic drive means. Coil drive control means for controlling the drive in accordance with the control mode, and a plurality of control programs associated with the coil drive control means for a plurality of control modes in which the moving direction, the rotating direction of the movable table, and the operation amount thereof are specified. A configuration is provided that includes a stored program storage unit and a data storage unit that stores predetermined coordinate data and the like used when executing each of the control programs, and the coil drive control means includes a plurality of respective grid shape drives. 14. An operation command input unit for instructing a predetermined control operation for a coil is provided side by side. Precision machining stage according to One. 16. The program storage section has a drive pattern storage area for storing four basic fixed energization patterns for the terrace drive coil, and a central portion on the fixed plate is assumed as an origin. Be X
The first to fourth control modes for moving the movable table in the positive and negative X-axis directions and in the positive and negative Y-axis directions on the -Y plane, and the quadrants set on the XY plane. The operation programs for the fifth to eighth control modes for moving the movable table in a predetermined direction and the ninth to tenth control modes for rotating the movable table in a positive or negative direction at a predetermined position are stored. 16. The control mode storage area for storing the energization patterns and the operation programs stored in the program storage section are stored so as to be output to the coil drive control means. Precision processing stage device. 17. A plurality of position detection sensors for detecting movement information of the movable table and outputting the information to the outside are separately provided at a plurality of positions of the movable table, and based on information detected by the plurality of position detection sensors. 17. A position information calculation circuit for performing a predetermined calculation to specify a moving direction of the movable table, a change amount thereof, and the like and externally outputting the position information as the position information.
The stage device for precision processing according to any one of 1. 18. A plurality of movement information detection sensors for detecting movement information of the movable table and externally outputting the movement information are provided at a plurality of locations on the auxiliary table respectively, and the information detected by the plurality of position detection sensors is provided. 6. A precision information calculation circuit according to claim 3, 4 or 5, further comprising: a position information calculation circuit which performs a predetermined calculation based on the movement direction of the movable table and an amount of change of the movable table and outputs the position information as external information. Processing stage device. 19. The precision machining stage device according to claim 1, wherein the driven magnet is a permanent magnet.