JP2003266684A - Liquid drop discharge device and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To reduce material costs of a piezoelectric material in an inkjet head 21 adapted to discharge ink by forming a plurality of grooves 23 parallel to each other in a piezoelectric plate 22 and shearing side walls 28 which form the grooves 23 by driving electrodes 29. <P>SOLUTION: The side walls 28 are formed slantwise at the rear end side of ink discharge channels 27. Accordingly, lead-out parts 30 can be formed at the side walls 28, and also external connecting electrodes 31 can be formed at bottom faces of the grooves 23 at the rear end side when the driving electrodes 29 are vapor deposited slantwise. The grooves 23 can have a uniform depth. A length of the piezoelectric material is made a necessary minimum length having a length of the slant side wall added to an active length where the side wall 28 is formed flat and which contributes to actually discharging liquid drops, so that the material costs can be reduced. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention is preferably implemented as an inkjet head of an inkjet recording apparatus,
The present invention relates to a droplet discharge device using a ferroelectric material such as a piezoelectric body and a method for manufacturing the same.

[0002]

2. Description of the Related Art As described above, a plurality of grooves are formed in parallel with each other on a piezoelectric body, and an upper portion thereof is closed by a cover member to form an ink discharge channel, which is formed on a side wall forming the groove. By causing shearing deformation on the side wall depending on the presence or absence of a voltage to the drive electrode, the ink filled in the ink ejection channel is selectively ejected from the nozzle communicating with the ink ejection channel. Ink jet recording apparatuses have been used conventionally.

FIG. 14 is a sectional view showing the structure of a typical prior art ink jet head 1 using such a shear mode, and FIG. 15 is a sectional line XV-XV of FIG.
FIG. 16 is a cross-sectional view as seen from FIG. 16 and FIG.
FIG. 17 is a sectional view taken along line I-XVI, and FIG. 17 is a sectional view taken along section line XVII-XVII in FIG. 14. The ink jet head 1 is disclosed in Japanese Patent Laid-Open No. 2000-211147, and a large number of grooves 4 are formed in parallel with each other in a piezoelectric plate 3 forming the ink discharge channel 2. The upper portion is closed by a cover plate 5, the front portion is closed by a nozzle plate 7 having nozzles 6 formed, and the rear portion is closed by a sloping surface 8 which rises toward the rear side. Are formed. Grooves 9 serving as common ink chambers are formed in the cover plate 5 along the arrangement direction of the grooves 4.

A drive electrode 11 is formed on the upper side of the side wall 10 forming the groove 4. From the rear end side of the drive electrode 11, the external connection electrode 12 is drawn out between the cover plate 5 and the piezoelectric plate 3. When a drive pulse is applied to the external connection electrode 12, the side wall 10 of the piezoelectric plate 3 undergoes the shear deformation, and the pressure wave caused thereby ejects an ink droplet from the nozzle 6.

[0005]

However, in the ink jet head 1 configured as described above, the groove 4 has the active length L1 that contributes to ink ejection.
Is formed in a uniform depth in the range of 1), while the rear end of the active length L1 is larger than that of the active length L1 so that the side wall 10 does not interfere with the tool when wiring to the external substrate 14 is performed by the bonding wire 13. On the side, it is raised by the slope 8. This means that the groove 4 is, for example, 50 to
This is because the slope 8 is formed by the curvature of the dicing saw when forming the shallow groove portion 4a that is formed by cutting with a 60φ dicing saw and supports the external connection electrode 12.

Therefore, there is a problem that the slope 8 occupies a large proportion of the depth of the piezoelectric plate 3, the number of the piezoelectric plate 3 taken from the piezoelectric block is small, and the material cost increases.

An object of the present invention is to provide a droplet discharge device which can reduce the material cost of a ferroelectric material and a method for manufacturing the same.

[0008]

A droplet discharge device according to the present invention has a discharge channel formed by forming a plurality of grooves in a ferroelectric material in parallel with each other and closing an upper portion of the groove with a cover member. In a droplet discharge device in which the filled liquid is discharged as droplets by causing shear deformation on the side wall forming the groove, the side wall on the rear end side of the discharge channel is formed to be gradually lower. The groove bottom surface has an external connection electrode extending from the drive electrode that causes the shear deformation.

According to the above structure, the ink jet recording head is realized, and a plurality of grooves are formed in parallel with each other in a ferroelectric material such as a piezoelectric material, and the upper portion thereof is closed by a cover member. A rear end of the ejection channel, wherein the ejection channel is formed and a side wall forming the groove is sheared to eject the liquid filled in the ejection channel as a droplet. The side wall on the side (opposite the nozzle) is gradually lowered (obliquely). As a result, when the drive electrode that causes the shear deformation of the ferroelectric material is formed on the side wall by vapor deposition,
An external connection electrode connected to the drive electrode may be formed on the bottom surface of the groove on the rear end side of the ejection channel.

Therefore, the groove can have a uniform depth toward the common flow passage of the liquid provided on the rear end side of the discharge channel. Thus, when wiring from the external connection electrode, it is not necessary to form a shallow groove on the rear end side, and the depth of the ferroelectric material is set so that the side wall is formed flat and droplets are actually discharged. It is possible to reduce the material cost by setting the active length contributing to the above to the required minimum length including the length of the oblique side wall. In addition, since the side wall after the active length is cut obliquely, the side wall portion of the active length portion has a high height and is easily deformed, and the side wall portion of the oblique side wall portion has a low side wall height, which improves the strength against deformation. However, unnecessary deformation due to the electrode portion connected to the drive electrode can be reduced.

Further, in the droplet discharge device of the present invention, the ferroelectric material is a piezoelectric material.

According to the above structure, when the ferroelectric material is a piezoelectric material, the drive electrode that causes shear deformation on the side wall is extended from the active length portion to the external connection electrode on the side wall. As in the present invention, the length of the portion on the rear end side from the portion of the active length is set to the minimum required length, so that it is formed due to the electrode of the portion that does not contribute to the actual ejection of droplets, It is possible to reduce the unnecessary electrostatic capacitance that becomes a problem during driving, and it is possible to perform efficient ink ejection.

Furthermore, in the method of manufacturing a droplet discharge device of the present invention, a plurality of grooves are formed in the ferroelectric material in parallel with each other, and the discharge channel formed by closing the upper part with a cover member. In a method for manufacturing a droplet discharge device in which a filled liquid is discharged as droplets by causing shear deformation on a sidewall forming the groove, a constant amount is applied to a block of the ferroelectric material. A plurality of grooves having a depth are processed in parallel with each other, and at the rear end side of the discharge channel, orthogonal to the grooves, the side wall is gradually vaporized to a position where a connection electrode is formed on the bottom surface by oblique deposition or more. By processing the inclined surface to lower the
A drive electrode and a lead portion connected to the drive electrode are formed on the side wall, an external connection electrode connected to the lead portion is formed on the bottom surface of the groove, and an upper portion of the ferroelectric material is closed by a cover member and a front portion is closed by a nozzle plate. It is characterized by doing.

According to the above-mentioned structure, it is realized as an ink jet recording head or the like, and a plurality of grooves are formed in parallel with each other in a ferroelectric material such as a piezoelectric material and the upper portion thereof is closed by a cover member. In manufacturing a droplet discharge device in which a discharge channel is formed and a side wall forming the groove is sheared to discharge the liquid filled in the discharge channel as a droplet, first, a ferroelectric liquid crystal is manufactured. A plurality of grooves having a constant depth to serve as discharge channels are formed in a block of the body material in parallel with each other, and then an inclined surface is formed on the rear end side of the discharge channels to gradually lower the side wall. After that, by oblique vapor deposition, a drive electrode and a lead portion connected to the drive electrode can be formed on the side wall, and an external connection electrode can be formed on the bottom surface of the groove. Then, cover the upper part of the ferroelectric material,
The front part is closed with a nozzle plate to complete the droplet discharge device.

Therefore, the groove can have a uniform depth toward the common flow path of the liquid provided on the rear end side of the discharge channel. Thus, when wiring from the external connection electrode, it is not necessary to form a shallow groove on the rear end side, and the depth of the ferroelectric material is set so that the side wall is formed flat and droplets are actually discharged. It is possible to reduce the material cost by setting the active length contributing to the above to the required minimum length including the length of the oblique side wall.

Further, the method of manufacturing a droplet discharge device of the present invention is characterized in that the electrode portion formed by the oblique vapor deposition is separated for each ink discharge channel by machining.

According to the above structure, the conductive member attached to the upper surface of the side wall by vapor deposition is separated by, for example, lapping to become the drive electrode and the lead-out portion, and the conductive member attached to the upper surface of the oblique side wall is: For example, the external connection electrodes are separated by a dicing process that is deeper or shifted toward the front end side (nozzle direction) with respect to the processing of the oblique surface before the oblique vapor deposition with an oblique blade.

Therefore, the conductive member adhered by vapor deposition can be separated only by machining, and it is not necessary to perform complicated steps such as the case of using a semiconductor process such as resist coating, mask exposure and etching. .

[0019]

BEST MODE FOR CARRYING OUT THE INVENTION Regarding one embodiment of the present invention,
The following is a description with reference to FIGS. 1 to 13.

FIG. 1 is an exploded perspective view showing the structure of an ink jet head 21 according to an embodiment of the present invention, FIG. 2 is its sectional view, FIG. 3 is its side view, and FIG. 4 is its rear surface. 5 is a sectional view taken along section line V-V in FIG. 2, FIG. 6 is a sectional view taken along section line VI-VI in FIG. 2, and FIG. 7 is shown in FIG. FIG. 7 is a cross-sectional view taken along a section line VII-VII. In this ink jet head 21, a large number of grooves 23 are formed in a piezoelectric plate 22 in parallel with each other, an upper part thereof is closed by a cover plate 24, and a nozzle 25 is formed in a front part of the nozzle plate 2.
An ink discharge channel 27 is formed by being closed by 6.

It should be noted that in the present invention, the side wall 28 forming the groove 23 is formed gradually lower (obliquely) on the rear end side of the ink ejection channel 27 (the side opposite to the nozzle 25). is there. As a result, even if the driving electrode 29 that causes the shear deformation of the piezoelectric body is formed on the upper portion of the side wall 28 by the same oblique vapor deposition as the conventional method, the driving electrode 2 is not formed.
9 and 9, a lead-out portion 30 connected to the drive electrode 29 can be formed, and an external connection electrode 31 connected to the lead-out portion 30 can be formed on the bottom surface of the groove 23.

After the external connection electrode 31 is wired to the external substrate 33 by the bonding wire 32,
It is molded with the molding resin 34. When the drive pulse is applied to the external connection electrode 31, the side wall 28 of the piezoelectric plate 22 is sheared and deformed, and an ink droplet is ejected from the nozzle 25 by the pressure wave caused by the shear deformation.

The piezoelectric plate 22 is provided in a cylindrical space formed by the cover plate 24 and the external substrate 33, and the piezoelectric plate 22 is provided on the rear end side.
Is obliquely cut out, a space is formed along the arrangement direction of the grooves 23 on the rear end side, and the space serves as a common ink chamber. Further, a filter 35 for filtering ink is provided on the further rear end side of the cover plate 24 to configure the inkjet head 21.

Therefore, since the side wall 28 is formed obliquely, the lead-out portion 30 and the external connection electrode 31 can be formed together when the drive electrode 29 is formed by oblique vapor deposition. Accordingly, when wiring from the external connection electrode 31 to the external substrate 33 by wire bonding, it is not necessary to form the groove 23 shallowly on the rear end side, and the side wall 28 is flattened so that the piezoelectric plate 22 is deep. It is possible to reduce the material cost by setting the active length L1 that is formed and actually contributes to the ejection of the droplets to the minimum required length that is the length of the oblique portion of the side wall 28.

Further, by using a piezoelectric material as the ferroelectric material, the drive electrode 2 that causes the side wall 28 to undergo shear deformation.
9 is formed on both wall surfaces of the side wall 28, and the lead-out portion 30 also extends on the side wall 28 to the external connection electrode 31. However, by setting the length of the lead-out portion 30 to the minimum necessary length as in the present invention, the lead-out portion 30 is formed due to the lead-out portion 30 that does not contribute to the actual ejection of ink, which causes a problem during driving. Unnecessary electrostatic capacity can be reduced, and efficient ink ejection can be performed.

8 to 10 are views showing a method of manufacturing the ink jet head 21 having the above-described structure. FIGS. 8 and 9 show the piezoelectric plate 22 cut out from the piezoelectric block 41 and the electrode formation. Figure 1 shows the situation
Reference numeral 0 indicates a state of assembling the piezoelectric plate 22 into the inkjet head 21. 8 and 10, the piezoelectric plate 22 is viewed from the side, and in FIG. 9, it is viewed from the back side.

As shown in FIGS. 8A and 9A, the piezoelectric block 41 placed on the base 42 is
First, the dicing saw 43 having a thickness equal to the width of the groove 23.
By this, a plurality of grooves 23 parallel to each other are sequentially engraved at a constant depth. Next, FIG. 8B and FIG.
As shown in (b), the piezoelectric block 41 is divided into each piezoelectric plate 22 by a dicing saw 44 having a trapezoidal axial section. At this time, in the dicing saw 44, the surface serving as the bottom side 44a corresponds to the front end side of the piezoelectric plate 22, and the surface serving as the oblique side 44b corresponds to the rear end side of the piezoelectric plate 22.

In this manner, the piezoelectric plate 22 having the divided and inclined surfaces 22a is formed, as shown in FIGS. 8 (c) and 9 (c), the drive electrode 29 and the lead-out portion 3 are formed.
0 and the conductive member 45 to be the external connection electrode 31 is obliquely vapor-deposited. As shown in FIG. 9C, the oblique vapor deposition is performed from the direction orthogonal to the extending direction of the groove 23 from the side wall 28.
To act as a mask for vapor deposition, and vapor deposition is performed from two obliquely upward directions with an elevation angle θ so that the drive electrode 29 of the active length L1 is formed in the upper half of the side wall 28.

Subsequently, as shown in FIGS. 8D and 9D, the conductive member 45a attached to the upper surface of the side wall 28.
Are separated by lapping, and the drive electrode 29 is formed. Further, as shown in FIGS. 8 (e) and 9 (e), the dicing saw 44 described above shifts deeper or shifts toward the front end side (nozzle direction) with respect to the processing of the inclined surface 22a before oblique vapor deposition. The conductive member 45 separated by the dicing process and attached on the inclined surface 22a.
b is removed, and the lead portion 30 and the external connection electrode 3 are removed.
1 is formed.

Therefore, the conductive member 45 adhered by vapor deposition can be separated only by machining, without performing complicated steps such as the case of using a semiconductor process such as resist coating, mask exposure and etching. The piezoelectric plate 22 can be manufactured.

The completed piezoelectric plate 22 is shown in FIG.
As shown in (a), it is attached to the external substrate 33 and wire-bonded by a bonder. Further, as shown in FIG. 10B, the portion of the bonding wire 32 is molded with the molding resin 34. Thereafter, as shown in FIG. 10C, the upper portion of the piezoelectric plate 22 is closed by the cover plate 24, the front portion is closed by the nozzle plate 26, and although not shown, the filter 35 is attached. The inkjet head 21 is completed.

FIG. 11 is a sectional view for explaining the ink ejection operation of the ink jet head 21 having the above-mentioned structure. For simplicity, consider three ink ejection channels A, B, and C adjacent to each other. In the state where no voltage is applied to the drive electrode 29, as shown in FIG.
As shown in (a), the ink ejection channels A,
No deformation occurred in B and C.

A + drive voltage is applied to the pair of drive electrodes PB1 and PB2 of the ink ejection channel B, and the pair of drive electrodes PA1 and PA of the ink ejection channels A and C adjacent to both sides are applied.
2; When a GND driving voltage is applied to PC1 and PC2,
As shown in FIG. 11B, an electric field is applied to the side walls WAB and WBC forming the ink ejection channel B in the thickness direction thereof, polarization in the arrow direction occurs, and the ink ejection channel B expands. Open. At this time, no electric field is applied to the side walls WA and WB of the remaining ink ejection channels A and C, and the ink ejection channels A and C are reduced by half the volume of the ink ejection channel B.

After that, a drive voltage of GND is applied to the drive electrodes PB1 and PB2 of the ink ejection channel B to drive electrodes PA1 and PA of the ink ejection channels A and C on both sides.
2; When a + driving voltage is applied to PC1 and PC2,
As shown in FIG. 1C, an electric field is applied to the side walls WAB and WBC forming the ink ejection channel B in the direction opposite to that of FIG. The discharge channel B contracts. At this time,
An electric field is not applied to the side walls WA and WB of the remaining ink ejection channels A and C, and the ink ejection channels A and C expand by half the volume of the ink ejection channel B which has been reduced.

FIG. 12 shows each ink ejection channel A,
It is a waveform diagram explaining the drive pulse given to B and C and the state of the ejection channel. Drive pulses of the ink ejection channels A, B, and C are shown in FIG.
12 (b) and 12 (c), and FIG. 12 (d) shows the state of the B channel which is the ink ejection channel as described above. In the non-ejection period T1, non-ejection pulses are commonly applied to the ink ejection channels A, B, and C,
Therefore, no electric field is applied to the side wall 28, and the volume of each ink ejection channel A, B, C does not change.

On the other hand, in the ejection period T2, the ejection pulse is first applied to the B channel which is the ejection channel. The pulse width T3 of this ejection pulse is the time obtained by dividing the active length L1 by the speed of sound. Simultaneously with the end of the ejection pulse, the remaining ink ejection channels A and C
Is supplied with the non-ejection pulse. The pulse width T4 of the non-ejection pulse is twice the time obtained by dividing the active length L1 by the sound velocity. As a result, the ink ejection channel B can be once expanded and then contracted to eject ink, and ink ejection from the remaining ink ejection channels A and C can be prevented.

In this way, ink can be ejected from the desired ink ejection channel 27 with two pulses. The ink ejection channels 27 arranged in a large number in the inkjet head 21 have the above-mentioned A, B, and
It will be driven by being divided into three groups of C.
This is shown in FIG. In FIG. 13, ink ejection channels are indicated by reference numerals 1A, 1B, 1C; 2A, 2B,
2C; 3A, 3B, 3C, three in each group.

FIG. 13A shows a state in which no drive pulse is applied or the ink ejection channels 1A, 1B, 1C; 2 as shown in the non-ejection period T1 in FIG.
A, 2B, 2C; 3A, 3B, 3C shows a state in which a non-ejection pulse is commonly applied.

FIGS. 13B and 13C show a state in which the B group is driven, and the ink ejection channel 2 is shown.
B and 3B are discharged, and the ink discharge channel 1B is not discharged. The ejection pulse is applied to the ink ejection channels 2B and 3B to be ejected.
3 (b), once enlarged, the non-ejection pulse is given and then reduced as shown in FIG. 13 (c). Thus, each ink ejection channel 1A, 1B, 1
C; 2A, 2B, 2C; 3A, 3B, 3C are driven for each group.

[0040]

As described above, the droplet discharge device of the present invention is realized as an ink jet recording head or the like, and liquid such as ink is discharged by utilizing shear deformation of a ferroelectric material such as a piezoelectric material. In a droplet discharge device configured to discharge droplets, a side wall made of the ferroelectric material that forms a discharge channel is formed obliquely on the rear end side, and a drive electrode that causes shear deformation on the side wall is formed. When forming by vapor deposition, an external connection electrode connected to the drive electrode is formed on the bottom surface of the groove of the discharge channel on the rear end side of the discharge channel.

Therefore, the groove can have a uniform depth toward the common channel of the liquid provided on the rear end side of the discharge channel, and the rear end can be formed when wiring from the external connection electrode. It is not necessary to form a shallow groove on the side, and the depth of the ferroelectric material is set to the active length that contributes to the ejection of droplets by forming the side wall flat and adding the length of the oblique side wall. Material cost can be reduced as the minimum required length.

Further, in the droplet discharge device of the present invention, the ferroelectric material is a piezoelectric material as described above.

Therefore, since the drive electrode which causes the shearing deformation on the side wall is extended from the active length portion to the external connection electrode on the side wall, the active electrode portion is rearward from the active length portion as in the present invention. By making the length of the part to the minimum necessary length, it is possible to reduce the unnecessary electrostatic capacitance that is formed due to the electrode of the part that does not contribute to the actual ejection of droplets and which becomes a problem during driving. Can
Ink can be ejected efficiently.

Furthermore, as described above, the method of manufacturing the droplet discharge device of the present invention is realized as an ink jet recording head or the like, and ink is used by utilizing shear deformation of a ferroelectric material such as a piezoelectric material. In manufacturing a droplet discharge device that discharges the above liquid as droplets, first, a plurality of grooves having a certain depth to be discharge channels are processed in parallel with each other in a block of a ferroelectric material, and then the discharge channels are formed. Process the inclined surface that gradually lowers the side wall at the rear end side,
Then, the drive electrode and the lead portion connected to the drive electrode are formed on the side wall by oblique vapor deposition, and the external connection electrode is formed on the bottom surface of the groove. Subsequently, the upper portion of the ferroelectric material is covered with the cover member, and the front portion is covered with the nozzle. The plate is closed to complete the droplet discharge device.

Therefore, the groove can have a uniform depth toward the common channel of the liquid provided on the rear end side of the discharge channel, and the rear end can be formed when wiring from the external connection electrode. It is not necessary to form a shallow groove on the side, and the depth of the ferroelectric material is set to the active length that contributes to the ejection of droplets by forming the side wall flat and adding the length of the oblique side wall. Material cost can be reduced as the minimum required length.

Further, in the method of manufacturing the droplet discharge device of the present invention, as described above, the separation of each ink discharge channel of the electrode portion formed by the oblique vapor deposition is performed by machining.

Therefore, it is not necessary to perform complicated steps as in the case of using a semiconductor process.

[Brief description of drawings]

FIG. 1 is an exploded perspective view showing a structure of an inkjet head according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view of the inkjet head shown in FIG. 1 in an assembled state.

FIG. 3 is a side view of FIG.

FIG. 4 is a rear view of FIG.

5 is a sectional view taken along the section line VV in FIG.

6 is a cross-sectional view taken along the section line VI-VI in FIG.

FIG. 7 is a sectional view taken along the section line VII-VII in FIG.

FIG. 8 is a diagram showing a method of manufacturing an inkjet head according to the present invention, and a side view showing a state of cutting out a piezoelectric plate from a piezoelectric block and forming electrodes.

FIG. 9 is a diagram showing the method of manufacturing the inkjet head according to the present invention, and is a rear view showing a state of cutting out the piezoelectric plate from the piezoelectric block and forming electrodes.

FIG. 10 is a diagram showing a method of manufacturing an inkjet head according to the present invention, and a side view showing a state of assembling a piezoelectric plate into an inkjet head.

FIG. 11 is a cross-sectional view for explaining an ink ejection operation of the inkjet head.

FIG. 12 is a waveform diagram illustrating a drive pulse applied to each ink ejection channel and a state of the ejection channel.

FIG. 13 is a cross-sectional view showing a state of group driving of a large number of ink ejection channels.

FIG. 14 is a typical prior art inkjet head 1.
It is a cross-sectional view showing the structure of.

15 is a cross-sectional view taken along the section line XV-XV in FIG.

16 is a cross-sectional view taken along the section line XVI-XVI in FIG.

FIG. 17 is a sectional view taken along the section line XVII-XVII in FIG.

[Explanation of symbols]

1A, 1B, 1C; 2A, 2B, 2C; 3A, 3B, 3
C ink ejection channel 21 inkjet head 22 piezoelectric plate 22a inclined surface 23 groove 24 cover plate 25 nozzle 26 nozzle plate 28 side wall 29 drive electrode 30 lead-out portion 31 external connection electrode 32 bonding wire 33 external substrate 34 mold resin 35 filter 41 piezoelectric body Blocks 43 and 44 Dicing saw 45 Conductive member 45a Conductive member (attached to the upper surface of the side wall) 45b Conductive member (attached to the inclined surface) A, B, C Ink ejection channels PA1, PA2; PB1, PB2; PC1, PC2
Drive electrodes WA, WB; WAB, WBC Side wall

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Susumu Hirata             22-22 Nagaikecho, Abeno-ku, Osaka-shi, Osaka             Inside the company F-term (reference) 2C057 AF93 AG32 AG42 AG45 AP22                       AP54 BA03 BA14

Claims (4)

[Claims] 1. A side wall forming a groove for liquid filled in a discharge channel formed by forming a plurality of grooves in a ferroelectric material in parallel with each other and closing an upper portion of the groove with a cover member. In a droplet discharge device configured to discharge a droplet by causing a shear deformation to a side surface, a side wall of a rear end side of the discharge channel is gradually formed to be low, and a drive electrode that causes the shear deformation is formed on a groove bottom surface. A droplet discharge device having an external connection electrode extended from the liquid crystal discharge device. 2. The droplet discharge device according to claim 1, wherein the ferroelectric material is a piezoelectric material. 3. A side wall forming a groove for a liquid filled in a discharge channel formed by forming a plurality of grooves in a ferroelectric material in parallel with each other and closing an upper portion of the groove with a cover member. In a method for manufacturing a droplet discharge device that discharges as a droplet by causing a shear deformation in, a plurality of grooves having a constant depth are processed in parallel to each other in a block of the ferroelectric material, On the rear end side of the discharge channel, a sloped surface is formed which is orthogonal to the groove and gradually lowers the side wall to a position where the connection electrode is formed on the bottom surface by oblique vapor deposition or more, and A drive electrode and a lead portion connected to the drive electrode are formed on the side wall by vapor deposition, and an external connection electrode connected to the lead portion is formed on the bottom surface of the groove, and an upper portion of the ferroelectric material is covered with a cover member and a front portion of the ferroelectric material is opened. A method of manufacturing a droplet discharge device, which comprises closing with a slip plate. 4. The method for manufacturing a droplet discharge device according to claim 3, wherein the separation of each ink discharge channel of the electrode portion formed by the oblique deposition is performed by machining.