JP2003263711A - Magnetic head slider - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a magnetic head slider capable of further reducing adsorption between the medium facing surface of the magnetic disk side of a slider main body and a magnetic disk without adversely affecting floating. <P>SOLUTION: The magnetic head slider S is constructed in such a manner that crowns are formed in side rails disposed on both edge sides of the medium facing surface of a slider main body 10 in which a magnetic head core 11 is disposed, the side of side rail on the inlet side 10a of an air flow is larger than that on the outlet side 10b of the air flow, a groove is disposed between both side rails, one or more projections 17 are disposed on both sides near the inlet side 10a of the air flow of each side rail and/or near the inlet side 10a of the air flow of the groove, each projection 17 is protruded to a magnetic disk 71 side more than the side rail, and a notched part is disposed in each side rail to form a crown discontinuous surface. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head slider for recording / reproducing magnetic information by flying over a magnetic recording medium at minute intervals, and particularly to a slider main body without adversely affecting the flying. The present invention relates to a magnetic head slider that can further reduce the attraction between a magnetic disk and a medium facing surface on the magnetic disk side.

[0002]

2. Description of the Related Art Conventionally, as a magnetic recording device for a computer, a magnetic disk device as shown in FIG. 10 is known. In this magnetic disk device, a magnetic head slider 8 is mounted on a disk-shaped magnetic disk 81 that is rotatably provided.
2 is arranged to face each other, and the magnetic head slider 8
Reference numeral 2 is supported by a support arm 84 via a triangular spring plate 83, and a rotation center portion 84a of the support arm 84 is provided.
The magnetic head slider 82 can be moved to a desired position in the diametrical direction of the magnetic disk 81 by a rotating operation centering around.

In the magnetic disk device having the structure shown in FIG. 10, when the magnetic disk 81 is stopped, the bottom surface of the magnetic head slider 82 is lightly applied to the magnetic disk 81 by the urging force of a spring plate 83 supporting the magnetic head slider 82. When the magnetic disk 81 is being pressed and is rotating, the magnetic head slider 82 is configured to fly over the magnetic disk 81 at a predetermined height by utilizing the flow of air generated by the rotation. , Magnetic disk 81
When the rotation is stopped, the flying magnetic head slider 82 comes into contact with the magnetic disk 81 again and is stopped. However, during the above flying running, magnetic information cannot be read from or written to the magnetic recording layer of the magnetic disk 81. It is configured to be carried out, and this series of operating conditions is usually called CSS (contact start stop).

FIG. 11 shows a flying state of a two-rail type magnetic head slider 82 which has been widely used in the past. One magnetic groove (not shown) is formed in the center of the bottom surface of the magnetic head slider 82. ) Is formed and side rails 86, 86 are formed on both sides thereof, and an inclined surface 86a is formed on the lower end side of each side rail 86 (the upstream side in the rotational direction of the magnetic disk 81). As shown by the arrow A in FIG. 11 via 86a, the bottom surface of the side rail 86 of the magnetic head slider 82 serves as a positive pressure generating portion so that the magnetic head slider 82 floats. . Further, each side rail 86 is provided on the front side of the magnetic head slider 82 (airflow inflow side 82).
The width a) is formed so as to be wider than the width of the rear side (outflow side 82b of the air flow). Further, as shown by the chain double-dashed line in FIG. 11, the negative pressure groove 86b is formed on the bottom surface of the side rail 86.
The magnetic head slider is also known in which the floating traveling property is stabilized by balancing the negative pressure generated in the negative pressure groove 86b with the positive pressure generated in the side rails 86, 86. ing.

When the magnetic head slider 82 is flying, the air flows into the bottom surface side of the magnetic head slider 82 through the inclined surface 86a, and when the negative pressure groove 86b is further formed, it is negative toward the rear side of the magnetic head. Since the pressure is generated, the magnetic head slider 82 is levitating while tilting by a small angle with the air inflow side 82a being lifted up, as shown in FIG. α: usually about 100 μRad).

The magnetic head slider 82 having such a configuration
In this case, the magnetic disk 81 is brought into sliding contact with the magnetic disk 81 at the time of startup (at the time of rising) and at the time of stop (at the time of falling). Therefore, in order to prevent wear and wear of the magnetic disk surface, a protective film is formed on the recording layer of the magnetic disk 81, and a lubricating layer is further formed on this protective film.
In the magnetic head slider 82 having the above-mentioned structure, it is advantageous that the magnetic gap G of the magnetic head slider 82 is as close as possible to the magnetic recording layer of the magnetic disk 81 when flying from the viewpoint of magnetic recording. It is desirable to make the flying height of the head slider 82 as low as possible, and in recent years, the flying height of the magnetic head slider 82 (the magnetic head slider 82 has been increased with the increase in recording density and miniaturization of magnetic disk devices). The amount of spacing between the magnetic disk 81 and the magnetic disk 81 tends to be further reduced. In order to reduce the flying height, it is necessary to make the surface roughness of the magnetic disk 81 as small as possible in order to avoid contact between the flying magnetic head slider 82 and the magnetic disk 81. However, the magnetic disk 81
When starting or stopping the magnetic disk 81
The smoother the surface of the magnetic disk 81 is, the larger the contact area between the magnetic disk 81 and the magnetic head slider 82 becomes.
Adhesion between the magnetic disk 81 and the magnetic disk 81 is likely to occur, and the adsorption torque increases.

When the suction torque increases, the magnetic disk 8
It is said that the load at the time of starting the motor for rotating 1 is large, and that the magnetic head element provided on the support arm 84 and the slider 82 and the magnetic disk recording layer are easily damaged when the magnetic disk 81 is started to rotate. There was a problem. Therefore, in order to solve such a problem, as shown in FIG. 12, the magnetic disk 81 of the magnetic head slider 82 is
A magnetic head slider in which the contact area between the magnetic head slider 82 and the magnetic disk 81 is reduced by forming a crown on the side facing the medium to provide a crown also on each side rail 86, or as shown in FIG. The projections 89a, 8 are formed on the side rails 86 of the magnetic head slider 82.
A magnetic head slider in which 9b is provided along the length direction of the side rail 86 to reduce the contact area with the magnetic disk 81 is considered. 12 and 13 are side views showing the state of each magnetic head slider when it is flying.

[0008]

By the way, in the magnetic head slider, as described above, there is a tendency for the height of the magnetic head slider 82 during flying to be lowered because of the demand for higher recording density and smaller size of the magnetic disk device. However, the pitch angle is also reduced accordingly. However, Figure 1
In the conventional magnetic head slider having the crown as shown in FIG. 2, when the recording density increases and the flying height decreases, the flatness of the magnetic recording medium increases and the sticking between the magnetic head slider and the magnetic recording medium occurs. The pattern shape of the medium facing surface, that is, each side rail 8 is likely to occur.
Depending on the shape and width of 6 and the groove shape and width between the side rails 86, 86, it is difficult to obtain the effect of forming a crown.

Further, the protrusion 89a as shown in FIG.
In the conventional magnetic head slider provided with 89, when the pitch angle becomes smaller, the protrusion 89b closer to the air flow outflow side 82b (the side closer to the magnetic gap G) floats above the magnetic gap G when in the floating state. Becomes low, that is, the protrusion 89b near the air flow outflow side 82b projects to the magnetic disk 81 side from the magnetic gap G, and therefore the flying height cannot be lowered. Therefore, it is considered to move the position of the protrusion 89b near the outflow side 82b of the air flow toward the inflow side 82a of the L ₁ minute air flow from the magnetic gap G as shown by the wavy line in FIG. However, when the pitch angle is small, it is necessary to move the position of the protrusion 89b toward the inflow side 82a of the airflow by a considerable amount. In this case as well, the protrusion of the medium facing surface of the magnetic head slider 82 is stopped when the magnetic disk 81 is stopped. There is a problem that the area where the magnetic disk 81 is not provided (the medium facing surface near the magnetic gap G) comes into contact with the magnetic disk 81 in a large area, so that the magnetic disk 81 is easily attracted to the medium facing surface of the magnetic head slider 82. It was

The present invention has been made in view of the above circumstances, and it is an object of the present invention to further reduce the attraction between a magnetic disk and a medium facing surface of a slider main body on the magnetic disk side without adversely affecting the flying height. And

[0011]

In order to solve the above-mentioned problems, the magnetic head slider of the present invention is provided with a magnetic head core in a plate-shaped slider body, and buoyancy is exerted on the medium facing surface of the slider body on the magnetic disk side. A magnetic head slider which is formed with rails and / or pads for generation and which floats on a magnetic disk to write or read magnetic information, wherein at least one of the medium facing surface of the slider body, the rail and the pad is used. A crown is formed on the rail, the rail is formed on both edges of the magnetic disk side medium facing surface of the slider body, and extends from the air flow inflow side to the air flow outflow side of the slider body. Side rails, and one or more protrusions are provided on both sides of each of the side rails near the inflow side of the air flow. Is, the protrusion is protruded to the magnetic disk side with respect to the side rails, characterized in that the cutout portion forming the discontinuous surface of the crown to the respective side rails are provided.

According to the magnetic head slider having such a structure, since the crown is formed on the medium facing surface of the slider body and at least the rail and the pad, the side rail portion on the outflow side of the air flow ( Side rails near the magnetic gap of the magnetic head core)
Since the contact state with the magnetic disk can be changed from planar to linear, the contact area between the slider body and the magnetic disk can be reduced, and the effect of reducing the adsorption between the slider body and the magnetic disk can be improved. Further, by forming the crown on the rail as described above, it is possible to bring the magnetic gap of the magnetic head core closer to the magnetic disk than the other portions in the floating state, that is, the flying height of the magnetic gap is the lowest. It is possible and advantageous. Moreover, since the side rail on the outflow side of the air flow is not provided with a protrusion, it does not adversely affect the levitation.

Further, one or more protrusions are provided on both sides of each of the side rails near the inflow side of the air flow and / or on both sides of the groove provided between the both side rails near the inflow side of the air flow, and By protruding the protrusion toward the magnetic disk side rather than the side rail, the side rail portion on the inflow side of the air flow does not contact the magnetic disk, and the protrusion contacts the magnetic disk. The effect of reducing the attraction between the slider body and the magnetic disk can be improved as compared with the case where the slider body is not provided. When there is not provided one or more protrusions on both sides of each side rail near the inflow side of the air flow and / or at the both sides of the groove near the inflow side of the air flow, it is considered that the side rail part on the inflow side of the air flow. Even if the contact state with the magnetic disk is linear, adsorption is likely to occur because it is long, but protrusions are formed on both sides of each side rail near the inflow side of the air flow and / or the grooves near the inflow side of the air flow. If one or more are provided, the contact state between the protrusion and the magnetic disk can be made into a dot shape or a short linear shape, so that the effect of reducing the attraction between the slider body and the magnetic disk is improved.

Further, since the protrusions are provided on the both sides of each side rail near the air flow inflow side and / or the groove near the air flow inflow side, one or more protrusions are provided on the slider body. Since one or more protrusions are provided on both sides in the width direction near the inflow side of the air flow, either side in the width direction (left-right direction) of the slider body tilts to contact the magnetic disk during flying. It is possible to avoid that, and it is possible to sufficiently stabilize the running floating stability. Therefore, according to the magnetic head slider of the present invention, the contact area with the magnetic disk is reduced on both the air flow inflow side (leading side) and the air flow outflow side (trailing side) of the magnetic head slider during flying. As a result, the effect of reducing the attraction between the slider body and the magnetic disk can be maximized, and a magnetic head slider having excellent characteristics can be provided without adversely affecting the flying height.

Further, in the magnetic head slider of the present invention having the above-mentioned structure, the rails are formed on both edge sides of the medium facing surface on the magnetic disk side of the slider body, and the air flow inflow side of the slider body. May have a side rail extending from the side to the outflow side of the air flow, and a center rail and / or a pad formed between both side rails. In the magnetic head slider of the present invention having the above structure, the side rails are
It is preferable that the width of the air flow on the inflow side is larger than the width of the air flow on the outflow side in order to maintain a better floating posture. Further, in the magnetic head slider of the present invention having any one of the above configurations, the side rails are provided with a notch forming a discontinuous surface of the crown. When it is attached to the support arm by means of C, the spring pressure sensitivity can be reduced, and the variation of the flying height of the magnetic head slider from the center side to the outer peripheral side of the magnetic disk can be reduced, and C
It is preferable because FH (constant flying height) can be improved. In the case where the cutout portion as described above is provided on the side rail, it is preferable that the protrusion is provided on the side rail at a position close to the cutout portion in order to improve the floating characteristic.

In the magnetic head slider of the present invention having any one of the above configurations, it is preferable that the height of the protrusion is higher than the crown amount. Here, the height of the protrusion is
When the protrusion is provided on the side rail that does not have the notch, it is the distance from the surface of the side rail to the apex of the protrusion, and the protrusion is provided on the side rail that has the notch. When the protrusion is provided, it is the distance from the bottom surface of the notch to the apex of the protrusion, and when the protrusion is provided in the groove, it is the distance from the bottom surface of the groove to the apex of the protrusion. The crown amount is the distance from the line connecting both ends in the length direction of the medium facing surface of the slider body to the highest position of the crown, or the maximum amount of the crown from the line connecting the starting and ending portions of the side rails. The distance to the position. The upper limit of the height of the protrusion is allowed up to the sum of the flying height of the slider body and the increase in pitch (distance from magnetic gap × pitch angle).

In the magnetic head slider according to the present invention having any one of the above configurations, when the magnetic head slider is in a floating state, the protrusion may not protrude from the magnetic gap of the magnetic head core toward the magnetic disk. preferable. According to the magnetic head slider having such a configuration, when the magnetic head slider flies, the projection does not reach the minimum flying height, that is, the magnetic gap can be closer to the magnetic disk than the projection.

Further, in the magnetic head slider of the present invention having any one of the above configurations, the distance from the magnetic gap of the magnetic head core on the medium facing surface of the slider body on the magnetic disk side is the length of the slider body. 1/3
It is possible to prevent the protrusion from approaching the magnetic disk through the magnetic gap when the magnetic head slider flies because the protrusion is not provided in the region having the following length. In the magnetic head slider of the present invention having any one of the above configurations, the distance from the magnetic gap of the magnetic head core on the medium facing surface of the slider body on the magnetic disk side is 1/3 of the length of the slider body. The protrusion may be provided only in a region having a larger length. By doing so, it is advantageous that the protrusion does not fly to the minimum when the magnetic head slider is levitated, that is, the magnetic gap can be closer to the magnetic disk than the protrusion.

Further, in the magnetic head slider of the present invention having any one of the above constitutions, the protrusion has a film hardness of 22G.
It is preferably composed of a carbon film of Pa or more. According to the magnetic head slider having such a configuration, by setting the hardness of the protrusions to 22 GPa or more, the abrasion resistance of the protrusions can be remarkably improved, and the protrusions can be formed when the magnetic disk is started and stopped. Even if it slides on the magnetic disk, it is less likely to wear, and it is possible to prevent the contact area between the slider body and the magnetic disk from increasing, and to prevent the attraction force between the slider body and the magnetic disk from increasing.

Further, in the magnetic head slider of the present invention having any one of the above-mentioned constitutions, a magnetic head slider having corrosion resistance is provided on at least the surface of the slider body facing the medium and at least the surface of the rail and the pad via an adhesive layer. A first carbon film is provided, the protrusion is provided on the first carbon film, and the protrusion is formed by alternately forming an intermediate film and a second carbon film, and At least the outermost second carbon film of the two carbon films preferably has abrasion resistance. According to the magnetic head slider having such a configuration, since the second carbon film having abrasion resistance is formed on the outermost surface of the protrusion, the protrusion serves as the magnetic disk when the magnetic disk is started and stopped. It is hard to wear even if it slides, the abrasion resistance of the protrusion can be remarkably improved, and further, at least the surface of the slider body facing the medium and at least the rail or pad surface of the rail is corrosion resistant. Since it is covered with the film, it is possible to prevent the magnetic head core provided in the slider body from being deteriorated due to corrosion. Further, since the abrasion resistance of the protrusion is remarkably improved as described above, it is possible to prevent the contact area between the slider body and the magnetic disk from increasing, and increase the attraction force between the slider body and the magnetic disk. It is also possible to prevent the magnetic head element provided in the magnetic head core, the recording layer of the magnetic disk, and the like from being damaged due to the above phenomenon when the magnetic disk is started to rotate.

The first and second carbon films having the above characteristics are formed by the ECRCVD method (Electron Cyclotron Res).
reaction gas (carbon-containing gas) that is supplied into the film forming apparatus when the film is formed by onance chemical vapor deposition
It is possible to efficiently manufacture carbon films having different characteristics by changing the type of the above or adjusting the substrate bias. Further, in the magnetic head slider of the present invention having the above structure, the first carbon film having corrosion resistance is made of a carbon film having a hydrogen content of 30 atomic% or more, and the second carbon film having wear resistance is formed. A carbon film having a film hardness of 22 GPa or more is preferably used. The first carbon film having a hydrogen content of 30 atomic% or more,
For example, when forming by the ECRCVD method on the intermediate film of the slider body on which the adhesive layer, the first carbon film, and the intermediate film are formed, the kind of reaction gas (gas containing carbon) supplied into the film forming apparatus is changed. Or by adjusting the substrate bias (lowering the substrate bias). When methane gas is used as the reaction gas,
A carbon film having a hydrogen content of 35 atomic% or more can be formed. When ethylene gas is used as the reaction gas, a carbon film having a hydrogen content exceeding 30 atomic% can be formed by the substrate bias. As described above, by increasing the hydrogen content in the first carbon film covering at least the surface of the rail of the slider body and the surface of the rail and the pad, the film hardness is reduced, but the first carbon film becomes amorphous and becomes dense. And the degree of adhesion is increased and peeling is less likely to occur, so that the magnetic head core provided in the slider body can be prevented from being deteriorated due to corrosion.

The above-mentioned second carbon film having a film hardness of 22 GPa or more is, for example, an adhesive layer, a first carbon film, and an intermediate film, and is formed on the intermediate film of the slider body by the ECRCVD method. The film can be formed by reducing the hydrogen content in the carbon film by changing the kind of the reaction gas (gas containing carbon) supplied to the inside or adjusting the substrate bias (increasing the substrate bias). The hydrogen content in the second carbon film is preferably less than 30 atom%. By thus reducing the hydrogen content in the second carbon film forming the protrusions, the bond between carbon atoms is strengthened and the hardness can be increased. The second carbon film has a hydrogen content of 0 atomic%.
It may be made of a carbon film. As a specific example of such a carbon film, cathodic arc carbon (CAC) can be mentioned. For the second carbon film made of cathodic arc carbon, for example, a slider body having an adhesive layer, a first carbon film, and an intermediate film formed therein is arranged in a film forming apparatus, and a lump of graphite is arced in a vacuum atmosphere. A film can be formed by discharging. Furthermore, in the magnetic head slider of the present invention having any one of the above configurations, it is preferable that the magnetic head core includes a giant magnetoresistive effect element.

[0023]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of a magnetic head slider of the present invention will be described below with reference to the drawings. (First Embodiment) FIG. 1 is a bottom view showing a first embodiment of a magnetic head slider according to the present invention, and FIG. 2 is a sectional view taken along the line II-II when the magnetic head slider of FIG. 1 is in a floating state. Is. The magnetic head slider S of the first embodiment is
A plate-shaped slider body 10 made of Al ₂ O ₃ TiC or the like
In addition, a magnetic head core 11 having a configuration to be described later is provided, and a portion other than the magnetic core portion is entirely composed of a substrate made of ceramics or the like, and is used similarly to the conventional magnetic head slider shown in FIG. It is what is done. As shown in FIG. 2, a crown is formed on the bottom surface (the upper surface in FIG. 1, which is the medium facing surface facing the magnetic disk 71) of the slider body 10. In addition, the slider body 1
The bottom surface of the slider body 1 is located on both side edges of the slider body 1
Two side rails 12 extending from the front side to the rear side of 0 are formed. In this specification, the lower side of the slider body 10 in FIG. 1 is referred to as the front side of the slider body 10, and this front side is generally referred to as the leading side of the slider, and the air flow from the magnetic disk 71 flows in. Side 10a, and, on the contrary, the slider body 10 in FIG.
Is referred to as the rear side of the slider body 10, and this rear side is generally referred to as the trailing side of the slider and is the side 10b through which the air flow from the magnetic disk flows out.

Each of the side rails 12 is provided to generate a positive pressure, and the end of the inflow side 10a of the air flow is wider than the end of the outflow side 10b of the air flow, and the end on the inflow side is formed. The central portion between the portion and the end portion on the outflow side is formed narrow. An island-shaped center rail 13 is formed between the rear ends of both side rails 12, 12. Crowns are also formed on the surfaces of the side rails 12, 12 and the center rail 13. Each side rail 1
The discontinuous surface of the crown is formed by providing the cutout portion 10d at the center portion in the length direction of 2 as shown in FIG. When such a cutout portion 10d is provided, the spring pressure sensitivity can be reduced when the magnetic head slider S is attached to the support arm 84 via the spring plate 83 as shown in FIG. Also, the magnetic disk 71 of the flying height of the magnetic head slider S
It is possible to reduce the variation in the distribution from the center side to the outer peripheral side, and to improve CFH (constant flying height). A step portion 20 is formed around each of the side rails 12, 12 and the center rail 13. A negative pressure groove 15 is formed on the bottom surface of the slider body 10 so as to be sandwiched between the side rails 12. The front side of the negative pressure groove 15 is formed so as to widen toward the center, and the rear side is divided into two by the center rail 13 and is formed narrower than the center.

On the surfaces of both side rails 12, 12 and center rail 13, as shown in FIG. 2, Si, Si
First having corrosion resistance through an adhesive layer 61 made of C or the like
Carbon film 62 is provided. The first carbon film 62 preferably contains hydrogen in an amount of 30 atom% or more, and more preferably contains 35 atom% or more. If the hydrogen content in the first carbon film 62 is less than 30 atomic%, the corrosion resistance deteriorates, and the magnetic head core 11 provided on the slider body 10 easily deteriorates due to corrosion. The thickness of the adhesive layer 61 is 0.5n
It is about m. The thickness of the first carbon film 62 is 4.
It is set to about 5 nm.

On each side rail 12, the adhesive layer 61 and the first carbon film 6 are provided near the air flow inflow side 10a.
The protrusion 17 is formed through the line 2. These protrusions 1
As shown in FIG. 2, when the magnetic head slider S is in a flying state, the reference numerals 7 and 17 do not protrude toward the magnetic disk 71 side from the magnetic gap G of the magnetic head core 11. As shown in FIG. 2, each projection 17 is formed by alternately forming an intermediate film 63 and a second carbon film 64 made of Si, SiC or the like (in the drawing, each of the intermediate film 63 and the second carbon film 64 is one layer). It has been done. The intermediate film 63 is provided on the first carbon film 62 side and functions as an etching stopper when forming the protrusion. Each protrusion 1
The second carbon film 64 located on the outermost surface of 7 has abrasion resistance and is composed of a carbon film having a film hardness of 22 GPa or more.

The film hardness here is determined by the following formula (1) by measuring the indentation depth against a load using an indentation hardness tester. The measurement indenter provided in the indentation tester has an opening angle (α) as shown in FIG.
A 65 ° diamond triangular pyramid indenter was used. Note that FIG.
Inside, Ap shows a projection area. Film hardness (H) = P / As≈37.962 × 10 ⁻³ × P / h ² (1) (where P is load, h is indentation depth, As is triangular pyramid indenter for displacement h) The specific surface area of the carbon film is 22 GPa or more.
A carbon film having a hydrogen content of less than 43 atomic% is used,
A carbon film having a hydrogen content of 30 atomic% is preferably used. More preferably, cathodic arc carbon (CAC) having a hydrogen content of 0 atomic% is used.

The protrusion 17 has a circular cross section. The height H of the protrusion 17 is preferably higher than the crown amount R. Here, the height H of the protrusion 17 means the cutout 1
The distance from the bottom surface of 0d to the apex of the protrusion 17, but in this embodiment, the adhesive layer 6 is formed on the surface of the cutout portion 10d.
1. Since the first carbon film 62 is formed, the distance is from the first carbon film 62 on the cutout portion 10d to the apex of the protrusion 17. Further, the crown amount R is the distance from the line connecting the starting end portion and the terminating end portion of the side rail 12 to the highest position of the crown. In the case of this embodiment, the adhesive layer 61, Since the first carbon film 62 is formed, it is the distance from the line connecting the starting and ending portions of the surface of the first carbon film 62 on the side rail 12 to the highest position of the crown. The upper limit of the height H of each protrusion 17 is allowed up to the sum of the flying height of the slider body 10 and the increment of the pitch (distance from the magnetic gap G × pitch angle). The thickness of the intermediate film 62 forming the protrusion 17 is smaller than the thickness of the second carbon film 64 having abrasion resistance.

Each protrusion 17 has a length (L) larger than L / 3 on the side rail 12 from the magnetic gap G.
Is the length of the slider body 10 in the length direction. ) Area. This is advantageous because the protrusions 17 and 17 do not float to the minimum when the magnetic head slider S is levitated, that is, the magnetic gap G can be closer to the magnetic disk 17 than the protrusions 17 and 17.
Further, the protrusion 17 is not formed on the medium facing surface of the slider body 10 on the magnetic disk side, in a region whose length from the magnetic gap G is L / 3 or less. By doing so, it is possible to prevent the protrusion 17 from coming closer to the magnetic disk 71 than the magnetic gap G when the magnetic head slider S is flying. Further, when each side rail 12 is provided with the cutout portion 10d as in the present embodiment, each protrusion 17 is provided on the side rail 12 and at a position close to the cutout portion 10d. Is preferable because it can be improved.

As a specific example of the height H of each protrusion 17, the flying height of the magnetic head slider S is 25 nm, the distance between the protrusion 17 and the magnetic gap G is 300 μm, and the side rail 1 is
When the crown amount R of 2 is 30 nm, the height is larger than 30 nm. A crown is preferably formed on the surface of each such protrusion 17.

Next, the structure of the magnetic head core 11 formed in the center of the rear end of the slider body 10 will be described. The magnetic head core 11 shown in this example is a composite type magnetic head core having a cross-sectional structure shown in FIGS. 3 and 4, and has a rear side end surface (trailing side end surface) of the slider body 10.
In addition, an MR head (reading head) h1 and an inductive head (writing head) h2 are sequentially laminated. The MR head h1 detects magnetic flux leakage from a recording medium such as a disk by utilizing a magnetoresistive effect and reads a magnetic signal. MR as shown in FIG. 3 and FIG.
The head h1 is formed of a non-magnetic material such as alumina (Al ₂ O ₃ ) on the lower shield layer 33 formed of a magnetic alloy such as sendust (Fe-Al-Si) formed at the rear end of the slider body 10. The lower gap layer 34 is provided, and a giant magnetoresistive effect material film (giant magnetoresistive element) 35 is laminated on the lower gap layer 34.

On both sides of the giant magnetoresistive material film 35,
A hard bias layer that gives a bias magnetic field, an electrode layer 41 that gives a detection current, and the like are formed on this film, and an upper gap layer is formed on the electrode layer 41, and an upper shield layer is formed on the upper gap layer. The shield layer is the lower core layer 45 of the inductive head h2 provided on the shield layer.
It is also used as.

In the inductive head h2, the gap layer 44 is formed on the lower core layer 45, and the coil layer 46 patterned so as to have a planar spiral shape is formed on the gap layer 44.
And the coil layer 46 is surrounded by the insulating material layer 47. Upper core layer 48 formed on insulating material layer 47
Is provided such that its tip end 48a faces the lower core layer 45 with a minute gap at the ABS surface 31b, and its base end 48b is magnetically connected to the lower core layer 45. A protective layer 49 made of alumina or the like is provided on the upper core layer 48. In the inductive head h2, a recording current is applied to the coil layer 46,
A recording magnetic field is applied to the core layer from. Then, a magnetic signal can be recorded on a magnetic recording medium such as a magnetic disk by a leakage magnetic field from the tips of the lower core layer 45 and the upper core layer 48 at the magnetic gap G.

The giant magnetoresistive material film 35 is formed by laminating a free ferromagnetic layer, a nonmagnetic layer, a pinned ferromagnetic layer and an antiferromagnetic layer to form a laminated body having a trapezoidal cross section. Each of the free ferromagnetic layer and the pinned ferromagnetic layer is made of a thin film of a ferromagnetic material. Specifically, Ni-Fe alloy, Co-Fe alloy, Ni-Co alloy, Co, Ni-Fe-
It is made of Co alloy or the like. In addition, the free ferromagnetic layer is C
O layer, Ni-Fe alloy layer, or C
Laminated structure of o layer and Ni-Fe alloy layer, or Co-F
It may also be formed of a laminated structure of an e-metal alloy layer and a Ni—Fe alloy layer. When the Co layer and the Ni—Fe alloy layer have a two-layer structure, it is preferable that the thin Co layer is arranged on the nonmagnetic layer side. Also Co-Fe
In the case of a two-layer structure of an alloy layer and a Ni—Fe alloy layer, it is preferable to arrange a thin Co—Fe alloy layer on the nonmagnetic layer side.

In the giant magnetoresistive effect generating mechanism of the structure in which the non-magnetic layer is sandwiched between the free ferromagnetic layer and the pinned ferromagnetic layer, the spin-dependent scattering of conduction electrons at the interface between Co and Cu is caused. And that the free ferromagnetic layer and the pinned ferromagnetic layer are made of the same kind of material may cause factors other than spin-dependent scattering of conduction electrons, rather than being made of different materials. This is due to the low magnetic properties and the higher magnetoresistive effect. For this reason, when the pinned ferromagnetic layer is made of Co, it is preferable that the free ferromagnetic layer has a structure in which the nonmagnetic layer side is replaced with a Co layer with a predetermined thickness. Also, Co
Even if the layers are not separately provided, the non-magnetic layer side of the free ferromagnetic layer is in an alloy state containing a large amount of Co, and the Co concentration gradually decreases toward the non-magnetic layer side. Also good. The free ferromagnetic layer and the pinned ferromagnetic layer are composed of a Co—Fe alloy layer,
Even when the non-magnetic layer is sandwiched between these free ferromagnetic layer and pinned ferromagnetic layer, the effect of spin-dependent scattering of conduction electrons is large at the interface between the Co—Fe alloy layer and the Cu layer, and the spin of conduction electrons is Factors other than dependent scattering are unlikely to occur, and a higher magnetoresistive effect can be obtained. The nonmagnetic layer is made of a nonmagnetic material typified by Cu, Cr, Au, Ag, etc., and is formed to a thickness of about 2 to 4 nm.

The antiferromagnetic layer is preferably made of, for example, an X ₁ -Mn alloy. Here, in the above composition formula, X ₁ is preferably composed of one or more of Ru, Rh, Ir, Pd, and Pt. X ₁ -M above
When X _{1 of the} n alloy is a single metal atom, the preferable range of the content of X ₁ is 10 to 45 atomic% for Ru, 10 to 40 atomic% for Rh, 10 to 40 atomic% for Ir, and Pd. Is 1
0 to 25 atomic% and Pt are 10 to 25 atomic%. In the above description, 10 to 45 atomic% means 10 atomic% or more and 45 atomic% or less, and the upper and lower limits of the numerical range indicated by "to" are all defined as "more than" and "less than". Shall be. The Mn-based alloy having the above composition range has a disordered crystal structure. This disordered crystal structure means a regular crystal structure such as a face-centered tetragonal crystal (fct ordered lattice; CuAuI structure). It means no state. That is, the Mn alloy used here is subjected to a heat treatment at a high temperature for a long time to form a regular crystal structure (CuAuI structure or the like) such as the face-centered tetragonal crystal after being formed by sputtering or the like. The disordered crystal structure means a state in which it is formed by a film forming method such as sputtering, or a state in which it is subjected to a normal annealing treatment.

The above X ₁ -Mn alloy (element X ₁ is Ru, R
It is made of one or more of h, Ir, Pd, and Pt. A more preferable range of the content of _{X 1)} of the _{X 1} is 37 to 63 atomic%. In the above description, 37 to 63 atomic% means 37 atomic% or more and 63 atomic% or less, and the upper and lower limits of the numerical range indicated by "to" are all defined by "greater than or equal to" and "less than or equal to" And The X ₁ -Mn alloy having the above composition range is a face-centered cubic lattice in which the arrangement order of X ₁ and Mn atoms is irregular when formed by a film forming method such as sputtering, and is a boundary with the ferromagnetic layer. Almost no exchange anisotropy magnetic field is generated on the surface, but it is transformed into a face-centered tetragonal lattice by annealing in the magnetic field, and an exchange anisotropy magnetic field with large unidirectional anisotropy at the interface with the ferromagnetic layer. (H _ex ) can be generated.

The antiferromagnetic layer may be made of X ₁ -Mn-X ₂ alloy. Here, in the above composition formula, X ₁ is Ru, Rh, Ir, or P as described above.
It is preferable to be composed of one or more of d and Pt. Further, X ₂ is Au, Ag, Mg, Al, S
i, P, Be, B, C, Se, Ti, V, Cr, Fe,
Co, Ni, Cu, Zn, Ga, Ge, Y, Zn, N
It is preferable that one or more of b, Mo, Hf, Ta, W, Sn, and In be formed. X ₁ and M
The composition ratio of n is X ₁ : Mn = 4: 6 to 6: 4 in atomic%. The content of X ₂ is 0.2 to 10 atomic% in terms of atomic%.

Even when the antiferromagnetic layer is made of an X ₁ -Mn-X ₂ alloy, anneal treatment is performed in a magnetic field after film formation so that unidirectional anisotropy occurs at the interface with the ferromagnetic layer. A large exchange anisotropic magnetic field (H _ex ) can be generated.
If antiferromagnetic layer composed of the above X ₁ -Mn alloy or X ₁ -Mn-X ₂ alloy, exchange anisotropy of unidirectional anisotropy at the interface between the pinned ferromagnetic layer A magnetic field can be applied and the rotation of the magnetization of the pinned ferromagnetic layer with respect to the external signal magnetic field can be pinned. If the antiferromagnetic layer of the above X ₁ -Mn-based alloy is used, Fe
The corrosion resistance is superior to that of -Mn, and the fluctuation of the exchange anisotropic magnetic field (H _ex ) due to temperature change is small. In the MR head h1 configured as described above, the electric resistance of the giant magnetoresistive material film 35 changes depending on the presence or absence of a minute leakage magnetic field from the magnetic disk 71. Therefore, by reading this resistance change, recording on the magnetic disk is performed. You can read the contents.

The magnetic head slider S having the above structure
To manufacture, for example, Al_TwoO _ThreeFrom TiC, etc.
Forming a plurality of magnetic head cores 11 on a plate-shaped body (wafer)
After that, the plate-shaped body is cut into a plurality of substrates. Then,
A piece of the base body 10c obtained by lapping the surface of the base body.
A crown is formed on the surface (the side facing the medium).

After this, as shown in FIG.
After forming the adhesive layer 61 made of Si or SiC by sputtering or CVD on the surface having the crown of 0c (on the surface facing the medium on the magnetic disk side),
ECRCVD method (Electron Cyclotron Resonance Chemi
By changing the type of reaction gas (gas containing carbon) supplied into the film forming apparatus when forming a carbon film by cal vapor deposition, or by adjusting the substrate bias (lowering the substrate bias), The first carbon film 62 is formed. When methane gas is used as the reaction gas, a carbon film having a hydrogen content of 35 atomic% or more can be formed. When ethylene gas is used as the reaction gas, a carbon film having a hydrogen content exceeding 30 atomic% can be formed by the substrate bias. In this way the substrate 1
0c surface (the magnetic disk side medium facing surface) to cover the first
By increasing the hydrogen content in the carbon film 61 to more than 30 atomic%, although the film hardness is reduced, the carbon film becomes amorphous and the density is increased, the adhesion is increased, and the carbon film is hard to peel off.

Then, an intermediate film 63 of Si or SiC is formed on the surface of the first carbon film 61 by the sputtering method or the CVD method. Next, when forming a carbon film on the intermediate film 16 by the ECRCVD method, the type of reaction gas (gas containing carbon) supplied into the film forming apparatus is changed or the substrate bias is adjusted (the substrate bias is increased. The hydrogen content in the carbon film to 3
The second carbon film 64 having a film hardness of 22 GPa or more is formed by reducing it to less than 8 atomic%. By lowering the hydrogen content in the second carbon film in this way, the bonds between carbon atoms are strengthened and the hardness can be increased. When the second carbon film 64 is made of cathodic arc carbon, the substrate 10c on which the adhesive layer 61, the first carbon film 62, and the intermediate film 63 are formed is placed in a film forming apparatus, and a vacuum atmosphere is provided. Film is formed by arc-discharging a lump of graphite therein. Then, after coating the first resist on the second carbon film 64, the resist pattern 22 as shown in FIG. 6B is formed by exposing and developing the first resist. The resist pattern 22 covers the regions where the side rails 12, 12 and the center rail 13 are formed.

After this, as shown in FIG. 6C, the second carbon film 6 in the region not covered with the resist pattern 22 is formed.
4, intermediate film 63, first carbon film 62, adhesive layer 61,
The substrate 10c is sequentially removed by etching by ion milling. As a result, the side rails 12, 12 and the center rail 13 are formed. Further, a negative pressure groove 15 is formed between the side rails 12 and a dividing groove (not shown) is formed for dividing each slider.
After this, the resist pattern 22 is removed. Then the second
After the second resist is applied on the carbon film 64, the second resist is exposed and developed, so that the protrusions 17 are formed at predetermined positions on the side rails 12, 12 as shown in D of FIG. A resist pattern 27 having the above pattern is formed.

After that, the portion of the second carbon film 64 not covered with the resist pattern 27 is etched and removed by oxygen plasma. At this time, the intermediate film 63 below the second carbon film 64 functions as an etching stopper, and as shown in E of FIG.
Only 4 is etched and the intermediate film 63 is not etched. Then, after removing the portion of the intermediate film 63 which is not covered with the resist pattern 27 by etching with CF ₄ plasma, the resist pattern 27 is removed. As shown in F of FIG. 17 is formed. At this time, only the intermediate film 63 is etched and the underlying first carbon film 62 is not etched. The surface of the protrusion 17 formed here may be lapped or the like to form a crown. Then, when the base body 10c is divided along the dividing groove,
A magnetic head slider S as shown in FIGS. 1 and 2 is obtained. The base body 10c shown in FIG. 6 shows a cross section along the lateral direction (cross section along the width direction of the slider body 10).

In the magnetic head slider S constructed as described above, the magnetic head slider S is floated on the magnetic disk 71 by CSS, and magnetic information is written and read as necessary. Therefore, when the magnetic disk 71 is stopped, the magnetic head slider S causes the surface of the side rail 12 on the air flow outflow side 10b of the magnetic disk 7 to move.
The spring plate 83 attached to the slider S on the surface of No. 1
It is stopped by pressing it lightly with the urging force of.

When the magnetic disk 71 starts rotating from this state, an air flow is generated on the surface of the magnetic disk 71, and this air flow comes into the bottom surface side of the slider body 10.
Here, since the lift force is generated at the end of the side rail 12 on the inflow side 10a of the air flow due to the generation of this air flow, when the lift force becomes large enough to overcome the urging force of the spring plate 83, the slider body 10 floats. start. In addition, the air that has passed through the end of the airflow inflow side 10 a of each siderail 12 and has flowed into the bottom surface side of the slider body 10 and the siderail 1
The air that has passed between 2 and 12 flows into the negative pressure groove 15 and a large negative pressure is generated there, so that the slider body 10 lifts the end portion on the air inflow side upward and has a predetermined pitch angle. Incline at.

According to the magnetic head slider S of the first embodiment, since the side rails 12, 12 provided on the medium facing surface of the slider body 10 are formed with crowns, the widths of the side rails 12, 12 are narrow. Since the contact state between the portion (the portion where the width of the side rail near the magnetic gap G is narrow) and the magnetic disk 71 can be changed from planar to linear,
The contact area between the slider body 10 and the magnetic disk 71 can be reduced, and the slider body 10 and the magnetic disk 71 can be reduced.
The effect of reducing the adsorption of and can be improved. Further, by forming the crowns on the side rails 12, 12 as described above, the magnetic gap G can be closer to the magnetic disk than the other portions in the floating state, that is,
This is advantageous because the flying height of the magnetic gap G can be minimized. Further, since no protrusion is provided on each side rail 12 on the air flow outflow side 10b, there is no adverse effect on levitation. Further, a protrusion 17 is provided near each of the side rails 12 on the inflow side 10a of the air flow, and the protrusion 17 is located closer to the magnetic disk 71 than the side rail 12.
By projecting to the side, the wide portion of each side rail 12 does not come into contact with the magnetic disk 71, and each projection 17 comes into contact with the magnetic disk 71, so compared to the case where no projection is provided. Thus, the effect of reducing the attraction between the slider body 10 and the magnetic disk 71 can be improved. That is, when no protrusion is provided near the airflow inflow side 10a of each side rail 12, the airflow inflow side 10a.
The wide part of the side rail 12 and the magnetic disk 71
Even if the contact state with the line is long, adsorption is likely to occur, but if a protrusion is provided near the air flow inflow side 10a of each side rail 12, the contact between each protrusion 17 and the magnetic disk 71 will occur. Since the state can be shortened with a dot shape or a linear shape, the slider body 10 and the magnetic disk 71 can be shortened.
The effect of reducing the adsorption of and is improved.

Further, since the protrusions 17 are provided on the side rails 12 on the air flow inflow side 10a side, the slider bodies 10 are on the air flow inflow side 10a side and on both sides in the width direction. Since the protrusions 17 and 17 are provided, it is possible to avoid tilting of either side of the slider body 10 in the width direction (horizontal direction) and contacting the magnetic disk during flying, and sufficient running floating stability is achieved. Can be stabilized. Therefore, according to the magnetic head slider S of the embodiment, the contact area with the magnetic disk 71 is reduced on both the air flow inflow side 10a and the air flow outflow side 10b of the magnetic head slider to reduce the slider main body 10 when flying.
The effect of reducing the attraction between the magnetic disk 71 and the magnetic disk 71 can be maximized, and a magnetic head slider having excellent characteristics can be provided without adversely affecting the flying.

Further, in the magnetic head slider of the first embodiment, since the second carbon film 64 having abrasion resistance is formed on the outermost surface of each protrusion 17, the magnetic disk 71 is formed.
When the protrusions 17 slide on the magnetic disk 71 at the time of starting and stopping, the abrasion of the protrusions 71 can be remarkably improved, and the surface of each side rail 12 has corrosion resistance. Since the magnetic head core 1 provided on the slider body 10 is covered with the first carbon film 62,
1 can be prevented from deteriorating due to corrosion. Further, since the abrasion resistance of the protrusion 17 is remarkably improved as described above, it is possible to prevent the contact area between the slider body 10 and the magnetic disk 71 from increasing, and the slider body 10 and the magnetic disk 71 are prevented from increasing.
Magnetic head core 1 due to the increased attraction force with
It is also possible to prevent the magnetic head element and the recording layer of the magnetic disk, which are provided in 1, from being damaged when the magnetic disk is started to rotate.

In the above embodiment, the case where the protrusion 17 is provided on the air flow inflow side 10a of each side rail 12 has been described, but as shown by the broken line in FIG. Protrusions 17 may be provided on both sides of the inflow side 10a of the air flow, or protrusions 17 may be provided on the inflow side 10a of the airflow of each side rail 12, and the inflow side 10a of the airflow of the negative pressure groove 15 may be further provided. The protrusions 17 may be provided on both sides. When the protrusion 17 is provided in the groove 15 as described above, the height H of the protrusion 17 is
It is the distance from the bottom surface of the groove 15 to the apex of the protrusion 17. In the above embodiment, the slider body 1
Although the case where the side rails 12 and 12 and the center rail 13 are provided on the medium facing surface of No. 0 has been described, a pad may be provided on the medium facing surface of the slider body 10 or on the rail. Further, in the above embodiment, the case where the notch 10d is provided in each side rail 12 has been described, but the notch 10 as shown by the broken line in FIG.
d may not be provided. When the protrusion 17 is provided on the side rail 12 that does not have the cutout portion 10 d as described above, the height H of the protrusion 17 is the distance from the surface of the side rail 12 to the apex of the protrusion 17.

In the above embodiment, the case where the first carbon film 62 is formed on the surfaces of the side rails 12, 12 and the center rail 13 via the adhesive layer 61 has been described. The first carbon film 62 having corrosion resistance may be formed on the medium facing surface other than the rail forming portion or on the pad provided on the medium facing surface via the adhesive layer 61. In that case, The effect of preventing corrosion of the magnetic head core 11 can be further improved. Further, in the above embodiment, the case where the intermediate film 63 and the second carbon film 64 forming the protrusion 17 are provided one by one has been described, but the protrusion 17 includes the intermediate film 63 and the second carbon film 64. May be composed of a multilayer film (a laminated film composed of four or more layers) alternately laminated, in which case, at least the second carbon film 6 located at the outermost layer.
4 may have abrasion resistance. Further, in the above-described embodiment, the case where one protrusion is provided on each side rail 12 has been described, but the present invention is not limited to this, and the distance from the magnetic gap G is longer than L / 3 (L is L , The length of the slider body 10 in the longitudinal direction.)
A plurality of protrusions may be provided on each of the side rails 12 as long as it is in the area.

(Second Embodiment) FIG. 7 is a sectional view showing a flying state of a magnetic head slider according to a second embodiment of the present invention. The magnetic head slider S2 of the second embodiment shown in FIG. 7 differs from the magnetic head slider S of the first embodiment shown in FIG. 2 in that a protrusion 67 is formed on each side rail 12 via an adhesive layer 61. The point is that each protrusion 67 is formed of a carbon film having a film hardness of 22 GPa or more. The protrusion 67 is provided on the side rails 12 near the inflow side 10a of the air flow, as in the first embodiment, and has a length greater than L / 3 from the magnetic gap G (L is the slider body 10). It is the length in the length direction).

According to the magnetic head slider of the second embodiment, by setting the hardness of the protrusion 67 to be 22 GPa or more, the abrasion resistance of the protrusion 67 can be remarkably improved, and the magnetic disk can be started and stopped. At times, even if the protrusion slides on the magnetic disk, it is less likely to wear, and it is possible to prevent the contact area between the slider body 10 and the magnetic disk 71 from increasing.
It is possible to prevent the attraction force between the slider body 10 and the magnetic disk 71 from increasing.

[0054]

Example 1 (Experimental Example 1) In manufacturing a magnetic head slider having the shape shown in FIGS. 1 and 2, the materials for forming the second carbon film 64 on the outermost surface of each protrusion 17 are the following A and B. ,
The film hardness and wear resistance of the protrusions when changed to C and D were examined. The results are shown in FIGS. 8 and 9. The magnetic head slider manufactured here is a rectangular slider body 1
0 long side length 1.2 mm, width 1.0 mm, negative pressure groove 1
5, the width of the end portion of the air flow on the inflow side is 0.12 mm, the maximum width is 0.36 mm, the depth is 2.5 μm, the maximum width of each side rail 12 is 0.34 mm, the minimum width is 0.06 mm, and the Si adhesive layer 61 is Thickness 0.5 nm, thickness of first carbon film 4.5
nm, the diameter of each protrusion 17 is 30 mm, and the height of each protrusion 17 is 3
5 nm, the thickness of the Si intermediate film 63 forming each protrusion is 4 n
m, the thickness of the second carbon film was 31 nm, and the distance between the protrusion 17 and the magnetic gap G was set to 900 μm. Also,
The slider body 10 was installed so that the flying height during flying was 25 nm and the pitch angle was 100 μRad.

The above material A is A in the step shown in FIG.
The Si adhesive layer 6 is formed on the substrate 10c made of l ₂ O ₃ TiC.
1. When forming a carbon film by the ECRCVD method on the Si intermediate film 63 formed via the first carbon film 62, methane gas is used as a reaction gas supplied into the film forming apparatus, and the substrate bias is set to 110 W. The hydrogen concentration in the film is 38 atomic%. The material B was produced in the same manner as the material A except that ethylene gas was used as a reaction gas supplied into the film forming apparatus and the substrate bias was 200 W.
The hydrogen concentration in the film is 28 atomic%. Material C
Is the above material B except that the substrate bias is 400 W.
Was prepared in the same manner as above, and the hydrogen concentration in the film was 2
It is 6 atomic%. The material D is cathodic arc carbon, and the hydrogen concentration in the film is almost 0 atomic%. Further, the wear resistance was examined by measuring the height of the protrusion after the usual CSS 50,000 times. In FIG. 9, the amount of abrasion of the protrusion on the vertical axis is the difference between the height of the protrusion before CSS and the height of the protrusion after 50,000 times CSS.

From the results shown in FIG. 8, the film hardness of the protrusion having the carbon film made of the material A on the outermost surface is distributed in the range of about 20 GPa to about 22 GPa, and the average value is 21 Gpa.
The hardness of the protrusions having a carbon film made of the material B on the outermost surface is distributed in the range of about 20 GPa to about 24 GPa, and the average value is about 22 GPa.
The film hardness of the protrusions having the carbon film made of the material C on the outermost surface is distributed in the range of about 23.6 GPa to 25.8 GPa, the average value is around 24.2 GPa, and the carbon made of the material D on the outermost surface. The film hardness of the protrusions having a film is distributed in the range of about 28 GPa to 29.4 GPa,
It can be seen that the average value is around 28.7 GPa.

From the results shown in FIG. 9, the film hardness is about 21 GP.
The protrusion having the carbon film made of the material A of a on the outermost surface has a large wear amount of 7 nm or more. On the other hand, the protrusion having the carbon film made of the material B having the film hardness of about 22 GPa on the outermost surface has a thickness of 5 nm or less, which shows that the abrasion resistance is superior to that of the material A. Furthermore, the film hardness is about 2
The protrusion having a carbon film made of the material C of 4.2 GPa on the outermost surface has a carbon film made of the material D having an average wear amount of about 3.5 nm and a film hardness of 28.7 GPa on the outermost surface. The average amount of wear is about 1.8 nm,
It can be seen that the wear resistance is better. From the results shown in FIG. 9, when the amount of wear of the protrusions is 5 nm or less, which is a range in which there is no practical problem (small adsorption torque), the film hardness is 22 GP
Since it is composed of a material of a or more, it can be confirmed that it is effective to form at least the outermost surface carbon film of the protrusion provided on the rail formed on the slider body from a carbon film having a film hardness of 22 GPa or more. .

(Experimental Example 2) The second carbon film 64 constituting each protrusion 17 is made of the above material B, and the hydrogen content in the first carbon film 62 formed on each side rail 12 is shown in the table below. Experimental Example 1 above, except that the range was changed to that shown in 1
A magnetic head slider S similar to the one manufactured in 1. was manufactured, and the amount of the lubricant adhered was examined. The adhesion amount of the lubricant here was examined by measuring the adhesion amount after the usual CSS 50,000 times. As the lubricant here, perfluoropolyether was used. The results are shown in Table 1. Table 1
In the column of the amount of lubricant adhered, ○ indicates that no lubricant adhered, × indicates that lubricant adhered,
In the column of abrasion resistance, ⊚ indicates that the protrusions were scarcely worn, and the amount of abrasion was less than the wear amount measurement limit, ○ indicates that the amount of abrasion of the protrusions was as small as 5 nm or less, and × indicates The amount of wear is as large as 5 to 10 nm.

[0059]

[Table 1]

From the results shown in Table 1, with respect to the lubricant adhesion, the samples Nos. 1 to 3 having a hydrogen concentration (hydrogen content) in the carbon film of 35 atomic% or more showed no lubricant adhesion. It turns out that it is good. In addition, the sample N whose hydrogen concentration (hydrogen content) in the carbon film is less than 30 atomic%
o. Nos. 4 to 6 have a small amount of abrasion of the protrusions and can have good abrasion resistance, but it is understood that the lubricant adheres. From the above, it can be seen that a hydrogen concentration of 35 atomic% or more is preferable for the lubricant adhesion, and a hydrogen concentration of 30 atomic% or less is preferable for the wear resistance.

[0061]

As described above, according to the magnetic head slider of the present invention, with the above-mentioned structure, the air flow inflow side (leading side) and the air flow outflow side (leading side) of the magnetic head slider during flying ( Both the trailing side) can reduce the contact area with the magnetic disk to maximize the effect of reducing the adsorption between the slider body and the magnetic disk, and without adversely affecting the levitation. A magnetic head slider having excellent characteristics can be provided.

[Brief description of drawings]

FIG. 1 is a bottom view showing a first embodiment of a magnetic head slider according to the invention.

FIG. 2 is a sectional view showing the magnetic head slider of FIG. 1 in a floating state.

FIG. 3 is a cross-sectional view showing an example of a magnetic head core portion provided in the magnetic head slider according to the present invention.

FIG. 4 is a partial cross-sectional view showing an example of a magnetic head core portion provided in the magnetic head slider according to the present invention.

FIG. 5 is a view showing the shape of an indenter used for measuring the film hardness of a second carbon film.

6A to 6C are views showing a method of manufacturing the magnetic head slider of FIGS.

FIG. 7 is a cross-sectional view showing a magnetic head slider according to a second embodiment of the invention in a floating state.

FIG. 8 is a diagram showing measured values of film hardness of a material forming a carbon film on the outermost surface of protrusions of a magnetic head slider.

FIG. 9 is a diagram showing the material forming the carbon film on the outermost surface of the protrusion of the magnetic head slider and the amount of abrasion of the protrusion.

FIG. 10 is a diagram showing a positional relationship between a conventional magnetic head slider and a magnetic disk.

FIG. 11 is a side view showing an example of a conventional magnetic head slider in a flying traveling state.

FIG. 12 is a side view showing another example of a conventional magnetic head slider in a flying traveling state.

FIG. 13 is a side view showing another example of the conventional magnetic head slider in a flying traveling state.

[Explanation of symbols]

S, S2 ... Magnetic head slider, 10 ... Slider body, 10a ... Airflow inflow side, 10b ... Airflow outflow side, 10d ... Notch, 11 ... Magnetic field Head core,
12 ... Side rails, 13 ... Center rails, 15 ...
Negative pressure groove, 17, 67 ... Protrusion, 35 ... Giant magnetoresistive effect material film (giant magnetoresistive element), 61 ... Adhesive layer, 62 ... First carbon film, 63 ... Intermediate film, 64 ...
Second carbon film, 71 ... Magnetic disk, G ... Magnetic gap, L ... Length, R ... Crown amount, H ... Height.

Claims (8)

[Claims] 1. A magnetic head core is provided in a plate-shaped slider body, and a rail and / or a pad for generating buoyancy is formed on a medium facing surface of the slider body on the magnetic disk side, and the rail is floated on the magnetic disk. A magnetic head slider that runs to write or read magnetic information, wherein a crown is formed on at least a rail of a medium facing surface of the slider body, a rail, and a pad, and the rail comprises:
The slider body has side rails formed on both edges of the magnetic disk side medium facing surface and extending from the air flow inflow side to the air flow outflow side of the slider body. One or more protrusions are provided on both sides of the side rail near the inflow side of the air flow, and the protrusions project toward the magnetic disk side from the side rails.
A magnetic head slider, wherein each side rail is provided with a cutout portion forming a discontinuous surface of a crown. 2. The side formed on both edges of the medium facing surface of the slider body on the magnetic disk side of the slider body and extending from the air flow inflow side to the air flow outflow side of the slider body. The magnetic head slider according to claim 1, further comprising a rail and a center rail and / or a pad formed between both side rails. 3. The magnetic head slider according to claim 1, wherein the side rail has a width on an inflow side of the air flow larger than a width on an outflow side of the air flow. 4. The magnetic device according to claim 1, wherein the protrusion does not protrude toward a magnetic disk side from a magnetic gap of the magnetic head core when the magnetic head slider is in a floating state. Head slider. 5. A protrusion is not provided in a region of the slider body facing the magnetic disk on the side of the magnetic disk where the distance from the magnetic gap of the magnetic head core is ⅓ or less of the length of the slider body. 5. The method according to claim 1, wherein
5. The magnetic head slider according to any one of 1. 6. The protrusion is provided only in a region of the slider body facing the magnetic disk on the side of the magnetic disk, where the distance from the magnetic gap of the magnetic head core is greater than 1/3 of the length of the slider body. 6. The magnetic head slider according to claim 1, wherein the magnetic head slider is a magnetic head slider. 7. The magnetic head slider according to claim 1, wherein the protrusion is made of a carbon film having a film hardness of 22 GPa or more. 8. The magnetic head slider according to claim 1, wherein the magnetic head core is provided with a giant magnetoresistive effect element.