JP2003262518A - Self-calibrating angle detector - Google Patents

Self-calibrating angle detector

Info

Publication number
JP2003262518A
JP2003262518A JP2002065830A JP2002065830A JP2003262518A JP 2003262518 A JP2003262518 A JP 2003262518A JP 2002065830 A JP2002065830 A JP 2002065830A JP 2002065830 A JP2002065830 A JP 2002065830A JP 2003262518 A JP2003262518 A JP 2003262518A
Authority
JP
Japan
Prior art keywords
angle data
angle
self
nth
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002065830A
Other languages
Japanese (ja)
Other versions
JP4090016B2 (en
Inventor
Makoto Kajitani
誠 梶谷
Tadashi Masuda
正 益田
Takaomi Kojima
隆臣 小島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tamagawa Seiki Co Ltd
Original Assignee
Tamagawa Seiki Co Ltd
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Filing date
Publication date
Application filed by Tamagawa Seiki Co Ltd filed Critical Tamagawa Seiki Co Ltd
Priority to JP2002065830A priority Critical patent/JP4090016B2/en
Publication of JP2003262518A publication Critical patent/JP2003262518A/en
Application granted granted Critical
Publication of JP4090016B2 publication Critical patent/JP4090016B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

<P>PROBLEM TO BE SOLVED: To provide an angle detector that can detect angles with high accuracy over many years by self-calibrating angle data in a state where the detector is attached to a machine or device, such as the rotating machine, etc. <P>SOLUTION: This self-calibrating angle detector which detects the rotational angle of a disk by means of a detection head finds an N-nary error component by using angle data detected by means of an N-nary error component detecting head installed in a position which is separated from the 0°-position in which the detection head is installed by (360/2N)° and self-calibrates the angle data by subtracting the N-nary error component from the angle data detected by means of the N-nary error component detecting head. <P>COPYRIGHT: (C)2003,JPO

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、角度検出器に関
し、特に、自己校正機能を備えることにより、回転機等
の機械装置から取り外すことなく長年にわたって高精度
な角度検出性能を維持できるようにするための新規な改
良に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an angle detector, and more particularly, by providing a self-calibration function, it is possible to maintain highly accurate angle detection performance for many years without removing it from a mechanical device such as a rotating machine. For new improvements for.

【0002】[0002]

【従来の技術】従来、周知の角度検出器においては、定
期的に回転機等の機械装置から取り外し、製造元へ送付
して校正装置で精度誤差を測定し、必要に応じて再調整
等を行っていた。
2. Description of the Related Art Conventionally, in a known angle detector, it is periodically removed from a mechanical device such as a rotating machine, sent to a manufacturer, an accuracy error is measured by a calibration device, and readjustment is performed if necessary. Was there.

【0003】[0003]

【発明が解決しようとする課題】従来の装置は以上のよ
うに構成されていたため、次のような課題が存在してい
た。すなわち、定期的に取り外して再調整を要するた
め、取り外すことなく長年にわたって高精度な角度検出
性能を維持することはできなかった。
Since the conventional device is constructed as described above, the following problems exist. That is, since it is periodically removed and readjustment is required, it is not possible to maintain the highly accurate angle detection performance for many years without removing it.

【0004】本発明は、以上のような課題を解決するた
めになされたもので、特に、回転機等の機械装置に取り
付けたままで、自己校正することにより長年にわたって
高精度な角度検出を可能とする角度検出器を提供するこ
とを目的とする。
The present invention has been made to solve the above problems, and in particular, it is possible to perform highly accurate angle detection for many years by performing self-calibration while being attached to a mechanical device such as a rotating machine. It is an object of the present invention to provide an angle detector that operates.

【0005】[0005]

【課題を解決するための手段】本発明の自己校正型角度
検出器は、角度データ検出用ヘッドでディスクの回転角
度を検出する角度検出器において、前記角度データ検出
用ヘッドが設置されている0°位置に対して(360/
2N)°回転させた位置に設置したN次誤差成分検出用
ヘッドで検出した角度データを用いてN次誤差成分を求
め、このN次誤差成分を前記角度データ検出用ヘッドで
検出された角度データから減算することにより前記角度
データを自己校正する構成である。
A self-calibrating angle detector of the present invention is an angle detector for detecting a rotation angle of a disk by an angle data detecting head, wherein the angle data detecting head is installed. ° Position (360 /
2N) The Nth-order error component is obtained by using the angle data detected by the Nth-order error component detection head installed at the position rotated, and this Nth-order error component is detected by the angle data detection head. The angle data is self-calibrated by subtracting from.

【0006】また、前記N次誤差成分と角度値により構
成されるテーブルを格納した記憶手段を備え、前記記憶
手段に格納されたテーブルを定期的に参照して前記角度
データを自己校正する構成である。
In addition, a storage means for storing a table constituted by the Nth-order error component and the angle value is provided, and the angle data is self-calibrated by periodically referring to the table stored in the storage means. is there.

【0007】また、N次誤差成分検出用ヘッドの位置を
A°=360/(2×N)、A°位置のN次誤差成分検出
用ヘッドで検出される角度データに含まれる精度誤差
(全次数誤差合計)をGS(A°)、 (x)°の左項にある
誤差特性を指定の角度x°シフトさせることを(x)°シ
フトとそれぞれ表した場合に、前記N次誤差GNは、N
=1の場合は、G1=(GS(0°)−GS(180°))/
2で表され、Nが2以上の場合は、GN={(GS(0
°)−GS(360/(2×N)°))+(GS(0°)−GS
(360/(2×N)°))(360/N)シフト+(GS(0
°)−GS(360/(2×N)°))(360/N×2)°シ
フト+・・・+(GS(0°)−GS(360/(2×N)
°))(360/N×K)°シフト}×(−1/2)×(1/
N)(ただし、K<N)で表される構成である。
Further, the position of the Nth-order error component detecting head is A ° = 360 / (2 × N), and the precision error included in the angle data detected by the Nth-order error component detecting head at the A ° position.
When (total order error sum) is expressed as GS (A °), and shifting the error characteristic in the left term of (x) ° by a specified angle x ° is expressed as (x) ° shift, the Nth-order error is GN is N
When = 1, G1 = (GS (0 °) −GS (180 °)) /
2 and N is 2 or more, GN = {(GS (0
°) -GS (360 / (2 × N) °)) + (GS (0 °) -GS
(360 / (2 × N) °)) (360 / N) shift + (GS (0
°) -GS (360 / (2 × N) °)) (360 / N × 2) ° shift + ... + (GS (0 °) -GS (360 / (2 × N)
°)) (360 / N × K) ° shift} × (−1/2) × (1 /
N) (where K <N).

【0008】また、前記いずれか記載のN次誤差成分検
出用ヘッドのうちのいずれかで検出される角度データを
前記角度データ検出用ヘッドまたは他のN次誤差成分検
出用ヘッドで得られた角度データを用いて校正すると共
に、校正後の複数の角度データを平均化して得られる平
均角度データを出力する構成である。
Further, the angle data detected by any of the Nth order error component detecting heads described above is obtained by the angle data detecting head or another Nth order error component detecting head. The calibration is performed using the data, and the average angle data obtained by averaging the plurality of calibrated angle data is output.

【0009】[0009]

【発明の実施の形態】以下、図面と共に本発明による自
己校正型角度検出器の好適な実施の形態について詳細に
説明する。
BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of the self-calibrating angle detector according to the present invention will be described in detail below with reference to the drawings.

【0010】図1に示すように、本発明の角度検出器
は、エンコーダの回転位置検出用のディスク1の回転位
置を検出するためのLED及び受光素子からなる角度デ
ータ検出用ヘッド2の他に、1次誤差検出用ヘッド3、
2次誤差検出用ヘッド4、4次誤差検出用ヘッド5及び
8次誤差検出用ヘッド6を備える。
As shown in FIG. 1, the angle detector of the present invention includes an angle data detecting head 2 including an LED and a light receiving element for detecting the rotational position of a disk 1 for detecting the rotational position of an encoder. Primary error detection head 3,
A secondary error detecting head 4, a fourth error detecting head 5, and an eighth error detecting head 6 are provided.

【0011】前記1次誤差検出用ヘッド3、2次誤差検
出用ヘッド4、4次誤差検出用ヘッド5及び8次誤差検
出用ヘッド6は、角度データ検出用ヘッド2と同様にエ
ンコーダ本体(図示せず)側に取り付けられており、構
成も角度データ検出用ヘッド2と同一である。各誤差検
出用ヘッドは、ディスク1の中心を軸として角度データ
検出用ヘッド2に対して、180°、90°、45°及
び22.5°時計方向にそれぞれ回転させた位置に配設
されている。なお、以下では、角度データ検出用ヘッド
2の位置を0°位置、各誤差検出用ヘッド3〜6の位置
を180°位置、90°位置、45°位置及び22.5
°位置と称する。
The first-order error detecting head 3, the second-order error detecting head 4, the fourth-order error detecting head 5 and the eighth-order error detecting head 6 are the same as the angle data detecting head 2 in the encoder body (see FIG. It is attached to the (not shown) side, and the configuration is the same as the angle data detecting head 2. Each error detecting head is arranged at a position rotated clockwise by 180 °, 90 °, 45 ° and 22.5 ° with respect to the angle data detecting head 2 about the center of the disk 1. There is. In the following, the position of the angle data detecting head 2 is 0 °, and the positions of the error detecting heads 3 to 6 are 180 °, 90 °, 45 ° and 22.5.
° position.

【0012】図2(a)は、角度データ検出用ヘッド2
によって検出される角度データを示す特性図である。こ
の図2(a)に示すように、角度データ検出用ヘッド2
による角度データは、1次高調波成分、2次高調波成
分、4次高調波成分等のn次(nは整数)の高次誤差成
分が含まれる。各高調波成分を図2(b)〜図2(e)
に示す。
FIG. 2A shows a head 2 for detecting angle data.
It is a characteristic view which shows the angle data detected by. As shown in FIG. 2A, the angle data detecting head 2
The angle data according to (3) includes n-th (n is an integer) high-order error component such as a first-order harmonic component, a second-order harmonic component, and a fourth-order harmonic component. Each harmonic component is shown in FIG. 2 (b) to FIG. 2 (e).
Shown in.

【0013】本発明の角度検出器では、検出される角度
データに含まれる誤差を消去するために以下のような処
理をする。説明の便宜上、まず2次高調波成分を消去す
る場合について説明する。90°位置にある2次誤差検
出用ヘッド4の角度データから0°位置にある角度デー
タ検出用ヘッド2の角度データを引くことによって得ら
れる第1位置誤差特性(図3(a))を求める。
The angle detector of the present invention performs the following processing in order to eliminate the error contained in the detected angle data. For convenience of description, first, the case of eliminating the second harmonic component will be described. A first position error characteristic (FIG. 3A) obtained by subtracting the angle data of the angle data detecting head 2 at the 0 ° position from the angle data of the secondary error detecting head 4 at the 90 ° position is obtained. .

【0014】次に、図3(a)に示す第1位置誤差特性
の位相とは180°位相の異なる第2位置誤差特性を求
める。この第2位置誤差特性を図3(b)に示す。そし
て、図3(a)及び図3(b)に示す第1位置誤差特性
及び第2位置誤差特性を足し合わせると、図3(c)に
示す2次誤差成分が得られる。図3(c)に示す2次誤
差成分は、ゲインが4倍になっているため、1/4倍し
たものを角度データ検出用ヘッド2で検出された角度デ
ータから除去すれば、2次誤差成分を除去した角度デー
タが得られる。
Next, a second position error characteristic having a phase difference of 180 ° from the phase of the first position error characteristic shown in FIG. 3A is obtained. This second position error characteristic is shown in FIG. Then, by adding the first position error characteristic and the second position error characteristic shown in FIGS. 3A and 3B, the secondary error component shown in FIG. 3C is obtained. Since the gain of the secondary error component shown in FIG. 3C is 4 times, if the 1/4 times gain is removed from the angle data detected by the angle data detecting head 2, the secondary error component is removed. Angle data with components removed is obtained.

【0015】同様にして各高次誤差成分を求める。1次
誤差を求める場合は、1次誤差検出用ヘッド3を用い、
図3(c)に示すものと同様にゲインが2倍になった1
次誤差成分が求まるので、このゲインを1/2倍したも
のを角度データ検出用ヘッド2で検出された角度データ
から除去すれば、1次誤差成分を除去した角度データが
得られる。また、4次誤差検出用ヘッド5を用いれば、
図3(c)に示すものと同様にゲインが8倍になった4
次誤差成分が求まるので、このゲインを1/8倍したも
のを角度データ検出用ヘッド2で検出された角度データ
から除去すれば、4次誤差成分を除去した角度データが
得られる。さらに、8次誤差検出用ヘッド6を用いれ
ば、図3(c)に示すものと同様にゲインが16倍にな
った8次誤差成分が求まるので、このゲインを1/16
倍したものを角度データ検出用ヘッド2で検出された角
度データから除去すれば、8次誤差成分を除去した角度
データが得られる。
Similarly, each higher-order error component is obtained. When obtaining the primary error, the primary error detection head 3 is used,
As in the case shown in FIG. 3C, the gain is doubled 1
Since the next-order error component is obtained, if this gain of 1/2 is removed from the angle data detected by the angle-data detecting head 2, the first-order error component is removed to obtain the angle data. Further, if the fourth-order error detection head 5 is used,
Gain increased by a factor of 8 similar to that shown in FIG.
Since the next-order error component is obtained, if this gain of 1/8 is removed from the angle data detected by the angle-data detecting head 2, the fourth-order error component-free angle data is obtained. Further, if the 8th-order error detection head 6 is used, an 8th-order error component having a gain 16 times larger than that shown in FIG. 3C can be obtained.
If the multiplied data is removed from the angle data detected by the angle data detection head 2, the angle data from which the 8th order error component is removed can be obtained.

【0016】ここで、Nは誤差の次数(N次成分)を指
す。A°はヘッド位置A°=360/(2×N)を表す。
GS(A°)はA°位置のヘッドで検出される角度データ
に含まれる精度誤差(全次数誤差合計)を表す。G1、G
2、・・・、GNは1次、2次、・・・、N次誤差成分
を意味する。(x)°シフトは(x)°の左項にある誤差特
性を指定の角度x°シフトさせることを意味する。
Here, N indicates the order of the error (Nth order component). A ° represents the head position A ° = 360 / (2 × N).
GS (A °) represents an accuracy error (total error of all orders) included in angle data detected by the head at the A ° position. G1, G
2, ..., GN mean first-order, second-order, ..., N-order error components. (x) ° shift means to shift the error characteristic in the left term of (x) ° by a specified angle x °.

【0017】これらの表記方法の下、0度位置の角度デ
ータ検出用ヘッド2から検出される精度誤差は、 GS(0°)=G1+G2+G3+・・・・・+GN と表現される。また、G1、G2、・・・、GNの誤差
は以下の数式で表現される。 G1=(GS(0°)−GS(180°))/2 G2={(GS(0°)−GS(90°))+(GS(0°)−
GS(90°))180°シフト}×(−1/2)×(1/
2) G3={(GS(0°)−GS(60°))+(GS(0°)−
GS(60°))120°シフト+(GS(0°)−GS(6
0°))240°シフト}×(−1/2)×(1/3) G4={(GS(0°)−GS(45°))+(GS(0°)−
GS(45°))90°シフト+(GS(0°)−GS(45
°))180°シフト+(GS(0°)−GS(45°))27
0°シフト}×(−1/2)×(1/4)
Under these notation methods, the accuracy error detected from the angle data detecting head 2 at the 0 degree position is expressed as GS (0 °) = G1 + G2 + G3 + ... + GN. Further, the error of G1, G2, ..., GN is expressed by the following mathematical formula. G1 = (GS (0 °) −GS (180 °)) / 2 G2 = {(GS (0 °) −GS (90 °)) + (GS (0 °) −
GS (90 °)) 180 ° shift} × (−1/2) × (1 /
2) G3 = {(GS (0 °) -GS (60 °)) + (GS (0 °)-
GS (60 °)) 120 ° shift + (GS (0 °) -GS (6
0 °)) 240 ° shift} × (−1/2) × (1/3) G4 = {(GS (0 °) −GS (45 °)) + (GS (0 °) −
GS (45 °)) 90 ° shift + (GS (0 °) -GS (45
°)) 180 ° shift + (GS (0 °) -GS (45 °)) 27
0 ° shift} x (-1/2) x (1/4)

【0018】Nが2以上の場合の一般式は、 GN={(GS(0°)−GS(360/(2×N)°))+
(GS(0°)−GS(360/(2×N)°))(360/N)
シフト+(GS(0°)−GS(360/(2×N)°))(3
60/N×2)°シフト+・・・+(GS(0°)−GS
(360/(2×N)°))(360/N×K)°シフト}×
(−1/2)×(1/N) ただし、K<Nとなる。
When N is 2 or more, the general formula is: GN = {(GS (0 °) -GS (360 / (2 × N) °)) +
(GS (0 °) -GS (360 / (2 × N) °)) (360 / N)
Shift + (GS (0 °) −GS (360 / (2 × N) °)) (3
60 / N × 2) ° shift + ・ ・ ・ + (GS (0 °) -GS
(360 / (2 × N) °)) (360 / N × K) ° shift} ×
(−1/2) × (1 / N) However, K <N.

【0019】以上のようにして各高次成分の誤差を求
め、これを角度データ検出用ヘッド2によって検出され
た角度データから減算すれば、角度検出器の角度データ
に含まれる誤差を小さく抑えることができ、この結果、
角度検出精度の高い角度検出器を提供することができ
る。なお、以上の誤差校正は、図4に示すブロックで行
われるものであり、記憶手段である各ROMには校正値
と角度値で構成されるテーブルが格納されている。従っ
て、各ROMに記憶されたテーブルを参照して定期的
(例えば一月に一回等の期間をおいて)かつ自動的に誤
差構成を行うことにより、高精度な角度データ(位置デ
ータ)を出力することができる。
By obtaining the error of each higher-order component as described above and subtracting it from the angle data detected by the angle data detecting head 2, the error contained in the angle data of the angle detector can be kept small. And as a result,
It is possible to provide an angle detector with high angle detection accuracy. Note that the above error calibration is performed in the block shown in FIG. 4, and each ROM serving as a storage unit stores a table composed of calibration values and angle values. Therefore, highly accurate angle data (position data) can be obtained by referring to the table stored in each ROM and performing error configuration periodically (for example, once a month) automatically. Can be output.

【0020】また、以上の説明では、基準ヘッドである
角度データ検出用ヘッド2で検出される角度データを校
正するために、1次誤差検出用ヘッド3、2次誤差検出
用ヘッド4、4次誤差検出用ヘッド5及び8次誤差検出
用ヘッド6を用いる場合について説明したが、これらの
ヘッド2〜6は全て同じ構成であるため、基準ヘッドを
順次1次誤差検出用ヘッド3、2次誤差検出用ヘッド
4、4次誤差検出用ヘッド5及び8次誤差検出用ヘッド
6として同様に角度データを校正し、各ヘッド2〜6を
基準ヘッドとした場合の角度データを平均化してもよ
い。
Further, in the above description, in order to calibrate the angle data detected by the angle data detecting head 2 which is the reference head, the primary error detecting head 3, the secondary error detecting head 4, and the quaternary error detecting head 4 are used. Although the case where the error detection head 5 and the 8th-order error detection head 6 are used has been described, since the heads 2 to 6 have the same configuration, the reference heads are sequentially arranged to the primary error detection head 3 and the secondary error detection head. The angle data may be similarly calibrated for the detection head 4, the 4th-order error detection head 5, and the 8th-order error detection head 6, and the angle data when the heads 2 to 6 are used as reference heads may be averaged.

【0021】このとき、各基準ヘッドが設置されている
位置に対して(360/2N)°回転させた位置に存在
するN次誤差成分検出用ヘッドのみを用いることによ
り、そのN次誤差成分検出用ヘッドによって得られる次
数の誤差成分のみを基準ヘッドで検出される角度データ
から除去するようにしてもよいし、N次誤差成分検出用
ヘッドを適宜補い、各ヘッドで検出した角度データを用
いてN次誤差成分を求めて角度データを校正するように
してもよい。このように基準ヘッドを複数設ければ、最
終的に得られる平均化された角度データは非常に高精度
なものになる。
At this time, by using only the Nth-order error component detecting head existing at the position rotated by (360 / 2N) ° with respect to the position where each reference head is installed, the Nth-order error component detection is performed. It is possible to remove only the error component of the order obtained by the reference head from the angle data detected by the reference head, or supplement the N-th order error component detection head appropriately and use the angle data detected by each head. The angle data may be calibrated by obtaining the Nth-order error component. If a plurality of reference heads are provided in this way, the averaged angle data finally obtained will be of extremely high accuracy.

【0022】[0022]

【発明の効果】本発明の自己校正型角度検出器は、角度
データ検出用ヘッドでディスクの回転角度を検出する角
度検出器において、前記角度データ検出用ヘッドが設置
されている0°位置に対して(360/2N)°回転さ
せた位置に設置したN次誤差成分検出用ヘッドで検出し
た角度データを用いてN次誤差成分を求め、このN次誤
差成分を前記角度データ検出用ヘッドで検出された角度
データから減算することにより前記角度データを自己校
正するので、角度検出器の角度データに含まれる誤差を
小さく抑えることができ、この結果、角度検出精度の高
い角度検出器を提供することができる。
According to the self-calibration type angle detector of the present invention, in the angle detector for detecting the rotation angle of the disk by the angle data detecting head, with respect to the 0 ° position where the angle data detecting head is installed. (360 / 2N) ° rotated, the Nth-order error component is obtained using the angle data detected by the Nth-order error component detection head, and the Nth-order error component is detected by the angle data detection head. Since the angle data is self-calibrated by subtracting it from the obtained angle data, an error included in the angle data of the angle detector can be suppressed to a small value, and as a result, an angle detector with high angle detection accuracy can be provided. You can

【0023】また、前記N次誤差成分と角度値により構
成されるテーブルを格納した記憶手段を備え、前記記憶
手段に格納されたテーブルを定期的に参照して前記角度
データを自己校正するので、長期に亘って高精度な角度
データを出力することのできる自己校正型角度検出器を
提供することができる。
Further, the apparatus is provided with a storage means for storing a table composed of the Nth-order error component and the angle value, and the angle data is self-calibrated by periodically referring to the table stored in the storage means. It is possible to provide a self-calibrating angle detector that can output highly accurate angle data over a long period of time.

【0024】また、N次誤差成分検出用ヘッドの位置を
A°=360/(2×N)、A°位置のN次誤差成分検出
用ヘッドで検出される角度データに含まれる精度誤差
(全次数誤差合計)をGS(A°)、 (x)°の左項にある
誤差特性を指定の角度x°シフトさせることを(x)°シ
フトとそれぞれ表した場合に、前記N次誤差GNは、N
=1の場合は、G1=(GS(0°)−GS(180°))/
2で表され、Nが2以上の場合は、GN={(GS(0
°)−GS(360/(2×N)°))+(GS(0°)−GS
(360/(2×N)°))(360/N)シフト+(GS(0
°)−GS(360/(2×N)°))(360/N×2)°シ
フト+・・・+(GS(0°)−GS(360/(2×N)
°))(360/N×K)°シフト}×(−1/2)×(1/
N)(ただし、K<N)で表されるので、各高次誤差成
分を除去した精度の高い角度データを出力する自己校正
型角度検出器を提供することができる。
Further, the position of the Nth-order error component detecting head is A ° = 360 / (2 × N), and the accuracy error included in the angle data detected by the Nth-order error component detecting head at the A ° position
When (total order error sum) is expressed as GS (A °), and shifting the error characteristic in the left term of (x) ° by a specified angle x ° is expressed as (x) ° shift, the Nth-order error is GN is N
When = 1, G1 = (GS (0 °) −GS (180 °)) /
2 and N is 2 or more, GN = {(GS (0
°) -GS (360 / (2 × N) °)) + (GS (0 °) -GS
(360 / (2 × N) °)) (360 / N) shift + (GS (0
°) -GS (360 / (2 × N) °)) (360 / N × 2) ° shift + ... + (GS (0 °) -GS (360 / (2 × N)
°)) (360 / N × K) ° shift} × (−1/2) × (1 /
N) (where K <N), it is possible to provide a self-calibrating angle detector that outputs highly accurate angle data with each higher-order error component removed.

【0025】さらに、前記いずれか記載のN次誤差成分
検出用ヘッドのうちのいずれかで検出される角度データ
を前記角度データ検出用ヘッドまたは他のN次誤差成分
検出用ヘッドで得られた角度データを用いて校正すると
共に、校正後の複数の角度データを平均化して得られる
平均角度データを出力するので、非常に高精度な角度デ
ータを出力する自己校正型角度検出器の提供することが
できる。
Further, the angle data detected by any one of the Nth order error component detecting heads described above is obtained by the angle data detecting head or another Nth order error component detecting head. Since it calibrates using the data and outputs the average angle data obtained by averaging multiple angle data after calibration, it is possible to provide a self-calibrating angle detector that outputs extremely accurate angle data. it can.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明による自己校正型角度検出器を概略的に
示す構成図である。
FIG. 1 is a schematic diagram showing a self-calibrating angle detector according to the present invention.

【図2】各高次誤差成分を概略的に示す特性図である。FIG. 2 is a characteristic diagram schematically showing each higher-order error component.

【図3】本発明による自己校正型角度検出器において2
次誤差成分を求める様子を概略的に示す特性図である。
FIG. 3 shows a self-calibrating angle detector according to the present invention 2
It is a characteristic view which shows roughly a mode that a secondary error component is calculated.

【図4】本発明の自己校正型角度検出器のブロック構成
を示す図である。
FIG. 4 is a diagram showing a block configuration of a self-calibrating angle detector of the present invention.

【符号の説明】[Explanation of symbols]

1 ディスク 2 角度データ検出用ヘッド 3 1次誤差検出用ヘッド 4 2次誤差検出用ヘッド 5 4次誤差検出用ヘッド 6 8次誤差検出用ヘッド 1 disc 2 Angle data detection head 3 Head for primary error detection 4 Secondary error detection head 5 4th-order error detection head 6 8th order error detection head

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 2F069 AA83 DD19 DD25 EE23 GG04 GG07 GG11 HH13 HH15 2F077 AA20 CC02 UU25 5J022 DA02 DB02 DC04 DD01    ─────────────────────────────────────────────────── ─── Continued front page    F term (reference) 2F069 AA83 DD19 DD25 EE23 GG04                       GG07 GG11 HH13 HH15                 2F077 AA20 CC02 UU25                 5J022 DA02 DB02 DC04 DD01

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 角度データ検出用ヘッドでディスクの回
転角度を検出する角度検出器において、前記角度データ
検出用ヘッドが設置されている0°位置に対して(36
0/2N)°回転させた位置に設置したN次誤差成分検
出用ヘッドで検出した角度データを用いてN次誤差成分
を求め、このN次誤差成分を前記角度データ検出用ヘッ
ドで検出された角度データから減算することにより前記
角度データを自己校正することを特徴とする自己校正型
角度検出器。
1. An angle detector for detecting a rotation angle of a disk with an angle data detecting head, wherein (36) is provided with respect to a 0 ° position where the angle data detecting head is installed.
The Nth-order error component is obtained by using the angle data detected by the Nth-order error component detection head installed at a position rotated by 0 / 2N) °, and the Nth-order error component is detected by the angle data detection head. A self-calibrating angle detector, wherein the angle data is self-calibrated by subtracting the angle data from the angle data.
【請求項2】 前記N次誤差成分と角度値により構成さ
れるテーブルを格納した記憶手段を備え、前記記憶手段
に格納されたテーブルを定期的に参照して前記角度デー
タを自己校正することを特徴とする請求項1記載の自己
校正型角度検出器。
2. A storage means for storing a table constituted by the Nth-order error component and the angle value is provided, and the angle data is self-calibrated by periodically referring to the table stored in the storage means. The self-calibrating angle detector according to claim 1, which is characterized in that.
【請求項3】 N次誤差成分検出用ヘッドの位置をA°
=360/(2×N)、A°位置のN次誤差成分検出用ヘ
ッドで検出される角度データに含まれる精度誤差(全次
数誤差合計)をGS(A°)、 (x)°の左項にある誤差特
性を指定の角度x°シフトさせることを(x)°シフトと
それぞれ表した場合に、前記N次誤差GNは、N=1の
場合は、G1=(GS(0°)−GS(180°))/2で表
され、Nが2以上の場合は、GN={(GS(0°)−G
S(360/(2×N)°))+(GS(0°)−GS(360
/(2×N)°))(360/N)シフト+(GS(0°)−G
S(360/(2×N)°))(360/N×2)°シフト+
・・・+(GS(0°)−GS(360/(2×N)°))(3
60/N×K)°シフト}×(−1/2)×(1/N)(た
だし、K<N)で表されることを特徴とする請求項1記
載の自己校正型角度検出器。
3. The position of the Nth-order error component detecting head is set to A °.
= 360 / (2 × N), the accuracy error (total order error sum) included in the angle data detected by the N ° -order error component detection head at the A ° position is GS (A °), left of (x) ° When the error characteristic in the term is shifted by a specified angle x ° is expressed as (x) ° shift, the Nth-order error GN is G1 = (GS (0 °) − when N = 1. GS (180 °) / 2, and when N is 2 or more, GN = {(GS (0 °) −G
S (360 / (2 × N) °) + (GS (0 °) −GS (360
/ (2 × N) °)) (360 / N) shift + (GS (0 °) -G
S (360 / (2 × N) °)) (360 / N × 2) ° shift +
・ ・ ・ + (GS (0 °) -GS (360 / (2 × N) °)) (3
60 / N × K) ° shift} × (−1/2) × (1 / N) (where K <N), wherein the self-calibrating angle detector according to claim 1.
【請求項4】 請求項1ないし3のいずれか記載の前記
N次誤差成分検出用ヘッドのうちのいずれかで検出され
る角度データを前記角度データ検出用ヘッドまたは他の
N次誤差成分検出用ヘッドで得られた角度データを用い
て校正すると共に、校正後の複数の角度データを平均化
して得られる平均角度データを出力することを特徴とす
る自己校正型角度検出器。
4. The angle data detected by any one of the Nth-order error component detection heads according to claim 1 is used for the angle data detection head or another Nth-order error component detection head. A self-calibration type angle detector characterized by calibrating using angle data obtained by a head and outputting average angle data obtained by averaging a plurality of calibrated angle data.
JP2002065830A 2002-03-11 2002-03-11 Self-calibrating angle detector Expired - Fee Related JP4090016B2 (en)

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