JP2003260884A - Printing plate and method for manufacturing it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a printing plate with a metal/aromatic polyimide hybrid structure in which a creep phenomenon between base marks under a gauze stretching tension is decreased and a high coordinate positional accuracy of an aperture for printing is provided and good adhesiveness and plate release properties between an article to be printed and it and excellent cream solder falling-out properties are provided. <P>SOLUTION: The printing plate is divided into a repeating basic pattern part constituting beveling, a part containing a divided region except the repeating basic pattern part constituting the beveling and an outer peripheral part and the repeating basic pattern part constituting the beveling is constituted of an aromatic polyimide material and the part containing the divided region except the repeating basic pattern part constituting the beveling and the outer peripheral part are constituted of a metal material and the aromatic polyimide material and the base marks 4 are formed on parts of this outer peripheral part. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a printing plate and a method for manufacturing the same.

[0002]

2. Description of the Related Art In forming inner bumps, outer bumps, and wafer bumps of a semiconductor chip mounting package, one of the methods capable of realizing electrical connection with high reliability and at low cost is a technique using a cream solder printing method. is there. Further, this technique is also utilized as one of component mounting techniques when mounting electronic components on a circuit board.
Among them, the printing plate is in an important position as one of the tools that directly affects the printing result.

As a material of this printing plate, a metal such as nickel, nickel alloy, stainless steel, or the like, a metal on the squeegee side, and a material to be printed is made of plastic, a metal / plastic hybrid structure material (Japanese Patent No. 30283).
28) or a simple substance of plastic (JP-A-7-810).
27) etc.

Further, as a technique for forming an opening required as a printing plate, a method combining ultraviolet photolithography technology and chemical etching, a method combining ultraviolet photolithography technology and electroforming technology (electroforming technology), A method combining ultraviolet photolithography technology, laser processing technology and dry etching technology (Japanese Patent Laid-Open No. 2000-340926), or laser processing technology including ablation (Japanese Patent Laid-Open No. 7-83926).
-81027) is used to open the material, or the material is directly mechanically processed by punching.

[0005] Miniaturization of electronic components including semiconductor components for the purpose of high functionality and high speed, accompanied by miniaturization of patterns for forming inner bumps, outer bumps and wafer bumps of a semiconductor chip mounting package. As the pitch becomes smaller or the cream solder printing pattern on the circuit board becomes finer and smaller in pitch, the openings of the printing plate also need to be finer and smaller in pitch. When cream solder printing is performed on the fine and small pitch openings using a printing plate made of a metal material, the level is required to be improved with respect to the cream solder removal property. In addition, the printing plate made of a metal material has a problem in the adhesiveness with the material to be printed in terms of the hardness of the material, and improvement is required to achieve high-precision printing without bleeding that requires good reproducibility. I need.

In a printing plate made of a hybrid structural material composed of a metal on the squeegee side and a plastic on the printed material side, the hardness of the plastic material is lower (softer) than the hardness of the metal material. Can achieve a sufficient improvement effect,
The problem with respect to the solder release property in the portion of the metal layer on the squeegee side is the same as in the case of the metal single layer, and needs improvement.

A printing plate made of plastic is more flexible than a metallic material in terms of hardness of the material, and therefore is effective in terms of adhesiveness on the side of the material to be printed. A printing plate made of polyester, which is a printing plate made of plastic, cannot be laser-processed in the ultraviolet region due to the heat-resistant temperature of the material, and is usually an ablation method using an excimer laser, which makes the manufacturing method complicated and costly There is a problem. Further, when a commercially available polyester film is used, even if a tension is applied as a printing plate, from the viewpoint of the rigidity of the material itself, high-precision printing using a printing plate that requires fine and small pitch openings is realized. In order to achieve this, improvement is required in terms of plate separation from the printing material.

In addition, in the printing plate using the aromatic polyimide of the printing plate composed of a single layer of plastic, the adhesiveness on the side of the printing material is similarly effective in terms of material flexibility. A printing plate using an aromatic polyimide material,
It is superior to polyester materials in terms of material rigidity and can realize excellent plate release properties. However, in a printing plate using an aromatic polyimide material, when stress is applied to the four sides of the rectangular aromatic polyimide plate that has undergone the opening process to make it a printing plate capable of high-precision printing, the stress of the material There is a problem of relaxation, creep phenomenon occurs, the distance between the openings changes with the passage of time, and the opening position accuracy needs to be improved in order to realize high-precision printing. To do.

The inventors of the present invention performed heat treatment on an aromatic polyimide material under appropriate conditions, and
By laying or adhering a metal material layer in the shape of a frame around the sides, the two-dimensional creep amount between the reference marks is saturated at 0.04% or less due to stress relaxation of the aromatic polyimide material under tension. I proposed to do (Japanese Patent Application 2
001-314505). The distance between the reference marks taken into consideration in this case is at a level of 300 to 400 millimeters, an opening diameter of 150 micrometers or more, and a pitch of 250 micrometers or more, and a sufficient effect can be exhibited in this range. However, in order to reduce the cost of semiconductor components and packages, the silicon wafer, which is the printing material of the printing plate, is in the direction of increasing the diameter.
In addition, the multiple chamfered package substrate for mounting a semiconductor chip is in the direction of increasing the area in consideration of the increase in the number of chips per side, which means that the distance between the reference marks is further increased in the printing plate. In addition to this, finer aperture patterns and smaller pitches required for printing plates are also certain directions,
It is necessary to satisfy the levels of the opening diameter of 30 to 100 micrometers and the pitch of 80 to 150 micrometers. This means that even if the creep amount is saturated at 0.04% or less, the creep amount that occurs between the opening patterns formed at the most distant positions in the pattern group will exceed the required pitch amount. However, further improvement is required.

Further, the heat treatment of the aromatic polyimide material described above under appropriate conditions naturally requires time and expense, which is one of the factors that pressure the cost. Even without heat treatment, the creep amount is 0.05% by increasing the width of the frame shape made of metal material on the outer peripheral portion of the printing plate, that is, making the area of the part made of metal material wider. If the area where the creep phenomenon occurs can be limited to a small area even with this amount, that is, if the basic unit area of the multi-sided repeating basic pattern is small, or the required outermost circumference of the repeating basic pattern Form the minimum required area of the repeating basic pattern at a position that is the minimum distance necessary for printing from the part, and laminate or bond the metal material to the aromatic polyimide only for this part and the aromatic polyimide for the other part. By using the mask having the above structure, the creep amount of the aromatic polyimide without heat treatment can be suppressed to a small amount as a result. Achieving this is also an extremely important improvement in achieving high-precision printing at low cost.

[0011]

The maximum distance between opening patterns for cream solder printing or the distance between reference marks is 200 to 500 mm, and the diameter of the opening for cream solder printing is 40 to 100 μm. In printing plates requiring a pitch of 80 to 150 micrometers at the meter level, it is highly resistant to repeated printing while maintaining good adhesion to the printing material, good plate release property to cream solder, and release property. It is an object to realize a printing plate having an opening having a coordinate position accuracy.

[0012]

Means for Solving the Problem The means for solving the problem is a cream solder printing plate of the present invention, in which a squeegee side is made of a metal material and the printed matter side is made of an aromatic polyimide material, for a multiple-chamfered substrate. This printing plate is divided into a repeating basic pattern portion forming a chamfer, a portion including a divided area other than the repeating basic pattern portion forming a chamfer and an outer peripheral portion, and the repeating basic pattern portion forming a chamfer is an aromatic polyimide material. The part including the divided area other than the repeated basic pattern part and the outer peripheral part which are configured by the chamfer and the outer peripheral part are composed of a metal material and an aromatic polyimide material, and a part of the outer peripheral part and / or the chamfer are repeated. By creating fiducial marks in part of the area including the divided areas other than the basic pattern area, the aromatic poly The area where the creep phenomenon of the printed material occurs is limited to the range of the repeated basic pattern part that constitutes the chamfer, and at the same time, the effect of the creep phenomenon that occurs between the reference marks is reduced, and the coordinates of all opening patterns for repeated printing. The printing plate is characterized by improving positional accuracy.

Further, in the cream solder printing plate of the present invention, in which the squeegee side is made of a metal material and the printed matter side is made of an aromatic polyimide material, with respect to a multi-chamfering type printing material, a repeating basic pattern for forming the chamfering is used. A polygon or a circle having a shape that includes a portion and a region in which cream solder printing is possible through the opening for cream solder printing provided in the repeating basic pattern portion which further constitutes this chamfer and surrounds the repeating basic pattern group. It is divided into an inner part of the closed line and an outer peripheral part of the polygon or the circle or the closed line, and the part inside the polygon or the circle or the closed line including the repeating basic pattern part is aromatic. It is composed of polyimide material, the outer peripheral part is composed of metal material and aromatic polyimide material, and a part of this outer peripheral part is used as a reference. By creating marks, the area where the creep phenomenon of the aromatic polyimide material occurs is limited to the area of the polygon or the part surrounded by the circle or the closed line, and at the same time, the influence of the creep phenomenon that occurs between the reference marks. Is improved and the coordinate position accuracy of all opening patterns is improved with respect to repetitive printing.

Further, according to the present invention, the squeegee side is a metal material,
In a cream solder printing plate composed of an aromatic polyimide material on the side of the material to be printed, a metal layer of a repeating basic pattern part which constitutes chamfering of this material, and a part of the printing plate outside the outer peripheral line of the printing plate, which is unnecessary A metal layer corresponding to a portion used for alignment for laser processing provided in a part is removed by using a photolithography technique and an etching technique, and then the etched metal layer of the alignment portion for laser processing. A guide is used to mechanically drill holes in the aromatic polyimide material, and after the alignment is performed using the open portion, the laser processing technology is used from the aromatic polyimide material side to form a chamfered repeated basic pattern portion. The inner opening is formed by subjecting the aromatic polyimide material to a through opening process, and / or extending to a part of the outer peripheral portion of the printing plate. The reference mark part formed in a part of the part including the divided area other than the repeated basic pattern part forming the take-up has the same shape as the reference mark, and the outer peripheral line of the printing plate finally corresponds to the width necessary for cutting. The part is subjected to through opening processing up to the metal material layer, and then the part outside the outer peripheral line of the printing plate that is unnecessary as the printing plate is removed, so that the repeating basic pattern part forming the chamfer is made of an aromatic polyimide material. A portion including a divided area other than the repeated basic pattern portion forming the chamfer and the outer peripheral portion where the opening of the reference mark is finished, and / or a portion including the divided area other than the repeated basic pattern portion forming the chamfer, The method of manufacturing a printing plate according to claim 1, wherein the printing plate is composed of a metal material and an aromatic polyimide material.

Further, according to the present invention, the squeegee side is a metal material,
In the cream solder printing plate that comprises the printed material side of the aromatic polyimide material, using the laser processing technology from the aromatic polyimide material side, the outer peripheral line of the printing plate, the portion corresponding to the width finally necessary for cutting, Further, the opening in the repeated basic pattern portion forming the chamfer has the same shape as the opening and / or a part of the outer peripheral portion and / or a part of the portion including the divided area other than the repeated basic pattern portion forming the chamfer. The reference mark to be formed in the same shape as the reference mark is subjected to through processing up to the metal layer, then the portion outside the outer peripheral line portion of the printing plate that is not necessary for the printing plate is removed, and then chamfering is repeated. A chamfer is formed by aligning and removing the metal layer of the basic pattern portion using photolithography technology and etching technology. The repeating basic pattern portion is composed of an aromatic polyimide material, and includes the divided area other than the repeating basic pattern portion forming the chamfer, the outer peripheral portion where the reference mark opening is completed, and / or the repeating basic pattern portion forming the chamfer. The method for producing a printing plate according to claim 1, wherein a portion including the divided regions other than the above is constituted by a metal material and an aromatic polyimide material.

Further, according to the present invention, the squeegee side is a metal material,
In a cream solder printing plate composed of an aromatic polyimide material on the side to be printed, including a region where cream solder printing is possible through a cream solder printing opening provided in a repeating basic pattern part which constitutes chamfering of this material Laser processing provided on the metal layer inside the polygon or circle or the closed line that surrounds the repeating basic pattern group and on a part of the portion outside the outer peripheral line of the printing plate that is unnecessary as the printing plate. After removing a metal layer corresponding to a portion used for alignment for photolithography using a photolithography technique and an etching technique, an aromatic polyimide is formed using the etched metal layer of the alignment portion for laser processing as a guide. After mechanically drilling the material and performing alignment using the open part,
Using a laser processing technology from the aromatic polyimide material side, the opening in the repeating basic pattern part that constitutes the chamfer is a reference mark formed on a part of the outer peripheral part of the printing plate by performing through opening processing on the aromatic polyimide material. The part has the same shape as the reference mark, and the outer peripheral line of the printing plate is subjected to through opening processing up to the metal material layer at the part corresponding to the width finally necessary for cutting, and then printing outside the outer peripheral line part of the printing plate. By removing an unnecessary portion as a plate, the area for enabling cream solder printing is included through the opening for cream solder printing provided in the repeating basic pattern portion forming the chamfer and surrounds the repeating basic pattern group. The inner part of the polygonal shape or circle or closed line is made of aromatic polyimide material, and the outer peripheral part where the reference mark opening is completed is made of metal. Sometimes the method of manufacturing a printing plate according to claim 2, characterized in that consists of charge and an aromatic polyimide material.

Further, according to the present invention, the squeegee side is a metal material,
In the cream solder printing plate that comprises the printed material side of the aromatic polyimide material, using the laser processing technology from the aromatic polyimide material side, the outer peripheral line of the printing plate, the portion corresponding to the width finally necessary for cutting, Further, the opening in the repeated basic pattern portion that constitutes the chamfer has the same shape as the opening, and the reference mark formed in a part of the outer peripheral portion has the same shape as the reference mark. Area where the cream solder printing can be performed through the cream solder printing opening provided in the repeating basic pattern part that constitutes the chamfering again after removing the part that is not needed as the printing plate outside the outer peripheral line part of the plate. The metal layer on the inner side of the polygon or the circle or the closed line which has a shape including and including the repeating basic pattern group is aligned, A group of repetitive basic patterns including a region where cream solder printing is possible through the cream solder printing opening provided in the repetitive basic pattern portion forming the chamfer by removing using a lithographic technique and an etching technique. The inner part of the polygon or circle or the closed line surrounding the is composed of an aromatic polyimide material, and the outer peripheral part where the opening of the reference mark is finished,
The method for producing a printing plate according to claim 2, wherein the printing plate is composed of a metal material and an aromatic polyimide material.

[0018]

DETAILED DESCRIPTION OF THE INVENTION The present invention will be described below with reference to the drawings. First, the definition of the words described in the claims will be described based on FIG. 1. FIG. 1 is a schematic plan view of the printing plate of the present invention in which the squeegee side is a metal material and the printed material side is an aromatic polyimide material, as viewed from the squeegee side, that is, from the metal material side. The repeated basic pattern portion forming the chamfer refers to the area indicated by 1 in the drawing. FIG. 1 shows an example in which a repeated basic pattern portion forming four chamfers is provided, that is, four impositions, for convenience. In this area, the through opening 5 necessary for printing the cream solder is created.
Further, the size of this region is set to the minimum size at which the cream solder can be printed on the opening group in the repeated basic pattern section without any problem.

Next, the portion including the separation area other than the repeated basic pattern portion means the area indicated by 2 in FIG. The center line of this portion is a dividing line for finally dividing the multi-chamfered substrate.

The outer peripheral portion refers to the area indicated by 3 in FIG. This portion includes a dividing line which is located at the outermost peripheral portion of the repeating basic pattern which constitutes the chamfer.

The reference mark 4 is a mark for aligning the position of the printing plate and the material to be printed when the cream solder is printed. Generally, the reference mark 4 has a diameter of about 1 mm on the outer peripheral portion indicated by 3 in FIG. Circular through-opening shape, with two diagonally arranged. The reference mark may be provided in the divided area 2 other than the repeated basic pattern portion forming the chamfer in addition to the outer peripheral portion 3, or may be provided only in the divided area 2 other than the repeated basic pattern portion forming the chamfer. Is also good.

The peripheral line of the printing plate is a line indicated by 6 in FIG. 1, and a general plane shape is a quadrangle.

FIG. 2 was first proposed by the present inventors (patent application 20
01-314505), the squeegee side is the metal material 10, and the printed material side is the aromatic polyimide material 1.
Using the metal / plastic / hybrid structure material consisting of 1, the metal material 10 is arranged in a frame shape with respect to the printing plate, and the printing plate 9 having the necessary openings 5 opened is made of aluminum through the gauze 8. 7 is a schematic sectional view in which the state of being attached to No. 7 is drawn line-symmetrically with respect to the center line for convenience. Here, the aluminum frame 7 is usually about 550 × 650 millimeters in size. The printing plate 9 is made of a metal material on the squeegee side and has a thickness of 5 to 100 μm, such as copper, stainless steel or copper laminated with nickel, and has a general outer peripheral shape of about 400 × 480 mm. The aromatic polyimide material has a thickness of 25 to 200 micrometers. Further, the opening 5 in the repeating basic pattern portion forming the chamfer has various shapes, but generally has a large number of circular shapes, the diameter thereof is usually 30 to 50 micrometers or more, and the pitch thereof is usually It is about 50 to 80 micrometers or more.

3 and 4 show a printing plate according to claim 1 of the present invention. FIG. 3 shows a printing plate 9 of the present invention.
FIG. 7 is a schematic cross-sectional view in which the state of being attached to the aluminum frame 7 via the gauze 8 is drawn line-symmetrically with respect to the center line for convenience.
Here, the printing plate 9 is composed of a metal material 10 on the squeegee side and an aromatic polyimide material 11 on the printed material side. The thickness of the aromatic polyimide material is determined by the area of the opening in the repeating basic pattern portion forming the chamfer and the amount of cream solder required after printing. FIG. 4 is a schematic plan view of the printing plate 9 of the present invention attached to the aluminum frame 7 via the gauze 8 as viewed from the squeegee side. The printing plate 9 includes a repeating basic pattern portion forming a chamfer (this portion has a shape formed of the aromatic polyimide material 11 in FIG. 4 of the schematic view seen from the squeegee side) and a repeating basic pattern portion forming a chamfer. 2 and the outer peripheral portion 3 including the separation area other than the above (this portion is seen from the squeegee side as shown in FIG.
Then, the repeating basic pattern portion forming the chamfer is composed only of the aromatic polyimide material, and the necessary opening 5 is opened in this portion to form the chamfering repeating basic pattern. The part including the separation region other than the part and the outer peripheral part are in a state in which a metal is laminated or adhered to the aromatic polyimide. The thickness of this metal layer is 5 to 100 μm, and the metal material is copper,
A single layer of stainless steel and a laminate of copper and nickel or nickel alloy, nickel and chrome, copper and nickel or nickel alloy are used. In the case of adhering the single layer metal material to the aromatic polyimide material, the material is substantially composed of only the metal material and the aromatic polyimide material by making the surface of the aromatic polyimide material thermoplastic. In order to form a smooth wall surface in the opening-processed portion, it is preferable to stack the layers and not to interpose a resin adhesive material other than the aromatic polyimide between the metal material and the aromatic polyimide material. Also, after depositing or sputtering the above nickel or nickel and chrome or a nickel chrome alloy on the surface of the aromatic polyimide material to a predetermined thickness or sputtering, copper is deposited or sputtered on this layer to a predetermined thickness to form this layer. Copper is electroplated as an electrode to a specified thickness, then nickel or nickel alloy is electroformed on this copper by electroforming.
You may laminate | stack to a predetermined thickness using. Fiducial mark 4
In general, since it is positioned at two diagonal positions of the size described above on a part of the outer peripheral portion of the printing plate, the creep phenomenon due to the polyimide material between the reference marks can be reduced. In FIG. 3 (FIG. 4), the metal material is beam-like and exists on the aromatic polyimide material in the divided areas other than the repeating basic pattern portion forming the chamfer, and the reference mark is the metal material and the aromatic in the outer peripheral portion. The difference from FIG. 2 is that it is provided in a portion formed of a polyimide material. Further, also in the case described above, the creep amount of the aromatic polyimide material is set to 0.
When it is necessary to suppress the content to 04% or less, the heat treatment method for metal / plastic / hybrid material previously proposed by the present inventors (Japanese Patent Application No. 2001-314505) may be adopted. The above heat treatment method is not required when it is not necessary to suppress the amount to 0.04% or less.

FIG. 5 is a schematic sectional view of the state of the method for manufacturing the printing plate 9 according to the second aspect of the present invention, which is drawn in line symmetry with respect to the center line for convenience. Description will be given below with reference to the drawings. FIG. 5A shows a state before processing of a printing plate having a metal material 10 on the squeegee side and an aromatic polyimide material 11 on the printed material side. This material is square and the size is 300-55
The thickness is 0 mm × 300 to 600 mm, and the total thickness is 25 to 200 μm. The metal material is copper, stainless steel, or a form in which nickel or nickel alloy is laminated on copper by electroforming, or nickel or nickel-chromium or nickel-chromium alloy vapor-deposited or sputtered to a predetermined thickness, and copper is further stacked. It has a structure in which it is vapor-deposited or sputtered to a predetermined thickness, copper is electrolytically plated on it, and nickel or nickel alloy is further formed by electroforming. The thickness is 5
To 100 micrometers. The metal material has a structure laminated or bonded to aromatic polyimide.

Next, FIG. 5B shows a portion corresponding to a repeating basic pattern portion forming a chamfer by applying or stacking a photosensitive material on the surface of the metal material of the above material and using a photolithography technique and an etching technique. The state in which the pattern 12 necessary for alignment for laser processing is etched is shown in a portion which is unnecessary as the metal material and the printing plate outside the outer peripheral line of the printing plate. This laser processing alignment mark 12 has a circular shape with a diameter of 1 mm, and has a minimum of two pieces, and is formed in a portion which is unnecessary as a printing plate outside the outer peripheral line of the printing plate.

Next, as shown in FIG. 5C, the aromatic polyimide material is mechanically perforated using the etched metal layer corresponding to the laser processing alignment mark 12 of the material in the above state as a guide. Shows the state.

Next, as shown in FIG. 5D, after the material in the above state is set in a laser beam machine and alignment is performed by using the alignment mark 12 for laser beam machining, the diameter 25 Using a UV-YAG laser having a beam diameter of 355 nanometers and a beam diameter of micrometer, the openings in the repeating basic pattern portion forming the chamfer are made of aromatic polyimide along the outer peripheral line 14,
The reference mark 4 formed in the outer peripheral portion of the printing plate was processed through the outer peripheral line 15 up to the metal material, and the outer peripheral line of the printing plate was processed along the outer peripheral line 13 up to the metal material in a single stroke. Indicates the status.

Next, FIG. 5E shows an island-shaped remnant formed in the opening and the reference mark in the repeating basic pattern portion forming the chamfer, which is unnecessary as a printing plate, and the outer peripheral line of the printing plate. As for the printing plate remaining on the outer side of FIG.

The printing plate 9 manufactured in this manner is shown in FIG.
As shown in FIG. 3, the printing plate 9 is attached to the aluminum frame 7 through the gauze 8, and the four sides of the printing plate 9 are set in a state in which tension required for printing is applied so that they can be set in the cream solder printing machine.

FIG. 6 is a schematic cross-sectional view in which the state of the method for manufacturing the printing plate 9 according to claim 4 of the present invention is drawn in line symmetry with respect to the center line for convenience. Description will be given below with reference to the drawings. FIG. 6A shows a state before processing of a printing plate in which the squeegee side is the metal material 10 and the printed material side is the aromatic polyimide material 11. This material is square and the size is 300-55
The thickness is 0 mm × 300 to 600 mm, and the total thickness is 25 to 200 μm. The metal material is copper, stainless steel, or a form in which nickel or a nickel alloy is laminated on copper by electroforming, or nickel vapor deposited or sputtered, nickel and chrome or a nickel chrome alloy is electrolytically plated with copper, and further nickel or The nickel alloy has a structure formed by electroforming and has a thickness of 5 to 100 micrometers. The metal material has a structure laminated or bonded to aromatic polyimide.

FIG. 6 (b) shows that the above material is used from the aromatic polyimide side and has a wavelength of 355 with a beam diameter of 25 μm.
Using a nanometer UV-YAG laser to the metal material side, the outer peripheral line of the printing plate has a width necessary for cutting (usually, a beam diameter of 25 μm is sufficient) along the outer peripheral line 13 of the printing plate. , The opening of the repeating basic pattern portion forming the chamfer is along the outer peripheral line 14 of the opening shape, and the outer peripheral portion other than the repeating basic pattern portion forming the chamfer is along the outer peripheral line 15 of the opening shape of the reference mark, All of them show the state where the penetrating processing is performed in a single stroke.

Next, FIG. 6C shows a printing plate 9 made of the above material.
Part outside the outer peripheral line 13 of the printing plate, which is not necessary for the printing plate, the remaining part in the outer peripheral line of the reference mark in the outer peripheral part, and the remaining part in the opening of the repeating basic pattern part forming the chamfer. Shows a state in which is removed.

Next, FIG. 6D shows a repeating basic pattern in which a photosensitive material is applied or laminated on both surfaces of the metal material surface and the aromatic polyimide material surface of the above material, and then chamfering on the metal material surface side is formed. After aligning the outer peripheral line of the printing plate using the mask corresponding to the portion and etching the metal material corresponding to the repeated basic pattern portion forming the chamfer using the photolithography technology and the etching technology, the printing plate The state where the photosensitive substances on both sides are removed is shown.

The printing plate 9 manufactured in this manner is shown in FIG.
As shown in FIG. 3, the printing plate 9 is attached to the aluminum frame 7 through the gauze 8, and the four sides of the printing plate 9 are set in a state in which tension required for printing is applied so that they can be set in the cream solder printing machine.

FIG. 7 is a schematic plan view showing a state in which a printing plate having a metal material on the squeegee side and an aromatic polyimide material on the printed material side according to claim 2 of the present invention is viewed from the squeegee side. In the case of FIG. 7 as well, four repeating basic patterns forming the chamfer, that is, a case of four impositions are shown. In this figure, a shape including an area in which cream solder printing is possible through the cream solder printing opening 5 provided in the repeating basic pattern portion forming these chamfers and surrounding the repeating basic pattern group is an octagon. (This may be polygonal or circular) The inner part of the outer peripheral line 16 is made of only an aromatic polyimide material, and the necessary opening 5 is opened in this part, and the part outside the octagonal outer peripheral line is aromatic. A state in which a metal is laminated or adhered to polyimide is shown. In addition, a state is shown in which two reference marks 4 are formed in a diagonal shape outside the octagonal peripheral line. By doing this,
The creep phenomenon caused by the aromatic polyimide material can be limited inside the outer peripheral line of the polygon. Here, this polygon may or may not be a regular polygon and may be formed by a closed line. The center or center of gravity of the polygon or circle may or may not coincide with the center or center of gravity of a polygon formed by connecting the outermost sides of the openings in the repeating basic pattern group. The thickness of the metal layer of this printing plate is 5 to 100 micrometers, and the metal material is a single layer of copper or stainless steel, and
A laminated body of copper and nickel or a nickel alloy, nickel and chrome, and copper and nickel or a nickel alloy is used. In the case of adhering the single layer metal material to the aromatic polyimide material, the material is substantially composed of only the metal material and the aromatic polyimide material by making the surface of the aromatic polyimide material thermoplastic. In order to form a smooth wall surface in the opening-processed portion, it is preferable to stack the layers and not to interpose a resin adhesive material other than the aromatic polyimide between the metal material and the aromatic polyimide material. In addition, after nickel or nickel and chrome or nickel chrome alloy is vapor-deposited or sputtered with a predetermined thickness on the surface of the aromatic polyimide material, copper is further vapor-deposited or sputtered with a predetermined thickness on the surface of the aromatic polyimide material. Alternatively, electroplating of copper to a predetermined thickness may be performed, and then nickel or nickel alloy may be laminated on the copper by electroforming (electroforming). Since the reference marks 4 are generally located on a part of the outside of the above-mentioned octagonal outer peripheral line, and generally at two diagonal positions with a diameter of 1 mm, metal is placed between the reference marks. Material can be present and creep phenomena due to the polyimide material between fiducial marks can be reduced. Further, even in the case described above, when the creep amount of the aromatic polyimide material needs to be suppressed to 0.04% or less, the heat treatment method for the metal / plastic / hybrid material previously proposed by the present inventors (Japanese Patent Application No. 2001-
314505) may be adopted, but the heat treatment method is not necessary when it is not necessary to suppress the creep amount of the aromatic polyimide material to 0.04% or less.

FIG. 8 is a schematic cross-sectional view in which the state of the method for manufacturing the printing plate 9 according to claim 5 of the present invention is drawn in line symmetry with respect to the center line for convenience. Description will be given below with reference to the drawings. FIG. 8A shows a state before processing of a printing plate having a metal material 10 on the squeegee side and an aromatic polyimide material 11 on the printed material side. This material is square and the size is 300-55
The thickness is 0 mm × 300 to 600 mm, and the total thickness is 25 to 200 μm. The metal material is copper, stainless steel, or a form in which nickel or a nickel alloy is laminated on copper by electroforming, or nickel or nickel and chromium or a nickel-chromium alloy that has been vapor-deposited or sputtered to a predetermined thickness has a predetermined thickness of copper. It is vapor-deposited or sputtered, copper is electrolytically plated using this layer as an electrode, and nickel or nickel alloy is formed by electroforming, and the thickness thereof is 5 to 100 micrometers. The metal material has a structure laminated or bonded to aromatic polyimide.

Next, FIG. 8B shows a shape in which a photosensitive material is applied or laminated on the metal material surface of the above material, and a repeating basic pattern group forming a chamfer is surrounded by using a photolithography technique and an etching technique. Pattern 1 required for alignment for laser processing on the metal material of the portion corresponding to the inside of the outer peripheral line of the polygon or circle, and on the portion outside the outer peripheral line of the printing plate that is unnecessary as a printing plate
2 shows the etched state. This laser processing alignment mark 12 has a circular shape with a diameter of 1 mm, and has a minimum of two pieces, and is formed in a portion which is unnecessary as a printing plate outside the outer peripheral line of the printing plate.

Next, FIG. 8 (c) mechanically performs opening processing on the aromatic polyimide material using the etched metal layer corresponding to the laser processing alignment mark 12 of the material in the above state as a guide. Shows the state.

Next, as shown in FIG. 8D, after the material in the above-mentioned state is set in the laser processing machine and alignment is performed using the alignment mark 12 for laser processing, the diameter of 25 Using a UV-YAG laser having a beam diameter of 355 nm and a beam diameter of micrometer, an opening in the outer peripheral line of a polygon or a circle surrounding a repeating basic pattern group forming a chamfer is formed along the outer peripheral line 14. A reference mark 4 in which an aromatic polyimide is formed within the outer side of the peripheral line of a polygon or circle that surrounds a repeating basic pattern group that constitutes the chamfer of a printing plate.
Indicates a state in which the metal material along the outer peripheral line 15 and the metal material along the outer peripheral line 13 of the printing plate are perforated in a single stroke.

Next, FIG. 8E is generated in the opening and the reference mark inside the outer peripheral line of the polygon or circle having a shape surrounding the repeating basic pattern group forming the chamfer, which is unnecessary as a printing plate. The figure shows a state in which island-like remnants and unnecessary portions of the printing plate remaining outside the outer peripheral line of the printing plate have been removed.

The printing plate 9 manufactured in this manner is shown in FIG.
As shown in FIG. 3, the printing plate 9 is attached to the aluminum frame 7 through the gauze 8, and the four sides of the printing plate 9 are set in a state in which tension required for printing is applied so that they can be set in the cream solder printing machine.

FIG. 9 is a schematic cross-sectional view in which the state of the method for manufacturing the printing plate 9 according to claim 6 of the present invention is drawn in line symmetry with respect to the center line for convenience. Description will be given below with reference to the drawings. FIG. 9A shows a state before processing of a printing plate having a metal material 10 on the squeegee side and an aromatic polyimide material 11 on the printed material side. This material is square and the size is 300-55
The thickness is 0 mm × 300 to 600 mm, and the total thickness is 25 to 200 μm. The metal material is copper, stainless steel, or a form of nickel or nickel alloy laminated on copper by electroforming, or nickel or nickel and chrome or nickel chrome alloy which has been vapor-deposited or sputtered to a predetermined thickness, and copper to a predetermined thickness. Is vapor-deposited or sputtered, copper is electrolytically plated to a predetermined thickness using this as an electrode, and nickel or nickel alloy is formed by an electroforming method,
Its thickness is 5 to 100 micrometers. The metal material has a structure laminated or bonded to aromatic polyimide.

FIG. 9 (b) shows that the above-mentioned material is used from the aromatic polyimide side and has a wavelength of 355 with a beam diameter of 25 μm.
Using a nanometer UV-YAG laser to the metal material side, the outer peripheral line of the printing plate has a width necessary for cutting (usually, a beam diameter of 25 μm is sufficient) along the outer peripheral line 13 of the printing plate. , A polygon of a shape surrounding the repeating basic pattern group forming the chamfer or an opening inside the outer peripheral line of the circle along the outer peripheral line 14 of the opening shape, a polygon surrounding the repeating basic pattern group forming the chamfer Alternatively, the outer peripheral portion on the outer side of the outer peripheral line of the circle indicates a state in which the outer peripheral portion of the reference mark has been perforated along the outer peripheral line 15 of the opening shape of the reference mark in a one-stroke manner.

Next, FIG. 9C shows a printing plate 9 made of the above material.
Of the reference mark on the outer side of the outer peripheral line 13 of the printing plate and on the outer side of the outer peripheral line of the polygon or circle having a shape surrounding the repeating basic pattern group forming the chamfer and a portion unnecessary for the printing plate. Remains in the outer line and
FIG. 7 shows a state in which a residue in an opening inside a peripheral line of a polygon or a circle surrounding a group of repeating basic patterns forming a chamfer is removed.

Next, FIG. 9D shows a repeating basic pattern in which a photosensitive material is applied or laminated on both surfaces of the metal material surface and the aromatic polyimide material surface of the above material, and then chamfering on the metal material surface side is formed. A group of repetitive basic patterns that forms a chamfer using photolithography and etching technology by aligning the outer peripheral line of the printing plate with a mask that corresponds to the inside of the outer peripheral line of a polygon or circle that surrounds the group. 2 shows a state in which the photosensitive material on both sides of the printing plate has been removed after etching the metal material corresponding to the inside of the outer peripheral line of the polygon or circle surrounding the printing plate.

The printing plate 9 manufactured in this manner is shown in FIG.
As shown in FIG. 3, the printing plate 9 is attached to the aluminum frame 7 through the gauze 8, and the four sides of the printing plate 9 are set in a state in which tension required for printing is applied so that they can be set in the cream solder printing machine.

Example 1 A printing plate made of aromatic polyimide material having a thickness of 50 μm, and a copper plate having a thickness of 10 μm laminated on one side of Kapton (trade name), manufactured by Toyo Metalizing Co., Ltd. On the copper
The structure was such that nickel having a thickness of 20 micrometers was laminated using an electroforming method (electroforming method).
The planar size of this material was 500 × 500 millimeters.

Next, using a laminator, a film-shaped photosensitive material (dry film) 371Y manufactured by Nichigo Morton Co., Ltd. having a thickness of 25 μm on the metal material side, which is the squeegee side as a printing plate of this material, was used. Laminated according to.

Next, on this dry film, the outer shape of the repeating basic pattern portion forming the chamfer is defined as the center of this pattern, with the shape of a square of 30 cm × 30 cm in which R of 5 mm is attached as a unit. A portion in which a total of 15 pieces of 3 × 5 pieces with a repeating pitch of 43 millimeters are arranged so that the centers of circumscribed quadrangles of the opening group in the repeating basic pattern portion which forms the chamfer are aligned, and a portion outside the outer periphery of the printing plate A circular portion having a diameter of 1 mm, which is used for positioning in the subsequent laser processing, was made black at the four corners thereof so that it does not transmit ultraviolet light, and the other portions were made transparent, and exposed according to the conditions.

Next, the exposed dry film is developed according to the conditions, and after the development treatment of the dry film of the portion corresponding to the repeating basic pattern portion forming the chamfer and the alignment portion for laser processing,
After etching in ferric chloride solution, after etching the laminated nickel and copper of the portion corresponding to the repeated basic pattern portion constituting the chamfer and the portion corresponding to the alignment portion for laser processing, dry according to the conditions. The film was stripped.

Then, using the needle-shaped material from the metal material side as a guide, the through hole is formed in the aromatic polyimide material using the etched metal layer of the portion corresponding to the laser processing alignment portion of the material in the above state. Processed.

Next, the printing plate material in the above-mentioned state
A UV-YAG laser beam machine with a beam diameter of 25 nanometers of 5 nanometers was set so that the laser beam could be irradiated from the aromatic polyimide material side,
Positioning is performed using a positioning pattern for laser processing that is created outside the outer periphery of the printing plate, and the openings in the repeating basic pattern portion that constitutes the chamfer have a diameter of 100 micron after opening processing for all openings. The aromatic polyimide material was subjected to perforation processing in a manner of one stroke with the pitch taken into consideration in consideration of the beam diameter, so that the pitch was 150 micrometers so that the circle was a meter. In addition, the portion corresponding to the reference mark has a center-to-center distance of 250 mm on the outer peripheral portion of the printing plate, and the inside of the aromatic polyimide is drawn in a single stroke in consideration of the beam diameter so that a circle with a diameter of 1 mm is formed after opening. From the material to the metal material, through processing is performed at two points in a diagonal type. Furthermore, the outer peripheral line of the printing plate is a one-stroke outline that considers the beam diameter so that the outer periphery is 400 x 480 mm. Then, penetration processing was performed from the aromatic polyimide material to the metal material.

Next, the material, which has been subjected to the necessary penetration processing, is taken out from the laser processing machine, and is a portion outside the outer peripheral line of the printing plate, which is unnecessary as a printing plate, and further, in a repeating basic pattern part which constitutes chamfering. The unnecessary portion remaining in the opening and the unnecessary portion remaining in the reference mark in the outer peripheral portion of the printing plate are removed to obtain a plane size of 400 × 4.
An 80 mm printing plate was produced.

The printing plate produced in this way was placed on an aluminum frame having an outer size of 550 × 650 mm and made of polyester mesh with a 180-mesh tension of 1.0 mm (using a tension gauge STG-75B (Protec)). It was affixed via the so that it could be set on the cream solder printing machine.

In the case of the printing plate based on Example 1, the heat treatment method for metal / plastic / hybrid material previously proposed by the inventors (Japanese Patent Application No. 2001-314505) was not adopted. The most distant distance in the vertical and horizontal directions among the opening pattern groups in the repeating basic pattern portion forming the chamfer of this printing plate is 10050.
Since it is a micrometer, the creep amount one week after applying tension to the four sides of the printing plate using the material without heat treatment is a two-dimensional length measuring machine (TDS7
055EX), the result was 0.05%, which was about 5 micrometers, but it was 2.5 micrometers on one side from the center of the pattern group, and 2% when the pitch between openings was 150 micrometers. There was no problem in practical use.

Further, in the case of the printing plate based on Example 1,
The distance between the reference marks on the printing plate one week after applying the tension is measured by a two-dimensional length measuring machine (TDS7
As a result of measurement using 055EX), it was increased by 20 micrometers, but this amount was 10 micrometers on one side from the center, and it was confirmed that the effect of the creep phenomenon could be reduced to a level where there was no practical problem. did.

[Example 2] As a printing plate material, an aromatic polyimide material having an outer dimension of 500 mm square was used, and the thickness of the product name Upilex VT manufactured by Ube Industries, Ltd. was 5
Product name SU with SUS304 of the same external dimensions with a thickness of 30 micrometers attached to one side of 0 micrometers
An S-tight VT board was used.

Next, this material is irradiated at a wavelength of 355 so that a laser beam can be irradiated from the aromatic polyimide material side.
It was set on a UV-YAG laser beam machine having a nanometer beam diameter of 25 micrometers. Next, from the aromatic polyimide material side of this material to the metal material, along the outer peripheral line of the printing plate so that the outer peripheral line 13 of the processed printing plate becomes 400 × 480 mm, 3
The openings 5 in the repeating basic pattern portion that forms the chamfer of 5 pieces have a diameter of the opening of the repeating basic pattern portion that forms the chamfer after the opening processing is 100 μm, and a length and width of 68 are 150 μm pitch. The reference marks 4 to be created along the outer peripheral line of the opening in the repeating basic pattern part that constitutes the chamfer and in the outer peripheral part of the printing plate are in two diagonal positions so that the diameter after opening is 1 mm. Penetration processing was performed along the outer circumference of the reference mark in a single stroke.

Next, this material was taken out from the UV-YAG processing machine, and was removed as a printing plate outside the outer peripheral line of the printing plate, the residue in the opening of the repeating basic pattern part forming the chamfer, and the printing plate. Remove the residue in the reference mark on the outer periphery of the
The condition was 480 mm.

Then, on both sides of the material in this state, a thickness of 2
A film-shaped photosensitive material (dry film) 371Y manufactured by Nichigo Morton Co., Ltd. having a thickness of 5 micrometers was laminated according to the conditions using a laminator.

Then, on the dry film on the metal material side of this material, the outer shape of the repeating basic pattern portion forming the chamfer is 5 at four corners of a 30 × 30 cm square.
Using the shape with R of millimeter as a unit, the center of this pattern and the center of the circumscribed quadrangle of the group of openings in the repeating basic pattern portion that constitutes the chamfer are made to coincide, and a total of 3 × 5 pieces with a repeating pitch of 43 mm. The area where 15 pieces are arranged is black that does not transmit ultraviolet rays, and the other areas are made transparent. After aligning them using the outer peripheral line of the printing plate, the aromatic polyimide material side is left as it is and the ultraviolet light source is used. Was used for double-sided exposure according to the conditions.

Next, the exposed dry film is developed in accordance with the conditions, and the portion corresponding to the repeated basic pattern portion constituting the chamfering of the dry film on the metal material side is subjected to the development treatment and then etched in a ferric chloride solution. After the etching of SUS304 in the portion corresponding to the repeated basic pattern portion forming the chamfer was completed, the dry film remaining on both surfaces was peeled off according to the conditions to manufacture a printing plate.

The printing plate produced in this manner was placed on an aluminum frame having an outer size of 550 × 650 mm and made of polyester mesh having a 180 mesh tension of 1.0 mm (using a tension gauge STG-75B (Protec)). It was affixed via the so that it could be set on the cream solder printing machine.

Also in the case of Example 2, the heat treatment method for metal / plastic / hybrid material (Japanese Patent Application No. 2001-314505) previously proposed by the inventors was not adopted.
Also in the case of Embodiment 2, the most distant distance in the vertical and horizontal directions in the opening pattern group in the repeating basic pattern portion forming the chamfer of the printing plate is 100.
Since it is 50 micrometers, the creep amount one week after tension is applied to the four sides of the printing plate using the material without heat treatment is a two-dimensional length measuring machine (TDS manufactured by Topro Tech Co., Ltd.
The result of measurement using 7055EX was 0.05%, which was 5 μm, but it was 2.5 μm on one side from the center of the opening pattern group, and within 2% for a pitch of 150 μm, it was practical. There was no problem at all.

Also in the case of Example 2, as in the case of Example 1, the distance between the reference marks of the printing plate one week after the tension was applied was measured by a two-dimensional length measuring machine (manufactured by Topro Tech Co., Ltd.). As a result of measurement using the product name TDS7055EX), the size was increased by 20 micrometers, but this was 10 micrometers on one side from the center, and it was possible to reduce the effect of the creep phenomenon to a level where there was no practical problem. confirmed.

[Example-3] As a printing plate material, an aromatic polyimide material having an outer dimension of 500 mm square and a thickness of 5 of Upilex VT manufactured by Ube Industries, Ltd.
Product name SU with SUS304 of the same external dimensions with a thickness of 40 micrometers attached to one side of 0 micrometers
An S-tight VT board was used.

Next, using a laminator, a film-shaped photosensitive material (dry film) 371Y manufactured by Nichigo Morton Co., Ltd. having a thickness of 25 μm on the metal material side, which is the squeegee side as a printing plate of this material, was used. Laminated according to.

Then, on this dry film, a diameter of 150 which surrounds the repeating basic pattern group forming the chamfer is formed.
Inside the perimeter of a millimeter circle, and 250 x 250
270 x outside the perimeter of the millimeter printing plate
The four corners of the 270 mm square, which were used for alignment in the laser processing later, were made 1 mm in diameter and were made black so as not to transmit ultraviolet rays, and other parts were made transparent, and exposed according to the conditions. .

Next, the exposed dry film is developed according to the conditions, and a portion corresponding to the inside of the outer peripheral line of a circle having a diameter of 150 mm surrounding a repeating basic pattern group forming a chamfer, and alignment for laser processing. After developing the dry film of the part, it is etched in ferric chloride solution, and the part corresponding to the inside of the outer circumference of the circle of 150 mm in diameter that surrounds the repeating basic pattern group forming the chamfer, and for laser processing After the etching of the laminated nickel and copper in the portion corresponding to the position alignment portion, the dry film was peeled off according to the conditions.

Then, using the needle-shaped material from the metal material side as a guide, the through hole is formed in the aromatic polyimide material using the etched metal layer of the portion corresponding to the laser processing alignment portion of the material in the above state. Processed.

Next, the printing plate material in the above-mentioned state was treated with a wavelength of 35
A UV-YAG laser beam machine with a beam diameter of 25 nanometers of 5 nanometers was set so that the laser beam could be irradiated from the aromatic polyimide material side,
Positioning is performed using a positioning pattern for laser processing that is created outside the outer periphery of the printing plate, and a circle with a diameter of 90 μm is formed after opening processing for all openings in the form shown in FIGS. 10 and 11. Thus, the pitch was 150 μm, all the openings were punched through the aromatic polyimide material in a one-stroke manner in consideration of the beam diameter. Also, the part corresponding to the reference mark has two midpoints on two diagonal lines of a quadrangle that forms a printing plate of 250 × 250 mm on the outer periphery of the printing plate, and the center point is 200 mm after the opening. In consideration of the beam diameter so that it becomes a circle with a diameter of 1 mm, the inside of the printing plate is perforated at two diagonal points from the aromatic polyimide material to the metal material in a single stroke. The line has 250 x 2 perimeter
In consideration of the beam diameter, the outer side was perforated from the aromatic polyimide material to the metal material in a single-stroke writing manner so as to be 50 mm.

Next, the material, which has been subjected to the necessary penetration processing, is taken out from the laser processing machine, and is a portion outside the outer peripheral line of the printing plate, which is unnecessary as a printing plate, and a portion of the repeating basic pattern part which constitutes chamfering. The unnecessary portion remaining in the opening and the unnecessary portion remaining in the reference mark in the outer peripheral portion of the printing plate were removed to manufacture a printing plate having a plane dimension of 250 mm × 250 mm.

The printing plate produced in this manner was placed in an aluminum frame having an outer size of 550 × 650 mm and made of polyester mesh having a 180-mesh tension of 1.0 mm (using a tension gauge STG-75B (Protec)). It was affixed via the so that it could be set on the cream solder printing machine.

In the case of the printing plate based on Example 3, the heat treatment method of metal / plastic / hybrid material previously proposed by the inventors (Japanese Patent Application No. 2001-314505) was not adopted. The maximum distance in the vertical and horizontal directions among the opening pattern groups in the repeating basic pattern portion that constitutes the chamfer of this printing plate is 140 mm (140,
000 μm), but a metal layer having a diameter of 150 mm surrounds a group of repeating basic patterns forming a chamfer, so that tension is applied to four sides of a printing plate using a material without heat treatment. The creep amount one week later was measured with a two-dimensional length measuring machine (TDS7055EX, manufactured by Topro Tech Co., Ltd.), and the result was 0.05.
%, Which was about 70 μm, but when viewed from the center of the repeating pattern group, it was 35 μm on one side, and within a pitch of 150 μm between the openings, it was within 25%, and there was no problem in practice. .

Further, in the case of the printing plate based on Example 3,
The distance between the reference marks on the printing plate one week after applying the tension is measured by a two-dimensional length measuring machine (TDS7
As a result of measurement using 055EX), there is an effect that a metallic material is present between the reference marks, and it is saturated at 40 μm, which is 0.02% of the 200 mm distance between the centers, that is, 20 μm on one side of the center. It was confirmed that the creep phenomenon of the aromatic polyimide material could be reduced to a level where there was no practical problem as compared with the case where there is no metal layer having such a shape.

Example 4 A printing plate made of aromatic polyimide material having a thickness of 50 μm and a copper plate having a thickness of 10 μm laminated on one side of Kapton (trade name) manufactured by Toyo Metalizing Co., Ltd. On the copper
A structure in which nickel having a thickness of 30 μm was laminated using an electroforming method (electroforming method) was used.
The planar size of this material was 500 × 500 millimeters.

Next, this material is irradiated at a wavelength of 355 so that a laser beam can be irradiated from the aromatic polyimide material side.
It was set on a UV-YAG laser beam machine having a nanometer beam diameter of 25 micrometers. Next, from the aromatic polyimide material side of this material to the metal material, the repetitive basic pattern portion which forms a chamfer along the outer peripheral line of the printing plate so that the outer peripheral line of the processed printing plate is 250 × 250 mm. The opening 5 of FIG.
In addition, in the form shown in FIG. 11, the diameter of the opening in the repeating basic pattern portion forming the chamfer after the opening processing is 90 μm, along the outer peripheral line of the opening in the repeating basic pattern portion forming the chamfer at a pitch of 150 μm. And the reference mark 4 to be created in the outer periphery of the printing plate is 2
The outer circumference of the fiducial mark is such that the midpoints are aligned with two points on one diagonal of a quadrangle forming a printing plate of 50 × 250 mm, the center-to-center distance is 200 mm, and the diameter after opening is 1 mm. Penetration processing was performed along the line in a single stroke.

Next, this material was taken out from the UV-YAG processing machine, and a portion outside the outer peripheral line of the printing plate that was unnecessary as a printing plate, a residue in the opening of the repeating basic pattern portion forming the chamfer, and the printing plate Remove the residue in the reference mark on the outer periphery of the
The condition was 250 mm.

Then, a thickness of 2 is applied to both surfaces of the material in this state.
A film-shaped photosensitive material (dry film) having a thickness of 5 micrometers (trade name: 371Y, manufactured by Nichigo Morton Co., Ltd.) was laminated according to the conditions using a laminator.

Next, on the dry film on the metal material side of this material, a circle having a diameter of 150 mm was formed so as to surround the group of repeating basic patterns forming the chamfer, and the portion inside the outer peripheral line of this circle was black that did not transmit ultraviolet rays. Then, after overlapping the films with the other portions transparent and aligning them using the outer peripheral line of the printing plate, double-sided exposure was performed under the conditions using the ultraviolet light source with the aromatic polyimide material side as it was.

Then, the exposed dry film is developed according to the conditions, and the portion inside the circle having a diameter of 150 mm surrounding the repeating basic pattern group forming the chamfering of the dry film on the metal material side is subjected to the development treatment, (2) After etching in an iron solution, etching of SUS304 on the inside of a circle with a diameter of 150 mm that surrounds a group of repeating basic patterns that constitutes chamfering is performed, and the dry film remaining on both sides is peeled off according to the conditions Was manufactured.

The printing plate produced in this manner was placed on an aluminum frame having an outer size of 550 × 650 mm and made of polyester mesh with a 180-mesh tension of 1.0 mm (using a tension gauge STG-75B (Protec)). It was affixed via the so that it could be set on the cream solder printing machine.

Also in the case of Example 4, the heat treatment method of metal / plastic / hybrid material previously proposed by the inventors (Japanese Patent Application No. 2001-314505) was not adopted.
Also in the case of Example 4, the farthest distance between the openings of the repeating basic pattern group forming the chamfer of the printing plate is about 14.
Although it is 0 mm (140,000 μm), a metal layer with a diameter of 150 mm surrounds a group of repeating basic patterns that form a chamfer, so that the four sides of a printing plate using a material without heat treatment The amount of creep one week after the tension was applied was measured by using a two-dimensional length measuring machine (TDS7055EX, manufactured by Topro Tech Co., Ltd.), and it was about 70 μm, which was 0.05%. When viewed from the center of the pattern group, it was 35 μm on one side, and there was no problem in practice for a pitch of 150 μm between the openings.

Also in the case of the printing plate based on Example 4,
The distance between the reference marks on the printing plate one week after applying the tension is measured by a two-dimensional length measuring machine (TDS7
As a result of measurement using 055EX), there is an effect that a metallic material is present between the reference marks, and it is saturated at 40 μm, which is 0.02% of the 200 mm distance between the centers, that is, 20 μm on one side of the center. It was confirmed that the creep phenomenon of the aromatic polyimide material could be reduced to a level at which there was no practical problem as compared with the case where there is no metal layer having such a shape.

[Comparative Example-1] As a printing plate material, an aromatic polyimide material having an outer dimension of 500 mm square was used, and a thickness 5 of a product name Upilex VT manufactured by Ube Industries, Ltd.
Product name SU with SUS304 of the same external dimensions with a thickness of 30 micrometers attached to one side of 0 micrometers
An S-tight VT board was used.

Next, this material is irradiated at a wavelength of 355 so that a laser beam can be irradiated from the aromatic polyimide material side.
It was set on a UV-YAG laser beam machine having a nanometer beam diameter of 25 micrometers. Then, from the aromatic polyimide material side of this material to the metal material, the peripheral line of the printing plate after processing is 400 mm x 4
Along the outer peripheral line of the printing plate so as to be 80 mm, the openings in the repeating basic pattern portion forming the 3 × 5 chamfers are the same as the openings in the repeating basic pattern portion forming the chamfer after the opening processing. The reference mark 4 formed along the outer peripheral line 14 of the opening of the repeating basic pattern portion and the outer peripheral portion of the printing plate is a repeating basic pattern with a diameter of 100 μm and a pitch of 150 μm. Based on the extension of one diagonal line of the quadrangle circumscribing the group, at two points, one side 125mm from the midpoint of the diagonal line, the center distance is 250mm and the diameter after opening is 1mm. Penetration processing was performed along the outer circumference of the mark in a single stroke.

Next, this material was taken out from the UV-YAG processing machine, and a portion of the printing plate outside the peripheral line of the printing plate was unnecessary, a residue in the opening of the repeating basic pattern portion forming the chamfer, and the printing plate. Remove the residue in the reference mark on the outer periphery of the
The condition was 480 mm.

Then, a thickness of 2 is applied to both surfaces of the material in this state.
A film-shaped photosensitive material (dry film) 371Y manufactured by Nichigo Morton Co., Ltd. having a thickness of 5 micrometers was laminated according to the conditions using a laminator.

Then, on the dry film on the metal material side of this material, the outer circumference of the printing plate was 400 mm ×
The parts inside 15 mm from 480 mm are made black that does not transmit ultraviolet rays, and the other parts are made transparent. After the films are aligned and the outer peripheral line of the printing plate is used for alignment, the aromatic polyimide material side remains as it is. Double-sided exposure was performed according to the conditions using an ultraviolet light source.

Next, the exposed dry film is developed according to the conditions, and after the development processing, the portions corresponding to the inner portions of the outer periphery of the printing plate of the dry film on the metal material side of 400 × 480 millimeters are developed. Etching in ferric chloride solution,
The part S corresponding to the part inside 15 mm from the outer circumference of the printing plate of 400 × 480 mm
After the etching of US304, the dry film remaining on both sides was peeled off according to the conditions to produce a printing plate.

The printing plate produced in this manner was placed on an aluminum frame having an outer size of 550 × 650 mm and made of polyester mesh with a 180-mesh tension of 1.0 mm (using a tension gauge STG-75B (Protec)). It was affixed via the so that it could be set on the cream solder printing machine.

In the case of Comparative Example 1, the longest distance in the vertical and horizontal directions in the opening pattern group in the repeating basic pattern portion forming the chamfer of the printing plate has a distance between the centers of about 206 mm ( Since it is 206,000 μm), the creep amount one week after tension is applied to the four sides of this printing plate was measured using a two-dimensional length measuring machine (TDS7055EX, manufactured by Topro Tech Co., Ltd.). The result was 103 μm, which is 0.05%, which was 52 μm on one side even when viewed from the center of the opening group, which was an amount corresponding to about 35% with respect to the pitch of 150 μm. Therefore, Example 2 in which the arrangement of the openings of the repeating basic pattern portion forming the chamfer is the same and the processing conditions for the materials are the same
It was not a practical level compared to.

In addition, since the distance between the reference marks in Comparative Example 1 is the above-mentioned 250 mm, the creep generated between the reference marks by the aromatic polyimide material one week after the printing plate is tensioned. As a result of measuring with a two-dimensional length measuring machine (trade name TDS7055EX manufactured by Topro Tech Co., Ltd.), the amount was 125 μm, which was 63 μm on one side even when viewed from the center of the repeating pattern group, which was not practical. .

[Comparative Example-2] A printing plate made of aromatic polyimide material having a thickness of 50 μm and a copper plate having a thickness of 10 μm laminated on one side of Kapton, a trade name, manufactured by Toyo Metalizing Co., Ltd. On the copper
The structure was such that nickel having a thickness of 20 micrometers was laminated using an electroforming method (electroforming method).
The planar size of this material was 330 × 330 mm.

Next, using a laminator, a film-shaped photosensitive material (dry film) 371Y manufactured by Nichigo Morton Co., Ltd. having a thickness of 25 μm on the metal material side, which is the squeegee side as a printing plate of this material, was used. Laminated according to.

Then, on the dry film, one side 10 from the outside size of the printing plate of 250 × 250 mm was used.
270mm x 270mm, which is a millimeter larger, is set as the outer peripheral line, and 220mm on the other side is 25mm on one side.
The outer peripheral line of the printing plate (250 × 250 mm square line) on a diagonal line connecting the four corners of the outer peripheral line is transparent and the inner frame of the outer peripheral line is 220 × 250 mm Perimeter line (230 x 2
A film with a circle of 1 mm in diameter that is black that does not transmit ultraviolet rays and black that does not transmit ultraviolet rays on the outside and inside of the outer peripheral line of the printing plate is placed in the center of the intersection of the four corners of the 30 mm square line). Exposure was performed according to the conditions.

Next, the exposed dry film is developed according to the conditions, and the outer periphery of the frame-shaped outer peripheral line (270 × 270 mm square line), and the inner periphery of 220 × 220 mm on the one side 25 mm inside. The inside of the line and the dry film of the part corresponding to the inside of the circle with a diameter of 1 mm provided at the four points of the frame shape are developed, and then etched in a ferric chloride solution, and the outer periphery of the frame shape is etched. Corresponding to the outside of the line, the inside of a 220 × 220 mm inner peripheral line that is 25 mm inside, and the inside of a circle with a diameter of 1 mm provided at the four points in the frame shape,
After etching the stacked nickel and copper, the dry film was stripped according to the conditions.

Next, using the needle-shaped material as a guide, the following UV-YA was prepared by using the holes of four circular metal layers with a diameter of 1 mm formed in the frame-shaped portion on the metal layer side of this material as guides.
A through opening was formed in the aromatic polyimide material to serve as a mark used for alignment for the G laser processing.

Then, for the material in the above state,
Alignment is performed using the alignment mark with a diameter of 1 mm created on each aromatic polyimide material side, and the aromatic polyimide material side is placed on a UV-YAG laser beam machine having a beam diameter of 25 micrometers with a wavelength of 355 nanometers. It is set so that it can be irradiated with a laser beam more, and the pitch is 150 μm so that all the openings become circles with a diameter of 90 μm after processing for opening, as shown in FIGS. 12 and 11. In consideration of the beam diameter, the inside of all the openings was perforated into the aromatic polyimide material in a single stroke. In addition, the portion corresponding to the reference mark is made of an aromatic polyimide material in a single-stroke manner in consideration of the beam diameter so that a circle having a diameter of 1 mm is formed after opening at the position shown in FIG.
Penetration processing was performed at two locations of the diagonal type. Further, the outer peripheral line of the printing plate was perforated from the aromatic polyimide material to the metal material in a single-stroke manner on the outer side in consideration of the beam diameter so that the outer periphery would be 250 × 250 mm.

Next, the above-mentioned material, which has undergone the necessary penetration processing, is taken out from the laser processing machine, and is a portion outside the outer peripheral line of the printing plate, which is unnecessary as a printing plate, and further, in a repeating basic pattern part which constitutes chamfering. The unnecessary portion remaining in the opening and the unnecessary portion remaining in the reference mark in the outer peripheral portion of the printing plate are removed to obtain a plane size of 250 × 2.
A 50 mm printing plate was produced.

The printing plate produced in this manner was placed in an aluminum frame having an outer size of 550 × 650 mm and made of polyester mesh having a 180-mesh tension of 1.0 mm (using a tension gauge STG-75B (Protec)). It was affixed via the so that it could be set on the cream solder printing machine.

The farthest distance in the vertical and horizontal directions in the opening pattern group in the repeating basic pattern portion which constitutes the chamfering of this printing plate is 140 mm (140,0).
The amount of creep after one week after applying tension to the four sides of the printing plate was 0.05% as a result of measurement using a two-dimensional length measuring machine (TDS7055EX, manufactured by Topro Tech Co., Ltd.). It is about 70 μm, which is 3 on one side when viewed from the center of the repeating pattern group.
The amount was 5 μm, which was equivalent to 23% with respect to the pitch between openings of 150 μm.

However, in the case of the printing plate based on Example 3, the distance between the reference marks of the printing plate one week after the tension was applied was measured with a two-dimensional length measuring machine (TDS7055EX, manufactured by Topro Tech Co., Ltd.). As a result of measurement using 100 μm, which corresponds to 0.05% of the distance between the centers of 200 mm, that is, saturation is shown at 50 μm on one side of the center, this value is at a level that cannot be put to practical use. It was

[0105]

According to the present invention, the occurrence of the creep phenomenon caused by the aromatic polyimide material can be limited within the range of the repeating basic pattern portion forming the chamfer, and the creep which directly affects the printing positional accuracy. The amount can be limited to within the distance between the openings in the repeating basic pattern portion that constitutes the chamfer. Further, the presence of the metal material layer between the reference marks can reduce the creep phenomenon caused by the aromatic polyimide material between the reference marks. It is possible to realize the removal property and the plate separation property, and it is possible to realize the high coordinate position accuracy of the opening.

[Brief description of drawings]

FIG. 1 shows a schematic plan view of a printing plate according to claim 1 of the present invention.

FIG. 2 is a schematic cross-sectional view showing a state in which a conventional printing plate is attached to an aluminum frame via a gauze and is drawn line-symmetrically with respect to the center line for convenience.

FIG. 3 is a schematic cross-sectional view in which a state in which the printing plate according to claim 1 of the present invention is attached to an aluminum frame via a gauze is drawn line-symmetrically with respect to a center line for convenience.

FIG. 4 is a schematic plan view showing a state where the printing plate according to claim 1 of the present invention is attached to an aluminum frame via a gauze.

FIG. 5 shows a method for producing a printing plate according to claim 3, wherein the squeegee side of the present invention is made of a metal material and the printed material side is made of an aromatic polyimide material. The figure is a schematic cross-sectional view of the printing plate drawn line-symmetrically with respect to the center line for convenience. (A) A state before processing of a printing plate in which the squeegee side is made of a metal material and the printed material side is made of an aromatic polyimide material. (B) The repetitive basic pattern portion constituting the chamfer and the alignment portion for laser processing outside the peripheral line of the printing plate of the metal material of the above materials were etched by using ultraviolet photolithography and chemical etching techniques. Status. (C) A state in which an alignment pattern for laser processing is mechanically opened in the aromatic polyimide material using the etched metal layer of the alignment portion for laser processing of the above material as a guide. (D) Using the UV-YAG laser from the aromatic polyimide material side after aligning the above materials, the openings in the repeating basic pattern portion forming the chamfer are filled with aromatic polyimide along the outer peripheral line of the opening shape. , The reference mark to be created on the outer peripheral portion of the printing plate is up to the metal material along the outer peripheral line of the opening shape of the reference mark, and the outer peripheral line of the printing plate is up to the metal material along the outer peripheral line. Penetration processed. (E) Printing which is not necessary as a printing plate of the above-mentioned material and is left outside the peripheral line of the printing plate and the island-shaped residue generated in the opening and the reference mark in the repeating basic pattern portion forming the chamfer The plate is a printing plate with unnecessary parts removed.

FIG. 6 shows a method for producing a printing plate according to claim 4, wherein the squeegee side of the present invention is made of a metal material and the printed material side is made of an aromatic polyimide material. The figure is a schematic cross-sectional view of the printing plate drawn line-symmetrically with respect to the center line for convenience. (A) A state before processing of a printing plate in which the squeegee side is a metal material and the printed material side is an aromatic polyimide material. (B) From the aromatic polyimide side, UV-YA
The outer peripheral line of the printing plate has a width necessary for cutting along the outer peripheral line of the printing plate using the G laser to the metal material side, and the opening of the repeating basic pattern portion forming the chamfer is the outer peripheral line of the opening shape. Along the outer peripheral line of the opening shape of the reference mark, the reference marks on the outer peripheral portion other than the repeated basic pattern portion forming the chamfer are all penetrating processed in a single stroke. (C) A portion of the material outside the outer peripheral line of the printing plate, which is unnecessary for the printing plate, a residual substance in the outer peripheral line of the reference mark in the outer peripheral portion, and a repeating basic pattern portion which constitutes chamfering. The state where the residue in the opening is removed. (D) After coating or laminating a photosensitive substance on both surfaces of the metal material surface and the aromatic polyimide material surface of the above material, using a mask corresponding to a repeating basic pattern portion constituting chamfering on the metal material surface side, After aligning the outer peripheral line of the printing plate and using ultraviolet photolithography and chemical etching technology to etch the metal material corresponding to the repeated basic pattern part that constitutes the chamfer, remove the photosensitive substances on both sides of the printing plate. Then, it is in a printed version.

FIG. 7 shows a schematic plan view of a printing plate according to claim 2 of the present invention.

FIG. 8 shows a method for producing a printing plate according to claim 5, wherein the squeegee side of the present invention is made of a metal material and the printed material side is made of an aromatic polyimide material. The figure is a schematic cross-sectional view of the printing plate drawn line-symmetrically with respect to the center line for convenience. (A) A state before processing of a printing plate in which the squeegee side is made of a metal material and the printed material side is made of an aromatic polyimide material. (B) Positioning for laser processing provided on the inner side of the outer peripheral line of a polygon or circle having a shape surrounding a repeating basic pattern group forming a chamfer of the metal material of the above-mentioned material, and a portion which is unnecessary as a printing plate The metal part corresponding to the part used for is removed using ultraviolet photolithography and chemical etching technology. (C) A state in which an alignment pattern for laser processing is mechanically opened in the aromatic polyimide material using the etched metal layer of the alignment portion for laser processing of the above material as a guide. (D) Using the UV-YAG laser from the side of the aromatic polyimide material after alignment of the above-mentioned material, an opening portion inside the outer peripheral line of a polygon or circle surrounding a repeating basic pattern group that constitutes chamfering. Is an aromatic polyimide along the outer peripheral line of the opening, and the reference mark created on the outer side of the outer peripheral line of the polygon or circle that surrounds the repeating basic pattern group forming the chamfer is the outer peripheral line of the reference mark. A state in which the metal material and the outer peripheral line of the printing plate have been processed through the outer peripheral line along the outer peripheral line to the metal material in a single stroke. (E) The island-shaped residue and the chamfer, which are unnecessary as a printing plate of the above-mentioned material, are formed in the opening inside the outer peripheral line of the polygon or the circle surrounding the repeating basic pattern group forming the chamfer. Remove unnecessary parts as island-shaped remnants generated in the reference mark outside the outer peripheral line of the polygon or circle that surrounds the group of repeating basic patterns to be composed and the printing plate remaining outside the outer peripheral line of the printing plate. Printed state.

FIG. 9 shows a method for producing a printing plate according to claim 6, wherein the squeegee side of the present invention is made of a metal material and the printed material side is made of an aromatic polyimide material. The figure is a schematic cross-sectional view of the printing plate drawn line-symmetrically with respect to the center line for convenience. (A) A state before processing of a printing plate in which the squeegee side is a metal material and the printed material side is an aromatic polyimide material. (B) From the aromatic polyimide side, UV-YA
The outer peripheral line of the printing plate has a width required for cutting up to the metal material side using the G laser along the outer peripheral line of the printing plate, and the outer peripheral line of a polygon or a circle that surrounds a repeating basic pattern group that constitutes a chamfer. The inner part of the opening is along the outer peripheral line of the opening shape, and the reference mark on the outer part of the outer peripheral line of the polygon or circle that surrounds the repeating basic pattern group that constitutes the chamfer is the outer peripheral line of the reference mark opening shape. A state where all of them have been pierced according to the procedure of one stroke. (C) It is on the outer side of the outer peripheral line of the printing plate of the above material, and on the outer side of the outer peripheral line of a polygon or circle having a shape surrounding a group of repeating basic patterns forming a chamfer, which is unnecessary for the printing plate. A state in which the residue in the outer circumference of the reference mark and the residue in the opening in the inner part of the outer circumference of the polygon or circle having a shape surrounding the repeating basic pattern group forming the chamfer are removed. (D) After applying or stacking a photosensitive substance on both surfaces of the metallic material surface and the aromatic polyimide material surface of the above material, aligning with the outer peripheral line of the printing plate, and using ultraviolet photolithography and chemical etching technology Then, after etching the metal material corresponding to the inner side of the outer peripheral line of the polygon or circle having the shape of the repeating basic pattern group forming the chamfer, the photosensitive material on both sides of the printing plate is removed to form a printing plate.

FIG. 10 is a plan view of the printing plate used in Examples 3 and 4,
The layout of a repeating basic pattern and a reference mark is shown.

FIG. 11 shows the size and arrangement of openings in the basic patterns used in Examples 3 and 4 and Comparative Example 2.

FIG. 12 is a plan view of a printing plate used in Comparative Example 2, an arrangement diagram of repeating basic patterns and reference marks.

[Explanation of symbols]

1 Repetitive basic pattern part that constitutes the chamfer of the printing plate 2 Part including a divided area other than the repetitive basic pattern part that constitutes the chamfer of the printing plate 3 Outer peripheral part other than the repetitive basic pattern part that constitutes the chamfer of the printing plate 4 Reference Mark 5 Opening in the repeating basic pattern portion that constitutes the chamfer 6 Flat outer peripheral line 7 of the printing plate 7 Aluminum frame 8 Gauze 9 Printing plate 10 Metal material 11 Aromatic polyimide material 12 Alignment mark portion for laser processing 13 Printing plate Cross-sectional outer peripheral line 14 Repetition basic pattern part inner opening outer peripheral line 15 that constitutes a chamfer 15 Reference mark outer peripheral line 16 Polygonal or circular outer peripheral line that surrounds a repeated basic pattern group that constitutes a chamfer

[Reference number] MP020001

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[Procedure amendment]

[Submission date] April 24, 2002 (2002.4.2)
4)

[Procedure Amendment 1]

[Document name to be corrected] Drawing

[Correction target item name] All drawings

[Correction method] Change

[Correction content]

[Figure 1]

[Fig. 2]

[Figure 3]

[Figure 4]

[Fig. 5 (a)]

[Fig. 5 (b)]

[Figure 5 (c)]

[Fig. 5 (d)]

[Figure 5 (e)]

[FIG. 6 (a)]

[FIG. 6 (b)]

[Fig. 6 (c)]

[Fig. 6 (d)]

[Figure 7]

[FIG. 8 (a)]

[FIG. 8 (b)]

[Figure 8 (c)]

[FIG. 8 (d)]

[Figure 8 (e)]

[Fig. 9 (a)]

[FIG. 9 (b)]

[Fig. 9 (c)]

[Fig. 9 (d)]

[Figure 10]

FIG. 11

[Fig. 12]

[Procedure Amendment 2]

[Document name to be amended] Statement

[Name of item to be corrected] Brief description of the drawing

[Correction method] Change

[Correction content]

[Brief description of drawings]

FIG. 1 shows a schematic plan view of a printing plate according to claim 1 of the present invention.

FIG. 2 is a schematic cross-sectional view showing a state in which a conventional printing plate is attached to an aluminum frame via a gauze and is drawn line-symmetrically with respect to the center line for convenience.

FIG. 3 is a schematic cross-sectional view showing a state in which the printing plate according to claim 1 of the present invention is attached to an aluminum frame via a gauze, and is drawn line-symmetrically with respect to a center line for convenience.

FIG. 4 is a schematic plan view showing a state where the printing plate according to claim 1 of the present invention is attached to an aluminum frame via a gauze.

FIG. 5 (a) shows a method for producing a printing plate according to claim 3, wherein the squeegee side of the present invention is made of a metal material and the printed material side is made of an aromatic polyimide material. Note that the following figures are schematic sectional views of the printing plate drawn symmetrically with respect to the center line for convenience. A state before processing of a printing plate in which the squeegee side is made of a metal material and the printed material side is made of an aromatic polyimide material.

FIG. 5 (b) is a view showing an ultraviolet photolithography technique and a chemical etching technique for the repetitive basic pattern portion forming the chamfer and the alignment portion for laser processing outside the outer peripheral line of the printing plate of the metal material of the above materials. State that was etched using.

FIG. 5 (c) shows a state in which an alignment pattern for laser processing is mechanically opened in the aromatic polyimide material using the etched metal layer of the alignment portion for laser processing of the above material as a guide.

FIG. 5 (d): After the above materials are aligned, the openings in the repeating basic pattern portion forming the chamfer are aligned along the outer peripheral line of the opening shape from the aromatic polyimide material side using a UV-YAG laser. Aromatic polyimide is created on the outer periphery of the printing plate.The reference mark is the metal material along the outer peripheral line of the opening shape of the reference mark, and the outer peripheral line of the printing plate is the metal material along the outer peripheral line. Penetration processed as written.

[FIG. 5 (e)] It becomes unnecessary as a printing plate of the above material,
A state where the unnecessary portions are removed by removing unnecessary portions of the island-shaped remnants generated in the openings and the reference marks in the repeating basic pattern portion forming the chamfer and the outer peripheral line of the printing plate.

FIG. 6 (a) shows a method for manufacturing a printing plate according to claim 4, wherein the squeegee side of the present invention is made of a metal material and the printed material side is made of an aromatic polyimide material. Note that the following figures are schematic sectional views of the printing plate drawn symmetrically with respect to the center line for convenience. A state before processing of a printing plate in which the squeegee side is a metal material and the printed material side is an aromatic polyimide material.

FIG. 6 (b) shows that the above-mentioned material is used as U from the aromatic polyimide side.
Using the V-YAG laser to the metal material side, the outer peripheral line of the printing plate has a width required for cutting along the outer peripheral line of the printing plate, and the opening of the repeating basic pattern portion that constitutes the chamfer is the outer periphery of the opening shape. Along the line, the reference marks on the outer peripheral portion other than the repeated basic pattern portion that constitutes the chamfer are all penetrating processed along the outer peripheral line of the opening shape of the reference mark in a single stroke.

FIG. 6 (c) is a portion of the material outside the outer peripheral line of the printing plate, which is unnecessary for the printing plate, a residual material within the outer peripheral line of the reference mark in the outer peripheral portion, and a chamfering repetition. The state in which the residue in the opening of the basic pattern part is removed.

FIG. 6 (d) is a mask corresponding to a repeating basic pattern portion constituting chamfering on the metal material surface side after applying or laminating a photosensitive material on both surfaces of the metal material surface and the aromatic polyimide material surface of the above material. After aligning the outer peripheral line of the printing plate using, and using UV photolithography and chemical etching technology to etch the metal material corresponding to the repeated basic pattern part that constitutes the chamfer, A printing plate in which volatile substances have been removed.

FIG. 7 shows a schematic plan view of a printing plate according to claim 2 of the present invention.

FIG. 8 (a) shows a method for manufacturing a printing plate according to claim 5, wherein the squeegee side of the present invention is made of a metal material and the printed material side is made of an aromatic polyimide material. Note that the following figures are schematic sectional views of the printing plate drawn symmetrically with respect to the center line for convenience. A state before processing of a printing plate in which the squeegee side is made of a metal material and the printed material side is made of an aromatic polyimide material.

FIG. 8 (b) is a laser processing of the metal material of the above-mentioned material, which is provided on the inner side of the outer peripheral line of a polygon or circle having a shape surrounding a repeating basic pattern group forming a chamfer, and on a portion which is unnecessary as a printing plate. The state where the metal part corresponding to the part used for the alignment for use is removed by using ultraviolet photolithography and chemical etching technology.

FIG. 8 (c) shows a state in which an alignment pattern for laser processing is mechanically opened in the aromatic polyimide material using the etched metal layer of the alignment portion for laser processing of the above material as a guide.

FIG. 8 (d): After alignment of the above materials, from the aromatic polyimide material side, using a UV-YAG laser, inside a peripheral line of a polygon or a circle having a shape surrounding a repeating basic pattern group forming a chamfer. The opening of the part is made of aromatic polyimide along the outer peripheral line of the opening, and the reference mark created on the outer side of the outer peripheral line of the polygon or circle that surrounds the repeating basic pattern group forming the chamfer is the outer periphery of the reference mark. A state in which the metal material along the line and the outer peripheral line of the printing plate along the outer peripheral line up to the metal material are penetrated in a single stroke.

FIG. 8 (e): It becomes unnecessary as a printing plate of the above material,
A polygon or circle with a shape that surrounds the repeating basic pattern group that forms the chamfer, or an island-shaped remnant that occurs in the opening inside the outer perimeter of the circle, and a shape that surrounds the repeating basic pattern group that forms the chamfer. A state in which an island-like residue formed in the reference mark outside the outer peripheral line and an unnecessary portion of the printing plate remaining outside the outer peripheral line of the printing plate are removed to form a printing plate.

FIG. 9 (a) shows a method of manufacturing a printing plate according to claim 6, wherein the squeegee side of the present invention is made of a metal material and the printed material side is made of an aromatic polyimide material. Note that the following figures are schematic sectional views of the printing plate drawn symmetrically with respect to the center line for convenience. A state before processing of a printing plate in which the squeegee side is a metal material and the printed material side is an aromatic polyimide material.

FIG. 9 (b): The above-mentioned material is used as U
Using a V-YAG laser to the metal material side, the outer peripheral line of the printing plate has a width necessary for cutting along the outer peripheral line of the printing plate, and a polygonal or circular shape of a shape surrounding a repeating basic pattern group forming a chamfer. The opening on the inner side of the outer peripheral line is along the outer peripheral line of the opening shape, and the reference mark on the outer side of the outer peripheral line of the polygon or circle that surrounds the repeating basic pattern group forming the chamfer is the opening shape of the reference mark. A state in which all of them have been machined through along the perimeter line in a single stroke.

FIG. 9 (c) is a view showing a portion of the material outside the outer peripheral line of the printing plate, which is unnecessary for the printing plate, and a polygonal or circular outer peripheral line of a shape surrounding the repeating basic pattern group forming the chamfer. A state in which the residue in the outer circumference of the reference mark in the outer part and the residue in the opening in the inner part of the outer circumference of the polygon or circle that surrounds the repeating basic pattern group forming the chamfer are removed.

FIG. 9 (d): After applying or stacking a photosensitive substance on both surfaces of the metal material surface and the aromatic polyimide material surface of the above material, alignment is performed with respect to the outer peripheral line of the printing plate, and ultraviolet photolithography and chemical Using etching technology, after etching the metal material corresponding to the inner part of the peripheral line of the polygon or circle that surrounds the repeating basic pattern group that constitutes the chamfer, the photosensitive material on both sides of the printing plate is removed to remove the printing plate. And the state.

FIG. 10 is a plan view of the printing plate used in Examples 3 and 4, showing a layout of repetitive basic patterns and fiducial marks.

FIG. 11 shows the size and arrangement of openings in the basic patterns used in Examples 3 and 4 and Comparative Example 2.

12 is a plan view of a printing plate used in Comparative Example 2, an arrangement diagram of repeating basic patterns and reference marks. FIG.

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Keisuke Sugiyama             1-103-54 Yoshinodai, Kawagoe City, Saitama Prefecture             Within process lab micron (72) Inventor Satoshi Takayanagi             1-103-54 Yoshinodai, Kawagoe City, Saitama Prefecture             Within process lab micron (72) Inventor Toshio Yoshihara             1-103-54 Yoshinodai, Kawagoe City, Saitama Prefecture             Within process lab micron (72) Inventor Yoshihiro Taniguchi             1-103-54 Yoshinodai, Kawagoe City, Saitama Prefecture             Within process lab micron F term (reference) 2H084 AA26 AA30 BB08 BB10 BB13                       CC10                 2H114 AB06 AB09 AB11 AB15 AB22                       BA01 DA53                 5E319 BB05 CD29 GG09 GG15

Claims (6)

[Claims] 1. A cream solder printing plate comprising a metal material on the side of a squeegee and an aromatic polyimide material on the side of the object to be printed on a multi-chamfered substrate, and the printing plate and a repeating basic pattern portion constituting a chamfer, The chamfer is divided into a portion including the divided area other than the repeated basic pattern portion and the outer peripheral portion, and the repeated basic pattern portion constituting the chamfer is composed of an aromatic polyimide material,
The portion including the divided area other than the repeated basic pattern portion forming the chamfer and the outer peripheral portion are made of a metal material and an aromatic polyimide material, and part of this outer peripheral portion and / or other than the repeated basic pattern portion forming the chamfer. By creating fiducial marks in part of the area including the divided areas, the area where the creep phenomenon of the aromatic polyimide material occurs is limited to within the range of the repeated basic pattern part that constitutes chamfering, and at the same time, between fiducial marks. A printing plate characterized by reducing the effect of the creep phenomenon that occurs in the printing plate and improving the coordinate position accuracy of all opening patterns in repeated printing. 2. A cream solder printing plate comprising a metal material on the squeegee side and an aromatic polyimide material on the printed material side for a multi-chamfered substrate, and the printing plate and a repeating basic pattern portion constituting a chamfer. Further, a polygonal shape or a circle or a closed line including a region capable of cream solder printing through an opening for cream solder printing provided in a repeating basic pattern portion forming this chamfer and surrounding a repeating basic pattern group. Of the inner side of the polygon or the circle or the closed line is divided into an outer peripheral portion, and the inner side of the polygon or the circle or the closed line including the repeating basic pattern portion is made of an aromatic polyimide material. The outer peripheral portion is composed of a metal material and an aromatic polyimide material, and a reference mark is formed on a part of the outer peripheral portion. By limiting the creep phenomenon generation area of the aromatic polyimide material within the range of the polygon, the circle, or the part surrounded by the closed line, the influence of the creep phenomenon between the reference marks is reduced. , A printing plate characterized by improving the coordinate position accuracy of all opening patterns against repeated printing. 3. A cream solder printing plate comprising a metal material on the squeegee side and an aromatic polyimide material on the printed material side, and a metal layer of a repeating basic pattern portion which constitutes chamfering of this material, and a peripheral line of the printing plate. A metal layer corresponding to the part used for alignment for laser processing, which is provided on a part of the part that is not required for the outer printing plate,
After removing using photolithography technology and etching technology, mechanically perforating the aromatic polyimide material using the etched metal layer of the alignment portion for laser processing as a guide, and using the opened portion After performing the alignment, using the laser processing technology from the aromatic polyimide material side, the opening in the repeating basic pattern portion that constitutes the chamfer is subjected to through opening processing on the aromatic polyimide material, and the outer peripheral portion of the printing plate is The reference mark part formed in part and / or part of the part including the divided area other than the repeated basic pattern part that constitutes the chamfer has the same shape as the reference mark, and the outer peripheral line of the printing plate is finally cut. A portion corresponding to the required width is processed through through to the metal material layer, and then the printing plate outside the outer peripheral line portion is not suitable. By removing a portion to be a,
The repeated basic pattern portion forming the chamfer is made of an aromatic polyimide material, and the portion including the divided area other than the repeated basic pattern portion forming the chamfer and the outer peripheral portion where the opening of the reference mark is completed and / or the chamfer is formed. The method for producing a printing plate according to claim 1, wherein a portion including a divided region other than the repeating basic pattern portion is made of a metal material and an aromatic polyimide material. 4. In a cream solder printing plate comprising a metal material on the squeegee side and an aromatic polyimide material on the printed material side, a laser processing technique is used from the aromatic polyimide material side so that the outer peripheral line of the printing plate is finally A portion corresponding to the width required for cutting is further formed, and the opening in the repeating basic pattern portion forming the chamfer has the same shape as the opening portion, and / or the repeating basic pattern portion forming the chamfer in a part of the outer peripheral portion. The reference mark formed in a part of the part including the divided areas other than the above is the same shape as the reference mark, through which the metal layer is perforated, and then the part outside the outer peripheral line of the printing plate that is not needed After removing the
The metal layer of the repeating basic pattern portion that constitutes the chamfer again is aligned, and the repeating basic pattern portion constituting the chamfer is composed of an aromatic polyimide material by removing using a photolithography technique and an etching technique. A portion including a divided area other than the repeated basic pattern portion forming the chamfer and an outer peripheral portion where the opening of the reference mark is finished and / or a portion including the divided area other than the repeated basic pattern portion forming the chamfer are made of a metal material. The printing plate manufacturing method according to claim 1, wherein the printing plate is composed of an aromatic polyimide material. 5. A cream solder printing plate comprising a metal material on the squeegee side and an aromatic polyimide material on the printed material side, and an opening for cream solder printing provided in a repeating basic pattern portion constituting chamfering of this material. Through the metal layer inside the polygon or circle or the closed line that has a shape that surrounds the repeating basic pattern group and includes the area where through cream solder printing is possible, and the printing plate outside the outer peripheral line of the printing plate. After removing a metal layer corresponding to a portion used for alignment for laser processing provided in a part of an unnecessary portion by using a photolithography technique and an etching technique, the metal alignment layer for the laser processing is removed. Aromatic polyimide material is mechanically perforated using the etched metal layer as a guide, and the opening is used to align. After performing the alignment, a laser processing technique is used from the aromatic polyimide material side, and the opening in the repeating basic pattern portion forming the chamfer is subjected to through opening processing on the aromatic polyimide material, and one of the outer peripheral portions of the printing plate is processed. The reference mark part formed on the part has the same shape as the reference mark,
The outer peripheral line of the printing plate is subjected to through-opening processing to the metal material layer at the part corresponding to the width finally required for cutting, and then the part outside the outer peripheral line part of the printing plate that is unnecessary for the printing plate is removed. By this, a polygon or a circle or a shape of a shape including a region where cream solder printing is possible through an opening for cream solder printing provided in a repeating basic pattern portion which constitutes a chamfer and surrounding a repeating basic pattern group is formed. The method for producing a printing plate according to claim 2, wherein the inner portion of the line is made of an aromatic polyimide material, and the outer peripheral portion where the opening of the reference mark is finished is made of a metal material and an aromatic polyimide material. 6. A cream solder printing plate comprising a metal material on the squeegee side and an aromatic polyimide material on the printed material side, a laser processing technique is used from the aromatic polyimide material side, and the outer peripheral line of the printing plate is finally made. For the part corresponding to the width required for cutting, the opening in the repeating basic pattern part that further forms the chamfer has the same shape as the opening, and the reference mark formed in part of the outer peripheral part has the same shape as the reference mark. After the penetrating process is performed up to the metal layer, and then the part outside the outer peripheral line of the printing plate that is no longer needed as the printing plate is removed, the cream solder printing opening provided in the repeating basic pattern part that again forms the chamfer Inside of a polygon or circle or a closed line that includes a region through which the cream solder printing is possible and surrounds the repeating basic pattern group. By aligning the metal layer in the area and removing it using photolithography technology and etching technology, cream solder printing can be performed through the cream solder printing opening provided in the repeated basic pattern portion that constitutes the chamfer. The inner part of the polygon or the circle or the closed line which includes the possible area and surrounds the repeating basic pattern group is made of an aromatic polyimide material, and the outer peripheral part where the opening of the reference mark is finished is made of a metal material. The printing plate manufacturing method according to claim 2, wherein the printing plate is composed of an aromatic polyimide material.