JP2003255233A - Laser scan image forming method and laser scan image device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To obtain an image emphasized with a resolution higher than the spot diameter of a laser beam emitted from a laser generation means. <P>SOLUTION: A laser scan image device radiates the emitted laser beam as a minute spot to a sample 14 supported on a sample stage 3 and moves the laser beam in one prescribed direction by an optical scanning means 4 to scan the sample and sequentially moves the sample stage 3 in the direction orthogonal to the scanning direction by a stage driving means 5 and processes a reception signal detected by reception of a reflected beam from the sample 14 to form an image. A scan start control member 32 made of a material having a low light reflectivity is provided in the start position in the scanning direction of the laser beam to the sample 14, and the laser beam is caused to enter and scan the sample 14 from the member position at intervals of a prescribed gap shorter than the spot diameter of the laser beam to detect the reception signal, and reflectivities of the sample at intervals of the prescribed gap are successively operated to generate image data. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser which irradiates a laser beam emitted from a laser generating means on a sample as a minute spot, receives a reflected beam from the sample, detects a received signal and forms an image. The present invention relates to a scanning image forming method and a laser scanning image device, and more particularly, to a laser scanning image forming method and a laser scanning image device for obtaining an image enhanced with a resolution smaller than the spot diameter of the emitted laser beam.

[0002]

2. Description of the Related Art A conventional laser scanning imager of this type, for example, a laser scanning microscope, irradiates a laser beam emitted from a laser generating means onto a sample supported on a sample stage as a minute spot, and an optical scanning means. The minute spot of the laser beam is moved in a predetermined direction by the scanning device to scan the surface of the sample, and the stage driving means sequentially moves the sample stage in the direction orthogonal to the scanning direction to receive the reflected beam from the sample. Then, the received signal detected is processed to form a laser scanning image.

In order to enhance a laser scanning image obtained by such a laser scanning microscope, conventionally, for example, a Laplacian filter is applied to data of adjacent pixel groups by image processing in software. Do the filtering,
The pixel data to be emphasized is obtained by multiplying and summing the pixel data with the surrounding pixels.

[0004]

However, in such a conventional laser scanning imager, the spot diameter of the laser beam emitted from the laser generating means and applied to the sample remains at a predetermined value. Since the image data was obtained by irradiating the sample with the laser beam and the reflected beam from the sample, it was difficult to enhance the image with a resolution smaller than the above-mentioned predetermined spot diameter. Therefore, it is difficult to obtain a high-quality image enhanced with a resolution smaller than the spot diameter of the laser beam.

Therefore, the present invention deals with such a problem and obtains an image emphasized with a resolution finer than the spot diameter of the laser beam emitted from the laser generating means. And a laser scanning imager.

[0006]

In order to achieve the above object, a laser scanning image forming method according to the present invention irradiates a laser beam emitted from a laser generating means as a minute spot on a sample and emits the laser beam. The sample surface is scanned by moving the sample in one predetermined direction, and the sample is sequentially moved in the direction orthogonal to the scanning direction, and the received signal received by the reflected beam from the sample is processed to form an image. In the laser scanning image forming method, the intensity profile of the emitted laser beam is measured at predetermined intervals smaller than the spot diameter, and the laser beam enters and scans the sample at the predetermined intervals to detect the reception signal. Then
The reflectance of the sample at each predetermined interval is sequentially calculated from the detected received signal and the laser beam intensity at each predetermined interval, and the obtained reflectance is used to generate image data.

With such a configuration, the intensity profile of the laser beam emitted from the laser generating means is measured at each predetermined interval smaller than the spot diameter, and the laser beam is made to enter and scan the sample at each predetermined interval. A reception signal is detected, the reflectance of the sample at each predetermined interval is sequentially calculated from the detected reception signal and the laser beam intensity at each predetermined interval, and image data is generated using the calculated reflectance. . This makes it possible to obtain an image emphasized with a resolution finer than the spot diameter of the laser beam emitted from the laser generating means.

Further, the laser scanning image device according to the present invention irradiates the laser beam emitted from the laser generating means as a minute spot on the sample supported on the sample stage, and the laser beam is emitted by the optical scanning means to a predetermined spot. In the same direction to scan the surface of the sample, the stage driving means sequentially moves the sample stage in a direction orthogonal to the scanning direction, receives the reflected beam from the sample, and processes the received signal detected. In a laser scanning image device for forming an image, a scanning start end regulating member made of a material having a low light reflectance is provided at a starting end position in a scanning direction of a laser beam by an optical scanning means with respect to the sample, and the emission is started from this member position. The laser beam enters the sample at a predetermined interval that is smaller than the spot diameter of the laser beam, and the received signal is detected. , In which so as to generate image data by sequentially calculating the reflectivity of the sample for each the predetermined interval.

With such a configuration, the scanning start end regulating member provided at the starting end position in the scanning direction of the laser beam by the optical scanning means changes the scanning direction of the laser beam by the optical scanning means with respect to the sample supported on the sample stage. The starting end position is regulated, the laser beam enters the sample from this member position at a predetermined interval smaller than the spot diameter of the laser beam, scans the sample to detect the received signal, and the reflectance of the sample at each predetermined interval is sequentially calculated. And operates to generate image data. This makes it possible to obtain an image emphasized with a resolution finer than the spot diameter of the laser beam emitted from the laser generating means.

The laser generating means is a semiconductor laser. Further, the optical scanning means applies the laser beam emitted from the laser generating means to the sample with X-ray.
This is a beam deflecting device that scans only in the axial direction. Further, the stage driving means is a Y-axis moving mechanism that moves the sample stage only in the Y-axis direction orthogonal to the scanning of the optical scanning means in the X-axis direction.

Further, the scanning start end regulating member is Y at the starting end position in the X-axis direction for scanning the sample with the laser beam.
It is formed on a plate member extending in the axial direction with a predetermined width. This makes it possible to regulate the starting end position of the laser beam in the scanning direction by the optical scanning means with respect to the sample supported by the sample stage with a simple member.

Further, the scanning start end regulating member is formed on a plate member having a slit extending in a predetermined length in the X axis direction from a starting end position in the X axis direction for scanning the sample with a laser beam. is there. This makes it easy to use
It is possible to regulate the start position of the laser beam in the scanning direction by the optical scanning means with respect to the sample supported by the sample stage, and to limit the reflection of light in the direction orthogonal thereto.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described in detail below with reference to the accompanying drawings. FIG. 1 is a schematic configuration diagram showing an embodiment of a laser scanning image device according to the present invention. This laser scanning image device irradiates a laser beam emitted from a laser generating means onto a sample as a minute spot, receives a reflected beam from the sample, detects a reception signal, and forms an image. This is a separation type laser scanning microscope, and as shown in FIG. 1, a laser generating means 1, a focusing optical system 2, a sample stage 3, an optical scanning means 4, a stage driving means 5, and a light receiving section 6. The image processing section 7 and the display means 8 are provided. Reference numeral 9 indicates an operation input unit.

The laser generating means 1 generates a laser beam by utilizing the light amplification effect of stimulated emission, and is composed of, for example, a semiconductor laser. A laser driver 10 for applying a high voltage to the laser generating means 1 to drive the laser generating means 1 is connected to the laser generating means 1.

A focusing optical system 2 is arranged on the path of the laser beam emitted from the laser generating means 1. The focusing optical system 2 focuses and irradiates a laser beam emitted from the laser generating means 1 as a minute spot on a sample 14 supported by a sample stage 3 which will be described later, and includes a collimator lens 11 and a diaphragm lens 12. , Objective lens 13.

The sample stage 3 supports a sample 14 as an observation target, is formed in a rectangular thin plate shape, for example, and is held on the upper surface of a stage driving means 5 described later.

The optical scanning means 4 emits the laser light from the laser generating means 1 and the focusing optical system 2 causes the sample 14 on the sample stage 3 to move.
Laser beam LB focused and irradiated as a small spot on the
Is moved in a predetermined direction to scan the surface of the sample 14 and is composed of, for example, a beam deflecting device for scanning the sample 14 only in the X-axis direction. This beam deflecting device was previously proposed by the present applicant, and is disclosed in Japanese Patent Laid-Open No. 7-175.
It is preferable to use a semiconductor galvanometer mirror manufactured by using the micromachining technique described in Japanese Patent Application Laid-Open No. 005 and Japanese Patent Application Laid-Open No. 7-218857.

Here, the basic structure of the semiconductor galvanometer mirror will be briefly described. The semiconductor galvanometer mirror is, for example, as shown in FIG. 2, in which the torsion bar 16 and the movable plate 17 supported by the torsion bar 16 are integrally provided in the silicon substrate 15 inside the silicon substrate 15, and the upper surface of the movable plate 17 is provided. Has a plane coil 1 around it
8 is provided, a mirror 19 is provided at substantially the center surrounded by the plane coil 18, and the silicon substrate 15 is placed on a frame-shaped insulating substrate 20. The permanent magnets 21 are arranged on the opposite side surfaces of the silicon substrate 15 so that the N poles and the S poles face each other. Reference numeral 22 indicates an electrode terminal electrically connected to the planar coil 18.

In this semiconductor galvanometer mirror, when an alternating current is passed from the electrode terminal 22 to the plane coil 18, an electromagnetic force acts on both ends of the movable plate 17 according to Fleming's left-hand rule, and the movable plate 17 moves the torsion bar 16. It oscillates periodically in the center in the directions of arrows A and B in the figure. The frequency of the alternating current is the resonance frequency of the semiconductor galvanometer mirror (for example, 1.
If it is set to around 5 kHz, the deflection angle of the movable plate 17 can be increased with a small input. The plane coils 18 and the permanent magnets 21 may have their mounting positions reversed so that the plane coils 18 are provided on the silicon substrate 15 side and the permanent magnets 21 are provided on the movable plate 17 side. Further, in FIG. 1, reference numeral 23 indicates a drive circuit for the semiconductor galvanometer mirror.

With such a semiconductor galvanometer mirror, the laser beam LB emitted from the laser generating means 1 shown in FIG. 1 is reflected to the sample 14 side on the sample stage 3, and the laser beam LB is oscillated by the semiconductor galvanometer mirror. The beam LB is scanned at high speed in the X-axis direction at a frequency of 1.5 kHz, for example.

The stage driving means 5 sequentially moves the sample stage 3 in a direction orthogonal to the scanning direction of the optical scanning means 4. For example, the sample stage 3 is orthogonal to the scanning of the optical scanning means 4 in the X-axis direction. The Y-axis moving mechanism moves only in the Y-axis direction. This Y-axis moving mechanism
A flat plate-shaped Y-axis stage 24 which holds the sample stage 3 on the upper surface and is guided to move only in the Y-axis direction, and a Y-axis stage 24 which is projected from the Y-axis stage 24, for example, is rotated to rotate the Y-axis stage 24. Is formed in a precision machine stage having a Y-axis motor 25 for moving the Y-axis direction and a motor driver 26 for driving the Y-axis motor 25.

The laser beam LB is two-dimensionally scanned on the surface of the sample 14 by the X-axis direction scanning by the optical scanning means 4 and the Y-axis direction movement by the stage driving means 5.

The light receiving section 6 receives a reflected beam of the laser beam LB irradiated on the surface of the sample 14 on the sample stage 3 from the sample 14 via a light receiving lens 27 and detects a received signal. A light receiving element for converting received light into an electric signal and a light receiving amplifier for amplifying a received signal detected by the light receiving element are provided inside.

The image processing unit 7 receives the received signal output from the light receiving unit 6 and processes the received signal to form an image. The image processing unit 7 converts the received received signal into a digital signal A
A / D converter 28, an image memory 29 for recording the image data output from the A / D converter 28, and a D / A converter 30 for converting the image data read from the image memory 29 into an analog signal. A control arithmetic circuit 3 for taking in the image data from the image memory 29, calculating and processing it
1 and.

The display means 8 includes the image processing section 7
The laser scanning image is displayed by inputting the image signal processed in (1) and is composed of, for example, a CRT monitor, a liquid crystal monitor, or the like. In this case, an image signal of, for example, an NTSC system is sent to the display means 8 for television display.

The control arithmetic circuit 3 of the image processing unit 7
An operation input unit 9 is connected to the unit 1 to operate image processing. And this operation input unit 9
For example, a personal computer or the like is used.

Here, in the present invention, the sample 14 is used.
A scanning start end restricting member 32 made of a material having a low light reflectance is provided at a starting end position in the scanning direction of the laser beam LB by the optical scanning means 4. The scanning start end regulating member 32 regulates the starting end position in the scanning direction of the laser beam LB by the optical scanning means 4 with respect to the sample 14 on the sample stage 3, and properly brings out the boundary of the sample 14 to be observed. For example, a black matte coating is applied so that the light reflectance is substantially zero, and it is located at an appropriate position above the sample 14 (for example, 10 to 100 μm).
Degree) is supported.

An example of a specific shape of the scanning start end regulating member 32 is a laser beam L as shown in FIG.
B _{1 to} LB _n are formed on a plate member extending in the Y-axis direction with a predetermined width at the starting end position in the X-axis direction for scanning the sample 14 on the sample stage 3. In this case, in FIG.
The edge portion on the right side of the scanning start end regulating member 32 is the laser beam L.
This is a part that regulates the starting end positions of B _{1 to} LB _{n in} the scanning direction. Since the light reflectance is substantially zero on the left side of the right side edge, the sample 14 appearing on the right side A reflected beam corresponding to the laser beams LB ₁ to LB _n is generated only from this. In the case of this embodiment, the periphery of the sample 14 supported on the sample stage 3 needs to be kept in a dark environment without light.

Another example of the specific shape of the scanning start end regulating member 32 (see reference numeral 32 ') is in the X-axis direction for scanning the sample 14 with the laser beam LB, as shown in FIG. It is formed on a plate member having a slit 33 extending from the starting end position in the X-axis direction by a predetermined length. In this case, in FIG. 4, the left side end portion of the slit 33 in the longitudinal direction serves as a portion that regulates the start end position of the laser beam LB in the scanning direction, and the opposite edge portion in the width direction of the slit 33 is in the Y axis direction. It is a part that regulates the start and end positions.
That is, the scanning of the laser beam LB with respect to the sample 14 by the optical scanning means 4 in the X-axis direction is performed only within the width w of the slit 33 in the longitudinal direction thereof. The width w of the slit 33 is, for example, about 2 μm. In the case of this embodiment, the scanning start end regulating member 3 having a light reflectance of substantially zero around the slit 33.
Since it is 2 ', a reflected beam for the laser beam LB is generated only from the sample 14 appearing in the slit 33.

Next, the operation of the laser scanning image device thus constructed and the laser scanning image forming method will be described with reference to FIGS. First, in FIG.
The laser beam LB emitted from the laser generating means 1 is irradiated onto the sample 14 supported by the sample stage 3 as a minute spot, and the laser beam LB is moved in the X-axis direction by the optical scanning means 4 to move the surface of the sample 14 above. While scanning the sample stage 3, the stage driving means 5 sequentially moves the sample stage 3 in the Y-axis direction orthogonal to the scanning direction to move the sample 1
The operation of receiving the reflected beam from No. 4 to detect the received signal and processing the detected received signal to form an image is performed in the same manner as in the conventional case.

Here, in the present invention, the focusing optical system 2 and the optical scanning means 4 which are emitted from the laser generating means 1 are emitted.
The intensity profile of the laser beam LB irradiated as a minute spot on the sample 14 is measured in advance.
The intensity profile of the laser beam LB has, for example, a Gaussian shape as shown in FIG. 5, and can be measured by a conventionally known laser beam analyzer.

In FIG. 5, the horizontal axis is the spot diameter of the laser beam, the vertical axis is the intensity of the laser beam, the spot diameter is, for example, 10 μm, and the laser beam is provided at predetermined intervals smaller than this spot diameter, for example, at intervals of 2 μm. Is measuring the intensity of. In this case, the intensity of the laser beam is represented by the internal area surrounded by the Gaussian curve, and the intensity of the laser beam measured at intervals of 2 μm for a spot diameter of 10 μm is sequentially measured as m ₁ , m ₂ , m ₃ , m ₄ , m
_Set to ₅ .

Next, in FIG. 1, with respect to the sample 14 on the sample stage 3, the laser scanning means 4 regulates the laser beam LB to the above-mentioned laser beam LB while the scanning start edge regulating member 32 regulates the starting edge position of the laser beam LB in the scanning direction. 2μ for sample 14
An approach scan is performed every m intervals. This state will be described with reference to FIG. FIG. 6 shows a case where a scanning start end regulating member 32 'having the slit 33 shown in FIG. 4 is used as the scanning start end regulating member. The sample 14 is visible in the slit 33, and the reflectance of the sample 14 at intervals of 2 μm is r ₁ , r ₂ , r ₃ , r ₄ , r ₅ , ...

In FIG. 6, at time t0, the laser beam LB ₀ has not yet entered the slit 33 of the scanning start end regulating member 32 '.
Since the reflectance of 2'light is set to substantially zero,
The reflected beam does not enter the light-receiving section 6 shown in (1), and the received signal is zero.

Next, at time t1, the above laser beam L
B ₀ moves by 2 μm and enters the slit 33 as the laser beam LB ₁ for scanning. In this state, the light of the laser beam intensity m ₅ at the head portion of the laser beam LB ₁ irradiates the portion with the reflectance r _{1 on} the _first front side of the sample 14.
At this time, the reception signal S ₁ detected by the light receiving unit 6 by the reflected beam reflected from the corresponding portion of the sample 14 becomes S ₁ = m ₅ r ₁ (1)

Next, at time t2, the above laser beam L
B ₁ further moves by 2 μm and enters the slit 33 as the laser beam LB ₂ for scanning. In this state, the light of the laser beam intensities m ₅ and m ₄ at the head portion and the second portion of the laser beam LB ₂ is the first front side and the second side of the sample 14.
Irradiation is performed on the portions having the second reflectances r ₁ and r ₂ . At this time, the reception signal S ₂ detected by the light receiving unit 6 by the reflected beam reflected from the corresponding portion of the sample 14 becomes S ₂ = m ₅ r ₂ + m ₄ r ₁ (2).

Next, at time t3, the above laser beam L
B ₂ further moves by 2 μm and enters the slit 33 as a laser beam LB ₃ for scanning. In this state, the head portion and the second portion of the laser beam LB ₃ and 3
The light of the laser beam intensities m ₅ , m ₄ , and m _{3 in} the second portion irradiates the first front side, the second, and the third reflectance portions r ₁ , r ₂ , and r ₃ of the sample 14. At this time, the reception signal S ₃ detected by the light receiving unit 6 by the reflected beam reflected from the corresponding portion of the sample 14 becomes S ₃ = m ₅ r ₃ + m ₄ r ₂ + m ₃ r ₁ (3).

Similarly, at time t4, the received signal S
₄ becomes S ₄ = m ₅ r ₄ + m ₄ r ₃ + m ₃ r ₂ + m ₂ r ₁ (4), and the received signal S ₅ at time t ₅ is S ₅ = m ₅ r ₅ + m ₄ r ₄ + m ₃ r ₃ + m ₂ r ₂ + m ₁ r ₁ (5)

In the above equations (1) to (5), the received signals S _{1 to} S ₅ are actually detected values, and the laser beam intensities m _{1 to} m ₅ are as shown in FIG. Since it is a value measured by an analyzer and is known, the reflectance of the sample 14 at intervals of, for example, 2 μm can be obtained by the calculation by the control calculation circuit 31 shown in FIG. r ₁ = S ₁ / m ₅ r ₂ = (S ₂ −m ₄ r ₁ ) / m ₅ r ₃ = (S ₃ −m ₄ r ₂ −m ₃ r ₁ ) / m ₅ r ₄ = (S ₄ − m ₄ r ₃ −m ₃ r ₂ −m ₂ r ₁ ) / m ₅ r ₅ = (S ₅ −m ₄ r ₄ −m ₃ r ₃ −m ₂ r ₂ −m ₁ r ₁ ) / m ₅

By the above arithmetic processing, X of the sample 14
The spot diameter of the laser beam LB in the axial scanning direction (for example, 1
At a predetermined interval (for example, 2 μm) smaller than 0 μm,
The reflectances r _{1 to} r ₅ of the sample 14 are sequentially calculated, and the obtained reflectances r _{1 to} r ₅ can be used to generate image data in the image processing unit 7 shown in FIG. This makes it possible to obtain an image emphasized with a resolution smaller than the spot diameter of the laser beam LB emitted from the laser generating means 1. Then, the obtained image is displayed on the screen of the display means 8.

FIG. 7 is a schematic block diagram showing another embodiment of the laser scanning image device according to the present invention. This embodiment shows a case where it is applied to a confocal type laser scanning microscope. In this embodiment, a beam splitter 34 for separating a laser beam incident on the sample 14 and a laser beam reflected from the sample 14 is provided between the laser generating means 1 and the optical scanning means 4, and the beam splitter 34 is provided. The laser light from is collected by the condenser lens 35 into the light receiving portion 6. Others are the same configurations and operations as the embodiment shown in FIG.

[0042]

Since the present invention is constructed as described above,
According to the laser scanning image forming method of the first aspect, the intensity profile of the laser beam emitted from the laser generating means is measured at predetermined intervals smaller than the spot diameter, and the laser beam is applied to the sample at the predetermined intervals. The incoming signal is detected by entering scanning, the reflectance of the sample at each predetermined interval is sequentially calculated by the detected received signal and the laser beam intensity at each predetermined interval, and the calculated reflectance is used. Image data can be generated. As a result, it is possible to obtain a high-quality image emphasized with a resolution finer than the spot diameter of the laser beam emitted from the laser generator.

Further, according to the laser scanning imager of the second to fifth aspects, the scanning start end regulating member provided at the starting end position in the scanning direction of the laser beam by the optical scanning means is used for the sample supported on the sample stage. The starting position of the scanning direction of the laser beam by the optical scanning means is regulated, and the laser beam enters the sample at predetermined intervals smaller than the spot diameter of the laser beam from this member position to scan the sample to detect the reception signal, Image data can be generated by sequentially calculating the reflectance of the sample at predetermined intervals. This allows
It is possible to obtain a high-quality image emphasized with a resolution smaller than the spot diameter of the laser beam emitted from the laser generating means.

According to the sixth aspect of the present invention, the scanning start end regulating member is a plate member extending in the Y axis direction with a predetermined width at the starting end position in the X axis direction for scanning the sample with the laser beam. With this structure, the start position of the laser beam scanning direction of the optical scanning means with respect to the sample supported by the sample stage can be regulated with a simple member.

Further, according to the invention of claim 7, the scanning start end regulating member is a slit extending from the starting end position in the X axis direction for scanning the sample with the laser beam in the X axis direction by a predetermined length. Since it is formed on the plate member having, the start position of the scanning direction of the laser beam by the optical scanning means with respect to the sample supported by the sample stage is regulated by a simple member, and the reflection of the light in the direction orthogonal thereto is regulated. Can be restricted.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram showing an embodiment of a laser scanning image device according to the present invention.

FIG. 2 is an exploded perspective view showing a basic configuration of a semiconductor galvanometer mirror as a specific example of an optical scanning unit.

FIG. 3 is a plan view showing an example of a specific shape of a scanning start end regulating member.

FIG. 4 is a plan view showing another example of the specific shape of the scanning start end regulating member.

FIG. 5 is a graph showing an intensity profile of a laser beam emitted from a laser generating means.

FIG. 6 is an explanatory diagram showing a state in which a laser scanning unit advances and scans a laser beam onto a sample at a predetermined interval while the scanning starting end regulating member regulates the starting end position of the laser beam in the scanning direction.

FIG. 7 is a schematic configuration diagram showing another embodiment of a laser scanning image device according to the present invention.

[Explanation of symbols]

1 ... Laser generating means 2 ... Focusing optical system 3 ... Sample stage 4 ... Optical scanning means 5 ... Stage driving means 6 ... Light receiving part 7 ... Image processing unit 8 ... Display means 9 ... Operation input section 14 ... Sample 32, 32 '... Scanning start end regulating member 33 ... Slit

Continued front page    F-term (reference) 2H052 AA07 AC15 AC27 AC34 AD19                       AF06 AF21 AF25                 5B047 AA30 BC05 BC09 CA06                 5C072 AA01 BA16 CA06 CA09 CA12                       DA02 DA04 HA02 HA11 HB01                       HB10 NA02 UA06 UA11 VA10                       XA10

Claims (7)

[Claims] 1. A laser beam emitted from a laser generating means is irradiated onto a sample as a minute spot, and the laser beam is moved in a predetermined direction to scan the surface of the sample and a direction orthogonal to the scanning direction. In the laser scanning image forming method, in which a sample is sequentially moved to, a received beam reflected from the sample is received, and a received signal detected is processed to form an image, the intensity profile of the emitted laser beam is determined from its spot diameter. Is also measured at small intervals, the laser beam enters and scans the sample at predetermined intervals to detect the received signal, and the detected received signal and the laser beam intensity at the predetermined interval are used to detect the predetermined interval. A laser scanning image generation method, wherein the reflectance of each sample is sequentially calculated, and image data is generated using the obtained reflectance. 2. A sample supported on a sample stage is irradiated with a laser beam emitted from a laser generating means as a minute spot, and the laser beam is moved in a predetermined direction by an optical scanning means to move the surface of the sample. In a laser scanning image device that forms an image by scanning and moving a sample stage sequentially in a direction orthogonal to the scanning direction by a stage driving means, receiving a reflected beam from the sample and processing a received signal detected A scanning start end regulating member made of a material having a low light reflectance is provided at the starting end position in the scanning direction of the laser beam by the optical scanning means with respect to the sample, and is smaller than the spot diameter of the laser beam emitted from this member position The sample is scanned with the laser beam at every predetermined interval, the received signal is detected, and the reflectance of the sample at each predetermined interval is sequentially calculated. A laser scanning image device characterized in that the image data is generated by using the laser scanning image device. 3. The laser scanning image device according to claim 2, wherein the laser generating means is a semiconductor laser. 4. The laser scanning device according to claim 2, wherein the optical scanning means is a beam deflecting device for scanning the laser beam emitted from the laser generating means with respect to the sample only in the X-axis direction. Imaging device. 5. The laser according to claim 4, wherein the stage driving means is a Y-axis moving mechanism that moves the sample stage only in the Y-axis direction orthogonal to the X-axis direction scanning of the optical scanning means. Scanning imager. 6. The scanning start end regulating member is formed on a plate member extending in the Y axis direction by a predetermined width at a starting end position in the X axis direction for scanning a sample with a laser beam. Item 6. A laser scanning image device according to any one of items 2 to 5. 7. The scanning start end regulating member is formed on a plate member having a slit extending from the starting end position in the X-axis direction for scanning a sample with a laser beam in the X-axis direction by a predetermined length. The laser scanning imager according to claim 2, wherein the laser scanning imager is a laser scanning imager.