JP2003253460A - Surface treated layer for turbo-molecular pump - Google Patents
Surface treated layer for turbo-molecular pumpInfo
- Publication number
- JP2003253460A JP2003253460A JP2002053871A JP2002053871A JP2003253460A JP 2003253460 A JP2003253460 A JP 2003253460A JP 2002053871 A JP2002053871 A JP 2002053871A JP 2002053871 A JP2002053871 A JP 2002053871A JP 2003253460 A JP2003253460 A JP 2003253460A
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- Japan
- Prior art keywords
- molecular pump
- base material
- aluminum
- electroless
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、半導体製造設備の
排気ラインなどにおいて使用されるターボ分子ポンプ用
表面処理層に関する。TECHNICAL FIELD The present invention relates to a surface treatment layer for a turbo molecular pump used in an exhaust line of a semiconductor manufacturing facility.
【０００２】[0002]
【従来の技術】この種のターボ分子ポンプの概略構造を
図３に示す。ターボ分子ポンプは、ケーシング１の上部
に吸気口２、ケーシング１の下部に排気口３を設け、ロ
ータ４に設けた動翼５をケーシング１に設けた静翼６間
の空間内で高速回転させることにより、排気作用を発揮
させて吸気口２側を高真空にするものである。７は駆動
用のモータである。2. Description of the Related Art A schematic structure of a turbo molecular pump of this type is shown in FIG. The turbo molecular pump is provided with an intake port 2 on an upper part of a casing 1 and an exhaust port 3 on a lower part of the casing 1, and rotates a rotor blade 5 provided on a rotor 4 at a high speed in a space between stator blades 6 provided on the casing 1. As a result, the exhaust action is exerted to bring the intake port 2 side to a high vacuum. Reference numeral 7 is a driving motor.
【０００３】このターボ分子ポンプでは通常、翼材とし
て、軽量、低コスト、強度などの面からアルミニウム合
金が用いられている。しかし、アルミニウム合金は、半
導体製造工程で排出される塩素ガスなど腐食性ガス環境
下では著しく腐食するため、優れた耐食処理を表面に施
す必要がある。また、翼材に不可欠なもう一つの条件と
して、熱放射性（放射率）が高いことが挙げられる。そ
の理由は、通常の対流による熱放散を期待できない高真
空下で、ロータの高速回転により発生する大量の熱を放
射で逃がす必要があるからである。In this turbo molecular pump, an aluminum alloy is usually used as a blade material in terms of light weight, low cost, strength and the like. However, since aluminum alloys are significantly corroded in a corrosive gas environment such as chlorine gas discharged in the semiconductor manufacturing process, it is necessary to perform excellent corrosion resistance treatment on the surface. Another condition that is essential for the wing material is that it has high thermal emissivity (emissivity). The reason is that it is necessary to radiate a large amount of heat generated by high-speed rotation of the rotor by radiation under a high vacuum in which heat dissipation due to normal convection cannot be expected.
【０００４】従来、アルミニウム合金よりなるターボ分
子ポンプ用の内部部品の表面処理技術として、以下に示
すような種々のものが知られている。Conventionally, various kinds of surface treatment techniques for internal parts for turbo molecular pumps made of aluminum alloy have been known as follows.
【０００５】（１）基材表面に陽極酸化処理により酸化
皮膜を形成するもの。
（２）基材表面に無電解Ｎｉめっき層を形成するもの。
（３）基材表面に無電解Ｎｉめっき層を形成し、その上
にエポキシ層を形成するもの。
（４）基材表面にセラミック等の微粒子を分散させた無
電解Ｎｉ分散めっき層を形成するもの。
（５）基材表面に無電解黒色Ｎｉめっき層を形成するも
の。(1) An oxide film is formed on the surface of a base material by anodizing treatment. (2) An electroless Ni plating layer is formed on the surface of a base material. (3) A method in which an electroless Ni plating layer is formed on the surface of a base material and an epoxy layer is formed thereon. (4) Forming an electroless Ni-dispersed plating layer in which fine particles such as ceramics are dispersed on the surface of a base material. (5) Forming an electroless black Ni plating layer on the surface of a base material.
【０００６】[0006]
【発明が解決しようとする課題】しかし、上述した
（１）〜（５）の技術のうち、
（１）は、安価で放射率が高いものの、空孔が無数にあ
るため脱ガスが多く耐食性が弱い欠点がある。
（２）は、耐食性は高いものの、放射率が低い欠点があ
る。
（３）は、エポキシ層の付加により、放射率及び耐食性
は高くできるものの、プラズマ環境に弱い欠点がある。
（４）は、放射率及び耐食性は高いものの、コストがか
かる欠点がある。
（５）は、放射率は高いものの、耐食性が劣る欠点があ
る。However, among the techniques (1) to (5) described above, (1) is inexpensive and has a high emissivity, but since it has numerous holes, it is outgassed and corrosion resistant. Has a weak point. Although (2) has high corrosion resistance, it has a drawback that its emissivity is low. In the case of (3), the emissivity and the corrosion resistance can be increased by adding the epoxy layer, but there is a drawback that it is weak in the plasma environment. Although (4) has high emissivity and corrosion resistance, it has the drawback of being costly. Although (5) has a high emissivity, it has a drawback of poor corrosion resistance.
【０００７】このように、上述した従来の技術は一長一
短あり、ターボ分子ポンプ用の内部部品の材料として、
最適な条件を充分満足するまでには至っていなかった。As described above, the conventional technique described above has advantages and disadvantages, and as a material for the internal parts of the turbo-molecular pump,
The optimum conditions were not fully satisfied.
【０００８】本発明は、上記事情を考慮し、高い耐食性
・熱放射性を持つと共に耐プラズマ性も高く、しかも安
価に実現し得るターボ分子ポンプ用表面処理層を提供す
ることを目的とする。In view of the above circumstances, it is an object of the present invention to provide a surface treatment layer for a turbo molecular pump which has high corrosion resistance and thermal radiation properties, high plasma resistance, and can be realized at low cost.
【０００９】[0009]
【課題を解決するための手段】請求項１の発明のターボ
分子ポンプ用表面処理層は、ターボ分子ポンプの内部部
品に形成された表面処理層であって、フッ素化合物及び
ケイフッ化アンモニウムを含む処理液に、アルミニウム
またはアルミニウム合金よりなる基材を浸漬して、７０
〜１００℃の温度範囲で処理することにより、前記基材
表面にフッ素化合物の皮膜を形成してなることを特徴と
する。A surface treatment layer for a turbo molecular pump according to the present invention is a surface treatment layer formed on an internal part of a turbo molecular pump, the treatment comprising a fluorine compound and ammonium silicofluoride. A base material made of aluminum or an aluminum alloy is immersed in the liquid,
It is characterized in that a film of a fluorine compound is formed on the surface of the base material by treating in a temperature range of from ~ 100 ° C.
【００１０】ターボ分子ポンプの内部部品に形成された
表面処理層には、高い耐食性と高い熱放射性を持たせる
ことが必要であるが、アルミニウムまたはアルミニウム
合金よりなる基材の表面に、上記の処理によってフッ素
化合物の皮膜を形成することにより、耐食性と放射率と
を共に高めたターボ分子ポンプ用表面処理層を得ること
ができる。因みに、放射率εは０．７〜０．８程度に設
定することができる。また、上記の皮膜は、厚さを非常
に薄く（約３μｍ）することが可能であり、部品の寸法
変化を少なくできる。従って、予め皮膜厚さを考慮して
基材の寸法設計をする必要がなくなる。また、上記の皮
膜は、ポーラスではないので、反応性ガスに接しても脱
ガスの心配がない。また、酸素プラズマに対する耐久度
も高いし、前述の処理液に浸漬するだけで皮膜形成でき
るから、極めて簡単且つ安価に実現し得る。The surface treatment layer formed on the internal parts of the turbo molecular pump is required to have high corrosion resistance and high heat radiation property. The above treatment is applied to the surface of the base material made of aluminum or aluminum alloy. By forming a film of a fluorine compound by using the above, it is possible to obtain a surface-treated layer for a turbo molecular pump having both improved corrosion resistance and emissivity. Incidentally, the emissivity ε can be set to about 0.7 to 0.8. Further, the above-mentioned film can be made extremely thin (about 3 μm), and the dimensional change of parts can be reduced. Therefore, it is not necessary to design the dimension of the base material in consideration of the film thickness in advance. Further, since the above-mentioned film is not porous, there is no fear of degassing even when it comes into contact with the reactive gas. Further, the durability against oxygen plasma is high, and the film can be formed only by immersing it in the above-mentioned treatment liquid, so that it can be realized extremely easily and inexpensively.
【００１１】請求項２の発明のターボ分子ポンプ用表面
処理層は、ターボ分子ポンプの内部部品に形成された表
面処理層であって、アルミニウムまたはアルミニウム合
金よりなる基材の表面に、無電解Ｎｉめっき層と無電解
黒色Ｎｉめっき層の２層重ねの皮膜を形成してなること
を特徴とする。A surface treatment layer for a turbo molecular pump according to a second aspect of the present invention is a surface treatment layer formed on an internal part of a turbo molecular pump, wherein electroless Ni is formed on the surface of a base material made of aluminum or aluminum alloy. The invention is characterized in that a two-layered film including a plating layer and an electroless black Ni plating layer is formed.
【００１２】ターボ分子ポンプの内部部品に形成された
表面処理層には、高い耐食性と高い熱放射性を持たせる
ことが必要であるが、アルミニウムまたはアルミニウム
合金よりなる基材の表面に、無電解Ｎｉめっき層と無電
解黒色Ｎｉめっき層の２層重ねの皮膜を形成することに
より、耐食性と放射率とを共に高めたターボ分子ポンプ
用表面処理層を得ることができる。この場合は、耐食性
は主に無電解Ｎｉめっき層で受け持ち、熱放射性は無電
解黒色Ｎｉめっき層で受け持つ。即ち、無電解Ｎｉめっ
き層の熱放射率の低さを無電解黒色Ｎｉめっき層が補
い、無電解黒色Ｎｉめっき層の耐食性の低さを無電解Ｎ
ｉめっき層が補うことになり、両者の長所を生かすこと
ができる。また、両層とも金属めっき層であるから、従
来のようにエポキシ樹脂をコーティングした場合と違
い、酸素プラズマ等のプラズマ環境にも強くなる上、安
価なコーティングが可能である。The surface treatment layer formed on the internal parts of the turbo molecular pump is required to have high corrosion resistance and high thermal radiation property. However, the surface of the base material made of aluminum or aluminum alloy is electroless Ni. By forming a two-layer coating of a plating layer and an electroless black Ni plating layer, a surface-treated layer for a turbo molecular pump having both improved corrosion resistance and emissivity can be obtained. In this case, the corrosion resistance is mainly supported by the electroless Ni plating layer, and the heat radiation property is supported by the electroless black Ni plating layer. That is, the low thermal emissivity of the electroless Ni plating layer is supplemented by the electroless black Ni plating layer, and the low corrosion resistance of the electroless black Ni plating layer is compensated by the electroless N.
Since the i-plated layer is supplemented, the advantages of both can be utilized. Further, since both layers are metal plating layers, unlike the conventional case where epoxy resin is coated, it is resistant to a plasma environment such as oxygen plasma and inexpensive coating is possible.
【００１３】[0013]
【発明の実施の形態】以下、本発明の実施形態を図面に
基づいて説明する。実施形態として示す表面処理層は、
半導体製造システムで使用するターボ分子ポンプの動翼
あるいは静翼を構成するものである。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. The surface treatment layer shown as an embodiment is
It constitutes a moving blade or a stationary blade of a turbo molecular pump used in a semiconductor manufacturing system.
【００１４】第１の実施形態として示す表面処理層は、
フッ素化合物及びケイフッ化アンモニウムを含む処理液
（加熱水溶液）に、アルミニウムまたはアルミニウム合
金よりなる基材を浸漬して、７０〜１００℃の温度範囲
で処理することにより、図１に示すように、アルミニウ
ムまたはアルミニウム合金よりなる基材１１の表面にフ
ッ素化合物の皮膜１２を形成してなるものである。The surface treatment layer shown as the first embodiment is
As shown in FIG. 1, by immersing a base material made of aluminum or an aluminum alloy in a treatment liquid (heated aqueous solution) containing a fluorine compound and ammonium silicofluoride and treating it at a temperature range of 70 to 100 ° C. Alternatively, a film 12 of a fluorine compound is formed on the surface of a base material 11 made of an aluminum alloy.
【００１５】ここで使用する処理液（加熱水溶液）とし
ては、水１００重量部に対し、フッ素化合物０．１〜２
０重量部（好ましくは０．２〜１５重量部）、及び、ケ
イフッ化アンモニウム０．０５〜１５重量部（好ましく
は０．１〜１０重量部）を含むものを使用するのがよ
い。また、フッ素化合物としては、ケイフッ化アンモニ
ウム（(ＮＨ4)2ＳｉＦ6 ）を除くフッ素化合物を使用す
るものとし、ケイフッ化塩、特にケイフッ化マグネシウ
ムＭｇＳｉＦ6・６Ｈ2Ｏを用いるのが好ましい。その他
には、ケイフッ化亜鉛（ＺｎＳｉＦ6・６Ｈ2Ｏ）、ケイ
フッ化カリウム（Ｋ2ＳｉＦ6），ケイフッ化ソーダ（Ｎ
ａ2ＳｉＦ6），ケイフッ化マンガン（ＭｎＳｉＦ6・６
Ｈ2Ｏ）等のケイフッ化塩、ホウフッ化塩、フッ化ジル
コニウム塩またはフッ化チタン塩などが挙げられる。こ
れらのフッ素化合物の中でも、ケイフッ化塩が好ましく
用いられ、特にケイフッ化マグネシウム、ケイフッ化マ
ンガン等が好ましく用いられる。As the treatment liquid (heated aqueous solution) used here, 0.1 to 2 fluorine compounds are added to 100 parts by weight of water.
It is preferable to use one containing 0 parts by weight (preferably 0.2 to 15 parts by weight) and 0.05 to 15 parts by weight (preferably 0.1 to 10 parts by weight) of ammonium silicofluoride. Further, as the fluorine compound, and shall use the fluorine compound with the exception of ammonium silicofluoride ((NH 4) 2 SiF 6 ), silicofluoride Casio, in particular to use a magnesium fluorosilicate MgSiF 6 · 6H 2 O preferred. In addition, zinc silicofluoride (ZnSiF 6 · 6H 2 O), potassium silicofluoride (K 2 SiF 6 ), sodium silicofluoride (N
a 2 SiF 6 ), manganese silicofluoride (MnSiF 6・ 6)
Examples thereof include silicofluoride salts such as H 2 O), borofluoride salts, zirconium fluoride salts, and titanium fluoride salts. Among these fluorine compounds, silicofluoride salts are preferably used, and magnesium silicofluoride and manganese silicofluoride are particularly preferably used.
【００１６】このような処理液を用いることによって、
アルミニウムまたはアルミニウム合金の表面に、均一な
薄さの耐食性及び熱放射性に優れた皮膜を形成すること
ができる。因みに、放射率εは０．７〜０．８程度に設
定することができる。また、上記の皮膜は、厚さを非常
に薄く（約３μｍ）することが可能であり、部品の寸法
変化を少なくできる。従って、予め皮膜厚さを考慮して
基材の寸法設計をする必要がなくなる。また、上記の皮
膜は、ポーラスではない（空孔を持たない）ので、反応
性ガスに接しても脱ガスの心配がない。また、酸素プラ
ズマに対する耐久度も高いし、前述の処理液に浸漬する
だけで皮膜形成できるから、極めて簡単且つ安価にター
ボ分子ポンプ用として優れた表面処理層を提供し得る。By using such a treatment liquid,
On the surface of aluminum or aluminum alloy, it is possible to form a uniform thin film having excellent corrosion resistance and heat radiation. Incidentally, the emissivity ε can be set to about 0.7 to 0.8. Further, the above-mentioned film can be made extremely thin (about 3 μm), and the dimensional change of parts can be reduced. Therefore, it is not necessary to design the dimension of the base material in consideration of the film thickness in advance. Further, since the above-mentioned film is not porous (has no pores), there is no fear of degassing even when it comes into contact with the reactive gas. Further, since it has high durability against oxygen plasma and can form a film only by immersing it in the above-mentioned treatment liquid, an excellent surface treatment layer for a turbo molecular pump can be provided very simply and inexpensively.
【００１７】なお、前記処理液において、フッ素化合物
が０．１重量部未満の場合、あるいはケイフッ化アンモ
ニウムが０．０５重量部未満の場合には、反応が遅くな
り、処理時間が長くなってしまうので好ましくない。一
方、フッ素化合物が２０重量部を超える場合、あるいは
ケイフッ化アンモニウムが１５重量部を超える場合に
は、溶解が困難となるため好ましくない。When the amount of the fluorine compound is less than 0.1 part by weight or the amount of ammonium silicofluoride is less than 0.05 part by weight in the treatment liquid, the reaction becomes slow and the treatment time becomes long. It is not preferable. On the other hand, when the amount of the fluorine compound exceeds 20 parts by weight, or when the amount of ammonium silicofluoride exceeds 15 parts by weight, the dissolution becomes difficult, which is not preferable.
【００１８】また、アルミニウムまたはアルミニウム合
金よりなる基材を浸漬する際の処理液の温度は、通常７
０℃〜１００℃の範囲内であり、好ましくは７５℃〜９
９℃の範囲内、より好ましくは８０℃〜９８℃の範囲内
に設定するのが望ましい。処理液の温度が７０℃未満で
あるような温度の低い場合には、反応が遅くなり、処理
時間が長くなってしまうので好ましくない。一方、処理
液の温度が１００℃を超えてしまうような高い温度の場
合には、処理液の蒸発が多くなってしまうので好ましく
ない。処理時間については、成膜反応は約１分間程度で
終了するため、２分間程度の浸漬を行えば、表面処理と
しては十分である。但し、この皮膜は保護作用があるの
で、一旦成膜した後は３０分以上浸漬しておいても何ら
問題は生じない。The temperature of the treatment liquid when the base material made of aluminum or aluminum alloy is immersed is usually 7
Within the range of 0 ° C to 100 ° C, preferably 75 ° C to 9
It is desirable to set the temperature within the range of 9 ° C, more preferably within the range of 80 ° C to 98 ° C. If the temperature of the treatment liquid is lower than 70 ° C., the reaction becomes slow and the treatment time becomes long, which is not preferable. On the other hand, when the temperature of the treatment liquid is high such that it exceeds 100 ° C., the treatment liquid is more likely to be evaporated, which is not preferable. As for the treatment time, the film formation reaction is completed in about 1 minute, so dipping for about 2 minutes is sufficient for surface treatment. However, since this film has a protective effect, there is no problem even if it is immersed for 30 minutes or more after the film is once formed.
【００１９】第２実施形態として示す表面処理層は、図
２に示すように、アルミニウムまたはアルミニウム合金
よりなる基材２１の表面に、無電解Ｎｉめっき層２２と
無電解黒色Ｎｉめっき層２３の２層重ねの皮膜２４を形
成してなるものである。この表面処理層においては、下
地に無電解Ｎｉめっき層２２を形成し、その上に無電解
黒色Ｎｉめっき層２３を形成する。As shown in FIG. 2, the surface treatment layer shown as the second embodiment has two surfaces of an electroless Ni plating layer 22 and an electroless black Ni plating layer 23 on the surface of a base material 21 made of aluminum or an aluminum alloy. It is formed by forming a layered film 24. In this surface treatment layer, an electroless Ni plating layer 22 is formed as a base, and an electroless black Ni plating layer 23 is formed thereon.
【００２０】このようにアルミニウム基材２１の表面
に、無電解Ｎｉめっき層２２と無電解黒色Ｎｉめっき層
２３の２層重ねの皮膜２４を形成することにより、耐食
性と放射率とを共に高めた表面処理層を提供することが
できる。この場合、無電解Ｎｉめっき層２２の熱放射率
の低さを無電解黒色Ｎｉめっき層２３が補い、無電解黒
色Ｎｉめっき層２３の耐食性の低さを無電解Ｎｉめっき
層２２が補うことができるので、両者の長所を生かし
た、耐食性と放射率の高いターボ分子ポンプ用の材料を
得ることができる。また、両層とも金属めっき層である
から、従来のようにエポキシ樹脂をコーティングした場
合と違い、酸素プラズマ等のプラズマ環境にも強くなる
上、安価なコーティングが可能である。By thus forming the two-layer coating 24 of the electroless Ni plating layer 22 and the electroless black Ni plating layer 23 on the surface of the aluminum base material 21, both corrosion resistance and emissivity are improved. A surface treatment layer can be provided. In this case, the low thermal emissivity of the electroless Ni plating layer 22 may be compensated by the electroless black Ni plating layer 23, and the low corrosion resistance of the electroless black Ni plating layer 23 may be compensated by the electroless Ni plating layer 22. Therefore, it is possible to obtain a material for a turbo molecular pump having high corrosion resistance and high emissivity, which makes the best use of the advantages of both. Further, since both layers are metal plating layers, unlike the conventional case where epoxy resin is coated, it is resistant to a plasma environment such as oxygen plasma and inexpensive coating is possible.
【００２１】[0021]
【発明の効果】以上説明したように、請求項１の発明の
ターボ分子ポンプ用表面処理層は、フッ素化合物及びケ
イフッ化アンモニウムを含む処理液に、アルミニウムま
たはアルミニウム合金よりなる基材を浸漬して、７０〜
１００℃の温度範囲で処理することにより、前記基材表
面にフッ素化合物の皮膜を形成してなるものであるた
め、耐食性と放射率とを共に高めることができる。しか
も、前記の皮膜を薄くできるので、部品の寸法変化を少
なくでき、予め皮膜厚さを考慮して基材の寸法設計をす
る必要がなくなる。また、前記の皮膜はポーラスではな
いので、反応性ガスに接しても脱ガスの心配がない。ま
た、酸素プラズマに対する耐久度も高いし、前述の処理
液に浸漬するだけで皮膜形成できるから、極めて簡単且
つ安価に実現し得る利点がある。As described above, the surface treatment layer for a turbo molecular pump according to the invention of claim 1 is obtained by immersing a base material made of aluminum or an aluminum alloy in a treatment liquid containing a fluorine compound and ammonium silicofluoride. , 70-
Since the film of the fluorine compound is formed on the surface of the base material by treating in the temperature range of 100 ° C., both the corrosion resistance and the emissivity can be enhanced. In addition, since the film can be made thin, the dimensional change of parts can be reduced, and it is not necessary to design the size of the base material in consideration of the film thickness in advance. Further, since the above-mentioned film is not porous, there is no fear of degassing even if it comes into contact with the reactive gas. Further, the durability against oxygen plasma is high and the film can be formed only by immersing it in the above-mentioned treatment liquid, so that there is an advantage that it can be realized extremely easily and inexpensively.
【００２２】請求項２の発明のターボ分子ポンプ用表面
処理層は、アルミニウムまたはアルミニウム合金よりな
る基材の表面に、無電解Ｎｉめっき層と無電解黒色Ｎｉ
めっき層の２層重ねの皮膜を形成してなるものであるた
め、耐食性と放射率とを共に高めることができる。ま
た、両層とも金属めっき層であるから、酸素プラズマ等
のプラズマ環境にも強くなる上、安価なコーティングが
可能である。The surface treatment layer for a turbo molecular pump according to the second aspect of the present invention comprises an electroless Ni plating layer and an electroless black Ni on the surface of a base material made of aluminum or an aluminum alloy.
Since the coating is formed by stacking two layers of plating layers, both corrosion resistance and emissivity can be improved. Further, since both layers are metal plating layers, they are resistant to a plasma environment such as oxygen plasma and inexpensive coating is possible.
【図１】 本発明の第１実施形態の表面処理層の拡大断
面図である。FIG. 1 is an enlarged cross-sectional view of a surface treatment layer according to a first embodiment of the present invention.
【図２】 本発明の第２実施形態の表面処理層の拡大断
面図である。FIG. 2 is an enlarged cross-sectional view of a surface treatment layer according to a second embodiment of the present invention.
【図３】 ターボ分子ポンプの概略構成図である。FIG. 3 is a schematic configuration diagram of a turbo molecular pump.
１１，２１ アルミニウムまたはアルミニウム合金より
なる基材
１２ フッ素化合物の皮膜
２２ 無電解Ｎｉめっき層
２３ 無電解黒色Ｎｉめっき層
２４ ２層重ねの皮膜11, 21 Base material made of aluminum or aluminum alloy 12 Fluorine compound film 22 Electroless Ni plating layer 23 Electroless black Ni plating layer 24 Two-layered film
Claims (2)
た表面処理層であって、フッ素化合物及びケイフッ化ア
ンモニウムを含む処理液に、アルミニウムまたはアルミ
ニウム合金よりなる基材を浸漬して、７０〜１００℃の
温度範囲で処理することにより、前記基材表面にフッ素
化合物の皮膜を形成してなることを特徴とするターボ分
子ポンプ用表面処理層。1. A surface treatment layer formed on an internal part of a turbo molecular pump, wherein a base material made of aluminum or an aluminum alloy is dipped in a treatment liquid containing a fluorine compound and ammonium silicofluoride to form 70 to 100. A surface-treated layer for a turbo molecular pump, characterized in that a film of a fluorine compound is formed on the surface of the base material by treating in a temperature range of ° C.
た表面処理層であって、アルミニウムまたはアルミニウ
ム合金よりなる基材の表面に、無電解Ｎｉめっき層と無
電解黒色Ｎｉめっき層の２層重ねの皮膜を形成してなる
ことを特徴とするターボ分子ポンプ用表面処理層。2. A surface treatment layer formed on an internal part of a turbo molecular pump, wherein two layers of an electroless Ni plating layer and an electroless black Ni plating layer are laminated on the surface of a base material made of aluminum or an aluminum alloy. A surface treatment layer for a turbo molecular pump, which is formed by forming a film of.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002053871A JP3978050B2 (en) | 2002-02-28 | 2002-02-28 | Surface treatment layer for turbo molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002053871A JP3978050B2 (en) | 2002-02-28 | 2002-02-28 | Surface treatment layer for turbo molecular pump |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007120846A Division JP4508208B2 (en) | 2007-05-01 | 2007-05-01 | Surface treatment layer for turbo molecular pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003253460A true JP2003253460A (en) | 2003-09-10 |
| JP3978050B2 JP3978050B2 (en) | 2007-09-19 |
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ID=28665184
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002053871A Expired - Lifetime JP3978050B2 (en) | 2002-02-28 | 2002-02-28 | Surface treatment layer for turbo molecular pump |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112710406A (en) * | 2021-01-19 | 2021-04-27 | 核工业理化工程研究院 | Method for measuring temperature of inner surface of molecular pump |
-
2002
- 2002-02-28 JP JP2002053871A patent/JP3978050B2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112710406A (en) * | 2021-01-19 | 2021-04-27 | 核工业理化工程研究院 | Method for measuring temperature of inner surface of molecular pump |
| CN112710406B (en) * | 2021-01-19 | 2022-07-08 | 核工业理化工程研究院 | Method for measuring temperature of inner surface of molecular pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3978050B2 (en) | 2007-09-19 |
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