JP2003252679A - Ceramic molding and method for producing the same - Google Patents
Ceramic molding and method for producing the sameInfo
- Publication number
- JP2003252679A JP2003252679A JP2002053274A JP2002053274A JP2003252679A JP 2003252679 A JP2003252679 A JP 2003252679A JP 2002053274 A JP2002053274 A JP 2002053274A JP 2002053274 A JP2002053274 A JP 2002053274A JP 2003252679 A JP2003252679 A JP 2003252679A
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- mass
- molded body
- thermal expansion
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- Porous Artificial Stone Or Porous Ceramic Products (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Insulating Materials (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、低熱膨張性と加工
性を兼ね備え、かつ低コスト化が可能なセラミックス成
形体およびその製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic molded body which has both low thermal expansion property and workability and can be manufactured at low cost, and a method for manufacturing the same.
【０００２】[0002]
【従来の技術】近年、半導体製造装置や半導体検査装置
の構成部材として、熱膨張係数が金属シリコンと同等
（３〜４×１０−６／℃）の低熱膨張であり、かつ加工
性に優れるセラミックス成形体が要求されている。2. Description of the Related Art In recent years, ceramics having a low thermal expansion coefficient (3-4 × 10 −6 / ° C.) equivalent to that of metallic silicon and excellent workability as a constituent member of semiconductor manufacturing equipment and semiconductor inspection equipment. Molded bodies are required.
【０００３】従来、知られている加工性が良好な所謂マ
シナブルセラミックス成形体として、マイカ系、ワラス
トナイト系のセラミックス成形体がある。[0003] Conventionally known so-called machinable ceramics molded articles having good workability include mica-based and wollastonite-based ceramics molded articles.
【０００４】上記セラミックス成形体は良好な加工性を
有するが、熱膨張係数が８〜１０×１０−６／℃と大き
い。また、低熱膨張係数が比較的金属シリコンに近く、
かつ加工性を有するセラミックス成形体として窒化硼素
（ＢＮ）系、および窒化アルミニウム（ＡｌＮ）＋窒化
硼素（ＢＮ）の複合体があるが、これらのセラミックス
成形体は非酸化物系であり、原料および製造においての
コストが非常に高い。The above-mentioned ceramic molded body has good workability, but has a large coefficient of thermal expansion of 8 to 10 × 10 -6 / ° C. Also, the low coefficient of thermal expansion is relatively close to that of metallic silicon,
Moreover, there are boron nitride (BN) -based and aluminum nitride (AlN) + boron nitride (BN) composites as ceramics molded bodies having workability. These ceramics molded bodies are non-oxide-based, Manufacturing costs are very high.
【０００５】[0005]
【発明が解決しようとする課題】本発明の目的は、金属
シリコンの熱膨張率に近く、さらに加工性を兼ね備え、
かつ低コスト化が可能な酸化物系の低熱膨張セラミック
ス成形体およびその製造方法を提供することにある。An object of the present invention is to have a coefficient of thermal expansion close to that of metallic silicon and also to have workability.
Another object of the present invention is to provide an oxide-based low thermal expansion ceramics compact capable of cost reduction and a method for producing the same.
【０００６】[0006]
【課題を解決するための手段】上記目的を達成するた
め、請求項１の発明によるセラミックス成形体は、コー
ジライト３０〜９５質量％、珪酸カルシウム５〜７０質
量％、粘土０〜４０質量％の組成物からなり、曲げ強度
が２０〜１００MPa、熱膨張係数が１．０〜５．０×１
０×１０−６／℃であることを要旨とする。In order to achieve the above object, the ceramic molded body according to the invention of claim 1 comprises cordierite of 30 to 95% by mass, calcium silicate of 5 to 70% by mass, and clay of 0 to 40% by mass. Composed of a composition, bending strength of 20 to 100 MPa, thermal expansion coefficient of 1.0 to 5.0 × 1
The gist is that it is 0 × 10 −6 / ° C.
【０００７】請求項２の発明は、請求項１において、珪
酸カルシウムがワラストナイト、トバモライト、ゾノト
ライトの少なくとも一種以上とされていることを要旨と
する。A second aspect of the present invention is based on the first aspect, wherein the calcium silicate is at least one of wollastonite, tobermorite, and xonotlite.
【０００８】請求項３の発明は、請求項１〜２におい
て、組成物原料の平均粒径が１〜１０μｍ、成形体の気
孔率が５〜５０％とされていることを要旨とする。前記
成形体の気孔率については、１０〜４０％とするのが好
ましい。A third aspect of the present invention is characterized in that, in the first and second aspects, the composition raw material has an average particle size of 1 to 10 μm and a molded body has a porosity of 5 to 50%. The porosity of the molded body is preferably 10 to 40%.
【０００９】請求項４の発明によるセラミックス成形体
の製造方法は、コージライト３０〜９５質量％、珪酸カ
ルシウム５〜７０質量％、粘土０〜４０質量％からなる
組成物を成形し、その成形体を９００〜１３００℃で焼
成することを要旨とする。According to a fourth aspect of the present invention, there is provided a method for producing a ceramic molded body, which comprises molding a composition comprising 30 to 95 mass% of cordierite, 5 to 70 mass% of calcium silicate, and 0 to 40 mass% of clay, and molding the composition. The main point is to bake at 900 to 1300 ° C.
【００１０】本発明のセラミックス成形体において、組
成物として使用されるコージライトは、成形体の熱膨張
係数を低下させ、昇温、冷却過程での変形や割れを少な
くするためのものである。その配合量は３０〜９０質量
％が好ましく、さらに好ましくは５０〜８０質量％とす
る。３０質量％未満では熱膨張が大きくなり、９０質量
％を越えると強度不足のため好ましくない。In the ceramic compact of the present invention, cordierite used as a composition is for lowering the coefficient of thermal expansion of the compact and reducing deformation and cracks during the temperature rising and cooling processes. The blending amount thereof is preferably 30 to 90% by mass, more preferably 50 to 80% by mass. If it is less than 30% by mass, thermal expansion becomes large, and if it exceeds 90% by mass, the strength is insufficient, which is not preferable.
【００１１】また、組成物として使用される珪酸カルシ
ウムは、ワラストナイト、トバモライト、ゾノトライト
等があり、強度保持に有効である。その配合量は５〜７
０質量％が好ましく、さらに好ましくは１０〜３０質量
％とする。５質量％未満では加工性不良となり、７０質
量％を越えると熱膨張が大きくなり、好ましくない。Calcium silicate used as a composition includes wollastonite, tobermorite, xonotlite, etc., and is effective for maintaining strength. The blending amount is 5-7
It is preferably 0% by mass, more preferably 10 to 30% by mass. If it is less than 5% by mass, workability becomes poor, and if it exceeds 70% by mass, thermal expansion becomes large, which is not preferable.
【００１２】また、組成物として使用される粘土は、カ
オリナイト系またはムライト系があり、成形時の可塑性
を付与し、焼結性を高めるのに有効である。特に木節粘
土の使用が好ましい。その配合量は０〜４０質量％が好
ましく、さらに好ましくは１０〜３０質量％とする。４
０質量％を越えると熱膨張が大きくなり、好ましくな
い。The clay used as the composition may be a kaolinite type or a mullite type, which is effective in imparting plasticity during molding and enhancing sinterability. It is particularly preferable to use Kibushi clay. The blending amount is preferably 0 to 40% by mass, and more preferably 10 to 30% by mass. Four
If it exceeds 0% by mass, thermal expansion becomes large, which is not preferable.
【００１３】[0013]
【発明の実施の形態】本発明の特に好ましい実施の形態
としては、コージライト６０〜７０質量％、ワラストナ
イト２０〜３０質量％、木節粘土２０〜３０質量％から
なる組成物を原料とし、この原料から成形体を作り、こ
れを所要の温度で焼成処理してセラミックス成形体を構
成する。BEST MODE FOR CARRYING OUT THE INVENTION In a particularly preferred embodiment of the present invention, a composition comprising 60 to 70% by mass of cordierite, 20 to 30% by mass of wollastonite and 20 to 30% by mass of kibushi clay is used as a raw material. Then, a molded body is produced from this raw material, and this is fired at a required temperature to form a ceramic molded body.
【００１４】[0014]
【実施例】下記表１に示す配合で、コージライト、ワラ
ストナイト、木節粘土を混合し、さらに湿式ボールミル
にて８時間粉砕処理し、平均粒径３μｍの混合原料スラ
リーを得た。この原料スラリーにバインダーとしてＰＶ
Ａ（ポリビルアルコール）を１質量％、潤滑剤としてス
テアリン酸を３質量％添加し、スプレードライヤーに
て、平均粒径１００μｍの顆粒を得た。EXAMPLE Cordierite, wollastonite and kibushi clay were mixed according to the formulation shown in Table 1 below, and further pulverized by a wet ball mill for 8 hours to obtain a mixed raw material slurry having an average particle diameter of 3 μm. PV as a binder in this raw material slurry
1% by mass of A (polyvinyl alcohol) and 3% by mass of stearic acid as a lubricant were added, and granules having an average particle size of 100 μm were obtained with a spray dryer.
【００１５】次に上記顆粒を油圧プレスにて一辺３００
ｍｍの正方形サイズの金型を使用し、６００kgf／cm２
の面圧で３０秒間プレスし、タテ・ヨコ３００ｍｍ、厚
さ１０ｍｍの成形体を得た。この成形体を１２００℃、
３時間焼成し、焼成セラミックス成形体を得た。この焼
成セラミックス成形体の物性値を表１に示す。Next, the above granules are pressed 300 times on one side by a hydraulic press.
mm square size mold is used, 600kgf / cm 2
After pressing for 30 seconds under the surface pressure of No. 3, a vertical / horizontal 300 mm-thick molded product having a thickness of 10 mm was obtained. This molded body at 1200 ° C.,
It was fired for 3 hours to obtain a fired ceramic compact. The physical properties of this fired ceramics compact are shown in Table 1.
【００１６】[0016]
【表１】 [Table 1]
【００１７】なお、表１における加工性の測定方法は、
下記条件でドリル加工を行ったときの１秒間当りの加工
速度を示す。
・ドリル刃 ストレートドリル ＪＩＳ４３０１−２
直径：３ｍｍ
材質：ＨＳＳハイス
・ドリル回転数 ２３００rpm
・荷重 ２１００ｇ
上記表１の実施例および比較例の対比から明らかなよう
に、本発明によるセラミックス成形体は、曲げ強度およ
び加工性に優れていることがわかる。特に加工性に優れ
ているのは、高気孔率（高吸水性）に起因している。ま
た、物性値のうちで加工性重視の場合には実施例３の配
合、また強度重視の場合には、実施例７の配合がよい。The method of measuring workability in Table 1 is as follows.
The processing speed per second when drilling under the following conditions is shown. -Drill blade Straight drill JIS4301-2 Diameter: 3 mm Material: HSS high speed-Drill rotation speed 2300 rpm-Load 2100 g As is clear from comparison between the examples and comparative examples in Table 1 above, the ceramic molded body according to the present invention has bending strength. It can be seen that the workability is excellent. Particularly excellent workability is due to the high porosity (high water absorption). Further, among the physical property values, when the workability is important, the composition of Example 3 is preferable, and when the strength is important, the composition of Example 7 is preferable.
【００１８】[0018]
【発明の効果】以上詳述したように、本発明によれば、
金属シリコンの熱膨張率に近く、さらに加工性を兼ね備
え、かつ低コスト化が可能な酸化物系の低熱膨張・セラ
ミックス成形体が得られる。As described in detail above, according to the present invention,
It is possible to obtain an oxide-based low thermal expansion / ceramics molded article which has a thermal expansion coefficient close to that of metallic silicon, has workability, and can be manufactured at low cost.
───────────────────────────────────────────────────── フロントページの続き Ｆターム(参考） 4G019 FA01 FA03 FA15 GA01 4G030 AA07 AA08 AA36 AA37 BA18 BA24 CA01 CA09 GA03 GA04 GA05 GA14 GA16 GA22 GA27 HA05 HA18 HA25 5G303 AA01 AA05 AB12 AB17 CA01 CB01 CB06 CB17 CB30 ─────────────────────────────────────────────────── ─── Continued front page F term (reference) 4G019 FA01 FA03 FA15 GA01 4G030 AA07 AA08 AA36 AA37 BA18 BA24 CA01 CA09 GA03 GA04 GA05 GA14 GA16 GA22 GA27 HA05 HA18 HA25 5G303 AA01 AA05 AB12 AB17 CA01 CB01 CB06 CB17 CB30
Claims (4)
ルシウム５〜７０質量％、粘土０〜４０質量％の組成物
からなり、曲げ強度が２０〜１００MPa、熱膨張係数が
１．０〜５．０×１０×１０−６／℃であることを特徴
とするセラミックス成形体。1. A composition comprising 30 to 95% by mass of cordierite, 5 to 70% by mass of calcium silicate and 0 to 40% by mass of clay, and has a bending strength of 20 to 100 MPa and a thermal expansion coefficient of 1.0 to 5. 0x10x10 < -6 > / (degreeC), The ceramic molded body characterized by the above-mentioned.
モライト、ゾノトライトの少なくとも一種以上とされて
いる請求項１に記載のセラミックス成形体。2. The ceramic molded body according to claim 1, wherein the calcium silicate is at least one of wollastonite, tobermorite, and xonotlite.
る請求項１〜２に記載のセラミックス成形体。3. The ceramic molded body according to claim 1, wherein the molded body has a porosity of 5 to 50%.
ルシウム５〜７０質量％、粘土０〜４０質量％からなる
組成物を成形し、その成形体を９００〜１３００℃で焼
成することを特徴とするセラミックス成形体の製造方
法。4. A composition comprising 30 to 95% by mass of cordierite, 5 to 70% by mass of calcium silicate and 0 to 40% by mass of clay is molded, and the molded body is fired at 900 to 1300 ° C. Method for manufacturing a ceramic molded body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002053274A JP2003252679A (en) | 2002-02-28 | 2002-02-28 | Ceramic molding and method for producing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002053274A JP2003252679A (en) | 2002-02-28 | 2002-02-28 | Ceramic molding and method for producing the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2003252679A true JP2003252679A (en) | 2003-09-10 |
Family
ID=28664744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002053274A Pending JP2003252679A (en) | 2002-02-28 | 2002-02-28 | Ceramic molding and method for producing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003252679A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106977177A (en) * | 2015-09-29 | 2017-07-25 | Toto株式会社 | Base grogs and ceramic wafer |
-
2002
- 2002-02-28 JP JP2002053274A patent/JP2003252679A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106977177A (en) * | 2015-09-29 | 2017-07-25 | Toto株式会社 | Base grogs and ceramic wafer |
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