JP2003243254A - Variable capacitor - Google Patents

Variable capacitor

Info

Publication number
JP2003243254A
JP2003243254A JP2002037379A JP2002037379A JP2003243254A JP 2003243254 A JP2003243254 A JP 2003243254A JP 2002037379 A JP2002037379 A JP 2002037379A JP 2002037379 A JP2002037379 A JP 2002037379A JP 2003243254 A JP2003243254 A JP 2003243254A
Authority
JP
Japan
Prior art keywords
electrode
substrate
movable electrode
movable
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002037379A
Other languages
Japanese (ja)
Inventor
Yasuo Fujii
康生 藤井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP2002037379A priority Critical patent/JP2003243254A/en
Publication of JP2003243254A publication Critical patent/JP2003243254A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H01G5/18Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes due to change in inclination, e.g. by flexing, by spiral wrapping

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To make variation of an electrostatic capacitance of a variable capacitor sufficiently larger and, at the same time, to simplify a control circuit which controls the electrostatic capacitance. <P>SOLUTION: On a substrate 1, a square shallow step 3 is provided and a square deep step 5 is provided at a position which is lower than that of the part 3 by one level. In addition, a mobile electrode 2 is constituted as a cantilever by fixing an electrode pad 2A of the electrode 2 on the fixed end side to a surface 1A of the substrate 1. On the substrate 1, a driving electrode 4 which is extended to the groove bottom 2A of the shallow step 3 from the surface 1A of the substrate 1 is fixed. In addition, a detecting electrode 6 which is extended to a groove bottom 5A of the deep step 5 from the surface 1A of the substrate 1 is also fixed. Thus, an interval W1 between the mobile electrode 2 and the detecting electrode 6 is made wider than that W2 between the mobile electrode 2 and the driving electrode 4. <P>COPYRIGHT: (C)2003,JPO

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、例えば静電容量を
変化させるのに用いて好適な可変容量コンデンサに関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a variable capacitor suitable for use in, for example, changing capacitance.

【0002】[0002]

【従来の技術】一般に、可変容量コンデンサは、基板
と、固定端側が該基板に設けられ自由端側が該基板に対
して垂直方向に変位する可動電極と、該可動電極と対向
する位置で前記基板に設けられ該可動電極の自由端側を
垂直方向に変位させる駆動電極と、該駆動電極よりも前
記可動電極の自由端側に位置して前記基板に設けられ前
記可動電極の自由端側との間の電極間隔に応じて静電容
量が変化する検出電極とから構成されている。
2. Description of the Related Art Generally, a variable capacitance capacitor includes a substrate, a movable electrode whose fixed end is provided on the substrate and whose free end is displaced in a direction perpendicular to the substrate, and the substrate at a position facing the movable electrode. A drive electrode provided on the substrate to displace the free end side of the movable electrode in the vertical direction, and a free electrode side of the movable electrode provided on the substrate located closer to the free end side of the movable electrode than the drive electrode. It is composed of a detection electrode whose electrostatic capacitance changes according to the inter-electrode spacing.

【0003】そして、この可変容量コンデンサは、駆動
電極に電圧を印加することにより、駆動電極と可動電極
との間に静電引力を発生させ、これにより可動電極を駆
動電極に近付く方向へと垂直方向に変位させ、このとき
の可動電極と検出電極との間の電極間隔に応じて該各電
極間に生じる静電容量を変化させる構成としている。
By applying a voltage to the drive electrode, the variable capacitance capacitor generates an electrostatic attractive force between the drive electrode and the movable electrode, thereby vertically moving the movable electrode toward the drive electrode. In this configuration, the electrostatic capacitance generated between the movable electrodes and the detection electrodes is changed in accordance with the electrode spacing between the movable electrodes and the detection electrodes at this time.

【0004】また、他の従来技術には、長方形状からな
る可動電極の長さ方向中間部の両端側を基板に対しトー
ションバネを用いて支持し、基板にはこのトーションバ
ネを挟んで2個の駆動電極を平行に設けると共に、可動
電極と対向する1個の検出電極を設ける構成としたもの
がある(例えば特開平9−153436号公報等)。
In another conventional technique, both ends of the lengthwise intermediate portion of a rectangular movable electrode are supported by a torsion spring on the substrate, and the torsion spring is sandwiched between the two substrates. There is a configuration in which the drive electrodes are provided in parallel and one detection electrode facing the movable electrode is provided (for example, Japanese Patent Laid-Open No. 9-153436).

【0005】そして、この従来技術にあっては、2個の
駆動電極に選択的に電圧を印加することにより、可動電
極をトーションバネを支点として揺動させ、これにより
可動電極と検出電極との間隔を広げたり狭めたりし、こ
れらの電極間の静電容量を変化させるようにしている。
この場合、トーションバネにより可動電極の垂直方向に
対する変位量を十分に大きくでき、検出電極の静電容量
を増やすことができる。
In this prior art, a voltage is selectively applied to the two drive electrodes to swing the movable electrode with a torsion spring as a fulcrum, whereby the movable electrode and the detection electrode are separated. The space between these electrodes is changed by widening or narrowing the space.
In this case, the torsion spring can sufficiently increase the amount of displacement of the movable electrode in the vertical direction, and the capacitance of the detection electrode can be increased.

【0006】[0006]

【発明が解決しようとする課題】ところで、上述した従
来技術では、基板に対して平行におかれた可動電極の自
由端側を駆動電極によって検出電極に近付く方向へと垂
直方向に変位させている。この場合、例えば電極間隔を
初期状態の2/3程度まで小さくしようとすると、可動
電極が静電引力によって駆動電極に吸着され易くなるた
め、単に可動電極を基板に対して変位させるだけでは、
静電容量を十分に変化させることができないという問題
がある。
By the way, in the above-mentioned prior art, the free end side of the movable electrode placed parallel to the substrate is vertically displaced by the drive electrode so as to approach the detection electrode. . In this case, for example, if it is attempted to reduce the electrode interval to about ⅔ of the initial state, the movable electrode is easily attracted to the drive electrode by electrostatic attraction, and therefore, simply displacing the movable electrode with respect to the substrate causes
There is a problem that the capacitance cannot be changed sufficiently.

【0007】また、上述した特開平9−153436号
公報に記載された可変容量コンデンサは、基板上に設け
られた2個の駆動電極に選択的に電圧を印加することに
より可動電極をトーションバネを支点として揺動させ、
可動電極と検出電極との間隔を広げたり狭めたりし、検
出電極の静電容量を変化させる構成としている。
In the variable capacitor disclosed in the above-mentioned Japanese Patent Laid-Open No. 9-153436, the movable electrode is provided with a torsion spring by selectively applying a voltage to the two drive electrodes provided on the substrate. Swing as a fulcrum,
The electrostatic capacitance of the detection electrode is changed by widening or narrowing the gap between the movable electrode and the detection electrode.

【0008】しかし、上述の如く可動電極を揺動させる
場合、2個の駆動電極にそれぞれ別々の電圧を印加する
必要があり、静電容量をコントロールする制御回路が複
雑化するという問題がある。
However, in the case of swinging the movable electrode as described above, it is necessary to apply different voltages to the two drive electrodes, which causes a problem that the control circuit for controlling the electrostatic capacitance becomes complicated.

【0009】本発明は上述した従来技術の問題に鑑みな
されたもので、本発明の目的は、静電容量を十分に大き
く変化させることができると共に、静電容量をコントロ
ールする制御回路を簡略化できるようにした可変容量コ
ンデンサを提供することにある。
The present invention has been made in view of the above-mentioned problems of the prior art, and an object of the present invention is to make it possible to change the capacitance sufficiently large and to simplify the control circuit for controlling the capacitance. It is to provide a variable capacitor that can be used.

【0010】[0010]

【課題を解決するための手段】上述した課題を解決する
ために、本発明による可変容量コンデンサは、基板と、
固定端側が該基板に設けられ自由端側が該基板に対して
垂直方向に変位する可動電極と、該可動電極と対向する
位置で前記基板に設けられ該可動電極の自由端側を垂直
方向に変位させる駆動電極と、該駆動電極よりも前記可
動電極の自由端側に位置して前記基板に設けられ前記可
動電極の自由端側との間の電極間隔に応じて静電容量が
変化する検出電極とにより構成している。
In order to solve the above-mentioned problems, a variable capacitor according to the present invention comprises a substrate,
A movable electrode whose fixed end side is provided on the substrate and whose free end side is displaced in the vertical direction with respect to the substrate, and a free end side of the movable electrode which is provided on the substrate at a position facing the movable electrode and which is displaced vertically A detection electrode whose capacitance changes according to the electrode distance between the drive electrode and the free end side of the movable electrode, which is located closer to the free end side of the movable electrode than the drive electrode. It consists of and.

【0011】そして、請求項1の発明が採用する構成の
特徴は、前記基板と可動電極のうち少なくとも一方の部
材には、前記可動電極と検出電極との間の電極間隔を、
前記可動電極と駆動電極との間の電極間隔よりも大きく
形成する構成としたことにある。
The feature of the configuration adopted by the invention of claim 1 is that at least one of the substrate and the movable electrode has an electrode interval between the movable electrode and the detection electrode.
It is configured to be formed to be larger than the electrode interval between the movable electrode and the drive electrode.

【0012】このように構成したことにより、コンデン
サの初期状態においては、可動電極と検出電極との間の
電極間隔を可動電極と駆動電極との間の電極間隔より大
きく形成でき、駆動電極によって可動電極を変位させる
ときには、これらの電極間隔よりも大きな範囲で可動電
極と検出電極との間の電極間隔を変化させることができ
る。従って、例えば駆動電極と検出電極が同一平面上に
あるものに比較して、可動電極と検出電極との間の静電
容量の変化量を大きく設定できる。
With this configuration, in the initial state of the capacitor, the electrode gap between the movable electrode and the detection electrode can be formed larger than the electrode gap between the movable electrode and the drive electrode, and the capacitor can be moved by the drive electrode. When displacing the electrodes, the electrode spacing between the movable electrode and the detection electrode can be changed in a range larger than these electrode spacings. Therefore, the amount of change in the electrostatic capacitance between the movable electrode and the detection electrode can be set to be larger than that in the case where the drive electrode and the detection electrode are on the same plane.

【0013】また、請求項2の発明は、前記基板のうち
前記可動電極と対向する部位には段差部を設け、前記駆
動電極は基板の表面側に配置し、前記検出電極は前記段
差部側に配設する構成としている。このように構成した
ことにより、段差部により検出電極と可動電極との間の
電極間隔を、駆動電極と可動電極との間の電極間隔をよ
りも大きく設定できる。
According to a second aspect of the present invention, a step portion is provided in a portion of the substrate facing the movable electrode, the drive electrode is disposed on the front surface side of the substrate, and the detection electrode is on the step portion side. It is configured to be installed in. With this configuration, the electrode gap between the detection electrode and the movable electrode and the electrode gap between the drive electrode and the movable electrode can be set larger by the step portion.

【0014】また、請求項3の発明は、基板には浅段差
部と深段差部を設け、浅段差部には駆動電極を設け、深
段差部には検出電極を設ける構成としている。このよう
に構成したことにより、深段差部に設けられた検出電極
と可動電極との間の電極間隔を、浅段差部に設けられた
駆動電極と可動電極との間の電極間隔よりも大きくする
ことができる。
According to the invention of claim 3, the substrate is provided with a shallow step portion and a deep step portion, a drive electrode is provided in the shallow step portion, and a detection electrode is provided in the deep step portion. With this configuration, the electrode spacing between the detection electrode and the movable electrode provided in the deep step portion is made larger than the electrode spacing between the drive electrode and the movable electrode provided in the shallow step portion. be able to.

【0015】さらに、請求項4の発明は、段差部は可動
電極の自由端側に設けられ駆動電極と対向する部位より
も基板から離れる方向に屈曲した屈曲部により構成して
いる。このように構成したことにより、可動電極と検出
電極との間の電極間隔を屈曲部によって可動電極と駆動
電極との間の電極間隔よりも大きく設定できる。
Further, in the invention of claim 4, the step portion is constituted by a bent portion which is provided on the free end side of the movable electrode and is bent in a direction away from the substrate as compared with a portion facing the drive electrode. With this configuration, the electrode gap between the movable electrode and the detection electrode can be set larger than the electrode gap between the movable electrode and the drive electrode by the bent portion.

【0016】[0016]

【発明の実施の形態】以下、本発明の実施の形態による
可変容量コンデンサを図1ないし図8の添付図面に従っ
て詳細に説明する。ここで、図1ないし図4は本発明の
第1の実施の形態を示している。
BEST MODE FOR CARRYING OUT THE INVENTION A variable capacitor according to an embodiment of the present invention will be described in detail below with reference to the accompanying drawings of FIGS. Here, FIGS. 1 to 4 show a first embodiment of the present invention.

【0017】1は本実施の形態に係る基板で、該基板1
は、例えばシリコン材料等の半導体材料、ガラス材料等
の絶縁性材料を用いた四角形状の絶縁基板として形成さ
れ、その表面1Aには後述する浅段差部3、深段差部5
がそれぞれ凹設されている。
Reference numeral 1 is a substrate according to the present embodiment.
Is formed as a quadrangular insulating substrate using a semiconductor material such as a silicon material or an insulating material such as a glass material, and the surface 1A thereof has a shallow step portion 3 and a deep step portion 5 which will be described later.
Are respectively recessed.

【0018】2は基端側が基板1に固定して設けられた
片持ち梁からなる可動電極で、該可動電極2は、例えば
アルミニウム、金等の導電性金属材料を用いた細長な平
板体として形成され、数百μm程度の長さを有してい
る。また、可動電極2は金属単体ではなく、シリコン等
の半導体材料やガラス材料等の絶縁性材料を基体とし
て、駆動電極4、検出電極6と対向させて金属薄膜を成
長したものでもよい。
Reference numeral 2 denotes a movable electrode composed of a cantilever whose base end side is fixed to the substrate 1. The movable electrode 2 is an elongated flat plate made of a conductive metal material such as aluminum or gold. It is formed and has a length of about several hundred μm. Further, the movable electrode 2 is not limited to a single metal, but may be a metal thin film grown by using a semiconductor material such as silicon or an insulating material such as a glass material as a base so as to face the drive electrode 4 and the detection electrode 6.

【0019】そして、可動電極2は、その固定端側(基
端側)が例えばアースに接続された電極パッド2Aとな
り、該電極パッド2Aは基板1の表面1Aに固着されて
いる。また、可動電極2の先端側は、浅段差部3と対向
する自由端2Bとなり、後述の駆動電極4により基板1
に対して垂直方向に変位するものである。
The fixed end side (base end side) of the movable electrode 2 serves as an electrode pad 2A connected to, for example, ground, and the electrode pad 2A is fixed to the surface 1A of the substrate 1. Further, the tip end side of the movable electrode 2 becomes a free end 2B facing the shallow step portion 3, and the substrate 1 is formed by the drive electrode 4 described later.
It is displaced in the vertical direction with respect to.

【0020】3は基板1の表面1Aに設けられた浅段差
部で、該浅段差部3は、図1および図3に示す如く後述
の深段差部5よりも浅底な四角形状の凹窪部として形成
され、溝底3Aを有している。
Reference numeral 3 denotes a shallow stepped portion provided on the surface 1A of the substrate 1. The shallow stepped portion 3 is, as shown in FIG. 1 and FIG. And has a groove bottom 3A.

【0021】4は可動電極2と対向する位置で基板1に
固着して設けられた駆動電極で、該駆動電極4は、アル
ミニウム等の導電性金属材料を用いて細長な長方形状に
形成されている。そして、駆動電極4の先端側は浅段差
部3側に位置して可動電極2と直交して配置されてい
る。このため、駆動電極4は、基端側が基板1の表面1
Aに設けられた電極パッド4Aとなり、先端側4BはL
字状に折曲がって浅段差部3の溝底3Aへと延びてい
る。
Reference numeral 4 denotes a drive electrode fixedly provided on the substrate 1 at a position facing the movable electrode 2. The drive electrode 4 is formed in an elongated rectangular shape using a conductive metal material such as aluminum. There is. The tip end side of the drive electrode 4 is located on the shallow step portion 3 side and is arranged orthogonal to the movable electrode 2. Therefore, the drive electrode 4 has a base end on the surface 1 of the substrate 1.
It becomes the electrode pad 4A provided on A, and the tip side 4B is L
It is bent in a letter shape and extends to the groove bottom 3A of the shallow step portion 3.

【0022】そして、駆動電極4の電極パッド4Aには
外部からの駆動信号が入力され、可動電極2の自由端2
B側との間に静電引力を発生させ、この自由端2B側を
垂直方向に変位させる構成となっている。
A drive signal from the outside is input to the electrode pad 4A of the drive electrode 4, and the free end 2 of the movable electrode 2 is
An electrostatic attractive force is generated between the B side and the free end 2B side to be vertically displaced.

【0023】5は基板1のうち可動電極2の自由端2B
側と対向する部位に設けられた深段差部で、該深段差部
5は、浅段差部3よりも深底な四角形状の凹窪部として
形成され、浅段差部3と連続して配置されている。ま
た、深段差部5は溝底5Aを有している。
Reference numeral 5 is a free end 2B of the movable electrode 2 of the substrate 1.
The deep step portion 5 is formed as a quadrangular concave recess having a deeper depth than the shallow step portion 3, and is arranged continuously with the shallow step portion 3. ing. Further, the deep step portion 5 has a groove bottom 5A.

【0024】6は駆動電極4よりも可動電極2の自由端
2B側に位置して基板1に固着して設けられた検出電極
で、該検出電極6は、アルミニウム等の導電性金属材料
を用いて細長な長方形状に形成されている。そして、検
出電極6の先端側は、可動電極2と直交して配置されて
いる。このため、検出電極6は、基端側が基板1の表面
1Aに設けられた電極パッド6Aとなり、先端側6Bは
L字状に折曲がって深段差部5の溝底5Aまで延びてい
る。
Reference numeral 6 denotes a detection electrode which is located closer to the free end 2B of the movable electrode 2 than the drive electrode 4 and is fixedly provided on the substrate 1. The detection electrode 6 is made of a conductive metal material such as aluminum. It has a long and narrow rectangular shape. The tip end side of the detection electrode 6 is arranged orthogonal to the movable electrode 2. Therefore, the detection electrode 6 has an electrode pad 6A provided on the front surface 1A of the substrate 1 on the base end side, and has a tip end side 6B bent in an L shape to extend to the groove bottom 5A of the deep step portion 5.

【0025】このため、可動電極2と検出電極6との間
の電極間隔W1は、図3に示すように可動電極2と駆動
電極4との間の電極間隔W2よりも大きく設定されてい
る。そして、検出電極6と可動電極2との間の静電容量
は電極間隔W1に応じて変化し、この静電容量を検出信
号として電極パッド6Aから外部に出力するものであ
る。
Therefore, the electrode spacing W1 between the movable electrode 2 and the detection electrode 6 is set to be larger than the electrode spacing W2 between the movable electrode 2 and the drive electrode 4, as shown in FIG. The capacitance between the detection electrode 6 and the movable electrode 2 changes according to the electrode spacing W1, and this capacitance is output to the outside from the electrode pad 6A as a detection signal.

【0026】本実施の形態による可変容量コンデンサ
は、上述の如き構成を有するもので、次にその作動につ
いて説明する。
The variable capacitor according to the present embodiment has the above-mentioned structure, and its operation will be described below.

【0027】まず、駆動電極4の電極パッド4Aに外部
から駆動信号が入力されると、可動電極2と駆動電極4
との間に静電引力が作用し、この静電引力によって引付
けられた可動電極2の自由端2B側が図3に示すように
下方へと弾性変形する。この結果、可動電極2と検出電
極6との間の電極間隔W1が縮小し、これらの間の静電
容量が増大し、この静電容量の変化量を検出信号として
電極パッド6Aから外部に出力する。
First, when a drive signal is externally input to the electrode pad 4A of the drive electrode 4, the movable electrode 2 and the drive electrode 4 are
An electrostatic attractive force acts between and, and the free end 2B side of the movable electrode 2 attracted by this electrostatic attractive force is elastically deformed downward as shown in FIG. As a result, the electrode distance W1 between the movable electrode 2 and the detection electrode 6 is reduced, the electrostatic capacitance between them is increased, and the change amount of this electrostatic capacitance is output to the outside from the electrode pad 6A as a detection signal. To do.

【0028】ここで、本実施の形態では、検出電極6が
設けられた深段差部5を駆動電極4が設けられた浅段差
部3よりも深底に形成することにより、図3に示すよう
に可動電極2と検出電極6との間の電極間隔W1を、可
動電極2と駆動電極4との間の電極間隔W2よりも大き
くする構成としている。
Here, in the present embodiment, the deep step portion 5 provided with the detection electrode 6 is formed deeper than the shallow step portion 3 provided with the drive electrode 4, so that as shown in FIG. In addition, the electrode distance W1 between the movable electrode 2 and the detection electrode 6 is made larger than the electrode distance W2 between the movable electrode 2 and the drive electrode 4.

【0029】このため、駆動電極4に電圧を印加しない
初期状態では、駆動電極4によって可動電極2を変位さ
せるときに、これらの電極間隔W2よりも大きな範囲で
可動電極2と検出電極6との間の電極間隔W1を変化さ
せることができるから、例えば駆動電極4と検出電極6
とが同一平面上にあるものに比較して、静電容量の変化
量(変化幅)を大きく設定できる。
Therefore, in the initial state in which no voltage is applied to the driving electrode 4, when the movable electrode 2 is displaced by the driving electrode 4, the movable electrode 2 and the detection electrode 6 are separated from each other within a range larger than the electrode interval W2. Since the electrode interval W1 between them can be changed, for example, the drive electrode 4 and the detection electrode 6
The change amount (change range) of the capacitance can be set to be larger than that of and on the same plane.

【0030】また、可動電極2を変位させる場合、1個
の駆動電極4に電圧を印加するだけでよく、例えば従来
技術で述べたように2個の駆動電極にそれぞれ別々の電
圧を印加する必要がなくなり、静電容量をコントロール
する制御回路を簡素化することができる。
Further, when displacing the movable electrode 2, it suffices to apply a voltage to one drive electrode 4, and it is necessary to apply a different voltage to each of the two drive electrodes as described in the prior art. Is eliminated, and the control circuit for controlling the capacitance can be simplified.

【0031】次に、図5および図6は本発明の第2の実
施の形態で、本実施の形態の特徴は、可動電極の自由端
側には、可動電極のうち駆動電極と対向する部位よりも
基板から離れる方向に屈曲した屈曲部を設ける構成とし
ている。なお、本実施の形態では、前述した第1の実施
の形態と同一の構成要素に同一の符号を付し、その説明
を省略するものとする。
Next, FIGS. 5 and 6 show a second embodiment of the present invention. The feature of the present embodiment is that the free electrode side of the movable electrode is a portion of the movable electrode facing the drive electrode. In addition, a bent portion that is bent in a direction away from the substrate is provided. In addition, in the present embodiment, the same components as those in the first embodiment described above are designated by the same reference numerals, and the description thereof will be omitted.

【0032】11は本実施の形態に係る基板で、該基板
11の表面11Aには水平な溝底12Aを有する段差部
12が設けられている。
Reference numeral 11 is a substrate according to this embodiment, and a step portion 12 having a horizontal groove bottom 12A is provided on the surface 11A of the substrate 11.

【0033】13は本実施の形態に用いる可動電極で、
該可動電極13についても、第1の実施の形態で述べた
可動電極2とほぼ同様に基端側(固定端)が電極パッド
13Aとなって基板11の表面11Aに固着された片持
ち梁として構成されている。また、可動電極13の先端
側は自由端13Bとなっている。
Reference numeral 13 denotes a movable electrode used in this embodiment,
The movable electrode 13 is also a cantilever which is fixed to the surface 11A of the substrate 11 by forming the electrode pad 13A on the base end side (fixed end) in substantially the same manner as the movable electrode 2 described in the first embodiment. It is configured. Further, the tip side of the movable electrode 13 is a free end 13B.

【0034】しかし、可動電極13の自由端13B側に
は屈曲部13Cが設けられている。このため、可動電極
13は、駆動電極14と対向する部位よりも検出電極1
5と対向する自由端13B側の方が基板11から離れる
方向に配置される。
However, a bent portion 13C is provided on the free end 13B side of the movable electrode 13. For this reason, the movable electrode 13 is located closer to the detection electrode 1 than the portion facing the drive electrode 14.
The side of the free end 13B facing 5 is arranged in a direction away from the substrate 11.

【0035】14は基板11に固着された駆動電極で、
該駆動電極14の先端側14Aは段差部12の溝底12
A上に配置されている。15は駆動電極14と一緒に基
板11に固着された検出電極で、該検出電極15の先端
側15Aは段差部12の溝底12A上で駆動電極14の
先端側14Aと同一平面上に配置されている。
Reference numeral 14 is a drive electrode fixed to the substrate 11,
The tip side 14A of the drive electrode 14 is provided on the groove bottom 12
It is located on A. Reference numeral 15 is a detection electrode fixed to the substrate 11 together with the drive electrode 14, and the tip side 15A of the detection electrode 15 is arranged on the groove bottom 12A of the step portion 12 on the same plane as the tip side 14A of the drive electrode 14. ing.

【0036】かくして、このように構成される本実施の
形態では、可動電極13の自由端13B側に屈曲部13
Cを形成したので、図5に示すように可動電極13と検
出電極15との間の電極間隔W3を可動電極13と駆動
電極14との間の電極間隔W4よりも大きくできる。
Thus, in the present embodiment configured as described above, the bent portion 13 is provided on the free end 13B side of the movable electrode 13.
Since C is formed, the electrode distance W3 between the movable electrode 13 and the detection electrode 15 can be made larger than the electrode distance W4 between the movable electrode 13 and the drive electrode 14 as shown in FIG.

【0037】これにより、駆動電極14に電圧を印加し
ない初期状態では、駆動電極14によって可動電極13
を変位させるときには、これらの電極間隔W4よりも大
きな範囲で可動電極13と検出電極15との間の電極間
隔W3を変化させることができるから、例えば駆動電極
14と検出電極15とが同一平面上にあるものに比較し
て、駆動電極14と検出電極15との間の静電容量の変
化量を大きく設定でき、第1の実施の形態とほぼ同様の
作用効果を得ることができる。
As a result, in the initial state where no voltage is applied to the drive electrode 14, the drive electrode 14 causes the movable electrode 13 to move.
When displacing, the electrode spacing W3 between the movable electrode 13 and the detection electrode 15 can be changed within a range larger than the electrode spacing W4. Therefore, for example, the drive electrode 14 and the detection electrode 15 are on the same plane. Compared with the one described in (1), the amount of change in the electrostatic capacitance between the drive electrode 14 and the detection electrode 15 can be set to be large, and the same operational effect as that of the first embodiment can be obtained.

【0038】次に、図7および図8は本発明の第3の実
施の形態を示し、本実施の形態の特徴は、長方形状から
なる可動電極の長さ方向中間部の両端側を基板に対しト
ーションバネを用いて支持し、基板にはこのトーション
バネを挟んで2個の駆動電極を平行に設けると共に、2
個の可動電極のうち一方の可動電極と平行に並んで1個
の検出電極を設け、検出電極を可動電極よりも一段低い
位置に配置する構成としたことにある。
Next, FIGS. 7 and 8 show a third embodiment of the present invention. The feature of this embodiment is that both ends of the intermediate portion in the length direction of the movable electrode having a rectangular shape are formed on the substrate. On the other hand, a torsion spring is used for supporting, and two drive electrodes are provided in parallel on the substrate with the torsion spring interposed therebetween.
One of the movable electrodes is arranged in parallel with one of the movable electrodes, and one detection electrode is provided, and the detection electrode is arranged at a position one step lower than the movable electrode.

【0039】21は本実施の形態に係る基板で、該基板
21は、後述の駆動電極24が設けられる厚肉部21A
と、検出電極25が設けられる薄肉部21Bとにより構
成され、薄肉部21Bは段差部21Cを介して厚肉部2
1Aよりも一段低い位置に配置されている。
Reference numeral 21 is a substrate according to the present embodiment. The substrate 21 has a thick portion 21A on which a drive electrode 24 described later is provided.
And a thin portion 21B provided with the detection electrode 25. The thin portion 21B is provided with the thick portion 2 through the step portion 21C.
It is located one step lower than 1A.

【0040】22は基板21の厚肉部21A上で揺動可
能に設けられた可動電極で、該可動電極22は略長方形
状の平板部22Aと、クランク状に折曲げられ該平板部
22Aの長さ方向の中間部両側に一体形成された一対の
トーションバネ22B,22Bとにより構成されてい
る。
Reference numeral 22 denotes a movable electrode which is swingably provided on the thick portion 21A of the substrate 21. The movable electrode 22 is a substantially rectangular flat plate portion 22A and the flat electrode portion 22A is bent in a crank shape. It is composed of a pair of torsion springs 22B, 22B integrally formed on both sides of the intermediate portion in the length direction.

【0041】そして、可動電極22は固定端側となるト
ーションバネ22Bが電極パッド23を介して基板21
の厚肉部21A上に固着され、後述の駆動電極24との
間に生じる静電引力により平板部22Aの自由端側22
A1が図8中に示す矢印の方向に揺動するものである。
The movable electrode 22 is provided with a torsion spring 22B on the fixed end side through the electrode pad 23 and the substrate 21.
Of the flat plate portion 22A, which is fixed to the thick portion 21A of the flat plate portion 22A by an electrostatic attractive force generated between the thick electrode portion 21A and the drive electrode 24 described later.
A1 swings in the direction of the arrow shown in FIG.

【0042】24,24は可動電極22のトーションバ
ネ22Bを挟んだ両側に位置して基板21の厚肉部21
A上に設けられた一対の駆動電極で、該駆動電極24に
は選択的に外部からの駆動信号が入力されることにより
可動電極22をトーションバネ22Bを支点として図8
中に示す一点鎖線、二点鎖線の如く揺動させるものであ
る。
Reference numerals 24 and 24 are located on both sides of the movable electrode 22 with the torsion spring 22B interposed therebetween, and the thick portion 21 of the substrate 21 is provided.
With a pair of drive electrodes provided on A, a drive signal is selectively input to the drive electrode 24 from the outside, whereby the movable electrode 22 is supported by the torsion spring 22B as a fulcrum.
It is made to oscillate like the one-dot chain line and two-dot chain line shown inside.

【0043】25は基板21の薄肉部21B上に設けら
れた検出電極で、該検出電極25は、駆動電極24に対
し基板21の段差部21Cを介して一段低い位置に配置
されている。可動電極22と検出電極25との間の電極
間隔W5は、図8に示すように可動電極22と駆動電極
24との間の電極間隔W6よりも大きく設定されてい
る。そして、検出電極25は可動電極22との間の電極
間隔W5に応じて静電容量が変化し、この静電容量を検
出信号として外部に出力するものである。
Reference numeral 25 denotes a detection electrode provided on the thin portion 21B of the substrate 21, and the detection electrode 25 is arranged at a position one step lower than the driving electrode 24 via the step portion 21C of the substrate 21. The electrode distance W5 between the movable electrode 22 and the detection electrode 25 is set larger than the electrode distance W6 between the movable electrode 22 and the drive electrode 24 as shown in FIG. The capacitance of the detection electrode 25 changes according to the electrode distance W5 between the detection electrode 25 and the movable electrode 22, and the capacitance is output to the outside as a detection signal.

【0044】かくして、このように構成される本実施の
形態でも、駆動電極24に電圧を印加しない初期状態で
は、駆動電極24によって可動電極22を変位させると
きには、これらの電極間隔W6よりも大きな範囲で可動
電極22と検出電極25との間の電極間隔W5を変化さ
せることができるから、例えば駆動電極24と検出電極
25とが同一平面上にあるものに比較して、静電容量の
変化量を大きく設定でき、第1の実施の形態とほぼ同様
の作用効果を得ることができる。
Thus, also in the present embodiment having such a configuration, in the initial state where no voltage is applied to the drive electrode 24, when the movable electrode 22 is displaced by the drive electrode 24, a range larger than the electrode interval W6 is provided. Since the electrode distance W5 between the movable electrode 22 and the detection electrode 25 can be changed by, the amount of change in electrostatic capacitance can be compared with that in which the drive electrode 24 and the detection electrode 25 are on the same plane. Can be set to a large value, and substantially the same operational effect as that of the first embodiment can be obtained.

【0045】[0045]

【発明の効果】以上詳述した通り、請求項1の発明によ
れば、基板と可動電極のうち少なくとも一方の部材に
は、前記可動電極と検出電極との間の電極間隔を前記可
動電極と駆動電極との間の電極間隔よりも大きく形成す
る構成としたので、コンデンサの初期状態においては、
例えば駆動電極と検出電極が同一平面上にあるものに比
較して、可動電極と検出電極との間の静電容量の変化量
を大きく設定できる。
As described in detail above, according to the invention of claim 1, at least one of the substrate and the movable electrode is provided with an electrode interval between the movable electrode and the detection electrode. Since it is configured to be larger than the electrode interval between the drive electrode, in the initial state of the capacitor,
For example, the amount of change in the electrostatic capacitance between the movable electrode and the detection electrode can be set to be larger than that when the drive electrode and the detection electrode are on the same plane.

【0046】また、請求項2の発明は、基板のうち可動
電極と対向する部位には段差部を設け、駆動電極は基板
の表面側に配置し、検出電極は前記段差部側に配設する
構成としたので、段差部により検出電極と可動電極との
間の電極間隔を、駆動電極と可動電極との間の電極間隔
をよりも大きく設定でき、駆動電極に電圧を印加したと
きにおける検出電極の静電容量の変化量を大きく設定で
きる。
According to a second aspect of the present invention, a step portion is provided in a portion of the substrate facing the movable electrode, the drive electrode is arranged on the front surface side of the substrate, and the detection electrode is arranged on the step portion side. Because of the configuration, the stepped portion can set the electrode interval between the detection electrode and the movable electrode larger than the electrode interval between the drive electrode and the movable electrode, and the detection electrode when the voltage is applied to the drive electrode The amount of change in the capacitance of can be set large.

【0047】また、請求項3の発明は、浅段差部には駆
動電極を設け、深段差部には検出電極を設ける構成とし
たので、深段差部に設けられた検出電極と可動電極との
間の電極間隔を、浅段差部に設けられた駆動電極と可動
電極との間の電極間隔よりも確実に大きく設定すること
ができる。
Further, according to the third aspect of the invention, since the drive electrode is provided in the shallow step portion and the detection electrode is provided in the deep step portion, the detection electrode and the movable electrode provided in the deep step portion are It is possible to surely set the inter-electrode spacing larger than the inter-electrode spacing between the drive electrode and the movable electrode provided in the shallow step portion.

【0048】さらに、請求項4の発明は、可動電極に設
けた屈曲部により可動電極のうち検出電極と対向する部
位を駆動電極と対向する部位よりも基板から離れる方向
に設ける構成としたので、可動電極と検出電極との間の
電極間隔を屈曲部によって可動電極と駆動電極との間の
電極間隔よりも大きく設定でき、駆動電極に電圧を印加
したときにおける検出電極の静電容量の変化量を大きく
設定できる。
Further, according to the invention of claim 4, the bent portion provided on the movable electrode is arranged so that the portion of the movable electrode facing the detection electrode is located farther from the substrate than the portion facing the drive electrode. The electrode gap between the movable electrode and the detection electrode can be set larger than the electrode gap between the movable electrode and the drive electrode by the bent portion, and the amount of change in the capacitance of the detection electrode when a voltage is applied to the drive electrode. Can be set large.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1の実施の形態による可変容量コン
デンサを示す斜視図である。
FIG. 1 is a perspective view showing a variable capacitor according to a first embodiment of the present invention.

【図2】第1の実施の形態による可変容量コンデンサを
示す平面図である。
FIG. 2 is a plan view showing a variable capacitance capacitor according to the first embodiment.

【図3】可変容量コンデンサを図2中の矢示III−III方
向からみた断面図である。
FIG. 3 is a cross-sectional view of the variable capacitor seen from the direction of arrows III-III in FIG.

【図4】可動電極の自由端側を検出電極側に変位させた
状態を示す図3と同様の断面図である。
FIG. 4 is a sectional view similar to FIG. 3, showing a state in which the free end side of the movable electrode is displaced to the detection electrode side.

【図5】本発明の第2の実施の形態による可変容量コン
デンサを示す図3と同様の断面図である。
FIG. 5 is a sectional view similar to FIG. 3, showing a variable capacitor according to a second embodiment of the present invention.

【図6】可動電極の自由端側を検出電極側に変位させた
状態を示す図5と同様の断面図である。
6 is a sectional view similar to FIG. 5, showing a state in which the free end side of the movable electrode is displaced to the detection electrode side.

【図7】本発明の第3の実施の形態による可変容量コン
デンサを示す斜視図である。
FIG. 7 is a perspective view showing a variable capacitance capacitor according to a third embodiment of the present invention.

【図8】第3の実施の形態による可変容量コンデンサを
図7中の矢示VIII−VIII方向からみた断面図である。
8 is a sectional view of a variable capacitance capacitor according to a third embodiment of the present invention as viewed in the direction of arrows VIII-VIII in FIG. 7.

【符号の説明】[Explanation of symbols]

1,11,21 基板 2,13,22 可動電極 2B,13B 自由端 3 浅段差部 4,14,24 駆動電極 5 深段差部 6,15,25 検出電極 12,21C 段差部 W1,W2,W3,W4,W5,W6 電極間隔 1,11,21 substrate 2,13,22 movable electrode 2B, 13B Free end 3 shallow steps 4,14,24 Drive electrodes 5 Deep step 6,15,25 detection electrode 12,21C step W1, W2, W3, W4, W5, W6 Electrode spacing

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 基板と、固定端側が該基板に設けられ自
由端側が該基板に対して垂直方向に変位する可動電極
と、該可動電極と対向する位置で前記基板に設けられ該
可動電極の自由端側を垂直方向に変位させる駆動電極
と、該駆動電極よりも前記可動電極の自由端側に位置し
て前記基板に設けられ前記可動電極の自由端側との間の
電極間隔に応じて静電容量が変化する検出電極とからな
る可変容量コンデンサにおいて、 前記基板と可動電極のうち少なくとも一方の部材には、
前記可動電極と検出電極との間の電極間隔を前記可動電
極と駆動電極との間の電極間隔よりも大きく形成してな
ることを特徴とする可変容量コンデンサ。
1. A substrate, a movable electrode whose fixed end is provided on the substrate and whose free end is displaced in a direction perpendicular to the substrate, and a movable electrode which is provided on the substrate at a position facing the movable electrode. Depending on the electrode spacing between the drive electrode that displaces the free end side in the vertical direction and the free electrode side of the movable electrode that is located on the free end side of the movable electrode with respect to the drive electrode. In a variable capacitance capacitor including a detection electrode whose capacitance changes, at least one member of the substrate and the movable electrode is
A variable capacitance capacitor characterized in that an electrode interval between the movable electrode and the detection electrode is formed larger than an electrode interval between the movable electrode and the drive electrode.
【請求項2】 前記基板のうち前記可動電極と対向する
部位には段差部を設け、前記駆動電極は基板の表面側に
配置し、前記検出電極は前記段差部側に配設してなる請
求項1に記載の可変容量コンデンサ。
2. A step portion is provided in a portion of the substrate facing the movable electrode, the drive electrode is arranged on the front surface side of the substrate, and the detection electrode is arranged on the step portion side. The variable capacitor according to Item 1.
【請求項3】 前記基板には浅段差部と深段差部を設
け、浅段差部には駆動電極を設け、深段差部には検出電
極を設けてなる請求項1または2に記載の可変容量コン
デンサ。
3. The variable capacitor according to claim 1, wherein the substrate is provided with a shallow step portion and a deep step portion, a drive electrode is provided in the shallow step portion, and a detection electrode is provided in the deep step portion. Capacitors.
【請求項4】 前記可動電極の自由端側には前記駆動電
極と対向する部位よりも前記基板から離れる方向に屈曲
した屈曲部を設け、前記検出電極は前記屈曲部の位置に
配置してなる請求項1,2または3に記載の可変容量コ
ンデンサ。
4. The free end side of the movable electrode is provided with a bent portion bent in a direction away from the substrate rather than a portion facing the drive electrode, and the detection electrode is arranged at the position of the bent portion. The variable capacitor according to claim 1, 2, or 3.
JP2002037379A 2002-02-14 2002-02-14 Variable capacitor Pending JP2003243254A (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006210843A (en) * 2005-01-31 2006-08-10 Fujitsu Ltd Variable capacitor and manufacturing method thereof
WO2008075613A1 (en) * 2006-12-21 2008-06-26 Nikon Corporation Variable capacitor, variable capacitor device, high-frequency circuit filter, and high-frequency circuit
JP2009059866A (en) * 2007-08-31 2009-03-19 Omron Corp Element assembly and its manufacturing method
WO2013108705A1 (en) * 2012-01-16 2013-07-25 アルプス電気株式会社 Finely movable mechanism and variable capacitor
WO2014058004A1 (en) * 2012-10-11 2014-04-17 アルプス電気株式会社 Variable capacitance capacitor
WO2023159342A1 (en) * 2022-02-22 2023-08-31 京东方科技集团股份有限公司 Micro-electro-mechanical system switch and manufacturing method therefor

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006210843A (en) * 2005-01-31 2006-08-10 Fujitsu Ltd Variable capacitor and manufacturing method thereof
WO2008075613A1 (en) * 2006-12-21 2008-06-26 Nikon Corporation Variable capacitor, variable capacitor device, high-frequency circuit filter, and high-frequency circuit
JP2008159661A (en) * 2006-12-21 2008-07-10 Nikon Corp Variable capacitor, variable capacitor device, filter for high-frequency circuit, and high-frequency circuit
US7881038B2 (en) 2006-12-21 2011-02-01 Nikon Corporation Variable capacitor, variable capacitor apparatus, high frequency circuit filter, and high frequency circuit
JP2009059866A (en) * 2007-08-31 2009-03-19 Omron Corp Element assembly and its manufacturing method
WO2013108705A1 (en) * 2012-01-16 2013-07-25 アルプス電気株式会社 Finely movable mechanism and variable capacitor
WO2014058004A1 (en) * 2012-10-11 2014-04-17 アルプス電気株式会社 Variable capacitance capacitor
JP5922249B2 (en) * 2012-10-11 2016-05-24 アルプス電気株式会社 Variable capacitor
WO2023159342A1 (en) * 2022-02-22 2023-08-31 京东方科技集团股份有限公司 Micro-electro-mechanical system switch and manufacturing method therefor

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