JP2003240739A - X-ray analyzer having region division support function in composition distribution - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an X-ray analyzer having a region division support function of composition distribution that can rapidly and easily divide the region of composition distribution in a sample. <P>SOLUTION: The X-ray analyzer has an arithmetic unit 12 for obtaining the type of elements M<SB>1</SB>-M<SB>4</SB>from detection energies e<SB>1</SB>-e<SB>4</SB>in characteristic X rays 8 and quantity from a count number T<SB>1</SB>-T<SB>4</SB>, and for creating histogram (h), and so on in each fine region (p), and so on for storage. The arithmetic unit 12 has a region division support function for displaying a screen 18 for displaying a measurement target region 3a, and at the same time specifying distribution regions 21a-21e in a composition for composing the inside of arbitrary regions 20a-20e to all regions of a measurement target region 20 in linking with the specification of the arbitrary regions 20a-20e to be made to the measurement target region 20 in the screen 18 by the user of the analyzer, and displaying the specified regions 21a-21e as images on the screen. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray analyzer having a region distribution support function for composition distribution.

[0002]

2. Description of the Related Art Conventionally, for example, an electron microscope and a so-called EP are used.
A micro X-ray analyzer using MA (Electoron Probe X-ray Analyzer: energy dispersive EDX and wavelength dispersive WDX) is used. This X-ray analysis apparatus irradiates an electron beam while scanning a minute region in a measurement target region of a sample, and accordingly detects characteristic X-rays emitted from the element contained in the sample in each minute region, The distribution area of each element in the measurement target area is analyzed based on the measurement results of the characteristic X-rays.

[0003]

However, when the sample is a sample containing a plurality of elements, even if the contained elements are of the same kind, the compounds having different phases due to different mixing ratios. May be. Particularly, as in the case of analyzing a rock sample, there is a problem that it is difficult to perform phase separation of a sample made of a compound of the same quality and specify its distribution region. Further, even in the case of an alloy in which a sample to be measured is added with another metal element or the like and melted, it is difficult to specify the distribution of regions considered to be homogeneous in the sample.

The present invention has been made in consideration of the above-mentioned problems, and an object thereof is to divide the composition distribution in a sample into regions in which the composition distribution can be divided more quickly and easily. An object is to provide an X-ray analyzer having a support function.

[0005]

In order to achieve the above object, an X having a composition distribution region segmenting support function of the first invention is provided.
The line analysis device detects characteristic X-rays generated when electron beams or X-rays are irradiated while scanning a minute region in a measurement target region of a sample containing a plurality of elements, and the detected values of the characteristic X-rays are detected. In the X-ray analysis apparatus for analyzing the distribution of the composition of the sample based on the above, an operation of obtaining the amount of the element type and frequency from the detected energy of the characteristic X-ray, and creating and storing a histogram of each minute region In this arithmetic unit, the arithmetic unit displays a screen representing the measurement target area, and in conjunction with the designation of the arbitrary area to be performed on the measurement target area in the screen by the user of the apparatus, It is characterized by having a region segmentation support function of identifying the distribution region of the composition constituting the whole region of the measurement target region and displaying the identified region as an image on the screen. (Claim 1)

Therefore, the user of the apparatus simply designates an arbitrary area on the screen representing the area to be measured, and at the same time, a phase separation of a composition that is substantially the same as the composition representative of this area is performed, and the distribution of this composition is distributed. The area can be confirmed as an image. In addition, next, in the screen showing the measurement target area,
It is possible to determine how many compounds, etc. the sample in the measurement target region consists of by sequentially designating arbitrary regions other than the distribution region of the phase-separated composition (portions with different phases). is there. That is, it is not necessary to select the phase of the compound or the like once selected, and the distribution region of the composition can be phase separated as quickly and easily.

The X-ray analyzer having a function of dividing the composition distribution into regions according to the second aspect of the invention irradiates an electron beam or an X-ray while scanning a minute region within a measurement target region of a sample containing a plurality of elements. In an X-ray analysis apparatus that detects characteristic X-rays that occur occasionally and analyzes the distribution of the composition that constitutes the sample based on the detected values of the characteristic X-rays, the detected energy of the characteristic X-rays determines the element type and frequency. The calculation device has a calculation device for obtaining a quantity and creating a histogram of each minute region and storing the histogram. The calculation device displays a screen representing the measurement target region, and the measurement target region in the screen by the device user. In conjunction with the designation of any area
From the histogram of all minute areas, statistically classify the correlations of the compositions that make up this arbitrary area, specify the distribution area of this classified composition for all areas of the measurement target area, and specify the specified area. It is characterized by having a region division support function represented as an image on the screen. (Claim 2)

Therefore, the user of the apparatus only needs to specify an arbitrary area in the scatter diagram of the area to be measured on the screen.
It is possible to confirm the distribution region of the composition which is almost the same as the composition representative of this region as an image, and to perform the phase separation of each composition simultaneously.

An X-ray analyzer having a composition distribution region segmentation support function of the third invention irradiates an electron beam or an X-ray while scanning a minute region within a measurement target region of a sample containing a plurality of elements. In an X-ray distribution device that detects characteristic X-rays that occur occasionally and analyzes the distribution of the composition that constitutes the sample based on the detected values of the characteristic X-rays, the detected energy of the characteristic X-rays determines the element type and frequency. Obtaining the amount, creating and storing a histogram of each micro region, and having a computing device that creates a scatter diagram that summarizes the correlation of each element in each micro region within the measurement target region, and this computing device, A screen showing the measurement target area is displayed, and in association with the designation of an arbitrary area for the measurement target area on the screen by the user of the apparatus, the data in the scatter diagram of the entire minute area is used to determine this area. Statistically classifying the correlation of the composition that constitutes the area, the distribution area of the classified composition is specified for all areas of the measurement target area, and the specified area is displayed as an image on the screen It is characterized by having a support function. (Claim 3)

That is, in the first and second inventions, as a means for statistically classifying the correlations of the compositions constituting the arbitrary region, the data in the scatter diagram for all the minute regions is used to determine the inside of the arbitrary region. You may statistically classify the correlation of the composition which comprises, specify the distribution area | region of this classified composition with respect to all the areas of the said measurement object area | region, and display the specified area | region as an image on the said screen.

An X-ray analyzer having a composition distribution region classification support function of the fourth invention irradiates an electron beam or an X-ray while scanning a minute region in a measurement target region of a sample containing a plurality of elements. In an X-ray distribution device that detects characteristic X-rays that occur occasionally and analyzes the distribution of the composition that constitutes the sample based on the detected values of the characteristic X-rays, the detected energy of the characteristic X-rays determines the element type and frequency. Obtaining the amount, creating and storing a histogram of each micro region, and having a computing device that creates a scatter diagram that summarizes the correlation of each element in each micro region within the measurement target region, and this computing device, In addition to displaying the screen showing the scatter diagram, the distribution region of the composition that constitutes the arbitrary region is linked to the scatter diagram by linking with the designation of the arbitrary region performed by the user of the device for the scatter diagram on the screen. Identified for all areas of the beauty / or measurement area, it is characterized by having a region dividing support function of displaying as an image the specified area on the screen. (Claim 4)

In this case, by sequentially designating an arbitrary region in a portion other than the distribution area of the composition (a portion having a different phase) separated in this scatter diagram, the sample in the measurement target area has approximately several compounds. It is possible to determine whether or not That is, it is not necessary to select a phase of a compound or the like once selected, and thus phase separation can be performed more quickly and easily.

An X-ray analyzer having a composition distribution region segmentation support function of the fifth invention irradiates an electron beam or an X-ray while scanning a minute region within a measurement target region of a sample containing a plurality of elements. In an X-ray distribution device that detects characteristic X-rays that occur occasionally and analyzes the distribution of the composition that constitutes the sample based on the detected values of the characteristic X-rays, the detected energy of the characteristic X-rays determines the element type and frequency. Obtaining the amount, creating and storing a histogram of each micro region, and having a computing device that creates a scatter diagram that summarizes the correlation of each element in each micro region within the measurement target region, and this computing device, In addition to displaying the screen showing the scatter diagram, the composition of the arbitrary region is formed from the data in the scatter diagram in association with the designation by the user of the device of the arbitrary region for the scatter diagram in the screen. The correlation is statistically classified, the distribution area of the composition that constitutes this arbitrary area is specified for all the areas of the scatter diagram and / or the measurement target area, and the specified area is displayed as an image on the screen. The feature is that it has a region division support function.

In this case, if an arbitrary region is sequentially designated in a portion other than the distribution region of the composition separated in this scatter diagram (portion having a different phase), the scatter diagram and the scatter diagram are obtained from the correlation of the composition in the scatter diagram. It is possible to specify an area having the same composition as that in the arbitrary area for all the areas to be measured and display the image on the screen.
Furthermore, by dividing the composition area from the scatter plot,
It is possible to more accurately judge the phase separation due to the composition and to divide the composition distribution into regions, and it is possible to reduce defective regions.

An X-ray analyzer having a composition distribution region classification support function of the sixth invention irradiates an electron beam or an X-ray while scanning a minute region within a measurement target region of a sample containing a plurality of elements. In an X-ray distribution device that detects characteristic X-rays that occur occasionally and analyzes the distribution of the composition that constitutes the sample based on the detected values of the characteristic X-rays, the detected energy of the characteristic X-rays determines the element type and frequency. Obtaining the amount, creating and storing a histogram of each micro region, and having a computing device that creates a scatter diagram that summarizes the correlation of each element in each micro region within the measurement target region, and this computing device, The screen showing the scatter diagram is displayed, and in conjunction with the designation of an arbitrary region for the scatter diagram on the screen by the user of the apparatus, the histogram of each minute region is used to construct the arbitrary region. Statistical classification of the correlation of the composition, the distribution area of the composition constituting this arbitrary area is specified for all areas of the scatter diagram and / or the measurement target area, and the specified area is displayed on the screen. It is characterized by having a region division support function for displaying as.

In any of the above devices, instead of irradiating the sample with an electron beam or X-ray and detecting the characteristic X-ray generated at that time, the sample is irradiated with an electron beam,
The characteristic electron beam (Auger electron) generated at that time is detected (Auger electron spectroscopy), the sample is irradiated with ions, and the characteristic X-ray generated at that time is detected (particle beam excited X-ray spectroscopy), or The sample may be irradiated with ions and characteristic ions (secondary ions) generated at that time may be detected (secondary ion mass spectrometry).

The electronic device has an electron microscope for imaging the measurement target region, and the arithmetic unit divides the composition distribution into regions while displaying the microscopic image captured by the electron microscope on the screen representing the measurement target region. In the case of having a function of displaying the distribution regions of each composition in different colors by performing the above, it is possible to sequentially confirm the distribution regions of the constituents of the composition while confirming the microscopic image.

[0018]

1 is a diagram showing the overall configuration of an X-ray analysis apparatus of the present invention. In FIG. 1, reference numeral 1 denotes an electron gun provided inside a sample chamber (not shown), and 2 denotes an electron beam 4 emitted from the electron gun 1 toward a sample 3 in a two-dimensional direction (x direction orthogonal to each other). This is an electron beam scanning coil that scans in the y direction) and scans a minute region p to which the electron beam 4 is irradiated in the measurement target region 3a of the sample 3. Further, 5 is an electron beam scanning circuit for controlling the electron beam scanning coil 2, 6 is a sample stage (not shown) on which the sample 3 is mounted, x, y
It is a sample moving unit that moves in the direction.

Although not shown, the X-ray analysis apparatus of this example has an electron microscope for imaging the measurement target region 3a of the sample 3.

An X-ray detector 7 detects a characteristic X-ray 8 emitted from the sample 3 when the sample 3 is irradiated with the electron beam 4.
Reference numeral 9 is a wave height discriminator that counts the number of characteristic X-rays 8 for each element based on the signal from the X-ray detector 7. A scanning control unit 10 controls the electron beam scanning circuit 5, the sample moving unit 6, and the wave height discriminator 9, respectively. Further, 11 is an image memory, 12 is a calculation device, and 13 is a display device.

Now, assuming that the sample 3 contains, for example, four elements, the operation of each part will be described below. First, by irradiating the sample 3 with the electron beam 4, the sample 3
The characteristic X-ray 8 is emitted from the. At this time, the position of the electron beam 4 or the sample 3 is moved in the x and y directions, for example, by a control signal from the scanning control unit 10 so that the electron beam 4 scans an arbitrary minute region p in the sample 3. Can be irradiated.

The characteristic X-ray 8 emitted from the sample 3 in the minute area p is detected by the X-ray detector 7, and the wave height discriminator 9 detects the characteristic X-ray 8 for each detected energy.
Are counted.

FIG. 2 shows the characteristic X in one minute region p.
It is a figure which shows the example of the histogram h of the line 8. Figure 2 Smell
The horizontal axis represents the detected energy e of the characteristic X-ray 8 and the vertical axis
Indicates the count number T. Also, M₁~ M_FourIs it
The respective elements that generate the characteristic X-ray 8 of energy e are shown.
It That is, the detected energy e of the characteristic X-ray 8₁~ E _Four
To element type, frequency (count) T₁~ T_FourFrom each
Histogram in each small area p by calculating the amount of element
Create (spectrum) h.

FIG. 3 shows a characteristic X-ray image 14 obtained by storing the histogram h of the characteristic X-ray 8 in each micro area p in the image memory 11 having the address corresponding to the scanning coordinates (x, y). It is a figure which shows an example. That is, a histogram h for each minute area of the characteristic X-ray 8 is created and stored.

In this example, it is assumed that four characteristic X-ray images 14a, 14b, 14c and 14d are obtained corresponding to the _four elements M _{1 to} M ₄ for the sake of simplicity.
In these characteristic X-ray images 14a to 14d, the shade is the count number T ₁ of the histogram h in each minute region p.
˜T ₄ and shows the amount (distribution degree) of each element M _{1 to} M ₄ .

Next, a scatter diagram is prepared in which the correlations among the elements M _{1 to} M ₄ in each of the minute regions p are totaled within the measurement target region.

FIG. 4 is a diagram showing an example of the scatter diagram 15 expressed two-dimensionally. That is, in the case of this example, since the case where the sample 3 contains four kinds of elements is considered, the actual dimension of the scatter diagram 15 is four, but it can be expressed two-dimensionally. Appropriate arithmetic processing is performed on the _four count numbers T _{1 to} T ₄ to convert them into two dimensions 16a and 16b.

At this time, if the compositions in the minute regions p at different positions are almost the same, they are aggregated at almost the same position on the scatter diagram 15. Therefore, when all the minute regions p in the measurement target region 3a are aggregated, as shown in FIG. 4, the scatter diagram 15 (hereinafter, referred to as a screen display) expressed in two dimensions is shown from the correlation of the count numbers T _{1 to} T ₄ . In order to distinguish the scatter diagram 15 which is two-dimensionally expressed as 15a from the scatter diagram 15 which is stored as a calculation target in the arithmetic unit 12, there are several cloud-like sets 17a.
~ 17e are formed. That is, sample 3 in this example
It is expected that a contains 5 compounds as an example.

Here, the scatter diagram 15a is represented two-dimensionally.
There are various possible methods of arithmetic processing for this purpose.
For example, each count T₁~ T_FourFor each different α₁
~ Α _FourMultiply by and add this to the new dimension 16
a, another different count β₁~ Β_FourObtained by using
Can be another dimension 16b. In addition, each
Und number T₁~ T_FourCalculate the ratio by dividing each other
Therefore, a new dimension 16a, 1
6b may be obtained. In any case, the arithmetic unit 12
Represents each set 17a-1 in the scatter plot 15a displayed.
7e can be placed and displayed separately.
To adjust the values of the counts α and β,
It is desirable to have the function to judge the method appropriately and adjust it.
Yes.

Also in the case of the example shown in FIG. 4, it is difficult to distinguish the sets 17b and 17c two-dimensionally, for example, but when the arithmetic unit 12 performs the statistical region division described later, the calculation is performed. Since the target data is the scatter diagram 15 based on the above-mentioned histograms h in each of the minute regions p, it is possible to determine this relatively easily.

5 to 10 are views showing an example of a screen displayed on the display device 13. 5 to 10, 18 is a screen showing the measurement target region 3a, and 19 is a screen displaying the two-dimensionally expressed scatter diagram 15a. Hereinafter, the method for supporting the segmentation of the composition distribution according to the present invention will be described.

As shown in FIG. 5, the X-ray analysis apparatus of this example displays a microscopic image 20 of the measurement target region 3a of the sample 3 imaged by the electron microscope on the screen 18. Here, the apparatus user uses a pointing device such as a mouse to select an arbitrary area 20a in the microscopic image 20.
Is specified.

The computing device 12 interlocks with the designation of the region 20a by the user of the device and obtains the correlation between the elements M _{1 to} M ₄ in all the minute regions p ... Located in the region 20a. Then, each element M ₁ in this region 20a
~ M ₄ representative correlations, for example, the average value and /
Alternatively, by calculating from the standard deviation and dividing into areas that are statistically determined to have the same composition from the range of the variance, a typical composition that constitutes the area 20a is statistically calculated from the correlation. (Hereinafter, this procedure is called thruster ring).

The entire micro area p located in the area 20a
The correlation among the elements M _{1 to} M ₄ in ... Can be obtained using the characteristic X-ray image 14 and the scatter diagram 19. (Details will be described later)

FIG. 6 is a diagram showing an example of a state in which the result obtained by the above calculation is displayed. In FIG. 6, 2
Reference numeral 1a indicates a distribution region of composition corresponding to the set 17a, and the distribution region 21a of composition is indicated by coloring. Similarly, the set 17a divided into regions by the clustering in the screen 19 is also colored.
That is, the user of the apparatus can confirm a portion of the screen 18 that can be regarded as having the same composition as that of the area 20a by merely designating an arbitrary area 20a in the screen 18.

Although the above-mentioned coloring is an expression including hue and shade, it goes without saying that it may be performed by displaying various patterns such as hatching. Also,
5 to 10 show the coloring expression by changing the size of each point in the screen 18 and the dither pattern in the screen 18. In addition, since the present example is shown for easy explanation of the contents of the invention, the contents of the present invention are not limited thereto.

As one of the embodiments of the present invention, the case of obtaining the correlation between the elements M _{1 to} M ₄ in all the minute regions p located in the region 20a by using the scatter diagram 19 will be described below. This will be described in detail with reference to FIGS. Here, it is assumed that the set 17a in FIG. 4 represents a typical compositional correlation in the region 20a. All minute areas corresponding to the classified composition set 17a are obtained from the histogram h stored for each scanning coordinate (x, y).

Next, it is considered that the user of the apparatus has a composition different from that of the other portion of the microscopic image 20 displayed on the screen 18 at a portion different from the composition distribution region 21a. It is assumed that the arbitrary area 20b is pinpointed. The arithmetic unit 12 interlocks with the designation of the area 20b by the user of the apparatus and operates the area 20b.
From the correlation between the elements M _{1 to} M ₄ in the minute region corresponding to b, the set 17b determined to have the same composition is obtained by the clustering. Next, all minute regions p ... Corresponding to the set 17b representing the classified composition are obtained from the histogram h stored for each scanning coordinate (x, y).

FIG. 7 shows the distribution region 21b of the classified composition.
It is a figure which shows an example of the state which displayed. The distribution area 21b is preferably colored with a color different from that of the distribution area 21a, and it is desirable that this color can be selected according to the preference of the device user.

Further, the colored set 17b in the screen 19 of FIG. 7 is adjacent to another region 19a which seems to be a set of blocks as far as the scatter diagram 15a is seen. Then, when the device user next selects this area 1 in the screen 19,
It is assumed that 9a is designated.

The arithmetic unit 12 interlocks with the designation of the area 19a in the screen 19 by the user of the apparatus and operates the area 19a.
A typical composition constituting the region 19a is obtained by the clustering from the correlation between the elements M _{1 to} M ₄ located in a. Here, the set 17c is the area 19a.
The composition is judged to be the same.

That is, the user of the device can classify the composition existing in the measurement object region 3a from the composition of each compound by checking the scatter diagram 15a and judging the part which is not divided into regions. , More accurate judgment can be made.

Next, the arithmetic unit 12 scans the distribution area of the classified composition with respect to the measurement object area 3a at scanning coordinates (x, y).
It is calculated using the histogram h stored for each, and this distribution region is displayed as an image on the screen 18.

FIG. 8 is a diagram showing a result calculated by the above calculation. In FIG. 8, 21c indicates a distribution region of the composition corresponding to the set 17c. Also, set 17c
By also coloring the above, it is clearly indicated that the distribution region 21c of the composition corresponding to this set 17c has been displayed on the screen 18.

When the screen 18 is focused again, it can be seen that there is still a portion in the microscopic image 20 that does not hit any of the distribution regions 21a to 21c. Therefore, the device user again selects an arbitrary region 20d from a portion that does not hit any of the distribution regions 21a to 21c in the screen 18, and the arithmetic unit 12 performs clustering to set the set 17d as shown in FIG. And the corresponding distribution region 21d of the composition is displayed by coloring.

Then, in FIG. 9, when the device user designates an arbitrary region 20e from the remaining portion, the arithmetic unit 12 performs clustering, and as shown in FIG. 10, it corresponds to the set 17e and the set 17e. Composition distribution area 21
e is displayed by coloring.

In this embodiment, the scatter diagram 19 was used to find the correlation between the elements M _{1 to} M ₄ in all the minute regions p located in the region 20a, but the present invention is not limited to this. Alternatively, the correlation may be obtained using the characteristic X-ray image 14. In this case, the data regarding each pixel of the characteristic X-ray image 14 is statistically processed to specify the region that can be regarded as having the same composition.

Next, a procedure for designating an arbitrary area in the composition distribution area in the scatter diagram 15 and dividing the composition distribution area in the imaged measurement target area will be described with reference to FIG. The device user selects the scatter plot displayed on screen 19 from
An arbitrary area (for example, 19a) is designated. Arithmetic unit 12
Is interlocked with the designation of the arbitrary region 19a by the user of the apparatus, and first, the arbitrary region 19a in the screen 18 is displayed.
An area corresponding to a (for example, the distribution area 20A) is obtained.

Next, the correlation between the elements M _{1 to} M ₄ in the entire minute area p ...
Based on the data in the line image 14 or the scatter diagram 19, the region 19A determined to have the same composition is obtained by clustering. Next, all the minute regions p ... Corresponding to the separated region 19A representing the composition are scanned coordinate (x,
y) is calculated from the stored histograms h ...

Further, for the region 21c in FIG. 18 determined to have the same composition by clustering, a scatter diagram 1
The corresponding data in 9 is obtained, and the above-mentioned arbitrary area 19a is obtained.
The area 19A in the scatter diagram which is determined to have the same composition as is obtained. Then, the set 17c of each of the minute regions p ... Which constitutes the region 19A determined to have the same composition is displayed on the screen by being colored with the same color.

As illustrated in the series of operations described above, the user of the apparatus selects one area 20a to one area 20a in the microscopic image 20.
By designating 20e and 19a, the phase separation can be performed in situ for the range of composition having components similar to that portion, and these are displayed by the distribution regions 21a to 21e colored with different colors. Therefore, phase separation can be performed very easily. That is, it is possible to quickly perform phase separation without overlapping and selecting a region having almost the same component as a region once selected.

In particular, since the microscopic image 20 is displayed on the screen 18 in advance, the user of the apparatus can easily know the relationship between the microscopic image 20 which is visible and the composition of the part, and the microscopic image can be obtained. From 20, it is possible to roughly determine the distribution region of each composition. That is, it is possible to perform more detailed analysis by combining the accuracy of measurement and the judgment of the user of the apparatus. However, the present invention does not limit the display of the microscopic image 20 on the screen 18 in advance.

In the above example, the screen 19 showing the scatter diagram 15a expressed two-dimensionally is displayed at the same time as the screen 18 so that the clustering is performed while confirming the difference in the chemical characteristics of each part. However, the scatter diagram 15 is used only when the arithmetic processing is performed in the arithmetic unit 12, and it is also possible not to display it on the screen 19.

Further, the screen 19 is not limited to displaying the scatter diagram 15a expressed two-dimensionally, but may be expressed three-dimensionally (three-dimensionally). In addition, the scatter diagrams 15a ... Converted by a plurality of calculation methods and represented two-dimensionally may be displayed using a plurality of screens 19.

In each of FIGS. 5 to 10 shown in the above-mentioned example, although the expression by color is impossible, the distribution area 2 on the screen 18
Set 17 in screen 19 corresponding to each of 1a to 21e
It is possible to clearly express the relationship between the respective portions 21a to 21e and 17a to 17e by coloring the a to 17e with a common color. However, the present invention does not limit the coloring of the parts 21a to 21e and 17a to 17e.

The method by which the user of the apparatus designates an arbitrary area in the screens 18 and 19 is the rectangular area 20a, 1 described above.
It goes without saying that not only 9a, 20d, 20e and the pinpoint 20b, but also a region surrounded by a polygonal line or a region having another shape such as a circle or an ellipse.

Further, it is conceivable that the conditions for judging that they are statistically the same during the clustering can be freely set by the user of the apparatus.

[0058]

As described above, according to the present invention,
By simply specifying an arbitrary area on the screen, you can simultaneously perform phase separation of a compound or the like that has almost the same composition as the compound or the like that represents this area, and check the distribution area of this compound or the like as an image. . That is, it is not necessary to select the phase of the compound or the like once selected again, and it is possible to assist the region distribution of the composition distribution, which allows the composition distribution region to be phase-separated so quickly and easily.

[Brief description of drawings]

FIG. 1 is a diagram showing an overall configuration of an X-ray analysis apparatus having a composition distribution region segmentation support function of the present invention.

FIG. 2 is a diagram showing a histogram obtained by a process in the X-ray analysis apparatus.

FIG. 3 is a diagram showing a characteristic X-ray image of each element obtained using the histogram.

FIG. 4 is a diagram two-dimensionally showing a scatter diagram obtained by processing in the X-ray analysis apparatus.

FIG. 5 is a diagram illustrating a region distribution support function of the composition distribution of the X-ray analysis apparatus.

FIG. 6 is a diagram illustrating a region distribution support function of the composition distribution of the X-ray analysis apparatus.

FIG. 7 is a diagram illustrating a region distribution support function of the composition distribution of the X-ray analysis apparatus.

FIG. 8 is a diagram illustrating a region distribution support function of the composition distribution of the X-ray analysis apparatus.

FIG. 9 is a diagram illustrating a region distribution support function of the composition distribution of the X-ray analysis apparatus.

FIG. 10 is a diagram illustrating a region distribution support function of the composition distribution of the X-ray analysis apparatus.

[Explanation of symbols]

3 ... sample, 3a ... measurement target region, 4 ... electron beam, 8 ... characteristic X-ray, 12 ... arithmetic unit, 15 (15a) ... scatter diagram, 18
... Screen showing the measurement target area, 19 ... Screen showing the scatter diagram, 20 ... Microscopic images, 20a to 20e, 19a ... Areas specified by the user of the apparatus, 21a to 21e ... Distribution area, p ... Micro area, h ... Histogram, e _{1 to} e ₄ ... Energy, T _{1 to} T ₄ ... Frequency, M _{1 to} M ₄ ... Element.

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Claims (6)

[Claims] 1. A characteristic X-ray generated when an electron beam or an X-ray is irradiated while scanning a minute region in a measurement target region of a sample containing a plurality of elements, and the detected values of the characteristic X-rays are detected. In the X-ray analysis apparatus for analyzing the distribution of the composition of the sample based on the above, an operation of obtaining the amount of the element type and frequency from the detected energy of the characteristic X-ray, and creating and storing a histogram of each minute region In this arithmetic unit, the arithmetic unit displays a screen representing the measurement target area, and in conjunction with the designation of the arbitrary area to be performed on the measurement target area in the screen by the user of the apparatus, The composition distribution area that constitutes the composition distribution area is specified for all areas of the measurement target area, and the composition distribution is characterized by having an area division support function for displaying the specified area as an image on the screen. An X-ray analyzer having a region division support function. 2. A characteristic X-ray generated when an electron beam or an X-ray is irradiated while scanning a minute region in a measurement target region of a sample containing a plurality of elements, and the detected values of the characteristic X-rays are detected. In the X-ray analysis apparatus for analyzing the distribution of the composition of the sample based on the above, an operation of obtaining the amount of the element type and frequency from the detected energy of the characteristic X-ray, and creating and storing a histogram of each minute region This calculation device has a device for displaying a screen representing the measurement target region, and a histogram of all minute regions in association with designation of an arbitrary region performed by the device user on the measurement target region. From this, statistically classify the correlation of the composition that constitutes this arbitrary region, specify the distribution region of this classified composition for all regions of the measurement target region,
An X-ray analysis apparatus having a composition distribution region segmentation support function, which has a region segmentation support function for displaying the specified region as an image on the screen. 3. A characteristic X-ray generated when an electron beam or an X-ray is irradiated while scanning a minute region in a measurement target region of a sample containing a plurality of elements, and the detected values of the characteristic X-rays are detected. In the X-ray distribution device for analyzing the distribution of the composition of the sample based on the above, the kind of the element is determined from the detected energy of the characteristic X-ray, the amount is calculated from the frequency, and a histogram of each minute region is created and stored, There is a calculation device that creates a scatter diagram that summarizes the correlation of each element in each minute region within the measurement target region, and this calculation device displays a screen representing the measurement target region and a screen by the device user. Interlocking with the designation of an arbitrary region to be performed for the measurement target region, statistically classify the correlation of the composition that constitutes this arbitrary region from the data in the scatter diagram of all the minute regions, and A region distribution support function for identifying the composition distribution region for all regions of the measurement target region, and displaying the specified region as an image on the screen is provided.
Line analyzer. 4. A characteristic X-ray generated when an electron beam or an X-ray is irradiated while scanning a minute region in a measurement target region of a sample containing a plurality of elements, and the detected values of the characteristic X-rays are detected. In the X-ray distribution device for analyzing the distribution of the composition of the sample based on the above, the kind of the element is determined from the detected energy of the characteristic X-ray, the amount is calculated from the frequency, and a histogram of each minute region is created and stored, There is a computing device that creates a scatter diagram that aggregates the correlation of each element in each minute region within the measurement target region, and this computing device displays a screen showing the scatter diagram and the device user screen In association with the designation of an arbitrary region to be performed on the scatter diagram of, the distribution region of the composition that constitutes the arbitrary region is specified for all regions of the scatter diagram and / or the measurement target region, and this is specified. An X-ray analysis apparatus having a composition distribution region division support function, which has a region division support function for displaying regions on the screen as an image. 5. A characteristic X-ray generated when an electron beam or an X-ray is irradiated while scanning a minute region in a measurement target region of a sample containing a plurality of elements, and the detected values of the characteristic X-rays are detected. In the X-ray distribution device for analyzing the distribution of the composition of the sample based on the above, the kind of the element is determined from the detected energy of the characteristic X-ray, the amount is calculated from the frequency, and a histogram of each minute region is created and stored, There is a computing device that creates a scatter diagram that aggregates the correlation of each element in each minute region within the measurement target region, and this computing device displays a screen showing the scatter diagram and the device user screen In association with the designation of an arbitrary region to be performed on the scatter diagram, the correlation of the composition constituting the arbitrary region is statistically classified from the data in the scatter diagram, and the arbitrary region is constituted. Compositional The distribution area is defined as the scatter plot and / or
Alternatively, an X-ray analysis apparatus having a composition distribution region classification support function, which has a region classification support function of specifying all regions of the measurement target region and displaying the specified region as an image on the screen. 6. A characteristic X-ray generated by irradiating an electron beam or an X-ray while scanning a minute region in a measurement target region of a sample containing a plurality of elements, and detected values of the characteristic X-rays. In the X-ray distribution device for analyzing the distribution of the composition of the sample based on the above, the kind of the element is determined from the detected energy of the characteristic X-ray, the amount is calculated from the frequency, and a histogram of each minute region is created and stored, There is a computing device that creates a scatter diagram that aggregates the correlation of each element in each minute region within the measurement target region, and this computing device displays a screen showing the scatter diagram and the device user screen In conjunction with the designation of an arbitrary area to be performed on the scatter diagram of, the correlation of the composition that constitutes this arbitrary area is statistically classified from the histogram of each minute area, and the group that constitutes this arbitrary area is statistically classified. Area distribution of composition distribution characterized by having an area distribution support function of specifying a distribution area of the entire area of the scatter diagram and / or the measurement target area and displaying the specified area as an image on the screen. An X-ray analyzer having a support function.