JP2003240728A5 - - Google Patents

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Publication number
JP2003240728A5
JP2003240728A5 JP2002044187A JP2002044187A JP2003240728A5 JP 2003240728 A5 JP2003240728 A5 JP 2003240728A5 JP 2002044187 A JP2002044187 A JP 2002044187A JP 2002044187 A JP2002044187 A JP 2002044187A JP 2003240728 A5 JP2003240728 A5 JP 2003240728A5
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JP
Japan
Prior art keywords
ccd camera
lens
image
mirror surface
inspection object
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JP2002044187A
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Japanese (ja)
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JP2003240728A (en
JP3789097B2 (en
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Priority to JP2002044187A priority Critical patent/JP3789097B2/en
Priority claimed from JP2002044187A external-priority patent/JP3789097B2/en
Publication of JP2003240728A publication Critical patent/JP2003240728A/en
Publication of JP2003240728A5 publication Critical patent/JP2003240728A5/ja
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Publication of JP3789097B2 publication Critical patent/JP3789097B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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【００２２】
より詳細には、本実施形態では上記センサ手段４としてＣＣＤカメラ４１が用いられる。このＣＣＤカメラ４１は、図示のようにレンズ４１ａと、カメラ本体４ｂとからなり、該レンズ４１ａは上記検査位置にある被検査物Ｗと同軸上に配設され、ＣＣＤカメラ４１において上記鏡面ｍａの全体が撮像可能とされている。つまり、光源２からの光により照らし出され、上記鏡面ｍａに写る被検査物外周面Ｗａの全景の映像が、上記ＣＣＤカメラ４１によって撮影可能とされている。[0022]
More specifically, in the present embodiment, a CCD camera 41 is used as the sensor means 4. The CCD camera 41 comprises a lens 41a and a camera body 4b as shown, and the lens 41a is coaxially disposed with the inspection object W at the inspection position, and the CCD camera 41 has the mirror surface ma It is possible to image the whole. That is, the CCD camera 41 can capture an image of a full view of the outer peripheral surface Wa of the inspection object, which is illuminated by the light from the light source 2 and appears on the mirror surface ma.

JP2002044187A 2002-02-21 2002-02-21 Peripheral inspection method and peripheral inspection apparatus for inspection object Expired - Fee Related JP3789097B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002044187A JP3789097B2 (en) 2002-02-21 2002-02-21 Peripheral inspection method and peripheral inspection apparatus for inspection object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002044187A JP3789097B2 (en) 2002-02-21 2002-02-21 Peripheral inspection method and peripheral inspection apparatus for inspection object

Publications (3)

Publication Number Publication Date
JP2003240728A JP2003240728A (en) 2003-08-27
JP2003240728A5 true JP2003240728A5 (en) 2004-12-09
JP3789097B2 JP3789097B2 (en) 2006-06-21

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ID=27783672

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002044187A Expired - Fee Related JP3789097B2 (en) 2002-02-21 2002-02-21 Peripheral inspection method and peripheral inspection apparatus for inspection object

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JP (1) JP3789097B2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG157977A1 (en) * 2008-06-23 2010-01-29 Semiconductor Tech & Instr Inc System and method for inspection of semiconductor packages
JP6489540B2 (en) * 2014-02-27 2019-03-27 株式会社ＮｅｊｉＬａｗ Imaging system, illumination means
US9759670B2 (en) * 2014-12-23 2017-09-12 Mitutoyo Corporation Bore imaging system
JP2017009542A (en) * 2015-06-25 2017-01-12 株式会社ＮｅｊｉＬａｗ Imaging System
JP6834174B2 (en) * 2016-05-13 2021-02-24 株式会社ジェイテクト Visual inspection method and visual inspection equipment
CN114061481A (en) * 2020-08-04 2022-02-18 广东博智林机器人有限公司 Light source assembly and detection device

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