JP2003232743A - Method and apparatus for inspecting ceramic roller - Google Patents
Method and apparatus for inspecting ceramic rollerInfo
- Publication number
- JP2003232743A JP2003232743A JP2002034480A JP2002034480A JP2003232743A JP 2003232743 A JP2003232743 A JP 2003232743A JP 2002034480 A JP2002034480 A JP 2002034480A JP 2002034480 A JP2002034480 A JP 2002034480A JP 2003232743 A JP2003232743 A JP 2003232743A
- Authority
- JP
- Japan
- Prior art keywords
- rolling element
- ceramic rolling
- light
- ceramic
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、セラミックス製転
動体の外観を検査する検査方法ならびに検査装置に関す
る。TECHNICAL FIELD The present invention relates to an inspection method and an inspection apparatus for inspecting the appearance of a ceramic rolling element.
【０００２】[0002]
【従来の技術】従来例として、例えば特開平８−３０４
３０４号公報に示すように、玉軸受などに用いる鋼球の
傷などの外観を検査する場合、鋼球に対して光を照射し
て、反射した光の強弱などに基づいて合否判定するよう
にしている。2. Description of the Related Art As a conventional example, for example, Japanese Patent Laid-Open No. 8-304
As shown in Japanese Patent Publication No. 304-304, when inspecting the appearance such as scratches of a steel ball used for a ball bearing, the steel ball is irradiated with light and the pass / fail judgment is made based on the intensity of reflected light. ing.
【０００３】[0003]
【発明が解決しようとする課題】上記従来例では、検査
対象が鋼球であるために、照射光としてハロゲン光を用
いることで十分であったが、特に窒化けい素を主体とす
るセラミックス製の転動体の場合、鋼球に比べて明度が
低いために、前述したハロゲン光を用いると、セラミッ
クス製転動体からの反射光の強度が弱くなるために、検
査精度が低下する。In the above-mentioned conventional example, since the object to be inspected is a steel ball, it was sufficient to use halogen light as the irradiation light. However, in particular, a ceramic made mainly of silicon nitride is used. In the case of a rolling element, the lightness is lower than that of a steel ball. Therefore, when the halogen light described above is used, the intensity of light reflected from the ceramic rolling element is weakened, so that the inspection accuracy is lowered.
【０００４】これに対して、特開２００１−１５８６６
９号公報の従来技術の欄には、セラミックス製転動体の
外観を検査する装置において、照射光としてレーザ光を
用いることの記載があるが、この公報には、使用するレ
ーザ光の最適な波長を言及する記載はない。On the other hand, Japanese Patent Laid-Open No. 2001-15866
The column of the prior art of Japanese Patent No. 9 describes that laser light is used as irradiation light in an apparatus for inspecting the external appearance of a ceramic rolling element. However, in this publication, the optimum wavelength of the laser light to be used is described. There is no description referring to.
【０００５】このような事情に鑑み、本発明は、セラミ
ックス製転動体の検査方法において、明度の比較的低い
セラミックス製転動体に関する検査精度を向上させるこ
とを目的としている。In view of such circumstances, it is an object of the present invention to improve the inspection accuracy of a ceramic rolling element having a relatively low brightness in the method of inspecting a ceramic rolling element.
【０００６】[0006]
【課題を解決するための手段】本発明のセラミックス製
転動体の検査方法は、請求項１に示すように、窒化けい
素を主体とするセラミックス製の転動体に対してレーザ
光を照射し、当該転動体から反射した反射光に基づいて
セラミックス製転動体の外観を検査する方法であって、
検査対象となる前記セラミックス製転動体について、日
本工業規格（ＪＩＳ）で定められる三属性の色の表示方
法（ＪＩＳ・Ｚ８７２１）における明度が、７．２０以
下に設定されているとともに、前記レーザ光の波長が、
６１０〜７５０ｎｍに設定されている。According to a first aspect of the present invention, there is provided a ceramic rolling element inspection method, wherein a ceramic rolling element mainly composed of silicon nitride is irradiated with a laser beam. A method for inspecting the appearance of a ceramic rolling element based on the reflected light reflected from the rolling element,
Regarding the ceramic rolling element to be inspected, the lightness in the display method (JIS / Z8721) of colors having three attributes defined by Japanese Industrial Standards (JIS) is set to 7.20 or less, and the laser light is used. The wavelength of
It is set to 610 to 750 nm.
【０００７】本発明のセラミックス製転動体の検査装置
は、請求項２に示すように、窒化けい素を主体とするセ
ラミックス製の転動体に対してレーザ光を照射するレー
ザ光源と、前記転動体から反射した反射光を受光する受
光部と、受光素子で受光した反射光に基づいてセラミッ
クス製転動体の外観を認識する処理部とを含み、検査対
象となる前記セラミックス製転動体について、日本工業
規格（ＪＩＳ）で定められる三属性の色の表示方法（Ｊ
ＩＳ・Ｚ８７２１）における明度が、７．２０以下に設
定されているとともに、前記レーザ光源が、６１０〜７
５０ｎｍのレーザ光を発生するものである。According to a second aspect of the present invention, there is provided a ceramic rolling element inspecting apparatus, wherein a laser light source for irradiating a laser beam to a ceramic rolling element mainly composed of silicon nitride, and the rolling element. The ceramic rolling element to be inspected, including a light receiving section for receiving the reflected light reflected from and a processing section for recognizing the external appearance of the ceramic rolling element based on the reflected light received by the light receiving element. Display method of three attribute colors defined by the standard (JIS) (J
The brightness in IS / Z8721) is set to 7.20 or less, and the laser light source is 610-7.
A laser beam of 50 nm is generated.
【０００８】本発明のセラミックス製転動体の検査装置
は、請求項３に示すように、上記請求項２において、前
記レーザ光源として、出力５〜５０ｍＷの半導体レーザ
を用いることにより、前記波長のレーザ光を得る。According to a third aspect of the present invention, there is provided a ceramic rolling element inspecting apparatus according to the second aspect, in which the semiconductor laser having an output of 5 to 50 mW is used as the laser light source, so that the laser of the wavelength can be obtained. Get the light.
【０００９】要するに、本発明では、検査対象となるセ
ラミックス製転動体について、日本工業規格（ＪＩＳ）
で定められる三属性の色の表示方法（ＪＩＳ・Ｚ８７２
１）における明度を、７．２０以下に設定したうえで、
使用するレーザ光の波長を６１０〜７５０ｎｍに設定し
ている。In short, according to the present invention, the ceramic rolling element to be inspected has a Japanese Industrial Standard (JIS).
Display method of colors of three attributes defined by JIS (JIS Z872
After setting the brightness in 1) to 7.20 or less,
The wavelength of the laser light used is set to 610 to 750 nm.
【００１０】つまり、上記明度に設定されたセラミック
ス製転動体は、比較的黒っぽい色であり、光の反射率が
低くなる。一方、上記波長のレーザ光は、可視光で、発
散しにくく直進性が高いので、検査対象となるセラミッ
クス製転動体の照射位置に対する位置決め精度を高める
ことができるとともに、前記反射率の低いセラミックス
製転動体からの反射光を受光部に対して有効的に入射さ
せやすくなる。これにより、セラミックス製転動体から
の反射光の受光強度が高められることになるので、表面
の傷などの有無を認識しやすくなる。That is, the ceramic rolling element set to the above lightness has a relatively dark color, and the light reflectance is low. On the other hand, the laser light of the above wavelength is visible light, and since it is hard to diverge and has high straightness, it is possible to improve the positioning accuracy with respect to the irradiation position of the ceramic rolling element to be inspected, and the ceramic with low reflectance is used. It becomes easy to make the reflected light from the rolling element effectively enter the light receiving portion. As a result, the received light intensity of the reflected light from the ceramic rolling element is increased, so that it becomes easier to recognize the presence or absence of scratches on the surface.
【００１１】[0011]
【発明の実施の形態】本発明の詳細を図面に示す実施形
態に基づいて説明する。DETAILED DESCRIPTION OF THE INVENTION The details of the present invention will be described based on the embodiments shown in the drawings.
【００１２】図１から図４に本発明の一実施形態を示し
ている。図１は、セラミックス製の転動体の検査装置を
示す側面図、図２は、図１の検査装置の斜視図、図３
は、図１の検査装置の平面図、図４は、セラミックス製
転動体におけるレーザ光の照射軌跡を示す説明図であ
る。1 to 4 show an embodiment of the present invention. FIG. 1 is a side view showing an inspection device for a ceramic rolling element, FIG. 2 is a perspective view of the inspection device shown in FIG. 1, and FIG.
FIG. 4 is a plan view of the inspection device of FIG. 1, and FIG. 4 is an explanatory diagram showing a laser light irradiation trajectory on a ceramic rolling element.
【００１３】図例の検査装置は、投光部１と、受光部２
と、処理装置３と、送り装置４とを含む。The inspection apparatus shown in the figure includes a light projecting section 1 and a light receiving section 2.
And a processing device 3 and a feeding device 4.
【００１４】投光部１は、検査対象であるセラミックス
製転動体５に対してレーザ光を照射するもので、レーザ
光源１１と、光整形器１２とを含む。レーザ光源１１
は、レーザ光を放出する半導体レーザなどからなる。光
整形器１２は、レーザ光源１１から放出される円形のレ
ーザ光を所定長さの線形に変えるレンズからなる。The light projecting unit 1 irradiates the ceramic rolling element 5 to be inspected with laser light, and includes a laser light source 11 and a light shaper 12. Laser light source 11
Is a semiconductor laser or the like that emits laser light. The light shaper 12 is composed of a lens that changes the circular laser light emitted from the laser light source 11 into a linear shape having a predetermined length.
【００１５】受光部２は、セラミックス製転動体５から
反射される反射光を受光するもので、受光素子２１と、
導波器２２とを含む。受光素子２１は、レーザ光を受光
するとともに受光したレーザ光の強度に応じた電気信号
を出力するフォトダイオードなどからなる。導波器２２
は、セラミックス製転動体５から反射される反射光を受
光素子２１に導入させる光ファイバーなどからなる。The light receiving section 2 receives the reflected light reflected from the ceramic rolling element 5, and includes a light receiving element 21 and
And a director 22. The light receiving element 21 is composed of a photodiode or the like that receives the laser light and outputs an electric signal according to the intensity of the received laser light. Director 22
Is an optical fiber or the like for introducing the reflected light reflected from the ceramic rolling element 5 into the light receiving element 21.
【００１６】処理装置３は、受光部２の受光素子２１か
ら出力される信号を処理してセラミックス製の転動体５
の傷などの有無を認識するとともに、所定の基準に基づ
いて合否判定するもので、マイクロコンピュータなどか
らなる。The processing device 3 processes the signal output from the light receiving element 21 of the light receiving portion 2 to process the ceramic rolling element 5.
It recognizes the presence or absence of scratches, etc., and judges pass / fail based on a predetermined standard, and comprises a microcomputer or the like.
【００１７】送り装置４は、投光部１から放出されるレ
ーザ光をセラミックス製転動体５の位置を変えて照射さ
せるために、レーザ光を走査せずに転動体５を転動させ
るものである。この送り装置４は、例えば特開平６−３
３１３３８号公報に示されているものと同様に、２つ一
対のローラシャフト４１，４２と、これらローラシャフ
ト４１，４２を回転駆動する駆動系（図示省略）とから
構成されている。一方のローラシャフト４１の外周面に
は、案内溝４３が形成されている。この案内溝４３は、
円周１８０度の領域に設けられるリード角０度の定位置
送り部４３ａと、残り１８０度の領域に設けられる所定
のリード角を有する螺旋状移送部４３ｂとを有してい
る。つまり、一対のローラシャフト４１，４２の上に複
数の転動体５を一直線に並べておいて、ローラシャフト
４１，４２を回転させることにより、図２、図３の矢印
方向から順次供給するとともに矢印方向へ排出させるこ
とにより、転動体５を一方向へ規則正しく転動させるよ
うにしている。そして、案内溝４３の定位置送り部４３
ａにより転動体５が導波器２２の前面で自転しながらと
どまるので、転動体５の赤道上の約１周に対してレーザ
光を連続的に照射できるようになり、これにより、転動
体５の表面から反射されるレーザ光を受光部２の受光素
子２１で連続的に受光できるようになる。The feeding device 4 rolls the rolling element 5 without scanning the laser beam in order to irradiate the laser beam emitted from the light projecting section 1 by changing the position of the ceramic rolling element 5. is there. The feeding device 4 is disclosed in, for example, Japanese Patent Laid-Open No.
Like the one disclosed in Japanese Patent No. 31338, it is composed of a pair of two roller shafts 41, 42 and a drive system (not shown) for rotationally driving these roller shafts 41, 42. A guide groove 43 is formed on the outer peripheral surface of one roller shaft 41. This guide groove 43 is
It has a fixed position feed part 43a having a lead angle of 0 degree provided in a region of a circumference of 180 degrees and a spiral transfer part 43b having a predetermined lead angle provided in a region of the remaining 180 degrees. That is, by arranging the plurality of rolling elements 5 in a straight line on the pair of roller shafts 41 and 42 and rotating the roller shafts 41 and 42, the roller shafts 41 and 42 are sequentially supplied from the arrow directions of FIGS. The rolling element 5 is regularly rolled in one direction by discharging the rolling element 5. Then, the fixed position feed portion 43 of the guide groove 43
Since the rolling element 5 stays rotating on the front surface of the waveguide 22 due to a, it becomes possible to continuously irradiate the laser beam to about one round on the equator of the rolling element 5, whereby the rolling element 5 The laser light reflected from the surface of the light receiving element 21 of the light receiving unit 2 can be continuously received.
【００１８】そして、検査対象となるセラミックス製転
動体５については、球形、円筒形、円柱形、円錐形など
いろいろな形状が考えられる。この実施形態では、セラ
ミックス製転動体５を球形とする場合を例に挙げる。こ
の球形の転動体５は、例えば図５に示す玉軸受６の玉６
３として用いられる。図５において、６１は内輪、６２
は外輪、６４は保持器である。なお、内・外輪６１，６
２は、必要に応じて、軸受鋼、ステンレス鋼などの金属
材や、セラミックスで形成される。The ceramic rolling element 5 to be inspected may have various shapes such as a spherical shape, a cylindrical shape, a cylindrical shape, and a conical shape. In this embodiment, the case where the ceramic rolling element 5 is spherical is taken as an example. This spherical rolling element 5 is, for example, a ball 6 of a ball bearing 6 shown in FIG.
Used as 3. In FIG. 5, 61 is an inner ring and 62
Is an outer ring, and 64 is a cage. The inner and outer rings 61, 6
2 is formed of a metal material such as bearing steel or stainless steel, or ceramics, if necessary.
【００１９】また、上記セラミックス製転動体５は、窒
化けい素（Ｓｉ3Ｎ4）を主体として適宜の焼結助剤を添
加したものからなる。前記焼結助剤としては、イットリ
ア（Ｙ2Ｏ3）およびアルミナ（Ａｌ2Ｏ3）の他、窒化ア
ルミ（ＡｌＮ）、酸化チタン（ＴｉＯ2）、スピネル
（ＭｇＡｌ2Ｏ4）などが挙げられる。The ceramic rolling element 5 is composed mainly of silicon nitride (Si 3 N 4 ) with an appropriate sintering additive added. Examples of the sintering aid include yttria (Y 2 O 3 ) and alumina (Al 2 O 3 ), aluminum nitride (AlN), titanium oxide (TiO 2 ), spinel (MgAl 2 O 4 ), and the like. .
【００２０】ここで、上記のようなセラミックス製転動
体５の製造方法について説明する。Now, a method of manufacturing the ceramic rolling element 5 as described above will be described.
【００２１】まず、窒化けい素粉末や、それらに適した
焼結助剤を例えば平均粒径１．０μｍ以下に粉砕して混
合し、それらに溶剤を加えて混練することにより平均粒
径６０〜１３０μｍに造粒する。この造粒粉を用いて金
型プレスにより外形を整える。First, silicon nitride powder and a sintering aid suitable for them are pulverized to have an average particle size of, for example, 1.0 μm or less and mixed, and a solvent is added to them to knead them to obtain an average particle size of 60 to 60 μm. Granulate to 130 μm. Using this granulated powder, the outer shape is adjusted by a die press.
【００２２】この成形体を脱脂してから、常圧焼結し
て、さらに等方加圧焼結処理（ＨＩＰ）を行う。この等
方加圧焼結処理では、窒化けい素の場合、窒素ガス雰囲
気で約１７００℃とし、１０００〜２０００気圧未満の
圧力で行う。この後、焼結体を機械加工で任意形状に仕
上げる。機械加工では、通常、４〜６工程で順次研磨研
石の粒度が細かいものを用い、最終的には、０．１〜
０．２μmの粒度を有するダイヤモンドパウダーを用い
て仕上げられる。その結果、焼結体の精度はサブミクロ
ン単位になり、鏡面に仕上がる。The molded body is degreased, then sintered under normal pressure, and further subjected to isotropic pressure sintering (HIP). In the case of silicon nitride, this isotropic pressure sintering treatment is performed at a temperature of about 1700 ° C. in a nitrogen gas atmosphere and at a pressure of 1000 to less than 2000 atm. After that, the sintered body is machined into an arbitrary shape. In the machining process, generally, a grindstone having a finer grain size is used in 4 to 6 steps in sequence, and finally, 0.1 to 10 is used.
Finished with diamond powder having a particle size of 0.2 μm. As a result, the accuracy of the sintered body is in the submicron unit, and the surface is mirror finished.
【００２３】なお、上記セラミックス製転動体５の品質
は、使用対象によって高品質なものから低品質なものま
でいろいろタイプに設定される。例えば、上記等方加圧
焼結処理（ＨＩＰ）を施さずに、常圧焼結処理のみを施
して製作してもよい。但し、等方加圧焼結処理（ＨＩ
Ｐ）を施すと、常圧焼結処理のみを施す場合に比べて耐
荷重性を高めることができるとともに、表面の凹凸差を
小さくできる点で好ましい。The quality of the ceramic rolling element 5 is set to various types from high quality to low quality depending on the object of use. For example, it may be manufactured by performing only normal pressure sintering treatment without performing the above-mentioned isotropic pressure sintering treatment (HIP). However, isotropic pressure sintering (HI
P) is preferable in that the load bearing property can be improved and the difference in the unevenness of the surface can be reduced as compared with the case where only the atmospheric pressure sintering treatment is performed.
【００２４】上述したようにセラミックス製転動体５で
は、製造過程あるいは各工程間での移送過程において表
面に微小な傷が発生することがあるので、最終的に外観
検査を行う必要がある。As described above, the ceramic rolling element 5 may have minute scratches on its surface during the manufacturing process or during the transfer process between each process, so it is necessary to finally perform a visual inspection.
【００２５】この外観を検査するために、上述した検査
装置を用いる。つまり、セラミックス製転動体５に対し
て投光部１によりレーザ光を照射し、この転動体５から
反射した反射光を受光部２で受光し、この受光部２から
の出力信号を処理装置３で処理することにより、所定大
きさ以上の傷の有無に基づいて合否判定する。In order to inspect this appearance, the inspection device described above is used. That is, the ceramic rolling element 5 is irradiated with laser light by the light projecting section 1, the reflected light reflected from the rolling element 5 is received by the light receiving section 2, and the output signal from the light receiving section 2 is processed by the processing device 3. By performing the processing in step 1, the pass / fail judgment is made based on the presence / absence of a scratch having a predetermined size or more.
【００２６】この検査過程では、送り装置４でもって、
複数の転動体５を１列に並べて定位置で自転させつつ、
一方向へ所定ピッチずつ移送させることにより、転動体
５の表面に対するレーザ光の照射位置を連続的に変える
ようにしている。In this inspection process, with the feeding device 4,
While arranging a plurality of rolling elements 5 in one row and rotating them at a fixed position,
The laser light irradiation position on the surface of the rolling element 5 is continuously changed by moving the rolling element 5 in a predetermined pitch at a time.
【００２７】ところで、窒化けい素系のセラミックス材
は、焼結によって窒化けい素特有の色むらが表面に発生
するので、見栄えが悪いだけでなく、検査精度が低下す
る。そこで、この実施形態では、検査対象とするセラミ
ックス製転動体５の明度については、日本工業規格（Ｊ
ＩＳ）で定められる三属性の色の表示方法（ＪＩＳ・Ｚ
８７２１）における明度で７．２０以下、好ましくは
７．１５以下に設定することにより、転動体５表面を全
体に黒っぽい色にすることで、前記色むらを無くすよう
にしている。なお、セラミックス材の色合いは、上述し
た焼結助剤のひとつである酸化チタンまたは上述の焼結
助剤以外のタングステン酸化物などの含有量により調節
することができる。By the way, since the silicon nitride ceramic material causes color unevenness peculiar to silicon nitride due to sintering, not only does it look bad, but also the inspection accuracy deteriorates. Therefore, in this embodiment, regarding the brightness of the ceramic rolling element 5 to be inspected, the Japanese Industrial Standard (J
Display method of colors of three attributes defined by (IS) (JIS / Z
By setting the brightness of 8721) to 7.20 or less, preferably 7.15 or less, the entire surface of the rolling element 5 is made a blackish color, thereby eliminating the color unevenness. The color of the ceramic material can be adjusted by the content of titanium oxide which is one of the above-mentioned sintering aids or tungsten oxide other than the above-mentioned sintering aids.
【００２８】このような明度に設定すると、光の反射率
が低くなるので、前記反射率の低いセラミックス製転動
体５からの反射光を受光部２に対して入射させやすくす
るために、レーザ光源１１から放出するレーザ光の波長
を６１０〜７５０ｎｍ、好ましくは６５０〜６９０ｎ
ｍ、より好ましくは６８５ｎｍに設定する。これによ
り、受光素子２１の分光感度特性のピーク付近で受光で
きるため、光電流に変換する効率が高くなり、検査精度
の向上が見込める。When the lightness is set to such a value, the reflectance of light becomes low. Therefore, in order to make the reflected light from the ceramic rolling element 5 having a low reflectance easy to enter the light receiving portion 2, the laser light source is used. The wavelength of the laser light emitted from 11 is 610 to 750 nm, preferably 650 to 690 n
m, more preferably 685 nm. As a result, light can be received in the vicinity of the peak of the spectral sensitivity characteristic of the light receiving element 21, so that the efficiency of conversion into photocurrent is increased and the inspection accuracy can be expected to be improved.
【００２９】ちなみに、波長６１０〜７５０ｎｍのレー
ザ光を得るには、レーザ光源１１として半導体レーザを
用い、それの出力を５〜５０ｍＷに設定すればよく、ま
た、波長６８５ｎｍのレーザ光を得るには、出力を２０
ｍＷに設定すればよい。Incidentally, in order to obtain a laser beam having a wavelength of 610 to 750 nm, a semiconductor laser may be used as the laser light source 11 and its output may be set to 5 to 50 mW. Further, in order to obtain a laser beam having a wavelength of 685 nm. , Output 20
It may be set to mW.
【００３０】このような波長のレーザ光を用いれば、上
記明度に設定したセラミックス製転動体５からの反射光
の受光強度が高められることになる他、転動体５に対す
る照射位置を目視確認しやすくなるので、照射位置の位
置決め精度が向上することになる。また、上記明度に設
定したセラミックス製転動体５は、全体に黒っぽい色と
なり、色調が安定して色むらが実質的にないので、表面
からの反射光の強度が色むらによって強弱変化せずに済
む。また、レーザ光源１１として上述した半導体レーザ
を用いることにより、傷ありの場合と傷なしの場合とで
反射光の強度の差を広げることができる。これらの相乗
作用により、転動体５の傷の有無判定を行うための信号
処理が簡単に行えるなど、合否判定の検査精度が向上す
る結果となる。By using the laser light having such a wavelength, the intensity of the reflected light from the ceramic rolling element 5 set to the above-mentioned brightness can be increased, and the irradiation position on the rolling element 5 can be easily visually confirmed. Therefore, the positioning accuracy of the irradiation position is improved. Further, the ceramic rolling element 5 set to the above-mentioned brightness has a blackish color as a whole, and the color tone is stable and there is substantially no color unevenness. I'm done. Further, by using the above-described semiconductor laser as the laser light source 11, it is possible to widen the difference in the intensity of the reflected light between the case with a scratch and the case without a scratch. By these synergistic effects, the signal processing for determining the presence / absence of scratches on the rolling elements 5 can be easily performed, and the inspection accuracy of the pass / fail determination is improved.
【００３１】[0031]
【発明の効果】請求項１に係る検査方法、および請求項
２，３に係る検査装置では、検査対象とするセラミック
ス製転動体の明度を特定したうえで、検査に用いるレー
ザ光の波長を特定しているから、傷などの外観性状を正
確に認識することができ、傷の有無に基づく合否判定の
確立を高めることができる。したがって、検査による合
否の誤判定による不良品発生率を低下させるうえで有利
となり、製品歩留まりの向上に貢献できる。In the inspection method according to the first aspect and the inspection apparatus according to the second and third aspects, the lightness of the ceramic rolling element to be inspected is specified, and then the wavelength of the laser beam used for the inspection is specified. Therefore, it is possible to accurately recognize appearance properties such as scratches, and it is possible to enhance the establishment of the pass / fail judgment based on the presence or absence of scratches. Therefore, it is advantageous in reducing the defective product generation rate due to erroneous determination of pass / fail by inspection, and can contribute to improvement of product yield.
【図１】本発明の一実施形態に係るセラミックス製転動
体の検査装置を示す側面図FIG. 1 is a side view showing a ceramic rolling element inspection device according to an embodiment of the present invention.
【図２】図１の検査装置の斜視図FIG. 2 is a perspective view of the inspection device shown in FIG.
【図３】図１の検査装置の平面図FIG. 3 is a plan view of the inspection device of FIG.
【図４】セラミックス製転動体の使用例としての玉軸受
の上半分を示す縦断面図FIG. 4 is a vertical sectional view showing an upper half of a ball bearing as an example of use of a ceramic rolling element.
１ 投光部 １１ レーザ光源 １２ 光整形器 ２ 受光部 ２２ 受光素子 ３ 処理装置 ４ 送り装置 ５ セラミックス製転動体 ６ 玉軸受 1 Projector 11 Laser light source 12 Optical shaper 2 Light receiving part 22 Light receiving element 3 processing equipment 4 feeder 5 Ceramic rolling elements 6 ball bearings
───────────────────────────────────────────────────── フロントページの続き Ｆターム(参考） 2G051 AA90 AB02 BA08 BA10 BB17 CA01 CB01 DA05 EA16 3J101 AA02 BA10 EA44 ─────────────────────────────────────────────────── ─── Continued front page F term (reference) 2G051 AA90 AB02 BA08 BA10 BB17 CA01 CB01 DA05 EA16 3J101 AA02 BA10 EA44
Claims (3)
転動体に対してレーザ光を照射し、当該転動体から反射
した反射光に基づいてセラミックス製転動体の外観を検
査する方法であって、 検査対象となる前記セラミックス製転動体について、日
本工業規格（ＪＩＳ）で定められる三属性の色の表示方
法（ＪＩＳ・Ｚ８７２１）における明度が、７．２０以
下に設定されているとともに、前記レーザ光の波長が、
６１０〜７５０ｎｍに設定されていることを特徴とする
セラミックス製転動体の検査方法。1. A method for irradiating a ceramic rolling element mainly composed of silicon nitride with laser light, and inspecting the appearance of the ceramic rolling element based on the reflected light reflected from the rolling element. Regarding the ceramic rolling element to be inspected, the lightness in the method of displaying colors of three attributes (JIS / Z8721) defined by Japanese Industrial Standards (JIS) is set to 7.20 or less, and the laser is used. The wavelength of light is
The method for inspecting a ceramic rolling element is characterized in that it is set to 610 to 750 nm.
転動体に対してレーザ光を照射するレーザ光源と、前記
転動体から反射した反射光を受光する受光部と、受光素
子で受光した反射光に基づいてセラミックス製転動体の
外観を認識する処理部とを含み、 検査対象となる前記セラミックス製転動体について、日
本工業規格（ＪＩＳ）で定められる三属性の色の表示方
法（ＪＩＳ・Ｚ８７２１）における明度が、７．２０以
下に設定されているとともに、前記レーザ光源が、６１
０〜７５０ｎｍのレーザ光を発生するものであることを
特徴とするセラミックス製転動体の検査装置。2. A laser light source for irradiating a ceramic rolling element mainly made of silicon nitride with laser light, a light receiving section for receiving reflected light reflected from the rolling element, and a reflection received by a light receiving element. A method of displaying colors of three attributes defined by the Japanese Industrial Standards (JIS) for the ceramic rolling element to be inspected, including a processing unit for recognizing the appearance of the ceramic rolling element based on light (JIS Z8721). ) Is set to 7.20 or less, and the laser light source is set to 61.
An inspection device for a ceramic rolling element, which is characterized by generating a laser beam of 0 to 750 nm.
置において、 前記レーザ光源として、出力５〜５０ｍＷの半導体レー
ザを用いることにより、前記波長のレーザ光を得ること
を特徴とするセラミックス製転動体の検査装置。3. The ceramic rolling element inspection device according to claim 2, wherein a laser beam having the wavelength is obtained by using a semiconductor laser having an output of 5 to 50 mW as the laser light source. Moving object inspection device.
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|---|---|---|---|
| JP2002034480A JP3905394B2 (en) | 2002-02-12 | 2002-02-12 | Inspection method and inspection apparatus for ceramic rolling element |
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| JP2002034480A JP3905394B2 (en) | 2002-02-12 | 2002-02-12 | Inspection method and inspection apparatus for ceramic rolling element |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014106232A (en) * | 2012-11-26 | 2014-06-09 | Dr Johannes Heidenhain Gmbh | Optical positioning device |
| WO2016158204A1 (en) * | 2015-03-30 | 2016-10-06 | Ntn株式会社 | Rotation method, inspection method, bearing manufacturing method, bearing, rotation device, and inspection device |
| JP2016188834A (en) * | 2015-03-30 | 2016-11-04 | Ntn株式会社 | Rotation method, inspection method, method of manufacturing bearing, and bearing |
-
2002
- 2002-02-12 JP JP2002034480A patent/JP3905394B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014106232A (en) * | 2012-11-26 | 2014-06-09 | Dr Johannes Heidenhain Gmbh | Optical positioning device |
| WO2016158204A1 (en) * | 2015-03-30 | 2016-10-06 | Ntn株式会社 | Rotation method, inspection method, bearing manufacturing method, bearing, rotation device, and inspection device |
| JP2016188834A (en) * | 2015-03-30 | 2016-11-04 | Ntn株式会社 | Rotation method, inspection method, method of manufacturing bearing, and bearing |
| EP3279644A4 (en) * | 2015-03-30 | 2018-08-22 | NTN Corporation | Rotation method, inspection method, bearing manufacturing method, bearing, rotation device, and inspection device |
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| Publication number | Publication date |
|---|---|
| JP3905394B2 (en) | 2007-04-18 |
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